EP3585540A1 - Vorrichtung und verfahren zum kalibrieren eines bestrahlungssystems, das zum herstellen eines dreidimensionalen werkstücks verwendet wird - Google Patents

Vorrichtung und verfahren zum kalibrieren eines bestrahlungssystems, das zum herstellen eines dreidimensionalen werkstücks verwendet wird

Info

Publication number
EP3585540A1
EP3585540A1 EP18704537.2A EP18704537A EP3585540A1 EP 3585540 A1 EP3585540 A1 EP 3585540A1 EP 18704537 A EP18704537 A EP 18704537A EP 3585540 A1 EP3585540 A1 EP 3585540A1
Authority
EP
European Patent Office
Prior art keywords
calibration
calibration structure
irradiation
irradiation system
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP18704537.2A
Other languages
German (de)
English (en)
French (fr)
Inventor
Andreas Wiesner
Toni Adam Krol
Jan Wilkes
Birk Hoppe
Christiane Thiel
Christopher Stengel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon SLM Solutions AG
Original Assignee
SLM Solutions Group AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=61192935&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP3585540(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by SLM Solutions Group AG filed Critical SLM Solutions Group AG
Publication of EP3585540A1 publication Critical patent/EP3585540A1/de
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • B23K26/032Observing, e.g. monitoring, the workpiece using optical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20Direct sintering or melting
    • B22F10/28Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30Process control
    • B22F10/31Calibration of process steps or apparatus settings, e.g. before or during manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042Automatically aligning the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/34Laser welding for purposes other than joining
    • B23K26/342Build-up welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K31/00Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
    • B23K31/12Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to investigating the properties, e.g. the weldability, of materials
    • B23K31/125Weld quality monitoring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28BSHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00Producing shaped prefabricated articles from the material
    • B28B1/001Rapid manufacturing of 3D objects by additive depositing, agglomerating or laminating of material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10Processes of additive manufacturing
    • B29C64/141Processes of additive manufacturing using only solid materials
    • B29C64/153Processes of additive manufacturing using only solid materials using layers of powder being selectively joined, e.g. by selective laser sintering or melting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20Apparatus for additive manufacturing; Details thereof or accessories therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/25Housings, e.g. machine housings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/30Auxiliary operations or equipment
    • B29C64/386Data acquisition or data processing for additive manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/30Auxiliary operations or equipment
    • B29C64/386Data acquisition or data processing for additive manufacturing
    • B29C64/393Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00Processes of additive manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00Apparatus for additive manufacturing; Details thereof or accessories therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00Data acquisition or data processing for additive manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00Data acquisition or data processing for additive manufacturing
    • B33Y50/02Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/401Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/4097Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by using design data to control NC machines, e.g. CAD/CAM
    • G05B19/4099Surface or curve machining, making 3D objects, e.g. desktop manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30Process control
    • B22F10/32Process control of the atmosphere, e.g. composition or pressure in a building chamber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/38Housings, e.g. machine housings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/40Radiation means
    • B22F12/41Radiation means characterised by the type, e.g. laser or electron beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/40Radiation means
    • B22F12/49Scanners
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/70Gas flow means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/90Means for process control, e.g. cameras or sensors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00Aspects linked to processes or compositions used in powder metallurgy
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/37Measurements
    • G05B2219/37067Calibrate work surface, reference markings on object, work surface
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/37Measurements
    • G05B2219/37129Mark, engrave workpiece at specific surface point for measurement, calibration
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Definitions

  • the invention relates to a device and a method for calibrating an irradiation system, wherein the irradiation system is used for producing a three-dimensional workpiece and is included in the device.
  • an initially informal or shape-neutral molding compound for example a raw material powder
  • the irradiation can be effected by means of electromagnetic radiation, for example in the form of laser radiation.
  • the molding compound can initially be present as granules, as a powder or as a liquid molding compound and, as a result of the irradiation, be selectively or, in other words, be solidified in a site-specific manner.
  • the molding compound may comprise, for example, ceramic, metal or plastic materials and also mixtures of materials thereof.
  • a variant of generative layer construction method relates to the so-called powder bed melting, in particular metallic and / or ceramic raw material powder materials are solidified into three-dimensional workpieces.
  • raw material powder material applied in the form of a raw material powder layer on a support and to irradiate selectively and in accordance with the geometry of the currently produced workpiece layer.
  • the laser radiation penetrates into the raw material powder material and solidifies it, for example as a result of heating, which causes melting or sintering. If a workpiece layer is solidified, a new layer of unprocessed raw material powder material is applied to the already produced workpiece layer.
  • known coater arrangements or powder applicators can be used. Subsequently, a renewed
  • the device there comprises a process chamber which comprises a plurality of carriers for the workpieces to be produced.
  • a powder applicator includes a powder reservoir holder which can be moved back and forth over the carriers to apply thereon a raw material powder layer to be irradiated.
  • the process chamber is connected to a protective gas circuit, which comprises a supply line, via which a protective gas can be introduced into the process chamber in order to set a protective gas atmosphere therein.
  • the irradiation system comprises a beam source, in particular a laser source, and an optical unit.
  • the optical unit to which a processing beam emitted by the beam source is made available, comprises a beam expansion unit and a deflection device in the form of a scanner unit.
  • diffractive optical elements are provided in front of a deflecting mirror, wherein the diffractive optical elements are movable into the beam path to divide the processing beam into a plurality of processing sub-beams.
