EP3497701B1 - Multi-deck memory device and operations - Google Patents

Multi-deck memory device and operations Download PDF

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Publication number
EP3497701B1
EP3497701B1 EP17746364.3A EP17746364A EP3497701B1 EP 3497701 B1 EP3497701 B1 EP 3497701B1 EP 17746364 A EP17746364 A EP 17746364A EP 3497701 B1 EP3497701 B1 EP 3497701B1
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EP
European Patent Office
Prior art keywords
memory cell
deck
memory
transistors
memory device
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EP17746364.3A
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German (de)
French (fr)
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EP3497701A4 (en
EP3497701A1 (en
Inventor
Koji Sakui
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Micron Technology Inc
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Micron Technology Inc
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/04Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0483Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells having several storage transistors connected in series
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/08Address circuits; Decoders; Word-line control circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/10Programming or data input circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/10Programming or data input circuits
    • G11C16/14Circuits for erasing electrically, e.g. erase voltage switching circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/24Bit-line control circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/26Sensing or reading circuits; Data output circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C5/00Details of stores covered by group G11C11/00
    • G11C5/06Arrangements for interconnecting storage elements electrically, e.g. by wiring
    • G11C5/063Voltage and signal distribution in integrated semi-conductor memory access lines, e.g. word-line, bit-line, cross-over resistance, propagation delay
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C7/00Arrangements for writing information into, or reading information out from, a digital store
    • G11C7/18Bit line organisation; Bit line lay-out
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C8/00Arrangements for selecting an address in a digital store
    • G11C8/08Word line control circuits, e.g. drivers, boosters, pull-up circuits, pull-down circuits, precharging circuits, for word lines
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C8/00Arrangements for selecting an address in a digital store
    • G11C8/14Word line organisation; Word line lay-out
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
    • H01L27/06Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H01L27/0688Integrated circuits having a three-dimensional layout

Definitions

  • Memory devices are widely used in computers and many electronic items to store information.
  • a memory device has numerous memory cells. The memory device performs a write operation to store information in the memory cells, a read operation to read the stored information, and an erase operation to erase information (e.g., obsolete information) from some or all of the memory cells the memory device.
  • Memory cells in a memory device are usually organized in memory cell blocks.
  • a memory device has access lines to access the memory cell blocks during a memory operation (e.g., read, write, or erase operation).
  • a memory device also has data lines to carry information (e.g., in the form of signals) to be stored in or read from the memory cell blocks.
  • some conventional memory devices have the access lines and data lines structured in ways that may affect the efficiency (e.g., throughput) of the memory device. Therefore, such conventional memory devices may be unsuitable for some applications.
  • US 2014/369116 A1 discloses a method and an apparatus that includes first and second strings of vertically stacked memory cells, and first and second pluralities of vertically stacked data lines.
  • a data line of the first plurality of data lines is coupled to the first string through a first select device.
  • a data line of the second plurality of data lines is coupled to the second string through a second select device and is adjacent to the data lien coupled to the first string.
  • Such an apparatus can be configured to couple the data line coupled to the first string to a shield potential during at least a portion of a memory operation involving a memory cells of the second string.
  • the invention is defined in appended independent apparatus claim 1 and independent method claim 5.
  • FIG. 1 shows a block diagram of an apparatus in the form of a memory device 100, according to some embodiments described herein.
  • Memory device 100 includes a device portion 101 that includes a memory array (or multiple memory arrays) containing memory cells 102 arranged in decks, such as decks 115 0 and 115 1 .
  • memory cells 102 are arranged in memory cell blocks, such as memory cell blocks 190 in decks 115 0 and memory cell blocks 191 in decks 115 1 .
  • decks 115 0 and 115 1 may be arranged vertically (e.g., stacked over each other) over a substrate (e.g., a semiconductor substrate) of memory device 100.
  • Memory device 100 shows memory device 100 having two decks 115 0 and 115 1 and two memory cell blocks 190 and 191 in each of the decks, respectively, as an example.
  • Memory device 100 may have more than two decks of memory cells and more than two memory cell blocks in each of the decks.
  • memory device 100 includes access lines 150 (which may include word lines) and data lines (e.g., local data lines) 170 (which may include bit lines).
  • Access lines 150 carry signals (e.g., word line signals) WL0 through WLm.
  • Data lines 170 carry signals (e.g., bit line signals) BL0 0 through BLno and signals BL0 1 through BLn 1 .
  • Memory device 100 uses access lines 150 to selectively access memory cells 102 of decks 115 0 and 115 1 and data lines 170 to selectively exchange information (e.g., data) with memory cells 102 of decks 115 0 and 115 1 .
  • Memory device 100 may include an address register 107 to receive address information (e.g., address signals) ADDR on lines (e.g., address lines) 103.
  • Memory device 100 may include row access circuitry 108 and column access circuitry 109 that can decode address information from address register 107. Based on decoded address information, memory device 100 may determine which memory cells 102 of deck 115o, deck 115 1 , both decks 115 0 and 115 1 are to be accessed during a memory operation.
  • Memory device 100 may perform a read operation to read (e.g., sense) information (e.g., previously stored information) in memory cells 102 of deck 115 0 , deck 115 1 , or both decks 115o and 115 1 ; or a write (e.g., programming) operation to store (e.g., program) information in memory cells 102 of deck 115o, deck 115 1 , or both decks 115o and 115 1 .
  • Memory device 100 may also perform an erase operation to erase information from some or all of memory cells 102 of deck 115 0 , deck 115 1 , or both decks 115 0 and 115 1 .
  • Memory device 100 may use data lines 170 associated with signals BL0 0 through BLn 0 to provide information to be stored in memory cells 102 of deck 115 0 , or obtain information read (e.g., sensed) from memory cells 102 of deck 115 0 . Similarly, memory device 100 may use the same data lines 170 associated with signals BL0 1 through BLn 1 to provide information to be stored in memory cells 102 of deck 115 1 , or obtain information read (e.g., sensed) from memory cells 102 of deck 115 1 .
  • Memory device 100 may include a control unit 118 that can be configured to control memory operations of memory device 100 based on control signals on lines 104.
  • Examples of the control signals on lines 104 include one or more clock signals and other signals (e.g., a chip enable signal CE#, a write enable signal WE#) to indicate which operation (e.g., read, write, or erase operation) memory device 100 can perform.
  • Memory device 100 includes buffer circuitry 120 that can include components such as sense amplifiers and page buffer circuits (e.g., data latches).
  • Buffer circuitry 120 may respond to signals BL_SEL0 through BL_SELn from column access circuitry 109.
  • Buffer circuitry 120 may be configured to determine (e.g., by sensing) the value of information read from memory cells 102 (e.g., during a read operation) of decks 115o and 115 1 and provide the value of the information in the form of signals BL0 0 through BLno and signals BL0 1 through BLn 1 to lines (e.g., global data lines) 175.
  • Buffer circuitry 120 may also be configured to use signals on lines 175 to determine the value of information to be stored (e.g., programmed) in memory cells 102 of decks 115o and 115 1 (e.g., during a write operation) based on the values (e.g., voltage values) of signals on lines 175 (e.g., during a write operation).
  • Memory device 100 may include input/output (I/O) circuitry 117 to exchange information between of decks 115 0 and 115 1 and lines (e.g., I/O lines) 105.
  • Signals DQ0 through DQN on lines 105 may represent information read from or stored in memory cells 102 of decks 115 0 and 115 1 .
  • Lines 105 may include nodes within memory device 100 or pins (or solder balls) on a package where memory device 100 can reside.
  • Other devices external to memory device 100 e.g., a memory controller or a processor may communicate with memory device 100 through lines 103, 104, and 105.
  • Memory device 100 may receive a supply voltage, including supply voltages Vcc and Vss.
  • Supply voltage Vss may operate at a ground potential (e.g., having a value of approximately zero volts).
  • Supply voltage Vcc may include an external voltage supplied to memory device 100 from an external power source such as a battery or an alternating current to direct current (AC-DC) converter circuitry.
  • an external power source such as a battery or an alternating current to direct current (AC-DC) converter circuitry.
  • AC-DC alternating current to direct current
  • Each of memory cells 102 may be programmed to store information representing a value of a fraction of a bit, a value of a single bit, or a value of multiple bits such as two, three, four, or another number of bits.
  • each of memory cells 102 may be programmed to store information representing a binary value "0" or "1" of a single bit.
  • the single bit per cell is sometimes called a single level cell.
  • each of memory cells 102 may be programmed to store information representing a value for multiple bits, such as one of four possible values “00", “01”, “10”, and “11” of two bits, one of eight possible values “000”, “001”, “010”, “011”, “100”, “101”, “110”, and “111” of three bits, or one of other values of another number of multiple bits.
  • a cell that has the ability to store multiple bits is sometimes called a multi-level cell (or multi-state cell).
  • Memory device 100 may include a non-volatile memory device, and memory cells 102 may include non-volatile memory cells, such that memory cells 102 may retain information stored thereon when power (e.g., voltage Vcc, Vss, or both) is disconnected from memory device 100.
  • memory device 100 may be a flash memory device, such as a NAND flash (e.g., 3-dimesional (3-D)) NAND) or a NOR flash memory device, or another kind of memory device, such as a variable resistance memory device (e.g., a phase change memory device or a resistive RAM (Random Access Memory) device.
  • a flash memory device such as a NAND flash (e.g., 3-dimesional (3-D)) NAND) or a NOR flash memory device, or another kind of memory device, such as a variable resistance memory device (e.g., a phase change memory device or a resistive RAM (Random Access Memory) device.
  • a NAND flash e.g
  • memory device 100 may include other components, several of which are not shown in FIG. 1 so as not to obscure the example embodiments described herein. At least a portion of memory device 100 may include structures and operations similar to or identical to any of the memory devices described below with reference to FIG. 2 through FIG. 10 .
  • FIG. 2 shows a block diagram of a portion of a memory device 200 including decks (decks of memory cell strings) 215 0 and 215 1 , according to some embodiments described herein.
  • Memory device 200 may correspond to memory device 100 of FIG. 1 .
  • decks 215o and 215 1 may correspond to decks 115 0 and 115 1 , respectively, of FIG. 1 .
  • FIG. 2 shows dimensions x, y, and z to indicate that, in the physical structure of memory device 200 (shown in FIG. 4 and FIG.
  • decks 215o and 215 1 may be located (e.g., formed) in a z dimension (e.g., arranged vertically) over each other and over a substrate (e.g., a semiconductor substrate).
  • the z-dimension is perpendicular to the x-dimension and y-dimension (perpendicular to an x-y plane).
  • deck 215 0 may include data lines 270 0 , 271 0 , and 272 0 that carry signals (e.g., bit line signals) BL0 0 , BL1 0 , and BL2o, respectively.
  • Each of data lines 270 0 , 271 0 , and 272o may be structured as a conductive line that can include a bit line of deck 215 0 .
  • Deck 215 0 may include access lines 250 0 , 251 0 , 252 0 , and 253o that may carry corresponding signals (e.g., word line signals) WL0 0 , WL1 0 , WL2 0 , and WL3 0 .
  • Each of access lines 250 1 , 251 1 , 252 1 , and 253 1 may be structured as a conductive line that can include a word line of deck 215o.
  • Deck 215o may include control gates (e.g., memory cell control gates) 240 0 , 241 0 , 242 0 , and 243o that may be coupled to (or part of) access lines 250 0 , 251 0 , 252 0 , and 253 0 , respectively.
  • Deck 215 1 may include data lines 270 1 , 271 1 , and 272 1 that carry signals (e.g., bit line signals) BL0 1 , BL1 1 , and BL2 1 , respectively.
  • Each of data lines 270 1 , 271 1 , and 272 1 may be structured as a conductive line that may include a bit line of deck 215 1 .
  • Deck 215 1 may include access lines 250 1 , 251 1 , 252 1 , and 253 1 that may carry corresponding signals (e.g., word line signals) WL0 1 , WL1 1 , WL2 1 , and WL3 1 .
  • Each of access lines 250 1 , 251 1 , 252 1 , and 253 1 may be structured as a conductive line that may include a word line of deck 215 1 .
  • Deck 215 1 may include control gates (e.g., memory cell control gates) 240 1 , 241 1 , 242 1 , and 243 1 that may be coupled to (or part of) access lines 250 1 , 251 1 , 252 1 , and 253 1 , respectively.
  • control gates e.g., memory cell control gates
  • FIG. 2 shows each of deck 215 0 and 215 1 including three data lines and four access lines (and four corresponding control gates) as an example.
  • the number of data lines and access lines of decks 215 0 and 215 1 can vary.
  • no deck among the decks (e.g., 215o and 215 1 ) of memory device 200 shares an access line (or access lines) of the access lines (e.g., 250 0 , 251 0 , 252 0 , 253 0 , 250 1 , 251 1 , 252 1 , and 253 1 ) of memory device 200 with another deck among the decks of memory device 200.
  • decks 215o and 215 1 share no access line (do not share an access line or access lines) among access lines 250 0 , 251 0 , 252 0 , 253 0 , 250 1 , 251 1 , 252 1 , and 253 1 .
  • memory cell blocks 290 and 291 share no access line (do not share an access line or access lines) among access lines 250 0 , 251 0 , 252 0 , 253 0 , 250 1 , 251 1 , 252 1 , and 253 1 .
  • no deck among the decks (e.g., 215 0 and 215 1 ) of memory device 200 shares a data line (or data lines) of the data lines (e.g., 270 0 , 271 0 , 272 0 , 270 1 , 271 1 , and 272 1 ) of memory device 200 with another deck among the decks of memory device 200.
  • a data line or data lines of the data lines (e.g., 270 0 , 271 0 , 272 0 , 270 1 , 271 1 , and 272 1 ) of memory device 200 with another deck among the decks of memory device 200.
  • decks 215o and 215 1 share no data line (do not share a data line or data lines) among data lines 270 0 , 271 0 , 272 0 , 270 1 , 271 1 , and 272 1 and share no conductive path (do not share a conductive path or conductive paths) among conductive paths 257 0 and 257 1 .
  • no data line of data lines 270 0 , 271 0 , 272 0 , 270 1 , 271 1 , and 272 1 is shared by memory cell blocks 290 and 291
  • no conductive path of conductive paths 257o and 257 1 is shared by memory cell blocks 290 and 291.
  • data lines 270 0 , 271 0 , and 272 0 of deck 215 0 are separated from and not coupled to (e.g., electrically unconnected to) data lines 270 1 , 271 1 , and 272 1 of deck 215 1 .
  • memory device 200 may use data lines 270 0 , 271 0 , and 272o to carry information (e.g., information to be stored in or read from memory cells of deck 215o) that is different from information (e.g., to be stored in or read from memory cells of deck 215 1 ) carried by data lines 270 1 , 271 1 , and 272 1 .
  • access lines 250 0 , 251 0 , 252 0 , and 253 0 of deck 215 0 are separated from and not coupled to (e.g., electrically unconnected to) access lines 250 1 , 251 1 , 252 1 , and 253 1 of deck 215 1 .
  • a memory operation e.g., read, write, or erase operation
  • only one of decks 215 0 and 215 1 may be selected or both of decks 215 0 and 215 1 can be selected (e.g., concurrently selected).
  • This allows memory device 200, during a memory operation (e.g., read, write, or erase operation), to access and operate on memory cells of only one of decks 215o and 215 1 or memory cells of both of decks 215 0 and 215 1 .
  • memory device 200 includes driver circuits 240 and 241, a row decoder 249, buffer circuits 220 and 221, a level decoder 219, conductive paths 257o coupled to (e.g., coupled directly between) data lines 270 0 , 271 0 , and 272o and buffer circuits 220, and conductive paths 257 1 coupled to (e.g., coupled directly between) data lines 270 1 , 271 1 , and 272 1 and buffer circuits 221.
  • Conductive paths 257o may be considered as part of data lines 270 0 , 271 0 , and 272 0 .
  • Conductive paths 257 1 may be considered as part of data lines 270 1 , 271 1 , and 272 1
  • Driver circuits 240 and 241 may be part of row access circuitry of memory device 200 that may correspond to row access circuitry 108 of FIG. 1 .
  • Buffer circuits 220 and 221 may be part of buffer circuitry of memory device 200 that may correspond to and operate in ways similar to (or the same as) buffer circuitry 120 of FIG. 1 .
  • buffer circuits 220 may include sense amplifiers to sense information read from memory cells of memory cell block 290, and data latches store (e.g., temporarily store) one bit (or multiple bits) of information read from memory cells of memory cell block 290.
  • buffer circuit 221 may include sense amplifiers to sense information read from memory cells of memory cell block 291, and data latches to store (e.g., temporarily store) one bit (or multiple bits) of information read from memory cells of memory cell block 291.
  • Level decoder 219 may be part of column access circuitry of memory device 200 (that can correspond to column access circuitry 109 of FIG. 1 ). Level decoder 219 may operate to activate buffer circuits 220 and 221 to provide information to or receive information from memory cells through respective data lines of decks 215o and 215 1 (which are arranged in the "z" direction). Thus, level decoder 219 can be referred to as a "z" decoder.
  • decks 215o and 215 1 have similar elements.
  • similar elements between decks 215 0 and 215 1 are given the same designation labels (e.g., reference numbers).
  • the following description focuses on details of deck 215 0 .
  • the elements of deck 215o may have a similar description (which is not described in detail below for simplicity).
  • Deck 215o includes memory cells 210, 211, 212, and 213, select transistors (e.g., source select transistors) 261, 262, and 263, and select transistors (e.g., drain select transistors) 264, 265, and 266.
  • Memory cells 210, 211, 212, and 213 are arranged in memory cell strings, such as memory cell strings 231 through 239.
  • Deck 215 0 may include a line 299 0 that may carry a signal SRC 0 (e.g., source line signal).
  • Line 299 0 may be structured as a conductive line that may form part of a source (e.g., a source line) of deck 215 0 memory device 200.
  • Each of memory cell strings 231 through 239 of deck 215o is coupled to one of data lines 270 0 , 271 0 , and 272o through one of select transistors 264, 265, and 266.
  • Each of memory cell strings 231 through 239 of deck 215o may also be coupled to line 299o through one of select transistors 261, 262, and 263.
  • memory cell string 231 may coupled to data line 270o through select transistor 264 (directly over string 231) and to line 299 0 through select transistor 261 (directly under string 231).
  • memory cell string 232 may coupled to data line 270 0 through select transistor 265 (directly over string 232) and to line 299o through transistor 262 (directly under string 232).
  • dummy memory cells may include one or two (or more than two) memory cells at the two ends of each of memory cell strings 231 through 239.
  • dummy memory cells may include a memory cell (or memory cells) immediately next to each of select transistors 261, 262, and 263, and/or a memory cell (or memory cells) immediately next to each of select transistors 264, 265, and 266.
  • some memory cells (e.g., 213) of different memory cell strings (e.g., 231 through 239) are controlled by the same control gate (e.g., 243 0 ) and are coupled to the same access line (e.g., 253 0 ).
  • Some other memory cells (e.g., 212) of these memory cell strings (e.g., 231 through 239) are controlled by another control gate (e.g., 242 0 ).
  • Each of control gates 240 0 , 241 0 , 242 0 , and 243o may be structured as a single conductive plate (shown in FIG. 4 and FIG. 5 ).
  • control gates 240 0 , 241 0 , 242 0 , and 243o can receive respective signals WL0 0 , WL1 0 , WL2o, and WL3o (through respective access lines 250 0 , 251 0 , 252 0 , and 253 0 ) to access memory cells 210, 211, 212, and 213 of selected memory cell strings.
  • select transistors 261, 262, and 263 of deck 215o may be coupled to a select line (e.g., source select line) 280 0 .
  • Select transistors 261, 262, and 263 of deck 215 0 may be controlled (e.g., turned on or turned off) by the same signal, such as an SGS 0 signal (e.g., source select gate signal) applied to select line 280 0 .
