EP3538945A1 - Dispositif d'imagerie - Google Patents

Dispositif d'imagerie

Info

Publication number
EP3538945A1
EP3538945A1 EP17797622.2A EP17797622A EP3538945A1 EP 3538945 A1 EP3538945 A1 EP 3538945A1 EP 17797622 A EP17797622 A EP 17797622A EP 3538945 A1 EP3538945 A1 EP 3538945A1
Authority
EP
European Patent Office
Prior art keywords
sample
radiation
deflection
mirror
sample surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP17797622.2A
Other languages
German (de)
English (en)
Inventor
Joachim Janes
Thorsten Giese
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102016221933.2A external-priority patent/DE102016221933A1/de
Priority claimed from DE102016226212.2A external-priority patent/DE102016226212A1/de
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP3538945A1 publication Critical patent/EP3538945A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G01J3/4406—Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4795—Scattering, i.e. diffuse reflection spatially resolved investigating of object in scattering medium
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0605—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors
    • G02B17/0621—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J2003/421—Single beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N2021/6417—Spectrofluorimetric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N2021/6463—Optics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0633—Directed, collimated illumination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0636—Reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/105—Purely optical scan
    • G01N2201/1053—System of scan mirrors for composite motion of beam

Definitions

  • the invention is in the field of optics and electromechanics and is of particular advantage for analytical methods. Particular advantages arise when used for investigation methods of optical spectroscopy.
  • a preferred optical detection method is UV absorption detection or UV-excited fluorescence spectroscopy. This can be used in particular in the context of epifluorescence structures.
  • sources of radiation not only UV sources can be advantageously used in fluorescence analysis, which make it possible to stimulate natural fluorescence in a large number of biological molecules, in particular proteins containing tryptophan or tyrosine.
  • UV fluorescence detection at wavelengths of for example 266 nm requires complex epifluorescence structures.
  • Optical components, such as lenses, filters, condensers, must have high transmission for UV radiation and low auto-fluorescence at the excitation wavelength for a desired measurement efficiency.
  • the present invention has for its object to provide an optical detection device for fluorescence spectroscopic investigations, which is able to detect fluorescence radiation efficiently and with high spatial resolution.
  • the invention relates to an imaging device with a laser light source, a mirror arrangement with two parabolic mirrors, via which a scanning light beam generated by the laser light source is directed onto a sample surface, and with a deflection device, in particular a micromirror scanner, which is controllable in such a way, that the scanning light beam scans targeted points of the sample surface, as well as with a deflection device, in particular a micromirror scanner, which is controllable in such a way, that the scanning light beam scans targeted points of the sample surface, as well as with a
  • a detector that detects radiation emanating from a scanned point on the sample surface.
  • an optical imaging device for a light beam which can realize an enlargement, a reduction or a 1: 1 image as a function of the geometrical parameters of the mirrors and their position and distance from one another.
  • a laser beam passing through both parabolic mirrors, ie reflected successively at both parabolic mirrors, can be adjusted / focused to illuminate a very small, very sharply defined spot in a plane behind the mirrors in which the sample can be placed that the plane can be placed behind the mirror. If the laser beam is deflected before the reflection at the parabolic mirrors, this results behind the parabolic mirrors as a function of an adjustable magnification.
  • reduction or reduction scale a reduction or translation of the deflection movement of the laser beam. It follows that the laser beam in the area before passing through the parabolic mirror by a deflection device, for example, with a micromirror scanner, can be selectively deflected and that this deflection can be over- or understated by the parabolic mirror system.
  • a detector that detects radiation may be directed to the plane that is illuminated by the laser beam and detect the radiation that illuminated from a sample on the illumination plane at the respective laser
  • the micromirror scanner permits a deflection of the laser beam in several planes, a surface with very high resolution can be scanned in the illumination plane.
  • the information which pixel is illuminated by the laser beam at a certain time is available in the control device of the deflection device / of the micromirror scanner.
  • the respective illuminated spot may be assigned an intensity of the radiation reflected by the sample at that point by the detector. From this a two-dimensional image of the sample can be obtained, for example in greatly enlarged form.
  • the optical resolution of the imaging device is limited only by the accuracy of the control of the scanner on the one hand and the diameter of the laser beam at its focal point on the image plane / on the surface of the sample on the other hand. There are no visible or UV-breaking light according to this concept
  • the deflection device comprises a 2D MEMS scanner.
  • Such mirror systems are also called MOEMS (micro-optoelectromechanical systems) scanners and, in many cases, comprise a mirror which can be selectively deflected about two different axes in a swiveling motion by means of a drive.