  • the deflecting mirror then serves to deflect the machining part beams.
  • burn-off foils are often used on a support.
  • the raw material to be irradiated powder layers are applied during normal operation of the device.
  • the burn-off sheet is irradiated in accordance with a predetermined pattern, so that a burn-off image of the irradiation pattern is formed on the sheet.
  • the burn-off image is digitized and compared with a digital reference image of the irradiation pattern.
  • the irradiation unit is calibrated to compensate for deviations between the actual burn-off image and the reference image.
  • a burn-off foil is also used to calibrate the webs of a plurality of processing jets, particularly laser beams provided in overlapping zones between adjacent irradiation areas. Such irradiation surfaces and overlapping zones formed therebetween often occur in connection with an irradiation system having a plurality of irradiation units and are described, for example, in EP 2 875 897 B1 or EP 2 862 651 A1.
  • the thickness of a burn-up path introduced into the burn-off foil which is generated when the foil is irradiated, could also be used as an indicator to measure a defocusing of the processing beam.
  • the accuracy and reliability of these measurements are typically too low to use for calibrating the focus of the processing beam. Instead, additional caustic measurements are typically performed for this.
  • the invention accordingly relates to a device for producing a workpiece in layers.
  • the device can be designed to produce the three-dimensional workpiece in the manner of a selective laser sintering.
  • the device comprises a construction space in which the workpiece can be produced by layer-wise selective solidification of raw material powder layers.
  • the installation space can be a three-dimensional virtual space in which raw material powder layers can be arranged in a generally known manner and selectively or, in other words, be solidified in a site-specific manner.
  • the space can be cylindrical and / or rectangular and generally polygonal.
  • the installation space can define a maximum available space in the device in which a workpiece can be produced or, in other words, a workpiece can occupy within the device after production has taken place.
  • this block could, for example, completely fill the space.
  • the installation space can comprise a construction area, which in particular can form a base area of the construction space.
  • the construction area may be defined by a support of the device on which the raw material powder layers can be applied by known powder application devices.
  • the construction area can define a maximum available area on which a workpiece can be produced, and in particular define a maximum producible workpiece outline.
  • the construction area may be opposite to a radiation system explained below.
  • the optional carrier of the device may be provided in a process chamber of the device.
  • This may be a generally fixed carrier or a displaceable carrier, which is displaceable in particular in the vertical direction.
  • the carrier is lowered with increasing number of the produced workpiece layers and preferably in dependence of this number in the vertical direction.
  • the process chamber may be sealable against the ambient atmosphere to provide a controlled atmosphere therein adjust, in particular an inert atmosphere.
  • the raw material powder layer may comprise all of the above-explained raw material powder materials and in particular a powder of a metallic alloy.
  • the powder may have any suitable particle size or particle size distribution. A particle size of the powder of ⁇ 100 ⁇ m is preferred.
  • the application of the raw material powder layer on the support and / or on a raw material powder layer arranged thereon and already irradiated can be carried out via known coater units or powder application apparatus.
  • An example of this can be found in EP 2 818 305 AI.
  • the apparatus further comprises a coating system which is adapted to selectively solidify the raw material powder layers in the construction space by emitting at least one processing beam.
  • the irradiation system can be designed to emit (or to emit) an electromagnetic processing beam, for example in the form of a laser beam.
  • it may comprise suitable processing optics (or generally suitable optical units) and / or beam sources or be connectable to such units.
  • the processing optics can guide the processing beam and / or interact with it in the desired manner.
  • they can comprise objective lenses, in particular an f-theta lens.
  • the irradiation system may further comprise at least one deflection device for directing the emitted processing beam to predetermined regions within the construction space and thus to predetermined regions of the raw material powder layer to be irradiated.
  • the deflection device may comprise at least one so-called scanner unit, which are preferably adjustable by at least two axes.
  • the irradiation system can also comprise a plurality of irradiation units, to each of which predetermined irradiation areas within the installation space can be assigned.
  • These irradiation units can each comprise their own beam sources, processing optics and / or deflection apparatus in a known manner. Alternatively, for example, they can be connected to a common beam source whose emitted processing beam is split and made available to the individual irradiation units.
  • the device further comprises at least one calibration structure. This may be a structure which is set up to interact in a predetermined manner with the irradiation beam of the irradiation system in such a way that this change can be detected by a subsequently explained sensor arrangement. The interaction may in particular include reflections and / or absorption of the processing beam.
  • the device further comprises a sensor arrangement, which is set up to detect an irradiation of the calibration structure by the irradiation system.
  • the sensor arrangement may comprise at least one optical detection unit, for example a camera or an image sensor.
  • a photosensor, a photochip, a photodiode, a CCD sensor, and a CMOS sensor are also mentioned.
  • the sensor arrangement forms part of a known melt pool monitoring system which is used during workpiece production. In other words, during the performance of a calibration operation, the weld pool monitoring system may be used, at least temporarily, to instead detect the exposure of the calibration structure.
  • the above-explained interactions between the processing beam and the calibration structure can be detected by the sensor arrangement.
  • This may relate to the detection of the back reflections of the processing beam (and in particular a time course thereof), when it is directed to the calibration structure and / or sweeps it over.
  • the sensor arrangement can therefore be designed to detect the irradiation of the calibration structure indirectly, as it were, by detecting a back reflection of the radiation emitted by the irradiation system.
