EP3914895A1 - Dispositif pour la détection de particules dans une zone guidant un fluide au moyen du principe de l'incandescence induite par laser - Google Patents

Dispositif pour la détection de particules dans une zone guidant un fluide au moyen du principe de l'incandescence induite par laser

Info

Publication number
EP3914895A1
EP3914895A1 EP19809059.9A EP19809059A EP3914895A1 EP 3914895 A1 EP3914895 A1 EP 3914895A1 EP 19809059 A EP19809059 A EP 19809059A EP 3914895 A1 EP3914895 A1 EP 3914895A1
Authority
EP
European Patent Office
Prior art keywords
light guide
laser
light
guide device
laser light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19809059.9A
Other languages
German (de)
English (en)
Inventor
Christian Doering
Radoslav Rusanov
Michael Brozio
Sonja Knies
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP3914895A1 publication Critical patent/EP3914895A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/06Investigating concentration of particle suspensions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Electro-optical investigation, e.g. flow cytometers
    • G01N15/1434Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Electro-optical investigation, e.g. flow cytometers
    • G01N15/1456Electro-optical investigation, e.g. flow cytometers without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
    • G01N15/1459Electro-optical investigation, e.g. flow cytometers without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals the analysis being performed on a sample stream
    • G01N15/075
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N2015/0038Investigating nanoparticles
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N2015/0042Investigating dispersion of solids
    • G01N2015/0046Investigating dispersion of solids in gas, e.g. smoke
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Electro-optical investigation, e.g. flow cytometers
    • G01N2015/1486Counting the particles

