EP3613264A1 - Corona effect plasma device and plasma reactor - Google Patents

Corona effect plasma device and plasma reactor

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Publication number
EP3613264A1
EP3613264A1 EP18723700.3A EP18723700A EP3613264A1 EP 3613264 A1 EP3613264 A1 EP 3613264A1 EP 18723700 A EP18723700 A EP 18723700A EP 3613264 A1 EP3613264 A1 EP 3613264A1
Authority
EP
European Patent Office
Prior art keywords
electrode
polarized electrode
cell
polarized
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP18723700.3A
Other languages
German (de)
French (fr)
Other versions
EP3613264B1 (en
EP3613264C0 (en
Inventor
Pierre DE LINAGE
Stephen LUNEL
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Airinspace SE
Original Assignee
Airinspace SE
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Filing date
Publication date
Application filed by Airinspace SE filed Critical Airinspace SE
Publication of EP3613264A1 publication Critical patent/EP3613264A1/en
Application granted granted Critical
Publication of EP3613264B1 publication Critical patent/EP3613264B1/en
Publication of EP3613264C0 publication Critical patent/EP3613264C0/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/47—Generating plasma using corona discharges
    • H05H1/471—Pointed electrodes

Definitions

  • the present invention relates to the field of plasma discharge by corona discharge and more particularly that of plasma reactors.
  • corona plasma device to produce, by corona discharge, a plasma and an ionic flux.
  • a corona plasma device advantageously makes it possible to produce a plasma for ionizing a fluid passing through the device.
  • Such ionization finds multiple and complementary functionalities, for example, in the field of the treatment of a fluid, such as air.
  • an ionization allows, by ion deposition, to charge a particle contained in the fluid. This particle thus charged can advantageously be retained by an electrostatic filter, which can be arranged downstream of the device.
  • an ionization has a neutralizing action on pathogenic organisms, such as viruses, which can be carried in the fluid.
  • an ionization advantageously produces oxidizing chemical species useful for the decontamination of a mechanical filter, such as an activated carbon filter, which can be arranged downstream of the device.
  • a corona plasma device or a plasma reactor comprising a plurality of such devices, advantageously constitutes an upstream stage of a multi-fluid filter means.
  • corona plasma device It is known to produce a corona plasma device, to use a polarized electrode and an earth electrode, arranged opposite the polarized electrode, and to apply between these two electrodes a significant potential difference, of the order of several thousand volts. This creates a plasma as well as corona discharges producing ion discharges. The ionization effect of the fluid is obtained by creating a circulation of the fluid forcing the fluid to pass through the plasma.
  • FIRE I LLE OF REM PLACEM ENT in a first configuration, said tip plane, a polarized electrode having a small radius of curvature is disposed perpendicularly to a substantially flat earth electrode; in another so-called wire-cylinder configuration, a wired polarized electrode is disposed axially in a cylindrical earth electrode.
  • FR 2818451 proposes to combine these two configurations by using a needle-shaped polarized electrode and a ground electrode comprising a substantially plane wire mesh disposed perpendicular to the polarized electrode and a cylinder surrounding the polarized electrode over its entire length. This device is traversed by the fluid in a direction parallel to the coinciding axis of the polarized electrode and the cylinder.
  • the subject of the invention is a corona plasma cell comprising a substantially needle-shaped polarized electrode and an earth electrode disposed opposite the polarized electrode, comprising a cylinder substantially centered on the polarized electrode and a substantially plane porous film perpendicular to the polarized electrode, wherein the cylinder has a low profile, preferably with negligible height in front of its diameter, and wherein the polarized electrode does not penetrate the cylinder.
  • the porous film is arranged, relative to the polarized electrode, on the side opposite the cylinder.
  • the porous film is a surface for the passage of air with pores having a size ranging from 0.1 mm to 500 mm, preferably from 5 mm to 50 mm.
  • the thickness of the porous film is advantageously between 0.5 and 50 mm, preferably between 1 and 5 mm.
  • the porous film is a metal mesh
  • the meshes may have different shapes (square, rhombus, etc.).
  • the metal mesh in question is a sheet of expanded metal.
  • the subject of the invention is also a corona-effect dual plasma element comprising a first corona-effect plasma cell as defined above comprising a first polarized electrode and a first earth electrode, arranged facing the first polarized electrode, a second cell a corona-effect plasma as defined above comprising a second polarized electrode and a second earth electrode disposed opposite the second polarized electrode, wherein the first cell and the second cell are arranged symmetrically (head to tail).
  • the first polarized electrode and the second polarized electrode are connected to the same first potential and the first ground electrode and the second ground electrode are connected to the same second potential, different from the first potential.
  • the first potential is negative and the second potential is ground.
  • the polarized electrode or electrodes are connected to a negative potential and are then called discharge electrodes.
  • the first polarized electrode and the second polarized electrode are substantially needle-shaped and are supported by a conductive support connected to the first polarized electrode, the second polarized electrode and the first potential, which conductive support is preferably substantially plane.
  • the conductive support comprises a printed circuit comprising at least one conductive track connected to the first polarized electrode, the second polarized electrode and the first potential.
  • a polarized electrode is disposed in a metallized via pierced in said at least one conductive track.
  • the printed circuit comprises days, preferably entirely, to the exclusion of a narrow band formed around said at least one conducting track.
  • the first polarized electrode and the second polarized electrode are axially aligned, and are preferably made of material (ie one and the same piece).
  • At least one of the first cell and the second cell is a cell according to one of the preceding embodiments.
  • the invention further relates to a plasma reactor comprising a plurality of corona plasma emission devices arranged side by side in a substantially plane arrangement, where the devices are cells according to one of the preceding embodiments, or the devices are dual elements according to one of the preceding embodiments.
  • the arrangement is a substantially square grid.
  • FIG. 1 illustrates, in sectional view, a cell according to the invention
  • FIG. 2 illustrates, in cutaway view, a dual element according to the invention
  • FIG. 3 illustrates, in cutaway view, the polarization of a dual element
  • FIG. 4 illustrates, in cutaway view, a dual element comprising two cells of FIG. 1,
  • FIG. 5 illustrates, in sectional view, the dual element of FIG. 4, side according to one embodiment
  • FIG. 6 illustrates, in cutaway view, a plasma reactor
  • FIG. 7 illustrates, in perspective view, a plasma reactor
  • FIG. 8 illustrates, in plan view, a printed circuit supporting polarized electrodes.
  • the invention relates to an improved corona 1 1 plasma cell.
  • a cell 1 1 comprises a polarized electrode 12 substantially needle-shaped and a ground electrode 13, disposed opposite the polarized electrode 12.
  • the ground electrode 13 comprises a cylinder 14 substantially centered on the polarized electrode 12 and a porous film 15 substantially plane perpendicular to the polarized electrode 12.
  • the polarized electrode 12 is typically fixed on a support 16 advantageously perforated to allow the passage of a flow of fluid. The distance between the polarized electrode 12 and the earth electrode
  • a cell 1 1 according to the invention is improved in that the cylinder 14 is shaped so as to have a low profile. This means that the height of the cylinder
  • the diameter of the cylinder is between 20 and 100 mm, preferably between 25 and 75 mm, for example between 30 and 60 mm and, particularly preferably between 35 and 55 mm.
  • the thickness of the cylinder it is less than 10 mm, preferably between 1 and 5 mm.
  • the polarized electrode 12 is shaped sufficiently short so as not to penetrate the cylinder 14.
