EP3840022B1 - Improved device for drying semiconductor substrates - Google Patents

Improved device for drying semiconductor substrates Download PDF

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Publication number
EP3840022B1
EP3840022B1 EP19217351.6A EP19217351A EP3840022B1 EP 3840022 B1 EP3840022 B1 EP 3840022B1 EP 19217351 A EP19217351 A EP 19217351A EP 3840022 B1 EP3840022 B1 EP 3840022B1
Authority
EP
European Patent Office
Prior art keywords
less
upper edge
drainage part
wedge
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19217351.6A
Other languages
German (de)
French (fr)
Other versions
EP3840022A1 (en
Inventor
Sebastian Geissler
Simon Rothenaicher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siltronic AG
Original Assignee
Siltronic AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to EP19217351.6A priority Critical patent/EP3840022B1/en
Application filed by Siltronic AG filed Critical Siltronic AG
Priority to JP2022537668A priority patent/JP7407943B2/en
Priority to PCT/EP2020/083659 priority patent/WO2021121903A1/en
Priority to CN202080088363.9A priority patent/CN114830315A/en
Priority to US17/785,063 priority patent/US20230008740A1/en
Priority to KR1020227024109A priority patent/KR102653286B1/en
Priority to TW109143660A priority patent/TWI753694B/en
Publication of EP3840022A1 publication Critical patent/EP3840022A1/en
Application granted granted Critical
Publication of EP3840022B1 publication Critical patent/EP3840022B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements

Definitions

  • the object of the invention is a device for use in drying disc-shaped semiconductor substrates.
  • the invention relates to a device being used to treat semiconductor wafers, in which the latter are immersed for some time in a bath containing a liquid and are then taken therefrom so slowly that practically the whole quantity of liquid remains in the bath.
  • a method of this kind may be used, for example, in the manufacture of electric circuits on all kinds of substrates, such as, for example, integrated circuits on semiconductor wafers (for example of silicon), drives for liquid crystal displays on transparent plates of glass or quartz or circuits on plates of synthetic material (circuit boards).
  • the method may also be used in the manufacture of shadow masks for television picture tubes or in the manufacture of CD or VLP records.
  • the substrates are immersed many times for some time in a bath containing a liquid, for example in galvanic baths for deposition of metals, in etching baths for etching patterns into metal layers or into semiconductor material, in development baths for developing exposed photo lacquer layers and in rinsing baths for cleaning the substrates. After treatment in the liquid baths, the substrates are taken from the liquid and are dried. The substrates can be taken from the liquid in that they are lifted or withdrawn from the liquid, but of course also in that the liquid is caused to flow out of the bath.
  • the semiconductor wafer While being taken from the bath the semiconductor wafer reside on a device is used to hold the semiconductor wafer in place. During this process, the problem can arise that residues of liquid remain at the edge of the substrate. This can lead to unwanted particles on the edge of the substrate, which are later on effecting the quality of the semiconductor wafer.
  • a device and a method to improve the quality of cleaning in respect to remaining particles of the semiconductor wafer is given in DE 10 2014 207 266 A1 . However, using this there are still particles left that reduce the quality of the semiconductor wafers.
  • Document US 2007/157951 A1 discloses a processing system comprising a rinsing and drying vessel configured for supporting a batch of substrates or wafers to be rinsed and dried.
  • Figure 1 illustrates a device (disc holder) according to the present invention.
  • the device comprises an elongated body (1), which tapers upwards to form a wedge (A) having an angle ⁇ between two surfaces and an upper edge.
  • the upper edge is suitable for the disc-shaped substrates to rest on.
  • the two surfaces of the wedge comprise more than one hole (2) each forming channels, which extend to a lower drainage part (B) of the elongated body.
  • the holes are placed in that way that the upper edge is not interrupted by the holes.
  • the angle ⁇ between the two surfaces is larger than 30° and smaller than 90°. More preferably, it is smaller than 70° and larger than 50°.
  • the material used for the device comprises ceramic filled polyetheretherketone (CFM PEEK).
  • the upper edge has a curvature radius of more than 0.1mm and less than 1mm, more preferably more than 0.1mm and less than 0.4mm.
  • the two surfaces are hydrophobic.
  • the channels have a diameter more than 0.5mm and less than 3mm.
  • the drainage part (B) comprises a channel having a diameter more than 3mm and less than 8mm.
  • the drainage part (B) has a length (L2) of more than 20mm and less than 26mm.
  • the wedge (A) has a height (L1) of more than 4mm and less than 10mm.