Definitions

  • the invention relates to a device for the detection of particles in a fluid-carrying area using the principle of laser-induced
  • DE 10 2017 207 402 A1 discloses a device for the detection of particles in a fluid-carrying region using the principle of laser-induced incandescence in the form of a particle sensor.
  • Particles present in an exhaust gas area for example soot particles, are heated to several thousand degrees Celsius with a laser light focused on a laser light spot, so that they emit significant heat or temperature radiation. This thermally induced light emission of the particles is measured with a light detector.
  • the device according to the invention is based on the detection of particles in a fluid using the principle of laser-induced incandescence (LII). It should be pointed out at this point that particulates in particular soot particles and as fluids in particular the exhaust gas
  • Incinerator or internal combustion engine come into question. Basically, however, the device is generally suitable for the detection of particles and aerosols in any fluid. The concept enables both Determination of the mass (mg / m 3 or mg / km) and the number concentration (particles / m 3 or particles / km) of the particles. Also a measurement of the
  • the device can be used, for example, to monitor the condition of a particle filter in gasoline or diesel vehicles. It is also conceivable to use the device for other scenarios and areas of application (e.g. in portable emission monitoring systems, measurement of indoor air quality, emissions from
  • a particle is initially bundled with sufficient intensity using laser light, which emanates from a laser and is preferably bundled with a sufficiently high intensity in a laser light spot, that is to say a volume range with the smallest dimensions in the pm or nm range of the laser light is heated to several thousand degrees.
  • this hot particle emits a characteristic temperature radiation (incandescence or glow emission), which as
  • Measurement signal is used and received with a detector.
  • an optical element for example in the form of a focusing lens arranged in the beam path of the laser is used, which is designed and set up to bundle the laser light emanating from the laser in the very small laser light spot.
  • a focus diameter e.g. around 10 pm it can be assumed that at any given time only one particle will ever
  • Laser light spot flies through (intrinsic single particle detectability) if a particle concentration of approximately 10 1 ° -10 13 / m 3 is used as a basis.
  • the detector is set up and arranged such that it detects the temperature radiation emanating from the laser light spot.
  • Inexpensive semiconductor laser diodes can be used as lasers.
  • the temperature radiation can be detected, for example, using a multi-pixel photon counter (MPPC) or a silicon photon multiplier (SiPM).
  • MPPC multi-pixel photon counter
  • SiPM silicon photon multiplier
  • the device according to the invention comprises in particular: a laser source, a device for generating a laser light spot in the fluid-guiding region, and a detector for detecting a temperature radiation emanating from a particle located in the laser light spot. Furthermore, the device comprises at least one first light guide device and at least one second light guide device.
  • Such light guide devices include Usually transparent components such as fibers, tubes or rods that transport light over short or long distances. The light guide is achieved by reflection at the interface of the light guide devices either by total reflection due to a lower refractive index of the medium surrounding the light guide or by mirroring the interface.
  • the first light guide device is arranged between the laser source and the laser light spot in such a way that it guides the laser light and not the thermal radiation, at least in certain areas, and the second
  • the light guide device is arranged between the laser light spot and the detector in such a way that it, in particular, at least in regions
  • Coupling of temperature radiation into the first light guide device and for coupling laser light into the second light guide device can occur. Nevertheless, the laser light is largely conducted through the first light guide device and the thermal radiation is largely conducted through the second light guide device.
  • the invention also allows the temperature radiation to be “collected” better, as a result of which the signal noise (“signal-to-noise ratio” or “SNR”) is reduced. Due to the high conduction efficiency of light guide devices, the sensitive optical elements of the device, for example the
  • the laser source and the detector are arranged relatively far away from the region carrying the thermally and often also chemically highly stressed fluid, as a result of which the mechanical and thermal stability of the device is improved.
  • the first light guide device and the second light guide device are arranged at least in regions coaxially to one another. Such a coaxial arrangement saves space and allows a simple and flexible arrangement of the two light guide devices.
  • the first light guide device which conducts the laser light is arranged radially on the inside and the second light guide device which conducts the thermal radiation is arranged radially on the outside.
  • Temperature radiation emanating from a particle in the laser light spot is made possible, and at the same time the formation of an at least essentially point-shaped laser light spot is facilitated by the inner first light guide device.
