EP3586986C0 - Vorrichtung und verfahren zur submolekularen trockenreinigung und/oder zur hydrophilisierung der oberfläche von festkörpern - Google Patents

Vorrichtung und verfahren zur submolekularen trockenreinigung und/oder zur hydrophilisierung der oberfläche von festkörpern

Info

Publication number
EP3586986C0
EP3586986C0 EP18179810.9A EP18179810A EP3586986C0 EP 3586986 C0 EP3586986 C0 EP 3586986C0 EP 18179810 A EP18179810 A EP 18179810A EP 3586986 C0 EP3586986 C0 EP 3586986C0
Authority
EP
European Patent Office
Prior art keywords
hydrophilisation
submolecular
solids
dry cleaning
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP18179810.9A
Other languages
English (en)
French (fr)
Other versions
EP3586986B1 (de
EP3586986A1 (de
Inventor
Hryhoriy Stryhanyuk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Helmholtz Zentrum fuer Umweltforschung GmbH UFZ
Original Assignee
Helmholtz Zentrum fuer Umweltforschung GmbH UFZ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helmholtz Zentrum fuer Umweltforschung GmbH UFZ filed Critical Helmholtz Zentrum fuer Umweltforschung GmbH UFZ
Priority to EP18179810.9A priority Critical patent/EP3586986B1/de
Publication of EP3586986A1 publication Critical patent/EP3586986A1/de
Application granted granted Critical
Publication of EP3586986B1 publication Critical patent/EP3586986B1/de
Publication of EP3586986C0 publication Critical patent/EP3586986C0/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0057—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/005—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by infrared radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
EP18179810.9A 2018-06-26 2018-06-26 Vorrichtung und verfahren zur submolekularen trockenreinigung und/oder zur hydrophilisierung der oberfläche von festkörpern Active EP3586986B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP18179810.9A EP3586986B1 (de) 2018-06-26 2018-06-26 Vorrichtung und verfahren zur submolekularen trockenreinigung und/oder zur hydrophilisierung der oberfläche von festkörpern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP18179810.9A EP3586986B1 (de) 2018-06-26 2018-06-26 Vorrichtung und verfahren zur submolekularen trockenreinigung und/oder zur hydrophilisierung der oberfläche von festkörpern

Publications (3)

Publication Number Publication Date
EP3586986A1 EP3586986A1 (de) 2020-01-01
EP3586986B1 EP3586986B1 (de) 2024-09-04
EP3586986C0 true EP3586986C0 (de) 2024-09-04

Family

ID=62904251

Family Applications (1)

Application Number Title Priority Date Filing Date
EP18179810.9A Active EP3586986B1 (de) 2018-06-26 2018-06-26 Vorrichtung und verfahren zur submolekularen trockenreinigung und/oder zur hydrophilisierung der oberfläche von festkörpern

Country Status (1)

Country Link
EP (1) EP3586986B1 (de)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2943107C2 (de) * 1979-10-25 1984-07-26 Robert 6600 Saarbrücken Langen Verfahren zum Entrosten
JPS60212226A (ja) * 1984-04-06 1985-10-24 Ushio Inc 紫外線処理方法
DE4113523A1 (de) * 1991-04-25 1992-10-29 Abb Patent Gmbh Verfahren zur behandlung von oberflaechen
US5992429A (en) * 1997-03-13 1999-11-30 Itt Manufacturing Enterprises Method for cleaning semiconductor wafers with an external heat source
US6676762B2 (en) * 2001-01-15 2004-01-13 Board Of Trustees Of Michigan State University Method for cleaning a finished and polished surface of a metal automotive wheel
US7190512B2 (en) * 2004-04-29 2007-03-13 Mitsubishi Heavy Industries, Ltd. Optical properties restoration apparatus, the restoration method, and an optical system used in the apparatus
US20060175291A1 (en) * 2005-02-10 2006-08-10 Hunt John A Control of process gases in specimen surface treatment system
KR101353668B1 (ko) * 2007-08-16 2014-01-20 아사히 가라스 가부시키가이샤 기판 세정 장치 및 기판 세정 방법
US9335279B2 (en) * 2011-04-26 2016-05-10 Kla-Tencor Corporation Pre and post cleaning of mask, wafer, optical surfaces for prevention of contamination prior to and after inspection

Also Published As

Publication number Publication date
EP3586986B1 (de) 2024-09-04
EP3586986A1 (de) 2020-01-01

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