  • a detection range of the sensor arrangement can be directed to the calibration structure and / or the installation space or can be selectively directed thereto.
  • the sensor arrangement of a possible construction surface of the space opposite.
  • the sensor arrangement can generally be set up to detect radiation reflected from the surroundings and, in particular, radiation reflected by the calibration structure and to generate signals based thereon. These can be further processed by a control unit of the device.
  • the sensor arrangement can thus generally be configured to detect an intensity of the irradiation in the wavelength range of the processing beam emitted by the irradiation system.
  • a detection range of the sensor assembly may further generally be so be chosen such that it covers at least one irradiable portion of the calibration structure.
  • the sensor arrangement can thus be designed to detect the reflection and / or absorption behavior in the region of the calibration structure. Additionally or alternatively, a distance measurement can be made.
  • the calibration structure can be detectable as an area in which the distance measurement values deviate at least locally from the surroundings, that is, for example, locally increased or reduced.
  • the sensor arrangement can detect any sensor by means of which a surface condition of the calibration structure can be detected, and in particular an interaction of this surface condition with the irradiation by the irradiation system.
  • the detection signals of the sensor arrangement can form detection information of the sensor arrangement in an immediately detected and / or in a further processed state. These can be provided to control devices of the device, in particular for the purpose of calibrating the irradiation system.
  • the apparatus further comprises a control unit which is set up to calibrate the irradiation system based on detection information of the sensor arrangement. Calibrating may include balancing the actually acquired detection information with theoretically expected detection information or, in other words, a target-actual comparison between the detection information. If a deviation is detected in this case, in particular if this deviation exceeds a predetermined tolerance value, it can be concluded that the irradiation of the calibration structure did not take place in the desired manner.
  • the control unit may be configured to deduce from the detection information an unwanted relative set between the irradiation positions, for example, predetermined at a predetermined time on the calibration structure and the actual irradiation positions indicated by the detection information.
  • the determined target / actual deviation can be used to continuously supplement the irradiation system and / or to suitably adapt it in advance to calculating setpoint values for the irradiation system (for example by incorporating suitable correction factors).
  • the detection information may include a time course of the detected radiation and, in particular, make it possible to draw conclusions about a time of a predetermined characteristic change of the detection signals. This change may include a signal hop.
  • a desired course but in particular a desired change of the detection signals at a certain point in time, can be determined in advance.
  • the actual detection information makes it possible to draw conclusions about the actual course and, in particular, an actual change of the detection signals. Based on this, the control unit can then carry out the above-described desired-actual comparison for calibrating the irradiation system.
  • the device is further distinguished by the fact that the calibration structure is arranged outside the installation space.
  • an arrangement of the calibration structure next to the installation space may be mentioned. Accordingly, it can be provided that the calibration structure does not interact directly with the workpiece during the manufacturing process of a workpiece, that is, for example, that it can not be brought into direct contact with it.
  • the calibration structure can enable parallel production of workpieces without having to remove them from the device.
  • the calibration structure may also be generally immobile and / or substantially permanently disposed within the device.
  • the calibration structure may be configured to remain in an unchanged position within the device via a manufacturing process of at least ten workpieces.
  • the inventors have recognized that the calibration solutions known hitherto, and in particular the use of additional calibration plates, require complex manual interventions which mean a long-term interruption of actual workpiece production and which are susceptible to errors.
  • the provision of a calibration structure outside the installation space may allow the calibration structure to be fixed and, in particular, permanently disposable within the device and only selectively irradiated for performing a calibration process.
  • the calibration structure may be sufficient to measure and / or correct the calibration structure prior to delivery of the device or at regular intervals as to its actual position within the device so that it forms a reliable reference within the device. Subsequently, no further manual intervention for calibration may be required.
  • the calibration structure instead, it can remain within the device independent of workpiece production and can only be selectively irradiated. This even makes it possible to perform calibration operations during the manufacturing process of the same workpiece, for example after a predetermined number of workpiece layers have been produced.
  • the calibration structure can be arranged within a process chamber of the device.
  • the process chamber can accommodate the space in a known manner, as well as any powder application device of the device.
  • the protective gas or inert gas atmosphere explained above can be adjustable in the process chamber.
  • the irradiation system and / or the sensor arrangement can furthermore be arranged in a ceiling region of the process chamber or parallel thereto.
  • any construction area may be arranged in or close to a floor of the process chamber and opposite the ceiling area.
  • the arrangement of the calibration structure within the process chamber can in particular be such that the calibration structure extends at least in sections between an inner wall region of the process chamber and the construction space.
  • the inner wall region may comprise a side wall of the process chamber and / or be generally facing the construction space.
  • irradiation of the calibration structure has to be carried out only in a small proximity to the installation space.
  • the irradiation system thus does not have to be formed with a significantly increased deflection spectrum and the construction of the device can be compact overall.
  • the installation space comprises a construction surface, wherein the calibration structure extends along at least one side of the construction surface.
  • the construction area may be designed in accordance with one of the variants explained above and formed, for example, by a surface of a support of the device facing the irradiation system.
  • the construction area is preferably rectangular or circular.
  • the calibration structure may extend parallel to the at least one side of the construction surface, wherein this side may be substantially rectilinear or curved.
  • the calibration structure may further be substantially elongated and may, for example, have a length of more than 5 cm, more than 10 cm or more than 20 cm, which length may be measured in particular along a corresponding side of the construction area.
  • the building area only has to be left slightly by the irradiation system in order to carry out a calibration process.
