EP3683577A4 - Quantitative analysis method for monomer of photoresist binder - Google Patents

Quantitative analysis method for monomer of photoresist binder Download PDF

Info

Publication number
EP3683577A4
EP3683577A4 EP18856906.5A EP18856906A EP3683577A4 EP 3683577 A4 EP3683577 A4 EP 3683577A4 EP 18856906 A EP18856906 A EP 18856906A EP 3683577 A4 EP3683577 A4 EP 3683577A4
Authority
EP
European Patent Office
Prior art keywords
monomer
analysis method
quantitative analysis
photoresist binder
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP18856906.5A
Other languages
German (de)
French (fr)
Other versions
EP3683577A1 (en
EP3683577B1 (en
Inventor
Su Youn Han
Yura LEE
Byoung Hyoun Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LG Chem Ltd
Original Assignee
LG Chem Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LG Chem Ltd filed Critical LG Chem Ltd
Publication of EP3683577A1 publication Critical patent/EP3683577A1/en
Publication of EP3683577A4 publication Critical patent/EP3683577A4/en
Application granted granted Critical
Publication of EP3683577B1 publication Critical patent/EP3683577B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/62—Detectors specially adapted therefor
    • G01N30/72—Mass spectrometers
    • G01N30/7206—Mass spectrometers interfaced to gas chromatograph
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/88—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/04—Preparation or injection of sample to be analysed
    • G01N30/06—Preparation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/04—Preparation or injection of sample to be analysed
    • G01N30/06—Preparation
    • G01N30/12—Preparation by evaporation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/62—Detectors specially adapted therefor
    • G01N30/72—Mass spectrometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/04—Preparation or injection of sample to be analysed
    • G01N30/06—Preparation
    • G01N30/12—Preparation by evaporation
    • G01N2030/125—Preparation by evaporation pyrolising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/88—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86
    • G01N2030/8809—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86 analysis specially adapted for the sample
    • G01N2030/884—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86 analysis specially adapted for the sample organic compounds
    • G01N2030/885—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86 analysis specially adapted for the sample organic compounds involving polymers

Landscapes

  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Optical Filters (AREA)
  • Adhesives Or Adhesive Processes (AREA)
EP18856906.5A 2017-09-13 2018-08-24 Quantitative analysis method for monomer of photoresist binder Active EP3683577B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020170117204A KR102139407B1 (en) 2017-09-13 2017-09-13 Quantitative analysis method of monomers in binders of photoresists
PCT/KR2018/009792 WO2019054663A1 (en) 2017-09-13 2018-08-24 Quantitative analysis method for monomer of photoresist binder

Publications (3)

Publication Number Publication Date
EP3683577A1 EP3683577A1 (en) 2020-07-22
EP3683577A4 true EP3683577A4 (en) 2020-11-04
EP3683577B1 EP3683577B1 (en) 2022-07-06

Family

ID=65722905

Family Applications (1)

Application Number Title Priority Date Filing Date
EP18856906.5A Active EP3683577B1 (en) 2017-09-13 2018-08-24 Quantitative analysis method for monomer of photoresist binder

Country Status (6)

Country Link
US (1) US11579126B2 (en)
EP (1) EP3683577B1 (en)
JP (1) JP7004253B2 (en)
KR (1) KR102139407B1 (en)
CN (1) CN110462395A (en)
WO (1) WO2019054663A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111044657B (en) * 2019-12-16 2022-07-12 上海微谱化工技术服务有限公司 Method for detecting functional monomer in solvent type acrylic resin
CN113702521A (en) * 2021-08-18 2021-11-26 汤臣(江苏)材料科技股份有限公司 Method for rapidly determining regenerated methyl methacrylate generated by cracking of organic glass

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6227662A (en) * 1985-07-27 1987-02-05 Nippon Oil & Fats Co Ltd Method for analysis of vinyl type terpolymer
JPH0933508A (en) * 1995-07-20 1997-02-07 Sekisui Chem Co Ltd Method for analyzing composition of copolymer containing acrylic acid and/or methacrylic acid
JP2011247630A (en) * 2010-05-24 2011-12-08 Mitsubishi Rayon Co Ltd Copolymer composition analysis method and program thereof
KR20170028240A (en) * 2015-09-03 2017-03-13 주식회사 엘지화학 Analytical Method and System for Monomer of Acrylate Adhesive

Family Cites Families (27)

