Classifications

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  • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
  • H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
  • H01L33/50—Wavelength conversion elements
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  • H01L33/0004—Devices characterised by their operation
  • H01L33/002—Devices characterised by their operation having heterojunctions or graded gap
  • H01L33/0025—Devices characterised by their operation having heterojunctions or graded gap comprising only AIIIBV compounds
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  • H01L33/0004—Devices characterised by their operation
  • H01L33/0041—Devices characterised by their operation characterised by field-effect operation
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  • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
  • H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
  • H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
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  • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
  • H01L33/08—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
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  • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
  • H01L33/16—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous
  • H01L33/18—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous within the light emitting region
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  • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
  • H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
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  • H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
  • H01L33/40—Materials therefor
  • H01L33/42—Transparent materials
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  • H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
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  • H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
  • H01L33/50—Wavelength conversion elements
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  • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
  • H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
  • H01L33/50—Wavelength conversion elements
  • H01L33/505—Wavelength conversion elements characterised by the shape, e.g. plate or foil
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  • H01L2933/0008—Processes
  • H01L2933/0033—Processes relating to semiconductor body packages
  • H01L2933/0041—Processes relating to semiconductor body packages relating to wavelength conversion elements

Definitions

• the present invention relates to a method for selective filling of cavities.
• the present invention relates to a method of selective filling, with a filling material, of cavities housing, at their bottom, light-emitting diodes.
• the filling method according to the present invention is advantageously implemented for the manufacture of color pixels of displays or projection devices.
• the filling process is advantageously implemented for the manufacture of electronic, optoelectronic, electromechanical (MEMS) or opto-electromechanical (MOEMS) devices.
• MEMS electronic, optoelectronic, electromechanical
• MOEMS opto-electromechanical
• the methods of manufacturing microelectronic, optoelectronic, electromechanical or even optoelectromechanical devices can implement filling of cavities with a filling liquid.
• Such a filling can be, according to a first technique known to those skilled in the art, a collective filling of a plurality of cavities.
• collective filling can include spreading the filling liquid on one side, called the front side, at which the cavities open out, in particular using a spinner.
• this technique does not make it possible to distinguish the cavities from one another, and for example to selectively fill the cavities with different filling liquids.
• a display device may include light-emitting diodes (“LED” or “Light Emiting Diode” according to Anglo-Saxon terminology), and in particular LEDs arranged to produce several colors.
• LED light-emitting diodes
• LEDs arranged to produce several colors.
• the LEDs can in particular be LEDs with nanowires such as those described in the document [1] cited at the end of the description, and represented in FIG. 1.
• the LEDs are formed at the bottom of cavities C emerging at a face, called the front face, of a support substrate.
• the bottom of each cavity is surmounted by a wall P, called the side wall, and delimits with the latter a volume of cavity V.
• the cavity volume is then filled with a material, called encapsulation material M, charged with phosphors configured to convert the electromagnetic radiation capable of being emitted by an LED into electromagnetic radiation of another wavelength.
• encapsulation material M a material, called encapsulation material M, charged with phosphors configured to convert the electromagnetic radiation capable of being emitted by an LED into electromagnetic radiation of another wavelength.
• the cavities provided with their LEDs are arranged in groups of cavities to form pixels.
• the capacity of a given pixel to display different colors is then obtained by filling each of the cavities of said pixel with an encapsulation material. loaded with phosphors having different light conversion properties from one cavity to another.
• document [2] proposes to adapt the geometry of the cavities, and in particular implements cavities of different sizes.
• a liquid phase material such as a molten phase change material (MCP) spread over the surface on which the cavities open, will preferably fill the smallest cavities and in particular the first cavities.
• MCP molten phase change material
• An object of the present invention is therefore to propose a process for selective filling of cavities, with a filling liquid, which does not penalize the production rates.
• Another object of the present invention is also to propose a method for selective filling of cavities, with a filling liquid, which is independent of the size and / or of the geometric shape of the cavities.