  • the structure of the device can be compact and the required deflection spectrum of the irradiation system can be kept low.
  • the quality of the calibration can be improved, since the calibration in the immediate vicinity of the actual work area of the irradiation system can be executed and thus the detection signals can have a high significance for the actual processing.
  • the calibration structure may comprise at least two calibration sections which extend along different sides of the construction surface, in particular wherein the different sides of the construction surface extend at an angle to one another.
  • the sides may be opposite sides of the building surface, for example opposite outer peripheral or contour sections. In particular, however, these may be opposite or merging sides (for example running over the corner) of a substantially rectangular building surface.
  • the calibration sections of the calibration structure can, for example, merge into one another and / or be arranged at an angle of approximately 90 ° to one another.
  • Both Kalibrierabitese may also be generally elongated and / or have a length of more than 5 cm, more than 10 cm or more than 20 cm.
  • a calibration of the irradiation system can take place along at least two predetermined axes, wherein these axes may, for example, coincide with the two calibration sections of the calibration structure or run parallel thereto.
  • the device further comprises a bottom region which surrounds the construction surface at least in sections, and wherein the calibration structure is arranged in or parallel to the bottom region.
  • the bottom region may include or be formed by a process chamber bottom.
  • the floor area may define a virtual three-dimensional space including the process chamber floor, wherein the floor area is preferably flat (i.e., has a small extent perpendicular to the process chamber floor).
  • the process chamber floor may be a common floor area of a process chamber, which is an integral part of a process chamber
  • the floor area may completely surround the construction area and / or be arranged generally parallel thereto.
  • the construction area can then by the above-described Lowering any carrier of the device are lowered within or relative to the bottom portion so that it moves away from a surface of the bottom portion.
  • the floor area can form a frame structure for the construction area and, optionally, the irradiation system
  • Arranging the calibration structure in the floor area can generally be understood as arranging on or within the floor area.
  • the calibration structure can therefore be embedded and / or formed within the floor area. Likewise, it may be included on one of the floor area
  • the calibration structure can also be arranged at least partially in or parallel to a side wall region of the process chamber.
  • the sidewall region may in turn be defined as a flat virtual space that is three-dimensional and includes a sidewall of the process chamber.
  • the sidewall region may extend at an angle to the bottom region, for example, substantially orthogonal thereto. In this way, a targeted spacing of the calibration structure from the bottom area can be achieved, but the calibration structure can still be positioned in a suitable manner relative to the sensor arrangement and the irradiation system.
  • the distance to the bottom area means that heavy contamination of the calibration structure by the powder material in the space is less likely, which in turn can have an advantageous effect on the calibration quality.
  • the calibration structure comprises, at least in sections, a material whose absorption behavior with respect to the irradiation of the irradiation system differs from the absorption behavior in the vicinity of the calibration structure.
  • the absorption behavior in the area of the calibration structure can be locally increased or locally reduced, so that stronger or weaker reflections of the radiation emitted by the irradiation system occur. This can in turn be detected by the sensor arrangement.
  • the absorption behavior can relate to light and / or electromagnetic radiation in the wavelength range of the radiation emitted by the irradiation system.
  • the material has an increased absorption behavior relative to the environment, so that a back reflection of the
  • Irradiation in the area of the calibration structure is smaller than in the area of its immediate vicinity.
  • the environment may be provided by the above-described bottom region of the device and have no such material.
  • the material may be formed as a coating, which is applied at least in sections to the calibration structure.
  • the calibration structure may include or form a suitable surface structure that is detectable by the sensor assembly as being different from the environment.
  • the calibration structure comprises at least one increase, wherein the irradiation system is set up to carry out an irradiation of the calibration structure in the region of the increase as part of a calibration process.
  • the increase may be a raised portion compared to the vicinity of the calibration structure, for example a local projection.
  • the calibration structure may further comprise at least one recess, wherein the irradiation system is adapted to carry out in the context of a calibration process, an irradiation of the calibration structure in the region of the recess.
  • the calibration structure When arranged in the bottom region of the device, the calibration structure may be formed as a depression in this bottom region.
  • the recess may generally comprise a recess, an opening, a groove or a hole, which are made, for example, by machining.
  • Reflection behavior of the radiation emitted by the radiation system result. This can in turn be detected by the sensor arrangement.
  • the material for influencing the absorption behavior is arranged near or in a transition region between the depression and / or elevation and the surroundings of the calibration structure.
  • the depression and / or elevation may further comprise at least one edge, preferably at an upper edge and / or in a transition region to the surroundings of the calibration structure.
  • the edge may be comprised of or form a region of a sharp-edged region of the depression and / or elevation. It may be the transition between the environment and the depression and / or increase, which is sharp-edged or only slightly rounded.
  • the edge may be bounded by a surface of the environment, for example in the form of a bottom area surface, and by an inner wall of the recess and / or outer wall of the elevation angled away from this surface.
  • This inner or outer wall may extend substantially orthogonal to said surface.
  • the depression and / or elevation may thus generally be configured in a substantially step-shaped manner.
  • the depression and / or elevation comprises a main section which extends substantially along the construction surface, and the depression and / or elevation further comprises at least one secondary section which extends at an angle to the main section.
  • the main portion may extend along one side of the building surface in the manner described above, for example along one side of a rectangular building surface.
  • the main section can also have an angled course, that is, for example, extend along a corner region of the construction area and at least partially surround it.
