EP3540393A3 - Spectroscopic apparatus, temperature characteristic derivation apparatus, spectroscopic system, spectroscopy method, and temperature characteristic derivation method - Google Patents

Spectroscopic apparatus, temperature characteristic derivation apparatus, spectroscopic system, spectroscopy method, and temperature characteristic derivation method Download PDF

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Publication number
EP3540393A3
EP3540393A3 EP19159083.5A EP19159083A EP3540393A3 EP 3540393 A3 EP3540393 A3 EP 3540393A3 EP 19159083 A EP19159083 A EP 19159083A EP 3540393 A3 EP3540393 A3 EP 3540393A3
Authority
EP
European Patent Office
Prior art keywords
spectroscopic
temperature characteristic
temperature
characteristic derivation
module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19159083.5A
Other languages
German (de)
French (fr)
Other versions
EP3540393A2 (en
EP3540393B1 (en
Inventor
Nozomu Hirokubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of EP3540393A2 publication Critical patent/EP3540393A2/en
Publication of EP3540393A3 publication Critical patent/EP3540393A3/en
Application granted granted Critical
Publication of EP3540393B1 publication Critical patent/EP3540393B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1226—Interference filters

Abstract

A spectroscopic apparatus includes: a spectroscopic module; a temperature detection unit that detects a temperature of the spectroscopic module; and a module control unit that controls the spectroscopic module, in which the spectroscopic module includes an interference filter that has a pair of reflection films, and a gap changing unit which changes a dimension of a gap between the pair of reflection films by application of a voltage, and a capacity detection circuit that outputs a detection signal in accordance with an electrostatic capacity between the pair of reflection films, and in which the module control unit corrects a target value of the detection signal that is output from the capacity detection circuit, based on a temperature characteristic of the spectroscopic module and a detection temperature that is detected by the temperature detection unit, and controls the voltage that is to be applied to the gap changing unit, in such a manner that the detection signal that is output from the capacity detection circuit is the corrected target value.
EP19159083.5A 2018-02-26 2019-02-25 Spectroscopic apparatus, spectroscopic system and spectroscopic method Active EP3540393B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018032152A JP7043885B2 (en) 2018-02-26 2018-02-26 Spectroscopic device, temperature characteristic derivation device, spectroscopic system, spectroscopic method, and temperature characteristic derivation method

Publications (3)

Publication Number Publication Date
EP3540393A2 EP3540393A2 (en) 2019-09-18
EP3540393A3 true EP3540393A3 (en) 2019-12-18
EP3540393B1 EP3540393B1 (en) 2023-11-08

Family

ID=65576200

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19159083.5A Active EP3540393B1 (en) 2018-02-26 2019-02-25 Spectroscopic apparatus, spectroscopic system and spectroscopic method

Country Status (4)

Country Link
US (1) US10712200B2 (en)
EP (1) EP3540393B1 (en)
JP (1) JP7043885B2 (en)
CN (1) CN110196490B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5987573B2 (en) * 2012-09-12 2016-09-07 セイコーエプソン株式会社 Optical module, electronic device, and driving method
DE102019217262A1 (en) * 2019-11-08 2021-05-12 Robert Bosch Gmbh Sensor device and method for sensing samples
US11530952B2 (en) * 2020-01-17 2022-12-20 Spectrove Inc. MEMS device for interferometric spectroscopy
GB202009964D0 (en) * 2020-06-30 2020-08-12 Ams Int Ag Spectral sensor

Citations (5)

* Cited by examiner, † Cited by third party
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JPH0194312A (en) * 1987-10-06 1989-04-13 Sharp Corp Variable interference device
US6504616B1 (en) * 1999-08-05 2003-01-07 Micron Optics, Inc. Calibrated tunable fiber fabry-perot filters for optical wavelength scanners and optical spectrum analyzers
US20060001881A1 (en) * 2004-06-30 2006-01-05 Maier John S Method and apparatus for peak compensation in an optical filter
US20100292581A1 (en) * 2009-05-13 2010-11-18 Peter Guy Howard Dynamic Calibration of an Optical Spectrometer
US20170146401A1 (en) * 2014-06-27 2017-05-25 Spectral Engines Oy Stabilized spectrometer and a method for stabilizing a spectrometer