  • the flow of fluid to be ionized by means of the cell 1 1 is substantially vertical with respect to FIG. 1.
  • the combined reduction in the height of the cylinder 14 and the length of the polarized electrode 12 advantageously makes it possible to drastically reduce the overall height. of the cell 1 1, since the ground electrode 13, much lower can be close to the polarized electrode 12, itself shortened.
  • the polarized electrode 12 out of the cylinder 14 makes it possible to shape the plasma substantially in a very flattened cone shape, substantially transverse to the fluid flow, favoring good ionization.
  • the opening angle of the ion flow cone is between 136 ° and 1 12 °.
  • the porous film 15 is arranged, relative to the discharge electrode 12, on the side opposite to the cylinder 14. This is advantageous for the shape of the plasma / ion flux. In addition, this simplifies manufacture, since a continuous porous film can be deposited behind the cylinder 14, even though the porous film 15 is visible from the polarized electrode 12 only in the inner circular opening delimited by the cylinder 14.
  • the invention also relates to an advantageous configuration, in which two cells 1, 1, 21 are assembled symmetrically (in a back-to-back or inverted configuration). Also, the invention relates to a dual corona plasma element comprising a first corona plasma cell 11 and a second corona plasma cell 21.
  • the first cell 1 1 comprises a first polarized electrode 12 and a first ground electrode 13 arranged facing the first polarized electrode 12.
  • the second cell 21 comprises a second polarized electrode 22 and a second ground electrode 23 arranged in view of the second polarized electrode 22.
  • the first polarized electrode 12 and the second polarized electrode 22 are connected to one and the same first potential 8 and the first earth electrode 13 and the second earth electrode 23 are connected to one same second potential 9, different from the first potential 8.
  • the signs of the first and second potentials 8,9 can be arbitrary. However, it is known that the ionization obtained by corona effect is more effective when the polarized electrode is connected to a negative potential (it is called discharge electrode). Also, preferably the first potential 8 is negative and the second potential 9 is the mass.
  • the first cell 1 having an opposite orientation to that of the second cell 21, their ionizing effects combine and complement each other, thereby increasing the overall ionizing effect.
  • the opposite orientation still advantageously makes it possible to apply the same polarization to the two cells 1 1, 21.
  • these two characteristics of orientation and polarization combined advantageously make it possible to fix the first polarized electrode 12 on a first support 16 and the second polarized electrode 22 on a second support 26.
  • these two supports 16,26 can be a single support 36, the polarized electrodes 12,22 being each supported respectively by one side of the support 36.
  • This structure is therefore particularly economical and advantageous.
  • the common support 36 may be conductive and be connected to the first polarized electrode 12, to the second polarized electrode 22 and to the first potential 8.
  • the common support 36 comprises a printed circuit 36 comprising at least one conductive track 31 connected to the first polarized electrode 12, the second polarized electrode 22 and the first potential 8.
  • the polarization of a corona plasma device requires a difference in high potential, between polarized electrode and earth electrode, which potential difference is of the order of several thousand volts.
  • the first potential 8 is very high and could prove vulnerable for an operator.
  • the configuration according to the invention advantageously provides a confinement of this first potential 8 in the middle of the dual element 10. The first high potential 8 is thus out of reach of an operator.
  • Such a dual element 10, and therefore a reactor 30 built on the basis of such a dual element 10, have a naturally safe conformation with respect to this electrical hazard.
  • the support 16, 26 being a printed circuit 36
  • the first potential 8 being distributed within the support by means of a conductive track 31, advantageously arranged in said printed circuit 36
  • a polarized electrode 12, 22, substantially needle-shaped is advantageously assembled on the support 16,26 by means of a via 33 drilled in the printed circuit 36.
  • the via 33 is metallized and pierced in a conductive track 31. The drilling is such that it provides the electrical connection.
  • the printed circuit 36 being disposed across the flow of fluid is advantageously perforated to allow the passage of this fluid flow.
  • at least one day 38 is made for this purpose. In order to maximize the passage of fluid therethrough, said at least one day 38 may cover the entire surface of the circuit board 36 excluding at least one narrow band formed around said at least one conductive track 31.
  • FIG. 8 An embodiment of a printed circuit 36 for a plasma reactor according to this characteristic is illustrated in FIG. 8.
  • the relative position of the first polarized electrode 12 and the second polarized electrode 22 was arbitrary.
  • the first polarized electrode 12 and the second polarized electrode 22 are axially aligned. This allows advantageously to make them material, a single needle with two tips simultaneously forming two polarized electrodes 12,22. This further advantageously makes it possible to fix the two polarized electrodes 12, 22 simultaneously in the same through via 33, in a single operation.
  • the two cells 1 1, 21 may be of any type.
  • the first cell 1 1, the second cell 21, or both are a cell according to the invention, as illustrated in Figure 1, a cell with a cylinder 14 having a low profile.
  • Figures 4-6 illustrate a configuration with two such identical cells.
  • a plasma reactor 30 On the basis of a cell 1 1 or a dual element 10 according to one of the previous embodiments, it is possible to build a plasma reactor 30.
  • the known principle of a plasma reactor is to juxtapose, according to a arranging side by side, in a plane perpendicular to the fluid flow, a plurality of corona plasma devices. This makes it possible to increase at will the section and therefore the flow rate of fluid that can pass through the plasma reactor 30.
  • a plasma reactor 30 juxtaposes devices which are cells 1 1, according to one of the preceding embodiments, or dual elements 10 according to one of the preceding embodiments.
  • a central printed circuit 36 serves to support on both sides to the two sets of polarized electrodes 32. It further ensures by means of conductive tracks 31 the connection of these polarized electrodes 32 to the first potential 8 (preferably negative).
  • a series, respectively two series, of struts 37 moves away and supports a plate, respectively two plates, 34 pierced (s) of cylinders and a plate, respectively two plates, 35 of porous film.
  • the plates 34, 35 are advantageously metallic in order to be conductive and connected to the second potential 9.
  • the arrangement of the devices 1.10 in a plasma reactor 30 can be arbitrary.
  • FIG. 1 illustrates a possible embodiment of a printed circuit 36 adapted to such a square grid arrangement.
  • This printed circuit board 36 comprises an array, for example rectangular of conductive tracks 31. These tracks are advantageously embedded in the insulating thickness of the printed circuit 36. They are electrically connected to the first potential 8. According to a substantially square grid arrangement, are drilled vias 33, in which are installed the polarized electrodes 12,22,32.
  • the circuit board 36 is cut from days 38 occupying a maximum area to maximize the fluid passage section. This maximum area is just restricted by the saving of a narrow band around the tracks 31. Holes 39 are formed, advantageously without electrical connection, spatially distributed, to allow fixing of the spacers 17, 27, 37, advantageously carried out made of insulating material.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)

Abstract

A corona effect plasma cell (11) comprising a polarised electrode (12) and an earth electrode (13), comprising a cylinder (14) and a porous film (15), the cylinder (14) having a low profile and the polarised electrode (12) not penetrating into the cylinder (14); a corona effect plasma dual element (10) comprising a first cell (11), a second cell (21) having such a structure, said first (11) and second cell (21) being symmetrically arranged (preferably head to tail); and finally a plasma reactor (30) comprising a plurality of cells (11) or dual elements (10).