  • the main portion may be generally elongated and, for example, have a length of more than 5 cm, more than 10 cm or more than 20 cm.
  • the secondary section may have a shorter length compared to the main section, for example a length of less than 10 cm or less than 5 cm.
  • the minor portion may extend along an axis which is at an angle to a longitudinal axis of the main portion, for example at an angle of more than 45 ° and in particular substantially orthogonal to the longitudinal axis.
  • the minor portion and the major portion may thus substantially define a cross shape.
  • a first main irradiation axis along which irradiation is performed may extend parallel to the main portion.
  • a second skin irradiation axis which extends at an angle to the first skin irradiation axis and preferably orthogonal thereto, may extend parallel to the subsections.
  • a calibration along the second main irradiation axis can thus be carried out along various positions of the first main irradiation axis by traversing a corresponding secondary section. As a result, the overall robustness and validity of the calibration can be increased.
  • a plurality of secondary sections are provided, which are preferably arranged at regular intervals along the main section.
  • more than two, more than four, more than six or more than eight side sections may be provided along the main section, spaced for example by about 2 to about 10 cm from one another along a longitudinal axis of the main section.
  • a development provides that the sensor arrangement is designed to detect the entry and / or exit of the processing beam into or out of the depression and / or wherein the sensor arrangement is designed to detect the reaching and / or leaving the elevation , This can be ascertained via the above-described changing of the reflection behavior of the irradiation during a sweep of the depression or the increase.
  • the sensor arrangement can be set up to detect an at least temporary reduction and / or an at least temporary increase in the reflected radiation, if it is directed to the region of the depression or elevation as part of a calibration process, and preferably also carries out a predetermined movement within this region , Reducing the reflected radiation (and / or detecting an increased distance value) may indicate entry into the well, whereas increasing the reflected radiation (and / or detecting a smaller distance) may indicate leakage from the well. In the same sense, increasing the reflected radiation (and / or detecting a smaller distance value) may indicate achievement of the increase, whereas decreasing the reflected radiation (and / or detecting an increased distance value) may be indicative of leaving the elevation.
  • the irradiation system can also be designed to emit a processing beam having a non-solidification-effective power, at least during a calibration process.
  • the power and / or intensity of the processing beam during the calibration process may be reduced from a power used to produce a workpiece from the raw material powder layers.
  • the power of the machining beam during the calibration process can not be more than 10%, not more than 5% or not more than 1% of the solidification effective power.
  • the detection range of the sensor arrangement can be adapted specifically to this power spectrum and / or the associated intensity spectrum of any back reflections from the calibration structure, so that a risk of error detection during the calibration process is reduced.
  • beam traps or beam splitters can be selectively arranged in the beam path of the processing beam. These can include, for example, gray filters to the
  • the invention further relates to a method for calibrating an irradiation system of a device for producing a three-dimensional workpiece in layers, wherein the device in particular according to one of the preceding
  • Irradiating a calibration structure outside a construction space wherein the irradiation is effected by means of an irradiation system and the workpiece can be produced in the construction space by selective solidification of raw material powder layers;
  • the method further includes any further steps and features to provide all of the above or below mentioned effects and interactions.
  • the method may include a step of arranging the calibration structure relative to a building surface according to any one of the preceding or US Pat include the following variants.
  • the method may comprise irradiating the calibration structure by guiding a processing beam of the irradiation system along a predetermined path.
  • the method may comprise steps for evaluating the acquired acquisition information, wherein the evaluation may comprise any of the variants discussed above or below for determining predetermined changes.
  • the step of detecting the irradiation of the calibration structure may include a step of detecting back reflections generated thereby, and more particularly detecting a time course thereof.
  • the evaluation can then refer to the determination of predetermined changes in this time course, for example, to determine the achievement and / or leaving the calibration.
  • the step of calibrating may include performing a target-is-comparison as discussed above.
  • Figure 1 is a view of a device according to the invention, which carries out a method according to the invention
  • FIG. 2 shows a perspective view of a process chamber of the device from FIG. 1;
  • 3a, 3b schematic representations of the detection process and the time course of the detection signals in the apparatus of Figure 1.
  • FIG. 1 shows a device 10 which is designed to carry out a method according to the invention for the generative production of three-dimensional workpieces from a metallic powder bed. More specifically, the method relates to a so-called selective laser melting (SLM) manufacturing process.
  • the device 10 comprises a process chamber 12.
  • the process chamber 12 is sealable against the ambient atmosphere, so that an inert gas atmosphere can be set therein.
  • a powder application device 14, which is arranged in the process chamber 12, deposits raw material powder layers on a carrier 16.
  • the carrier 16 is adapted to in a vertical direction to be relocated.
  • the carrier 16 can be lowered in the vertical direction.
  • the device 10 further comprises an irradiation system 20 for selectively and location-specifically directing a plurality of laser beams 24a, b onto the raw material powder layers on the carrier 16. More specifically, the raw material powder material can be exposed by means of the irradiation system 20 in accordance with a geometry of a workpiece layer to be produced laser radiation and thus locally melted and solidified. The irradiation of the raw material powder layers by the irradiation system 20 is controlled by a control unit 26.
  • the irradiation system comprises two irradiation units 22a, b, which together can irradiate the raw material powder material.
  • the irradiation system comprises two irradiation units 22a, b, which together can irradiate the raw material powder material.
  • Each of the irradiation units 22a, b shown is coupled to a common laser beam source.
