EP3879193A1 - Room air cleaner - Google Patents
Room air cleaner Download PDFInfo
- Publication number
- EP3879193A1 EP3879193A1 EP21161470.6A EP21161470A EP3879193A1 EP 3879193 A1 EP3879193 A1 EP 3879193A1 EP 21161470 A EP21161470 A EP 21161470A EP 3879193 A1 EP3879193 A1 EP 3879193A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- suction
- housing
- room air
- air filter
- room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
- F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
- F24F8/108—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using dry filter elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/02—Ducting arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/02—Ducting arrangements
- F24F13/06—Outlets for directing or distributing air into rooms or spaces, e.g. ceiling air diffuser
- F24F13/072—Outlets for directing or distributing air into rooms or spaces, e.g. ceiling air diffuser of elongated shape, e.g. between ceiling panels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/08—Air-flow control members, e.g. louvres, grilles, flaps or guide plates
- F24F13/10—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
- F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
- F24F8/80—Self-contained air purifiers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2221/00—Details or features not otherwise provided for
- F24F2221/12—Details or features not otherwise provided for transportable
- F24F2221/125—Details or features not otherwise provided for transportable mounted on wheels
Definitions
- room air filters of the type mentioned at the beginning are set up at one or more points in the room, which suck in the room air contaminated with contaminants at about head height of the people working in the room, with the aid of the filter device located in the housing of the room air filter from the contaminants and finally the cleaned room air is released back into the room.
- the invention proposes, based on a room air filter of the type mentioned at the beginning, that the housing has two or more suction chimneys which are attached to the housing at a distance from one another and are each designed as adjustable tubes, the end sections of which each extend one in the longitudinal direction of the pipe extending lateral suction slot, in whose suction cross-section adjustable louvre flaps are arranged.
- the tubes are designed to be foldable, pivotable and / or telescopic. This results in further options for adapting the flow fields that develop to the given spatial conditions.
- the special feature of the invention is that two or more upwardly extending suction chimneys 5 are provided on the housing 1 at a distance from one another, which are connected to the housing 1 and are each designed as base sections 6a and suction pipe 6b.
- the base sections 6a are each rigidly connected to the housing 1, while the suction pipes 6b are connected to the base sections 6a such that they can be rotated about their longitudinal axis.
- these suction pipes 6b which are closed at the top, are each laterally provided with a suction slot 7 extending in their longitudinal direction, in the suction cross-section of which adjustable louvre flaps 8 are arranged. By pivoting these louvre flaps 8, it is possible to adjust the size of the respective suction cross-section and to influence the direction of the suction flow that forms in front of the suction slot 7.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Die Erfindung betrifft einen Raumlüfter für die Filterung der Luft in Räumlichkeiten, mit einem auf dem Boden der Räumlichkeit verfahrbaren Gehäuse (1), welches eine Filtereinrichtung und ein Sauggebläse enthält und mit mindestens einem Ansaugkamin (5) mit verstellbarer Ansaugöffnung (7) und mindestens einer Auslassöffnung (9) versehen ist. Um bei einem derartigen Raumluftfilter den Ansaugbereich besser an unterschiedliche örtliche Gegebenheiten anpassen zu können, schlägt die Erfindung vor, dass das Gehäuse (1) zwei oder mehr Ansaugkamine (5) aufweist, die mit Abstand zueinander an dem Gehäuse (1) befestigt sind und jeweils als einstellbare Rohre (6a, 6b) ausgebildet sind, deren Endabschnitte (6b) jeweils einen sich in Längsrichtung des Rohres (6a, 6b) erstreckenden seitlichen Ansaugschlitz (7) aufweisen, in dessen Ansaugquerschnitt verstellbare Jalousieklappen (8) angeordnet sind.The invention relates to a room fan for filtering the air in rooms, with a housing (1) which can be moved on the floor of the room and which contains a filter device and a suction fan and at least one suction chimney (5) with an adjustable suction opening (7) and at least one Outlet opening (9) is provided. In order to be able to better adapt the intake area to different local conditions in such a room air filter, the invention proposes that the housing (1) has two or more intake chimneys (5) which are attached to the housing (1) at a distance from one another and each are designed as adjustable tubes (6a, 6b), the end sections (6b) of which each have a lateral suction slot (7) extending in the longitudinal direction of the tube (6a, 6b), in the suction cross-section of which adjustable louvre flaps (8) are arranged.
