EP3587525B1 - Low oxide trench dishing chemical mechanical polishing - Google Patents

Low oxide trench dishing chemical mechanical polishing Download PDF

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Publication number
EP3587525B1
EP3587525B1 EP19183705.3A EP19183705A EP3587525B1 EP 3587525 B1 EP3587525 B1 EP 3587525B1 EP 19183705 A EP19183705 A EP 19183705A EP 3587525 B1 EP3587525 B1 EP 3587525B1
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Prior art keywords
ceria
particles
coated
polishing
group
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German (de)
English (en)
French (fr)
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EP3587525A1 (en
Inventor
Xiaobo Shi
Krishna P. Murella
Joseph D. ROSE
Hongjun Zhou
Mark Leonard O'neill
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Versum Materials US LLC
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Versum Materials US LLC
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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C09K13/02—Etching, surface-brightening or pickling compositions containing an alkali metal hydroxide
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/06—Etching, surface-brightening or pickling compositions containing an inorganic acid with organic material
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1436—Composite particles, e.g. coated particles
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/31051—Planarisation of the insulating layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/31051—Planarisation of the insulating layers
    • H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/31051—Planarisation of the insulating layers
    • H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
    • H01L21/31055—Planarisation of the insulating layers involving a dielectric removal step the removal being a chemical etching step, e.g. dry etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment

Definitions

  • This invention relates to chemical mechanical planarization (CMP) of oxide and doped oxide films.
  • polishing especially polishing surfaces by chemical-mechanical polishing for the purpose of recovering a selected material and/or planarizing the structure.
  • a SiN layer is deposited under a SiO 2 layer to serve as a polish stop.
  • the role of such a polish stop is particularly important in Shallow Trench Isolation (STI) structures.
  • Selectivity is characteristically expressed as the ratio of the oxide polish rate to the nitride polish rate.
  • An example is an increased polishing selectivity rate of silicon dioxide(SiO 2 ) as compared to silicon nitride(SiN).
  • reducing oxide trench dishing is a key factor to be considered.
  • a lower trench oxide loss will prevent electrical current leaking between adjacent transistors.
  • Non-uniform trench oxide loss across die (within Die) will affect transistor performance and device fabrication yields.
  • Severe trench oxide loss high oxide trench dishing
  • US Patent 5,876,490 discloses polishing compositions containing abrasive particles and exhibiting normal stress effects.
  • the slurry further contains non-polishing particles resulting in reduced polishing rate at recesses, while the abrasive particles maintain high polish rates at elevations. This leads to improved planarization.
  • the slurry comprises cerium oxide particles and polymeric electrolyte, and can be used for Shallow Trench Isolation (STI) polishing applications.
  • STI Shallow Trench Isolation
  • US Patent 6,964,923 teaches the polishing compositions containing cerium oxide particles and polymeric electrolyte for Shallow Trench Isolation (STI) polishing applications.
  • Polymeric electrolytes that are used includes the salts of polyacrylic acid, similar as those in US Patent 5,876,490 .
  • Ceria, alumina, silica & zirconia are used as abrasives.
  • Molecular weight for such listed polyelectrolyte is from 300 to 20,000, but in overall, ⁇ 100,000.
  • US Patent 6,616,514 discloses a chemical mechanical polishing slurry for use in removing a first substance from a surface of an article in preference to silicon nitride by chemical mechanical polishing.
  • the chemical mechanical polishing slurry according to the invention includes an abrasive, an aqueous medium, and an organic polyol that does not dissociate protons, said organic polyol including a compound having at least three hydroxyl groups that are not dissociable in the aqueous medium, or a polymer formed from at least one monomer having at least three hydroxyl groups that are not dissociable in the aqueous medium.
  • US Patent 6,544,892 teaches the polishing compositions containing using abrasive, and an organic compound having a carboxylic acid functional group and a second functional group selected from amines and halides. Ceria particles were used as abrasives.
  • CMP chemical mechanical polishing
  • A inorganic particles, organic particles, or a mixture or composite thereof
  • CMP chemical mechanical polishing
  • compositions, methods and systems of chemical mechanical polishing that can provide reduced oxide trench dishing and improved over polishing window stability in a chemical and mechanical polishing (CMP) process, in addition to high removal rate of silicon dioxide as well as high selectivity for silicon dioxide to silicon nitride.
  • CMP chemical and mechanical polishing
  • the present invention provides Chemical mechanical polishing (CMP) polishing compositions, methods and systems as defined in the appended claims for a reduced oxide trench dishing and thus improved over polishing window stability by introducing chemical additives as oxide trench dishing reducing additives compositions at wide pH range including acidic, neutral and alkaline pH conditions.
  • CMP Chemical mechanical polishing
  • the present invention also provides the benefits of achieving high oxide film removal rates, low SiN film removal rates, high and tunable Oxide: SiN selectivity, lower total defect counts post-polishing, and excellent mean particle size(nm) stability.
  • a CMP polishing composition that comprises or consists of:
  • Suitable inorganic oxide particles include ceria, colloidal silica, high purity colloidal silica, colloidal ceria, alumina, titania, zirconia particles.
  • Suitable ceria particles include calcined ceria particles.
  • An example of calcined ceria particles are calcined ceria particles manufactured from milling process.
  • Suitable colloidal ceria particles may typically be manufactured from chemical reactions and crystallization processes.
  • Suitable metal-coated inorganic oxide particles include ceria-coated inorganic oxide particles, such as, ceria-coated colloidal silica, ceria-coated high purity colloidal silica, ceria-coated alumina, ceria-coated titania, ceria-coated zirconia, or any other ceria-coated inorganic oxide particles.
  • ceria-coated inorganic oxide particles such as, ceria-coated colloidal silica, ceria-coated high purity colloidal silica, ceria-coated alumina, ceria-coated titania, ceria-coated zirconia, or any other ceria-coated inorganic oxide particles.
  • Suitable organic polymer particles includepolystyrene particles, polyurethane particles, polyacrylate particles, or any other organic polymer particles.
  • Suitable metal or inorganic oxide-coated organic polymer particles can be selected from the group consisting of ceria-coated organic polymer particles, zirconia-coated organic polymer particles, silica-coated organic polymer particles, and combinations thereof.