• Another object of the present invention is also to provide a method of selective filling, with a filling liquid, of small cavities, and in particular of cavities having a larger opening less than 20 micrometers.
• Another object of the present invention is also to propose a method for selective filling, with a filling liquid, of cavities which is simpler to implement than the methods known from the prior art.
• the aims of the present invention are, at least in part, achieved by a selective filling process, with a filling liquid, of a cavity, called first cavity, of at least one group of cavities each opening at the level of a face, called the front face, of a substrate, each of the cavities comprising an internal surface, the method comprising the following steps:
• a processing step intended to modify the surface energy of the internal surface of the first cavity, called the first surface, or the surface energy of the internal surfaces, called the second surfaces, of the cavities other than the first cavity, known as second cavities, so that the first surface has a first surface energy and the second surfaces a second surface energy different from the first energy;
• step b) thus leading to selective filling, by the filling liquid , of the first cavity with regard to the second cavities.
• the surface energy of a given surface conditions the capacity of a liquid to wet said surface.
• the ability of a liquid to wet the surface can in particular be obtained by measuring a contact angle when a drop of said liquid rests on the surface considered (a method of measuring a contact angle is described in the document [4] cited at the end of the description).
• the larger the contact angle the more the surface on which the liquid rests has a repulsive effect on said liquid.
• the smaller the contact angle the more the surface on which the liquid rests has an attractive effect on said liquid.
• the filling liquid is an aqueous phase
• a surface exerting an attractive effect on said liquid is called a hydrophilic surface, while otherwise, it is said to be a hydrophobic surface.
• the filling method according to the present invention makes it possible to selectively fill a first cavity from a group of cavities regardless of shape and / or size.
• the cavities can be identical.
• the method according to the present invention can advantageously be implemented to selectively and collectively fill each of the first cavities with a plurality of groups of cavities arranged on the same substrate.
• the production rates are not penalized, and therefore remain compatible with the requirements of the industry.
• the method according to the present invention is not sensitive to the size of the particles, so that it can be envisaged to fill cavities of very small size, and in particular cavities of size less than a few tens of micrometers. , advantageously less than 10 micrometers, even more advantageously less than 5 micrometers, for example equal to 1 micrometer.
• size of a cavity means the largest dimension of its opening.
• the processing step a) comprises a plasma treatment or a treatment with ultraviolet radiation selectively executed on the first surface or on the second surfaces.
• step a) is executed selectively on the first surface or on the second surfaces by means of masking, respectively, of the second surfaces or of the first surface.
• step a) is preceded by a step al) of forming a layer, called passivation layer, covering the first surface and the second surfaces, the passivation layer being made of a material, called active material, configured to modify its surface energy on the effect of the treatment in step a).
• the passivation layer comprises at least one of the materials chosen from: a siloxane compound, a fluorosilane, a fluoropolymer, octadecyltriethoxysilane, propyltrimethoxysilane, propyltriethoxysilane, Octadecyltrimethoxysilane), octyltrimethoxysiloxylethane, octyltane (3,3,3-trifluoropropyl) silane, Trichloro (octadecyl) silane, Trichloro (3,3,3-trifluoropropyl) silane, 1H, 1H, 2H, 2H-Perfluorodecyltrimethoxysilane.
• the passivation layer is formed according to a chemical vapor deposition method, and in particular activated by plasma.
• the step of spreading the filling liquid implements a doctor blade or a slit die.
• the filling liquid is a mixture which comprises a solvent, a filling matrix and a filler, called an active filler.
• step b) comprises several, advantageously two, sequences for spreading the filling liquid, and the execution of a sequence of evaporation of the solvent at the end of each sequence of sprawl.
• the sequence of evaporation of the filling liquid comprises a heat treatment step intended to evaporate the solvent.
• the filling matrix is also adapted to solidify during the heat treatment step, and thus trap the active charge in its volume.
• the solvent comprises a solution of propylene glycol mono methyl ether acetate.