  • select transistors 261, 262, and 263 of deck 215o may be turned on (e.g., by activating SGS 0 signal) to couple memory cell strings 231 through 239 of deck 215o to line 299 0 .
  • Select transistors 261, 262, and 263 of deck 215 0 may be turned off (e.g., by deactivating the SGS 0 signal) to decouple memory cell strings 231 through 239 of deck 215o from line 299 0 .
  • Select transistors 264, 265, and 266 of deck 215 0 may be coupled to select lines (e.g., drain select lines) 284 0 , 285 0 , and 286 0 , respectively. Select transistors 264, 265, and 266 of deck 215 0 may be controlled (e.g., turned on or turned off) by corresponding signals SGD0 0 , SGD1 0 , SGD2o (e.g., drain select gate signals).
  • select transistors 264, 265, and 266 of deck 215 0 may be selectively turned on (e.g., by selectively activating signals SGD0 0 , SGD1 0 , SGD2o) to selectively couple the memory cell strings of deck 215 0 to their respective data lines 270 0 , 271 0 , and 272 0 .
  • Select transistors 264, 265, and 266 of deck 215 0 may be selectively turned off (e.g., by selectively deactivating signals SGD0 0 , SGD1 0 , SGD2o) to selectively decouple the memory cell strings of deck 215 0 from their respective data lines 270 0 , 271 0 , and 272 0 .
  • signal SGD0 0 may be activated to turn on transistors 264 of deck 215o and couple memory cell strings 231, 234, and 237 of deck 215 0 to data lines 270 0 , 271 0 , and 272 0 , respectively.
  • signals SGD1o and SGD2o may be deactivated (while signal SGD0 0 is activated) to decouple memory cell strings 232, 235, 238, 233, 236, and 239 of deck 215 0 from data lines 270 0 , 271 0 , and 272 0 .
  • signal SGD1 0 may be activated to turn on transistors 265 and couple memory cell strings 232, 235, and 238 to data lines 270 0 , 271 0 , and 272 0 , respectively.
  • Signals SGD0 0 and SGD2 0 can be deactivated (while signal SGD1 0 is activated) to decouple memory cell strings 231, 234, 237, 233, 236, and 239 from data lines 270 0 , 271 0 , and 272 0 .
  • deck 215 1 includes elements similar to those of deck 215 0 .
  • deck 215 1 may include memory cell strings 231 through 239, select transistors 261, 262, 263, 264, 265, and 266, select line (e.g., source select line) 280 1 and corresponding signal SGS 1 (e.g., source select gate signal), line 299 1 (e.g., source line) and corresponding signal SRC 1 (e.g., source line signal), select lines (e.g., drain select lines) 284 1 , 285 1 , and 286 1 and corresponding signals SGD0 1 , SGD1 1 , SGD2 1 (e.g., drain select gate signals).
  • select line e.g., source select line
  • SGS 1 e.g., source select gate signal
  • line 299 1 e.g., source line
  • SRC 1 e.g., source line signal
  • select lines e.g., drain select lines
  • Each of decks 215 0 and 215 1 may include memory cell blocks in which each of the memory cell blocks includes memory strings.
  • deck 215o may include memory cell block 290, which includes memory cell strings 231 through 239 in deck 215 0
  • deck 215 1 may include memory cell block 291, which includes memory cell strings 231 through 239 in deck 215 1 .
  • Memory cell block 290 corresponds to one of memory cell blocks 190 of FIG. 1 .
  • Memory cell block 291 corresponds to one of memory cell blocks 191 of FIG. 1 .
  • FIG. 2 shows each of memory cell blocks 290 and 291 including nine memory cell strings (e.g., 231 through 239) as an example. The number of memory cell strings in memory cell blocks 290 and 291 may vary.
  • a memory cell block (e.g., 290 or 291) of a memory device (e.g., 200) described herein is a group of memory cells (e.g., 210, 211, 212, and 213) in which fewer than all of the memory cells (or alternatively all of the memory cells) in the group of memory cells (memory cell block) may be selected as selected memory cells to store information in (e.g., in a write operation) or read information from (e.g., in a read operation) the selected memory cells. However, fewer than all of the memory cells in the group of memory cells (e.g., only memory cells have stored information) may not be selected as selected memory cells to erase information from the selected memory cells (e.g., in an erase operation).
  • a memory cell block includes memory cells in which fewer than all of the memory cells (or alternatively all of the memory cells) may be selected during a read or write operation. However, in an erase operation, all of the memory cells in the memory cell block (memory cells in entire memory cell block) are selected.
  • Memory cell block 290 may include a unique block address (block-level address) within deck 215 0 .
  • Memory cell block 291 may include a unique block address (block-level address) within deck 215 1 .However, memory cell blocks 290 and 291 may include the same block address (same block-level address).
  • memory cell block 290 may include a block address BK-29 (for example) that is unique among block addresses of memory cell blocks of deck 215 0
  • memory cell block 291 may also include block address BK-29 but that is unique among block addresses of memory cell blocks of deck 215 1 .Decks 215 0 and 215 1 have different deck addresses (deck-level addresses).
  • memory cell blocks 290 and 291 may be selected based on block-level address and deck-level address. Since memory cell blocks 290 and 291 may have the same block address, memory cell blocks 290 and 291 can be concurrently selected during a memory operation based on an address information. This may simplify row access circuitry, column access circuitry, both row and column access circuitry of memory device 200.
  • Memory device 200 may include different modes of operations, including a single deck mode and multi-deck (e.g., double deck) mode. Memory device may perform a single deck operation in the single deck mode and a multi-deck (e.g., double deck) operation in the multi-deck mode. Address information received by memory device 200 during a particular memory operation is decoded to determine whether that particular mode of operation is single deck mode (in order to perform a single deck operation) or multi-deck mode (in order to perform a multi-deck operation). Memory device 200 may include an address register (not shown in FIG. 2 , but it may be similar to address register 107 of FIG. 1 ) to receive address information. Decoding of the address information (e.g., decoded by row decoder 249) provides information for single deck operation or multi-deck operation.
  • a single deck mode and multi-deck (e.g., double deck) mode may perform a single deck operation in the single deck mode and a multi-deck (e.g., double deck) operation in the multi-deck mode. Address
  • one of decks 215o and 215 1 may be selected (e.g., accessed) while the other deck may not be selected (e.g., unselected or not accessed).
  • memory cell block 290 of decks 215o is selected to access and operate on memory cells in block 290 while memory cell block 291 of deck 215 1 is unselected, such that memory cells in memory cell block 291 may not be accessed.
  • memory device 200 may operate to establish (to form) circuit paths (e.g., current paths) between data lines 270 0 , 271 0 , and 272 0 of memory cell block 290 and buffer circuits 220 (e.g., through conductive paths 257 0 ) if memory cell block 290 is selected during a memory operation (e.g., read or write operation) to access memory cells (e.g., selected memory cells of selected memory cell strings) of memory cell block 290. In this example, memory cell block 291 is unselected. Thus, memory device 200 may establish no circuit paths (e.g., establish no current paths) between data lines 270 1 , 271 1 , and 272 1 of memory cell block 291 and buffer circuits 221.
  • circuit paths e.g., current paths
  • decks 215o and 215 1 may be concurrently selected (e.g., concurrently accessed).
  • memory cell blocks 290 and 291 are concurrently selected to access and operate on memory cells in memory cell blocks 290 and 291.
  • memory device 200 may operate to establish circuit paths (e.g., current paths) between data lines 270 0 , 271 0 , and 272 0 of memory cell block 290 and buffer circuits 220 (e.g., through conductive paths 257 0 ). In this example, memory device 200 may also establish circuit paths (e.g., current paths) between data lines 270 1 , 271 1 , and 272 1 of memory cell block 291 and buffer circuits 221(e.g., through conductive paths 257 1 ).
  • circuit paths e.g., current paths
  • Row decoder 249 operates to decode address information (from an address register of memory device 200) to obtain decoded row address information.
  • a particular operation of memory device 200 may be a single deck operation or a multi-deck operation based on the decoded row address information.
  • Row decoder 249 can operate to activate only one of driver circuits 240 and 241 (e.g., to access and operate on memory cells of only one of memory cell blocks 290 and 291) if the operation is a single deck operation.
  • Row decoder 249 can operate to activate both driver circuits 240 and 241 (e.g., to access and operate on memory cells in of both memory cell blocks 290 and 291) if the operation is a multi-deck operation.
  • Memory device 200 provides control information (e.g., commands) to level decoder 219 based on address information.
  • control information includes information for a single deck operation or multi-deck operation.
  • Level decoder 219 may decode such control information in order to activate buffer circuits 220 and 221 accordingly. For example, if the operation is a single deck operation (e.g., based on only one of the addresses of deck 215 0 and deck 215 1 being decoded), level decoder 219 operates to activate only one of buffer circuits 220 and 221. If the operation is a multi-deck operation (e.g., based on the addresses of both of decks 215 0 and 215 1 being decoded), level decoder 219 operates to activate both buffer circuits 220 and 221.
  • memory cell block 290 of deck 215o may be selected while memory cell block 291 of deck 215 1 is unselected (not selected).
  • memory device 200 may not operate on memory cells 210, 211, 212, and 213 of memory cell block 291.
  • Memory device 200 may operate on memory cells 210, 211, 212, and 213 of memory cell block 290 to store information in selected memory cells of memory cell block 290 (e.g., if the operation is a write operation), read information from selected memory cells of memory cell block 290 (e.g., if the operation is a read operation), or erase information from selected memory cells (e.g., all of memory cells) of memory cell block 290 (e.g., if the operation is an erase operation).
  • row decoder 249 activates driver circuit 240 (e.g., by activating signal DR_LO) and may not activate driver circuits 241 (e.g., by not activating (e.g., deactivating) signal DR_UP).
  • Level decoder 219 may activate buffer circuits 220 (e.g., by activating signal BL_LO) and may not activate buffer circuits 221 (e.g., by not activating (e.g., deactivating) signal BL_UP). Then, information may be stored in memory cell block 290 (if the operation is a write operation) or read from memory cell block 290 (if the operation is a read operation) of deck 215 0 using buffer circuits 220 (the activated buffer circuits in this example), conductive paths 257 0 , and data lines 270 0 , 271 0 , and 272 0 .
  • deck 215 1 may be selected while deck 215o is unselected.
  • row decoder 249 may activate driver circuit 241 (e.g., by activating signal DR_UP) and may not activate driver circuit 240 (e.g., by not activating (e.g., deactivating) signal DR_LO).
  • Level decoder 219 may activate buffer circuits 221 (e.g., by activating signal BL_UP) and may deactivate buffer circuits 220 (e.g., by not activating (e.g., deactivating) signal BL_LO).
  • information may be stored in memory cell block 291 (if the operation is a write operation) or read from memory cell block 291 (if the operation is a read operation) of deck 215 1 using buffer circuits 221 (the activated buffer circuits in this example), conductive paths 257 1 , and data lines 270 1 , 271 1 , and 272 1 .
  • memory cell blocks 290 and 291 of decks 215o and 215 1 may be concurrently selected (e.g., selected at the same time based on the same block address) to operate on memory cells 210, 211, 212, and 213 of memory cell blocks 290 and 291.
  • memory device 200 may access and operate on memory cells 210, 211, 212, and 213 of memory cell blocks 290 and 291 to store information in selected memory cells of memory cell blocks 290 and 291 (e.g., if the operation is a write operation), read information from selected memory cells of memory cell blocks 290 and 291 (e.g., if the operation is a read operation), or erase information from selected memory cells (e.g., all of memory cells) of memory cell blocks 290 and 291 (e.g., if the operation is an erase operation).
  • selected memory cells of memory cell blocks 290 and 291 e.g., if the operation is a write operation
  • read information from selected memory cells of memory cell blocks 290 and 291 e.g., if the operation is a read operation
  • erase information from selected memory cells e.g., all of memory cells of memory cell blocks 290 and 291 (e.g., if the operation is an erase operation).
  • row decoder 249 may activate (e.g., concurrently activate) driver circuits 240 and 241 (e.g., by concurrently activating signals DR_LO and DR_UP).
  • Level decoder 219 may activate (e.g., concurrently activate) buffer circuits 220 and 221 (e.g., by concurrently activating signals BL_LO and BL_UP (which can be based on deck address being decoded).
  • information may be concurrently provided to memory cell blocks 290 and 291 (to be stored in selected memory cells in memory cell blocks 290 and 291) or concurrently read from memory cell blocks 290 and 291 using respective buffer circuits (220 and 221), respective conductive paths (257o and 257 1 ), and respective data lines (270 0 , 271 0 , 272 0 , 270 1 , 271 1 , and 272 1 ) associated with memory cell blocks 290 and 291.
  • memory device 200 includes separate data lines for different decks (e.g., data lines 270 0 , 271 0 , and 272o for deck 215 0 , and data lines 270 1 , 271 1 , and 272 1 for deck 215 1 ), separate (e.g., dedicated) driver circuits for different decks (e.g., driver circuits 240 and 241 for decks 215o and 215 1 , respectively), and separate (e.g., dedicated) buffer circuits for different decks (e.g., buffer circuits 220 and 221 for decks 215 0 and 215 1 , respectively).
  • the elements and operations of memory device 200, as described above, may allow it to have improvements over some conventional memory devices.
  • throughput (e.g., for read, write, and erase operation) of memory device 200 may be higher than throughput of some conventional memory devices.
  • throughput of memory device 200 may be two times higher (double) if memory device 200 includes two decks (e.g., 215o and 215 1 ), four times higher (quadruple) if memory device 200 includes four decks, or eight times higher if memory device 200 includes eight decks.
  • driver circuits e.g., 240 and 241
  • decks e.g., 215 0 and 215 1
  • separate data lines for different decks in memory device 200 may allow it to have a lower capacitance (e.g., coupling capacitance) and a smaller block size (lower storage capacity for each memory cell block).
  • FIG. 3 shows a schematic diagram of a portion of the memory device 200 of FIG. 2 including details of driver circuits 240 and 241 of FIG. 2 and buffer circuits 220 and 221 of FIG. 2 , according to some embodiments described herein.
  • driver circuit 240 includes transistors (e.g., high-voltage drive transistor) T0.
  • Transistors T0 has a transistor gate 340 (e.g., a common gate, which is common to transistors T0).
  • transistors T0 is controlled (e.g., turned on at the same time or turned off at the same time) using the same transistor gate (e.g., transistor gate 340).
  • Driver circuit 241 can include transistors (e.g., high-voltage drive transistor) T1.
  • Transistors T1 has a transistor gate 341 (e.g., a common gate, which is common to transistors T1 and different from transistor gate 340). Thus, transistors T1 is controlled (e.g., turned on at the same time or turned off at the same time) using the same transistor gate (e.g., transistor gate 341).
  • transistor gate 341 e.g., a common gate, which is common to transistors T1 and different from transistor gate 340.
  • transistors T1 is controlled (e.g., turned on at the same time or turned off at the same time) using the same transistor gate (e.g., transistor gate 341).
  • Memory device 200 includes conductive lines 350, 351, 352, 353, and 354 through 354i, each of which may carry a signal (e.g., voltage signal, which is different from a data signal).
  • conductive lines 350, 351, 352, and 353 may carry signals (e.g., voltage signal) V0, V1, V2, and V3, respectively.
  • transistors T0 are coupled between conductive lines 350, 351, 352, and 353 and access lines 250 0 , 251 0 , 252 0 , and 253 0 , respectively.
  • transistors T1 are coupled between conductive lines 350, 351, 352, and 353 and access lines 250 1 , 251 1 , 252 1 , and 253 1 , respectively.
  • FIG. 3 omits connections (conductive connections) between some elements of deck 215o and conductive lines 354 through 354i.
  • Such connections include connections between conductive lines 354 through 354i and select line (e.g., source select line) 280 0 , select lines (e.g., drain select lines) 284 0 , 285 0 , and 286 0 , and line (e.g., source line) 299 0 of deck 215 0 .
  • select line e.g., source select line
  • select lines e.g., drain select lines
  • line e.g., source line
  • Such connections include connections between conductive lines 354 through 354i and select line (e.g., source select line) 280 1 , select lines (e.g., drain select lines) 284 1 , 285 1 , and 286 1 , and line (e.g., source line) 299 1 of deck 215 1 .
  • select line e.g., source select line
  • select lines e.g., drain select lines
  • line e.g., source line
  • Driver circuit 240 may use transistors T0 to provide (e.g., drive) signals from conductive lines 350, 351, 352, 353, and 354 through 354i to respective elements of deck 215 0 .
  • driver circuit 240 may use four of transistors T0 to provide signals V0, V1, V2, and V3 from four corresponding conductive lines 350, 351, 352, and 353 to four access lines 250 0 , 251 0 , 252 0 , and 253 0 , respectively.
  • Driver circuit 241 may use transistors T1 to provide (e.g., drive) signals from conductive lines 350, 351, 352, 353, and 354 through 354i to respective elements of deck 215 1 .
  • driver circuit 241 can use four of transistors T1 to provide signals V0, V1, V2, and V3 from four corresponding conductive lines 350, 351, 352, and 353 to four access lines 250 1 , 251 1 , 252 1 , and 253 1 , respectively, of deck 215 1 .
  • transistor gates 340 and 341 are separate from each other.
  • driver circuits 240 and 241 separately use transistor gates 340 and 341 (e.g., separately activate respective signals DR_LO and DR_UP) to control (e.g., turn on or turn off) transistors T0 and T1.
  • DR_LO may be activated (e.g., by row decoder 249) while signal DR_UP is not activated (e.g., deactivated).
  • transistors T0 may be turned on while transistors T1 are turned off in order to establish circuit paths (e.g., current paths) between access lines 250 0 , 251 0 , 252 0 , and 253 0 of memory cell block 290 and conductive lines 350, 351, 352, and 353 (e.g., through transistors T0).
  • This allows signals V0, V1, V2, and V3 to be applied to access lines 250 0 , 251 0 , 252 0 , and 253 0 , respectively, (through turned-on transistors T0).
  • memory device 200 may establish no circuit paths (e.g., establish no current paths) between access lines 250 1 , 251 1 , 252 1 , and 253 1 of memory cell block 291 and conductive lines 350, 351, 352, and 353 (because transistors T1 are turned off).
  • no circuit paths e.g., establish no current paths
  • signals V0, V1, V2, and V3 are not applied to access lines 250 1 , 251 1 , 252 1 , and 253 1 .
  • signal DRL_UP may be activated (e.g., by decoder 249) while signal DR_LO is not activated (e.g., deactivated).
  • transistors T1 may be turned on while transistors T0 are turned off. This allows signals V0, V1, V2, and V3 to be applied to access lines 250 1 , 251 1 , 252 1 , and 253 1 respectively (through turned-on transistors T1). In this example, signals V0, V1, V2, and V3 are not applied to access lines 250 0 , 251 0 , 252 0 , and 253o because transistors T0 are turned off.
  • signals DR_LO and DRL_UP may be activated (e.g., by decoder 249).
  • transistors T0 and T1 are turned on (e.g., concurrently turned on). This allows signals V0, V1, V2, and V3 to be applied to access lines 250 0 , 251 0 , 252 0 , and 253 0 , respectively, and to access lines 250 1 , 251 1 , 252 1 , and 253 1 because transistors T0 and T1 are turned on.
  • memory device 200 includes a buffer circuit 320, a buffer circuit 321, and transistors 320a and 321a.
  • Buffer circuit 320 and transistor 320a can be part of buffer circuits 221 of FIG. 2 .
  • Buffer circuit 321 and transistor 321a may be part of buffer circuits 220 of FIG. 2 .
