EP3629366A3 - Vacuum system and vacuum pump - Google Patents
Vacuum system and vacuum pump Download PDFInfo
- Publication number
- EP3629366A3 EP3629366A3 EP20152401.4A EP20152401A EP3629366A3 EP 3629366 A3 EP3629366 A3 EP 3629366A3 EP 20152401 A EP20152401 A EP 20152401A EP 3629366 A3 EP3629366 A3 EP 3629366A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum
- active
- vacuum pump
- pump
- pumping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005086 pumping Methods 0.000 abstract 3
- 238000004949 mass spectrometry Methods 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
Abstract
Vakuumsystem (20), insbesondere Massenspektrometriesystem, umfassend: eine Vakuumpumpe (22) mit einem pumpaktiven Bereich (34), in dem ein Gas mittels eines aktiven Pumpelements (36) förderbar ist, eine Einrichtung zum Erzeugen eines Strahls (26, 32) von zu analysierenden Teilchen, wobei der Strahl (26, 32) in den pumpaktiven Bereich (34) geführt ist.Vacuum system (20), in particular a mass spectrometry system, comprising: a vacuum pump (22) with an active pumping area (34) in which a gas can be conveyed by means of an active pumping element (36), a device for generating a jet (26, 32) from to analyzing particles, the beam (26, 32) being guided into the pumping active area (34).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP20152401.4A EP3629366B1 (en) | 2020-01-17 | 2020-01-17 | Vacuum system and vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP20152401.4A EP3629366B1 (en) | 2020-01-17 | 2020-01-17 | Vacuum system and vacuum pump |
Publications (3)
Publication Number | Publication Date |
---|---|
EP3629366A2 EP3629366A2 (en) | 2020-04-01 |
EP3629366A3 true EP3629366A3 (en) | 2020-09-02 |
EP3629366B1 EP3629366B1 (en) | 2022-05-11 |
Family
ID=69177062
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP20152401.4A Active EP3629366B1 (en) | 2020-01-17 | 2020-01-17 | Vacuum system and vacuum pump |
Country Status (1)
Country | Link |
---|---|
EP (1) | EP3629366B1 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1193497A2 (en) * | 2000-09-14 | 2002-04-03 | GSF-Forschungszentrum für Umwelt und Gesundheit GmbH | Method and device for characterising surface properties of gasborne aerosol particles |
US20070148020A1 (en) * | 2005-12-22 | 2007-06-28 | Mccauley Edward B | Apparatus and method for pumping in an ion optical device |
WO2016142683A1 (en) * | 2015-03-06 | 2016-09-15 | Micromass Uk Limited | Improved ionisation of gaseous samples |
-
2020
- 2020-01-17 EP EP20152401.4A patent/EP3629366B1/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1193497A2 (en) * | 2000-09-14 | 2002-04-03 | GSF-Forschungszentrum für Umwelt und Gesundheit GmbH | Method and device for characterising surface properties of gasborne aerosol particles |
US20070148020A1 (en) * | 2005-12-22 | 2007-06-28 | Mccauley Edward B | Apparatus and method for pumping in an ion optical device |
WO2016142683A1 (en) * | 2015-03-06 | 2016-09-15 | Micromass Uk Limited | Improved ionisation of gaseous samples |
Also Published As
Publication number | Publication date |
---|---|
EP3629366A2 (en) | 2020-04-01 |
EP3629366B1 (en) | 2022-05-11 |
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