• the filling matrix comprises a transparent material of the acrylate type, advantageously poly (methyl methacrylate (PMMA), or a silicone or a polymer.
• PMMA methyl methacrylate
• the active charge comprises a conversion material, in particular an optical conversion material.
• the optical conversion material comprises quantum dots (Q.D), nanoplates or phosphors.
• the bottom of each of the cavities is functionalized.
• the functionalization of the bottom of each of the cavities comprises the implementation of a light-emitting diode, advantageously the light-emitting diode taking the form of at least one nanowire.
• the invention also relates to a manufacturing method intended to fill each of the cavities of a group of cavities with a different filling liquid, the manufacturing method comprising successively filling each of the cavities according to the filling method according to the present invention.
• the group of cavities forms a pixel of a display device, in particular, each of the cavities of the pixel is intended to emit a different color.
• Figure 1 is a schematic representation of a display device provided with LEDs in the form of nanowires formed at the bottom of cavities, and filled with a filling liquid;
• Figures 2a, 2b, 2c, 2d are schematic representations of the different steps that can be implemented in the context of the present invention, in particular, Figure 2a shows a step of forming cavities, Figure 2b shows a step a1), FIG. 2c represents a processing step a), and FIG. 2d represents a step b);
• FIGS. 3A and 3B are graphic representations of the evolution of the contact angle (vertical axis, in “°") of a liquid (in particular water) on a surface as a function of a time d exposure (horizontal axis, in “seconds”), respectively, to a helium plasma and ultraviolet radiation, the surface exposed to the energy flow comprises in particular a material of the siloxane type formed by plasma-assisted vapor deposition, and using octamethylcyclotetrasiloxane (OMCTSO) as a precursor;
• OMCTSO octamethylcyclotetrasiloxane
• FIG. 3C is a graphic representation of the evolution of the contact angle (vertical axis, in "°") of a liquid, in particular water, on a surface, as a function of a number of pulses emitted by an excimer laser (horizontal axis, “number of pulses”), the surface comprises in particular siloxane formed by plasma-assisted vapor deposition of OMCTSO;
• FIG. 3D is an image obtained by optical microscopy of a surface comprising a plurality of cavities having a circular opening of 10 ⁇ m in diameter, and separated from each other by 15 ⁇ m (center to center distance), the surface in particular comprises a passivation layer made of a material of the siloxane SiOC type and with a thickness equal to 110 nm, the passivation layer is formed by plasma assisted vapor deposition (PECVD) of OMCTSO;
• PECVD plasma assisted vapor deposition
• FIG. 3E is an image of a surface at the end of the execution of step a) on an area A of said surface, in particular the surface, initially covered with a stack of a passivation layer in overlap a sublayer, has been exposed to laser radiation intended to spray, in its entirety, the passivation layer at the level of zone A;
• FIGS. 4a and 4b are images obtained by scanning electron microscopy of cavities along a section plane of said cavities perpendicular to the bottom, and obtained after execution of steps a) and b) of the filling method according to the present invention, step b) being carried out only once, FIGS. 4a and 4b represent, in particular, the second cavities and first cavities, respectively;
• FIGS. 5a and 5b are images obtained by scanning electron microscopy of cavities according to a section plane of said cavities perpendicular to the bottom, and obtained after execution of steps a) and b) of the filling process according to the present invention, step b) being carried out twice, FIGS. 5a and 5b represent, in particular, the second cavities and first cavities, respectively;
• FIGS. 6a and 6b are images obtained by scanning electron microscopy of cavities according to a cutting plane of said cavities perpendicular to the bottom, and obtained after execution of steps a) and b) of the filling process according to the present invention, step b) being carried out only once, FIGS. 6a and 6b represent, in particular, the second cavities and first cavities, respectively;
• FIGS. 7a and 7b are images obtained by scanning electron microscopy of cavities according to a section plane of said cavities perpendicular to the bottom, and obtained after execution of steps a) and b) of the filling process according to the present invention, step b) being carried out only once, FIGS. 7a and 7b show, in particular, the second cavities and first cavities, respectively;
• FIG. 8 is a schematic representation of the effect of an energy flux, and in particular of UV radiation, on a silane compound provided with a hydrophobic carbon chain;
• FIGS. 9a to 9d are schematic representations of a manufacturing process implementing the successive filling of a plurality of cavities from a group of cavities.