Description

DISPOSITIF PLASMA A EFFET CORONA ET REACTEUR PLASMA  PLASMA DEVICE WITH CORONA EFFECT AND PLASMA REACTOR
La présente demande de brevet revendique la priorité de la demande de brevet Français FR 17/00439 déposée en date du 20 avril 2018, laquelle est incorporée à la présente demande de brevet par référence. The present patent application claims the priority of the French patent application FR 17/00439 filed on April 20, 2018, which is incorporated in the present patent application by reference.
Domaine de l'invention  Field of the invention
La présente invention concerne le domaine de l'émission de plasma par décharge corona et plus particulièrement celui des réacteurs à plasma. The present invention relates to the field of plasma discharge by corona discharge and more particularly that of plasma reactors.
Art Antérieur  Previous Art
Il est connu d'utiliser un dispositif plasma à effet corona pour produire, par décharge corona, un plasma et un flux ionique. Un tel dispositif permet avantageusement de produire un plasma permettant d'ioniser un fluide traversant le dispositif. Une telle ionisation trouve des fonctionnalités multiples et complémentaires, par exemple, dans le secteur du traitement d'un fluide, tel que l'air. It is known to use a corona plasma device to produce, by corona discharge, a plasma and an ionic flux. Such a device advantageously makes it possible to produce a plasma for ionizing a fluid passing through the device. Such ionization finds multiple and complementary functionalities, for example, in the field of the treatment of a fluid, such as air.
Selon une première fonctionnalité, une ionisation permet, par dépôt d'ions, de charger une particule contenue dans le fluide. Cette particule ainsi chargée peut avantageusement être retenue par un filtre électrostatique, pouvant être disposé en aval du dispositif. Selon une autre fonctionnalité, une ionisation possède une action neutralisante sur des organismes pathogènes, tels des virus, pouvant être véhiculés dans le fluide. Selon encore une autre fonctionnalité, une ionisation produit avantageusement des espèces chimiques oxydantes utiles à la décontamination d'un filtre mécanique, tel un filtre à charbon actif, pouvant être disposé en aval du dispositif.  According to a first feature, an ionization allows, by ion deposition, to charge a particle contained in the fluid. This particle thus charged can advantageously be retained by an electrostatic filter, which can be arranged downstream of the device. According to another feature, an ionization has a neutralizing action on pathogenic organisms, such as viruses, which can be carried in the fluid. According to yet another feature, an ionization advantageously produces oxidizing chemical species useful for the decontamination of a mechanical filter, such as an activated carbon filter, which can be arranged downstream of the device.
Aussi un dispositif plasma à effet corona, ou un réacteur plasma comprenant une pluralité de tels dispositifs, constitue avantageusement un étage amont d'un moyen multi filtres de traitement de fluide.  Also a corona plasma device, or a plasma reactor comprising a plurality of such devices, advantageously constitutes an upstream stage of a multi-fluid filter means.
II est connu pour réaliser un dispositif plasma à effet corona, d'employer une électrode polarisée et une électrode de terre, disposée en regard de l'électrode polarisée, et d'appliquer entre ces deux électrodes une différence de potentiel importante, de l'ordre de plusieurs milliers de volts. Ceci crée un plasma ainsi que des décharges corona produisant des décharges ioniques. L'effet d'ionisation du fluide est obtenu en créant une circulation du fluide obligeant le fluide à traverser le plasma.  It is known to produce a corona plasma device, to use a polarized electrode and an earth electrode, arranged opposite the polarized electrode, and to apply between these two electrodes a significant potential difference, of the order of several thousand volts. This creates a plasma as well as corona discharges producing ion discharges. The ionization effect of the fluid is obtained by creating a circulation of the fluid forcing the fluid to pass through the plasma.
Pour obtenir un tel plasma, selon l'effet corona, il est connu deux configurations :  To obtain such a plasma, according to the corona effect, two configurations are known:
FEU I LLE DE REM PLACEM ENT (RÈG LE 26) selon une première configuration, dite pointe-plan, une électrode polarisée présentant un faible rayon de courbure est disposée perpendiculairement à une électrode de terre sensiblement plane ; selon une autre configuration dite fil-cylindre, une électrode polarisée filaire est disposée axialement dans une électrode de terre cylindrique. FR 2818451 , du même déposant, propose de combiner ces deux configurations en utilisant une électrode polarisée en forme d'aiguille et une électrode de terre comprenant un treillis métallique sensiblement plan, disposé perpendiculairement à l'électrode polarisée et un cylindre entourant l'électrode polarisée sur toute sa longueur. Ce dispositif est traversé par le fluide selon une direction parallèle à l'axe confondu de l'électrode polarisée et du cylindre. FIRE I LLE OF REM PLACEM ENT (RULE 26) in a first configuration, said tip plane, a polarized electrode having a small radius of curvature is disposed perpendicularly to a substantially flat earth electrode; in another so-called wire-cylinder configuration, a wired polarized electrode is disposed axially in a cylindrical earth electrode. FR 2818451, of the same Applicant, proposes to combine these two configurations by using a needle-shaped polarized electrode and a ground electrode comprising a substantially plane wire mesh disposed perpendicular to the polarized electrode and a cylinder surrounding the polarized electrode over its entire length. This device is traversed by the fluid in a direction parallel to the coinciding axis of the polarized electrode and the cylinder.
Il est toujours recherché une amélioration d'un dispositif plasma à effet corona, en termes d'efficacité de l'ionisation, de réduction du volume occupé ou encore de l'énergie électrique consommée. It is still sought improvement of a plasma device with corona effect, in terms of effectiveness of ionization, reduction of the occupied volume or electrical energy consumed.
Descriptif détaillée de l'invention L'invention a pour objet une cellule plasma à effet corona comprenant une électrode polarisée sensiblement en forme d'aiguille et une électrode de terre, disposée en regard de l'électrode de polarisée, comprenant un cylindre sensiblement centré sur l'électrode polarisée et un film poreux sensiblement plan perpendiculaire à l'électrode polarisée, où le cylindre présente un profil bas, de préférence avec une hauteur négligeable devant son diamètre, et où l'électrode polarisée ne pénètre pas dans le cylindre. DETAILED DESCRIPTION OF THE INVENTION The subject of the invention is a corona plasma cell comprising a substantially needle-shaped polarized electrode and an earth electrode disposed opposite the polarized electrode, comprising a cylinder substantially centered on the polarized electrode and a substantially plane porous film perpendicular to the polarized electrode, wherein the cylinder has a low profile, preferably with negligible height in front of its diameter, and wherein the polarized electrode does not penetrate the cylinder.
Selon une autre caractéristique, le film poreux est disposé, relativement à l'électrode polarisée, du côté opposé au cylindre.  According to another characteristic, the porous film is arranged, relative to the polarized electrode, on the side opposite the cylinder.
Le film poreux est une surface permettant le passage de l'air avec des pores présentant une taille allant de 0,1 mm à 500 mm, de préférence de 5 mm à 50 mm. The porous film is a surface for the passage of air with pores having a size ranging from 0.1 mm to 500 mm, preferably from 5 mm to 50 mm.
L'épaisseur du film poreux est avantageusement comprise entre 0,5 et 50 mm, de préférence entre 1 et 5 mm. The thickness of the porous film is advantageously between 0.5 and 50 mm, preferably between 1 and 5 mm.
Avantageusement, le film poreux est un maillage métallique, dont les mailles peuvent présenter différentes formes (carré, losange, etc.). Avantageusement encore, le maillage métallique en question est une feuille de métal déployé. Advantageously, the porous film is a metal mesh, the meshes may have different shapes (square, rhombus, etc.). Advantageously, the metal mesh in question is a sheet of expanded metal.