  • a laser beam incident on the micromirror is deflected in a correspondingly controlled manner. This can be done by controlling the deflection in two independent pendent directions a solid angle can be scanned completely by the reflected laser beam.
  • this solid angle corresponds to a completely scanable image surface.
  • the deflection device comprises an angle adjusting element.
  • Such an angle adjusting element can be operated piezoelectrically, for example, or it can be static, for example a quasi-statically operated microscanner.
  • the actuator deflects the laser beam and maintains a position for a long period of time, such as several seconds. In this way, a very fine
  • a method for operating the image-generating device can accordingly provide that, before or after the scanning of the sample surface, the scanning light beam is directed in a static adjustment of the deflection device onto a partial surface of the sample surface and in this setting a spectroscopic examination of the radiation emitted by the partial surface is carried out. Since in the control / regulation of the deflection angle of such a MEMS
  • each mirror position of the mirror can be set very precisely in both axes, then each mirror position can also be very accurately assigned a point in the image plane to which a light beam / laser beam is deflected at the corresponding mirror position.
  • the detector detects and stores the intensity of the reflected radiation or fluorescence emitted as a result of the primary illumination.
  • a spatially resolved image of the image plane with respect to the intensity distribution of the detected radiation is generated. The resolution of this figure is only affected by the accuracy of the tion of the deflection and the size of the laser spot in the image plane limited.
  • Drive mechanisms for a MEMS scanner include, for example, electromagnetic, electrostatic, piezoelectric or thermoelectric drives.
  • the mirror can be made, for example, by the known technologies as e.g. in DE 102006058563._The deflection of the mirror at a given force is thus optimally reproducible, and thus also the point in the image plane is optimally determinable, to which the laser beam is deflected at a certain force effect.
  • the mirror drive can also be provided with a control that adjusts the angle of the mirror.
  • a control that adjusts the angle of the mirror.
  • Deflection device in the focal point of the first parabolic mirror first passed by the scanning light beam or in its immediate vicinity, for example, less than 5 mm away from this is arranged.
  • This arrangement of the mirror more precisely the intersection of the two axes about which the mirror is rotatable, causes the light rays which strike the mirror there, at the focal point of the parabolic mirror, to be deflected by it in the direction of the parabolic mirror, in each case Case independent of the direction of incidence on the deflection mirror after reflection on the parabolic mirror parallel to each other and with a suitable setting also parallel to the axis of symmetry of the parabolic mirror emerge.
  • this laser beam falls from the focal point at different angles of incidence onto the parabolic mirror, but in each case is displaced parallel to the symmetry axis of the mirror.
  • An arbitrary deflection angle or deflection angle of the scanning device is thus converted into a parallel offset of the beam.
  • the sample surface is arranged in the focal point of the second parabolic mirror or in its immediate vicinity, in particular between 1 mm and 5 mm in front of or behind the focal point, in the direction of the scanning light beam, wherein the second parabolic mirror after first parabolic mirror passes from the scanning light beam becomes.
  • the light rays that pass the second parabolic mirror after the first parabolic mirror and are reflected at this, are collected in the focal plane in a focal point, ie, all parallel incident laser beams are focused on a focal point.
  • Parabolic mirror converted into an output-side angle deflection.
  • the deflection angle can thus be reduced so that, when scanning in the image plane, a higher absolute resolution based on absolute distances in the image plane arises than in the case of the deflection before the first parabolic mirror.
  • the axes of symmetry of the first and the second parabolic mirror are parallel to each other, in particular to each other congruent.
  • a symmetry of the entire structure is achieved, minimizes aberrations and makes the construction particularly space-saving.
  • the detector has a sensor for radiation detection, which detects a surface-integral radiation intensity and in particular has only a single radiation-sensitive semiconductor element.
  • the spatial resolution of the detector plays only a minor role for the spatial resolution of the measurement.
  • the detector detects the radiation thrown back at the illuminated, ideally very small point of the image surface. Here it depends only on the proof of a total intensity.
  • the sensor can be chosen very sensitive, for example as an avalanche diode.
  • a further embodiment can provide that the two parabolic mirrors have the same shape and size.
  • the parabolic mirror results in an 1: 1 mapping. Even without a magnification can be achieved by a correspondingly good focus of a laser to a very small point in the image plane, a high spatial resolution.
  • parabolic constant of the second parabolic mirror is greater than that of the first one, then an enlargement can be achieved, by which, united with good focus of the laser beam, a further improved spatial resolution when scanning a sample can be achieved.
  • a good focus of the laser beam illuminating the sample can be achieved by choosing a suitable beam shaping optics. Also the
  • Curvature radii of the two parabolic mirrors have an influence on this and can be optimized accordingly in the choice of the structure.
  • the light reflected or scattered by the sample or the fluorescent light generated by the illumination with the laser beam is detected by the detector.
  • Image plane (the object level in which the sample is located) 1 ⁇ amount, thereby ensuring that the sample can be scanned with a resolution of 1 ⁇ .