• the method according to the present invention relates to a method of selective filling, with a filling liquid, of a first cavity chosen from at least one group of cavities. More particularly, the method according to the present invention implements a mechanism for differentiating the surface energy of the cavities which makes it possible to favor the filling, with the filling liquid, of the first cavity with regard to the other cavities.
• the surface energy of the surface of the first cavity is adapted so that the surface of the first cavity and the surfaces of the other cavities exert on the filling liquid, respectively, an attractive effect and a repellent effect, thus resulting to selective filling, by the filling liquid, of the first cavity with regard to the other cavities.
• the method according to the present invention can in particular be implemented for successively filling all the cavities of the group of cavities.
• FIGS. 2a to 2d illustrate a method of filling, with a filling liquid 15, a cavity, called the first cavity 11, from a group of cavities 10.
• Each of the cavities of the group of cavities 10 opens at a face, called the front face 21, of a support substrate 20.
• the cavities comprise, in this respect, an internal surface 12.
• the internal surface 12 may include a bottom surmounted by a wall.
• the bottom can be concave, convex, flat.
• the cavities can also take other forms, and for example be conical, pyramidal, U-shaped.
• the formation of the cavities may involve a step of etching the support substrate 20 from its front face 21, and in particular the etching of a silicon substrate.
• cavities can be carried out electrochemically. It is also possible to transfer a metal grid or to engrave a grid in a (metallic) material deposited on a silicon support.
• the walls of the cavities may be orthogonal to the front face 21 of the support substrate 20.
• a coating may be covering the internal surface 12, for example the coating may comprise at least one of the materials chosen from: a metal, an oxide, a nitride.
• the internal surface 12 of each of the cavities can be functionalized.
• the internal surface may include one or more electronic, microelectronic devices.
• the cavities include a bottom
• one or more electroluminescent structures can be arranged on the latter.
• light-emitting structure is generally meant a structure which, as soon as it is crossed by a current, emits light radiation.
• the light-emitting structures can comprise 2D, namely planar, light-emitting diodes, and thus comprise a stack of semiconductor films.
• the light-emitting structures can be 3D light-emitting diodes, each comprising a plurality of nanowires, or microfilms or light-emitting pyramids perpendicular to the bottom of the cavity on which they rest.
• Each light-emitting diode may comprise a stack of a first layer of semiconductor material X, and of a second layer of semiconductor material W of opposite conductivities between which an active layer Y is interposed.
• the dopings of the first layer of semiconductor material X and the second layer of semiconductor material W are, respectively, of type N and of type P.
• the active layer Y can comprise means of confinement.
• the active layer Y can comprise a single quantum well made of a semiconductor material whose forbidden energy band (“energy gap” according to Anglo-Saxon terminology) is less than the band of prohibited energy of either of the semiconductor materials forming, respectively, the first layer X and the second layer W.
• the active layer Y can comprise a stack of a plurality of quantum wells, and in particular an alternation of quantum wells and barrier layers.
• the first layer X and the second layer W can comprise GaN, while the active layer Y can comprise InGaN.
• nanowires or microfils can, in this respect, involve stacks formed, of a GaN-n zone, of an active zone, of a GaN-p zone or of InGaN-p.
• the filling process then comprises a step a) of modifying the surface energy of the internal surface 12 of the first cavity 11, called the first surface 12i, or the surface energy of the internal surfaces, called second surfaces 122, cavities other than the first cavity 11, called second cavities.
• the first surface 12i has a first energy
• the second surfaces 122 have a second energy different from the first energy
• step a) is intended to modify the surface energy of the first surface.