  • the laser beam emitted by this laser beam source may be split and / or deflected by suitable means, such as beam splitters and / or mirrors, to guide the laser beam to the individual irradiation units 22a, b.
  • suitable means such as beam splitters and / or mirrors
  • a suitable laser beam source may be provided in the form of a diode-pumped ytterbium fiber laser having a wavelength of about 1070 to 1080 nm.
  • Each of the irradiation units 22a, b further includes a processing beam optics to interact with the provided laser beam.
  • the processing optics each comprise a deflection device in the form of a scanner unit, which can flexibly position the focal point of the laser beam 24a, b respectively emitted in the direction of the carrier 16 within an irradiation plane extending parallel to the carrier 16.
  • the surface of the carrier 16 facing the irradiation system 20 forms a construction surface 28, which has a maximum possible base area or, in other words, defines a maximum producible cross-sectional area of the workpiece.
  • the construction area 28 is generally rectangular.
  • a position of the construction surface 28 within the process chamber 12 is further variable in accordance with a lowering of the carrier 16.
  • the construction surface 28 further forms the base of a three-dimensional virtual construction space 30 of the device 10, in which the workpiece can be produced. Due to the described movement of the construction surface 28 of the space 30 is generally cylindrical with a correspondingly rectangular base. An extension of the installation space 30 is also indicated by dashed lines in FIGS. 1 and 2.
  • a sensor arrangement 25 is schematically indicated in FIG. 1, which can detect back reflections of the laser beams 24a, b from the building surface 28 and the surroundings.
  • the sensor arrangement 25 is likewise connected to the control unit 26 of the device 10. It should be noted that the illustrated positioning of the sensor assembly 25 is merely exemplary. In particular, if the sensor arrangement 25 is designed as a component of an existing melt pool monitoring system, it can rather be integrated into the beam path of the irradiation system 20 or at least interact directly with it. Hierdruch a so-called "in-line" measurement of the back-reflected radiation can be made.
  • the process chamber 12 is shown in perspective, wherein the powder applicator 14 is omitted. It recognizes again the carrier 16, which forms the building surface 28.
  • the space 30 is in turn defined as a cylinder with a rectangular base.
  • the irradiation system 20 is indicated in FIG. 2 as a purely schematic rectangle and is generally designed to selectively irradiate the raw material powder material layer within the building surface 28.
  • FIG. 2 additionally shows gas outlet 32, which forms a known component of a process gas cycle (not shown) of device 10, in order to set a protective gas atmosphere within process chamber 12.
  • the process chamber 12 comprises a bottom region 34. This is generally planar and extends parallel to the building surface 28.
  • the floor area 34 is formed by a conventional bottom plate of the device 10, which is connected to a machine frame, not shown, and which is generally opposite the irradiation system 20.
  • a surface of the bottom portion 34 is further aligned with the build surface 28.
  • the bottom portion 34 as a whole forms a frame structure around the build surface 28.
  • a calibration structure 36 comprising two calibration sections 37. These are formed as depressions within the bottom region 34 and, more precisely, as elongated recesses produced by machining. This is illustrated by the enlarged partial view B in FIG. 2, which shows an end section of one of the calibration sections 37. It is also conceivable to provide a calibration structure 36 with only one such calibration section 37.
  • the calibration sections 37 each comprise a main section 38 which extends along a longitudinal axis LI, L2.
  • the calibration sections 37 or, in other words, their main sections 38 are furthermore arranged essentially orthogonal to one another.
  • the main sections 38 extend along and parallel to different lateral areas of the rectangular building surface 28. This relates to a first side 40 and a second side 42 of the rectangular building surface 28, which are orthogonal to one another.
  • FIG. 2 also shows that these are arranged between an inner side wall region of the process chamber 12 and the construction surface 28 facing the construction surface 28 they only have a small distance of a few centimeters to the building surface 28.
  • FIG. 2 also shows that each of the calibration sections 37 comprises a plurality of secondary sections 44 which are distributed at regular intervals along the main sections 38.
  • each calibration section 37 comprises more than six such secondary sections 44.
  • the secondary sections 44 are likewise formed in the form of recesses and extend orthogonally to the main section 38, the secondary sections 44 being divided centrally by the respective longitudinal axes LI, L2 of the main sections.
  • the secondary sections 44 thus form recessed sections extending transversely to the main sections 38, so that the calibration sections 37 are each composed of individual cross-shaped recessed areas along their respective longitudinal axes L1, L2.
  • the control unit 26 causes the irradiation system 20 to direct a machining beam in the form of one of the laser beams 24a, b of FIG. 1 in accordance with a predetermined movement path to at least one of the calibration sections 37.
  • the machining beam provided during calibration with a deliberately reduced and non-solidifying power may first be directed to a surface of the bottom portion 34 surrounding the calibration structure 36 and then moved toward one of the calibration portions 37.
  • the sensor arrangement 25 can detect in parallel the back reflections of the radiation from the bottom area 34 and / or the calibration structure 36.
  • the intensity of the back reflections detected by the sensor arrangement changes.
  • this is further supported by the fact that the side and bottom walls of the calibrating sections 37 are each coated with a material which at least partially absorbs the laser radiation.
  • the absorption of the laser radiation by this material is also stronger than the absorption which occurs at the surface of the bottom region 34 surrounding the calibrating sections 37.
  • FIGS. 3a, b A time profile of the signals detected by the sensor arrangement 25 is shown in FIGS. 3a, b.