  • Buffer circuit 320 can include transistors (inside buffer circuit 320) that may be part of a sense amplifier of buffer circuit 320 (to sense information read from memory cells of memory cell strings 231, 232, and 233 of memory cell block 290) and part of a data latch of buffer circuit 320 to store (e.g., temporarily store) one bit (or multiple bits) of information read from memory cells of memory cell strings 231, 232, and 233 of memory cell block 290.
  • transistors inside buffer circuit 320
  • sense amplifier of buffer circuit 320 to sense information read from memory cells of memory cell strings 231, 232, and 233 of memory cell block 290
  • a data latch of buffer circuit 320 to store (e.g., temporarily store) one bit (or multiple bits) of information read from memory cells of memory cell strings 231, 232, and 233 of memory cell block 290.
  • buffer circuit 321 may include transistors (inside buffer circuit 321) that may be part of a sense amplifier of buffer circuit 321 (to sense information read from memory cells of memory cell strings 231, 232, and 233 of memory cell block 291) and part of a data latch of buffer circuit 321 to store (e.g., temporarily store) one bit (or multiple bits) of information read from memory cells of memory cell strings 231, 232, and 233 of memory cell block 291.
  • data lines 270 0 and 270 1 may be coupled to respective buffer circuits (e.g., 320 and 321) through different transistors (e.g., 320a and 321a).
  • This allows level decoder 219 to selectively activate signals BL_LO and BL_UP in order to selectively couple data lines 270o and 270 1 to their respective buffer circuits 320 and 321, depending on the mode of operation (e.g., single deck or multi-deck mode) of memory device 200.
  • signal BL_LO can be activated (e.g., by level decoder 219) while signal BL_UP is not activated (e.g., deactivated).
  • transistor 320a may be turned on while transistor 321a is turned off. This allows data line 270o to be coupled to buffer circuit 320 through turned-on transistor 320a. Then, information may be stored in or read from memory cell block 290 of deck 215o using buffer circuit 320 (the activated buffer circuit in this example). In this example, data line 270 1 is not coupled to buffer circuit 321 because transistor 321a is turned off.
  • signal BL_UP can be activated (e.g., by level decoder 219) while signal BL_LO is not activated (e.g., deactivated).
  • transistor 321a is turned on while transistor 320a is turned off. This allows data line 270 1 to be coupled to buffer circuit 321 through turned-on transistor 321a. Then, information may be stored in or read from memory cell block 291 of deck 215 1 using buffer circuit 321 (the activated buffer circuit in this example). In this example, data line 270o is not coupled to buffer circuit 320 because transistor 320a is turned off.
  • signals DR_LO and DRL_UP may be activated (e.g., concurrently activated by level decoder 219).
  • transistors 320a and 321a may be concurrently turned on. This allows data lines 270o and 270 1 to be coupled (e.g., concurrently coupled) to buffer circuits 320 and 321, respectively, through turned-on transistors 320a and 321a, respectively.
  • information may be currently provided to decks 215o and 215 1 (to be stored in respective memory cells of memory cell blocks 290 and 291) using corresponding buffer circuits 320 and 321, or information may be concurrently read from memory cell blocks 290 and 291 using corresponding buffer circuits 320 and 321.
  • data lines 270 0 and 270 1 may be coupled to respective buffer circuits (e.g., 320 and 321) through different transistors (e.g., 320a and 321a).
  • This allows level decoder 219 to selectively activate signals BL_LO and BL_UP in order to selectively couple data lines 270o and 270 1 to their respective buffer circuits 320 and 321, depending on the mode of operation (e.g., single deck or multi-deck mode) of memory device 200.
  • FIG. 3 shows buffer circuits (e.g., 320 and 321) and transistors (e.g., 320a and 321a) for data line 270 0 of deck 215 0 of data line 270 1 of deck 215 1 .
  • memory device 200 also have a buffer circuit (similar to buffer circuit 320 and or 321) and a transistor (similar to transistor 320a or 321a) for each of the other lines (e.g., data lines 271 0 and 272 0 in FIG. 2 ) of deck 215 0 and each of the other lines (e.g., data lines 271 1 and 272 1 in FIG. 2 ) of deck 215 1 .
  • memory device 200 of FIG. 3 may allow it to have improvements (e.g., a higher throughput, a smaller block size, and a lower capacitance) over some conventional memory devices, as mentioned above with reference the description of FIG. 2 .
  • FIG. 4 shows a layout of a portion of the memory device of FIG. 2 , according to some embodiments described herein.
  • memory device 200 includes a substrate 490, doped regions 410, 411, and 412 formed in substrate 490.
  • Substrate 490 may include a monocrystalline (also referred to as single-crystal) semiconductor material (e.g., single-crystal silicon).
  • the monocrystalline semiconductor material of substrate 490 may include impurities, such that substrate 490 may have a specific conductivity type (e.g., p-type).
  • Doped regions 410, 411, and 412 and substrate 490 may include materials of different conductivity types.
  • substrate 490 can include a semiconductor material of p-type
  • each of doped regions 410, 411, and 412 may include a semiconductor material of n-type.
  • Doped regions 410 and 412 may be sources and drains of transistors T0 of driver circuit 240, such that one of doped regions 410 and one of doped regions 412 may be the source and drain of one of transistors T0.
  • Doped regions 411 and 412 may be sources and drains of transistors T1 of driver circuit 241, such that one of doped regions 411 and one of doped regions 412 may be the source and drain of one of transistors T1.
  • transistor gate 340 may be located over a location (e.g., transistor channels of transistors T0) between doped regions 410 and 412.
  • Transistor gate 341 may be located over a location (e.g., transistor channels of transistors T1) between doped regions 411 and 412.
  • Each of transistor gates 340 and 341 may have a length extending in an x-dimension (which is perpendicular to the y and z dimensions).
  • Each of conductive lines 350, 351, 352, and 353 in FIG. 4 may have a length extending in the same direction as each of transistor gates 340 and 341.
  • Control gates 240 0 , 241 0 , 242 0 , and 243o may be formed as conductive plates and can have a staircase structure. Control gates 240 0 , 241 0 , 242 0 , and 243o may be coupled to respective doped regions 410 of driver circuit 240 through respective access lines 250 0 , 251 0 , 252 0 , and 253 0 . Control gates 240 1 , 241 1 , 242 1 , and 243 1 may be coupled to respective doped regions 411 of driver circuit 241 through respective access lines 250 1 , 251 1 , 252 1 , and 253 1 .
  • FIG. 4 shows access lines 250 0 , 251 0 , 252 0 , 253 0 , 250 1 , 251 1 , 252 1 , and 253 1 being simple lines for simplicity. In reality, each of these access lines has a length, a width, and a thickness relative to the x, y, and z dimensions.
  • FIG. 4 shows conductive connections between doped regions 412 and respective conductive lines 350, 351, 352, and 353 as simple lines for simplicity. In reality, each of these conductive connections has a length, a width, and a thickness relative to the x, y, and z dimensions.
  • transistor gates 340 and 341 are physically separated from each other. This allows memory device 200 to selectively activate signals DR-LO and DR_UP to selectively couple access lines 250 0 , 251 0 , 252 0 , and 253 0 (and control gates 240 0 , 241 0 , 242 0 , and 243 0 ) and access lines 250 1 , 251 1 , 252 1 , and 253 1 (and control gates 240 1 , 241 1 , 242 1 , and 243 1 ) to respective conductive lines 350, 351, 352, and 353 (to receive corresponding signals V0, V1, V2, and V3), depending on the mode of operation (e.g., single deck or multi-deck mode), as described above with reference to FIG. 2 and FIG. 3 .
  • mode of operation e.g., single deck or multi-deck mode
  • FIG. 5 shows a side view of a structure of a portion of memory device 200 of FIG. 2 , according to some embodiments described herein.
  • row decoder 249, driver circuits 240 and 241, level decoder 219, and buffer circuits 220 and 221 may be located in (e.g., formed in or formed on) substrate 490.
  • some or all of row decoder 249, driver circuits 240 and 241, level decoder 219, and buffer circuits 220 and 221 may be located outside substrate 490 (e.g., formed over substrate 490, such as formed in one or more of levels 521 through 528).
  • at least a portion of buffer circuits 220 and 221 may be formed outside substrate 490.
  • deck 215 0 may located (e.g., formed) over substrate 490 in the z-dimension.
  • Deck 215 1 may be located over deck 215 0 (e.g., stacked over deck 215 0 )
  • Memory device 200 may include a dielectric material 515 (e.g., electrical insulating material) between decks 215o and 215 1 .
  • memory cell strings 231, 232, and 233 may be arranged in the x-dimension, which is perpendicular to the z-dimension.
  • Each of data line 270o and 270 1 may have a length extending in the x-dimension.
  • Memory cells 210, 211, 212, and 213 of deck 215 0 may be located in different levels 521, 522, 523, and 524, respectively, of memory device 200 in the z-dimension.
  • Memory cells 210, 211, 212, and 213 of deck 215 1 may be respectively located in different levels 525, 526, 527, and 528 of memory device 200 in the z-dimension.
  • each of memory cell strings 231, 232, and 233 of decks 215o and 215 1 may include a pillar (e.g., a vertical body perpendicular to substrate 490) formed by pillar portions 506, 507, and 508 between a respective data line (270 0 or 270 1 ) and a respective line (e.g., source) 299 0 or 299 1 .
  • the pillar may be configured to provide a conduction of current (e.g., to form a conductive channel) between the respective data line (270 0 or 270 1 ) and a respective source (line 299 0 or 299 1 ).
  • Pillar portions 506 and each of pillar portions 507 and 508 may include materials of different conductivity types.
  • pillar portion 506 can include a semiconductor material of p-type
  • each of pillar portions 507 and 508 may include a semiconductor material of n-type.
  • the semiconductor material may include polycrystalline silicon (polysilicon).
  • control gates 240 0 , 241 0 , 242 0 , and 243o may be located along respective segments of pillar portion 506 of a pillar of a respective memory cell string among memory cell strings 231, 232, and 233.
  • Control gates 240 0 , 241 0 , 242 0 , and 243o may be located in the z-dimension in the same levels (e.g., 521, 522, 523, and 524) where memory cells 210, 211, 212, and 213 of deck 215o are located.
  • control gates 240 1 , 241 1 , 242 1 , and 243 1 may be located along respective segments of pillar portion 506 of a pillar of a respective memory cell string among memory cell strings 231, 232, and 233.
  • Control gates 240 1 , 241 1 , 242 1 , and 243 1 may be located in the z-dimension in the same levels (e.g., 525, 526, 527, and 528) where memory cells 210, 211, 212, and 213 of deck 215 1 are located.
  • Each of control gates 240 0 , 241 0 , 242 0 , 243 0 , 240 1 , 241 1 , 242 1 , and 243 1 may include a conductive material (e.g., conductively doped polycrystalline silicon or other conductive material).
  • a conductive material e.g., conductively doped polycrystalline silicon or other conductive material.
  • Each of decks 215o and 215 1 may include materials 503, 504, and 505.
  • materials 503, 504, and 505 for simplicity, the following description focuses on materials 503, 504, and 505 in deck 215 0 .
  • Deck 215 1 has similar arrangement for materials 503, 504, and 505.
  • material 505 may be formed between a pillar (formed by pillar portions 506, 507, and 508) of a corresponding memory cell string (231, 232, or 233) and select line (e.g., source select line) 280 0 .
  • Material 505 may be formed between a pillar (formed by pillar portions 506, 507, and 508) of a corresponding memory cell string (231, 232, or 233) and each of select lines (e.g., drain select lines) 284 0 , 285 0 , and 286 0 .
  • Material 505 may be used as a gate oxide for each of select transistors (e.g., source select transistors) 261, 262, and 263, and each of select transistors (e.g., drain select transistors) 264, 265, and 266.
  • the combination of materials 503, 504, 505 in deck 215 0 may be formed between pillar portion 506 of a corresponding pillar and each of control gates 240 0 , 241 0 , 242 0 , 243 0 .
  • the combination of materials 503, 504, 505 may form part of the structure of a memory cell (e.g., memory cell 210, 211, 212, or 213) of deck 215 0 .
  • the combination of materials 503, 504, and 505 may be part of a TANOS (TaN, Al 2 O 3 , Si 3 N 4 , SiO 2 , Si) structure of each of memory cells 210, 211, 212, and 213 of deck 215 0 and deck 215 1 .
  • material 503 may include a charge-blocking material or materials (e.g., a dielectric material such as TaN and Al 2 O) that is capable of blocking a tunneling of a charge.
  • material 504 may include a charge storage element (e.g., charge storage material or materials, such as Si 3 N 4 ) that may provide a charge storage function (e.g., trap charge) to represent a value of information stored in memory cells 210, 211, 212, or 213.
  • Material 505 may include a tunnel dielectric material or materials (e.g., SiO 2 ) that is capable of allowing tunneling of a charge (e.g., electrons).
  • material 505 may allow tunneling of electrons from pillar portion 506 to material 504 during a write operation and tunneling of electrons from material 504 to pillar portion 506 during an erase operation of memory device 200. Moreover, material 505 may allow tunneling of holes from pillar portion 506 to portion 504, compensating the trapped electron's recombination during an erase operation of memory device 200.
  • the combination of materials 503, 504, and 505 can be part of a SONOS (Si, SiO 2 , Si3N 4 , SiO 2 , Si) structure of each of memory cells 210, 211, 212, and 213) of deck 215 0 and deck 215 1 .
  • the combination of materials 503, 504, and 505 may be part of a floating gate structure of each of memory cells 210, 211, 212, and 213 of deck 215 0 and deck 215 1 .
  • data line 270 0 are be coupled (e.g., directly coupled) to buffer circuit 220 through (e.g., directly through) a conductive path 570 0 , which is included in one of conductive paths 257 0 ( FIG. 2 ).
  • Conductive path 570o may be considered as part of data line 270 0 , such that the material of conductive path 570 0 may directly contacts the material of data line 270 0 .
  • Data line 270 1 are coupled (e.g., directly coupled) to buffer circuit 221 through (e.g., directly through) a conductive path 570 1 , which includes portions 570A and 570B.
  • Conductive path 570 1 is included in one of conductive paths 257 1 ( FIG. 2 ).
  • Conductive path 570 1 may be considered as part of data line 270 1 , such that the material of conductive path 570 1 directly contacts the material of data line 270 1 .
  • Each of conductive paths 570o and 570 1 may include a conductive material (or conductive materials) that is located (e.g., formed) over substrate 490, such as conductively doped polycrystalline silicon, metal, or other conductive materials.
  • Portions 570A and 570B may be formed either at the same time (e.g., in the same deposition process) or at different times (e.g., in different deposition processes).
  • Portion 570A may be formed (e.g., formed in a process) before Portion 570B is formed (e.g., formed in another process).
  • portion 570A may be formed when conductive path 570 0 is formed (e.g., when deck 215o is formed), then portion 570B may be formed (e.g., formed when deck 215 1 is formed) after conductive path 570o and portion 570A are formed.
  • conductive paths 570 0 and 570 1 are physically separated from each other (e.g., electrically unconnected to each other), and data lines 270o and 270 1 are separately coupled to buffer circuits 220 and 221 through conductive paths 570 0 and 570 1 , respectively.
  • conductive paths 570o and 570 1 are not shared by memory cell blocks 290 and 291. This allows memory device 200 to operate in either a single deck operation or multi-deck operation, as described above with reference to FIG. 2 , FIG. 3 , and FIG. 4 .
  • Each of other data lines (271 0 and 272 0 ) of deck 215o and data lines (e.g., 271 1 and 272 1 ) of deck 215 1 also includes a conductive path similar to conductive paths 570 0 and 570 1 .
  • memory device 200 includes two conductive paths (similar to conductive path 570 0 ) coupled to respective data lines 271 0 and 272 0 and two conductive paths (similar to conductive path 570 1 ) coupled to respective data lines 271 1 and 272 1 .
  • FIG. 6 shows a schematic diagram of a memory device 600 including multiple decks having shared access lines 250, 251, 252, and 253, and separate data lines 270 0 , 271 0 , 272 0 , 270 1 , 271 1 , and 272 1 , according to some embodiments described herein.
  • memory device 600 includes elements similar to those of memory elements of memory device 200 of FIG. 2 . Thus, for simplicity, similar or identical elements are given the same designation labels and their descriptions are not repeated here.
  • memory device 600 may include a row decoder 649, a driver circuit 643, a level decoder 619, a driver circuit (e.g., a level driver circuit) 629, and buffer circuits 623.
  • Decks 215o and 215 1 access lines 250, 251, 252, and 253.
  • Memory device 600 may use driver circuit 643 to access both decks 215o and 215 1 through access lines 250, 251, 252, and 253.
  • Row decoder 649 may generate a signal DR to control driver circuit 643.
  • Level decoder 619 may generate signals BL-LO and BL_UP (to control buffer circuits 623) and information (e.g., signals) CTL to control driver circuit 629.
  • Driver circuits 629 can be used to provide (e.g., drive) signals (e.g., voltage signals) to respective select lines 280 0 and 280 1 and lines (e.g., sources) 299 0 and 299 1 .
  • FIG. 7 shows a schematic diagram of a portion of memory device 600 of FIG. 6 including details of driver circuit 643 and buffer circuits 623 of FIG. 6 , according to some embodiments described herein.
  • driver circuit 643 includes transistors (e.g., high-voltage drive transistor) T2.
  • Transistors T2 has a transistor gate 743 (e.g., a common gate, which is common to drive transistors T2).
  • transistors T2 is controlled (e.g., turned on at the same time or turned off at the same time) using the same transistor gate (e.g., transistor gate 743).
  • Conductive lines 350, 351, 352, 353, and 354 through 354i are similar to those described above with reference to FIG. 3 .
  • some (e.g., four) of transistors T2 is coupled between conductive lines 350, 351, 352, and 353 and access lines 250, 251, 252, and 253, respectively.
  • FIG. 7 omits connections (conductive connections) between some elements of deck 215 0 and conductive lines 354 through 354i.
  • Such connections include connections between conductive lines 354 through 354i and select lines (e.g., drain select lines) 284 0 , 285 0 , 286 0 , 284 1 , 285 1 , and 286 1 .
  • Driver circuit 643 uses transistors T2 to provide (e.g., drive) signals from conductive lines 350, 351, 352, 353, and 354 through 354i to respective elements of decks 215o and 215 1 .
  • driver circuit 643 may use four of transistors T2 to provide signals V0, V1, V2, and V3 from four corresponding conductive lines 350, 351, 352, and 353 to four access lines 250, 251, 252, and 253, respectively.
  • driver circuit 643 may activate signal DR to turn on transistors T2. This allows signals V0, V1, V2, and V3 to be applied to access lines 250, 251, 252, and 253, respectively (through turned-on transistors T2).
  • Memory device 600 can operate on memory cells of the selected deck (e.g., either deck 215 0 or 251 1 ) to store information in or read information from selected memory cells of the selected deck (e.g., if the operation is a write or read operation), or erase information from selected memory cells (e.g., all of memory cells) of memory cell block 290 (e.g., if the operation is an erase operation).
  • memory device 200 may include a buffer circuit 723, and transistors 733 0 and 733 1 .
  • Buffer circuit 723 and transistors 733o and 733 1 may be part of buffer circuits 623 of FIG. 6 .
  • Data lines 270o and 270 1 may be coupled to buffer circuit 723 through transistors 733o and 733 1 , respectively.
  • Driver circuits 629 may include transistors (e.g., high-voltage drive transistors, not shown in FIG. 7 ) similar to transistors T2 in order to control the values (e.g., voltage values) of signals (e.g., voltage signals) provided to select lines 280o and 280 1 and lines (e.g., sources) 299o and 299 1 during operations of memory device 600.
  • transistors e.g., high-voltage drive transistors, not shown in FIG. 7
  • signals e.g., voltage signals
  • Memory device 600 may provide control information (e.g., commands) to level decoder 619 based on address information received during a memory operation (e.g., read, write, or erase operation) of memory device 600.