  • the preferred abrasive particles are ceria-coated inorganic oxide particles and ceria particles.
  • the most preferred abrasive particles are ceria-coated silica particles and calcined ceria particles.
  • Suitable solvents include deionized (DI) water, distilled water, and alcoholic organic solvents.
  • the chemical additives used as oxide trenching dishing reducers preferably contain at least two or more, preferably four or more, more preferably six or more hydroxyl functional groups in their molecular structures.
  • the chemical additive described may have a general molecular structure as shown below: wherein n is selected from 2 to 5,000, preferably from 3 to 12, more preferably from 4 to 7.
  • R1, R2, and R3 can be the same or different atoms or functional groups.
  • Each of Rs in the group of R1 to R3 can be independently selected from the group consisting of hydrogen, alkyl, alkoxy, an organic group with one or more hydroxyl groups, a substituted organic sulfonic acid, a substituted organic sulfonic acid salt, a substituted organic carboxylic acid, a substituted organic carboxylic acid salt, an organic carboxylic ester, an organic amine groups, and combinations thereof; wherein, at least two or more, preferably three or four of them are hydrogen atoms.
  • R1, R2, and R3 are the same and are hydrogen atoms, the chemical additive bears multi hydroxyl functional groups.
  • the chemical additive described herein may also have a molecular structure selected from the group comprising of at least one (f), at least one (g), at least one (h) and combinations thereof;
  • R1, R2, R3, R4, R5, R6, R7 R8, R9, R10, R11, R12, R13, and R14 can be the same or different atoms or functional groups.
  • R1 to R14 can each be independently selected from the group consisting of hydrogen, alkyl, alkoxy, an organic group with one or more hydroxyl groups, a substituted organic sulfonic acid, a substituted organic sulfonic acid salt, a substituted organic carboxylic acid, a substituted organic carboxylic acid salt, an organic carboxylic ester, an organic amine groups, and combinations thereof; wherein, at least two or more, preferably four or more of them are hydrogen atoms.
  • R1, R2, R3 R4, R5, R6, R7 R8, R9, R10, R11, R12, R13, and R14 are all hydrogen atoms chemical additives bearing multi hydroxyl functional groups are provided.
  • the chemical additives described herein contain at least one six-member ring structure motif ether bonded with at least one polyol molecular unit containing multiple hydroxyl functional groups in the molecular unit structures or at least one polyol molecular unit containing multiple hydroxyl functional groups in the molecular unit structures and at least one six-member ring polyol.
  • a polyol is an organic compound containing hydroxyl groups.
  • the chemical additives as oxide trenching dishing reducers preferably contain at least two, at least four, or at least six hydroxyl functional groups in their molecular structures.
  • At least one R in the group of R1 to R5 in the general molecular structure is a polyol molecular unit having a structure shown in (b): wherein n and m can be the same or different, wherein m and n are each independently selected from 1 to 5, preferably from 1 to 4, more preferably from 1 to 3, and most preferably from 1 to 2.
  • R6 to R9 can be the same or different atoms or functional groups.
  • Each of R6, R7, R8 and R9 is independently selected from the group consisting of hydrogen, alkyl, alkoxy, an organic group with one or more hydroxyl groups, a substituted organic sulfonic acid or salt, a substituted organic carboxylic acid or salt, an organic carboxylic ester, an organic amine, and combinations thereof.
  • the rest of the Rs in the group of R1 to R5 can be independently selected from the group consisting of hydrogen, alkyl, alkoxy, an organic group with one or more hydroxyl groups, a substituted organic sulfonic acid or salt, a substituted organic carboxylic acid or salt, an organic carboxylic ester, an organic amine, and combinations thereof.
  • At least one R in the group of R1 to R5 in the general molecular structure is a polyol molecular unit having a structure shown in (b); at least one R in the group of R1 to R5 in the general molecular structure is a six-member ring polyol as shown in (c): wherein
  • At least two, preferably four, more preferably six of the Rs in the group of R1 to R9 are hydrogen atoms.
  • R2 is the six-member ring polyol
  • OR14 is replaced by O in the structure of (a) (specifically, the O in the structure of (a) that is connected to R2)
  • the chemical additive may comprise or consist of maltotritol, D- (-)-Fructose, sorbitan, meso-erythritol, beta-lactose, and combinations thereof.
  • the preferred chemical additives are maltotritol, D- (-)-Fructose, beta-lactose, and combinations thereof.
  • the CMP polishing compositions may be made into two or more parts and mixed at the point of use.
  • CMP chemical mechanical polishing
  • CMP chemical mechanical polishing
  • the polished oxide films can for example be Chemical vapor deposition (CVD), Plasma Enhance CVD (PECVD), High Density Deposition CVD (HDP), spin on oxide films, flowable CVD oxide film, carbon doped oxide film, nitrogen doped oxide film, or combinations thereof.
  • CVD Chemical vapor deposition
  • PECVD Plasma Enhance CVD
  • HDP High Density Deposition CVD
  • spin on oxide films flowable CVD oxide film, carbon doped oxide film, nitrogen doped oxide film, or combinations thereof.
  • the substrate disclosed above can further comprises a silicon nitride(SiN) surface.
  • the removal selectivity of SiO 2 : SiN is greater than 10, preferably greater than 20, and more preferably greater than 30.
  • This invention relates to Chemical mechanical polishing(CMP) compositions, methods and systems as defined in the claims for polishing oxide and doped oxide films.
  • reducing oxide trench dishing is a key factor to be considered.
  • the lower trench oxide loss will prevent electrical current leaking between adjacent transistors.
  • Non-uniform trench oxide loss across die or/and within Die will affect transistor performance and device fabrication yields.
  • Severe trench oxide loss (high oxide trench dishing) will cause poor isolation of transistor resulting in device failure. Therefore, it is important to reduce trench oxide loss by reducing oxide trench dishing in CMP polishing compositions.
  • the CMP compositions comprise unique combinations of abrasive particles and the suitable chemical additives, such as maltotritol, or any other chemical molecules with similar molecular structures and functional groups as defined in the claims.
  • This invention provides reduced oxide trench dishing and thus improved over polishing window stability by introducing chemical additives as oxide trench dishing reducing additives in the Chemical mechanical polishing (CMP) compositions at wide pH range including acidic, neutral and alkaline pH conditions.