  • FIG. 3 a shows a situation in which a laser beam 24 a, b emitted by the irradiation system 20 first enters one of the secondary sections 44 of one of the calibration sections 37.
  • a movement path P at which this occurs is also indicated in FIG.
  • the calibration sections 37 form stepped depressions within the bottom region 34 and thus comprise sharp-edged transitions in the form of edges 45.
  • FIG. 3b shows a time profile of a sensor signal of the sensor arrangement 25 during this process, wherein the sensor signal is shown by way of example as a sensor voltage V.
  • the sensor signal is shown by way of example as a sensor voltage V.
  • the laser beam 24a, b is moved along the flat surface of the bottom portion 34, so that its Back reflection does not change.
  • the sensor signal of the sensor arrangement 25 is therefore essentially constant in the time period t0 to t1.
  • the laser beam 24 a, b enters the secondary section 44 forming a depression, so that its retro-reflective behavior changes abruptly and decreases abruptly in the example shown. This is also reflected in a change in the sensor signal at this time.
  • a reversed change in the sensor signal occurs when the laser beam 24a, b at the time t2 again exits the secondary section 44.
  • the sensor signal is substantially constant, albeit at different voltage levels.
  • control unit 26 derives from the sensor signal of the sensor arrangement 25 the entry time t 1 as well as the exit time t 2 from a swept area (here: secondary section 44)
  • Calibration structure 36 can determine. Likewise, the parameters of the irradiation system 20 can be determined at this time, for example a current deflection position of the processing beam at the respective times. Since the position and extent of the calibration structure 36 and in particular of their individual calibration sections 37 within the device 10 are known and generally invariable, it can thus be checked whether the determined times t1, t2 are expected target points in time for certain predetermined irradiation parameters
  • control unit 26 can then perform a desired-actual comparison between the predetermined and the actually determined irradiation behavior and calibrate the irradiation system 20 based thereon in order to compensate for an optionally determined desired-actual deviation.
  • Such a deviation which indicates, for example, too early or too late entry into or out of the calibration sections 37, may indicate that a deflection of the processing beam does not take place in the desired manner and / or that a disregarded relative set between the irradiation system 20 and the calibration structure 36 is present.
  • Such a Relatiwersatz then also relates to a Relatiwersatz between the irradiation system 20th and the build surface 28, since the relative position of the build surface 28 and the calibration structure 36 can be presumed to be known and constant with sufficient accuracy. This offset can be achieved by calibrating the
  • Irradiation system 20 are compensated, for example, by an adjusted readjustment of the deflection of the processing beam and / or by the precalculation of appropriately adjusted control signals for the irradiation system 20th
  • the irradiation system 20 can thus be reliably calibrated relative to the build surface 28.
  • the plurality of secondary sections 44 thereby enables calibration in a plurality of predetermined positions along the corresponding sides of the building surface 28.

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EP18704537.2A 2017-02-21 2018-02-09 Vorrichtung und verfahren zum kalibrieren eines bestrahlungssystems, das zum herstellen eines dreidimensionalen werkstücks verwendet wird Pending EP3585540A1 (de)

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DE102017202725.8A DE102017202725B3 (de) 2017-02-21 2017-02-21 Vorrichtung und Verfahren zum Kalibrieren eines Bestrahlungssystems, das zum Herstellen eines dreidimensionalen Werkstücks verwendet wird
PCT/EP2018/053264 WO2018153687A1 (de) 2017-02-21 2018-02-09 Vorrichtung und verfahren zum kalibrieren eines bestrahlungssystems, das zum herstellen eines dreidimensionalen werkstücks verwendet wird

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Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2019116455A1 (ja) * 2017-12-12 2020-12-24 株式会社ニコン 造形システム及び造形方法
EP3524411B1 (en) * 2018-02-09 2023-05-03 Concept Laser GmbH Method for calibrating at least one apparatus for additively manufacturing three-dimensional objects
EP3613561B1 (en) * 2018-08-22 2023-07-26 Concept Laser GmbH Apparatus for additively manufacturing three-dimensional objects
EP3650204B1 (en) * 2018-11-06 2023-03-29 Concept Laser GmbH Apparatus for additively manufacturing three-dimensional objects
DE102018219301A1 (de) * 2018-11-12 2020-05-14 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum Erfassen eines Arbeitsbereichs einer generativen Fertigungsvorrichtung sowie Fertigungsvorrichtung zum generativen Fertigen von Bauteilen aus einem Pulvermaterial