Description

  • The object of the invention is a device for use in drying disc-shaped semiconductor substrates.
    • Background of the Invention
  • The invention relates to a device being used to treat semiconductor wafers, in which the latter are immersed for some time in a bath containing a liquid and are then taken therefrom so slowly that practically the whole quantity of liquid remains in the bath.
    • Prior Art / Problems
  • A method of this kind may be used, for example, in the manufacture of electric circuits on all kinds of substrates, such as, for example, integrated circuits on semiconductor wafers (for example of silicon), drives for liquid crystal displays on transparent plates of glass or quartz or circuits on plates of synthetic material (circuit boards). The method may also be used in the manufacture of shadow masks for television picture tubes or in the manufacture of CD or VLP records. In all these cases, the substrates are immersed many times for some time in a bath containing a liquid, for example in galvanic baths for deposition of metals, in etching baths for etching patterns into metal layers or into semiconductor material, in development baths for developing exposed photo lacquer layers and in rinsing baths for cleaning the substrates. After treatment in the liquid baths, the substrates are taken from the liquid and are dried. The substrates can be taken from the liquid in that they are lifted or withdrawn from the liquid, but of course also in that the liquid is caused to flow out of the bath.
  • While being taken from the bath the semiconductor wafer reside on a device is used to hold the semiconductor wafer in place. During this process, the problem can arise that residues of liquid remain at the edge of the substrate. This can lead to unwanted particles on the edge of the substrate, which are later on effecting the quality of the semiconductor wafer.
  • The physical effect utilized thereby are described in CN1045539 A ( EP 03 855 36 A1 ), as is an apparatus which is to some extent suitable for conduction of the method.
  • A device and a method to improve the quality of cleaning in respect to remaining particles of the semiconductor wafer is given in DE 10 2014 207 266 A1 . However, using this there are still particles left that reduce the quality of the semiconductor wafers.
  • Document US 2007/157951 A1 discloses a processing system comprising a rinsing and drying vessel configured for supporting a batch of substrates or wafers to be rinsed and dried.
  • It is an object of the present invention to improve said device, and more particularly to show how the number of particles, which are found on the dried substrates, can be reduced by using this device.
    • Description of the Invention
  • Figure 1 illustrates a device (disc holder) according to the present invention.
  • The device comprises an elongated body (1), which tapers upwards to form a wedge (A) having an angle α between two surfaces and an upper edge. The upper edge is suitable for the disc-shaped substrates to rest on. Preferably, the two surfaces of the wedge comprise more than one hole (2) each forming channels, which extend to a lower drainage part (B) of the elongated body. The holes are placed in that way that the upper edge is not interrupted by the holes.
  • Preferably, the angle α between the two surfaces is larger than 30° and smaller than 90°. More preferably, it is smaller than 70° and larger than 50°.
  • Preferably, the material used for the device comprises ceramic filled polyetheretherketone (CFM PEEK).
  • Preferably, the upper edge has a curvature radius of more than 0.1mm and less than 1mm, more preferably more than 0.1mm and less than 0.4mm.
  • Preferably, the two surfaces are hydrophobic.
  • Preferably, the channels have a diameter more than 0.5mm and less than 3mm. Preferably, the drainage part (B) comprises a channel having a diameter more than 3mm and less than 8mm.
  • Preferably, the drainage part (B) has a length (L2) of more than 20mm and less than 26mm.
  • Preferably, the wedge (A) has a height (L1) of more than 4mm and less than 10mm.
    • List of reference numerals employed
    • A
    Wedge region of the elongated body
    B
    Drainage part of the elongated body
    L1
    Height of the wedge formed on top of the elongated body
    L2
    Height of the drainage part
    1
    Elongated body
    2
    Hole(s)
    α
    Opening angle of the wedge, angle between two surfaces and an upper edge

Claims (9)