L'invention a encore pour objet un élément dual plasma à effet corona comprenant une première cellule plasma à effet corona telle que définie précédemment comprenant une première électrode polarisée et une première électrode de terre, disposée en regard de la première électrode polarisée, une deuxième cellule plasma à effet corona telle que définie précédemment comprenant une deuxième électrode polarisée et une deuxième électrode de terre, disposée en regard de la deuxième électrode polarisée, où la première cellule et la deuxième cellule sont disposées symétriquement (tête-bêche). Selon une autre caractéristique, la première électrode polarisée et la deuxième électrode polarisée sont reliées à un même premier potentiel et la première électrode de terre et la deuxième électrode de terre sont reliées à un même deuxième potentiel, différent du premier potentiel. The subject of the invention is also a corona-effect dual plasma element comprising a first corona-effect plasma cell as defined above comprising a first polarized electrode and a first earth electrode, arranged facing the first polarized electrode, a second cell a corona-effect plasma as defined above comprising a second polarized electrode and a second earth electrode disposed opposite the second polarized electrode, wherein the first cell and the second cell are arranged symmetrically (head to tail). According to another characteristic, the first polarized electrode and the second polarized electrode are connected to the same first potential and the first ground electrode and the second ground electrode are connected to the same second potential, different from the first potential.
Selon une autre caractéristique, le premier potentiel est négatif et le deuxième potentiel est la masse. According to another characteristic, the first potential is negative and the second potential is ground.
Avantageusement, la ou les électrodes polarisées sont reliées à un potentiel négatif et on parle alors d'électrodes de décharge.  Advantageously, the polarized electrode or electrodes are connected to a negative potential and are then called discharge electrodes.
Selon une autre caractéristique, la première électrode polarisée et la deuxième électrode polarisée sont sensiblement en forme d'aiguille et sont supportées par un support conducteur connecté à la première électrode polarisée, à la deuxième électrode polarisée et au premier potentiel, lequel support conducteur est de préférence sensiblement plan. According to another characteristic, the first polarized electrode and the second polarized electrode are substantially needle-shaped and are supported by a conductive support connected to the first polarized electrode, the second polarized electrode and the first potential, which conductive support is preferably substantially plane.
Selon une autre caractéristique, le support conducteur comprend un circuit imprimé comprenant au moins une piste conductrice connectée à la première électrode polarisée, à la deuxième électrode polarisée et au premier potentiel. According to another characteristic, the conductive support comprises a printed circuit comprising at least one conductive track connected to the first polarized electrode, the second polarized electrode and the first potential.
Selon une autre caractéristique, une électrode polarisée est disposée dans un via métallisé percé dans ladite au moins une piste conductrice. According to another characteristic, a polarized electrode is disposed in a metallized via pierced in said at least one conductive track.
Selon une autre caractéristique, le circuit imprimé comprends des jours, préférentiellement en totalité à l'exclusion d'une bande étroite ménagée autour de ladite au moins une piste conductrice. Selon une autre caractéristique, la première électrode polarisée et la deuxième électrode polarisée sont axialement alignées, et sont préférentiellement réalisées de matière (c.-à-d. une seule et même pièce). According to another characteristic, the printed circuit comprises days, preferably entirely, to the exclusion of a narrow band formed around said at least one conducting track. According to another characteristic, the first polarized electrode and the second polarized electrode are axially aligned, and are preferably made of material (ie one and the same piece).
Selon une autre caractéristique, l'une au moins parmi la première cellule et la deuxième cellule, est une cellule selon l'un des modes de réalisation précédents. According to another characteristic, at least one of the first cell and the second cell is a cell according to one of the preceding embodiments.
L'invention a encore pour objet un réacteur plasma comprenant une pluralité de dispositifs d'émission plasma à effet corona disposés côté à côte selon un arrangement sensiblement plan, où les dispositifs sont des cellules selon l'un des modes de réalisation précédents, ou les dispositifs sont des éléments duaux selon l'un des modes de réalisation précédents. The invention further relates to a plasma reactor comprising a plurality of corona plasma emission devices arranged side by side in a substantially plane arrangement, where the devices are cells according to one of the preceding embodiments, or the devices are dual elements according to one of the preceding embodiments.
Selon une autre caractéristique, l'arrangement est un quadrillage sensiblement carré. According to another characteristic, the arrangement is a substantially square grid.
D'autres caractéristiques, détails et avantages de l'invention ressortiront plus clairement de la description détaillée donnée ci-après à titre indicatif en relation avec des dessins sur lesquels :  Other characteristics, details and advantages of the invention will emerge more clearly from the detailed description given below as an indication in relation to drawings in which:
- la figure 1 illustre, en vue de profil coupée, une cellule selon l'invention,  FIG. 1 illustrates, in sectional view, a cell according to the invention,
- la figure 2 illustre, en vue de profil coupée, un élément dual selon l'invention, FIG. 2 illustrates, in cutaway view, a dual element according to the invention,
- la figure 3 illustre en vue de profil coupée, la polarisation d'un élément dual, FIG. 3 illustrates, in cutaway view, the polarization of a dual element,
- la figure 4 illustre, en vue de profil coupée, un élément dual comprenant deux cellules de la figure 1, FIG. 4 illustrates, in cutaway view, a dual element comprising two cells of FIG. 1,
- la figure 5 illustre, en vue de profil coupée, l'élément dual de la figure 4 coté selon un mode de réalisation, FIG. 5 illustrates, in sectional view, the dual element of FIG. 4, side according to one embodiment,
- la figure 6 illustre, en vue de profil coupée, un réacteur plasma, FIG. 6 illustrates, in cutaway view, a plasma reactor,
- la figure 7 illustre, en vue perspective, un réacteur plasma, - la figure 8 illustre, en vue de dessus, un circuit imprimé support d'électrodes polarisées. FIG. 7 illustrates, in perspective view, a plasma reactor; FIG. 8 illustrates, in plan view, a printed circuit supporting polarized electrodes.
Selon un premier aspect, illustré à la figure 1, l'invention concerne une cellule 1 1 plasma à effet corona améliorée. De manière connue, une telle cellule 1 1 comprend une électrode polarisée 12 sensiblement en forme d'aiguille et une électrode de terre 13, disposée en regard de l'électrode polarisée 12. L'électrode de terre 13 comprend un cylindre 14 sensiblement centré sur l'électrode polarisée 12 et un film poreux 15 sensiblement plan perpendiculaire à l'électrode polarisée 12. L'électrode polarisée 12 est typiquement fixée sur un support 16 avantageusement ajouré pour permettre le passage d'un flux de fluide. La distance entre électrode polarisée 12 et électrode de terreAccording to a first aspect, illustrated in FIG. 1, the invention relates to an improved corona 1 1 plasma cell. In known manner, such a cell 1 1 comprises a polarized electrode 12 substantially needle-shaped and a ground electrode 13, disposed opposite the polarized electrode 12. The ground electrode 13 comprises a cylinder 14 substantially centered on the polarized electrode 12 and a porous film 15 substantially plane perpendicular to the polarized electrode 12. The polarized electrode 12 is typically fixed on a support 16 advantageously perforated to allow the passage of a flow of fluid. The distance between the polarized electrode 12 and the earth electrode
13 est maintenue par au moins une entretoise 17. 13 is held by at least one spacer 17.
