EP3592875C0 - Aluminium alloy vacuum chamber elements which are stable at high temperature - Google Patents

Aluminium alloy vacuum chamber elements which are stable at high temperature

Info

Publication number
EP3592875C0
EP3592875C0 EP18714563.6A EP18714563A EP3592875C0 EP 3592875 C0 EP3592875 C0 EP 3592875C0 EP 18714563 A EP18714563 A EP 18714563A EP 3592875 C0 EP3592875 C0 EP 3592875C0
Authority
EP
European Patent Office
Prior art keywords
stable
high temperature
vacuum chamber
aluminium alloy
chamber elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP18714563.6A
Other languages
German (de)
French (fr)
Other versions
EP3592875B1 (en
EP3592875A1 (en
Inventor
Guillaume Delgrange
Christophe Chabriol
Romain-Fabrice Bernes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Constellium Issoire SAS
Original Assignee
Constellium Issoire SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Constellium Issoire SAS filed Critical Constellium Issoire SAS
Publication of EP3592875A1 publication Critical patent/EP3592875A1/en
Application granted granted Critical
Publication of EP3592875B1 publication Critical patent/EP3592875B1/en
Publication of EP3592875C0 publication Critical patent/EP3592875C0/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C21/00—Alloys based on aluminium
    • C22C21/02—Alloys based on aluminium with silicon as the next major constituent
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C21/00—Alloys based on aluminium
    • C22C21/06—Alloys based on aluminium with magnesium as the next major constituent
    • C22C21/08—Alloys based on aluminium with magnesium as the next major constituent with silicon
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/04—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
    • C22F1/043—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon of alloys with silicon as the next major constituent
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/04—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
    • C22F1/047—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon of alloys with magnesium as the next major constituent
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/04—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
    • C22F1/05—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon of alloys of the Al-Si-Mg type, i.e. containing silicon and magnesium in approximately equal proportions
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/06—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
    • C25D11/08—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing inorganic acids
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/06—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
    • C25D11/10—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing organic acids
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/18—After-treatment, e.g. pore-sealing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Heat Treatment Of Sheet Steel (AREA)
  • ing And Chemical Polishing (AREA)
  • Laminated Bodies (AREA)
  • Heat Treatment Of Steel (AREA)
  • Physical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)
  • Particle Accelerators (AREA)
EP18714563.6A 2017-03-10 2018-03-01 Aluminium alloy vacuum chamber elements which are stable at high temperature Active EP3592875B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1751981A FR3063740B1 (en) 2017-03-10 2017-03-10 HIGH TEMPERATURE STABLE ALUMINUM ALLOY CHAMBER ELEMENTS
PCT/FR2018/050481 WO2018162823A1 (en) 2017-03-10 2018-03-01 Aluminium alloy vacuum chamber elements which are stable at high temperature

Publications (3)

Publication Number Publication Date
EP3592875A1 EP3592875A1 (en) 2020-01-15
EP3592875B1 EP3592875B1 (en) 2024-05-01
EP3592875C0 true EP3592875C0 (en) 2024-05-01

Family

ID=59325372

Family Applications (1)

Application Number Title Priority Date Filing Date
EP18714563.6A Active EP3592875B1 (en) 2017-03-10 2018-03-01 Aluminium alloy vacuum chamber elements which are stable at high temperature

Country Status (9)