Description
Die Erfindung betrifft einen Raumluftfilter für die Filterung der Luft in Räumlichkeiten, mit einem auf dem Boden der Räumlichkeit verfahrbaren Gehäuse, welches eine Filtereinrichtung und ein Sauggebläse enthält und mit mindestens einem Ansaugkamin mit verstellbarer Ansaugöffnung und einer Ausblasöffnung versehen ist.The invention relates to a room air filter for filtering the air in rooms, with a movable housing on the floor of the room, which contains a filter device and a suction fan and is provided with at least one suction chimney with adjustable suction opening and an exhaust opening.
In vielen Produktionsbetrieben ist es aus gesundheitlichen Gründen notwendig, die bei der Arbeit entstehenden Verunreinigungen der Raumluft in Form von Schleifstaub, Schweißrauch oder dgl. aus der Raumluft abzufiltern. Dabei ist man normalerweise bemüht, diese Verunreinigungen möglichst nahe an deren Entstehungsort abzusaugen und damit unschädlich zu machen. Im Falle von Schweißrauch erfolgt dieses durch punktuelle Absaugung.In many production plants, for health reasons, it is necessary to filter the indoor air contaminants in the form of grinding dust, welding smoke or the like. In doing so, efforts are normally made to suck off these impurities as close as possible to their place of origin and thus render them harmless. In the case of welding fumes, this is done through selective extraction.
In vielen Fällen ist allerdings aus räumlichen und/oder arbeitstechnischen Gründen eine solche Absaugung in unmittelbarer Nähe des Entstehungsortes nicht möglich, sodass sich die Verunreinigungen weiträumig in der Raumluft verteilen. Um auch in diesem Fall für eine bessere Raumluft zu sorgen, arbeitet man in der jüngeren Zeit vielfach mit einer sogenannten Schichtfilterung. Bei diesem Verfahren werden an einer oder mehreren Stellen des Raumes Raumluftfilter der eingangs genannten Art aufgestellt, die die mit Verunreinigungen belastete Raumluft etwa in Kopfhöhe der in dem Raum tätigen Menschen ansaugen, mithilfe der in dem Gehäuse des Raumluftfilters befindlichen Filtereinrichtung von den Verunreinigungen befreien und abschließend die gereinigte Raumluft wieder in den Raum abgegeben.In many cases, however, for reasons of space and / or work technology, such an extraction is not possible in the immediate vicinity of the point of origin, so that the contaminants are widely distributed in the room air. In order to ensure better room air in this case too, so-called layer filtering has been used in recent times. In this method, room air filters of the type mentioned at the beginning are set up at one or more points in the room, which suck in the room air contaminated with contaminants at about head height of the people working in the room, with the aid of the filter device located in the housing of the room air filter from the contaminants and finally the cleaned room air is released back into the room.
Dieses Verfahren arbeitet dann besonders effektiv, wenn es gelingt, die Raumluft dort an zu saugen, wo sie am stärksten mit Verunreinigungen belastet ist. Dies ist mit dem Stand der Technik (vgl.
Es ist deshalb Aufgabe der Erfindung, den Raumluftfilter der eingangs genannten Art dahingehend weiterzubilden, dass sein Ansaugbereich besser an unterschiedliche örtliche Gegebenheiten angepasst werden kann.It is therefore the object of the invention to develop the room air filter of the type mentioned at the beginning in such a way that its suction area can be better adapted to different local conditions.