De FR 2818451 , il est connu de former une telle électrode de terre avec un cylindre, sensiblement centré sur l'électrode polarisée, de forte hauteur afin d'entourer l'électrode polarisée sur toute sa longueur. Une cellule 1 1 selon l'invention est améliorée en ce que le cylindre 14 est conformé de manière à présenter un profil bas. Ceci signifie que la hauteur du cylindreFrom FR 2818451, it is known to form such an earth electrode with a cylinder, substantially centered on the polarized electrode, of high height in order to surround the polarized electrode over its entire length. A cell 1 1 according to the invention is improved in that the cylinder 14 is shaped so as to have a low profile. This means that the height of the cylinder
14 est négligeable devant son diamètre. Typiquement, le diamètre du cylindre est compris entre 20 et 100mm, de préférence entre 25 et 75mm, par exemple entre 30 et 60 mm et, de manière particulièrement préférée entre 35 et 55 mm. Pour ce qui est de l'épaisseur du cylindre, elle est inférieure à 10 mm, de préférence comprise entre 1 et 5 mm. De plus l'électrode polarisée 12 est conformée suffisamment courte, de manière à ne pas pénétrer dans le cylindre 14. 14 is negligible in front of its diameter. Typically, the diameter of the cylinder is between 20 and 100 mm, preferably between 25 and 75 mm, for example between 30 and 60 mm and, particularly preferably between 35 and 55 mm. As regards the thickness of the cylinder, it is less than 10 mm, preferably between 1 and 5 mm. In addition, the polarized electrode 12 is shaped sufficiently short so as not to penetrate the cylinder 14.
Le flux de fluide à ioniser au moyen de la cellule 1 1 est sensiblement vertical relativement à la figure 1. La réduction combinée de la hauteur du cylindre 14 et de la longueur de l'électrode polarisée 12 permet avantageusement de drastiquement réduire la hauteur hors tout de la cellule 1 1, puisque l'électrode de terre 13, beaucoup moins haute peut être rapprochée de l'électrode polarisée 12, elle-même raccourcie. Ceci permet avantageusement de réaliser une cellule 1 1 , ou tout système basé sur une telle cellule 1 1 , tel un réacteur plasma 30, présentant une épaisseur et donc un encombrement global, dans le sens du flux de fluide, nettement réduit. The flow of fluid to be ionized by means of the cell 1 1 is substantially vertical with respect to FIG. 1. The combined reduction in the height of the cylinder 14 and the length of the polarized electrode 12 advantageously makes it possible to drastically reduce the overall height. of the cell 1 1, since the ground electrode 13, much lower can be close to the polarized electrode 12, itself shortened. This advantageously makes it possible to produce a cell 1 1, or any system based on such a cell 1 1, such as a plasma reactor 30, having a thickness and therefore an overall size, in the direction of the fluid flow, significantly reduced.
Le fait de conserver l'électrode polarisée 12 hors du cylindre 14 permet de conformer le plasma sensiblement selon une forme de cône très aplati, sensiblement transverse au flux de fluide, favorisant une bonne ionisation. Ainsi selon un mode de réalisation, pour une distance d entre la pointe de l'aiguille et le film poreux, et un diamètre de cylindre compris entre 2d et 5d, avec un optimum à 3d, l'angle d'ouverture du cône de flux ionique est compris entre 136° et 1 12°. Keeping the polarized electrode 12 out of the cylinder 14 makes it possible to shape the plasma substantially in a very flattened cone shape, substantially transverse to the fluid flow, favoring good ionization. Thus according to one embodiment, for a distance d between the tip of the needle and the porous film, and a cylinder diameter of between 2d and 5d, with a optimum at 3d, the opening angle of the ion flow cone is between 136 ° and 1 12 °.
Selon une autre caractéristique, toujours illustrée à la figure 1, le film poreux 15 est disposé, relativement à l'électrode de décharge 12, du côté opposé au cylindre 14. Ceci est avantageux pour la forme du plasma/flux ionique. De plus ceci simplifie la fabrication, un film poreux 15 continu pouvant être déposé derrière le cylindre 14, alors même que le film poreux 15 n'est visible de l'électrode polarisée 12 que dans l'ouverture circulaire intérieure délimitée par le cylindre 14. According to another characteristic, always illustrated in FIG. 1, the porous film 15 is arranged, relative to the discharge electrode 12, on the side opposite to the cylinder 14. This is advantageous for the shape of the plasma / ion flux. In addition, this simplifies manufacture, since a continuous porous film can be deposited behind the cylinder 14, even though the porous film 15 is visible from the polarized electrode 12 only in the inner circular opening delimited by the cylinder 14.
Selon un autre aspect, plus particulièrement illustré à la figure 2, l'invention concerne encore une configuration avantageuse, où deux cellules 1 1,21 sont assemblées symétriquement (selon une configuration tête-bêche ou inversée). Aussi, l'invention concerne un élément dual 10 plasma à effet corona comprenant une première cellule 1 1 plasma à effet corona et une deuxième cellule 21 plasma à effet corona. La première cellule 1 1 comprend une première électrode polarisée 12 et une première électrode de terre 13, disposée en regard de la première électrode de polarisée 12. La deuxième cellule 21 comprend une deuxième électrode polarisée 22 et une deuxième électrode de terre 23, disposée en regard de la deuxième électrode polarisée 22. According to another aspect, more particularly illustrated in FIG. 2, the invention also relates to an advantageous configuration, in which two cells 1, 1, 21 are assembled symmetrically (in a back-to-back or inverted configuration). Also, the invention relates to a dual corona plasma element comprising a first corona plasma cell 11 and a second corona plasma cell 21. The first cell 1 1 comprises a first polarized electrode 12 and a first ground electrode 13 arranged facing the first polarized electrode 12. The second cell 21 comprises a second polarized electrode 22 and a second ground electrode 23 arranged in view of the second polarized electrode 22.
Selon une autre caractéristique, plus particulièrement illustrée à la figure 3, la première électrode polarisée 12 et la deuxième électrode polarisée 22 sont reliées à un même premier potentiel 8 et la première électrode de terre 13 et la deuxième électrode de terre 23 sont reliées à un même deuxième potentiel 9, différent du premier potentiel 8. According to another characteristic, more particularly illustrated in FIG. 3, the first polarized electrode 12 and the second polarized electrode 22 are connected to one and the same first potential 8 and the first earth electrode 13 and the second earth electrode 23 are connected to one same second potential 9, different from the first potential 8.
Les signes des premier et deuxième potentiels 8,9 peuvent être quelconques. Cependant il est connu que l'ionisation obtenue par effet corona est plus efficace lorsque l'électrode polarisée est reliée à un potentiel négatif (on parle alors d'électrode de décharge). Aussi, préférentiellement le premier potentiel 8 est négatif et le deuxième potentiel 9 est la masse. The signs of the first and second potentials 8,9 can be arbitrary. However, it is known that the ionization obtained by corona effect is more effective when the polarized electrode is connected to a negative potential (it is called discharge electrode). Also, preferably the first potential 8 is negative and the second potential 9 is the mass.