  • the area of the sample can be achieved by scanning an angular range with two independent deflection angles of, for example, 40 ° with appropriate magnification.
  • the removal of the sample from the focal point of the second parabolic mirror is also decisive for the determination of a magnification factor. It can therefore be provided for adjusting the magnification that the distance of the sample surface from the focal point of the second parabolic mirror is adjustable.
  • the laser light source and the deflection angle of the deflection device in particular the angles of incidence a 2D MEMS scanner can be controlled by a common device (control device) such that defined points of the sample surface are irradiated at definable times and assigned to each irradiated point detected by the detector, emanating from the point radiation intensity.
  • FIG. 1 shows an imaging device with two parabolic mirrors and a micromirror scanner
  • Fig. 2 shows schematically the beam path in an arrangement with two
  • Fig. 3 shows the second parabolic mirror with its focal plane and a
  • Fig. 4 shows the schematic structure of a control of the system as well
  • Figure 1 shows a structure with a laser light source 1 and two parabolic mirrors 3, 6 and a 2D microscanner 2.
  • the laser beam la is from the laser source to the microscanner 2, from this to the first parabolic mirror 3 and from there via the second Parabolic mirror 6 to one
  • Sample 9 passed in a sample plane, which can also be referred to as an object plane.
  • a laser light source is, for example, a radiant in the ultraviolet light laser range in question.
  • the ultraviolet laser beam 1a is then used to cover a surface area on the sample 9 in the object plane by deflecting a micromirror of the micro-scanner 2.
  • a corresponding translation / reduction of the beam deflection of the laser beam la by the choice of the corresponding parameters of the parabolic mirrors 3, 6 can be scanned in the object plane, a surface region of the sample with very high spatial resolution by a correspondingly highly focused laser beam.
  • the reflected light from each individual scan point for example, fluorescent light, can be detected by a detector, not shown in the figure 1. In this way, a complete image of the scanned area on the sample 9 can be obtained.
  • the design and the drive of the 2D micro-scanner can be commercially available;
  • a mirror of the micro-scanner can be electromagnetically, electrostatically, piezoelectrically or otherwise driven. It is important, however, that the deflection angle, ie the adjustment angle of the micromirror, is precisely adjustable or accurately measured.
  • a corresponding regulation can be provided in the scanner, in which the mirror position is reported back to the controller.
  • the 2D micro-scanner is in the focal point of the first parabolic mirror 3, the light beams / laser beams, which are reflected from there to the mirror 3, converted into parallel beams, wherein the bundle of successively generated beams in Figure 1 by the reference numeral 5 is designated.
  • the rays running parallel to one another usually do not exist at the same time, but instead successively represent rays reflected by the microscanner in different angular positions.
  • these beams are radiated parallel to the axis of symmetry of the second parabolic mirror 6 and are focused onto the focus point of the second parabolic mirror 6 in accordance with the laws of geometric optics.
  • Laser beams which are deflected by the micro scanner 2 at different angles, strike the focal point 8 of the mirror at different angles in the region of the second parabolic mirror 6. Different rays will hit the focus point 8 at different angles in the second parabolic mirror.
  • the sample 9 Behind or in front of the focal point 8, the sample 9 is arranged in an object plane, so that the light rays arriving at different angles impinge on the same at different points of the sample. It turns out that certain angle deflections of the 2D micro-scanner are converted into smaller angular deflections of the beam in the region of the second parabolic mirror 6 with appropriate parameterization of the parabolic mirrors 3, 6.
  • the sample 9 can be scanned with a very high spatial resolution, if the condition is met that the laser beam is optimally bundled la, so that in the region of the object plane, the Ouerterrorisms Listing the laser beam is minimized
  • the parabolic constant of the second parabolic mirror 6 is greater than that of the first parabolic mirror 3. This results a determinierter translation factor of the magnification or the spatial resolution of the sample.
  • the distance between the sample 9 and the object plane from the focal point 8 can also be adjustable in order to be able to adapt the conditions on the sample 9 to the achievable angular resolution of the micro-scanner and the achievable optimized bundling of the laser beam 1 a.
  • the absolute distance of the sample 9 from the focal point of the second parabolic mirror 6 will be only a few millimeters in practice. If the diameter of the laser beam in the object plane is, for example, 1 ⁇ m, then the sample can be detected with 1000 ⁇ 100 ° adjacent sample points covering a sample area of 1 mm 2 . This area can z. B. are scanned by a Winkelaussch Quarry Institute of the 2D micro-scanner of 40 ° in two mutually perpendicular planes. The magnification of the imaging device can be determined by the distance of the object plane from the focal point 8 of the second parabolic mirror, without having to adjust optical elements.
  • the fluorescent light reflected by the sample 9 is detected by a detector 10 which contains, for example, an avalanche diode.
  • the detector may, if it is not disturbed by ambient light, be directed to the sample 9 without any particular spatial resolution, because at a given time it is clear which spot on the sample is illuminated by the laser beam, so that the reflected light intensity with Safety originated from the registered sample surface point.