• step a) selectively modifies the surface energy of the internal surface 12 of the first cavity 11, and leaves the surface energy of the internal surfaces of the second cavities unchanged.
• Step a) can in particular implement exposure to an energy flow.
• Exposure to the flow of energy may include exposure to a plasma, and more particularly to an ozone plasma.
• the exposure to the flow of energy can include an exposure to an ultraviolet radiation
• the ultraviolet radiation can in particular include a light emission of wavelength equal to 248 nanometers or 193 nanometers.
• the exposure to the energy flow can include an exposure to Ultraviolet (UV) laser radiation, in particular emitted by an excimer pulsed laser source.
• UV radiation can be between 150 nm and 350 nm, for example equal to 248 nm.
• the laser pulses can have a frequency between 1 Hz and 1000 Hz, for example between 20 Hz and 300 Hz, and a half-height width between 1 ps and 100 ns, for example equal to 25 ns.
• the fluence of the laser pulses can be between 1 mJ / cm 2 and 1000 mJ / cm 2 , for example between 230 mJ / cm 2 and 330 mJ / cm 2 .
• Exposure to Ultraviolet laser radiation can also be achieved by maintaining an atmosphere with a strong oxidizing character near the surface to be treated.
• the atmosphere with a strong oxidizing character can in particular be rich in oxygen (for example the oxygen concentration can be greater than 20%), or include ozone (the ozone concentration can in particular be between 0.1 ppm and 100 ppm, preferably between 1 ppm and 10 ppm).
• step a The use of an atmosphere with a strong oxidizing character improves the efficiency of step a).
• step a) can comprise ablation, in particular rapid, of a stack of layers formed on the internal surface of the cavities.
• the stack of layers may comprise a passivation layer 14 (described in the following description), in particular a hydrophobic passivation layer, resting on another layer, called underlayer 14i made of a material suitable for give said sublayer 14i a hydrophilic character (in other words having an attractive character with respect to water).
• This material forming the sublayer 14i is also chosen to have a coefficient of thermal expansion (CTE) very different from the passivation layer 14.
• CTE coefficient of thermal expansion
• the sublayer 14i may in particular comprise a silicon nitride, or an oxide of this family (Si x N y , Si x O z N y ).
• the contact angle of water measured on an SiN surface is 40 ° while it is greater than 100 ° on a SiOC siloxane surface.
• the CTE of SiN is 3.3 10 6 K 1 while it is 3.1 10 4 K 1 for SiOC.
• the formation of a layer of silicon nitride is known to a person skilled in the art and can in particular be implemented by PECVD.
• the thickness of the sublayer 14i can be between 10 nm and 5 ⁇ m, preferably equal to 500 nm.
• Step a) is then implemented with the laser radiation source previously described.
• the laser radiation is emitted so as to selectively spray the passivation layer of the first surface 12i, and thus uncover the sublayer 14i. It is therefore understood that the stack resting on the second surface 122 is not affected by the laser.
• Complete removal of the passivation layer at the first surface 12i can be achieved with a single pulse from the laser.
• the fluence of the laser can, in this regard, be between 100 mJ / cm 2 and 400 mJ / cm 2 , and preferably close to 320 mJ / cm 2 .
• step a The inventors have also found that the surface energy of the sublayer 14i, once discovered, is not affected during the execution of step a).
• step a This mode of implementation of step a), because of its ease and speed of implementation, is extremely advantageous.
• step a) on a layer stack is illustrated in FIG. 3E.
• the method of selective spraying of the passivation layer 14 makes it possible to spray only certain areas of the stack.
• zone A has been subjected to laser radiation so as to expose the hydrophilic sublayer 14i
• zone B protected, comprises the stack formed by the sublayer 14i and the hydrophobic passivation layer 14.
• the exposure of the first surface 12i to the flow of energy can be carried out by means of a mask, and in particular a mask having an opening facing the first surface. In other words, the mask obstructs the second cavities.
• the first surface energy is adjusted so that the first surface 12i exerts on the filling liquid 15 an attractive effect.