Il a été trouvé qu'une disposition de la première cellule 11 et de la deuxième cellule 21 symétrique (de préférence en configuration tête-bêche), présentaient de nombreux avantageux non évidents. D'autres avantages sont encore obtenus avec une même polarisation des deux cellules 1 1,21. Le fait de doubler les cellules 1 1 ,21, permet d'améliorer fortement l'efficacité obtenue. En outre, il a été démontré que la durée de vie d'un élément dual 10 est considérablement augmentée relativement à une cellule unique 1 1. En effet, un effet préjudiciable d'une cellule corona est que son électrode polarisée 12,22 précipite des cristaux diélectriques qui, isolant peu à peu ladite électrode polarisée 12,22, réduisent l'efficacité de la cellule 1 1 ,21. Le fait d'utiliser deux cellules au lieu d'une a permis de considérablement améliorer l'espérance de vie du réacteur 30. It has been found that a disposition of the first cell 11 and the second symmetrical cell 21 (preferably in a back-to-back configuration) has many non-obvious advantages. Other advantages are still obtained with the same polarization of the two 1.21 cells. Doubling cells 1 1, 21, greatly improves the efficiency obtained. In addition, it has been shown that the lifetime of a dual element 10 is considerably increased relative to a single cell 1 1. Indeed, a detrimental effect of a corona cell is that its polarized electrode 12,22 precipitates dielectric crystals which, gradually isolating said polarized electrode 12,22, reduce the efficiency of the cell 1 1, 21. Using two cells instead of one has significantly improved the life expectancy of the reactor 30.
La première cellule 1 1 , présentant une orientation opposée de celle de la deuxième cellule 21 , leur effets ionisants se combinent et se complètent, permettant ainsi d'augmenter l'effet ionisant global. The first cell 1 1, having an opposite orientation to that of the second cell 21, their ionizing effects combine and complement each other, thereby increasing the overall ionizing effect.
L'orientation opposée, permet encore avantageusement d'appliquer une même polarisation aux deux cellules 1 1 ,21. The opposite orientation still advantageously makes it possible to apply the same polarization to the two cells 1 1, 21.
Ces deux caractéristiques d'orientation et de polarisation combinées, permettent avantageusement de fixer la première électrode polarisée 12 sur un premier support 16 et la deuxième électrode polarisée 22 sur un deuxième support 26. Avantageusement, ces deux supports 16,26 peuvent être un unique support 36 commun, les électrodes polarisées 12,22 étant supportées respectivement chacune par une face du support 36. These two characteristics of orientation and polarization combined advantageously make it possible to fix the first polarized electrode 12 on a first support 16 and the second polarized electrode 22 on a second support 26. Advantageously, these two supports 16,26 can be a single support 36, the polarized electrodes 12,22 being each supported respectively by one side of the support 36.
Ceci permet avantageusement, la polarité de la première électrode polarisée 12 et de la deuxième électrode polarisée 22 étant la même (préférentiellement négative), d'utiliser un connecteur commun, ainsi qu'une source de potentiel commune, pour polariser ces deux électrodes polarisée 12,22. Cette structure est donc particulièrement économique et avantageuse. This advantageously allows the polarity of the first polarized electrode 12 and the second polarized electrode 22 to be the same (preferably negative), to use a common connector, as well as a common potential source, for biasing these two polarized electrodes 12 22. This structure is therefore particularly economical and advantageous.
Ainsi, selon un mode de réalisation avantageux, le support commun 36 peut être conducteur et être connecté à la première électrode polarisée 12, à la deuxième électrode polarisée 22 et au premier potentiel 8. Thus, according to an advantageous embodiment, the common support 36 may be conductive and be connected to the first polarized electrode 12, to the second polarized electrode 22 and to the first potential 8.
Selon un autre mode de réalisation avantageux, le support commun 36 comprend un circuit imprimé 36 comprenant au moins une piste conductrice 31 connectée à la première électrode polarisée 12, à la deuxième électrode polarisée 22 et au premier potentiel 8. According to another advantageous embodiment, the common support 36 comprises a printed circuit 36 comprising at least one conductive track 31 connected to the first polarized electrode 12, the second polarized electrode 22 and the first potential 8.
La polarisation d'un dispositif plasma à effet corona nécessite une différence de potentiel importante, entre électrode polarisée et électrode de terre, laquelle différence de potentiel est de l'ordre de plusieurs milliers de volts. Aussi le premier potentiel 8 est très élevé et pourrait s'avérer vulnérant pour un opérateur. La configuration selon l'invention assure avantageusement un confinement de ce premier potentiel 8 au milieu de l'élément dual 10. Le premier potentiel 8 élevé est ainsi hors de portée d'un opérateur. Un tel élément dual 10, et donc un réacteur 30 construit sur la base d'un tel élément dual 10, présentent une conformation naturellement sécuritaire au regard de ce risque électrique. The polarization of a corona plasma device requires a difference in high potential, between polarized electrode and earth electrode, which potential difference is of the order of several thousand volts. Also the first potential 8 is very high and could prove vulnerable for an operator. The configuration according to the invention advantageously provides a confinement of this first potential 8 in the middle of the dual element 10. The first high potential 8 is thus out of reach of an operator. Such a dual element 10, and therefore a reactor 30 built on the basis of such a dual element 10, have a naturally safe conformation with respect to this electrical hazard.
Le support 16,26 étant un circuit imprimé 36, le premier potentiel 8 étant distribué au sein du support au moyen d'une piste conductrice 31 , avantageusement disposée dans ledit circuit imprimé 36, selon une autre caractéristique, une électrode polarisée 12,22, sensiblement en forme d'aiguille, est avantageusement assemblée sur le support 16,26 au moyen d'un via 33 percé dans le circuit imprimé 36. Ceci permet avantageusement une fixation de l'électrode polarisée 12,22 au moyen d'une soudure. Avantageusement, le via 33 est métallisé et percé dans une piste conductrice 31. Le perçage est tel qu'il assure la connexion électrique. Ainsi la fixation de l'électrode polarisée 12,22 dans le via 33 de manière connectée assure la connexion entre l'électrode polarisée 12,22 et le premier potentiel 8. Ceci permet un mode de réalisation simple de la fixation et de la connexion de l'électrode polarisée 12,22. Le circuit imprimé 36 étant disposé en travers du flux de fluide est avantageusement ajouré afin de permettre le passage de ce flux de fluide. Selon un mode de réalisation, au moins un jour 38 est réalisé à cette fin. Afin de maximiser le passage de fluide au travers, ledit au moins un jour 38 peut recouvrir la totalité de la surface du circuit imprimé 36 à l'exclusion d'au moins une bande étroite ménagée autour de ladite au moins une piste conductrice 31. The support 16, 26 being a printed circuit 36, the first potential 8 being distributed within the support by means of a conductive track 31, advantageously arranged in said printed circuit 36, according to another characteristic, a polarized electrode 12, 22, substantially needle-shaped, is advantageously assembled on the support 16,26 by means of a via 33 drilled in the printed circuit 36. This advantageously allows a fixing of the polarized electrode 12,22 by means of a weld. Advantageously, the via 33 is metallized and pierced in a conductive track 31. The drilling is such that it provides the electrical connection. Thus, the fixing of the biased electrode 12, 22 in the via 33 in a connected manner ensures the connection between the biased electrode 12, 22 and the first potential 8. This allows a simple embodiment of the fixing and the connection of the the polarized electrode 12,22. The printed circuit 36 being disposed across the flow of fluid is advantageously perforated to allow the passage of this fluid flow. According to one embodiment, at least one day 38 is made for this purpose. In order to maximize the passage of fluid therethrough, said at least one day 38 may cover the entire surface of the circuit board 36 excluding at least one narrow band formed around said at least one conductive track 31.
Un mode de réalisation d'un circuit imprimé 36 destiné à un réacteur plasma selon cette caractéristique est illustré à la figure 8. An embodiment of a printed circuit 36 for a plasma reactor according to this characteristic is illustrated in FIG. 8.