  • This condition is without more, however, only satisfied if the detected by the detector light is fluorescent light whose wavelength differs from that of the incident light / the irradiated UV radiation, so that the fluorescent light can be filtered out.
  • the successively measured intensity values are stored and assigned in a processing device to the various controlled sample surface points, so that a two-dimensional image of the sample surface is formed.
  • FIG. 3 illustrates in more detail the effect of the image magnification, with the exception of the sample 9 in the first object plane having a second position
  • FIG. 4 schematically shows a control system for the image generation device.
  • the control system provides a control device 12, which controls on the one hand the laser light source 1 and on the other hand by means of a downstream control 13 a MEMS microscanner 2.
  • the laser light source 1 may be pulsed in such a way that laser beams only fall onto the mirror of the MEMS scanner when the respectively desired deflection angle is set. This laser power can be saved and the heating of the device, in particular the laser light source and the sample can be reduced.
  • the laser light la falls, as shown in dashed lines in Figure 4, on the MEMS
  • Microscanner and is deflected to a point of the sample according to the set deflection angle.
  • the laser beam 1a impinging on the sample causes the reflection or backscatter or emission of fluorescent light at the target point, which is detected in a detector 10 is registered.
  • the detector 10 may be covered by a filter which transmits only the wavelength range to be detected, in particular in the UV range.
  • the light intensity is registered in the detector 10 and passed on to the control device 12.
  • the coordinates of the current position of the micro-scanner and / or according to the controlled sample surface point and the reflection intensity or detection intensity of light by the detector 10 are combined in the control device 12 and given to a storage and display device 15, where the information for an image of Sample assembled and stored. The image can then be displayed to the user and / or evaluated automatically.
  • FIG. 5 shows, by way of example, how an angular deflection on the 2D microcanner, which is composed there of two deflection angles in mutually perpendicular axes, is deflected in corresponding directions of deflection
  • Laser beam is implemented in the object plane.
  • the various reflections of the light beam at the parabolic mirrors and off-center positions of the scanner and / or the sample cause corresponding distortions. It is important, however, that a two-dimensional surface on the sample can be swept through the angular deflections in combination with each other, which is represented in Figure 5 by the distributed points 16, 17, 18.
  • An advantage of the invention over other scanning methods and devices is the use of a single 2D MEMS scanner (2) for
  • the laser beam (la) is irradiated in the one direction of oscillation of the 2D MEMS scanner (2) perpendicular to the surface of the deflection mirror and in the other direction of oscillation with an angle of incidence of more than 22.5 °, in particular between 22.5 ° and 30 °, more particularly between 22 , 5 ° and 25 °, based on the pivot point.
  • This allows a maximum, total, by the laser beam (la) scannable solid angle range, which is spanned in one scan direction of nearly +/- 90 ° and in the other direction of nearly +/- 45 °.
  • the two half shells (3) and (6) whose surfaces are designed as parabolic concave mirror, positioned at a distance of between learning and 2cm to each other.
  • the central ray of the partial beams (7) should intersect the axis of symmetry at an angle between 80 ° and 100 °, more preferably 90 °.
  • the sub-beam (7) is understood to mean the central beam, which results from averaging between the outermost angular positions of the 2D MEMS scanner (2) of 0 ° in both scanning directions. Under this condition, the diameters of the partial beams (7) after reflection and in the plane (9) which is between 1 mm and 5 mm beyond the focal point (8) of the parabolic mirror (6) are substantially equal.
  • the surface normal of the object plane (9) is aligned parallel to the direction of the central ray of the partial beams (7).
  • the diameters of the partial beams (7) are almost the same size and, secondly, this results in a nearly homogeneous illumination density of an object which is located in the object plane (9).
  • Fluorescent light has a radiation characteristic that depends on the surface properties of the object in the object plane (9). For many applications one can approximate the radiation characteristic of an illuminated point in the object plane with a cosine distribution. This cosine distribution is to a good approximation rotationally symmetric to the surface normal of the object plane (9).
  • the scattered light or fluorescent light is with a Detector in the form of a photodetector, such as an avalanche photo diode (APD) detected.
  • APDs avalanche photo diode
  • the APD can advantageously be positioned at an angle of at least 5 °, more preferably less than 10 °, relative to the surface normal of the object plane (9). Since the emission characteristics of the illuminated points of the object plane (9) are rotationally symmetrical about the surface normal of the plane (9), the APD can also be installed rotationally symmetrical about the axis of the emission characteristic. It may, since the photodetector is not in the axis of the partial beams (7), also a separate optical collecting means for the detector, for example in the form of a lens may be provided.
  • Aspect 1 Analysis device for one or more samples with a lighting device for illuminating samples or sections of samples in succession with an illumination beam and with a detection device for detecting secondary radiation due to the illumination of the illuminated sample or the illuminated