  • CMP Chemical mechanical polishing
  • CMP Chemical Mechanical Polishing
  • the Chemical Mechanical Polishing (CMP) compositions also provide significant total defect count reduction while comparing the CMP polishing compositions using calcinated ceria particles as abrasives.
  • the Chemical Mechanical Polishing (CMP) composition also further provides excellent mean particle size and size distribution stability for the abrasive particles which is very important in maintaining robust CMP polishing performances with minimized polishing performance variations.
  • CMP polishing composition as defined in the claims comprising or consisting of:
  • Suitable inorganic oxide particles include ceria, colloidal silica, high purity colloidal silica, colloidal ceria, alumina, titania, zirconia particles.
  • ceria particles are calcined ceria particles.
  • An example of calcined ceria particles are calcined ceria particles manufactured from milling process.
  • Suitable colloidal ceria particles may typically be manufactured from chemical reactions and crystallization processes.
  • Suitable metal-coated inorganic oxide particles include the ceria-coated inorganic oxide particles, such as, ceria-coated colloidal silica, ceria-coated high purity colloidal silica, ceria-coated alumina, ceria-coated titania, ceria-coated zirconia, or any other ceria-coated inorganic oxide particles.
  • Suitable organic polymer particles include polystyrene particles, polyurethane particle, polyacrylate particles, or any other organic polymer particles.
  • Suitable metal or inorganic oxide-coated organic polymer particles include ceria-coated organic polymer particles, zirconia-coated organic polymer particles, silica-coated organic polymer particles, or combinations thereof.
  • the average mean particle sizes or mean particle sizes (MPS) of the abrasive particles of the invention described herein are preferably ranged from 2 to 1,000nm, 5 to 500nm, 15 to 400 nm or 25 to 250nm.
  • MPS refers to diameter of the particles and is measured using dynamic light scattering (DLS) technology.
  • concentrations of these abrasive particles range from 0.01 wt.% to 20 wt.%, the preferred concentrations range from 0.05 wt.% to 10 wt.%, the more preferred concentrations range from 0.1 wt.% to 5 wt.%.
  • all references to the wt.% of a component of a composition indicate the weight percent of that component by total weight of the composition.
  • the preferred abrasive particles are ceria-coated inorganic oxide particles and ceria particles. More preferred abrasive particles are ceria-coated silica particles and calcined ceria particles.
  • Suitable solvents include deionized (DI) water, distilled water, and alcoholic organic solvents.
  • the preferred solvent is DI water.
  • the CMP slurry may for example contain biocide from 0.0001 wt.% to 0.05 wt.%; preferably from 0.0005 wt.% to 0.025 wt.%, and more preferably from 0.001 wt.% to 0.01 wt.%.
  • Suitable biocides include, but is not limited to, Kathon TM , Kathon TM CG/ICP II, from Dupont/Dow Chemical Co. Bioban from Dupont/Dow Chemical Co. They have active ingredients of 5-chloro-2-methyl-4-isothiazolin-3-one or 2-methyl-4-isothiazolin-3-one.
  • the CMP slurry may for example contain a pH adjusting agent.
  • An acidic or basic pH adjusting agent can be used to adjust the polishing compositions to the optimized pH value.
  • Suitable acidic pH adjusting agents include, but are not limited to nitric acid, hydrochloric acid, sulfuric acid, phosphoric acid, other inorganic or organic acids, and mixtures thereof.
  • Suitable basic pH adjusting agents include, but are not limited to sodium hydroxide, potassium hydroxide, ammonium hydroxide, tetraalkyl ammonium hydroxide, organic quaternary ammonium hydroxide compounds, organic amines, and other chemical reagents that can be used to adjust pH towards the more alkaline direction.
  • the CMP slurry may for example contain 0 wt.% to 1 wt.%; preferably 0.01 wt.% to 0.5 wt.%; more preferably 0.1 wt.% to 0.25 wt.% pH adjusting agent.
  • the CMP slurry may for example contain 0.01 wt.% to 20 wt.%, 0.025 wt.% to 10 wt.%, 0.05 wt.% to 5 wt.%, or 0.1 to 3.0 wt.% of the chemical additives as oxide trenching dishing and total defect count reducers.
  • the chemical additives as oxide trenching dishing reducers may for example contain at least two or more, preferably four or more, more preferably six or more hydroxyl functional groups in their molecular structures.
  • the chemical additive described herein may have a general molecular structure as shown below: wherein, n is selected from 2 to 5,000, from 3 to 12, preferably from 4 to 7.
  • R1, R2, and R3 can be the same or different atoms or functional groups.
  • Each of Rs in the group of R1 to R3 can be independently selected from the group consisting of hydrogen, alkyl, alkoxy, an organic group with one or more hydroxyl groups, a substituted organic sulfonic acid, a substituted organic sulfonic acid salt, a substituted organic carboxylic acid, a substituted organic carboxylic acid salt, an organic carboxylic ester, an organic amine groups, and combinations thereof; wherein, at least two or more, preferably four of them are hydrogen atoms.
  • R1, R2, and R3 are the same and are hydrogen atoms, the chemical additive bears multi hydroxyl functional groups.
  • the chemical additive may also have a molecular structure selected from the group comprising of at least one (f), at least one (g), at least one (h) and combinations thereof;
  • R1, R2, R3, R4, R5, R6, R7 R8 , R9, R10, R11, R12, R13, and R14 can be the same or different atoms or functional groups.
  • R1 to R14 can each independently be selected from the group consisting of hydrogen, alkyl, alkoxy, an organic group with one or more hydroxyl groups, a substituted organic sulfonic acid, a substituted organic sulfonic acid salt, a substituted organic carboxylic acid, a substituted organic carboxylic acid salt, an organic carboxylic ester, an organic amine groups, and combinations thereof; wherein, at least two or more, preferably four or more of them are hydrogen atoms.
  • R1, R2, R3 R4, R5, R6, R7 R8, R9, R10, R11, R12, R13, and R14 are all hydrogen atoms chemical additives bearing multi hydroxyl functional groups are provided.
  • the chemical additives described herein may also contain at least one six-member ring structure motif ether bonded with at least one polyol molecular unit containing multiple hydroxyl functional groups in the molecular unit structures or at least one polyol molecular unit containing multiple hydroxyl functional groups in the molecular unit structures and at least one six-member ring polyol.