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Publication number Priority date Publication date Assignee Title
JPS60219208A (en) 1984-04-13 1985-11-01 Japan Synthetic Rubber Co Ltd Rubber-like conjugated diene copolymer and its production
US4996134A (en) 1984-04-13 1991-02-26 Japan Synthetic Rubber Co., Ltd. Conjugated diene copolymer, a process for producing the copolymer, and a photosensitive composition comprising the copolymer
CA2076727A1 (en) * 1991-08-30 1993-03-01 Richard T. Mayes Alkaline-etch resistant dry film photoresist
JP3168380B2 (en) * 1994-07-29 2001-05-21 キヤノン株式会社 Electrostatic image developing toner, toner manufacturing method and image forming method
US5876899A (en) * 1996-09-18 1999-03-02 Shipley Company, L.L.C. Photoresist compositions
JP3444818B2 (en) 1999-06-29 2003-09-08 シャープ株式会社 Inspection method and management method of coating liquid for electrophotographic photoreceptor
WO2002014497A2 (en) * 2000-08-16 2002-02-21 Purdue Research Foundation Genes encoding mutant p-coumarate 3-hydroxylase (c3h) and methods of use
JPWO2005070691A1 (en) 2004-01-27 2007-09-06 旭化成ケミカルズ株式会社 Photosensitive resin composition for printing substrate capable of laser engraving
JP2006193479A (en) * 2005-01-14 2006-07-27 Mitsubishi Rayon Co Ltd Apparatus and method for depolymerizing acrylic resin
EP1911770A4 (en) * 2005-08-03 2009-07-22 Inctec Inc Method for producing polymer composition and polymer composition
US8187794B2 (en) 2007-04-23 2012-05-29 Eastman Kodak Company Ablatable elements for making flexographic printing plates
EP2141496B1 (en) 2007-04-26 2011-09-07 Sumitomo Electric Industries, Ltd. Method of analyzing inorganic phosphorus in organic material
JP5840355B2 (en) 2009-10-22 2016-01-06 旭化成ケミカルズ株式会社 Acrylic resin and molded body
KR101113645B1 (en) * 2010-07-27 2012-02-14 현대자동차주식회사 Quantitative analysis method of Acrylonitrile and Additive in Acrylonitrile-Butadiene rubber composition
JP2012078340A (en) 2010-09-10 2012-04-19 Polyplastics Co Quantitative method for cyclic olefin polymer content and production method of resin composition
JP2012220686A (en) 2011-04-07 2012-11-12 Asahi Kasei E-Materials Corp Photosensitive resin composition and laminate of the same
KR101209618B1 (en) * 2011-07-07 2012-12-07 현대자동차주식회사 The quantitative analysis method of ethylidene norborene in ethylene propylene diene monomer using pyrolyzer gaschromatography massspectrometer
WO2013084282A1 (en) 2011-12-05 2013-06-13 日立化成株式会社 Method for forming resin cured film pattern, photosensitive resin composition, and photosensitive element
WO2013084284A1 (en) 2011-12-05 2013-06-13 日立化成株式会社 Method for forming protective film for touch panel electrodes, photosensitive resin composition, and photosensitive element
JP5774054B2 (en) 2012-05-31 2015-09-02 エルジー・ケム・リミテッド Novel polymer and coloring composition containing the same
KR20140047190A (en) 2012-10-04 2014-04-22 현대자동차주식회사 Quantitative analysis method for rubber composition of synthetic rubber and natural rubber compound
KR101914815B1 (en) 2013-09-30 2018-11-05 주식회사 엘지화학 Resin compositions for optical film, optical films formed by using the same, polarizing plate and display device comprising the same
JP6522288B2 (en) 2014-06-23 2019-05-29 住友化学株式会社 Methacrylic resin composition and molded article thereof
KR101734214B1 (en) * 2014-09-26 2017-05-11 주식회사 엘지화학 Analytical Method and System for Composition of Monomer in Modified (poly(vinylidene fluoride) Resin
CN104458994B (en) 2014-12-16 2016-01-27 上海微谱化工技术服务有限公司 The analytical approach of acryl resin
JP2016155256A (en) 2015-02-23 2016-09-01 コニカミノルタ株式会社 Heat shielding film, and method for producing the same
US9887455B2 (en) 2015-03-05 2018-02-06 Kymeta Corporation Aperture segmentation of a cylindrical feed antenna

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6227662A (en) * 1985-07-27 1987-02-05 Nippon Oil & Fats Co Ltd Method for analysis of vinyl type terpolymer
JPH0933508A (en) * 1995-07-20 1997-02-07 Sekisui Chem Co Ltd Method for analyzing composition of copolymer containing acrylic acid and/or methacrylic acid
JP2011247630A (en) * 2010-05-24 2011-12-08 Mitsubishi Rayon Co Ltd Copolymer composition analysis method and program thereof
KR20170028240A (en) * 2015-09-03 2017-03-13 주식회사 엘지화학 Analytical Method and System for Monomer of Acrylate Adhesive

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2019054663A1 *

Also Published As

Publication number Publication date
EP3683577A1 (en) 2020-07-22
CN110462395A (en) 2019-11-15
US11579126B2 (en) 2023-02-14
JP7004253B2 (en) 2022-01-21
WO2019054663A1 (en) 2019-03-21
JP2020515852A (en) 2020-05-28
KR20190030013A (en) 2019-03-21
EP3683577B1 (en) 2022-07-06
KR102139407B1 (en) 2020-07-29
US20200319151A1 (en) 2020-10-08

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