EP3531131A4 - Halbleitersensor und herstellungsverfahren dafür sowie verbundsensor - Google Patents

Halbleitersensor und herstellungsverfahren dafür sowie verbundsensor Download PDF

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Publication number
EP3531131A4
EP3531131A4 EP17864143.7A EP17864143A EP3531131A4 EP 3531131 A4 EP3531131 A4 EP 3531131A4 EP 17864143 A EP17864143 A EP 17864143A EP 3531131 A4 EP3531131 A4 EP 3531131A4
Authority
EP
European Patent Office
Prior art keywords
sensor
manufacturing
same
compound
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP17864143.7A
Other languages
English (en)
French (fr)
Other versions
EP3531131A1 (de
Inventor
Kojiro NAITO
Kazumasa Nagao
Seiichiro Murase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Publication of EP3531131A1 publication Critical patent/EP3531131A1/de
Publication of EP3531131A4 publication Critical patent/EP3531131A4/de
Withdrawn legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54353Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals with ligand attached to the carrier via a chemical coupling agent
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366Apparatus specially adapted for solid-phase testing
    • G01N33/54373Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/126Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3275Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
    • G01N27/3276Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction being a hybridisation with immobilised receptors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3275Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
    • G01N27/3278Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction involving nanosized elements, e.g. nanogaps or nanoparticles
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4145Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366Apparatus specially adapted for solid-phase testing
    • G01N33/54373Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • G01N33/5438Electrodes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/72Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing involving blood pigments, e.g. haemoglobin, bilirubin or other porphyrins; involving occult blood
    • G01N33/721Haemoglobin
    • G01N33/723Glycosylated haemoglobin
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2333/00Assays involving biological materials from specific organisms or of a specific nature
    • G01N2333/795Porphyrin- or corrin-ring-containing peptides
    • G01N2333/805Haemoglobins; Myoglobins
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2400/00Assays, e.g. immunoassays or enzyme assays, involving carbohydrates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4146Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS involving nanosized elements, e.g. nanotubes, nanowires

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Molecular Biology (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Hematology (AREA)
  • Biomedical Technology (AREA)
  • Urology & Nephrology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Cell Biology (AREA)
  • Biotechnology (AREA)
  • Medicinal Chemistry (AREA)
  • Microbiology (AREA)
  • Food Science & Technology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
EP17864143.7A 2016-10-24 2017-10-13 Halbleitersensor und herstellungsverfahren dafür sowie verbundsensor Withdrawn EP3531131A4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016207707 2016-10-24
JP2017105259 2017-05-29
PCT/JP2017/037226 WO2018079314A1 (ja) 2016-10-24 2017-10-13 半導体センサおよびその製造方法、ならびに複合センサ

Publications (2)

Publication Number Publication Date
EP3531131A1 EP3531131A1 (de) 2019-08-28
EP3531131A4 true EP3531131A4 (de) 2019-12-25

Family

ID=62024919

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17864143.7A Withdrawn EP3531131A4 (de) 2016-10-24 2017-10-13 Halbleitersensor und herstellungsverfahren dafür sowie verbundsensor

Country Status (7)

Country Link
US (1) US20190285576A1 (de)
EP (1) EP3531131A4 (de)
JP (1) JP7124317B2 (de)
KR (1) KR20190072520A (de)
CN (1) CN109844530A (de)
TW (1) TWI760377B (de)
WO (1) WO2018079314A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113195631A (zh) * 2018-12-18 2021-07-30 住友电木株式会社 Lds用热固性树脂组合物和半导体装置的制造方法
CN110627530B (zh) * 2019-09-05 2021-11-26 山东国环立宏检测有限公司 用于检测三甲胺的气敏传感器
JP7293059B2 (ja) * 2019-09-13 2023-06-19 株式会社東芝 センサ及び方法
CN110455664A (zh) * 2019-09-20 2019-11-15 浙江晶科能源有限公司 一种太阳能电池正面电极湿重测量装置及测量方法
KR102286263B1 (ko) * 2019-10-23 2021-08-04 가천대학교 산학협력단 나노소재를 이용한 정전용량형 화학센서 및 그의 제조방법
TWI729573B (zh) 2019-11-19 2021-06-01 國立臺灣科技大學 蛋白質感測器及其製造方法
CN111498794B (zh) * 2020-03-18 2022-12-06 天津师范大学 悬空石墨烯场效应管声学传感器
US20240002945A1 (en) * 2020-11-24 2024-01-04 Korea Institute Of Science And Technology Graphene-based biosensor and detection method using same
EP4359781A1 (de) * 2021-06-23 2024-05-01 Royal Melbourne Institute of Technology Konduktometrischer sensor zum nachweis einer nukleinsäure und verfahren zu dessen nachweis
AU2022297010A1 (en) * 2021-06-23 2024-01-18 Royal Melbourne Institute Of Technology Conductometric sensor for detecting a bioanalyte and a method for the detection thereof
CN116008371B (zh) * 2022-12-21 2024-06-07 中国农业科学院北京畜牧兽医研究所 一种免疫传感器及其制备方法和应用