  • a polyol is an organic compound containing hydroxyl groups.
  • the chemical additives used as oxide trenching dishing reducers preferably contain at least two, at least four, or at least six hydroxyl functional groups in their molecular structures.
  • At least one R in the group of R1 to R5 in the general molecular structure is a polyol molecular unit having a structure shown in (b): wherein n and m can be the same or different, wherein m and n are each independently selected from 1 to 5, preferably from 1 to 4, more preferably from 1 to 3, and most preferably from 1 to 2; and where R6 to R9 can be the same or different atoms or functional groups and each is independently selected from the group consisting of hydrogen, alkyl, alkoxy, an organic group with one or more hydroxyl groups, a substituted organic sulfonic acid or salt, a substituted organic carboxylic acid or salt, an organic carboxylic ester, an organic amine, and combinations thereof; and the rest of the Rs in the group of R1 to R5 are each independently selected from the group consisting of hydrogen, alkyl, alkoxy, an organic group with one or more hydroxyl groups, a substituted organic
  • At least one R in the group of R1 to R5 in the general molecular structure is a polyol molecular unit having a structure shown in (b); at least one R in the group of R1 to R5 in the general molecular structure is a six-member ring polyol as shown in (c): wherein one of the OR in the group of OR11, OR12, OR13 and OR14 is replaced by O in structure (a); and
  • At least two, more preferably four, more preferably six of the Rs in the group of R1 to R9 are hydrogen atoms.
  • the chemical additive may comprise or consist of maltotritol, D- (-)-Fructose, sorbitan, meso-erythritol, beta-lactose, or combinations thereof.
  • the preferred chemical additives are maltotritol, D- (-)-Fructose, beta-lactose, or combinations thereof.
  • the CMP polishing compositions may be made into two or more parts and mixed at the point of use.
  • CMP chemical mechanical polishing
  • the polished oxide films can be CVD oxide, PECVD oxide, High density oxide, or Spin on oxide films.
  • the polished oxide films can be Chemical vapor deposition (CVD), Plasma Enhance CVD (PECVD), High Density Deposition CVD(HDP), spin on oxide films, flowable CVD oxide film, carbon doped oxide film, nitrogen doped oxide film, or combinations thereof.
  • CVD Chemical vapor deposition
  • PECVD Plasma Enhance CVD
  • HDP High Density Deposition
  • spin on oxide films flowable CVD oxide film, carbon doped oxide film, nitrogen doped oxide film, or combinations thereof.
  • the substrate disclosed above can further comprises a silicon nitride surface.
  • the removal selectivity of SiO 2 : SiN is greater than 10, preferably greater than 20, and more preferably greater than 30.
  • Dishing performance of the CMP compositions can also be characterized by the ratio of oxide trench dishing rate ( ⁇ /min.) vs the blanket HDP film removal rate( ⁇ /min.).
  • the CMP compositions having the ratio of ⁇ 0.1, 0.08, 0.06, 0.05, 0.03, or 0.02 provide good oxide dishing performance.
  • these chemical additives can have some impacts on the stability of abrasive particles in the compositions.
  • these chemical additives can have some impacts on the stability of ceria-coated inorganic oxide abrasives in the CMP polishing compositions.
  • the abrasive particle stability is tested by monitoring the mean particle size (MPS) (nm) and particle size distribution parameter D99(nm) changes vs the times or at elevated temperatures.
  • MPS mean particle size
  • Particle size distribution may be quantified as a weight percentage of particles that has a size lower than a specified size.
  • parameter D99(nm) represents a particle size (diameter) where 99 wt.% of all the slurry particles would have particle diameter equal to or smaller than the D99(nm). That is, D99(nm) is a particle size that 99 wt.% of the particles fall on and under.
  • Particle size distribution can be measured by any suitable techniques such as imaging, dynamic light scattering, hydrodynamic fluid fractionation, disc centrifuge etc.
  • MPS(nm) and D99 (nm) are both measured by dynamic light scattering in this application.
  • CMP compositions providing abrasive particle stability preferably have changes for MPS (nm) and D99(nm) ⁇ 6.0%, 5.0%, 3.0%, 2.0%, 1.0%, 0.5 %, 0.3% or 0.1% for a shelf time of at least 30 days, 40 days, 50 days, 60 days, 70 days or 100 days at a temperature ranging from 20 to 60 °C, 25 to 50 °C.
  • Calcinate ceria particles used as abrasives having a particle size of approximately 150 nanometers (nm); such ceria-coated silica particles can have a particle size of ranged from approximately 5 nanometers (nm) to 500 nanometers (nm).
  • Ceria-coated Silica used as abrasive having a particle size of approximately 100 nanometers (nm); such ceria-coated silica particles can have a particle size of ranged from approximately 5 nanometers (nm) to 500 nanometers (nm);
  • Chemical additives such as D-sorbitol, dulcitol, fructose, maltitol, lactitol and other chemical raw materials were supplied by Sigma-Aldrich, St. Louis, MO.
  • TEOS tetraethyl orthosilicate Polishing Pad: Polishing pad, IC1010 and other pads were used during CMP, supplied by DOW, Inc.
  • SiN Removal Rates Measured SiN removal rate at a given down pressure.
  • the down pressure of the CMP tool was 3.0 psi in the examples listed.
  • ResMap CDE model 168, manufactured by Creative Design Engineering, Inc, 20565 Alves Dr., Cupertino, CA, 95014.
  • the ResMap tool is a four-point probe sheet resistance tool. Forty-nine-point diameter scan at 5mm edge exclusion for film was taken.
  • the CMP tool that was used is a 200mm Mirra, or 300mm Reflexion manufactured by Applied Materials, 3050 Boweres Avenue, Santa Clara, California, 95054.
  • An IC1000 pad supplied by DOW, Inc, 451 Bellevue Rd., Newark, DE 19713 was used on platen 1 for blanket and pattern wafer studies.
  • the IC1010 pad or other pad was broken in by conditioning the pad for 18 mins. At 7 Ibs. (3.18Kg) down force on the conditioner. To qualify the tool settings and the pad break-in two tungsten monitors and two TEOS monitors were polished with Versum ® STI2305 slurry, supplied by Versum Materials Inc. at baseline conditions.