Dans la description qui précède, la position relative de la première électrode polarisée 12 et de la deuxième électrode polarisée 22 était quelconque. Selon une autre caractéristique avantageuse, telle qu'illustrée aux figures 1-6, la première électrode polarisée 12 et la deuxième électrode polarisée 22 sont axialement alignées. Ceci permet avantageusement de les réaliser de matière, une unique aiguille à deux pointes formant simultanément deux électrodes polarisées 12,22. Ceci permet encore avantageusement de fixer les deux électrodes polarisées 12,22 simultanément dans un même via 33 traversant, en une seule opération. Dans un élément dual 10, les deux cellules 1 1 ,21 peuvent être de types quelconques. Selon un mode de réalisation avantageux, la première cellule 1 1 , la deuxième cellule 21 , ou les deux sont une cellule selon l'invention, telle qu'illustrée à la figure 1 , soit une cellule avec un cylindre 14 présentant un profil bas. Les figures 4-6 illustrent une configuration avec deux telles cellules identiques. Sur la base d'une cellule 1 1 ou d'un élément dual 10 selon l'un des modes de réalisation précédents, il est possible de construire un réacteur plasma 30. Le principe connu d'un réacteur plasma est de juxtaposer, selon un arrangement côte à côte, dans un plan perpendiculaire au flux de fluide, une pluralité de dispositifs plasma à effet corona. Ceci permet d'augmenter à volonté la section et donc le débit de fluide pouvant traverser le réacteur plasma 30. In the above description, the relative position of the first polarized electrode 12 and the second polarized electrode 22 was arbitrary. According to another advantageous characteristic, as illustrated in FIGS. 1-6, the first polarized electrode 12 and the second polarized electrode 22 are axially aligned. this allows advantageously to make them material, a single needle with two tips simultaneously forming two polarized electrodes 12,22. This further advantageously makes it possible to fix the two polarized electrodes 12, 22 simultaneously in the same through via 33, in a single operation. In a dual element 10, the two cells 1 1, 21 may be of any type. According to an advantageous embodiment, the first cell 1 1, the second cell 21, or both are a cell according to the invention, as illustrated in Figure 1, a cell with a cylinder 14 having a low profile. Figures 4-6 illustrate a configuration with two such identical cells. On the basis of a cell 1 1 or a dual element 10 according to one of the previous embodiments, it is possible to build a plasma reactor 30. The known principle of a plasma reactor is to juxtapose, according to a arranging side by side, in a plane perpendicular to the fluid flow, a plurality of corona plasma devices. This makes it possible to increase at will the section and therefore the flow rate of fluid that can pass through the plasma reactor 30.
Selon un autre aspect de l'invention, un réacteur plasma 30 juxtapose des dispositifs qui sont des cellules 1 1 , selon l'un des modes de réalisation précédents, ou des éléments duaux 10 selon l'un des modes de réalisation précédents. According to another aspect of the invention, a plasma reactor 30 juxtaposes devices which are cells 1 1, according to one of the preceding embodiments, or dual elements 10 according to one of the preceding embodiments.
Un tel réacteur plasma 30, basé sur un élément dual 10 comprenant deux cellules l à cylindre 4 bas profil, est illustré aux figures 6 et 7. Such a plasma reactor 30, based on a dual element 10 comprising two low profile cylinder cells 4, is illustrated in FIGS. 6 and 7.
La réalisation d'un tel réacteur plasma 30 est simplifiée par les choix retenus pour la réalisation d'une cellule 1 1 ou d'un élément dual 10. Ainsi, tel qu'illustré à la figure 6, un circuit imprimé 36 central sert de support sur ses deux faces aux deux séries d'électrodes polarisées 32. Il assure de plus au moyen de pistes conductrices 31 la connexion de ces électrodes polarisées 32 au premier potentiel 8 (de préférence négatif). Une série, respectivement deux séries, d'entretoises 37 éloigne(nt) et supporte(nt) une plaque, respectivement deux plaques, 34 percée(s) de cylindres et une plaque, respectivement deux plaques, 35 de film poreux. Les plaques 34,35 sont avantageusement métalliques afin d'être conductrices et reliées au deuxième potentiel 9. L'arrangement des dispositifs 1,10 au sein d'un réacteur plasma 30 peut être quelconque. Cependant il est recherché une optimisation tant de la fonction d'ionisation que du volume occupé. Aussi la densité de cellule 1 1 /éléments duaux 10 est avantageusement importante. L'empreinte dans le plan d'une cellule 1 1 ou d'un élément dual 10 comprenant un cylindre 14,24 est circulaire. Aussi un arrangement hexagonal ou en quadrillage, par exemple carré, est avantageux. La figure 8 illustre un mode de réalisation possible d'un circuit imprimé 36 adapté à tel un arrangement en quadrillage carré. Ce circuit imprimé 36 comprend un réseau, par exemple rectangulaire de pistes conductrices 31. Ces pistes sont avantageusement noyées dans l'épaisseur isolante du circuit imprimé 36. Elles sont électriquement reliées au premier potentiel 8. Selon un arrangement sensiblement en quadrillage carré, sont percés des vias 33, dans lesquels sont installées les électrodes polarisées 12,22,32. Le circuit imprimé 36 est découpé de jours 38 occupant une surface maximale afin de maximiser la section de passage de fluide. Cette surface maximale est juste restreinte par l'épargne d'une bande étroite autour des pistes 31. Des trous 39 sont ménagés, avantageusement sans connexion électrique, de manière spatialement répartie, pour permettre une fixation des entretoises 17,27,37, avantageusement réalisées en matériau isolant. The production of such a plasma reactor 30 is simplified by the choices made for the production of a cell 1 1 or a dual element 10. Thus, as shown in FIG. 6, a central printed circuit 36 serves to support on both sides to the two sets of polarized electrodes 32. It further ensures by means of conductive tracks 31 the connection of these polarized electrodes 32 to the first potential 8 (preferably negative). A series, respectively two series, of struts 37 moves away and supports a plate, respectively two plates, 34 pierced (s) of cylinders and a plate, respectively two plates, 35 of porous film. The plates 34, 35 are advantageously metallic in order to be conductive and connected to the second potential 9. The arrangement of the devices 1.10 in a plasma reactor 30 can be arbitrary. However it is sought an optimization of both the ionization function than the volume occupied. Also the cell density 1 1 / dual elements 10 is advantageously important. The footprint in the plane of a cell 1 1 or a dual element 10 comprising a cylinder 14,24 is circular. Also a hexagonal or grid arrangement, for example square, is advantageous. Figure 8 illustrates a possible embodiment of a printed circuit 36 adapted to such a square grid arrangement. This printed circuit board 36 comprises an array, for example rectangular of conductive tracks 31. These tracks are advantageously embedded in the insulating thickness of the printed circuit 36. They are electrically connected to the first potential 8. According to a substantially square grid arrangement, are drilled vias 33, in which are installed the polarized electrodes 12,22,32. The circuit board 36 is cut from days 38 occupying a maximum area to maximize the fluid passage section. This maximum area is just restricted by the saving of a narrow band around the tracks 31. Holes 39 are formed, advantageously without electrical connection, spatially distributed, to allow fixing of the spacers 17, 27, 37, advantageously carried out made of insulating material.