  • Level decoder 619 decodes such control information in order to selectively activate signals BL_LO and BL_UP to selectively turn on transistors 733 0 and 733 1 .
  • Level decoder 619 may also provide information CTL to driver circuit 629, such that driver circuit 629 may control the values of signals provided to select lines 280o and 280 1 and lines 299o and 299 1 during operations of memory device 600 (described in more detail below with reference to FIG. 8 ).
  • row decoder 649 may activate driver circuit 643 (e.g., by activating signal DR) to access memory cells 210, 211, 212, and 213 of selected memory cell strings of memory cell block 290.
  • Level decoder 619 may activate signal BL_LO (and not activate signal BL_UP) to turn on transistor 733o in order to couple data line 270o to buffer circuit 723.
  • level decoder 619 may not activate signal BL_UP to keep off (or turn off) transistor 733 1 while transistor 733 0 is turned on, thereby not coupling data line 270 1 to buffer circuit 723 while data line 270o is coupled to buffer circuit 723. Then, information may be stored in or read from memory cell block 290 of deck 215 0 using buffer circuit 723.
  • row decoder 649 may activate driver circuit 643 (e.g., by activating signal DR) to access memory cells 210, 211, 212, and 213 of selected memory cell strings of memory cell block 291.
  • Level decoder 619 can activate signal BL_UP (and not activate signal BL_LO) to turn on transistor 733 1 in order to couple data line 270 1 to buffer circuit 723.
  • level decoder 619 may not activate signal BL_LO to keep off (or turn off) transistor 733 0 while transistor 733 1 is turned on, thereby not coupling data line 270o to buffer circuit 723 while data line 270 1 is coupled to buffer circuit 723. Then, information may be stored in or read from memory cell block 291 of deck 215 1 using buffer circuit 723.
  • information CTL may have values to cause driver circuit 629 to provide select lines 280o and 280 1 with different voltages and lines 299o and 299 1 with different voltages (e.g., voltages shown in FIG. 8 ). Some other signals of decks 215o and 215 1 may also be provided with voltage shown in FIG. 8 .
  • driver circuits 629 may include transistors (e.g., high-voltage drive transistors, not shown in FIG. 7 ) similar to transistors T2 in order to control the values (e.g., voltage values) of signals (e.g., voltage signals) applied to select lines 280 0 and 280 1 and lines (e.g., sources) 299 0 and 299 1 during operations of memory device 600.
  • transistors e.g., high-voltage drive transistors, not shown in FIG. 7
  • signals e.g., voltage signals
  • memory device 600 includes conductive paths 780o and 780 1 coupled to select lines (e.g., source select lines) 280o and 280 1 , respectively.
  • Conductive paths 780 0 and 780 1 are coupled to driver circuit 629.
  • Conductive paths 780o and 780 1 are separate from each other (e.g., electrically unconnected to each other).
  • driver circuit 629 may provide (e.g., apply) signals SGS 0 and SGS 1 with voltages having different values (e.g., as shown in chart 600A of FIG. 8 ), depending on which of decks 215o and 215 1 is selected.
  • driver circuit 629 may couple line 280 0 to a conductive line (not shown in FIG. 6 ) through a transistor (not shown in FIG. 6 ) and line 280 1 to another conductive line (not shown in FIG. 6 ) through another transistor (not shown in FIG. 6 ).
  • the conductive lines (that are coupled to lines 280o and 280 1 through the transistors in driver circuit 629) in this example may be provided with voltages having different values.
  • memory device 600 may include conductive paths 799o and 799 1 are coupled to lines (e.g., sources) 299o and 299 1 , respectively. Conductive paths 799o and 799 1 are coupled to driver circuit 629. Conductive paths 799o and 799 1 are separate (e.g., electrically uncoupled) from each other.
  • driver circuit 629 may provide (e.g., apply) signals SRC 0 and SRC 1 with voltages having different values (e.g., as shown in chart 600A of FIG. 8 ), depending on which of decks 215 0 and 215 1 is selected.
  • driver circuit 629 may couple line 299o to a conductive line (not shown in FIG. 6 ) through a transistor (not shown in FIG. 6 ) and line 299 1 to another conductive line (not shown in FIG. 6 ) through another transistor (not shown in FIG. 6 ).
  • the conductive lines that are coupled to lines 299 0 and 299 1 through the transistors in driver circuit 629) in this example may be provided with voltages having different values.
  • FIG. 8 is a chart 600A showing example voltages applied to some signals of memory device 600 in FIG. 6 and FIG. 7 during read, write, and erase operations of memory device 600, according to some embodiments described herein.
  • Some of the signals of memory device 600 in FIG. 6 and FIG. 7 e.g., WL0 0 , WL1 0 , WL2 0 , WL3 0 , WL0 1 , WL1 1 , WL2 1 , and WL3 1
  • the omitted signals can be provided with voltages known to those skilled in the art.
  • FIG. 8 shows example voltages applied to some signals of memory device 600 in FIG. 6 and FIG. 7 during read, write, and erase operations of memory device 600, according to some embodiments described herein.
  • Some of the signals of memory device 600 in FIG. 6 and FIG. 7 e.g., WL0 0 , WL1 0 , WL2 0 , WL3 0 , WL0 1 , WL
  • the signal (BL0 0 ) from only one of data lines 270 0 , 271 0 , and 272 0 ) and the signal (BL0 1 ) from only one of data lines 270 1 , 271 1 , and 272 1 ) are shown.
  • Voltage Vss in FIG. 8 may have a value of 0V (e.g., ground potential).
  • Voltage Vcc may be a supply voltage of memory device 600 ( FIG. 6 and FIG. 7 ).
  • Voltage Vbl may have a value (e.g., either a pre-charge voltage value or a sensed value) depending on the value of information stored in the selected memory cell.
  • Voltage Verase may have relatively high value (e.g., 20V) to allow erasing of information stored in memory cell of a selected memory cell block (e.g., 290 or 291 in FIG. 6 ).
  • Voltage Vy may have a relatively low value (e.g., 3V to 5V). In FIG.
  • “FLOAT” indicates a state (e.g., a "float state”) situation where a particular conductive line (or signal on that particular conducive line) is decoupled from a bias voltage (decoupled from direct current (DC) voltage source).
  • This decoupling allows the value of the voltage of that particular conductive line (or signal on that particular conducive line) to vary.
  • line 299 1 that carry signal SRC 1
  • deck 215 1 unselected deck
  • information CTL may be provided with a value to cause driver circuit 629 in FIG.
  • driver circuit 629 coupled between line 299 0 and a conductive line (not shown in FIG. 7 ) that is used to provide a voltage to line 299 1 (through driver circuit 629) if deck 215 1 is selected.
  • either deck 215 0 or deck 215 1 may be selected in a read, write, or erase operation to operate on memory cells 210, 211, 212, and 213 of selected memory cell strings of memory cell block 290 or 291.
  • both deck 215o and deck 215 1 may be selected (e.g., concurrently selected) to operate on memory cells 210, 211, 212, and 213 of selected memory cell strings of memory cell blocks 290 and 291.
  • memory device 600 may allow it to have improvements over some conventional memory devices. For example, smaller block size may be achieved by the separate data lines of decks 215o and 215 1 .
  • the signal on the source (e.g., SRC 0 or SRC 1 ) of the unselected deck is provided with voltage Vss (e.g., grounded) and the signal (e.g., BL0 0 or BL0 1 ) on the data line of the unselected deck is placed in a float state.
  • Vss voltage
  • This may also cause the channels of the memory cell strings of the unselected deck (e.g., channels similar to the channels in pillar portions 506, 507, and 508 in FIG. 5 ) of memory device 600 to be in a float state. Therefore, it may help reduce the capacitances on the control gates (e.g., control gates 240 0 , 241 0 , 242 0 , and 243 0 or control gates 240 1 , 241 1 , 242 1 , and 243 1 ) of the unselected deck. It may also help reduce power consumption in memory device 600.
  • control gates e.g., control gates 240 0 , 241 0 , 242 0 , and 243 0 or control gates 240 1 , 241 1 , 242 1 , and 243 1
  • gate-induce drain leakage may be generated only in the selected deck and the channels of the memory cell strings of the unselected deck are in a float state (based on chart 600A).
  • capacitances on the control gates of the unselected deck may be reduced (e.g., relatively small). This may help reduce (or eliminate) the occurrence of soft-program or erasing of some or all of memory cells in the unselected deck.
  • FIG. 9 shows a schematic diagram of a portion of memory device 900, which can be a variation of memory device 600 of FIG 6 and FIG. 7 , according to some embodiments described herein.
  • memory device 900 can include elements similar to those of memory elements of memory device 600 of FIG. 7 . Thus, for simplicity, similar or identical elements are given the same designation labels and their descriptions are not repeated here.
  • Differences between memory devices 600 and 900 include buffer circuits 920 and 921 of FIG. 9 .
  • data lines 270o and 270 1 may share buffer circuit 733.
  • data lines 270o and 270 1 can be coupled to separate buffer circuits 920 and 921.
  • Memory device 900 can perform a single deck operation in a single deck mode and a multi-deck operation in a multi-deck mode.
  • a single deck operation of memory device 900 may be similar to the operation of memory device 600 described above with reference to FIG. 7 and FIG. 8 (e.g., one (not both) of memory cell blocks 290 and 291 may be selected in a read or write operation).
  • both memory cell blocks 290 and 291 may be selected (e.g., concurrently selected) to access and operate on memory cells 210, 211, 212, and 213 of memory cell blocks 290 and 291.
  • information is concurrently provided to memory cell blocks 290 and 291 (through buffer circuits 920 and 921, respectively) to be stored in selected memory cells in memory cell blocks 290 and 291, information may be concurrently read from memory cell blocks 290 and 291 (through buffer circuits 920 and 921), or information in memory cell blocks 290 and 291 may be concurrently erased.
  • Memory device 900 may have improvements over some conventional memory devices. Such improvements include improvements similar to those of memory device 600 described above with reference to FIG. 6 , FIG. 7 , and FIG. 8 . Further, since data lines 270 0 and 270 1 may be coupled to separate buffer circuits 920 and 921, memory device 900 can have a higher throughput (e.g., two times) than memory device 600. This may also allow memory device 900 to have a higher throughput than some conventional memory devices (e.g., two times or higher depending on the number of decks of memory device 900).
  • FIG. 10 is a chart 900A showing example voltages applied to some signals of memory device 900 of FIG. 9 during read, write, and erase operations of memory device 900, according to some embodiments described herein.
  • the erase operation in chart 900A may be the same as the erase operation in chart 600A ( FIG. 8 ).
  • the read and write operations for a single deck operation (e.g., where only one of decks 215 0 and 215 1 is selected at time) in chart 900A mayalso be the same as the read and write operations in chart 600A ( FIG. 8 ). However, as shown in chart 900A of FIG.
  • both decks 215 0 and 215 1 may be selected (e.g., selected in a multi-deck operation) in read and write operations, in which the same voltages can be provided to respective signals decks 215o and 215 1 .
  • Operating memory device 900 with voltages based on chart 900A may allow memory device 900 to have improvements mentioned above.
  • apparatuses e.g., memory devices 100, 200, 600, and 900
  • methods e.g., operating methods associated with memory devices 100, 200, 600, and 900, and methods (e.g., processes) of forming at least a portion of memory devices
  • methods e.g., processes of forming at least a portion of memory devices
  • An apparatus herein refers to, for example, either a device (e.g., any of memory devices 100, 200, 600, and 900) or a system (e.g., a computer, a cellular phone, or other electronic system) that includes a device such as any of memory devices 100, 200, 600, and 900.
  • a device e.g., any of memory devices 100, 200, 600, and 900
  • a system e.g., a computer, a cellular phone, or other electronic system
  • modules may include hardware circuitry, single and/or multi-processor circuits, memory circuits, software program modules and objects and/or firmware, and combinations thereof, as desired and/or as appropriate for particular implementations of various embodiments.
  • modules may be included in a system operation simulation package, such as a software electrical signal simulation package, a power usage and ranges simulation package, a capacitance-inductance simulation package, a power/heat dissipation simulation package, a signal transmission-reception simulation package, and/or a combination of software and hardware used to operate or simulate the operation of various potential embodiments.
  • a system operation simulation package such as a software electrical signal simulation package, a power usage and ranges simulation package, a capacitance-inductance simulation package, a power/heat dissipation simulation package, a signal transmission-reception simulation package, and/or a combination of software and hardware used to operate or simulate the operation of various potential embodiments.
  • Memory devices 100, 200, 600, and 900 may be included in apparatuses (e.g., electronic circuitry) such as high-speed computers, communication and signal processing circuitry, single or multi-processor modules, single or multiple embedded processors, multicore processors, message information switches, and application-specific modules including multilayer, multichip modules.
  • apparatuses e.g., electronic circuitry
  • apparatuses e.g., electronic circuitry
  • high-speed computers e.g., communication and signal processing circuitry
  • apparatuses e.g., electronic circuitry
  • apparatuses e.g., electronic circuitry
  • apparatuses e.g., electronic circuitry
  • apparatuses e.g., electronic circuitry
  • apparatuses e.g., electronic circuitry
  • Such apparatuses may further be included as subcomponents within a variety of other apparatuses (e.g., electronic systems), such as televisions, cellular telephones, personal computers (e.g., laptop computers, desktop computers, handheld computers, tablet computers, etc.), workstations, radios, video players, audio players (e.g., MP3 (Motion Picture Experts Group, Audio Layer 3) players), vehicles, medical devices (e.g., heart monitor, blood pressure monitor, etc.), set top boxes, and others.
  • other apparatuses e.g., electronic systems
  • televisions e.g., cellular telephones, personal computers (e.g., laptop computers, desktop computers, handheld computers, tablet computers, etc.), workstations, radios, video players, audio players (e.g., MP3 (Motion Picture Experts Group, Audio Layer 3) players), vehicles, medical devices (e.g., heart monitor, blood pressure monitor, etc.), set top boxes, and others.
  • MP3 Motion Picture Experts Group, Audio Layer 3
  • the embodiments described above with reference to FIG. 1 through FIG. 10 include apparatuses and methods using a substrate, a first memory cell block including first memory cell strings located over the substrate, first data lines coupled to the first memory cell strings, a second memory cell block including second memory cell strings located over the first memory cell block, second data lines coupled to the second memory cell strings, first conductive paths located over the substrate and coupled between the first data lines and buffer circuitry of the apparatus, and second conductive paths located over the substrate and coupled between the second data lines and the buffer circuitry, first word lines coupled to the first memory cells strings, second word lines coupled to the second memory cell strings, wherein the first memory cell block shares no word line with the second memory cell block, first transistors, each of the first transistors coupled to a respective word line of the first word lines, the first transistors including a first common gate, second transistors , each of the second transistors coupled to a respective word line of the second word lines, the second transistors including a second common gate different from the first common gate, and a decoder, based on address
  • a list of items joined by the term "at least one of” can mean any combination of the listed items. For example, if items A and B are listed, then the phrase "at least one of A and B" can mean A only; B only; or A and B. In another example, if items A, B, and C are listed, then the phrase "at least one of A, B and C" can mean A only; B only; C only; A and B (without C); A and C (without B); B and C (without A); or A, B, and C.
  • Each of items A, B, and C can include a single element (e.g., a circuit element) or a plurality of elements (e.g., circuit elements).

Description

    Background
  • Memory devices are widely used in computers and many electronic items to store information. A memory device has numerous memory cells. The memory device performs a write operation to store information in the memory cells, a read operation to read the stored information, and an erase operation to erase information (e.g., obsolete information) from some or all of the memory cells the memory device. Memory cells in a memory device are usually organized in memory cell blocks. A memory device has access lines to access the memory cell blocks during a memory operation (e.g., read, write, or erase operation). A memory device also has data lines to carry information (e.g., in the form of signals) to be stored in or read from the memory cell blocks. However, some conventional memory devices have the access lines and data lines structured in ways that may affect the efficiency (e.g., throughput) of the memory device. Therefore, such conventional memory devices may be unsuitable for some applications.
  • US 2014/369116 A1 discloses a method and an apparatus that includes first and second strings of vertically stacked memory cells, and first and second pluralities of vertically stacked data lines. A data line of the first plurality of data lines is coupled to the first string through a first select device. A data line of the second plurality of data lines is coupled to the second string through a second select device and is adjacent to the data lien coupled to the first string. Such an apparatus can be configured to couple the data line coupled to the first string to a shield potential during at least a portion of a memory operation involving a memory cells of the second string.
  • Summary
  • The invention is defined in appended independent apparatus claim 1 and independent method claim 5.
  • Brief Description of the Drawings
    • FIG. 1 shows a block diagram of an apparatus in the form of a memory device, according to some embodiments described herein.
    • FIG. 2 shows a block diagram of a portion of a memory device including decks of memory cell strings, separate access lines between the decks, and separate data lines between the decks, according to some embodiments described herein.
    • FIG. 3 shows a schematic diagram of a portion of the memory device of FIG. 2 including details of driver circuits and buffer circuits of the memory device of FIG. 2, according to some embodiments described herein.
    • FIG. 4 shows a layout of a portion of the memory device of FIG. 2, according to some embodiments described herein.
    • FIG. 5 shows a side view of a structure of a portion of the memory device of FIG. 2, according to some embodiments described herein.
    • FIG. 6 shows a schematic diagram of a memory device including decks memory cell strings, shared access lines between the decks, and separate data lines between the decks, according to some embodiments described herein.
    • FIG. 7 shows a schematic diagram of a portion of the memory device of FIG. 6 including details of a driver circuit and buffer circuits of the memory device of FIG. 6, according to some embodiments described herein.
    • FIG. 8 is a chart showing example voltages applied to some signals of the memory device of FIG. 6 and FIG. 7 during read, write, and erase operations, according to some embodiments described herein.
    • FIG. 9 shows a schematic diagram of a portion of a memory device, which can be a variation of the memory device of FIG. 7, according to some embodiments described herein.
    • FIG. 10 is a chart showing example voltages applied to some signals of the memory device of FIG. 9 during read, write, and erase operations, according to some embodiments described herein.
    Detailed Description
  • FIG. 1 shows a block diagram of an apparatus in the form of a memory device 100, according to some embodiments described herein. Memory device 100 includes a device portion 101 that includes a memory array (or multiple memory arrays) containing memory cells 102 arranged in decks, such as decks 1150 and 1151. In each of decks 1150 and 1151, memory cells 102 are arranged in memory cell blocks, such as memory cell blocks 190 in decks 1150 and memory cell blocks 191 in decks 1151. In the physical structure of memory device 100, decks 1150 and 1151 may be arranged vertically (e.g., stacked over each other) over a substrate (e.g., a semiconductor substrate) of memory device 100. FIG. 1 shows memory device 100 having two decks 1150 and 1151 and two memory cell blocks 190 and 191 in each of the decks, respectively, as an example. Memory device 100 may have more than two decks of memory cells and more than two memory cell blocks in each of the decks.
  • As shown in FIG. 1, memory device 100 includes access lines 150 (which may include word lines) and data lines (e.g., local data lines) 170 (which may include bit lines). Access lines 150 carry signals (e.g., word line signals) WL0 through WLm. Data lines 170 carry signals (e.g., bit line signals) BL00 through BLno and signals BL01 through BLn1. Memory device 100 uses access lines 150 to selectively access memory cells 102 of decks 1150 and 1151 and data lines 170 to selectively exchange information (e.g., data) with memory cells 102 of decks 1150 and 1151.
  • Memory device 100 may include an address register 107 to receive address information (e.g., address signals) ADDR on lines (e.g., address lines) 103. Memory device 100 may include row access circuitry 108 and column access circuitry 109 that can decode address information from address register 107. Based on decoded address information, memory device 100 may determine which memory cells 102 of deck 115o, deck 1151, both decks 1150 and 1151 are to be accessed during a memory operation. Memory device 100 may perform a read operation to read (e.g., sense) information (e.g., previously stored information) in memory cells 102 of deck 1150, deck 1151, or both decks 115o and 1151; or a write (e.g., programming) operation to store (e.g., program) information in memory cells 102 of deck 115o, deck 1151, or both decks 115o and 1151. Memory device 100 may also perform an erase operation to erase information from some or all of memory cells 102 of deck 1150, deck 1151, or both decks 1150and 1151.