  • Polishing experiments were conducted using PECVD or LECVD or HD TEOS wafers. These blanket wafers were purchased from Silicon Valley Microelectronics, 2985 Kifer Rd., Santa Clara, CA 95051.
  • oxide blanket wafers, and SiN blanket wafers were polished at baseline conditions.
  • the tool baseline conditions were: table speed; 87 rpm, head speed: 93 rpm, membrane pressure; 2.5 psi (17.23 kPa), 3.0 psi(20.68kPa), or 3.3 psi (22.75 kPa) or 4.3 psi (29.65 kPa), inter-tube pressure; 3.1 psi (21.37 kPa), or others, retaining ring pressure; 5.1 psi (35.16kPa), or others,
  • the slurry was used in polishing experiments on patterned wafers (MIT860), supplied by SWK Associates, Inc. 2920 Scott Boulevard. Santa Clara, CA 95054). These wafers were measured on the Veeco VX300 profiler/AFM instrument. The 3 different sized pitch structures were used for oxide dishing measurement. The wafer was measured at center, middle, and edge die positions.
  • TEOS SiN Selectivity: (removal rate of TEOS)/ (removal rate of SiN) obtained from the CMP polishing compositions were tunable.
  • a polishing composition comprising 0.2 wt.% cerium-coated silica, a biocide ranging from 0.0001 wt.% to 0.05 wt.%, and deionized water was prepared as reference (ref. ).
  • the polishing compositions were prepared with the reference (0.2 wt.% cerium-coated silica, a biocide ranging from 0.0001 wt.% to 0.05 wt.%, and deionized water) plus a chemical additive in 0.01 wt.% to 2.0 wt.%.
  • composition had a pH at 5.35.
  • pH adjusting agent used for acidic pH condition and alkaline pH condition were nitric acid and ammonium hydroxide respectively.
  • the working slurries has 0.15 wt.% chemical additives added to the reference slurry.
  • Example 2 0.2 wt.% ceria-coated silica abrasive based formulation without chemical additives was used as reference.
  • the chemical additives were used at 0.15 wt.% (0.15X) concentrations respectively with 0.2 wt.% ceria-coated silica as abrasives in the working slurries.
  • Table 3 lists the ratio of oxide trench dishing rate ( ⁇ /min.) vs the blanket HDP film removal rate( ⁇ /min.),
  • polishing compositions using D-sorbitol and D-mannitol provided significant oxide trench dishing reductions on both100 ⁇ m pitch and 200 ⁇ m pitch respectively, comparing to the reference.
  • the polishing composition using xylitol showed no impact on oxide trench dishing in polishing comparing to the reference.
  • the polishing compositions using D-(+)-mannose or meso-erythritol had the oxide trench dishing worse than the reference.
  • the polishing composition using D-sorbitol or D-mannitol afforded much lower slope values of oxide trench dishing vs over polishing amounts on 100 ⁇ m and 200 ⁇ m features when compared to the reference.
  • the CMP compositions with chemical additives provided lower oxide trench dishing on 100um pitch, and 200um pitch, respectively.
  • the compositions provided significant oxide trench dishing reductions as compared to the reference composition.
  • Table 7 lists the ratio of oxide trench dishing rate ( ⁇ /min.) vs the blanket HDP film removal rate( ⁇ /min.), Table 7.
  • Example 4 the removal rates, and TEOS: SiN selectivity were tested tests were performed with CMP polishing compositions with chemical additives having different concentrations at pH 5.35.
  • Table 10 Effects of Chemical Additive D-Sorbitol Conc. On Oxide Trench Dishing vs OP Times(sec.) Compositions Polish Time (Sec.) 100um pitch dishing 200um pitch dishing Blanket HDP RR 0.2% Ceria-coated Silica + 0.05x D-Sorbitol 0 198 332 3128 60 453 690 120 573 842 0.2% Ceria-coated Silica + 0.1x D-Sorbitol 0 182 288 3425 60 355 551 120 499 736 0.2% Ceria-coated Silica + 0.15x D-Sorbitol 0 132 246 3517 60 269 423 120 423 595
  • Table 11 lists the ratio of Trench Dishing Rate ( ⁇ )/Blanket HDP RR ( ⁇ /min.) from the compositions with different concentrations of D-Sorbitol.
  • D-sorbitol can be used as an effective oxide trench dishing reducer in a wide concentration range
  • the slopes of the various sized pitch dishing vs oxide over polishing gradually decreased while at over polishing time at zero seconds.
  • Example 5 the tests were performed with CMP polishing compositions having different pH values.
  • composition composed of 0.2 wt.% ceria-coated silica as abrasives and 0.1 wt.% D-sorbitol as chemical additive was tested at three different pH conditions.
  • compositions showed a consistent performance by offering high TEOS and HDP film removal rates, low SiN removal rates, and high TEOS: SiN selectivity in acidic, neutral or alkaline pH conditions..
  • Table 15 shows the results of the ratio of Trench Dishing Rate ( ⁇ )/Blanket HDP RR ( ⁇ /min.), Table 15 Ratio of Trench Dishing Rate ( ⁇ )/Blanket HDP RR ( ⁇ /min.) at Different pH Compositions P100 Dishing Rate ( ⁇ /min.) /Blanket HDP RR ( ⁇ /min.) P200 Dishing Rate ( ⁇ /min.) /Blanket HDP RR ( ⁇ /min.) 0.2% Ceria-coated Silica + 0.1X D-Sorbitol (pH 5.35) 0.04 0.05 0.2% Ceria-coated Silica + 0.1X D-Sorbitol (pH 6) 0.04 0.07 0.2% Ceria-coated Silica + 0.1X D-Sorbitol (pH 7) 0.05 0.06
  • Example 6 the effects of various selected chemical additives from afore listed several types of chemical additives on the film removal rates and selectivity were observed.
  • pH adjusting agent was used for acidic pH condition and alkaline pH condition were nitric acid and ammonium hydroxide respectively.
  • SiN selectivity was fluctuating from slightly increased (arabinose, myo-inositol) to significantly increased (maltitol, ribose and beta-lactose).
  • maltitol is the most efficient SiN removal rate suppressing chemical additive
  • ribose and beta-lactose are also quite efficient SiN removal rate suppressing additives.
