EP3867421A1 - Bauteil, insbesondere für ein ventiltriebsystem, und verfahren zur herstellung eines solchen bauteils - Google Patents

Bauteil, insbesondere für ein ventiltriebsystem, und verfahren zur herstellung eines solchen bauteils

Info

Publication number
EP3867421A1
EP3867421A1 EP19768704.9A EP19768704A EP3867421A1 EP 3867421 A1 EP3867421 A1 EP 3867421A1 EP 19768704 A EP19768704 A EP 19768704A EP 3867421 A1 EP3867421 A1 EP 3867421A1
Authority
EP
European Patent Office
Prior art keywords
layer
component
partial
protective layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP19768704.9A
Other languages
German (de)
English (en)
French (fr)
Inventor
Ricardo Henrique Brugnara
Nazlim Bagcivan
Edgar Schulz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schaeffler Technologies AG and Co KG
Original Assignee
Schaeffler Technologies AG and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schaeffler Technologies AG and Co KG filed Critical Schaeffler Technologies AG and Co KG
Publication of EP3867421A1 publication Critical patent/EP3867421A1/de
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/323—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one amorphous metallic material layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/343—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one DLC or an amorphous carbon based layer, the layer being doped or not
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/44—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by a measurable physical property of the alternating layer or system, e.g. thickness, density, hardness
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Definitions