Claims

REVENDICATIONS
1. Une cellule (1 1 ) plasma à effet corona comprenant une électrode polarisée (12) sensiblement en forme d'aiguille et une électrode de terre (13), disposée en regard de l'électrode polarisée (12), comprenant un cylindre (14) sensiblement centré sur l'électrode polarisée (12) et un film poreux (15) sensiblement plan perpendiculaire à l'électrode polarisée (12), caractérisé en ce que le cylindre (14) présente un profil bas, de préférence avec une hauteur négligeable devant son diamètre, et l'électrode polarisée1. A corona plasma cell (1 1) comprising a substantially needle-shaped polarized electrode (12) and an earth electrode (13) arranged facing the polarized electrode (12), comprising a cylinder ( 14) substantially centered on the polarized electrode (12) and a porous film (15) substantially plane perpendicular to the polarized electrode (12), characterized in that the cylinder (14) has a low profile, preferably with a height negligible in front of its diameter, and the polarized electrode
(12) ne pénètre pas dans le cylindre (14). (12) does not enter the cylinder (14).
2. La cellule (1 1) selon la revendication 1 , où le film poreux (15) est disposé, relativement à l'électrode polarisée (12), du côté opposé au cylindre (14). 2. The cell (1 1) according to claim 1, wherein the porous film (15) is disposed relative to the polarized electrode (12), the side opposite the cylinder (14).
3. Un élément dual (10) plasma à effet corona comprenant une première cellule3. A dual corona plasma element (10) comprising a first cell
(1 1) plasma à effet corona telle que définie à l'une quelconque des revendications 1 ou 2, comprenant une première électrode polarisée (12) et une première électrode de terre(1 1) corona plasma as defined in any one of claims 1 or 2, comprising a first polarized electrode (12) and a first ground electrode
(13) , disposée en regard de la première électrode polarisée (12), une deuxième cellule (21) plasma à effet corona telle que définie à l'une quelconque des revendications 1 ou(13), arranged opposite the first polarized electrode (12), a second corona plasma cell (21) as defined in any one of claims 1 or
2, comprenant une deuxième électrode polarisée (22) et une deuxième électrode de terre (23), disposée en regard de la deuxième électrode polarisée (22), caractérisé en ce que la première cellule (1 1) et la deuxième cellule (21) sont disposées symétriquement, de préférence tête-bêche. 4. L'élément dual (10) selon la revendication 3, où la première électrode polarisée2, comprising a second polarized electrode (22) and a second ground electrode (23) arranged opposite the second polarized electrode (22), characterized in that the first cell (1 1) and the second cell (21) are arranged symmetrically, preferably head to tail. 4. The dual element (10) according to claim 3, wherein the first polarized electrode
(12) et la deuxième électrode polarisée (22) sont reliées à un même premier potentiel (8) et la première électrode de terre (13) et la deuxième électrode de terre (23) sont reliées à un même deuxième potentiel (9), différent du premier potentiel (8). (12) and the second polarized electrode (22) are connected to the same first potential (8) and the first ground electrode (13) and the second ground electrode (23) are connected to the same second potential (9), different from the first potential (8).
5. L'élément dual (10) selon la revendication 4, où le premier potentiel (8) est négatif et le deuxième potentiel (9) est la masse. The dual element (10) according to claim 4, wherein the first potential (8) is negative and the second potential (9) is the ground.
6. L'élément dual (10) selon l'une quelconque des revendications 3 à 5, où la première électrode polarisée (12) et la deuxième électrode polarisée (22) sont sensiblement en forme d'aiguille et sont supportées par un support conducteur connecté à la première électrode polarisée (12), à la deuxième électrode polarisée (22) et au premier potentiel (8). 7. L'élément dual (10) selon la revendication 6, où le support conducteur comprend un circuit imprimé (36) comprenant au moins une piste conductrice (31) connectée à la première électrode émettrice (12), à la deuxième électrode émettrice (22) et au premier potentiel (8). The dual element (10) according to any one of claims 3 to 5, wherein the first polarized electrode (12) and the second polarized electrode (22) are substantially needle-shaped and are supported by a conductive support connected to the first polarized electrode (12), the second polarized electrode (22) and the first potential (8). The dual element (10) according to claim 6, wherein the conductive support comprises a printed circuit (36) comprising at least one conductive track (31) connected to the first emitter electrode (12), to the second emitter electrode ( 22) and the first potential (8).
8. L'élément dual (10) selon la revendication 7, où une électrode polarisée (12,22) est disposée dans un via métallisé (33) percé dans ladite au moins une piste conductrice8. The dual element (10) according to claim 7, wherein a polarized electrode (12,22) is disposed in a metallized via (33) pierced in said at least one conductive track
(31). (31).
9. L'élément dual (10) selon l'une quelconque des revendications 7 ou 8, où le circuit imprimé (36) comprends des jours (38), préférentiellement en totalité à l'exclusion d'une bande étroite ménagée autour de ladite au moins une piste conductrice (31). 9. The dual element (10) according to any one of claims 7 or 8, wherein the printed circuit (36) comprises days (38), preferably entirely to the exclusion of a narrow band formed around said at least one conductive track (31).
10. L'élément dual (10) selon l'une quelconque des revendications 3 à 9, où la première électrode polarisée (12) et la deuxième électrode polarisée (22) sont axialement alignées, et sont préférentiellement réalisées de matière. 10. The dual element (10) according to any one of claims 3 to 9, wherein the first polarized electrode (12) and the second polarized electrode (22) are axially aligned, and are preferably made of material.
11. L'élément dual (10) selon l'une quelconque des revendications 3 à 10, où l'une au moins parmi la première cellule (1 1 ) et la deuxième cellule (21), est une cellule selon l'une quelconque des revendications 1 ou 2. The dual element (10) according to any one of claims 3 to 10, wherein at least one of the first cell (1 1) and the second cell (21) is a cell according to any one of claims 1 or 2.
12. Un réacteur plasma (30) comprenant une pluralité de dispositifs plasma à effet corona disposés côté à côte selon un arrangement sensiblement plan, caractérisé en ce que les dispositifs sont des cellules (1 1 ) selon l'une quelconque des revendications 1 ou 2, ou les dispositifs sont des éléments duaux (10) selon l'une quelconque des revendications 3 à 1 1. A plasma reactor (30) comprising a plurality of corona-effect plasma devices arranged side-by-side in a substantially planar arrangement, characterized in that the devices are cells (1 1) according to any one of claims 1 or 2. , or the devices are dual elements (10) according to any one of claims 3 to 1 1.
13. Le réacteur plasma (30) selon la revendication 12, où l'arrangement est un quadrillage sensiblement carré. The plasma reactor (30) of claim 12, wherein the arrangement is a substantially square grid.
EP18723700.3A 2017-04-20 2018-04-20 Corona effect plasma device and plasma reactor Active EP3613264B1 (en)

Applications Claiming Priority (2)

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FR1700439A FR3065615B1 (en) 2017-04-20 2017-04-20 PLASMA DEVICE WITH CORONA EFFECT AND PLASMA REACTOR
PCT/EP2018/000214 WO2018192682A1 (en) 2017-04-20 2018-04-20 Corona effect plasma device and plasma reactor

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WO2018192682A1 (en) 2018-10-25
RU2019134263A (en) 2021-05-20
CN111279800A (en) 2020-06-12
RU2019134263A3 (en) 2021-08-03
CN111279800B (en) 2023-08-25
RU2763742C2 (en) 2021-12-30
FR3065615B1 (en) 2022-12-16
ES2949966T3 (en) 2023-10-04
FR3065615A1 (en) 2018-10-26
EP3613264C0 (en) 2023-06-07

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