  • the following chemical additives maltitol, D-sorbitol, lactitol, ribose, and beta-lactose were used in the polishing compositions with 0.2 wt.% ceria-coated silica abrasives at pH 5.35 to conduct polishing tests on polishing oxide patterned wafers.
  • the chemical additives were used at 0.15 wt.% in the compositions.
  • Table 19 shows the results of the ratio of Trench Dishing Rate ( ⁇ )/Blanket HDP RR ( ⁇ /min.), Table 19 Ratio of Trench Dishing Rate ( ⁇ )/Blanket HDP RR ( ⁇ /min.) Compositions P100 Dishing Rate ( ⁇ /min.) /Blanket HDP RR ( ⁇ /min.) P200 Dishing Rate ( ⁇ /min.) /Blanket HDP RR ( ⁇ /min.) 0.2% Ceria-coated Silica pH 5.35 0.13 0.16 0.2% Ceria-coated Silica + 0.15% Sorbitol 0.02 0.03 0.2% Ceria-coated Silica + 0.15% Maltitol 0.05 0.04 0.2% Ceria-coated Silica + 0.15% Lactitol 0.04 0.05 0.2% Ceria-coated Silica + 0.15% Ribose 0.03 0.05 0.2% Ceria-coated Silica + 0.15% Beta-Lactose 0.05 0.07 *D-Sorbitol, Malti
  • the polishing compositions were prepared with the reference (0.2 wt.% ceria-coated silica, a biocide ranging from 0.0001 wt.% to 0.05 wt.%, and deionized water) and maltitol or lactitol were used at 0.28 wt.%.
  • Table 20 Effects of Maltitol or Lactitol on Film RR ( ⁇ /min.) & TEOS: SiN Selectivity Compositions TEOS Film RR ( ⁇ /min.) HDP Film RR ( ⁇ /min.) SiN Film RR ( ⁇ /min.) TEOS: SiN Selectivity 0.2% Ceria-coated Silica pH 5.35 3279 2718 349 9.4 0.2% Ceria-coated Silica + 0.28% Maltitol pH 5.35 2623 2639 46 57.0 0.2% Ceria-coated Silica + 0.28% Lactitol pH 5.35 2630 2547 55 47.8
  • Example compositions in Example 8 were used in this Example.
  • Oxide trenching dishing without/or with different over polishing times were tested.
  • the effects of maltitol or lactitol on the oxide trenching dishing vs over polishing times were observed.
  • Table 21 Effects of Maltitol or Lactitol on Oxide Trench Dishing vs OP Times (Sec.) Compositions OP Times (Sec.) 100um pitch dishing 200um pitch dishing 0.2% Ceria-coated Silica pH 5.35 Ref. 0 165 291 60 857 1096 120 1207 1531 0.2% Ceria-coated Silica + 0.28% Maltitol pH 5.35 0 408 616 60 480 713 120 542 803 0.2% Ceria-coated Silica + 0.28% Lactitol pH 5.35 0 349 563 60 438 702 120 510 779
  • the polishing compositions with the addition of the chemical additives, maltitol or lactitol afforded low oxide trench dishing on 100 ⁇ m pitch, and 200 ⁇ m pitch respectively when 60second or 120second over polishing times were applied.
  • compositions provided significant oxide trench dishing reductions compared to the reference composition which did not have the chemical additives, maltitol or lactitol.
  • Table 22 shows the results of the ratio of Trench Dishing Rate ( ⁇ )/Blanket HDP RR ( ⁇ /min.), Table 22.
  • the slopes of oxide trench dishing vs the OP removal amount is shown in Table 23.
  • Table 23. Effects of Maltitol or Lactitol on Slopes of Dishing vs OP Removal Amount Compositions P100 dishing/OP Amt Slope P200 dishing/OP Amt Slope P1000 dishing/OP Amt Slope 0.2% Ceria-coated Silica pH 5.35 Ref. 0.19 0.23 0.25 0.2% Ceria-coated Silica + 0.28% Maltitol pH 5.35 0.04 0.05 0.08 0.2% Ceria-coated Silica + 0.28% Lactitol pH 5.35 0.04 0.06 0.09
  • Example 10 the trench oxide loss rates were compared for the polishing compositions using maltitol or lactitol and reference as listed in Table 24.
  • Table 24 Effects of Maltitol or Lactitol on Trench Loss Rates ( ⁇ /min.) Compositions P 1 OOTrench Loss Rate ( ⁇ /sec.) P200Trench Loss Rate ( ⁇ /sec.) 0.2% Ceria-coated Silica pH 5.35 Ref. 18.5 19.3 0.2% Ceria-coated Silica + 0.28% Maltitol pH 5.35 2.0 2.5 0.2% Ceria-coated Silica + 0.28% Lactitol pH 5.35 2.3 2.6
  • compositions were prepared as shown in Table 19.
  • compositions used of 0.2 wt.% ceria-coated silica as abrasives, 0.28 wt.% lactitol as chemical additive, biocide, DI water, and a pH adjusting agent to provide different pH conditions.
  • lactitol containing polishing composition at different pH conditions on the oxide trenching dishing vs over polishing times were observed.
  • compositions with lactitol as oxide trench dishing reducing agent provided significant oxide trench dishing reductions as compared to the reference polishing composition which did not have the chemical additive, lactitol.
  • Table 26 Effects of Lactitol at Different pH Conditions on Oxide Trench Dishing vs OP Times (Sec.) Compositions OP Times (Sec.) 100um pitch dishing 200um pitch dishing 0.2% Ceria-coated Silica pH 5.35 Ref.
  • Table 27 depicts the ratio of Trench Dishing Rate (A)/Blanket HDP RR (A/min.) at Different pH.
  • lactitol and ceria-coated silica based CMP polishing compositions again showed much lower slope values at different pH conditions comparing to those slope values obtained for the ceria-coated silica abrasive based reference sample at pH 5.35.
  • Example 11 the trench oxide loss rates were compared for the polishing compositions using lactitol at different pH conditions or without using lactitol at pH 5.35 and listed in Table 29. Table 29. Effects of Lactitol at Different pH Conditions on Trench Loss Rates ( ⁇ /min.) Compositions P100Trench Loss Rate (A/sec.) P200Trench Loss Rate ( ⁇ /sec.) 0.2% Ceria-coated Silica pH 5.35 Ref.