  • Memory device 100 may use data lines 170 associated with signals BL00 through BLn0 to provide information to be stored in memory cells 102 of deck 1150, or obtain information read (e.g., sensed) from memory cells 102 of deck 1150. Similarly, memory device 100 may use the same data lines 170 associated with signals BL01 through BLn1 to provide information to be stored in memory cells 102 of deck 1151, or obtain information read (e.g., sensed) from memory cells 102 of deck 1151.
  • Memory device 100 may include a control unit 118 that can be configured to control memory operations of memory device 100 based on control signals on lines 104. Examples of the control signals on lines 104 include one or more clock signals and other signals (e.g., a chip enable signal CE#, a write enable signal WE#) to indicate which operation (e.g., read, write, or erase operation) memory device 100 can perform.
  • Memory device 100 includes buffer circuitry 120 that can include components such as sense amplifiers and page buffer circuits (e.g., data latches). Buffer circuitry 120 may respond to signals BL_SEL0 through BL_SELn from column access circuitry 109. Buffer circuitry 120 may be configured to determine (e.g., by sensing) the value of information read from memory cells 102 (e.g., during a read operation) of decks 115o and 1151 and provide the value of the information in the form of signals BL00 through BLno and signals BL01 through BLn1 to lines (e.g., global data lines) 175. Buffer circuitry 120 may also be configured to use signals on lines 175 to determine the value of information to be stored (e.g., programmed) in memory cells 102 of decks 115o and 1151 (e.g., during a write operation) based on the values (e.g., voltage values) of signals on lines 175 (e.g., during a write operation).
  • Memory device 100 may include input/output (I/O) circuitry 117 to exchange information between of decks 1150 and 1151 and lines (e.g., I/O lines) 105. Signals DQ0 through DQN on lines 105 may represent information read from or stored in memory cells 102 of decks 1150 and 1151. Lines 105 may include nodes within memory device 100 or pins (or solder balls) on a package where memory device 100 can reside. Other devices external to memory device 100 (e.g., a memory controller or a processor) may communicate with memory device 100 through lines 103, 104, and 105.
  • Memory device 100 may receive a supply voltage, including supply voltages Vcc and Vss. Supply voltage Vss may operate at a ground potential (e.g., having a value of approximately zero volts). Supply voltage Vcc may include an external voltage supplied to memory device 100 from an external power source such as a battery or an alternating current to direct current (AC-DC) converter circuitry.
  • Each of memory cells 102 may be programmed to store information representing a value of a fraction of a bit, a value of a single bit, or a value of multiple bits such as two, three, four, or another number of bits. For example, each of memory cells 102 may programmed to store information representing a binary value "0" or "1" of a single bit. The single bit per cell is sometimes called a single level cell. In another example, each of memory cells 102 may be programmed to store information representing a value for multiple bits, such as one of four possible values "00", "01", "10", and "11" of two bits, one of eight possible values "000", "001", "010", "011", "100", "101", "110", and "111" of three bits, or one of other values of another number of multiple bits. A cell that has the ability to store multiple bits is sometimes called a multi-level cell (or multi-state cell).
  • Memory device 100 may include a non-volatile memory device, and memory cells 102 may include non-volatile memory cells, such that memory cells 102 may retain information stored thereon when power (e.g., voltage Vcc, Vss, or both) is disconnected from memory device 100. For example, memory device 100 may be a flash memory device, such as a NAND flash (e.g., 3-dimesional (3-D)) NAND) or a NOR flash memory device, or another kind of memory device, such as a variable resistance memory device (e.g., a phase change memory device or a resistive RAM (Random Access Memory) device.
  • One of ordinary skill in the art may recognize that memory device 100 may include other components, several of which are not shown in FIG. 1 so as not to obscure the example embodiments described herein. At least a portion of memory device 100 may include structures and operations similar to or identical to any of the memory devices described below with reference to FIG. 2 through FIG. 10.
  • FIG. 2 shows a block diagram of a portion of a memory device 200 including decks (decks of memory cell strings) 2150 and 2151, according to some embodiments described herein. Memory device 200 may correspond to memory device 100 of FIG. 1. For example, decks 215o and 2151 may correspond to decks 1150 and 1151, respectively, of FIG. 1. FIG. 2 shows dimensions x, y, and z to indicate that, in the physical structure of memory device 200 (shown in FIG. 4 and FIG. 5 and described in detail below), decks 215o and 2151 may be located (e.g., formed) in a z dimension (e.g., arranged vertically) over each other and over a substrate (e.g., a semiconductor substrate). The z-dimension is perpendicular to the x-dimension and y-dimension (perpendicular to an x-y plane).
  • As shown in FIG. 2, deck 2150 may include data lines 2700, 2710, and 2720 that carry signals (e.g., bit line signals) BL00, BL10, and BL2o, respectively. Each of data lines 2700, 2710, and 272o may be structured as a conductive line that can include a bit line of deck 2150. Deck 2150 may include access lines 2500, 2510, 2520, and 253o that may carry corresponding signals (e.g., word line signals) WL00, WL10, WL20, and WL30. Each of access lines 2501, 2511, 2521, and 2531 may be structured as a conductive line that can include a word line of deck 215o. Deck 215o may include control gates (e.g., memory cell control gates) 2400, 2410, 2420, and 243o that may be coupled to (or part of) access lines 2500, 2510, 2520, and 2530, respectively.
  • Deck 2151 may include data lines 2701, 2711, and 2721 that carry signals (e.g., bit line signals) BL01, BL11, and BL21, respectively. Each of data lines 2701, 2711, and 2721 may be structured as a conductive line that may include a bit line of deck 2151. Deck 2151 may include access lines 2501, 2511, 2521, and 2531 that may carry corresponding signals (e.g., word line signals) WL01, WL11, WL21, and WL31. Each of access lines 2501, 2511, 2521, and 2531 may be structured as a conductive line that may include a word line of deck 2151. Deck 2151 may include control gates (e.g., memory cell control gates) 2401, 2411, 2421, and 2431 that may be coupled to (or part of) access lines 2501, 2511, 2521, and 2531, respectively.
  • FIG. 2 shows each of deck 2150 and 2151 including three data lines and four access lines (and four corresponding control gates) as an example. The number of data lines and access lines of decks 2150 and 2151 can vary.
  • As shown in FIG. 2, no deck among the decks (e.g., 215o and 2151) of memory device 200 shares an access line (or access lines) of the access lines (e.g., 2500, 2510, 2520, 2530, 2501, 2511, 2521, and 2531) of memory device 200 with another deck among the decks of memory device 200. For example, decks 215o and 2151 share no access line (do not share an access line or access lines) among access lines 2500, 2510, 2520, 2530, 2501, 2511, 2521, and 2531. Thus, memory cell blocks 290 and 291 share no access line (do not share an access line or access lines) among access lines 2500, 2510, 2520, 2530, 2501, 2511, 2521, and 2531.
  • As shown in FIG. 2, no deck among the decks (e.g., 2150 and 2151) of memory device 200 shares a data line (or data lines) of the data lines (e.g., 2700, 2710, 2720, 2701, 2711, and 2721) of memory device 200 with another deck among the decks of memory device 200. For example, decks 215o and 2151 share no data line (do not share a data line or data lines) among data lines 2700, 2710, 2720, 2701, 2711, and 2721 and share no conductive path (do not share a conductive path or conductive paths) among conductive paths 2570 and 2571. Thus, no data line of data lines 2700, 2710, 2720, 2701, 2711, and 2721 is shared by memory cell blocks 290 and 291, and no conductive path of conductive paths 257o and 2571 is shared by memory cell blocks 290 and 291.
  • As shown in FIG. 2, data lines 2700, 2710, and 2720 of deck 2150 are separated from and not coupled to (e.g., electrically unconnected to) data lines 2701, 2711, and 2721 of deck 2151. Thus, during a memory operation (e.g., read or write operation) performed (e.g., concurrently performed) on memory cells of deck 215o and 2151, memory device 200 may use data lines 2700, 2710, and 272o to carry information (e.g., information to be stored in or read from memory cells of deck 215o) that is different from information (e.g., to be stored in or read from memory cells of deck 2151) carried by data lines 2701, 2711, and 2721.
  • As shown in FIG. 2, access lines 2500, 2510, 2520, and 2530 of deck 2150 are separated from and not coupled to (e.g., electrically unconnected to) access lines 2501, 2511, 2521, and 2531 of deck 2151. Thus, during a memory operation (e.g., read, write, or erase operation), only one of decks 2150 and 2151 may be selected or both of decks 2150 and 2151 can be selected (e.g., concurrently selected). This allows memory device 200, during a memory operation (e.g., read, write, or erase operation), to access and operate on memory cells of only one of decks 215o and 2151 or memory cells of both of decks 2150 and 2151.
  • As shown in FIG. 2, memory device 200 includes driver circuits 240 and 241, a row decoder 249, buffer circuits 220 and 221, a level decoder 219, conductive paths 257o coupled to (e.g., coupled directly between) data lines 2700, 2710, and 272o and buffer circuits 220, and conductive paths 2571 coupled to (e.g., coupled directly between) data lines 2701, 2711, and 2721 and buffer circuits 221. Conductive paths 257o may be considered as part of data lines 2700, 2710, and 2720. Conductive paths 2571 may be considered as part of data lines 2701, 2711, and 2721
  • Driver circuits 240 and 241 may be part of row access circuitry of memory device 200 that may correspond to row access circuitry 108 of FIG. 1. Buffer circuits 220 and 221 may be part of buffer circuitry of memory device 200 that may correspond to and operate in ways similar to (or the same as) buffer circuitry 120 of FIG. 1. For example, buffer circuits 220 may include sense amplifiers to sense information read from memory cells of memory cell block 290, and data latches store (e.g., temporarily store) one bit (or multiple bits) of information read from memory cells of memory cell block 290. Similarly, buffer circuit 221 may include sense amplifiers to sense information read from memory cells of memory cell block 291, and data latches to store (e.g., temporarily store) one bit (or multiple bits) of information read from memory cells of memory cell block 291.
  • Level decoder 219 may be part of column access circuitry of memory device 200 (that can correspond to column access circuitry 109 of FIG. 1). Level decoder 219 may operate to activate buffer circuits 220 and 221 to provide information to or receive information from memory cells through respective data lines of decks 215o and 2151 (which are arranged in the "z" direction). Thus, level decoder 219 can be referred to as a "z" decoder.
  • As shown in FIG. 2, decks 215o and 2151 have similar elements. Thus for simplicity, similar elements between decks 2150 and 2151 are given the same designation labels (e.g., reference numbers). The following description focuses on details of deck 2150. The elements of deck 215o may have a similar description (which is not described in detail below for simplicity).
  • Deck 215o includes memory cells 210, 211, 212, and 213, select transistors (e.g., source select transistors) 261, 262, and 263, and select transistors (e.g., drain select transistors) 264, 265, and 266. Memory cells 210, 211, 212, and 213 are arranged in memory cell strings, such as memory cell strings 231 through 239. Deck 2150 may include a line 2990 that may carry a signal SRC0 (e.g., source line signal). Line 2990 may be structured as a conductive line that may form part of a source (e.g., a source line) of deck 2150 memory device 200.
  • Each of memory cell strings 231 through 239 of deck 215o is coupled to one of data lines 2700, 2710, and 272o through one of select transistors 264, 265, and 266. Each of memory cell strings 231 through 239 of deck 215o may also be coupled to line 299o through one of select transistors 261, 262, and 263. For example, memory cell string 231 may coupled to data line 270o through select transistor 264 (directly over string 231) and to line 2990 through select transistor 261 (directly under string 231). In another example, memory cell string 232 may coupled to data line 2700 through select transistor 265 (directly over string 232) and to line 299o through transistor 262 (directly under string 232). FIG. 2 shows an example of nine memory cell strings 231 through 239 and four memory cells 210, 211, 212, and 213 in each memory cell string. However, the number of memory cell strings and the number of memory cells in each memory cell string of deck 215o may vary. Further, one skilled in the art would recognize that some of the memory cells among memory cells 210, 211, 212, and 213 of memory cell strings 231 through 239 may be configured as dummy memory cells. Dummy memory cells are not configured to store information. Dummy memory cells may be configured for purposes known to those skilled in the art. In some examples of memory device 200, dummy memory cells may include one or two (or more than two) memory cells at the two ends of each of memory cell strings 231 through 239. For example, in FIG. 2, dummy memory cells may include a memory cell (or memory cells) immediately next to each of select transistors 261, 262, and 263, and/or a memory cell (or memory cells) immediately next to each of select transistors 264, 265, and 266.
  • As shown in FIG. 2, some memory cells (e.g., 213) of different memory cell strings (e.g., 231 through 239) are controlled by the same control gate (e.g., 2430) and are coupled to the same access line (e.g., 2530). Some other memory cells (e.g., 212) of these memory cell strings (e.g., 231 through 239) are controlled by another control gate (e.g., 2420). Each of control gates 2400, 2410, 2420, and 243o may be structured as a single conductive plate (shown in FIG. 4 and FIG. 5). During a memory operation of memory device 200, control gates 2400, 2410, 2420, and 243o can receive respective signals WL00, WL10, WL2o, and WL3o (through respective access lines 2500, 2510, 2520, and 2530) to access memory cells 210, 211, 212, and 213 of selected memory cell strings.
  • As shown in FIG. 2, select transistors 261, 262, and 263 of deck 215o may be coupled to a select line (e.g., source select line) 2800. Select transistors 261, 262, and 263 of deck 2150 may be controlled (e.g., turned on or turned off) by the same signal, such as an SGS0 signal (e.g., source select gate signal) applied to select line 2800. During a memory operation, such as a read or write operation, select transistors 261, 262, and 263 of deck 215o may be turned on (e.g., by activating SGS0 signal) to couple memory cell strings 231 through 239 of deck 215o to line 2990. Select transistors 261, 262, and 263 of deck 2150 may be turned off (e.g., by deactivating the SGS0 signal) to decouple memory cell strings 231 through 239 of deck 215o from line 2990.
  • Select transistors 264, 265, and 266 of deck 2150 may be coupled to select lines (e.g., drain select lines) 2840, 2850, and 2860, respectively. Select transistors 264, 265, and 266 of deck 2150 may be controlled (e.g., turned on or turned off) by corresponding signals SGD00, SGD10, SGD2o (e.g., drain select gate signals). During a memory operation (e.g., a read or write operation) select transistors 264, 265, and 266 of deck 2150 may be selectively turned on (e.g., by selectively activating signals SGD00, SGD10, SGD2o) to selectively couple the memory cell strings of deck 2150 to their respective data lines 2700, 2710, and 2720. Select transistors 264, 265, and 266 of deck 2150 may be selectively turned off (e.g., by selectively deactivating signals SGD00, SGD10, SGD2o) to selectively decouple the memory cell strings of deck 2150 from their respective data lines 2700, 2710, and 2720.
  • During a memory operation (e.g., a read or write operation), only one of the signals SGD00, SGD10, SGD2o may be activated at a time (e.g., the signals will be sequentially activated). For example, during a read operation to read (e.g., sense) information from memory cell strings 231, 234, and 237, signal SGD00 may be activated to turn on transistors 264 of deck 215o and couple memory cell strings 231, 234, and 237 of deck 2150 to data lines 2700, 2710, and 2720, respectively. In this example, signals SGD1o and SGD2o may be deactivated (while signal SGD00 is activated) to decouple memory cell strings 232, 235, 238, 233, 236, and 239 of deck 2150 from data lines 2700, 2710, and 2720. In another example, during a read operation to read information from memory cell strings 232, 235, and 238, signal SGD10 may be activated to turn on transistors 265 and couple memory cell strings 232, 235, and 238 to data lines 2700, 2710, and 2720, respectively. Signals SGD00 and SGD20 can be deactivated (while signal SGD10 is activated) to decouple memory cell strings 231, 234, 237, 233, 236, and 239 from data lines 2700, 2710, and 2720.
  • As mentioned above, deck 2151 includes elements similar to those of deck 2150. For example, as shown in FIG. 2, deck 2151 may include memory cell strings 231 through 239, select transistors 261, 262, 263, 264, 265, and 266, select line (e.g., source select line) 2801 and corresponding signal SGS1 (e.g., source select gate signal), line 2991 (e.g., source line) and corresponding signal SRC1 (e.g., source line signal), select lines (e.g., drain select lines) 2841, 2851, and 2861 and corresponding signals SGD01, SGD11, SGD21 (e.g., drain select gate signals).
  • Each of decks 2150 and 2151 may include memory cell blocks in which each of the memory cell blocks includes memory strings. For example, deck 215o may include memory cell block 290, which includes memory cell strings 231 through 239 in deck 2150, and deck 2151 may include memory cell block 291, which includes memory cell strings 231 through 239 in deck 2151. Memory cell block 290 corresponds to one of memory cell blocks 190 of FIG. 1. Memory cell block 291 corresponds to one of memory cell blocks 191 of FIG. 1. For simplicity, only one memory cell block 290 of deck 2150 and only one memory cell block 291 of deck 2151 are shown in FIG. 2. Further, FIG. 2 shows each of memory cell blocks 290 and 291 including nine memory cell strings (e.g., 231 through 239) as an example. The number of memory cell strings in memory cell blocks 290 and 291 may vary.
  • A memory cell block (e.g., 290 or 291) of a memory device (e.g., 200) described herein is a group of memory cells (e.g., 210, 211, 212, and 213) in which fewer than all of the memory cells (or alternatively all of the memory cells) in the group of memory cells (memory cell block) may be selected as selected memory cells to store information in (e.g., in a write operation) or read information from (e.g., in a read operation) the selected memory cells. However, fewer than all of the memory cells in the group of memory cells (e.g., only memory cells have stored information) may not be selected as selected memory cells to erase information from the selected memory cells (e.g., in an erase operation). In an erase operation, all of the memory cells in the group of memory cells (memory cell block) are selected (e.g., automatically selected) even if some of the memory cells in the group of memory cells are available to store information (e.g., some of the memory cells in the group of memory cells have no stored information before the erase operation). Thus, a memory cell block includes memory cells in which fewer than all of the memory cells (or alternatively all of the memory cells) may be selected during a read or write operation. However, in an erase operation, all of the memory cells in the memory cell block (memory cells in entire memory cell block) are selected.
  • Memory cell block 290 may include a unique block address (block-level address) within deck 2150. Memory cell block 291 may include a unique block address (block-level address) within deck 2151.However, memory cell blocks 290 and 291 may include the same block address (same block-level address). For example, memory cell block 290 may include a block address BK-29 (for example) that is unique among block addresses of memory cell blocks of deck 2150, and memory cell block 291 may also include block address BK-29 but that is unique among block addresses of memory cell blocks of deck 2151. Decks 2150 and 2151 have different deck addresses (deck-level addresses). During a memory operation (e.g., read, write, or erase operation), only one of memory cell blocks 290 and 291 or both memory cell blocks 290 and 291 may be selected based on block-level address and deck-level address. Since memory cell blocks 290 and 291 may have the same block address, memory cell blocks 290 and 291 can be concurrently selected during a memory operation based on an address information. This may simplify row access circuitry, column access circuitry, both row and column access circuitry of memory device 200.