  • the total light-guiding cross-section of the first light-guiding device is smaller than the total light-guiding cross-section of the second light-guiding device. This takes into account the fact that the intensity of the temperature radiation emitted by a particle located in the laser light spot and which can be coupled into the second light guide device is usually considerably lower than the intensity of the laser light to be transported by the first light guide device.
  • Thermal radiation is thus provided with a larger cable cross-section and thus also has a favorable influence on the signal noise.
  • At least one of the two light guide devices comprises a bundle of individual light guides.
  • the SCU sensor control unit
  • the laser source and the detector and possibly also further electronic elements are arranged; in the most favorable case, any so-called “Free beam optics ”, for example beam splitters etc., can be dispensed with. This considerably reduces the set-up effort, the so-called “adjustment”.
  • the light-guiding cross section of an individual light guide of the second light guide device is larger than the light-guiding cross section of the light guide of the first light guide device.
  • each light guide of the bundle of light guides has its own cladding. This increases the mechanical stability and the efficiency of the light guide.
  • end regions of the two light guide devices which point away from the laser light spot are spaced apart from one another, the end region of the first light guide device of the laser source and the end region of the second light guide device Detector is assigned.
  • the end region of the second light guide device pointing away from the laser light spot directs the temperature radiation directly to the detector without the interposition of a lens. This saves costs again and becomes mechanical again
  • the light guide device and the second light guide device are designed as a coaxial and preferably jointly produced (“drawn”) double clad fiber.
  • a double clad fiber is a glass fiber that consists of at least a core glass and a cladding glass, the cladding glass enclosing the core glass.
  • DCF double clad fiber
  • the first light guide device is preferably formed by the core glass and the second light guide device by the cladding glass.
  • Such a double clad fiber is extremely robust and leads to a simplified topology of the device, since ultimately only one
  • one-piece fiber is used.
  • at least one first lens is arranged between an end of the two light guide devices pointing towards the laser light spot and the laser light spot, which lens
  • Coupled temperature radiation in the second light guide device Such a lens (“coupling-in and coupling-out lens”) thus ensures both the coupling out of the laser light and the coupling in of the thermal radiation, thereby reducing the costs and the required installation space.
  • At least one second lens is arranged between the first lens and the laser light spot, which has a larger diameter than the first lens and is preferably designed as an aspherical lens.
  • Light guide devices are realized by a single, one-piece or multi-piece glass body. As a result, the mechanical robustness of the device is again significantly improved. It should be pointed out here that the realization of the optical elements by the said glass body represents an independent invention that can be claimed independently of the realization of the light transport by the light guide devices mentioned above.
  • Figure 1 is a schematic representation of the structure of a device for
  • Figure 2 is an enlarged view of the two light guide devices of Figure 1;
  • Figure 3 shows a section through the two light guide devices of Figure 2;
  • Figure 4 is a further schematic representation of the device of Figure 1;
  • Figure 5 is a representation similar to Figure 4 of a modified
  • FIG. 6 shows a schematic section through an alternative embodiment of optical components of the device from FIG. 1;
  • Figure 8 is a schematic side view of the light guide devices of
  • FIG. 9 is a partial section through the light guide devices of the figures
  • Figure 10 is a representation similar to Figure 9 a modified
  • FIG. 1 shows a possible embodiment of a device for the detection of particles in a fluid-carrying region using the principle of laser-induced incandescence, specifically in the form of a particle sensor 10.
  • the laser 12 can in particular have a laser diode, which is very inexpensive.
  • the laser light 10 initially becomes one through a lens 16 (“collimation lens”) parallel beam formed, which passes through a beam splitter 18, for example in the form of a beam splitter or a dichroic mirror. From there it arrives in a manner to be explained below
  • a laser light spot 22 becomes a volume element with very small
  • High-intensity laser light 14 can strike a particle 24 present in the laser light spot 22, for example a soot particle in an exhaust gas stream 36 of an internal combustion engine.
  • the intensity of the laser light 14 in the laser light spot 22 is so high that the energy of the laser light 14 absorbed by the particle 24 heats the particle 24 to several thousand degrees Celsius (only in the volume of the laser light spot 22 does the intensity of the laser light 14 reach that for laser-induced incandescence (LI I) necessary high values).
  • LI I laser-induced incandescence
  • Preferred direction significant temperature radiation 26 also referred to as LII light. Part of the temperature radiation 26 is therefore also
  • the temperature radiation 26 is, for example, in the near infrared and visible spectral range, but is not restricted to this spectral range.
  • the laser 12, the lens 16, the beam splitter 18 and the focusing lens 20 form a device 27 for generating the laser light spot 22.