  • Component in particular for a valve train system
  • the invention relates to a component, in particular for a valve train system, comprising a substrate and a layer system applied to the substrate at least in regions, the layer system comprising a friction and wear-reducing protective layer for forming a component surface.
  • a component in particular for a valve train system, comprising a substrate and a layer system applied to the substrate at least in regions, the layer system comprising a friction and wear-reducing protective layer for forming a component surface.
  • Coatings for tribologically stressed surfaces are known from the prior art in a variety of embodiments.
  • One area of application of considerable technological importance is the reduction of friction and wear in
  • amorphous carbon layers have proven to be a particularly advantageous class of layer systems.
  • so-called diamond-like materials have proven to be a particularly advantageous class of layer systems.
  • Carbon layers are successfully used in the coating of parts of the crank mechanism, the valve control or the fuel injection system in diesel engines.
  • amorphous carbon In comparison to graphite, which is made up of crystalline layers of sp 2 -hybridized carbon atoms and diamond, a crystal of tetrahedrally coordinated sp 3 -hybridized carbon, amorphous carbon has a mixture of sp 2 -hybridized and sp 3 - hybridized carbon atoms , part of the carbon with other
  • the amorphous carbon phases can be viewed as an amorphous network of carbon atoms with a mixture of three different bond types: the bonds between two sp 2 -hybridized carbon atoms ("graphite-like” bonds), bonds between sp 3 -hybridized carbon atoms ("diamond-like” Bonds) and carbon-hydrogen bonds.
  • the associated carbon layers are referred to as “diamond-like”, the term “diamond-like carbon (also“ diamond-like carbon ”) as a collective term for a broad spectrum
  • Cup tappets or piston pins give the components excellent
  • Friction properties low adhesion, high surface hardness and offer increased protection against abrasive wear.
  • amorphous carbon layers also have the advantage that they can be produced at lower temperatures and therefore more economically.
  • the disadvantages of amorphous carbon layers include low mechanical toughness and high residual compressive stresses. The latter in particular, for example, represent a limiting factor for the layer thickness and also make it more difficult to apply amorphous carbon layers in a stable manner to curved surfaces.
  • Described coating with a hydrogen-free amorphous carbon layer and an adhesive layer made of zirconium The document DE 10 2004 043 550 A1 describes a coating with a hydrogen-free, tetrahedral amorphous carbon-containing functional layer and in the utility model AT 14701 U1 a coating source or a target (donor material) is described, which consists of doped carbon.
  • the task is to provide a component which has a layer system with a low coefficient of friction, high wear resistance and low internal stress and which is suitable for coating curved surfaces, in particular engine components.
  • a component comprising a substrate and a layer system applied to the substrate at least in regions, the layer system being a comprises friction and wear-reducing protective layer for forming a component surface, the protective layer comprising at least a first partial layer of doped
  • tetrahedral amorphous carbon which comprises sp 3 -hybridized carbon with a molar fraction of at least 50%, the first partial layer
  • Carbon it is necessary to generate a high proportion of sp 3 hybridized carbon atoms.
  • the electron transfer necessary for hybridization is stimulated by the introduction of energy, this energy being supplied to the carbon by interaction with high-energy particles, for example in arc evaporation or sputter deposition, in ion-assisted coating processes or in plasma-based processes.
  • high-energy particles for example in arc evaporation or sputter deposition, in ion-assisted coating processes or in plasma-based processes.
  • the action of these high-energy particles simultaneously distorts the structure of the carbon network and generates high mechanical residual compressive stresses, which in particular represent a limiting factor for the layer thickness.
  • the adhesion of the mechanically strained layer to a substrate is reduced, since the stresses tend to deform the layer, so that the layer can become detached or tear under tribological stress.
  • the application of the layer to curved component surfaces is further complicated by the fact that a predetermined deformation is forced on the layer by the geometric shape of the substrate.
  • a predetermined deformation is forced on the layer by the geometric shape of the substrate.
  • the additional doping of a first partial layer with metals has proven to be another effective measure for reducing the residual compressive stresses.
  • the doping with fluorine, silicon and / or copper leads to a considerable improvement in the tribological properties of the tetrahedral amorphous carbon layers.
  • Doping with silicon creates a protective layer that has a coefficient of friction on sliding contact with steel, which is only negligibly reduced by moisture.
  • tetrahedral amorphous carbon layers mixed with silicon have increased thermal stability.
  • Doping with boron in conjunction with fluorine creates protective layers that show a combination of high hardness and hydrophobic properties and the addition of tungsten can lead to a significant reduction in friction.
  • Another possible dopant is nitrogen, in order to give the protective layer a lower coefficient of friction and an extended service life.
  • a first partial layer contains the dopant or the dopants in a respective concentration in the range from 0.03 at.% To 15 at.%.
  • the respective concentration is preferably in the range from 0.2 at.% To 10 at.% And particularly preferably in the range from 0.2 at.% To 5 at.%.