  • the illumination device has a deflection device, in particular a controllable or controllable 2D scanner, more particularly a 2D MEMS scanner, for deflecting the illumination beam to the sample (s) and wherein in the light path of the illumination beam and / or a paraboloidal mirror is arranged in the light path of the secondary beam.
  • a deflection device in particular a controllable or controllable 2D scanner, more particularly a 2D MEMS scanner, for deflecting the illumination beam to the sample (s) and wherein in the light path of the illumination beam and / or a paraboloidal mirror is arranged in the light path of the secondary beam.
  • Aspect 2 Analysis device according to aspect 1, wherein the illumination beam and the secondary beam are reflected at the same paraboloidal mirror.
  • Aspect 3 Analysis device according to aspect 1 or 2, wherein the illumination beam is a laser beam.
  • Aspect 4 Analysis device according to aspect 1, 2 or 3, wherein the deflection device is arranged on the symmetry axis of a paraboloidal mirror.
  • Aspect 5. Analysis device according to aspect 4, wherein the deflecting device (2), in particular the point of the deflecting device on which all possible deflected illumination beams meet, further in particular the point of intersection of two pivot axes of the mirror of the deflecting device, in the focal point of a paraboloidal mirror or in the immediate vicinity of Focus point is arranged.
  • Aspect 6 Analysis device according to aspect 1, 2, 3 or 4, wherein a detector of the detection device is arranged in the focal point of a paraboloidal mirror or in the immediate vicinity of the focal point.
  • Aspect 7 Analysis device according to aspect 1 or one of the following, wherein the detector has an intensity integral over a sensor surface with respect to the radiation impinging on it
  • Aspect 8 Analysis device according to aspect 1 or one of the following, wherein an optical filter is arranged in the light path of the secondary beam.
  • Aspect 10 Analysis device according to aspect 8, wherein the optical filter passes only the wavelength range of the illumination beam to the detector.
  • Aspect 11 Analysis device according to aspect 1 or one of the following, wherein a beam-shaping optical system for
  • Forming the illumination beam is provided.
  • Aspect 13 Analysis device according to aspect 1 or one of the following, wherein with respect to each illuminated by the illumination beam spot on which a sample or a portion of a sample may be arranged, a correction factor of the detection sensitivity is set, which takes into account the angle below that of The secondary beam detected by the detector emanates from the surface of the sample and, in particular, the curvature of a paraboloidal mirror at the point at which the secondary beam is reflected thereat.
  • the above aspects are inter alia based on the object of providing a structure for an analysis device, which allows the measurement in several sample sections or on multiple samples and thereby allows efficient beam guidance in the illumination of the sample and the detection of secondary radiation emanating from the sample.
  • the aspects relate to an analysis device for one or more samples with an illumination device for illuminating samples or sections of samples in succession with an illumination beam and with a detection device for detecting secondary radiation resulting from the illumination of the illuminated sample or the illuminated section in the form of a secondary beam in the direction of the detection device, the illumination device having a deflection device, in particular a controllable or controllable 2D scanner, more particularly a MEMS scanner, for deflecting the illumination beam to the sample (s) and wherein in the light path of the illumination beam and / or in the light path of the secondary beam, a paraboloid is arranged.
  • a deflection device in particular a controllable or controllable 2D scanner, more particularly a MEMS scanner
  • an illumination beam can be directed to different sections of a sample or more samples by means of the deflection device, and a secondary beam emanating from the sample toward the illumination can be detected in each case.
  • different samples or sample sections which are located, for example, on a common sample carrier, can be analyzed in a very rapid sequence.
  • the beam path of the illumination beam can be defined in a particularly easily controllable and controllable manner, in particular in connection with a deflection device.
  • dispersive elements for example lenses
  • laser-induced fluorescence, absorption of the incident light or scattered light intensity can be measured on the detection side.
  • Modified structures are required for the different types of radiation to be detected.
  • the deflection device makes it possible to illuminate a larger amount of samples or a larger sample area by scanning through an illumination beam.
  • a traveling light spot or a successively different pixels illuminating spot spot can be used, which successively in a controlled manner by means of the controlled deflection
  • Samples or sample sections departs. Since the position of the deflection device, especially if it is a 2D scanner, especially if it is a MEMS scanner, is very precisely fixed and can be determined, it is precisely known for each time or unit of time which section of a sample or which sample is currently being illuminated by the illumination beam, so that the signal response detected by the detection device on the detection side can also be unambiguously assigned to a sample or a sample section.
  • signal intensities can also be added over the partial areas of a sample or intensity distributions can be detected as a function of the respective illuminated sample location in order to obtain, for example, an integrated signal curve over the total area or partial areas of a sample.
  • intensities of the secondary radiation from different samples can also be compared with one another, so that, for example, scatter intensities, transmission intensities or fluorescence intensities of different samples and also their temporal changes can be compared with one another.