  1. Device for drying disc-shaped substrates comprising
    an elongated body (1),
    which tapers upwards to form a wedge (A) having an angle α between two surfaces and an upper edge
    wherein the upper edge is suitable for holding the disc-shaped substrates, characterized in that the two surfaces comprise more than one hole (2) each forming channels, which extend to a lower drainage part (B) of the elongated body.
  2. Device according to claim 1, characterized in that
    the angle α is larger than 30° and smaller than 90°, preferably larger than 50° and smaller than 70°.
  3. Device according to claim 1 or claim 2, characterized in that
    the material used for the device comprises ceramic filled polyetheretherketone (CFM PEEK).
  4. Device according to claim 1 to claim 3, characterized in that
    the upper edge has a curvature radius of more than 0.1 mm and less than 1 mm.
  5. Device according to claim 1 to claim 4, characterized in that
    the channels have a diameter more than 0.5mm and less than 3mm.
  6. Device according to claim 1 to claim 5, characterized in that
    the drainage part (B) comprises a channel having a diameter more than 3mm and less than 8mm.
  7. Device according to claim 1 to claim 6, characterized in that
    the drainage part (B) has a length (L2) of more than 20mm and less than 26mm.
  8. Device according to claim 1 to claim 7, characterized in that
    the wedge (A) has a height (L1) of more than 4mm and less than 10mm.
  9. Method of drying a disc-shaped substrate using a device according to any of claims 1 to 8.
EP19217351.6A 2019-12-18 2019-12-18 Improved device for drying semiconductor substrates Active EP3840022B1 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
EP19217351.6A EP3840022B1 (en) 2019-12-18 2019-12-18 Improved device for drying semiconductor substrates
PCT/EP2020/083659 WO2021121903A1 (en) 2019-12-18 2020-11-27 Improved device for drying semiconductor substrates
CN202080088363.9A CN114830315A (en) 2019-12-18 2020-11-27 Improved apparatus for drying semiconductor substrates
US17/785,063 US20230008740A1 (en) 2019-12-18 2020-11-27 Device for drying semiconductor substrates
JP2022537668A JP7407943B2 (en) 2019-12-18 2020-11-27 Improved equipment for drying semiconductor substrates
KR1020227024109A KR102653286B1 (en) 2019-12-18 2020-11-27 Improved device for drying semiconductor substrates
TW109143660A TWI753694B (en) 2019-12-18 2020-12-10 Improved device for drying semiconductor substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19217351.6A EP3840022B1 (en) 2019-12-18 2019-12-18 Improved device for drying semiconductor substrates

Publications (2)

Publication Number Publication Date
EP3840022A1 EP3840022A1 (en) 2021-06-23
EP3840022B1 true EP3840022B1 (en) 2022-10-05

Family

ID=69055638

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19217351.6A Active EP3840022B1 (en) 2019-12-18 2019-12-18 Improved device for drying semiconductor substrates

Country Status (7)

Country Link
US (1) US20230008740A1 (en)
EP (1) EP3840022B1 (en)
JP (1) JP7407943B2 (en)
KR (1) KR102653286B1 (en)
CN (1) CN114830315A (en)
TW (1) TWI753694B (en)
WO (1) WO2021121903A1 (en)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8900480A (en) 1989-02-27 1990-09-17 Philips Nv METHOD AND APPARATUS FOR DRYING SUBSTRATES AFTER TREATMENT IN A LIQUID
JPH07263390A (en) * 1994-03-22 1995-10-13 Dainippon Screen Mfg Co Ltd Method and device for cleaning and drying substrate
US6497785B2 (en) * 2001-01-16 2002-12-24 Taiwan Semiconductor Manufacturing Co., Ltd. Wet chemical process tank with improved fluid circulation
US6907890B2 (en) * 2002-02-06 2005-06-21 Akrion Llc Capillary drying of substrates
KR100678472B1 (en) * 2005-01-25 2007-02-02 삼성전자주식회사 Wafer Guide and Semiconductor Wafer Drying Apparatus Using the Same
JP5043021B2 (en) * 2005-10-04 2012-10-10 アプライド マテリアルズ インコーポレイテッド Method and apparatus for drying a substrate
US20070157951A1 (en) * 2006-01-06 2007-07-12 Micron Technology, Inc. Systems and methods for processing microfeature workpieces
JP4999808B2 (en) * 2008-09-29 2012-08-15 東京エレクトロン株式会社 Substrate processing equipment
DE102014207266A1 (en) * 2014-04-15 2015-10-15 Siltronic Ag Method for drying disc-shaped substrates and disc holders for carrying out the method

Also Published As

Publication number Publication date
JP2023507011A (en) 2023-02-20
CN114830315A (en) 2022-07-29
WO2021121903A1 (en) 2021-06-24
US20230008740A1 (en) 2023-01-12
EP3840022A1 (en) 2021-06-23
KR102653286B1 (en) 2024-03-29
JP7407943B2 (en) 2024-01-04
KR20220114609A (en) 2022-08-17
TWI753694B (en) 2022-01-21
TW202125694A (en) 2021-07-01

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