  • the temperature radiation 26 of a particle 24 excited in the laser light spot 22 by the laser light 14 in turn passes through the focusing lens 20 back to the beam splitter 18, where it is deflected by 90 °, passes through a focusing lens 28 and through a filter 30 (this is not mandatory present) arrives at a detector 32.
  • the filter 30 is designed so that it
  • Wavelengths of the laser light 14 are at least largely filtered out, which is also radiated back to a small extent.
  • the interfering background is thus reduced by the filter 30. It is also conceivable to use a simple edge filter. This improves the signal-to-noise ratio.
  • the dimensions of the laser light spot 22 are preferably in the range of a few pm, in particular in the range of at most 100-200 pm, so that particles 24 passing through the laser light spot 22 are excited to emit evaluable radiation powers. As a result, it can be assumed that there is usually, depending on the gas concentration, at most one particle 24 in the laser light spot 22 and that a momentary one
  • Output signal 34 of the particle sensor 10 originates only from this at most one particle 24.
  • the output signal 34 is generated by the detector 32, which is arranged in the particle sensor 10 in such a way that it detects radiation 26, in particular temperature radiation, emanating from the particles 24 passing through the laser light spot 22.
  • the detector 32 preferably comprises a multi-pixel photon counter (MPPC) or a silicon photon multiplier (SiPM) or a SPAD diode (single-photon avalanche diode), which detects the temperature radiation 26 and this in the present case generated digital output signal 34 as an example.
  • MPPC multi-pixel photon counter
  • SiPM silicon photon multiplier
  • SPAD diode single-photon avalanche diode
  • the laser 12 is modulated or switched on and off (duty cycle ⁇ 100%).
  • the laser 12 is a CW laser. This enables the use of inexpensive semiconductor laser elements (laser diodes), which makes the complete particle sensor 10 cheaper and greatly simplifies the control of the laser module 12 and the evaluation of the output signal 34.
  • the use of pulsed lasers is not
  • exhaust gas is also symbolized by an arrow 36, as is generated, for example, in a combustion process, for example in the exhaust system of an internal combustion engine (diesel or gasoline) of a motor vehicle.
  • the particle sensor 10 has an arrangement of an outer protective tube 38 and an inner protective tube 40.
  • the axes of the protective tubes 38, 40 are aligned transversely to the flow of the exhaust gas 36.
  • the inner protective tube 40 protrudes in the direction of the axes beyond the outer protective tube 38 and into the flowing exhaust gas 36.
  • the outer protective tube 38 projects beyond the inner protective tube 40.
  • the clear width of the outer protective tube 38 is preferably so much larger than the outer diameter of the inner protective tube 40 that there is a first and present between the two protective tubes 38, 40 results in approximately circular flow cross-section.
  • the clear width of the inner protective tube 40 forms a second and in the present case circular flow cross section.
  • Flow cross section enters the arrangement of the two protective tubes 38, 40, then changes its direction at the end of the protective tubes 38, 40 facing away from the exhaust gas 36, enters the inner protective tube 40 and is sucked out of this by the exhaust gas 36 flowing past (arrows with the reference symbol 42 ). This results in a laminar flow in the inner protective tube 40.
  • This arrangement of protective tubes 38, 40 is attached transversely to the flow direction of the exhaust gas 36 on or in an exhaust pipe (not shown in FIG. 1).
  • the laser light spot 22 is located inside the inner protective tube 40.
  • the particle sensor 10 preferably has a first part 44 (protective tubes 38 and 40) which is exposed to the exhaust gas 36 and a second part 46 which is not exposed to the exhaust gas 36 and which contains the optical and electronic components of the particle sensor 10.
  • Part 44 is also referred to as the "sensor head”, part 46 also as the “SCU” ("sensor control unit").
  • the two parts 44 and 46 are by a first light guide device 48 and a second
  • Light guide device 50 connected to one another, which in the present case are arranged coaxially to one another, see also FIG. 2.
  • the first light guide device 48 is arranged radially on the inside and the second light guide device 50 is arranged radially on the outside.
  • the first light guide device 48 is arranged in such a way that it guides the laser light 14 from the second part 46 to the first part 44 of the particle sensor 10, and the second light guide device 50 is arranged in such a way that it particularly temperature radiation 26 leads from the first part 44 to the second part 46.
  • Light guide devices 48 and 50 arranged a lens 52, which is also used to decouple the temperature radiation 26 from the second light guide device 50 and forward the temperature radiation 26 to the beam splitter 18.
  • a coupling and decoupling lens 54 (also called a “collimation lens”) is arranged in the first part 44 between the two light guide devices 48 and 50 and the focusing lens 20, which also for coupling the temperature radiation 26 serves in the second light guide device 50.
  • the coupling and decoupling lens 54 thus forms a first lens, whereas the focusing lens 20 forms a second lens.
  • the two light guide devices 48 and 50 can be designed as a so-called “double clad fiber” 55.