• the first surface energy is adjusted so that the contact angle of the filling liquid 15 is small.
• low wetting angle is meant a contact angle less than 40 °, advantageously less than 30 °, even more advantageously less than 25 °.
• the second energy is adjusted so that the second surfaces exert a repelling effect on the filling liquid 15.
• the second surface energy is adjusted so that the contact angle of the filling liquid 15 is large.
• high contact angle is meant a contact angle greater than 40 °, advantageously greater than 70 °, even more advantageously greater than 90 °.
• the filling selectivity will be obtained by a difference in surface energy between the so-called low and high surface energy areas which will be characterized by a difference in contact angle of the filling liquid on these two surfaces. at least equal to 30 °, advantageously greater than 50 °.
• FIGS. 3A and 3B are graphical representations of the evolution of the contact angle (vertical axis) of a liquid, in particular water, on a surface as a function of a time d exposure, respectively, to helium plasma and infrared radiation.
• the surface exposed to the flow of energy notably comprises a material of the siloxane type, for example formed by plasma-assisted vapor deposition with octamethylcyclotetrasiloxane (OMCTSO) as a precursor.
• OMCTSO octamethylcyclotetrasiloxane
• FIG. 3C is another example of the evolution of the contact angle (vertical axis, in "°") of a liquid, in particular water, on a surface, as a function of a number of pulses emitted by an excimer laser (horizontal axis, "number of pulses").
• the surface comprises in particular siloxane formed by plasma assisted vapor deposition of OMCTSO.
• Figure 3D is an image obtained by optical microscopy of a surface comprising a plurality of cavities having a circular opening of 10 ⁇ m in diameter, and separated from each other by 15 ⁇ m (center to center distance).
• the surface notably comprises a passivation layer 14 made of a material of the siloxane SiOC type and of a thickness equal to 110 nm.
• Layer 14 is formed by plasma assisted vapor deposition (PECVD) of OMCTSO.
• a treatment which comprises exposure to a flow of energy implemented selectively at the first surface, makes it possible to confer on said first surface a surface energy different from that of the seconds surfaces.
• FIG. 8 is a schematic representation of the mechanism of modifying the surface energy under the effect of ultraviolet radiation (symbolized by the arrows).
• the surface of the substrate S intended to be exposed to UV radiation is previously coated with a layer of material of the siloxane type (O).
• a mask is positioned facing the surface so as to selectively expose a region 1 to UV radiation to UV radiation and mask a region 2.
• the effect of UV radiation is to reduce the size of the carbon chain of the layer of material of the siloxane type, and to make the latter hydrophilic. Region 2 not exposed to UV radiation retains its hydrophobic character.
• Step a) according to the present invention can be preceded by a step a1) of forming a layer, called passivation layer 14, overlying the first surface and the second surfaces.
• the passivation layer 14 is in particular made of a material, called active material, configured to modify its surface energy on the effect of the treatment of step a).
• the passivation layer 14 can be formed by a plasma assisted chemical phase deposition technique (“PECVD” or “Plasma Enhanced Chemical Vapor Deposition” according to Anglo-Saxon terminology).
• PECVD plasma assisted chemical phase deposition technique
• Pasma Enhanced Chemical Vapor Deposition according to Anglo-Saxon terminology.
• the thickness of the passivation layer 14 can be between 1 nm and 1 micrometer, preferably 50 nm to 300 nm.
• the active material may comprise at least materials chosen from: a siloxane compound, a fluorosilane, a fluoropolymer, octadecyltriethoxysilane, propyltrimethoxysilane, propyltriethoxysilane, Octadecyltrimethoxysilane, octyltrimethoxysilane, octyltriethoxysilane, Dodecilane, Dodecylane Trichloro (octadecyl) silane, Trichloro (3,3,3-trifluoropropyl) silane, 1H, 1H, 2H, 2H-Perfluorodecyltrimethoxysilane.