  • polishing test results obtained at different pH conditions using lactitol as oxide trench dishing reducer proved that the CMP polishing compositions can be used in wide pH range including acidic, neutral or alkaline pH conditions.
  • these chemical additives can have some impact on the stability of ceria-coated inorganic oxide abrasives in the CMP polishing compositions.
  • CMP polishing compositions it is very important to have good abrasive particle stability to assure constant and desirable CMP polishing performances.
  • MPS (nm) mean particle size
  • D99(nm) changes vs the times or at elevated temperatures. The smaller of MPS (nm) and D99(nm) changes, the more stable of the invented polishing compositions are.
  • the stability of ceria-coated silica abrasive particles in the compositions having chemical additives was monitored by measuring the change of the mean particles size and the change of particle size distribution D99.
  • testing samples were made using 0.2 wt.% or other wt.% ceria-coated silica abrasive; very low concentration of biocide; 0.15 wt.% maltitol, 0.15 wt.% lactitol or 0.0787 wt.% Myo-inositol as oxide trench dishing reducer; and with pH adjusted to 5.35.
  • the abrasive stability tests on the polishing compositions were carried out at 50 °C for at least 10 days or more.
  • the stability test results of the used ceria-coated silica abrasives with the chemical additives are listed in Table 30. Table 30.
  • 0.2 wt. % ceria-coated silica particles had MPS changes of 0.23%, 0.34% and 0.39% in the compositions having 0.15 wt. % maltitol, 0.15 wt. % lactitol and 0.0787 wt.% myo-inositol respectively.
  • 0.2 wt. % ceria-coated silica particles in the composition having 0.15 wt. % maltitol had a mean particle size change of less than 1.9 % by day 18 at 50 °C.
  • 0.2 wt. % ceria-coated silica particles in the composition having 0.0787 wt.% myo-inositol had a mean particle size change of less than 0.83 % by day 11 at 50 °C.
  • 0.2 wt. % ceria-coated silica particles in the composition having 0.15 wt.% lactitol had a mean particle size change of less than1.3 % by day 32 at 50 °C.
  • 0.2 wt. % ceria-coated silica particles in the composition having 0.15 wt.% maltitol had a mean particle size and D99 changes of less than 8.34 ⁇ 10 -4 and 0.63 % respectively by day 62 at 50 °C.
  • polishing compositions comprising more concentrated ceria-coated silica abrasives ( more than 0.2 wt. %) and more concentrated maltitol (more than 0.15 wt. %) as oxide trench dishing reducer.
  • 1.6 wt. % of the ceria-coated silica particles had MPS and D99 changes of less than 1.2% and less than 1.6 % respectively by day 42 at 50 °C in the composition having 1.2 wt. % of maltitol respectively..
  • 2.4 wt. % of the ceria-coated silica particles had MPS and D99 changes of less than 0.33 % and less than 0.23 % respectively by day 42 at 50 °C in the composition having 1.8 wt. % of maltitol respectively.
  • polishing compositions comprised of ceria-coated colloidal silica abrasives and more concentrated maltitol as oxide trench dishing reducer all showed very good particle size stability of MPS (nm) and D99(nm) at elevated temperatures.
  • Another key benefit of using the presently invented CMP polishing compositions is the reduced total defect counts through and post-polishing which is resulted in by using the ceria-coated colloidal silica composite particles as abrasives instead of using calcined ceria particle as abrasives.
  • the following three polishing compositions were prepared for defects testing.
  • the first sample was made using 0.5 wt.% calcined ceria abrasives, 0.05 wt.% polyacrylate salt and low concentration of biocide;
  • the second sample was made using 0.2 wt.% ceria-coated silica abrasives, 0.28 wt.% maltitol and low concentration of biocide;
  • the third sample was made using 0.2 wt.% ceria-coated silica abrasives, 0.28 wt.% lactitol and low concentration of biocide.
  • higher concentration of calcinated ceria abrasive was used in sample 1.
  • the polishing compositions using ceria-coated silica particles as abrasives and either of maltitol or lactitol as trench dishing reducing agent provided significantly lower total defect counts on the polished TEOS and SiN wafers than the total defect counts obtained using the polishing composition comprised of calcined ceria abrasives and polyacrylate salt as chemical additive.
  • polishing compositions were prepared for the defects testing.
  • the first two polishing compositions used calcined ceria abrasives, 0.28 wt.% maltitol or 0.28 wt.% lactitol as oxide trenching dishing reducing agent and low concentration of biocide; the other two polishing compositions were made using ceria-coated silica abrasives, 0.28 wt.% maltitol or 0.28 wt.% lactitol as oxide trenching dishing reducing agent and low concentration of biocide. All four formulations have pH valued at 5.35.
  • abrasives All chemical additives were used at the same wt.%, but different types of abrasives were used, e.g., calcined ceria vs ceria-coated silica particles as abrasives.
  • the polishing compositions using ceria-coated silica particles as abrasives and either maltitol or lactitol as trench dishing reducing agent afforded significantly lower normalized total defect counts on the polished TEOS and SiN wafers than the normalized total defect counts obtained using the polishing composition comprised of calcined ceria abrasives, and either maltitol or lactitol as oxide trench dishing reducing chemical additive.
  • Example 15 both calcined ceria and ceria-coated silica particles based polishing compositions were tested.
  • composition comprising calcined ceria particles but no chemical additives was used as a reference.
  • Calcined ceria or ceria-coated silica particles were used at 1.0 wt.%, D-sorbitol and D-Mannitol were used at 2.0 wt.% respectively.
  • the polishing composition with 1.0 wt.% calcined ceria abrasives provided high TEOS and HDP film removal rates at pH 9.5.
  • polishing compositions with such low TEOS and HDP film removal rates cannot meet the oxide film removal rate requirements in CMP applications.
  • Example 16 the weight% ratios of ceria-coated silica vs the chemical additive D-sorbitol were tested on their effects on various film polishing removal rates and on oxide trench dishing vs over polishing times.