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JP4104802B2 (en) 2000-01-26 2008-06-18 富士通株式会社 Gain equalization apparatus, wavelength characteristic variable apparatus and optical amplifier using air gap type etalon
JP2003287689A (en) 2002-03-28 2003-10-10 Ando Electric Co Ltd Automatic temperature compensator for tunable filter and its method
JP2004228368A (en) 2003-01-23 2004-08-12 Matsushita Electric Ind Co Ltd Variable-wavelength light source control circuit and method using direct modulation system
JP4421229B2 (en) 2003-07-11 2010-02-24 株式会社東芝 Fiber Bragg Grating Physical Quantity Measuring Method and Apparatus
JP4615886B2 (en) 2004-04-01 2011-01-19 オリンパス株式会社 Scanning optical microscope
IL201742A0 (en) * 2009-10-25 2010-06-16 Elbit Sys Electro Optics Elop Tunable spectral filter
JP2011197296A (en) 2010-03-18 2011-10-06 Olympus Corp Variable spectrometric element, sepctroscopic unit including the same, and endoscope device
JP2011221345A (en) 2010-04-12 2011-11-04 Hitachi Ltd Wavelength variable filter and wavelength variable laser light source
JP2012088419A (en) 2010-10-18 2012-05-10 Seiko Epson Corp Optical module and optical analysis device
JP5797035B2 (en) 2011-07-07 2015-10-21 オリンパス株式会社 Variable spectroscopic element
JP5834718B2 (en) * 2011-09-29 2015-12-24 セイコーエプソン株式会社 Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus
JP2013238755A (en) 2012-05-16 2013-11-28 Seiko Epson Corp Optical module, electronic equipment, food analyzer, spectroscopic camera, and method for driving wavelength variable interference filter
JP6019863B2 (en) * 2012-07-18 2016-11-02 セイコーエプソン株式会社 Wavelength variable interference filter, optical filter device, optical module, electronic apparatus, and method of manufacturing wavelength variable interference filter
JP6194592B2 (en) * 2013-02-22 2017-09-13 セイコーエプソン株式会社 Spectroscopic camera
JP6195459B2 (en) 2013-03-19 2017-09-13 日本分光株式会社 Speed control device for movable mirror for interferometer, Fourier transform spectrophotometer
JP6543884B2 (en) 2014-01-27 2019-07-17 セイコーエプソン株式会社 Actuator control device, optical module, electronic device, and actuator control method
US9568363B2 (en) * 2014-01-28 2017-02-14 Wisconsin Alumni Research Foundation Compact optical spectrometer
JP6356427B2 (en) 2014-02-13 2018-07-11 浜松ホトニクス株式会社 Fabry-Perot interference filter
FI126791B (en) * 2014-12-29 2017-05-31 Teknologian Tutkimuskeskus Vtt Oy Mirror plate for optical interferometer, method for making the mirror plate and optical interferometer
JP6671860B2 (en) * 2015-04-28 2020-03-25 浜松ホトニクス株式会社 Photodetector

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0194312A (en) * 1987-10-06 1989-04-13 Sharp Corp Variable interference device
US6504616B1 (en) * 1999-08-05 2003-01-07 Micron Optics, Inc. Calibrated tunable fiber fabry-perot filters for optical wavelength scanners and optical spectrum analyzers
US20060001881A1 (en) * 2004-06-30 2006-01-05 Maier John S Method and apparatus for peak compensation in an optical filter
US20100292581A1 (en) * 2009-05-13 2010-11-18 Peter Guy Howard Dynamic Calibration of an Optical Spectrometer
US20170146401A1 (en) * 2014-06-27 2017-05-25 Spectral Engines Oy Stabilized spectrometer and a method for stabilizing a spectrometer

Also Published As

Publication number Publication date
US20190265103A1 (en) 2019-08-29
JP2019148655A (en) 2019-09-05
EP3540393A2 (en) 2019-09-18
CN110196490B (en) 2022-11-08
US10712200B2 (en) 2020-07-14
JP7043885B2 (en) 2022-03-30
EP3540393B1 (en) 2023-11-08
CN110196490A (en) 2019-09-03

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