  • Memory device 200 may include different modes of operations, including a single deck mode and multi-deck (e.g., double deck) mode. Memory device may perform a single deck operation in the single deck mode and a multi-deck (e.g., double deck) operation in the multi-deck mode. Address information received by memory device 200 during a particular memory operation is decoded to determine whether that particular mode of operation is single deck mode (in order to perform a single deck operation) or multi-deck mode (in order to perform a multi-deck operation). Memory device 200 may include an address register (not shown in FIG. 2, but it may be similar to address register 107 of FIG. 1) to receive address information. Decoding of the address information (e.g., decoded by row decoder 249) provides information for single deck operation or multi-deck operation.
  • In a single deck operation, one of decks 215o and 2151 may be selected (e.g., accessed) while the other deck may not be selected (e.g., unselected or not accessed). For example, in a single deck operation, memory cell block 290 of decks 215o is selected to access and operate on memory cells in block 290 while memory cell block 291 of deck 2151 is unselected, such that memory cells in memory cell block 291 may not be accessed. As an example, in a single deck operation (e.g., performed in the single deck mode) memory device 200 may operate to establish (to form) circuit paths (e.g., current paths) between data lines 2700, 2710, and 2720 of memory cell block 290 and buffer circuits 220 (e.g., through conductive paths 2570) if memory cell block 290 is selected during a memory operation (e.g., read or write operation) to access memory cells (e.g., selected memory cells of selected memory cell strings) of memory cell block 290. In this example, memory cell block 291 is unselected. Thus, memory device 200 may establish no circuit paths (e.g., establish no current paths) between data lines 2701, 2711, and 2721 of memory cell block 291 and buffer circuits 221.
  • In a multi-deck operation, decks 215o and 2151 may be concurrently selected (e.g., concurrently accessed). For example, in a multi-deck operation, memory cell blocks 290 and 291 are concurrently selected to access and operate on memory cells in memory cell blocks 290 and 291. As an example, in a multi deck operation (e.g., performed in the multi-deck mode) where memory cell blocks 290 and 291 are selected (e.g., concurrently selected in the same read operation or the same write operation), memory device 200 may operate to establish circuit paths (e.g., current paths) between data lines 2700, 2710, and 2720 of memory cell block 290 and buffer circuits 220 (e.g., through conductive paths 2570). In this example, memory device 200 may also establish circuit paths (e.g., current paths) between data lines 2701, 2711, and 2721 of memory cell block 291 and buffer circuits 221(e.g., through conductive paths 2571).
  • Row decoder 249 operates to decode address information (from an address register of memory device 200) to obtain decoded row address information. A particular operation of memory device 200 may be a single deck operation or a multi-deck operation based on the decoded row address information. Row decoder 249 can operate to activate only one of driver circuits 240 and 241 (e.g., to access and operate on memory cells of only one of memory cell blocks 290 and 291) if the operation is a single deck operation. Row decoder 249 can operate to activate both driver circuits 240 and 241 (e.g., to access and operate on memory cells in of both memory cell blocks 290 and 291) if the operation is a multi-deck operation.
  • Memory device 200 provides control information (e.g., commands) to level decoder 219 based on address information. Such control information includes information for a single deck operation or multi-deck operation. Level decoder 219 may decode such control information in order to activate buffer circuits 220 and 221 accordingly. For example, if the operation is a single deck operation (e.g., based on only one of the addresses of deck 2150 and deck 2151 being decoded), level decoder 219 operates to activate only one of buffer circuits 220 and 221. If the operation is a multi-deck operation (e.g., based on the addresses of both of decks 2150 and 2151 being decoded), level decoder 219 operates to activate both buffer circuits 220 and 221.
  • The following description gives different examples for single and multi-deck operations. In an example of a single deck operation (e.g., read, write, or erase operation) of memory device 200, memory cell block 290 of deck 215o may be selected while memory cell block 291 of deck 2151 is unselected (not selected). Thus, in this example, memory device 200 may not operate on memory cells 210, 211, 212, and 213 of memory cell block 291. Memory device 200 may operate on memory cells 210, 211, 212, and 213 of memory cell block 290 to store information in selected memory cells of memory cell block 290 (e.g., if the operation is a write operation), read information from selected memory cells of memory cell block 290 (e.g., if the operation is a read operation), or erase information from selected memory cells (e.g., all of memory cells) of memory cell block 290 (e.g., if the operation is an erase operation). In this example, row decoder 249 activates driver circuit 240 (e.g., by activating signal DR_LO) and may not activate driver circuits 241 (e.g., by not activating (e.g., deactivating) signal DR_UP). Thus, selected memory cell strings of deck 215o are accessed and memory cell strings of deck 2151 are not accessed. Level decoder 219 may activate buffer circuits 220 (e.g., by activating signal BL_LO) and may not activate buffer circuits 221 (e.g., by not activating (e.g., deactivating) signal BL_UP). Then, information may be stored in memory cell block 290 (if the operation is a write operation) or read from memory cell block 290 (if the operation is a read operation) of deck 2150 using buffer circuits 220 (the activated buffer circuits in this example), conductive paths 2570, and data lines 2700, 2710, and 2720.
  • In another example of a single deck operation (e.g., read, write, or erase operation), deck 2151 may be selected while deck 215o is unselected. Thus, in this example, row decoder 249 may activate driver circuit 241 (e.g., by activating signal DR_UP) and may not activate driver circuit 240 (e.g., by not activating (e.g., deactivating) signal DR_LO). Level decoder 219 may activate buffer circuits 221 (e.g., by activating signal BL_UP) and may deactivate buffer circuits 220 (e.g., by not activating (e.g., deactivating) signal BL_LO). Then, information may be stored in memory cell block 291 (if the operation is a write operation) or read from memory cell block 291 (if the operation is a read operation) of deck 2151 using buffer circuits 221 (the activated buffer circuits in this example), conductive paths 2571, and data lines 2701, 2711, and 2721.
  • In an example of a multi-deck deck operation, memory cell blocks 290 and 291 of decks 215o and 2151 may be concurrently selected (e.g., selected at the same time based on the same block address) to operate on memory cells 210, 211, 212, and 213 of memory cell blocks 290 and 291. In this example, memory device 200 may access and operate on memory cells 210, 211, 212, and 213 of memory cell blocks 290 and 291 to store information in selected memory cells of memory cell blocks 290 and 291 (e.g., if the operation is a write operation), read information from selected memory cells of memory cell blocks 290 and 291 (e.g., if the operation is a read operation), or erase information from selected memory cells (e.g., all of memory cells) of memory cell blocks 290 and 291 (e.g., if the operation is an erase operation). In this example (e.g., in a read or write operation), row decoder 249 may activate (e.g., concurrently activate) driver circuits 240 and 241 (e.g., by concurrently activating signals DR_LO and DR_UP). Level decoder 219 may activate (e.g., concurrently activate) buffer circuits 220 and 221 (e.g., by concurrently activating signals BL_LO and BL_UP (which can be based on deck address being decoded). Then, information (e.g., different information) may be concurrently provided to memory cell blocks 290 and 291 (to be stored in selected memory cells in memory cell blocks 290 and 291) or concurrently read from memory cell blocks 290 and 291 using respective buffer circuits (220 and 221), respective conductive paths (257o and 2571), and respective data lines (2700, 2710, 2720, 2701, 2711, and 2721) associated with memory cell blocks 290 and 291.
  • Thus, as described above, memory device 200 includes separate data lines for different decks (e.g., data lines 2700, 2710, and 272o for deck 2150, and data lines 2701, 2711, and 2721 for deck 2151), separate (e.g., dedicated) driver circuits for different decks (e.g., driver circuits 240 and 241 for decks 215o and 2151, respectively), and separate (e.g., dedicated) buffer circuits for different decks (e.g., buffer circuits 220 and 221 for decks 2150 and 2151, respectively). The elements and operations of memory device 200, as described above, may allow it to have improvements over some conventional memory devices. For example, throughput (e.g., for read, write, and erase operation) of memory device 200 may be higher than throughput of some conventional memory devices. As an example, in comparison with some conventional memory devices, throughput of memory device 200 may be two times higher (double) if memory device 200 includes two decks (e.g., 215o and 2151), four times higher (quadruple) if memory device 200 includes four decks, or eight times higher if memory device 200 includes eight decks. Further, in comparison with some conventional memory devices, including separate driver circuits (e.g., 240 and 241) for different decks (e.g., 2150 and 2151) along with separate data lines for different decks in memory device 200 may allow it to have a lower capacitance (e.g., coupling capacitance) and a smaller block size (lower storage capacity for each memory cell block).
  • FIG. 3 shows a schematic diagram of a portion of the memory device 200 of FIG. 2 including details of driver circuits 240 and 241 of FIG. 2 and buffer circuits 220 and 221 of FIG. 2, according to some embodiments described herein. As shown in FIG. 3, driver circuit 240 includes transistors (e.g., high-voltage drive transistor) T0. Transistors T0 has a transistor gate 340 (e.g., a common gate, which is common to transistors T0). Thus, transistors T0 is controlled (e.g., turned on at the same time or turned off at the same time) using the same transistor gate (e.g., transistor gate 340). Driver circuit 241 can include transistors (e.g., high-voltage drive transistor) T1. Transistors T1 has a transistor gate 341 (e.g., a common gate, which is common to transistors T1 and different from transistor gate 340). Thus, transistors T1 is controlled (e.g., turned on at the same time or turned off at the same time) using the same transistor gate (e.g., transistor gate 341).
  • Memory device 200 includes conductive lines 350, 351, 352, 353, and 354 through 354i, each of which may carry a signal (e.g., voltage signal, which is different from a data signal). As an example, conductive lines 350, 351, 352, and 353 may carry signals (e.g., voltage signal) V0, V1, V2, and V3, respectively.
  • As shown in FIG. 3, some (e.g., four) of transistors T0 are coupled between conductive lines 350, 351, 352, and 353 and access lines 2500, 2510, 2520, and 2530, respectively. Some (e.g., four) of transistors T1 are coupled between conductive lines 350, 351, 352, and 353 and access lines 2501, 2511, 2521, and 2531, respectively.
  • For simplicity, FIG. 3 omits connections (conductive connections) between some elements of deck 215o and conductive lines 354 through 354i. Such connections include connections between conductive lines 354 through 354i and select line (e.g., source select line) 2800, select lines (e.g., drain select lines) 2840, 2850, and 2860, and line (e.g., source line) 2990 of deck 2150. Similarly, for simplicity, FIG. 3 omits connections (conductive connections) between some elements of deck 2151 and conductive lines 354 through 354i. Such connections include connections between conductive lines 354 through 354i and select line (e.g., source select line) 2801, select lines (e.g., drain select lines) 2841, 2851, and 2861, and line (e.g., source line) 2991 of deck 2151.
  • Driver circuit 240 may use transistors T0 to provide (e.g., drive) signals from conductive lines 350, 351, 352, 353, and 354 through 354i to respective elements of deck 2150. For example, driver circuit 240 may use four of transistors T0 to provide signals V0, V1, V2, and V3 from four corresponding conductive lines 350, 351, 352, and 353 to four access lines 2500, 2510, 2520, and 2530, respectively.
  • Driver circuit 241 may use transistors T1 to provide (e.g., drive) signals from conductive lines 350, 351, 352, 353, and 354 through 354i to respective elements of deck 2151.For example, driver circuit 241 can use four of transistors T1 to provide signals V0, V1, V2, and V3 from four corresponding conductive lines 350, 351, 352, and 353 to four access lines 2501, 2511, 2521, and 2531, respectively, of deck 2151.
  • As shown in FIG. 3, transistor gates 340 and 341 are separate from each other. Thus, driver circuits 240 and 241 separately use transistor gates 340 and 341 (e.g., separately activate respective signals DR_LO and DR_UP) to control (e.g., turn on or turn off) transistors T0 and T1. For example, during a single deck operation of memory device 200, if deck 2150 is selected to be accessed (to operate on memory cells 210, 211, 212, and 213 of memory cell block 290) and deck 2151 is not selected to be accessed, then signal DR_LO may be activated (e.g., by row decoder 249) while signal DR_UP is not activated (e.g., deactivated). In this example, transistors T0 may be turned on while transistors T1 are turned off in order to establish circuit paths (e.g., current paths) between access lines 2500, 2510, 2520, and 2530 of memory cell block 290 and conductive lines 350, 351, 352, and 353 (e.g., through transistors T0). This allows signals V0, V1, V2, and V3 to be applied to access lines 2500, 2510, 2520, and 2530, respectively, (through turned-on transistors T0). In this example, memory device 200 may establish no circuit paths (e.g., establish no current paths) between access lines 2501, 2511, 2521, and 2531 of memory cell block 291 and conductive lines 350, 351, 352, and 353 (because transistors T1 are turned off). Thus, in this example, signals V0, V1, V2, and V3 are not applied to access lines 2501, 2511, 2521, and 2531.
  • In another example, during another single deck operation of memory device 200, if deck 2151 is selected to be accessed (to operate on memory cells 210, 211, 212, and 213 of memory cell blocks 291) and deck 2150 is not selected to be accessed, then signal DRL_UP may be activated (e.g., by decoder 249) while signal DR_LO is not activated (e.g., deactivated). In this example, transistors T1 may be turned on while transistors T0 are turned off. This allows signals V0, V1, V2, and V3 to be applied to access lines 2501, 2511, 2521, and 2531 respectively (through turned-on transistors T1). In this example, signals V0, V1, V2, and V3 are not applied to access lines 2500, 2510, 2520, and 253o because transistors T0 are turned off.
  • In an example multi-deck operation of memory device 200 where both decks 215o and 2151 are selected to be accessed (to operate on memory cells 210, 211, 212, and 213 of memory cell blocks 290 and 291), signals DR_LO and DRL_UP may be activated (e.g., by decoder 249). In this example, transistors T0 and T1 are turned on (e.g., concurrently turned on). This allows signals V0, V1, V2, and V3 to be applied to access lines 2500, 2510, 2520, and 2530, respectively, and to access lines 2501, 2511, 2521, and 2531 because transistors T0 and T1 are turned on.
  • As shown in FIG. 3, memory device 200 includes a buffer circuit 320, a buffer circuit 321, and transistors 320a and 321a. Buffer circuit 320 and transistor 320a can be part of buffer circuits 221 of FIG. 2. Buffer circuit 321 and transistor 321a may be part of buffer circuits 220 of FIG. 2. Buffer circuit 320 can include transistors (inside buffer circuit 320) that may be part of a sense amplifier of buffer circuit 320 (to sense information read from memory cells of memory cell strings 231, 232, and 233 of memory cell block 290) and part of a data latch of buffer circuit 320 to store (e.g., temporarily store) one bit (or multiple bits) of information read from memory cells of memory cell strings 231, 232, and 233 of memory cell block 290. Similarly, buffer circuit 321 may include transistors (inside buffer circuit 321) that may be part of a sense amplifier of buffer circuit 321 (to sense information read from memory cells of memory cell strings 231, 232, and 233 of memory cell block 291) and part of a data latch of buffer circuit 321 to store (e.g., temporarily store) one bit (or multiple bits) of information read from memory cells of memory cell strings 231, 232, and 233 of memory cell block 291.
  • As shown in FIG. 3, data lines 2700 and 2701 may be coupled to respective buffer circuits (e.g., 320 and 321) through different transistors (e.g., 320a and 321a). This allows level decoder 219 to selectively activate signals BL_LO and BL_UP in order to selectively couple data lines 270o and 2701 to their respective buffer circuits 320 and 321, depending on the mode of operation (e.g., single deck or multi-deck mode) of memory device 200.
  • For example, in a single deck operation of memory device 200, if deck 215o is selected to be accessed (to operate on memory cells 210, 211, 212, and 213 of memory cell block 290) and deck 2151 is not selected to be accessed, then signal BL_LO can be activated (e.g., by level decoder 219) while signal BL_UP is not activated (e.g., deactivated). In this example, transistor 320a may be turned on while transistor 321a is turned off. This allows data line 270o to be coupled to buffer circuit 320 through turned-on transistor 320a. Then, information may be stored in or read from memory cell block 290 of deck 215o using buffer circuit 320 (the activated buffer circuit in this example). In this example, data line 2701 is not coupled to buffer circuit 321 because transistor 321a is turned off.
  • In another example of a single deck operation of memory device 200, if deck 2151 is selected to be accessed (to operate on memory cells 210, 211, 212, and 213 of memory cell block 291) and deck 2150 is not selected to be accessed, then signal BL_UP can be activated (e.g., by level decoder 219) while signal BL_LO is not activated (e.g., deactivated). In this example, transistor 321a is turned on while transistor 320a is turned off. This allows data line 2701 to be coupled to buffer circuit 321 through turned-on transistor 321a. Then, information may be stored in or read from memory cell block 291 of deck 2151 using buffer circuit 321 (the activated buffer circuit in this example). In this example, data line 270o is not coupled to buffer circuit 320 because transistor 320a is turned off.
  • In an example multi-deck operation of memory device 200 where both decks 215o and 2151 are selected to be accessed (to operate on memory cells 210, 211, 212, and 213 of memory cell blocks 290 and 291), signals DR_LO and DRL_UP may be activated (e.g., concurrently activated by level decoder 219). In this example, transistors 320a and 321a may be concurrently turned on. This allows data lines 270o and 2701 to be coupled (e.g., concurrently coupled) to buffer circuits 320 and 321, respectively, through turned-on transistors 320a and 321a, respectively. Then, information may be currently provided to decks 215o and 2151 (to be stored in respective memory cells of memory cell blocks 290 and 291) using corresponding buffer circuits 320 and 321, or information may be concurrently read from memory cell blocks 290 and 291 using corresponding buffer circuits 320 and 321.
  • As shown in FIG. 3, data lines 2700 and 2701 may be coupled to respective buffer circuits (e.g., 320 and 321) through different transistors (e.g., 320a and 321a). This allows level decoder 219 to selectively activate signals BL_LO and BL_UP in order to selectively couple data lines 270o and 2701 to their respective buffer circuits 320 and 321, depending on the mode of operation (e.g., single deck or multi-deck mode) of memory device 200.
  • FIG. 3 shows buffer circuits (e.g., 320 and 321) and transistors (e.g., 320a and 321a) for data line 2700 of deck 2150 of data line 2701 of deck 2151. However, memory device 200 also have a buffer circuit (similar to buffer circuit 320 and or 321) and a transistor (similar to transistor 320a or 321a) for each of the other lines (e.g., data lines 2710 and 2720 in FIG. 2) of deck 2150 and each of the other lines (e.g., data lines 2711 and 2721 in FIG. 2) of deck 2151.
  • The elements and operations of memory device 200 of FIG. 3 may allow it to have improvements (e.g., a higher throughput, a smaller block size, and a lower capacitance) over some conventional memory devices, as mentioned above with reference the description of FIG. 2.
  • FIG. 4 shows a layout of a portion of the memory device of FIG. 2, according to some embodiments described herein. As shown in FIG. 4, memory device 200 includes a substrate 490, doped regions 410, 411, and 412 formed in substrate 490. Substrate 490 may include a monocrystalline (also referred to as single-crystal) semiconductor material (e.g., single-crystal silicon). The monocrystalline semiconductor material of substrate 490 may include impurities, such that substrate 490 may have a specific conductivity type (e.g., p-type).
  • Doped regions 410, 411, and 412 and substrate 490 and may include materials of different conductivity types. For example, substrate 490 can include a semiconductor material of p-type, and each of doped regions 410, 411, and 412 may include a semiconductor material of n-type.
  • Doped regions 410 and 412 may be sources and drains of transistors T0 of driver circuit 240, such that one of doped regions 410 and one of doped regions 412 may be the source and drain of one of transistors T0. Doped regions 411 and 412 may be sources and drains of transistors T1 of driver circuit 241, such that one of doped regions 411 and one of doped regions 412 may be the source and drain of one of transistors T1.
  • As shown in FIG. 4, transistor gate 340 may be located over a location (e.g., transistor channels of transistors T0) between doped regions 410 and 412. Transistor gate 341 may be located over a location (e.g., transistor channels of transistors T1) between doped regions 411 and 412. Each of transistor gates 340 and 341 may have a length extending in an x-dimension (which is perpendicular to the y and z dimensions). Each of conductive lines 350, 351, 352, and 353 in FIG. 4 may have a length extending in the same direction as each of transistor gates 340 and 341.