  • a double-clad fiber is a glass fiber, which in the present case consists, for example, of a radially inner core glass 56 and a radially outer cladding glass 58, the cladding glass 58, which has an annular cross section in this respect, enclosing the core glass 56.
  • the two glasses 56 and 58 can be designed as a so-called “double clad fiber” 55.
  • DCF double-clad fiber
  • the first light guide device 48 is formed by the core glass 56 and the second light guide device 50 by the cladding glass 58. It can be seen from FIG. 3 that the overall light-guiding cross-section of the first light-guiding device 48 is significantly smaller than the light-guiding overall cross-section of the second light-guiding device 50.
  • the first light-guiding device 48 has a diameter in the range 3-15 pm, for example, and the second light-guiding device 50 has, for example
  • FIG. 4 shows the arrangement of the optical components in the beam path from the laser 12 to the first light guide device 48 and in the beam path from the second light guide device 50 to the detector 32 in the SCU 46 (“sensor control unit”).
  • the SCU is divided into two sections, namely a first section 62, in which the said optical components and the laser 12 and the detector 32 are arranged, and a second section 64, in which one for the control of the laser 12 and the processing of the output signal 34 of the detector 32 required electronics 66 is arranged.
  • the first lens 54 (single and
  • Decoupling lens and the second lens 20 are approximately the same size.
  • the focusing lens 20 is designed with a considerably larger diameter than the coupling-in and coupling-out lens 54, and it is preferably designed as an aspherical focusing lens 20. With such an embodiment, it would also be possible to completely dispense with the coupling and decoupling lens 54.
  • FIG. 6 shows an alternative embodiment of the optical elements 16, 18, 28 and 52 in the region of the laser 12 and detector 32.
  • the said optical elements 16, 18, 28 and 52 are realized by a single glass body 68, which in the present case is multi-piece . In an embodiment not shown, the glass body 68 could also be in one piece.
  • the glass body 68 comprises three partial bodies 68a-c.
  • the partial body 68a comprises, on the left towards the detector 32, a section which is convex when viewed from the outside and which forms the focusing lens 28.
  • the glass body 68a has a straight incline, which forms the beam splitter 18.
  • the partial body 68b comprises, toward the laser 12, a section which is convex when viewed from the outside and which forms the collimation lens 16.
  • the partial body 68c has a section which is convex as seen from the beam splitter 18 and which contains the inputs and
  • Decoupling lens 52 forms.
  • An inner area 68d between the partial bodies 68a-c is hollow, so that the one required for refraction or reflection
  • the partial bodies 68a-c form the glass body 68 which is approximately square overall in the sectional view of FIG. 6.
  • FIGS 7-10 show a device 10 with an alternative
  • Light guide device 50 As can be seen from Figure 7, the two are
  • Light guide devices 48 and 50 are formed as bundles of individual glass fiber light guides 70ag.
  • the first light guide device 48 is formed by the light guide 70a central in the cross-sectional view of FIG. 7, whereas the second light guide device 50 is formed by the light guides 70b-g arranged uniformly distributed in the circumferential direction around the central light guide 70a.
  • Each light guide 70a-g has a glass core 72 and a cladding 74, the corresponding reference numerals in FIG. 7 being shown only for the light guide 70c for reasons of clarity.
  • the inner centric light guide 70a has a significantly smaller diameter than the outer light guides 70b-g.
  • the inner centric light guide 70a has a diameter in the range of approximately 3-15 pm, whereas the outer light guides 70b-g have a diameter in the range of approximately 50-350 pm.
  • the inner light guide 70a serves to guide the laser light 14 from the laser 12 towards
  • Laser light spot 22 whereas the outer light guides 70b-g Conduct temperature radiation 26 from the laser light spot 22 in the direction of the detector 32.
  • the bundle of individual light guides 70a-g is dissolved in the area of the laser 12 and the detector 32 to the extent that an end region 76 of the central light guide 70a is detached from the bundle of light guides 70a-g and at a distance from them other light guides 70b-g is guided to the laser 12, so that this end region 76 is assigned directly to the laser 12 and only to the laser 12.
  • the end region 78 of the remaining bundle of light guides 70b-g is guided at a corresponding distance from the end region 76 to the detector 32, so that this end region 78 is assigned directly to the detector 32 and only to the detector 32. It can also be seen from FIG.
  • any free-beam optics for example beam splitter, focusing lens, etc.
  • the temperature radiation 26 emerges at the ends of the light guides 70b-g facing the detector 32, and the
  • Thermal radiation 26 then reaches detector 32 directly via filter 30.
  • FIGS. 9 and 10 differ with regard to the design of the sensor head 44.
  • the coupling-in and coupling-out lens 54 is significantly smaller than the focusing lens 20, which directs the laser light 14 onto the laser light spot 22 focused.
  • the coupling-in and coupling-out lens 54 can be realized as an aspherical lens, as a result of which better coupling-in and coupling-out is possible. In principle, it would even be conceivable that the coupling and uncoupling lens 54 is dispensed with entirely. Similar to FIG. 6, in the configuration of the sensor head 44 from FIG. 10, the coupling and decoupling lenses 54 and