Citations (6)

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EP1464953A1 (de) * 2003-04-02 2004-10-06 Lucent Technologies Inc. Biosensor enthaltend einen organischen Feld-Effekt Transistor und Methode zur Herstellung des Sensors
US20090203155A1 (en) * 2008-02-12 2009-08-13 Hiroyuki Chiku Labeled particle obtained by immobilizing a fragmented antibody to a labeling substance
WO2015021063A1 (en) * 2013-08-05 2015-02-12 Northeastern University Swcnt biosensor for detecting glucose, lactate, and urea
WO2016073977A1 (en) * 2014-11-07 2016-05-12 Proteosense Devices, systems, and methods for the detection of analytes
EP3026014A1 (de) * 2013-07-25 2016-06-01 Toray Industries, Inc. Kohlenstoffnanoröhrchenverbundstoff, halbleiterbauelement und sensor damit
WO2017082253A1 (ja) * 2015-11-09 2017-05-18 東レ株式会社 センサ

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JPWO2006103872A1 (ja) 2005-03-28 2008-09-04 国立大学法人 北海道大学 カーボンナノチューブ電界効果トランジスタ
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CA2796366C (en) * 2010-04-14 2017-12-05 Eiken Kagaku Kabushiki Kaisha Complex of labeled probes and water-soluble carrier
TWI529896B (zh) * 2013-03-08 2016-04-11 國立臺灣海洋大學 金屬化合物半導體生物晶片及其製作方法
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Publication number Priority date Publication date Assignee Title
EP1464953A1 (de) * 2003-04-02 2004-10-06 Lucent Technologies Inc. Biosensor enthaltend einen organischen Feld-Effekt Transistor und Methode zur Herstellung des Sensors
US20090203155A1 (en) * 2008-02-12 2009-08-13 Hiroyuki Chiku Labeled particle obtained by immobilizing a fragmented antibody to a labeling substance
EP3026014A1 (de) * 2013-07-25 2016-06-01 Toray Industries, Inc. Kohlenstoffnanoröhrchenverbundstoff, halbleiterbauelement und sensor damit
WO2015021063A1 (en) * 2013-08-05 2015-02-12 Northeastern University Swcnt biosensor for detecting glucose, lactate, and urea
WO2016073977A1 (en) * 2014-11-07 2016-05-12 Proteosense Devices, systems, and methods for the detection of analytes
WO2017082253A1 (ja) * 2015-11-09 2017-05-18 東レ株式会社 センサ

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ALEXANDRA M MÜNZER ET AL: "Sensing Reversible Protein-Ligand Interactions with Single-Walled Carbon Nanotube Field-Effect Transistors: Supporting Information", THE JOURNAL OF PHYSICAL CHEMISTRY. C, NANOMATERIALS AND INTERFACES, 7 August 2014 (2014-08-07), United States, pages 17193 - 17199, XP055541466, Retrieved from the Internet <URL:https://pubs.acs.org/doi/suppl/10.1021/jp503670a/suppl_file/jp503670a_si_001.pdf> [retrieved on 20191118], DOI: 10.1021/jp503670a *
ALEXANDRA M. MÜNZER ET AL: "Sensing Reversible Protein-Ligand Interactions with Single-Walled Carbon Nanotube Field-Effect Transistors", JOURNAL OF PHYSICAL CHEMISTRY C, vol. 118, no. 31, 28 July 2014 (2014-07-28), US, pages 17193 - 17199, XP055541278, ISSN: 1932-7447, DOI: 10.1021/jp503670a *
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See also references of WO2018079314A1 *

Also Published As

Publication number Publication date
US20190285576A1 (en) 2019-09-19
JPWO2018079314A1 (ja) 2019-09-12
KR20190072520A (ko) 2019-06-25
TWI760377B (zh) 2022-04-11
JP7124317B2 (ja) 2022-08-24
EP3531131A1 (de) 2019-08-28
WO2018079314A1 (ja) 2018-05-03
CN109844530A (zh) 2019-06-04
TW201819918A (zh) 2018-06-01

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