  • the layer system has an adhesive layer, the adhesive layer being arranged between the substrate and the protective layer, and wherein the adhesive layer is chromium and / or titanium and / or tungsten and / or zirconium and / or molybdenum and / or Chromium nitride and / or titanium nitride and / or
  • the adhesion to a substrate with such an adhesive layer between the substrate and the protective layer can be improved.
  • an adhesive layer made of the above-mentioned materials the adhesive strength of the protective layer on the substrate can be significantly improved and thus made usable for use in components under tribological stress.
  • a metallic adhesive layer preferably made of titanium or chromium, can in particular significantly improve the adhesion to steel.
  • the adhesive layer has a layer thickness in the range from 0.001 pm to 2.0 pm.
  • the layer thickness is preferably in the range from 0.001 pm to 1.0 pm, particularly preferably in the range from 0.001 pm to 0.5 pm.
  • the layer system has an intermediate layer, the intermediate layer being arranged between the adhesive layer and the protective layer and having at least one carbide of a metal or transition metal and / or a carbonitride of a metal or transition metal and / or a non-metal.
  • a layer thickness of the intermediate layer is preferably in the range from 0.001 pm to 1.0 pm.
  • the layer thickness of the intermediate layer is in the range from 0.001 pm to 0.5 pm, particularly preferably in the range from 0.001 pm to 0.05 pm.
  • the intermediate layer can advantageously improve the adhesion between the protective layer and the adhesive layer.
  • the intermediate layer can be deposited in a separate growth step or can be produced, for example, by carbide formation at the interface between the adhesive layer and the carbon layer by implanting carbon in the free surface of the adhesive layer.
  • the protective layer consists of a single first partial layer made of doped tetrahedral amorphous carbon.
  • the first partial layer of doped tetrahedral amorphous carbon is applied directly to a substrate and the layer system has no additional adhesive or intermediate layers. That way
  • the protective layer has one or more first partial layers made of doped tetrahedral amorphous carbon and one or more second partial layers made of undoped tetrahedral amorphous carbon, the first and second partial layers alternating with one another. Due to the structure of alternately doped first sub-layers and undoped second
  • Sub-layers can be used to influence the mechanical properties of the protective layer in a targeted manner with just a few tests.
  • the spreading of material cracks is suppressed and the toughness of the protective layer is improved.
  • the properties of the multilayer structure can be further influenced by the degree of doping and the number and thickness of the first and second partial layers.
  • the protective layer has a hardness that is greater than 40 GPa.
  • the hardness information refers to a measurement using nanoindentation according to DIN EN ISO 14577-4 (April 2017).
  • the component is in particular a plain bearing component or a
  • Rolling bearing component or a component of a rocker arm or a rocker arm or a pump tappet or a roller tappet is arranged on the component in a rolling contact and / or a rolling contact and / or a sliding contact with an adjacent contact component.
  • the component is a rolling element, in particular a cam roller, for example a cam roller, the layer system being formed on a running surface of the rolling element and / or on one or more side surfaces of the rolling element.
  • rolling elements are used in the valve train of internal combustion engines, for example as part of a roller rocker arm.
  • the rocker arm serves as a transmission element between the cam and the push rod.
  • the cam is tapped via cam rollers or cam rollers.
  • the component can advantageously also be an outer ring, an inner ring or a rolling element of a rolling bearing or an outer ring or inner ring of a sliding bearing.
  • Another object of the invention relates to a method for producing the
  • Component according to the invention wherein at least a first partial layer of doped tetrahedral amorphous carbon is applied by the first partial layer by physical vapor deposition by means of arc vaporization, in particular an Arc method, and / or by high-power pulse magnetron sputtering (English: High Power Impulse Magnetron Sputtering, HiPIMS, or High Power Pulsed magnetron sputtering (HPPMS) is applied, the at least one dopant being introduced into the first partial layer via a gas phase and / or a target material (donor material) made of doped carbon being used and / or the at least one dopant being co-sputtered into the protective layer is installed.
  • high-power pulse magnetron sputtering English: High Power Impulse Magnetron Sputtering, HiPIMS, or High Power Pulsed magnetron sputtering (HPPMS) is applied, the at least one dopant being introduced into the first partial layer via a gas phase and / or
  • 1a shows an exemplary embodiment of a component according to the invention with a layer system on a substrate in a schematic illustration
  • FIG. 1b shows an embodiment of a component according to the invention with a
  • Fig. 2a shows an embodiment of a component according to the invention with a
  • Layer system comprising an adhesive layer on a substrate in a
  • FIG. 2b shows an embodiment of a component according to the invention with a
  • Layer system comprising an adhesive layer on a substrate in a
  • 3a shows an embodiment of a component according to the invention with a
  • Layer system comprising an intermediate layer on a substrate in a schematic representation
  • 3b shows an embodiment of a component according to the invention with a
  • Layer system comprising an intermediate layer on a substrate in a schematic representation
  • FIG. 4a shows an embodiment of a component according to the invention with a