  • the ceria-coated silica abrasives were used from 0.2 wt.% to 0.4 wt.%, and D-sorbitol was used from 0.0 wt.% to 0.30 wt.%; which gave the ratio of ceria-coated silica abrasive wt.% vs the chemical additive D-sorbitol wt.% from 0.0 to 4.0. pH was 5.35 for all testing compositions.
  • the oxide trench dishing vs over polishing times shown in Figure 2 also show that between 0.7 to 2.0 weight% ratio range for ceria-coated silica vs D-sorbitol was a more suitable range for achieving high oxide film removal rates, low SiN removal rates, high TEOS: SiN selectivity and low oxide trench dishing.
  • calcined ceria was used as abrasive particles and polyacrylate salt (PAA Salt) and sorbitol with different concentrations were used as chemical additives to compare the polishing performances at pH 5.35. 20.68kPa (3.0 psi) down force was applied in these polishing tests.
  • the composition without a chemical additive was used as a reference.
  • Table 37 Effects of Additive Conc. on Film RR (A/min.) & Selectivity of Oxide: SiN Samples TEOS -RR (ang/min) HDP -RR (ang/min) PECVD SiN (ang/min) TEOS: SiN Selectivity Calcined Ceira only 2210 2313 110 20 Ceria + 0.05X PAA Salt 1657 1627 97 17 Ceria + 0.05X D-Sorbitol 1956 1990 68 29 Ceria + 0.15X D-Sorbitol 1602 1579 49 33 Ceria + 0.3X D-Sorbitol 1294 1179 43 30
  • the chemical additive, D-sorbitol, when used in three different concentrations in calcined ceria particles based CMP polishing compositions also suppressed TEOS and HDP film removal rates, but significantly reduced SiN removal rates and thus increased TEOS: SiN selectivity from 20:1 to around 30:1.
  • the chemical additive, D-sorbitol, when used in three different concentrations in calcined ceria particles based CMP polishing compositions also reduced oxide trench dishing across three different sized features.
  • Example 18 the CMP polishing compositions were tested at different pH values.
  • Table 39 Effects of pH on Film Removal Rates & TEOS: SiN Selectivity Samples TEOS -RR (ang/min) HDP -RR (ang/min) PECVDSiN (ang/min) TEOS: SiN Selectivity Calcined Ceira only, pH 5.35 2210 2313 110 20 Ceria + 0.15 ⁇ D-Sorbitol pH 5.35 1602 1579 49 33 Ceria + 0.15 ⁇ D-Sorbitol pH 9.39 1467 1697 40 37
  • the CMP polishing compositions provide good dishing performance at a wide pH range for CMP applications.
  • Example 19 polishing tests were carried out on various films using the CMP polishing compositions made with calcined ceria particles or ceria-coated silica particles as abrasives and maltitol or lactitol as chemical additives at pH 5.35.
  • the polishing pad used was Dow's IC1010 pad, the down force used for polishing tests was 20.68 kPa (3.0 psi).
  • the polishing compositions having chemical additive maltitol or lactitol with either calcined ceria particles or ceria-coated silica particles offered high TEOS and good HDP film removal rates, significantly suppressed SiN film removal rates, thus, increased TEOS: SiN selectivity significantly.
  • the polishing pad used was Dow's IC1010 pad, the down force used for polishing tests was 20.68 kPa (3.0 psi).
  • polishing compositions using ceria-coated silica abrasives gave similar HDP film removal rates even at much lower applied down force and with lower abrasive concentrations comparing with the HDP film removal rate obtained at 29.64 kPa (4.3psi) DF using calcined ceria abrasive based polishing composition.
  • ceria-coated silica abrasive containing polishing compositions gave lower SiN removal rates than the polishing composition using ceria particles as abrasives while comparing their SiN removal rates obtained at different polishing down forces.
  • polishing test results on polishing patterned wafers at different down forces are listed in Table 44.
  • Various Polishing Compositions@Different Polishing DF on Polishing Patterned Wafers Compositions P200 Trench Loss Rate ( ⁇ /sec.) P200 SiN Loss Rate ( ⁇ /sec.) P200 SiN /HDP Blanket Ratio 0.5% Ceria + 0.0506% Polyacrylate salt pH 5.35 @4.3psi DF 2.1 0.9 0.038 0.2% Ceria-coated Silica + 0.15% D-Sorbitol pH 5.35 @2.5psi DF 1.9 0.6 0.025 0.2% Ceria-coated Silica + 0.15% Maltitol pH 5.35 @2.5psi DF 2.4 0.7 0.028
  • polishing test results on polishing various types of blanket wafers using Dow's IK4250UH polishing pad are listed in Table 45. Table 45.
  • the HDP film: SiN selectivity was increased from 13.9:1 to 51.9:1.
  • the patterned wafers were also polished using Dow's IK4250UH pad.
  • the polishing results and polishing compositions are listed in Table 46. Table 46.
  • Various Polishing Compositions on Polishing Patterned Wafers Compositions P200 Trench Loss Rate ( ⁇ /sec.) P200 SiN Loss Rate ( ⁇ /sec.) P200 SiN /HDP Blanket Ratio 0.5% Ceria + 0.0506% Polyacrylate salt pH 5.35 6.1 2.2 0.048 0.2% Ceria-coated Silica + 0.15% D-Sorbitol pH 5.35 4.3 1.3 0.013

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EP4157955A4 (en) * 2020-05-29 2024-08-21 Versum Mat Us Llc LOW OXIDE BUMPING CHEMICAL MECHANICAL PLANARIZATION POLISHING COMPOSITIONS FOR SHALLOW TRENCH ISOLATION APPLICATIONS AND METHODS OF MAKING THE SAME
KR20230044296A (ko) * 2020-07-29 2023-04-03 버슘머트리얼즈 유에스, 엘엘씨 구리 및 실리콘 관통 전극(tsv)의 화학적 기계적 평탄화(cmp)를 위한 패드-인-어-보틀(pib) 기술
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KR20200002708A (ko) 2020-01-08
CN110655870A (zh) 2020-01-07
IL267717A (en) 2019-10-31
US20210324270A1 (en) 2021-10-21
TW202000848A (zh) 2020-01-01
JP7121696B2 (ja) 2022-08-18
US11667839B2 (en) 2023-06-06
JP2020002359A (ja) 2020-01-09
TWI811389B (zh) 2023-08-11

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