Zur Lösung dieser Aufgabe schlägt die Erfindung ausgehend von einem Raumluftfilter der eingangs genannten Art vor, dass das Gehäuse zwei oder mehr Ansaugkamine aufweist, die mit Abstand zueinander an dem Gehäuse befestigt sind und jeweils als einstellbare Rohre ausgebildet sind, deren Endabschnitte jeweils einen sich in Längsrichtung des Rohres erstreckenden seitlichen Ansaugschlitz aufweisen, in dessen Saugquerschnitt verstellbare Jalousieklappen angeordnet sind.To solve this problem, the invention proposes, based on a room air filter of the type mentioned at the beginning, that the housing has two or more suction chimneys which are attached to the housing at a distance from one another and are each designed as adjustable tubes, the end sections of which each extend one in the longitudinal direction of the pipe extending lateral suction slot, in whose suction cross-section adjustable louvre flaps are arranged.
Der Raumluftfilter gemäß der Erfindung erzeugt anstelle von nur einem, von oben nach unten gerichteten Strömungsfeld mehrere horizontal gerichtete Strömungsfelder, die in beliebiger Höhe und mit verstellbarer Intensität die mit Verunreinigungen belastete Raumluft in der Nähe von deren Entstehungsort ansaugen können. Darüber hinaus kann durch Verstellen der Jalousieklappe in gewissem Umfange auch die Richtung dieser Strömungsfelder in vertikaler Richtung beeinflusst werden.The room air filter according to the invention generates, instead of just one flow field directed from top to bottom, several horizontally directed flow fields that can suck in the contaminated air near the point of origin at any height and with adjustable intensity. In addition, the direction of these flow fields in the vertical direction can also be influenced to a certain extent by adjusting the louvre flap.
Eine besonders bevorzugte Ausführungsform der Erfindung sieht vor, dass zusätzlich die Endabschnitte der Rohre jeweils um ihre Längsachse verdrehbar ausgebildet sind.A particularly preferred embodiment of the invention provides that, in addition, the end sections of the tubes are each designed to be rotatable about their longitudinal axis.
Durch Verdrehen der Endabschnitte der Ansaugrohre ist es möglich, die sich ausbildenden Strömungsfelder, die in Richtung auf die Ansaugschlitze gerichtet sind, miteinander zu kombinieren, z.B. mehr oder weniger parallel zueinander verlaufen zu lassen, um die Ansaugwirkung zu intensivieren, oder divergierend verlaufen zu lassen, um den Ansaugbereich möglichst groß werden zu lassen.By rotating the end sections of the suction pipes, it is possible to combine the developing flow fields that are directed towards the suction slots, e.g. to let them run more or less parallel to one another in order to intensify the suction effect, or to let them run diverging, to make the suction area as large as possible.
Ebenso ist es zweckmäßig, wenn die Rohre klappbar schwenkbar und/oder teleskopierbar ausgebildet sind. Hierdurch ergeben sich weitere Möglichkeiten für die Anpassung der sich ausbildenden Strömungsfelder an die gegebenen Raumverhältnisse.It is also useful if the tubes are designed to be foldable, pivotable and / or telescopic. This results in further options for adapting the flow fields that develop to the given spatial conditions.
Zum gleichen Zweck kann es weiterhin vorteilhaft sein, wenn die Rohre ganz oder teilweise von Schläuchen gebildet werden.For the same purpose, it can also be advantageous if the tubes are entirely or partially formed by hoses.
Schließlich ist vorgesehen, dass das Gehäuse des Raumluftfilters mit einem allseitig verfahrbaren Rollenfahrwerk und mit Handgriffen zum Verschieben versehen ist. Hierdurch ist es auf einfache Weise möglich, den Raumluftfilter an jedem beliebigen Standort in jede Richtung zu verschieben oder zu verdrehen, um möglichst nahe an die möglichen Entstehungsorte von Verunreinigungen heranzukommen.Finally, it is provided that the housing of the room air filter is provided with a roller carriage that can be moved on all sides and with handles for moving it. This makes it possible in a simple manner to move or rotate the room air filter at any location in any direction in order to get as close as possible to the possible locations where contamination occurs.
