EP3804478A4 - Gehäuse für halbleiterbauelement und verfahren zu dessen verwendung - Google Patents
Gehäuse für halbleiterbauelement und verfahren zu dessen verwendung Download PDFInfo
- Publication number
- EP3804478A4 EP3804478A4 EP19811278.1A EP19811278A EP3804478A4 EP 3804478 A4 EP3804478 A4 EP 3804478A4 EP 19811278 A EP19811278 A EP 19811278A EP 3804478 A4 EP3804478 A4 EP 3804478A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- semiconductor device
- device package
- package
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/02002—Arrangements for conducting electric current to or from the device in operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00317—Packaging optical devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0006—Interconnects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14618—Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0203—Containers; Encapsulations, e.g. encapsulation of photodiodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0109—Bonding an individual cap on the substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0172—Seals
- B81C2203/019—Seals characterised by the material or arrangement of seals between parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/03—Bonding two components
- B81C2203/033—Thermal bonding
- B81C2203/036—Fusion bonding
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/995,510 US10693020B2 (en) | 2018-06-01 | 2018-06-01 | Semiconductor device package and method for use thereof |
PCT/US2019/034185 WO2019231919A1 (en) | 2018-06-01 | 2019-05-28 | Semiconductor device package and method for use thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3804478A1 EP3804478A1 (de) | 2021-04-14 |
EP3804478A4 true EP3804478A4 (de) | 2022-03-09 |
Family
ID=68693249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19811278.1A Pending EP3804478A4 (de) | 2018-06-01 | 2019-05-28 | Gehäuse für halbleiterbauelement und verfahren zu dessen verwendung |
Country Status (5)
Country | Link |
---|---|
US (1) | US10693020B2 (de) |
EP (1) | EP3804478A4 (de) |
JP (1) | JP2021525956A (de) |
TW (1) | TW202013754A (de) |
WO (1) | WO2019231919A1 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113200509A (zh) * | 2021-04-08 | 2021-08-03 | 日月光半导体制造股份有限公司 | 电子元件及半导体封装装置 |
CN113200510A (zh) * | 2021-04-29 | 2021-08-03 | 日月光半导体制造股份有限公司 | 半导体结构 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102237384A (zh) * | 2010-04-23 | 2011-11-09 | 艾普特佩克股份有限公司 | 电子器件封装及其制造方法 |
WO2013062533A1 (en) * | 2011-10-25 | 2013-05-02 | Intel Corporation | Interposer for hermetic sealing of sensor chips and for their integration with integrated circuit chips |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6140144A (en) * | 1996-08-08 | 2000-10-31 | Integrated Sensing Systems, Inc. | Method for packaging microsensors |
EP1041628A3 (de) * | 1999-03-29 | 2008-05-28 | Interuniversitair Microelektronica Centrum Vzw | BGA-Bildsensor-Verpackung und deren Herstellungsmethode |
JP4603231B2 (ja) * | 2002-07-19 | 2010-12-22 | パナソニック電工株式会社 | 火災感知器 |
JP2005045034A (ja) * | 2003-07-22 | 2005-02-17 | Nippon Aleph Corp | フォトインタラプタ用光学装置 |
CA2468924A1 (en) * | 2004-01-14 | 2005-07-14 | Laser Diagnostic Instruments International Inc. | A device and method for non-contact sensing of low-concentration and trace substances |
US7442570B2 (en) * | 2005-03-18 | 2008-10-28 | Invensence Inc. | Method of fabrication of a AL/GE bonding in a wafer packaging environment and a product produced therefrom |
JP2009042469A (ja) * | 2007-08-08 | 2009-02-26 | Sharp Corp | 光モジュール、光モジュールの製造方法、光モジュールを用いて構成された光・電子複合回路、およびその製造方法 |
US8809923B2 (en) * | 2008-02-06 | 2014-08-19 | Omnivision Technologies, Inc. | Backside illuminated imaging sensor having a carrier substrate and a redistribution layer |
JP2010021219A (ja) * | 2008-07-09 | 2010-01-28 | Nec Schott Components Corp | パッケージングデバイス装置およびパッケージ用ベース部材 |
US20100289104A1 (en) * | 2009-05-14 | 2010-11-18 | Optopac Co., Ltd. | Photosensor package |
KR100976812B1 (ko) * | 2010-02-08 | 2010-08-20 | 옵토팩 주식회사 | 전자 소자 패키지 및 그 제조 방법 |
US8659148B2 (en) * | 2010-11-30 | 2014-02-25 | General Electric Company | Tileable sensor array |
US8476087B2 (en) * | 2011-04-21 | 2013-07-02 | Freescale Semiconductor, Inc. | Methods for fabricating sensor device package using a sealing structure |
US20130050227A1 (en) * | 2011-08-30 | 2013-02-28 | Qualcomm Mems Technologies, Inc. | Glass as a substrate material and a final package for mems and ic devices |
US8824706B2 (en) * | 2011-08-30 | 2014-09-02 | Qualcomm Mems Technologies, Inc. | Piezoelectric microphone fabricated on glass |
US9368429B2 (en) * | 2011-10-25 | 2016-06-14 | Intel Corporation | Interposer for hermetic sealing of sensor chips and for their integration with integrated circuit chips |
JP2017022056A (ja) * | 2015-07-14 | 2017-01-26 | 日本放送協会 | 基板処理方法及びパッケージの気密封止方法 |
-
2018
- 2018-06-01 US US15/995,510 patent/US10693020B2/en active Active
-
2019
- 2019-05-28 JP JP2020566268A patent/JP2021525956A/ja active Pending
- 2019-05-28 WO PCT/US2019/034185 patent/WO2019231919A1/en unknown
- 2019-05-28 EP EP19811278.1A patent/EP3804478A4/de active Pending
- 2019-05-30 TW TW108118752A patent/TW202013754A/zh unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102237384A (zh) * | 2010-04-23 | 2011-11-09 | 艾普特佩克股份有限公司 | 电子器件封装及其制造方法 |
WO2013062533A1 (en) * | 2011-10-25 | 2013-05-02 | Intel Corporation | Interposer for hermetic sealing of sensor chips and for their integration with integrated circuit chips |
Non-Patent Citations (1)
Title |
---|
See also references of WO2019231919A1 * |
Also Published As
Publication number | Publication date |
---|---|
US10693020B2 (en) | 2020-06-23 |
US20190371944A1 (en) | 2019-12-05 |
WO2019231919A1 (en) | 2019-12-05 |
TW202013754A (zh) | 2020-04-01 |
EP3804478A1 (de) | 2021-04-14 |
JP2021525956A (ja) | 2021-09-27 |
WO2019231919A8 (en) | 2021-02-11 |
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Legal Events
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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STAA | Information on the status of an ep patent application or granted ep patent |
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17P | Request for examination filed |
Effective date: 20201214 |
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AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
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AX | Request for extension of the european patent |
Extension state: BA ME |
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DAV | Request for validation of the european patent (deleted) | ||
DAX | Request for extension of the european patent (deleted) | ||
A4 | Supplementary search report drawn up and despatched |
Effective date: 20220203 |
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RIC1 | Information provided on ipc code assigned before grant |
Ipc: B81C 1/00 20060101ALI20220128BHEP Ipc: H01L 31/02 20060101ALI20220128BHEP Ipc: H05K 1/18 20060101ALI20220128BHEP Ipc: H05K 1/02 20060101AFI20220128BHEP |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: EXAMINATION IS IN PROGRESS |
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17Q | First examination report despatched |
Effective date: 20240206 |