  • Control gates 2400, 2410, 2420, and 243o may be formed as conductive plates and can have a staircase structure. Control gates 2400, 2410, 2420, and 243o may be coupled to respective doped regions 410 of driver circuit 240 through respective access lines 2500, 2510, 2520, and 2530. Control gates 2401, 2411, 2421, and 2431 may be coupled to respective doped regions 411 of driver circuit 241 through respective access lines 2501, 2511, 2521, and 2531.
  • FIG. 4, shows access lines 2500, 2510, 2520, 2530, 2501, 2511, 2521, and 2531 being simple lines for simplicity. In reality, each of these access lines has a length, a width, and a thickness relative to the x, y, and z dimensions. Similarly, FIG. 4 shows conductive connections between doped regions 412 and respective conductive lines 350, 351, 352, and 353 as simple lines for simplicity. In reality, each of these conductive connections has a length, a width, and a thickness relative to the x, y, and z dimensions.
  • As shown in FIG. 4, transistor gates 340 and 341 are physically separated from each other. This allows memory device 200 to selectively activate signals DR-LO and DR_UP to selectively couple access lines 2500, 2510, 2520, and 2530 (and control gates 2400, 2410, 2420, and 2430) and access lines 2501, 2511, 2521, and 2531 (and control gates 2401, 2411, 2421, and 2431) to respective conductive lines 350, 351, 352, and 353 (to receive corresponding signals V0, V1, V2, and V3), depending on the mode of operation (e.g., single deck or multi-deck mode), as described above with reference to FIG. 2 and FIG. 3.
  • FIG. 5 shows a side view of a structure of a portion of memory device 200 of FIG. 2, according to some embodiments described herein. As shown in FIG. 5, row decoder 249, driver circuits 240 and 241, level decoder 219, and buffer circuits 220 and 221 may be located in (e.g., formed in or formed on) substrate 490. In an alternative structure, some or all of row decoder 249, driver circuits 240 and 241, level decoder 219, and buffer circuits 220 and 221 may be located outside substrate 490 (e.g., formed over substrate 490, such as formed in one or more of levels 521 through 528). Thus, in an alternative structure, at least a portion of buffer circuits 220 and 221 (only part of buffer circuits 220 and 221 or the entire buffer circuits 220 and 221) may be formed outside substrate 490.
  • As shown in FIG. 5, deck 2150 may located (e.g., formed) over substrate 490 in the z-dimension. Deck 2151 may be located over deck 2150 (e.g., stacked over deck 2150) Memory device 200 may include a dielectric material 515 (e.g., electrical insulating material) between decks 215o and 2151. In each of decks 215o and 2151, memory cell strings 231, 232, and 233 may be arranged in the x-dimension, which is perpendicular to the z-dimension. Each of data line 270o and 2701 may have a length extending in the x-dimension.
  • Memory cells 210, 211, 212, and 213 of deck 2150 may be located in different levels 521, 522, 523, and 524, respectively, of memory device 200 in the z-dimension. Memory cells 210, 211, 212, and 213 of deck 2151 may be respectively located in different levels 525, 526, 527, and 528 of memory device 200 in the z-dimension.
  • As shown in FIG. 5, each of memory cell strings 231, 232, and 233 of decks 215o and 2151 may include a pillar (e.g., a vertical body perpendicular to substrate 490) formed by pillar portions 506, 507, and 508 between a respective data line (2700 or 2701) and a respective line (e.g., source) 2990 or 2991. The pillar may be configured to provide a conduction of current (e.g., to form a conductive channel) between the respective data line (2700 or 2701) and a respective source (line 2990 or 2991). Pillar portions 506 and each of pillar portions 507 and 508 may include materials of different conductivity types. For example, pillar portion 506 can include a semiconductor material of p-type, and each of pillar portions 507 and 508 may include a semiconductor material of n-type. The semiconductor material may include polycrystalline silicon (polysilicon).
  • In deck 2150, control gates 2400, 2410, 2420, and 243o may be located along respective segments of pillar portion 506 of a pillar of a respective memory cell string among memory cell strings 231, 232, and 233. Control gates 2400, 2410, 2420, and 243o may be located in the z-dimension in the same levels (e.g., 521, 522, 523, and 524) where memory cells 210, 211, 212, and 213 of deck 215o are located.
  • Similarly, in deck 2151, control gates 2401, 2411, 2421, and 2431 may be located along respective segments of pillar portion 506 of a pillar of a respective memory cell string among memory cell strings 231, 232, and 233. Control gates 2401, 2411, 2421, and 2431 may be located in the z-dimension in the same levels (e.g., 525, 526, 527, and 528) where memory cells 210, 211, 212, and 213 of deck 2151 are located. Each of control gates 2400, 2410, 2420, 2430, 2401, 2411, 2421, and 2431 may include a conductive material (e.g., conductively doped polycrystalline silicon or other conductive material).
  • Each of decks 215o and 2151 may include materials 503, 504, and 505. For simplicity, the following description focuses on materials 503, 504, and 505 in deck 2150. Deck 2151 has similar arrangement for materials 503, 504, and 505.
  • In deck 2150, material 505 may be formed between a pillar (formed by pillar portions 506, 507, and 508) of a corresponding memory cell string (231, 232, or 233) and select line (e.g., source select line) 2800. Material 505 may be formed between a pillar (formed by pillar portions 506, 507, and 508) of a corresponding memory cell string (231, 232, or 233) and each of select lines (e.g., drain select lines) 2840, 2850, and 2860. Material 505 may be used as a gate oxide for each of select transistors (e.g., source select transistors) 261, 262, and 263, and each of select transistors (e.g., drain select transistors) 264, 265, and 266.
  • The combination of materials 503, 504, 505 in deck 2150 may be formed between pillar portion 506 of a corresponding pillar and each of control gates 2400, 2410, 2420, 2430. The combination of materials 503, 504, 505 may form part of the structure of a memory cell (e.g., memory cell 210, 211, 212, or 213) of deck 2150. For example, the combination of materials 503, 504, and 505 may be part of a TANOS (TaN, Al2O3, Si3N4, SiO2, Si) structure of each of memory cells 210, 211, 212, and 213 of deck 2150 and deck 2151. In this example, material 503 (e.g., interpoly dielectrics) may include a charge-blocking material or materials (e.g., a dielectric material such as TaN and Al2O) that is capable of blocking a tunneling of a charge. Material 504 may include a charge storage element (e.g., charge storage material or materials, such as Si3N4) that may provide a charge storage function (e.g., trap charge) to represent a value of information stored in memory cells 210, 211, 212, or 213. Material 505 may include a tunnel dielectric material or materials (e.g., SiO2) that is capable of allowing tunneling of a charge (e.g., electrons). As an example, material 505 may allow tunneling of electrons from pillar portion 506 to material 504 during a write operation and tunneling of electrons from material 504 to pillar portion 506 during an erase operation of memory device 200. Moreover, material 505 may allow tunneling of holes from pillar portion 506 to portion 504, compensating the trapped electron's recombination during an erase operation of memory device 200.
  • In another example, the combination of materials 503, 504, and 505 can be part of a SONOS (Si, SiO2, Si3N4, SiO2, Si) structure of each of memory cells 210, 211, 212, and 213) of deck 2150 and deck 2151. In a further example, the combination of materials 503, 504, and 505 may be part of a floating gate structure of each of memory cells 210, 211, 212, and 213 of deck 2150 and deck 2151.
  • As shown in FIG. 5, data line 2700 are be coupled (e.g., directly coupled) to buffer circuit 220 through (e.g., directly through) a conductive path 5700, which is included in one of conductive paths 2570 (FIG. 2). Conductive path 570o may be considered as part of data line 2700, such that the material of conductive path 5700 may directly contacts the material of data line 2700. Data line 2701 are coupled (e.g., directly coupled) to buffer circuit 221 through (e.g., directly through) a conductive path 5701, which includes portions 570A and 570B. Conductive path 5701 is included in one of conductive paths 2571 (FIG. 2). Conductive path 5701 may be considered as part of data line 2701, such that the material of conductive path 5701 directly contacts the material of data line 2701. Each of conductive paths 570o and 5701 may include a conductive material (or conductive materials) that is located (e.g., formed) over substrate 490, such as conductively doped polycrystalline silicon, metal, or other conductive materials. Portions 570A and 570B may be formed either at the same time (e.g., in the same deposition process) or at different times (e.g., in different deposition processes).
  • Portion 570A may be formed (e.g., formed in a process) before Portion 570B is formed (e.g., formed in another process). For example, portion 570A may be formed when conductive path 5700 is formed (e.g., when deck 215o is formed), then portion 570B may be formed (e.g., formed when deck 2151 is formed) after conductive path 570o and portion 570A are formed.
  • As shown in FIG. 5, conductive paths 5700 and 5701 are physically separated from each other (e.g., electrically unconnected to each other), and data lines 270o and 2701 are separately coupled to buffer circuits 220 and 221 through conductive paths 5700 and 5701, respectively. Thus, conductive paths 570o and 5701 are not shared by memory cell blocks 290 and 291. This allows memory device 200 to operate in either a single deck operation or multi-deck operation, as described above with reference to FIG. 2, FIG. 3, and FIG. 4.
  • Each of other data lines (2710 and 2720) of deck 215o and data lines (e.g., 2711 and 2721) of deck 2151 also includes a conductive path similar to conductive paths 5700 and 5701. For example, memory device 200 includes two conductive paths (similar to conductive path 5700) coupled to respective data lines 2710 and 2720 and two conductive paths (similar to conductive path 5701) coupled to respective data lines 2711 and 2721.
  • FIG. 6 shows a schematic diagram of a memory device 600 including multiple decks having shared access lines 250, 251, 252, and 253, and separate data lines 2700, 2710, 2720, 2701, 2711, and 2721, according to some embodiments described herein. As shown in FIG. 6, memory device 600 includes elements similar to those of memory elements of memory device 200 of FIG. 2. Thus, for simplicity, similar or identical elements are given the same designation labels and their descriptions are not repeated here.
  • As shown in FIG. 6, memory device 600 may include a row decoder 649, a driver circuit 643, a level decoder 619, a driver circuit (e.g., a level driver circuit) 629, and buffer circuits 623. Decks 215o and 2151 access lines 250, 251, 252, and 253. Thus, memory cell blocks 290 and 291 share access lines 250, 251, 252, and 253. Memory device 600 may use driver circuit 643 to access both decks 215o and 2151 through access lines 250, 251, 252, and 253. Row decoder 649 may generate a signal DR to control driver circuit 643. Level decoder 619 may generate signals BL-LO and BL_UP (to control buffer circuits 623) and information (e.g., signals) CTL to control driver circuit 629. Driver circuits 629 can be used to provide (e.g., drive) signals (e.g., voltage signals) to respective select lines 2800 and 2801 and lines (e.g., sources) 2990 and 2991.
  • FIG. 7 shows a schematic diagram of a portion of memory device 600 of FIG. 6 including details of driver circuit 643 and buffer circuits 623 of FIG. 6, according to some embodiments described herein. As shown in FIG. 7, driver circuit 643 includes transistors (e.g., high-voltage drive transistor) T2. Transistors T2 has a transistor gate 743 (e.g., a common gate, which is common to drive transistors T2). Thus, transistors T2 is controlled (e.g., turned on at the same time or turned off at the same time) using the same transistor gate (e.g., transistor gate 743).
  • Conductive lines 350, 351, 352, 353, and 354 through 354i (and signals V0, V1, V2, and V3) are similar to those described above with reference to FIG. 3. As shown in FIG. 7, some (e.g., four) of transistors T2 is coupled between conductive lines 350, 351, 352, and 353 and access lines 250, 251, 252, and 253, respectively. For simplicity, FIG. 7 omits connections (conductive connections) between some elements of deck 2150 and conductive lines 354 through 354i. Such connections include connections between conductive lines 354 through 354i and select lines (e.g., drain select lines) 2840, 2850, 2860, 2841, 2851, and 2861.
  • Driver circuit 643 uses transistors T2 to provide (e.g., drive) signals from conductive lines 350, 351, 352, 353, and 354 through 354i to respective elements of decks 215o and 2151. For example, driver circuit 643 may use four of transistors T2 to provide signals V0, V1, V2, and V3 from four corresponding conductive lines 350, 351, 352, and 353 to four access lines 250, 251, 252, and 253, respectively.
  • During a memory operation of memory device 600, when either deck 2150 or deck 2151 is selected to be accessed, driver circuit 643 may activate signal DR to turn on transistors T2. This allows signals V0, V1, V2, and V3 to be applied to access lines 250, 251, 252, and 253, respectively (through turned-on transistors T2). Memory device 600 can operate on memory cells of the selected deck (e.g., either deck 2150 or 2511) to store information in or read information from selected memory cells of the selected deck (e.g., if the operation is a write or read operation), or erase information from selected memory cells (e.g., all of memory cells) of memory cell block 290 (e.g., if the operation is an erase operation).
  • As shown in FIG. 7, memory device 200 may include a buffer circuit 723, and transistors 7330 and 7331. Buffer circuit 723 and transistors 733o and 7331 may be part of buffer circuits 623 of FIG. 6. Data lines 270o and 2701 may be coupled to buffer circuit 723 through transistors 733o and 7331, respectively.
  • Driver circuits 629 may include transistors (e.g., high-voltage drive transistors, not shown in FIG. 7) similar to transistors T2 in order to control the values (e.g., voltage values) of signals (e.g., voltage signals) provided to select lines 280o and 2801 and lines (e.g., sources) 299o and 2991 during operations of memory device 600.
  • Memory device 600 may provide control information (e.g., commands) to level decoder 619 based on address information received during a memory operation (e.g., read, write, or erase operation) of memory device 600. Level decoder 619 decodes such control information in order to selectively activate signals BL_LO and BL_UP to selectively turn on transistors 7330 and 7331. Level decoder 619 may also provide information CTL to driver circuit 629, such that driver circuit 629 may control the values of signals provided to select lines 280o and 2801 and lines 299o and 2991 during operations of memory device 600 (described in more detail below with reference to FIG. 8).
  • In FIG. 7, as an example, if memory cell block 290 of deck 2150 is selected and memory cell block 291 of deck 2151 is unselected (not selected), row decoder 649 may activate driver circuit 643 (e.g., by activating signal DR) to access memory cells 210, 211, 212, and 213 of selected memory cell strings of memory cell block 290. Level decoder 619 may activate signal BL_LO (and not activate signal BL_UP) to turn on transistor 733o in order to couple data line 270o to buffer circuit 723. In this example, level decoder 619 may not activate signal BL_UP to keep off (or turn off) transistor 7331 while transistor 7330 is turned on, thereby not coupling data line 2701 to buffer circuit 723 while data line 270o is coupled to buffer circuit 723. Then, information may be stored in or read from memory cell block 290 of deck 2150 using buffer circuit 723.
  • In FIG. 7, as another example, if memory cell block 291 of deck 215o is selected and memory cell block 290 of deck 215o is unselected (not selected), row decoder 649 may activate driver circuit 643 (e.g., by activating signal DR) to access memory cells 210, 211, 212, and 213 of selected memory cell strings of memory cell block 291. Level decoder 619 can activate signal BL_UP (and not activate signal BL_LO) to turn on transistor 7331 in order to couple data line 2701 to buffer circuit 723. In this example, level decoder 619 may not activate signal BL_LO to keep off (or turn off) transistor 7330 while transistor 7331 is turned on, thereby not coupling data line 270o to buffer circuit 723 while data line 2701 is coupled to buffer circuit 723. Then, information may be stored in or read from memory cell block 291 of deck 2151 using buffer circuit 723.
  • In the above examples of accessing memory cells of either deck 2150 or 2151, information CTL may have values to cause driver circuit 629 to provide select lines 280o and 2801 with different voltages and lines 299o and 2991 with different voltages (e.g., voltages shown in FIG. 8). Some other signals of decks 215o and 2151 may also be provided with voltage shown in FIG. 8.
  • In FIG. 7, driver circuits 629 may include transistors (e.g., high-voltage drive transistors, not shown in FIG. 7) similar to transistors T2 in order to control the values (e.g., voltage values) of signals (e.g., voltage signals) applied to select lines 2800 and 2801 and lines (e.g., sources) 2990 and 2991 during operations of memory device 600.
  • As shown in FIG. 7, memory device 600 includes conductive paths 780o and 7801 coupled to select lines (e.g., source select lines) 280o and 2801, respectively. Conductive paths 7800 and 7801 are coupled to driver circuit 629. Conductive paths 780o and 7801 are separate from each other (e.g., electrically unconnected to each other). Thus, during a memory operation (e.g., read, write, or erase operation) of memory device 600, driver circuit 629 may provide (e.g., apply) signals SGS0 and SGS1 with voltages having different values (e.g., as shown in chart 600A of FIG. 8), depending on which of decks 215o and 2151 is selected. For example, during a memory operation of memory device 600, driver circuit 629 may couple line 2800 to a conductive line (not shown in FIG. 6) through a transistor (not shown in FIG. 6) and line 2801 to another conductive line (not shown in FIG. 6) through another transistor (not shown in FIG. 6). The conductive lines (that are coupled to lines 280o and 2801 through the transistors in driver circuit 629) in this example may be provided with voltages having different values.
  • As shown in FIG. 7, memory device 600 may include conductive paths 799o and 7991 are coupled to lines (e.g., sources) 299o and 2991, respectively. Conductive paths 799o and 7991 are coupled to driver circuit 629. Conductive paths 799o and 7991 are separate (e.g., electrically uncoupled) from each other. Thus, during a memory operation (e.g., read, write, or erase operation) of memory device 600, driver circuit 629 may provide (e.g., apply) signals SRC0 and SRC1 with voltages having different values (e.g., as shown in chart 600A of FIG. 8), depending on which of decks 2150 and 2151 is selected. For example, during a memory operation of memory device 600, driver circuit 629 may couple line 299o to a conductive line (not shown in FIG. 6) through a transistor (not shown in FIG. 6) and line 2991 to another conductive line (not shown in FIG. 6) through another transistor (not shown in FIG. 6). The conductive lines (that are coupled to lines 2990 and 2991 through the transistors in driver circuit 629) in this example may be provided with voltages having different values.
  • FIG. 8 is a chart 600A showing example voltages applied to some signals of memory device 600 in FIG. 6 and FIG. 7 during read, write, and erase operations of memory device 600, according to some embodiments described herein. Some of the signals of memory device 600 in FIG. 6 and FIG. 7 (e.g., WL00, WL10, WL20, WL30, WL01, WL11, WL21, and WL31) are omitted from FIG. 8 for simplicity. The omitted signals can be provided with voltages known to those skilled in the art. In FIG. 8, for simplicity, the signal (BL00) from only one of data lines 2700, 2710, and 2720) and the signal (BL01) from only one of data lines 2701, 2711, and 2721) are shown.
  • Voltage Vss in FIG. 8 may have a value of 0V (e.g., ground potential). Voltage Vcc may be a supply voltage of memory device 600 (FIG. 6 and FIG. 7). Voltage Vbl may have a value (e.g., either a pre-charge voltage value or a sensed value) depending on the value of information stored in the selected memory cell. Voltage Verase may have relatively high value (e.g., 20V) to allow erasing of information stored in memory cell of a selected memory cell block (e.g., 290 or 291 in FIG. 6). Voltage Vy may have a relatively low value (e.g., 3V to 5V). In FIG. 8, "FLOAT" indicates a state (e.g., a "float state") situation where a particular conductive line (or signal on that particular conducive line) is decoupled from a bias voltage (decoupled from direct current (DC) voltage source). This decoupling allows the value of the voltage of that particular conductive line (or signal on that particular conducive line) to vary. For example, in a read operation in FIG. 8 when deck 2150 is selected, line 2991 (that carry signal SRC1) deck 2151 (unselected deck) may be placed in a float state. In this example, information CTL may be provided with a value to cause driver circuit 629 in FIG. 7 to turn off a transistor (in driver circuit 629) coupled between line 2990 and a conductive line (not shown in FIG. 7) that is used to provide a voltage to line 2991 (through driver circuit 629) if deck 2151 is selected.