  • the detection device does not require a spatially resolving radiation detector, but a sensor sufficient to detect a total radiation intensity on its surface is sufficient. The resolution with respect to the sample surface takes place by the selective illumination by the illumination beam, if such a resolution is necessary.
  • the use of a paraboloidal mirror can be advantageous, the radiation signals from a larger surface of a sample holder, d. H. even from multiple samples, can focus to a fixed detector with relatively low distortion.
  • a particular embodiment may provide that the illumination beam and the secondary beam are reflected at the same paraboloidal mirror. Such a construction is possible, for example, if the detection device is set up to detect radiation scattered back from the sample or fluorescence radiation emanating from the sample in the same direction from which the illumination beam is coming.
  • the paraboloidal mirror can then be arranged in front of the sample and serve both to reflect the illumination beam towards the sample and to focus the secondary beams onto a sensor of the detection device.
  • the illumination beam is a laser beam. The desired or in individual cases required intensity of the illumination beam is easily accessible in this way.
  • a further embodiment can provide that the deflection device is arranged on the axis of symmetry of a paraboloidal mirror. With such an arrangement of the deflecting a symmetrical structure is achieved, through which the different areas of the sample holder, d. H.
  • the deflection device in particular the point of the deflection, where all possible deflected illumination beams meet, further arranged in particular the intersection of two pivot axes of the mirror or mirrors of the deflection, in the focus point of a paraboloidal mirror or in the immediate vicinity of the focal point is.
  • the axis of symmetry of the paraboloidal mirror runs parallel to the surface normal of a sample plane in which one or several samples are arranged. In this case, the sample or different juxtaposed samples are illuminated sequentially, but each perpendicular to the sample surface.
  • a further embodiment can provide that a detector of the detection device is arranged in the focal point of a paraboloidal mirror or in the immediate vicinity of the focal point. In such an arrangement, rays incident in parallel to the paraboloidal mirror are respectively incident on the
  • Detector of the detection device reflected.
  • radiation from the radiation characteristic of each individual sample or each sample section is directed onto the detector, which radiation is emitted at a fixed angle of the emission lobe from the individual samples or sample sections.
  • the solid angle section of the secondary radiation emanating from the samples, which hits the detector, is thus measured for all Sample sections / samples the same. This avoids distortions in the comparison of the signal responses of different samples, which can result from the fact that different emission chamber angle portions of different samples are detected.
  • this goal is achieved at least approximately.
  • Such a construction may be useful, for example, if the deflection device lies directly in the focal point of the paraboloidal mirror and thus there is no room for the detector there.
  • the detector lies directly in the focal point and that the deflection device is displaced out of the focal point.
  • the displacement away from the focal point should be kept to a minimum in both cases for both the detector and the bender, i. H. optimally less than 1 cm, advantageously less than 5 mm.
  • a further embodiment can provide that an optical filter is arranged in the light path of the secondary beam.
  • the detected radiation which strikes the sensor is selected and ambient light is rejected, the sensor not requiring any spatial resolution, but instead detecting an overall intensity of the radiation impinging on it.
  • the sensor can still consist of several photosensitive or radiation-sensitive sensors whose signals are added or integrated directly.
  • the optical filter passes only the wavelength range of the illumination beam to the detector.
  • the optical filter must then be designed to pass the wavelengths of the illumination beam.
  • the optical filter only transmits the wavelength range or a part of the wavelength range of the fluorescence radiation to the detector.
  • the filter is on the expected fluorescence radiation designed and blocks foreign stray light, so that, for example, the signal-to-noise ratio is improved or, for example, specific wavelength ranges can be examined separately.
  • a further embodiment may provide that with respect to each illuminated by the illumination beam location at which a sample or a portion of a sample may be arranged, a correction factor of the illumination intensity is set, which takes into account the angle at which the illumination beam hits a sample surface, and in particular, the curvature of the paraboloidal mirror in the point where the illumination beam is reflected at this.
  • a beam-shaping optical system can be provided in the path of the illumination beam.
  • a beam-shaping optical unit usually comprises one or more lenses which set the beam diameter and / or the beam divergence.
  • the analyzer can be assigned a matrix of correction values which take into account the corrections in the calculation of the illumination intensity arriving at the sample location and / or the corrections in the detection of the secondary radiation originating from the sample location.
  • a matrix can be stored in an evaluation device and taken into account in the evaluation of the measurements.
  • each illuminatable by the illumination beam location at which a sample or a Ab- a correction factor of the detection sensitivity is set which takes into account the angle at which the secondary beam detected by the detector emanates from the sample surface, and in particular the curvature of a paraboloidal mirror in the point at which the secondary beam at this is reflected.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