• step b) of spreading the filling liquid 15 may involve the use of a doctor blade or a slot die ("slot die" according to Anglo-Saxon terminology).
• the filling liquid 15 can be a mixture which comprises a solvent, a filling matrix and a filler, called an active filler.
• the solvent can comprise a solution of propylene glycol mono methyl ether acetate.
• the filling matrix can comprise a transparent material of acrylate type such as for example poly (methyl methacrylate (PMMA), a silicone or a polymer.
• the active charge can comprise a conversion material, in particular an optical conversion material.
• optical conversion material is meant a material capable of converting radiation of a given wavelength, into radiation of a different wavelength.
• Such an optical conversion material may in particular comprise luminophores, or also quantum dots (“quantum dots” according to Anglo-Saxon terminology).
• step b) comprises several, advantageously two, sequences for spreading the filling liquid 15, and the execution of a sequence for evaporating the solvent at the end of each spreading sequence.
• the cavities of FIGS. 4a and 4b have undergone a differentiated surface treatment.
• a step b) of spreading a filling liquid made of a PGMEA / PMMA solution (poly methyl methacrylate) loaded with quantum dots was then carried out.
• the exposure of the passivation layer 14 to a helium plasma makes it possible to modify the contact angle of a drop of the filling liquid 15 on said layer.
• the exposure of the passivation layer 14 to a helium plasma modifies the capacity of said layer to be wetted by the filling liquid.
• step b) so as to completely fill the cavities of FIG. 4b.
• Figures 5a and 5b show cavities having undergone a protocol similar to that of the cavities, respectively, of Figures 4a and 4b, step b) of spreading the filling liquid 15 having however been carried out twice.
• the cavities of FIG. 5a which have not been exposed to plasma treatment, always exert a repulsive effect against the filling liquid 15, while a complete filling of the cavities of FIG. 5b can be observed .
• a solvent evaporation sequence (in this case the PGMEA) can be executed at the end of each spreading sequence.
• the sequence of evaporation of the filling liquid 15 may include a heat treatment step intended to evaporate the solvent.
• the filling matrix can be adapted to solidify at the end of the filling process according to the present invention, and in particular during the heat treatment step, and thus trap the active charge in its volume.
• the dilution of the filling liquid 15 in the solvent can be adapted so that the filling of the first cavity 11 is complete, or essentially complete, at the end of the execution of a single step b) d 'sprawl.
• Figures 6a and 6b illustrate the filling, respectively, of second cavities and first cavities.
• the cavities of FIGS. 6a and 6b have undergone a differentiated surface treatment.
• the internal surfaces of the first cavities were exposed to UV radiation from a mercury lamp, while the second cavities were not subjected to any treatment.
• the filling liquid 15 spread during a single step b) comprises a PGMEA / PMMA (Poly methyl methacrylate) solution loaded with quantum dots diluted to 60% allows complete filling of the first cavities leaving the second cavities empty .
• PGMEA / PMMA Poly methyl methacrylate
• the inventors have also demonstrated that it is possible to fill with filling liquid 15 selectively cavities of very small size, and in particular having an opening of 1 ⁇ m.
• Figures 7a and 7b each show two cavities of 10 micrometers and 1 micrometer respectively on which the selective filling process according to the present invention is implemented.
• each coated with a passivation layer 14 have undergone a differentiated surface treatment.
• the internal surfaces of the cavities in FIG. 7b were exposed to UV radiation from a mercury lamp, while the cavities in FIG. 7a were not subjected to any treatment.
• Step b) spreading a filling liquid made of a PGMEA / PMMA (Poly methyl methacrylate) solution loaded with quantum dots allows the cavities of FIG. 7b to be filled, at least partially, while said liquid does not does not seem to enter the cavities of figure 7a.
• the images of FIGS. 7a and 7b thus demonstrate that the method according to the present invention makes it possible to selectively fill cavities of very small size, and in particular of a size between 1 micrometer and 10 micrometers.