Ein Ausführungsbeispiel der Erfindung wird im Folgenden anhand der beigefügten Zeichnungen erläutert. Es zeigen:
- Figur 1:
- Einen Raumluftfilter gemäß der Erfindung in Vorderansicht;
- Figur 2:
- den Raumluftfilter gemäß
in Seitenansicht;Figur 1 - Figuren 3a, 3b und 3c:
- den Raumluftfilter gemäße Erfindung in verschiedenen Arbeitspositionen.
- Figure 1:
- A room air filter according to the invention in a front view;
- Figure 2:
- the room air filter according to
Figure 1 in side view; - Figures 3a, 3b and 3c:
- the room air filter according to the invention in different working positions.
In der Zeichnung ist das Gehäuse des neuen Raumluftfilters mit dem Bezugszeichen 1 bezeichnet. Dieses Gehäuse 1 wird von einem allseitig verfahrbaren Rollenfahrwerk 2 getragen und ist mit Handgriffen 3 versehen, mit deren Hilfe das Gehäuse 3 auf dem Boden 4 einer Räumlichkeit beliebig verschoben und verdreht werden kann.In the drawing, the housing of the new room air filter is denoted by the
Im Innenraum des Gehäuses 1 befinden sich (nicht dargestellt) eine Filtervorrichtung und ein Sauggebläse. Dieses Sauggebläse saugt über zwei jeweils in ihrer Gesamtheit mit dem Bezugszeichen 5 bezeichnete Ansaugkamine Luft an, bewegt diese Luft durch die Filtereinheit und bläst die gefilterte Luft über eine am Gehäuse 1 befindliche Ausblasöffnung 9 in die Räumlichkeit aus.A filter device and a suction fan are located in the interior of the housing 1 (not shown). This suction fan sucks in air via two suction chimneys, each designated in their entirety with the
Die Besonderheit der Erfindung besteht darin, dass an dem Gehäuse 1 mit Abstand zueinander zwei oder mehr nach oben verlaufende Ansaugkamine 5 vorgesehen sind, die mit dem Gehäuse 1 verbunden sind und jeweils als Basisabschnitte 6a und Ansaugrohr 6b ausgebildet sind. Dabei sind die Basisabschnitte 6a jeweils starr mit dem Gehäuse1 verbunden, während die Ansaugrohre 6b um ihre Längsachse verdrehbar mit den Basisabschnitten 6a verbunden sind. Weiterhin sind diese oben geschlossenen Ansaugrohre 6b jeweils seitlich mit einem sich in deren Längsrichtung erstreckenden Ansaugschlitz 7 versehen, in dessen Saugquerschnitt jeweils verstellbarer Jalousieklappen 8 angeordnet sind. Durch Verschwenken dieser Jalousieklappen 8 ist es möglich, die Größe des jeweiligen Saugquerschnittes einzustellen und die Richtung des sich vor dem Ansaugschlitz 7 ausbildenden Saugstromes zu beeinflussen.The special feature of the invention is that two or more upwardly extending
Wie ohne weiteres ersichtlich ist, kann man durch Höhenverstellung und Verdrehung der Endabschnitte 6b der Ansaugkamine 5 und gegebenenfalls durch Verschwenken der in den an Saugschlitzen 7 befindlichen Jalousieklappen 8 den sich im Umgebungsbereich des Raumluftfilters ausbildenden Saugstrom sehr gut dem Bedarf entsprechend ausrichten.As is readily apparent, by adjusting the height and rotating the
Abweichend vom dargestellten Ausführungsbeispiel können die die Ansaugkamine 5 bildenden Rohre auch klappbar, schwenkbar und oder teleskopierbar ausgebildet sein. Schließlich ist es auch möglich, dass die einstellbaren Rohre ganz oder teilweise von ausreichend steifen Schläuchen gebildet werden.Notwithstanding the illustrated embodiment, the pipes forming the
- 1 Gehäuse1 housing
- 2 Rollenfahrwerk2 roller trolleys
- 3 Handgriffe3 handles
- 4 Boden4 floor
- 5 Ansaugkamin5 intake chimney
- 6a Basisabschnitt6a base section
- 6b Ansaugrohr6b suction pipe
- 7 Ansaugschlitz7 suction slot