L'invention concerne un dispositif d'imagerie comprenant une source laser (1), un agencement de miroirs comportant deux miroirs paraboliques (3, 6) qui permettent de guider un faisceau laser de balayage (1a, 5) généré par la source laser sur une surface d'échantillon (9), et un dispositif de déviation (2), notamment un micro-scanner, apte à être commandé de manière à ce que le faisceau lumineux de balayage (1a, 5) balaie des points ciblés de la surface de l'échantillon, et un détecteur (10) qui assure la détection du rayonnement partant du point balayé de la surface d'échantillon. La résolution spatiale du dispositif d'imagerie est sensiblement défini par une focalisation, la plus concentrée possible, du faisceau laser, et la précision de l'angle de déviation réglable est défini par le micro-scanner.
EP17797622.2A 2016-11-09 2017-11-09 Dispositif d'imagerie Withdrawn EP3538945A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102016221933.2A DE102016221933A1 (de) 2016-11-09 2016-11-09 Bilderzeugungseinrichtung
DE102016226212.2A DE102016226212A1 (de) 2016-12-23 2016-12-23 Analyseeinrichtung
PCT/EP2017/078741 WO2018087219A1 (fr) 2016-11-09 2017-11-09 Dispositif d'imagerie

Publications (1)

Publication Number Publication Date
EP3538945A1 true EP3538945A1 (fr) 2019-09-18

Family

ID=60320880

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17797622.2A Withdrawn EP3538945A1 (fr) 2016-11-09 2017-11-09 Dispositif d'imagerie