  • Layer system comprising an adhesive layer and an intermediate layer on a substrate in a schematic representation
  • 4b shows an embodiment of a component according to the invention with a
  • Layer system comprising an adhesive layer and an intermediate layer on a substrate in a schematic representation
  • Fig. 5 shows an embodiment of a component according to the invention in the form of a
  • this consists of the protective layer 2, which consists of a single layer homogeneous first partial layer 4 is formed from doped tetrahedral amorphous carbon, which is applied directly to a substrate 3.
  • the component 100 comprises one
  • Protective layer 2 which is formed from a sequence of a plurality of first partial layers 4a and second partial layers 5, a first partial layer 4a made of a doped tetrahedral amorphous carbon being applied directly to the substrate 3, on which in turn a second partial layer 5 made of an undoped tetrahedral amorphous carbon is arranged. The change from doped first partial layers 4a and undoped second partial layers 5 continues up to the uppermost second partial layer 5.
  • the layer systems 1 shown here and in FIGS. 2b, 3b and 4b are exemplary representations.
  • the sequence of doped first sublayers 4a and undoped second sublayers 5 can in principle contain any number of first sublayers 4a and second sublayers 5.
  • an adhesive layer 6 is arranged between the substrate 3 and the protective layer 2, which improves the connection of the protective layer 2 to the substrate 3 and forms the layer system 1 together with the protective layer 2.
  • the protective layer 2 which comprises an alternating sequence of first partial layers 4a made of a doped tetrahedral amorphous carbon and second partial layers 5 made of an undoped tetrahedral amorphous carbon, and the substrate 3
  • Adhesive layer 6 arranged.
  • an intermediate layer 7, which forms the layer system 1 together with the protective layer 2 is arranged between a substrate 3 and the protective layer 2 comprising only a first partial layer 4a made of doped tetrahedral amorphous carbon.
  • an intermediate layer 7 is arranged between a protective layer 2, which has an alternating sequence of first partial layers 4a made of a doped tetrahedral amorphous carbon and of second partial layers 5 made of an undoped tetrahedral amorphous carbon together with the first partial layers 4a and the second partial layers 5 forms the layer system 1 applied to the substrate 3.
  • an adhesive layer 6 and an intermediate layer 7 are arranged between the substrate 3 and the protective layer 2 in the form of a first partial layer 4 of doped tetrahedral amorphous carbon, which together with the protective layer 2 form the layer system 1 .
  • Adhesive layer 6 improves the connection of the intermediate layer 7 to the substrate 3, while the intermediate layer 7 in turn functions as an adhesion promoter between the adhesive layer 6 and the protective layer 2.
  • the intermediate layer 7 can either be deposited separately after the adhesive layer 6 and before the protective layer 2 during the manufacturing process or can be formed, for example, by a reaction between the adhesive layer 6 and the protective layer 2 or by an implantation of carbon into the adhesive layer 6.
  • first partial layers 4a made of a doped tetrahedral amorphous carbon and of second partial layers 5 made of an undoped tetrahedral amorphous carbon
  • adhesive layer 6 and an intermediate layer 7 are arranged, which improve the connection to the substrate 3 analogous to FIG. 4a.
  • the running surface 9 of the rolling element 8 is provided with a layer system 1 in order to reduce the friction and
  • the side surfaces 10, 11 of the rolling element 8 can also be provided with the layer system 1.
  • the rolling element 8 described above is in particular a cam roller 8, an embodiment of the layer system 1 being formed on the running surface 9 of the rolling element 8 and / or on one or more side surfaces 10, 11 of the rolling element 8.
  • the components 100 described above and the rolling element 8 described above can be produced using an embodiment of the method according to the invention, in which a protective layer 2 comprising at least a first partial layer 4a is formed on a substrate 3 or the running surface 9 and / or the side surfaces 10, 11 endowed
  • the protective layer 2 by physical vapor deposition by means of arc evaporation and / or
  • High-power pulse magnetron sputtering is applied, with at least one dopant is introduced into the at least one first partial layer 4a via a gas phase and / or a target made of doped carbon is used and / or the at least one dopant is introduced into the at least one first partial layer 4a by co-sputtering.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
EP19768704.9A 2018-10-16 2019-09-02 Bauteil, insbesondere für ein ventiltriebsystem, und verfahren zur herstellung eines solchen bauteils Pending EP3867421A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018125631.0A DE102018125631A1 (de) 2018-10-16 2018-10-16 Schichtsystem, Rollelement und Verfahren
PCT/DE2019/100786 WO2020078505A1 (de) 2018-10-16 2019-09-02 Bauteil, insbesondere für ein ventiltriebsystem, und verfahren zur herstellung eines solchen bauteils

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US (1) US11739426B2 (zh)
EP (1) EP3867421A1 (zh)
KR (1) KR20210075061A (zh)
CN (1) CN112534084A (zh)
DE (1) DE102018125631A1 (zh)
WO (1) WO2020078505A1 (zh)

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US20240014532A1 (en) 2021-06-09 2024-01-11 Lg Energy Solution, Ltd. Battery cell fixing device and electrolyte impregnation device including the same
DE102021206765A1 (de) * 2021-06-29 2022-12-29 Robert Bosch Gesellschaft mit beschränkter Haftung Verschleißschutzbeschichtetes Metallbauteil

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DE102018125631A1 (de) 2020-04-16
CN112534084A (zh) 2021-03-19
US11739426B2 (en) 2023-08-29
WO2020078505A1 (de) 2020-04-23
US20210348279A1 (en) 2021-11-11

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