• the method according to the present invention can be carried out for successively filling several cavities, in particular all the cavities, of a group of cavities 10, with a different filling liquid 15.
• FIGS. 9a to 9d illustrate the implementation of the filling process for successively filling 3 cavities 111a, 111b, 111c from a group of 4 cavities 111a, 111b, 111c and IIId formed on a support 20.
• FIG. 9a illustrates the selective filling, with a first filling liquid, of the cavity 111a among the cavities 111a, 111b, 111c, and IIId.
• FIG. 9b illustrates the selective filling, with a second filling liquid different from the first filling liquid 15, of the cavity 111b among the cavities 111b, 111c, and IIId.
• FIG. 9c illustrates the selective filling, by a third filling liquid different from the second filling liquid 15, of the cavity 111c among the cavities 111c, and IIId.
• the cavity IIId can be left empty or also filled with a filling liquid.
• the successive filling of cavities of a group of cavities 10 can advantageously be implemented for the manufacture of a color display device.
• a group of cavities 10 as described above forms a color pixel, each of the cavities being provided with at least one light-emitting diode disposed on their bottom.
• the light-emitting diode may in particular comprise one or more nanowires, microfils or pyramids.
• the invention can implement a plurality of pixels, in particular identical pixels, arranged on the front surface 21 of the support substrate 20.
• the pixels can advantageously be arranged in a matrix form.
• matrix form By “matrix form”, one understands a mesh with N lines and M columns. Each pixel comprises a cavity 111a intended to emit blue radiation, a cavity 111b intended to emit red radiation and a cavity 111c intended to emit green radiation.
• the cavity IIId can also be filled according to the filling process.
• the cavity IIId can be intended to emit yellow or white radiation, or alternatively, blue or green or red.
• the filling process can be implemented to fill initially (FIG. 9a), and selectively, all of the cavities 111a with a filling liquid 15, called the first liquid.
• the first liquid may comprise an active charge (optically active) intended to emit radiation of a given wavelength, called the first wavelength.
• the filling process can then (FIG. 9b) be implemented to fill, and selectively, all of the cavities 111b with a filling liquid 15, called the second liquid.
• the second liquid may comprise an active charge (optically active) intended to emit radiation of a given wavelength, called the second wavelength different from the first wavelength.
• the filling process can be implemented a third time (FIG. 9c), to fill, and selectively, all of the cavities 111c with a filling liquid 15, called the third liquid.
• the third liquid may comprise an active charge (optically active) intended to emit radiation of a given wavelength, called the third wavelength different from the first wavelength and from the second wavelength.
• the presence of an active charge is not strictly required, in particular when the cavity comprises one or more light-emitting diodes made of GaN and intended to emit blue radiation.
• the first wavelength, the second wavelength, and the third wavelength may, for example, correspond, respectively, to blue radiation, red radiation, and green radiation.
• the method according to the present invention then makes it possible to selectively fill cavities without penalizing the production rates.
• the first cavities of a plurality of groups of cavities can be filled collectively and selectively at the second cavities of said groups of cavities.
• the shape and size of the cavities do not constitute a limitation on the implementation of the method according to the present invention.
• the cavities can have identical characteristics without, however, altering the selectivity of the method according to the present invention.
• the method according to the present invention also allows the filling of small cavities, and in particular of the order of 1 micrometer.

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• Engineering & Computer Science (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Power Engineering (AREA)
• Electroluminescent Light Sources (AREA)
• Devices For Indicating Variable Information By Combining Individual Elements (AREA)
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• 2018
  • 2018-12-20 FR FR1873500A patent/FR3091006B1/fr active Active
• 2019
  • 2019-11-29 EP EP19835709.7A patent/EP3881362A1/de active Pending
  • 2019-11-29 CN CN201980088429.1A patent/CN113302752A/zh active Pending
  • 2019-11-29 WO PCT/FR2019/052849 patent/WO2020128182A1/fr unknown
  • 2019-11-29 KR KR1020217019037A patent/KR20210105902A/ko unknown
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