DE102018128279A1 (de) 2018-11-12 2020-05-14 Aconity Gmbh Verbessertes Kalibrierverfahren für eine Anlage zum pulverbettbasierten Generieren von dreidimensionalen Bauteilen mittels elektromagnetischer Strahlung
EP3650206A1 (en) * 2018-11-12 2020-05-13 Raylase GmbH Automatic calibration of a laser processing system using an integrated telecentric optical detector with limited degrees of freedom
US11679551B2 (en) 2019-02-28 2023-06-20 General Electric Company Compensating laser alignment for irregularities in an additive manufacturing machine powderbed
US11980965B2 (en) 2019-04-23 2024-05-14 General Electric Company Systems and methods for multi-laser head alignment in additive manufacturing systems
EP3736110A1 (en) * 2019-05-09 2020-11-11 LayerWise NV System for aligning laser system to a carrier plate
JP7130596B2 (ja) * 2019-05-21 2022-09-05 株式会社荏原製作所 造形物を製造するためのam装置およびam装置におけるビームの照射位置を試験する方法
DE102019127952A1 (de) * 2019-10-16 2021-04-22 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum Betreiben einer Einrichtung zur additiven Herstellung eines dreidimensionalen Objekts sowie Verfahren zum Erstellen eines Prozessfensters zur Durchführung des vorgenannten Verfahrens
US20210283716A1 (en) * 2020-03-12 2021-09-16 Concept Laser Gmbh Cross stitching control by qmm3d
GB202010315D0 (en) 2020-07-06 2020-08-19 Renishaw Plc Improvements in or relating to an optical scanner for directing electromagnetic radiation to different locations within a sacn field
US20220072649A1 (en) * 2020-09-08 2022-03-10 Arcam Ab Devices, systems, and methods for encoding and decoding data in an additive manufacturing build chamber
JP7041238B1 (ja) 2020-12-07 2022-03-23 株式会社ソディック 積層造形装置の較正方法及び積層造形装置
CN114347468A (zh) * 2022-01-10 2022-04-15 深圳锐沣科技有限公司 一种光固化3d打印设备和工艺方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6018291A (ja) * 1983-07-13 1985-01-30 Aisin Seiki Co Ltd レ−ザ−加工方法
US6073056A (en) * 1997-04-08 2000-06-06 Larry J. Winget Method and system for building a data model of a physical part in a data format useful for and reproduction of the part
US7068825B2 (en) * 1999-03-08 2006-06-27 Orametrix, Inc. Scanning system and calibration method for capturing precise three-dimensional information of objects
DE19918613A1 (de) 1999-04-23 2000-11-30 Eos Electro Optical Syst Verfahren zur Kalibrierung einer Vorrichtung zum Herstellen eines dreidimensionalen Objektes, Kalibrierungsvorrichtung und Verfahren und Vorrichtung zur Herstellung eines dreidimensionalen Objektes
DE102004041633A1 (de) 2004-08-27 2006-03-02 Fockele, Matthias, Dr. Vorrichtung zur Herstellung von Formkörpern
JP4258567B1 (ja) * 2007-10-26 2009-04-30 パナソニック電工株式会社 三次元形状造形物の製造方法
DE102009016585A1 (de) * 2009-04-06 2010-10-07 Eos Gmbh Electro Optical Systems Verfahren und Vorrichtung zum Kalibrieren einer Bestrahlungsvorrichtung
ES2514520T3 (es) 2009-12-04 2014-10-28 Slm Solutions Gmbh Unidad de irradiación óptica para una planta para la producción de piezas de trabajo mediante la irradiación de capas de polvo con radiación de láser
US8570535B2 (en) * 2010-03-03 2013-10-29 Micronic Mydata AB Pattern generators, calibration systems and methods for patterning workpieces
CN202770993U (zh) * 2012-08-03 2013-03-06 李忠孝 一种高精度三维移动定位装置
DE102013208651A1 (de) * 2013-05-10 2014-11-13 Eos Gmbh Electro Optical Systems Verfahren zum automatischen Kalibrieren einer Vorrichtung zum generativen Herstellen eines dreidimensionalen Objekts
KR20140143478A (ko) * 2013-05-30 2014-12-17 주식회사 이오테크닉스 레이저 가공 장치, 레이저 가공의 실시간 검사 시스템 및 방법
EP2818305B1 (en) 2013-06-25 2016-03-23 SLM Solutions GmbH Powder application apparatus and method of operating a powder application apparatus
GB201317974D0 (en) * 2013-09-19 2013-11-27 Materialise Nv System and method for calibrating a laser scanning system
GB201316815D0 (en) * 2013-09-23 2013-11-06 Renishaw Plc Additive manufacturing apparatus and method
EP2862651B1 (en) 2013-10-15 2019-07-17 SLM Solutions Group AG Method and apparatus for producing a large three-dimensional work piece
EP2875897B1 (en) 2013-11-21 2016-01-20 SLM Solutions Group AG Method of and device for controlling an irradiation system for producing a three-dimensional workpiece
BE1024052B1 (nl) * 2013-12-03 2017-11-08 Layerwise N.V. Werkwijze en inrichting voor het kalibreren van meerdere energiestralen voor het additief vervaardigen van een object
JP2015157420A (ja) * 2014-02-25 2015-09-03 日本電子株式会社 三次元積層造形装置
WO2016085334A2 (en) * 2014-11-24 2016-06-02 Additive Industries B.V. Apparatus for producing an object by means of additive manufacturing
DE102015001421B4 (de) * 2015-02-06 2016-09-15 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Vorrichtung und Verfahren zur Strahldiagnose an Laserbearbeitungs-Optiken (PRl-2015-001)
DE102015103389A1 (de) * 2015-03-09 2016-09-15 Schultheiss Gmbh Verfahren und Vorrichtung zur Korrektur einer inhomogenen Intensitätsverteilung eines von einer Strahlungsquelle erzeugten Strahlungsfeldes
DE102015226722A1 (de) 2015-12-23 2017-06-29 Eos Gmbh Electro Optical Systems Vorrichtung und Verfahren zum Kalibrieren einer Vorrichtung zum generativen Herstellen eines dreidimensionalen Objekts
CN205669990U (zh) * 2016-04-20 2016-11-02 翟赛 一种道路桥梁施工测量装置

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