Country Status (3)

Country Link
US (1) US20190310464A1 (fr)
EP (1) EP3538945A1 (fr)
WO (1) WO2018087219A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115267802A (zh) * 2018-12-29 2022-11-01 华为技术有限公司 一种激光测量模组和激光雷达
CN112068309B (zh) * 2020-09-08 2021-07-02 清华大学 一种含双抛物面镜动态聚焦模块的三维扫描系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7505133B1 (en) * 2004-06-22 2009-03-17 Sci Instruments, Inc. Optical metrology systems and methods
DE102006058563B3 (de) 2006-12-12 2008-06-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikrospiegel-Aktuator mit Kapselungsmöglichkeit sowie Verfahren zur Herstellung
GB201100555D0 (en) * 2011-01-13 2011-03-02 Optos Plc Improvements in or relating to Ophthalmology
US9864190B2 (en) * 2011-02-24 2018-01-09 The Board Of Trustees Of The Leland Stanford Junior University Confocal microscope, system and method therefor
US20120257166A1 (en) * 2011-04-07 2012-10-11 Raytheon Company Portable self-retinal imaging device
WO2016131047A1 (fr) * 2015-02-13 2016-08-18 The Regents Of The University Of California Procédé de balayage pour imagerie uniforme, sous incidence normale, d'une surface sphérique à l'aide d'un faisceau unique

Also Published As

Publication number Publication date
US20190310464A1 (en) 2019-10-10
WO2018087219A1 (fr) 2018-05-17

Similar Documents

Publication Publication Date Title
EP0056426B1 (fr) Dispositif pour la représentation de paramètres d'un échantillon
DE69737475T2 (de) Mit makro- und mikroabtastobjektiven kompatibles fluoreszenzabbildungssystem
DE10257237B4 (de) Anordnung zur optischen Erfassung von in einer Probe angeregter und/oder rückgestreuter Lichtstrahlung
DE10105391B4 (de) Scanmikroskop und Modul für ein Scanmikroskop
CH678663A5 (fr)
DE102007005875A1 (de) Vorrichtung und Verfahren zur Bestimmung der Ausrichtung von Oberflächen von optischen Elementen
DE10056382A1 (de) Lichtquelle zur Beleuchtung in der Scanmikroskopie und Scanmikroskop
DE102006045626A1 (de) Vorrichtung und Verfahren zur optischen Untersuchung von Wertdokumenten
DE2354141A1 (de) Verfahren zum untersuchen einer oberflaeche und vorrichtung zur durchfuehrung dieses verfahrens
WO2007019895A1 (fr) Microscope optique a balayage equipe d'un mecanisme de mise au point automatique
EP1927026A1 (fr) Microscope confocal et procede pour detecter un microscope confocal
EP1678547B1 (fr) Dispositif et procede de mesure des proprietes optiques d'un objet
WO2018087219A1 (fr) Dispositif d'imagerie
DE102009036383B3 (de) Vorrichtung und Verfahren zur winkelaufgelösten Streulichtmessung
DE102017202635A1 (de) Lidar-Sensor zur Erfassung eines Objektes
DE112010004624B4 (de) Optische Vorrichtung mit einem Phasenfilter und Rastermikroskop mit einem Phasenfilter
EP1228355B1 (fr) Procede et dispositif permettant de mesurer et d'evaluer les caracteristiques de diffusion de surfaces
EP3987335B1 (fr) Procédé et dispositifs pour tester la confocalité d'un module de balayage et de débalayage d'un microscope
DE102022210354A1 (de) Messverfahren der EUV-Reflektometrie und EUV-Reflektometer
EP0961930B1 (fr) Dispositif de balayage lumineux
EP4314775A1 (fr) Appareil, dispositif et procédé d'irradiation d'un échantillon biologique particulier, avec composant optique holographique
EP0925496A1 (fr) Dispositif pour evaluer des comportements en reflexion
DE102016221933A1 (de) Bilderzeugungseinrichtung
DE102019119147A1 (de) Mikroskop und verfahren zur mikroskopie
WO2015067669A1 (fr) Microscope à balayage multispot

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20190507

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

RIN1 Information on inventor provided before grant (corrected)

Inventor name: GIESE, THORSTEN

Inventor name: JANES, JOACHIM

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Effective date: 20201103