Country Link
US (1) US11248280B2 (en)
EP (1) EP3592875B1 (en)
JP (1) JP2020510761A (en)
KR (1) KR102584052B1 (en)
CN (1) CN110402296B (en)
FR (1) FR3063740B1 (en)
SG (1) SG11201907957YA (en)
TW (1) TW201840864A (en)
WO (1) WO2018162823A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020185920A1 (en) 2019-03-13 2020-09-17 Novelis Inc. Age-hardenable and highly formable aluminum alloys, monolithic sheet made therof and clad aluminum alloy product comprising it
CN110129633B (en) * 2019-05-23 2020-06-05 江苏亨通电力特种导线有限公司 Aluminum alloy rivet line for furniture and preparation method thereof
FR3101641B1 (en) * 2019-10-04 2022-01-21 Constellium Issoire Aluminum alloy precision sheets
CN111041294B9 (en) * 2019-12-31 2021-03-12 辽宁忠旺集团有限公司 6-series low alloy composition with high long-term thermal stability and preparation method thereof
EP3922743A1 (en) * 2020-06-10 2021-12-15 Aleris Rolled Products Germany GmbH Method of manufacturing an aluminium alloy plate for vacuum chamber elements
CN113234972A (en) * 2021-04-30 2021-08-10 广东坚美铝型材厂（集团）有限公司 Aluminum alloy building template and preparation method thereof
CN113684400A (en) * 2021-08-22 2021-11-23 山东华建铝业科技有限公司 High-performance photovoltaic aluminum alloy frame and production process thereof
FR3136242B1 (en) 2022-06-01 2024-05-03 Constellium Valais Sheet metal for vacuum chamber elements made of aluminum alloy

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69522954T2 (en) 1994-11-16 2002-05-29 Kobe Steel Ltd VACUUM CHAMBER MADE OF ALUMINUM OR ITS ALLOYS
JPH11140690A (en) 1997-11-14 1999-05-25 Kobe Steel Ltd Aluminum material excellent in thermal cracking resistance and corrosion resistance
JP3997009B2 (en) * 1998-10-07 2007-10-24 株式会社神戸製鋼所 Aluminum alloy forgings for high-speed moving parts
TW488010B (en) 2000-02-04 2002-05-21 Kobe Steel Ltd Chamber member made of aluminum alloy and heater block
JP3919996B2 (en) 2000-02-04 2007-05-30 株式会社神戸製鋼所 Aluminum alloy for plasma processing apparatus, aluminum alloy member for plasma processing apparatus and plasma processing apparatus
JP2003034894A (en) 2001-07-25 2003-02-07 Kobe Steel Ltd Al ALLOY MEMBER SUPERIOR IN CORROSION RESISTANCE
US7033447B2 (en) 2002-02-08 2006-04-25 Applied Materials, Inc. Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus
US6565984B1 (en) 2002-05-28 2003-05-20 Applied Materials Inc. Clean aluminum alloy for semiconductor processing equipment
JP2004225113A (en) 2003-01-23 2004-08-12 Kobe Steel Ltd Al alloy member excellent in corrosion resistance and plasma resistance
JP4168066B2 (en) 2006-08-11 2008-10-22 株式会社神戸製鋼所 Aluminum alloy for anodizing treatment used in plasma processing apparatus and manufacturing method thereof, aluminum alloy member having anodized film, and plasma processing apparatus
JP5064935B2 (en) 2007-08-22 2012-10-31 株式会社神戸製鋼所 Anodized aluminum alloy that combines durability and low contamination
FR2955336B1 (en) 2010-01-20 2013-02-15 Alcan Rhenalu PROCESS FOR MANUFACTURING 6XXX ALLOY PRODUCTS FOR VACUUM CHAMBER
FR2996857B1 (en) * 2012-10-17 2015-02-27 Constellium France ELEMENTS OF ALUMINUM ALLOY VACUUM CHAMBERS

Also Published As

Publication number Publication date
EP3592875B1 (en) 2024-05-01
WO2018162823A1 (en) 2018-09-13
KR102584052B1 (en) 2023-09-27
CN110402296B (en) 2021-04-20
EP3592875A1 (en) 2020-01-15
FR3063740B1 (en) 2019-03-15
JP2020510761A (en) 2020-04-09
FR3063740A1 (en) 2018-09-14
KR20190126851A (en) 2019-11-12
US11248280B2 (en) 2022-02-15
TW201840864A (en) 2018-11-16
SG11201907957YA (en) 2019-11-28
US20210130933A1 (en) 2021-05-06
CN110402296A (en) 2019-11-01

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