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  • Physics & Mathematics (AREA)
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Abstract

Dispositif (10) pour la détection de particules (24) dans une zone (40) guidant un fluide (36) au moyen du principe de l'incandescence induite par laser, ledit dispositif comprenant : une source laser (12), une unité (27) conçue pour générer un spot laser (22) dans la zone (40) guidant le fluide, et un détecteur (32) conçu pour détecter un rayonnement thermique (26) émis par une particule (24) se trouvant dans le spot laser (22). Selon l'invention, le dispositif (10) comprend au moins une première unité de guidage de lumière (48) et au moins une deuxième unité de guidage de lumière (50), la première unité de guidage de lumière (48) étant disposée entre la source laser (12) et le spot laser (22) de sorte qu'elle guide la lumière laser (14) au moins dans certaines zones, et la deuxième unité de guidage de lumière (50) étant disposée entre le spot laser (22) et le détecteur (32) de sorte qu'elle guide le rayonnement thermique (26) au moins dans certaines zones.
EP19809059.9A 2019-01-23 2019-11-25 Dispositif pour la détection de particules dans une zone guidant un fluide au moyen du principe de l'incandescence induite par laser Withdrawn EP3914895A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102019200771.6A DE102019200771A1 (de) 2019-01-23 2019-01-23 Vorrichtung zur Detektion von Partikeln in einem Fluid führenden Bereich unter Verwendung des Prinzips der laserinduzierten Inkandeszenz
PCT/EP2019/082351 WO2020151852A1 (fr) 2019-01-23 2019-11-25 Dispositif pour la détection de particules dans une zone guidant un fluide au moyen du principe de l'incandescence induite par laser

Publications (1)

Publication Number Publication Date
EP3914895A1 true EP3914895A1 (fr) 2021-12-01

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EP19809059.9A Withdrawn EP3914895A1 (fr) 2019-01-23 2019-11-25 Dispositif pour la détection de particules dans une zone guidant un fluide au moyen du principe de l'incandescence induite par laser

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EP (1) EP3914895A1 (fr)
DE (1) DE102019200771A1 (fr)
WO (1) WO2020151852A1 (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022113774A1 (de) 2022-05-31 2023-11-30 CiS Forschungsinstitut für Mikrosensorik GmbH Partikelsensor und Verfahren zur Detektion von Partikeln

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Publication number Priority date Publication date Assignee Title
US9952033B2 (en) * 2014-02-14 2018-04-24 Palo Alto Research Center Incorporated Spatial modulation of light to determine object length
DE102017207402A1 (de) 2017-05-03 2018-11-08 Robert Bosch Gmbh Optischer Rußpartikelsensor für Kraftfahrzeuge

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WO2020151852A1 (fr) 2020-07-30

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