- 8 Jalousieklappen8 louvre flaps
- 9 Ausblasöffnung9 exhaust opening
Claims (5)
dadurch gekennzeichnet,
dass das Gehäuse (1) zwei oder mehr Ansaugkamine (5) aufweist, die mit Abstand zueinander an dem Gehäuse (1) befestigt sind und jeweils als einstellbare Rohre (6a, 6b) ausgebildet sind, deren Endabschnitte (6b) jeweils einen sich in Längsrichtung des Rohres (6a, 6b) erstreckenden seitlichen Ansaugschlitz (7) aufweisen, in dessen Ansaugquerschnitt verstellbare Jalousieklappen (8) angeordnet sind.Room air filter for filtering the air in rooms, with a housing (1) which can be moved on the floor of the room and which contains a filter device and a suction fan and with at least one suction chimney (5) with an adjustable suction opening (7) and at least one exhaust opening (9) is provided.,
characterized,
that the housing (1) has two or more suction chimneys (5) which are attached to the housing (1) at a distance from one another and are each designed as adjustable tubes (6a, 6b), the end sections (6b) of which each extend one in the longitudinal direction of the pipe (6a, 6b) have lateral suction slot (7), in the suction cross-section of which adjustable louvre flaps (8) are arranged.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE202020101309.2U DE202020101309U1 (en) | 2020-03-10 | 2020-03-10 | Room air filter |
Publications (1)
Publication Number | Publication Date |
---|---|
EP3879193A1 true EP3879193A1 (en) | 2021-09-15 |
Family
ID=70859212
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP21161470.6A Withdrawn EP3879193A1 (en) | 2020-03-10 | 2021-03-09 | Room air cleaner |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP3879193A1 (en) |
DE (1) | DE202020101309U1 (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010038344A1 (en) * | 2010-07-23 | 2012-01-26 | Heinrich Stumpf | Mobile filter system for cleaning air, comprises suction unit, and supply air unit, where portion of suction unit and portion of supply air unit are connected with each other by frame unit |
EP2524739A2 (en) * | 2011-05-17 | 2012-11-21 | HEYLO Drying Solutions GmbH | Filter device for filtering the air of a room, in particular for renovation work in buildings |
DE102015112977A1 (en) | 2015-08-06 | 2017-02-09 | Ivat Gmbh | Method and device for treating the room air in particular by stratified filtering |
KR20180112411A (en) * | 2017-04-04 | 2018-10-12 | 원영식 | Exhaust device for chamber residual gas exhaust |
-
2020
- 2020-03-10 DE DE202020101309.2U patent/DE202020101309U1/en not_active Expired - Lifetime
-
2021
- 2021-03-09 EP EP21161470.6A patent/EP3879193A1/en not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010038344A1 (en) * | 2010-07-23 | 2012-01-26 | Heinrich Stumpf | Mobile filter system for cleaning air, comprises suction unit, and supply air unit, where portion of suction unit and portion of supply air unit are connected with each other by frame unit |
EP2524739A2 (en) * | 2011-05-17 | 2012-11-21 | HEYLO Drying Solutions GmbH | Filter device for filtering the air of a room, in particular for renovation work in buildings |
DE102015112977A1 (en) | 2015-08-06 | 2017-02-09 | Ivat Gmbh | Method and device for treating the room air in particular by stratified filtering |
KR20180112411A (en) * | 2017-04-04 | 2018-10-12 | 원영식 | Exhaust device for chamber residual gas exhaust |
Also Published As
Publication number | Publication date |
---|---|
DE202020101309U1 (en) | 2020-05-07 |
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