  • As shown in FIG. 8, either deck 2150 or deck 2151 may be selected in a read, write, or erase operation to operate on memory cells 210, 211, 212, and 213 of selected memory cell strings of memory cell block 290 or 291. However, in an erase operation, both deck 215o and deck 2151 may be selected (e.g., concurrently selected) to operate on memory cells 210, 211, 212, and 213 of selected memory cell strings of memory cell blocks 290 and 291.
  • The elements and operations of memory device 600 (e.g., based on chart 600A) may allow it to have improvements over some conventional memory devices. For example, smaller block size may be achieved by the separate data lines of decks 215o and 2151. Further, as shown in FIG. 8, in a read or write operation (only one of deck 2150 and deck 2151 may be selected) the signal on the source (e.g., SRC0 or SRC1) of the unselected deck is provided with voltage Vss (e.g., grounded) and the signal (e.g., BL00 or BL01) on the data line of the unselected deck is placed in a float state. This may also cause the channels of the memory cell strings of the unselected deck (e.g., channels similar to the channels in pillar portions 506, 507, and 508 in FIG. 5) of memory device 600 to be in a float state. Therefore, it may help reduce the capacitances on the control gates (e.g., control gates 2400, 2410, 2420, and 2430 or control gates 2401, 2411, 2421, and 2431) of the unselected deck. It may also help reduce power consumption in memory device 600. Moreover, in an erase operation of a selected deck, gate-induce drain leakage (GIDL) may be generated only in the selected deck and the channels of the memory cell strings of the unselected deck are in a float state (based on chart 600A). Thus, capacitances on the control gates of the unselected deck may be reduced (e.g., relatively small). This may help reduce (or eliminate) the occurrence of soft-program or erasing of some or all of memory cells in the unselected deck.
  • FIG. 9 shows a schematic diagram of a portion of memory device 900, which can be a variation of memory device 600 of FIG 6 and FIG. 7, according to some embodiments described herein. As shown in FIG. 9, memory device 900 can include elements similar to those of memory elements of memory device 600 of FIG. 7. Thus, for simplicity, similar or identical elements are given the same designation labels and their descriptions are not repeated here. Differences between memory devices 600 and 900 include buffer circuits 920 and 921 of FIG. 9. As shown and described above with reference to FIG. 7, data lines 270o and 2701 may share buffer circuit 733. In FIG. 9, data lines 270o and 2701 can be coupled to separate buffer circuits 920 and 921.
  • Memory device 900 can perform a single deck operation in a single deck mode and a multi-deck operation in a multi-deck mode. A single deck operation of memory device 900 may be similar to the operation of memory device 600 described above with reference to FIG. 7 and FIG. 8 (e.g., one (not both) of memory cell blocks 290 and 291 may be selected in a read or write operation). In multi-deck operation of memory device 900, both memory cell blocks 290 and 291 may be selected (e.g., concurrently selected) to access and operate on memory cells 210, 211, 212, and 213 of memory cell blocks 290 and 291. For example, in a multi-deck operation, information is concurrently provided to memory cell blocks 290 and 291 (through buffer circuits 920 and 921, respectively) to be stored in selected memory cells in memory cell blocks 290 and 291, information may be concurrently read from memory cell blocks 290 and 291 (through buffer circuits 920 and 921), or information in memory cell blocks 290 and 291 may be concurrently erased.
  • Memory device 900 may have improvements over some conventional memory devices. Such improvements include improvements similar to those of memory device 600 described above with reference to FIG. 6, FIG. 7, and FIG. 8. Further, since data lines 2700 and 2701 may be coupled to separate buffer circuits 920 and 921, memory device 900 can have a higher throughput (e.g., two times) than memory device 600. This may also allow memory device 900 to have a higher throughput than some conventional memory devices (e.g., two times or higher depending on the number of decks of memory device 900).
  • FIG. 10 is a chart 900A showing example voltages applied to some signals of memory device 900 of FIG. 9 during read, write, and erase operations of memory device 900, according to some embodiments described herein. The erase operation in chart 900A may be the same as the erase operation in chart 600A (FIG. 8). The read and write operations for a single deck operation (e.g., where only one of decks 2150 and 2151 is selected at time) in chart 900A mayalso be the same as the read and write operations in chart 600A (FIG. 8). However, as shown in chart 900A of FIG. 10, both decks 2150 and 2151 may be selected (e.g., selected in a multi-deck operation) in read and write operations, in which the same voltages can be provided to respective signals decks 215o and 2151. Operating memory device 900 with voltages based on chart 900A may allow memory device 900 to have improvements mentioned above.
  • The illustrations of apparatuses (e.g., memory devices 100, 200, 600, and 900) and methods (e.g., operating methods associated with memory devices 100, 200, 600, and 900, and methods (e.g., processes) of forming at least a portion of memory devices) are intended to provide a general understanding of the structure of various embodiments and are not intended to provide a complete description of all the elements and features of apparatuses that might make use of the structures described herein. An apparatus herein refers to, for example, either a device (e.g., any of memory devices 100, 200, 600, and 900) or a system (e.g., a computer, a cellular phone, or other electronic system) that includes a device such as any of memory devices 100, 200, 600, and 900.
  • Any of the components described above with reference to FIG. 1 through FIG. 10 may be implemented in a number of ways, including simulation via software. Thus, apparatuses (e.g., memory devices 100, 200, 600, and 900 or part of each of these memory devices, including a control unit in these memory devices, such as control unit 118 (FIG. 1)) described above may all be characterized as "modules" (or "module") herein. Such modules may include hardware circuitry, single and/or multi-processor circuits, memory circuits, software program modules and objects and/or firmware, and combinations thereof, as desired and/or as appropriate for particular implementations of various embodiments. For example, such modules may be included in a system operation simulation package, such as a software electrical signal simulation package, a power usage and ranges simulation package, a capacitance-inductance simulation package, a power/heat dissipation simulation package, a signal transmission-reception simulation package, and/or a combination of software and hardware used to operate or simulate the operation of various potential embodiments.
  • Memory devices 100, 200, 600, and 900 may be included in apparatuses (e.g., electronic circuitry) such as high-speed computers, communication and signal processing circuitry, single or multi-processor modules, single or multiple embedded processors, multicore processors, message information switches, and application-specific modules including multilayer, multichip modules. Such apparatuses may further be included as subcomponents within a variety of other apparatuses (e.g., electronic systems), such as televisions, cellular telephones, personal computers (e.g., laptop computers, desktop computers, handheld computers, tablet computers, etc.), workstations, radios, video players, audio players (e.g., MP3 (Motion Picture Experts Group, Audio Layer 3) players), vehicles, medical devices (e.g., heart monitor, blood pressure monitor, etc.), set top boxes, and others.
  • The embodiments described above with reference to FIG. 1 through FIG. 10 include apparatuses and methods using a substrate, a first memory cell block including first memory cell strings located over the substrate, first data lines coupled to the first memory cell strings, a second memory cell block including second memory cell strings located over the first memory cell block, second data lines coupled to the second memory cell strings, first conductive paths located over the substrate and coupled between the first data lines and buffer circuitry of the apparatus, and second conductive paths located over the substrate and coupled between the second data lines and the buffer circuitry, first word lines coupled to the first memory cells strings, second word lines coupled to the second memory cell strings, wherein the first memory cell block shares no word line with the second memory cell block, first transistors, each of the first transistors coupled to a respective word line of the first word lines, the first transistors including a first common gate, second transistors , each of the second transistors coupled to a respective word line of the second word lines, the second transistors including a second common gate different from the first common gate, and a decoder, based on address information provided to the decoder during a memory operation of the apparatus, to either concurrently turn on the first and second transistors or turn on the first transistors and turn off the second transistors while the first transistors are turned on. No conductive path of the first and second conductive paths is shared by the first and second memory cell blocks. Other embodiments including additional apparatuses and methods are described.
  • In the detailed description and the claims, a list of items joined by the term "at least one of" can mean any combination of the listed items. For example, if items A and B are listed, then the phrase "at least one of A and B" can mean A only; B only; or A and B. In another example, if items A, B, and C are listed, then the phrase "at least one of A, B and C" can mean A only; B only; C only; A and B (without C); A and C (without B); B and C (without A); or A, B, and C. Each of items A, B, and C can include a single element (e.g., a circuit element) or a plurality of elements (e.g., circuit elements).
  • The above description and the drawings illustrate some embodiments of the invention to enable those skilled in the art to practice the embodiments of the invention. Other embodiments may incorporate structural, logical, electrical, process, and other changes. Examples merely typify possible variations. The invention is defined and solely limited by the appended claims. Many other embodiments will be apparent to those of skill in the art upon reading and understanding the above description.

Claims (5)

  1. An apparatus comprising:
    a substrate (490);
    a first memory cell block (290) including first memory cell strings (231 - 239) located over the substrate, and first data lines (2700, 2710, and 2720) coupled to the first memory cell strings;
    a second memory cell block (291) including second memory cell strings (231 - 239) located over the first memory cell block, and second data lines (2700, 2710, and 2720) coupled to the second memory cell strings;
    first conductive paths (2570) located over the substrate and coupled between the first data lines and buffer circuitry (220 - 221) of the apparatus; and
    second conductive paths (2571) located over the substrate and coupled between the second data lines and the buffer circuitry, wherein no conductive path of the first and second conductive paths is shared by the first and second memory cell blocks;
    first word lines (2500, 2510, 2520, and 2530) coupled to the first memory cells strings;
    second word lines (2501, 2511, 2521, and 2531) coupled to the second memory cell strings, wherein the first memory cell block shares no word line with the second memory cell block;
    first transistors (T0), each of the first transistors coupled to a respective word line of the first word lines, the first transistors including a first common gate (340);
    second transistors (T1), each of the second transistors coupled to a respective word line of the second word lines, the second transistors including a second common gate (341) different from the first common gate; and
    a decoder (249), based on address information provided to the decoder during a memory operation of the apparatus, to either concurrently turn on the first and second transistors or turn on the first transistors and turn off the second transistors while the first transistors are turned on.
  2. The apparatus of claim 1, wherein the buffer circuitry includes:
    a first buffer circuit (320);
    a first transistor (320a) coupled between the first buffer circuit and one of the first conductive paths;
    a second buffer circuit (321); and
    a second transistor (321a) coupled between the second buffer circuit and one of the second conductive paths.
  3. The apparatus of claim 1, wherein the buffer circuitry includes:
    a buffer circuit (320);
    a first transistor (320a) coupled between the buffer circuit and one of the first conductive paths; and
    a second transistor (321a) coupled between the buffer circuit and one of the second conductive paths.
  4. The apparatus of claim 1, further comprising:
    a first deck (2150) of memory cell strings located over the substrate, the first deck of memory cell strings including a first plurality memory cell blocks, wherein the first memory cell block is included in the first plurality memory cell blocks; and
    a second deck (2151) of memory cell strings located over the first deck of memory cell strings, the second deck of memory cell strings including a second plurality memory cell blocks, wherein the second memory cell block is included in the second plurality memory cell blocks.
  5. A method of operating the apparatus of claim 1, the method comprising
    receiving address information during a memory operation of the apparatus;
    activating, based on the address information, the first transistor (T0) and/or the second transistor (T1), wherein the first transistor and the second transistor are either concurrently activated or the first transistor is activated and the second transistor is deactivated while the first transistor is activated; and
    accessing memory cell strings (231 - 239) of at least one of a first memory cell block (290) and a second memory cell block (291) during the memory operation of the memory apparatus.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11862238B2 (en) 2019-08-21 2024-01-02 Micron Technology, Inc. Multi-deck memory device including buffer circuitry under array

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8860117B2 (en) 2011-04-28 2014-10-14 Micron Technology, Inc. Semiconductor apparatus with multiple tiers of memory cells with peripheral transistors, and methods
US8964474B2 (en) 2012-06-15 2015-02-24 Micron Technology, Inc. Architecture for 3-D NAND memory
US9679650B1 (en) 2016-05-06 2017-06-13 Micron Technology, Inc. 3D NAND memory Z-decoder
US10074430B2 (en) 2016-08-08 2018-09-11 Micron Technology, Inc. Multi-deck memory device with access line and data line segregation between decks and method of operation thereof
US10896713B2 (en) 2018-05-04 2021-01-19 Micron Technology, Inc. Access line management for an array of memory cells
US10529401B2 (en) * 2018-05-04 2020-01-07 Micron Technology, Inc. Access line management for an array of memory cells
US10803948B2 (en) * 2018-11-07 2020-10-13 Micron Technology, Inc. Sequential voltage ramp-down of access lines of non-volatile memory device
CN109979509B (en) * 2019-03-29 2020-05-08 长江存储科技有限责任公司 Three-dimensional memory and programming operation method thereof
US11355514B2 (en) 2019-08-15 2022-06-07 Micron Technology, Inc. Microelectronic devices including an oxide material between adjacent decks, electronic systems, and related methods
US10580795B1 (en) 2019-08-15 2020-03-03 Micron Technology, Inc. Microelectronic devices including staircase structures, and related memory devices and electronic systems
US11309328B2 (en) 2019-10-29 2022-04-19 Micron Technology, Inc. Methods of forming microelectronic devices, and related microelectronic devices, memory devices, and electronic systems
US11217601B2 (en) 2019-10-29 2022-01-04 Micron Technology, Inc. Microelectronic devices including staircase structures, and related memory devices and electronic systems
US11557341B2 (en) * 2019-12-27 2023-01-17 Micron Technology, Inc. Memory array structures and methods for determination of resistive characteristics of access lines
JP7340178B2 (en) 2020-01-16 2023-09-07 本田技研工業株式会社 semiconductor equipment
KR20220131322A (en) * 2020-03-03 2022-09-27 마이크론 테크놀로지, 인크. Improved architecture for multi-deck memory arrays
US11424262B2 (en) 2020-03-17 2022-08-23 Micron Technology, Inc. Microelectronic devices including staircase structures, and related memory devices and electronic systems
KR20220000096A (en) 2020-06-25 2022-01-03 삼성전자주식회사 Semiconductor device
US11862628B2 (en) 2021-05-20 2024-01-02 Micron Technology, Inc. Transistor configurations for multi-deck memory devices
JP2022181756A (en) * 2021-05-27 2022-12-08 ウィンボンド エレクトロニクス コーポレーション semiconductor storage device
JP2023072960A (en) * 2021-11-15 2023-05-25 キオクシア株式会社 semiconductor storage device
US11616068B1 (en) * 2021-11-16 2023-03-28 Micron Technology, Inc. Deck selection layouts in a memory device
TWI780987B (en) * 2021-11-18 2022-10-11 友達光電股份有限公司 Memory chip

Family Cites Families (71)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100210985B1 (en) * 1994-06-29 1999-07-15 니시무로 타이죠 Nonvolatile semiconductor device
JP3544743B2 (en) * 1995-04-17 2004-07-21 株式会社東芝 Semiconductor storage device
JP3770171B2 (en) 2002-02-01 2006-04-26 ソニー株式会社 Memory device and memory system using the same
WO2003085675A2 (en) 2002-04-04 2003-10-16 Kabushiki Kaisha Toshiba Phase-change memory device
US6903982B2 (en) * 2002-10-10 2005-06-07 Infineon Technologies Ag Bit line segmenting in random access memories
US7177191B2 (en) * 2004-12-30 2007-02-13 Sandisk 3D Llc Integrated circuit including memory array incorporating multiple types of NAND string structures
US7212447B2 (en) * 2005-08-04 2007-05-01 Micron Technology, Inc. NAND flash memory cell programming
WO2009001534A1 (en) * 2007-06-22 2008-12-31 Panasonic Corporation Resistance change type nonvolatile storage device
JP2009245556A (en) * 2008-03-31 2009-10-22 Toshiba Corp Semiconductor memory device
US8098520B2 (en) * 2008-04-25 2012-01-17 Seagate Technology Llc Storage device including a memory cell having multiple memory layers
KR101469106B1 (en) * 2008-07-02 2014-12-05 삼성전자주식회사 Semiconductor Device Having Three Dimensional Memory Cells And Methods Of Operating And Fabricating The Same
JP2010073246A (en) * 2008-09-17 2010-04-02 Toshiba Corp Nonvolatile semiconductor memory device
KR20100095721A (en) * 2009-02-23 2010-09-01 주식회사 하이닉스반도체 Operating method of nonvolatile memory device, and nonvolatile memory device implementing the same
JP4846813B2 (en) * 2009-03-12 2011-12-28 株式会社東芝 Nonvolatile semiconductor memory device
US8437192B2 (en) * 2010-05-21 2013-05-07 Macronix International Co., Ltd. 3D two bit-per-cell NAND flash memory
KR101772117B1 (en) * 2010-09-03 2017-08-28 삼성전자 주식회사 Semiconductor Memory Device of stacked structure having logic circuit based on resistor switch and Manufacturing method of the same
US8638632B2 (en) * 2010-09-23 2014-01-28 Micron Technology, Inc. Access line management in a memory device
JP2012119013A (en) * 2010-11-29 2012-06-21 Toshiba Corp Nonvolatile semiconductor memory device
US8724390B2 (en) * 2011-01-19 2014-05-13 Macronix International Co., Ltd. Architecture for a 3D memory array
KR20120088360A (en) * 2011-01-31 2012-08-08 삼성전자주식회사 Operating method of nonvolatile memory device
US8619471B2 (en) * 2011-07-27 2013-12-31 Micron Technology, Inc. Apparatuses and methods including memory array data line selection
KR101818506B1 (en) * 2011-08-22 2018-01-15 삼성전자 주식회사 Three dimensional semiconductor memory device
KR20130024304A (en) * 2011-08-31 2013-03-08 에스케이하이닉스 주식회사 Semiconductor memory device and method of operating the same
US8837222B2 (en) * 2011-10-26 2014-09-16 Micron Technology, Inc. Methods and apparatuses including a select transistor having a body region including monocrystalline semiconductor material and/or at least a portion of its gate located in a substrate
KR101325492B1 (en) * 2012-02-24 2013-11-07 서울대학교산학협력단 Nand flash memory array having 3d star structure and operation method thereof
KR101917192B1 (en) * 2012-03-12 2018-11-12 삼성전자주식회사 Nonvolatile memory device and reading method of nonvolatile memory device
US9111620B2 (en) * 2012-03-30 2015-08-18 Micron Technology, Inc. Memory having memory cell string and coupling components
US10170187B2 (en) * 2012-04-02 2019-01-01 Micron Technology, Inc. Apparatuses and methods using negative voltages in part of memory write read, and erase operations
US9171627B2 (en) * 2012-04-11 2015-10-27 Aplus Flash Technology, Inc. Non-boosting program inhibit scheme in NAND design
US10504596B2 (en) * 2012-04-18 2019-12-10 Micron Technology, Inc. Apparatuses and methods of forming apparatuses using a partial deck-by-deck process flow
US8964474B2 (en) * 2012-06-15 2015-02-24 Micron Technology, Inc. Architecture for 3-D NAND memory
US10541029B2 (en) * 2012-08-01 2020-01-21 Micron Technology, Inc. Partial block memory operations
US8780631B2 (en) * 2012-08-21 2014-07-15 Micron Technology, Inc. Memory devices having data lines included in top and bottom conductive lines
US9117503B2 (en) * 2012-08-29 2015-08-25 Micron Technology, Inc. Memory array plane select and methods
US8811084B2 (en) * 2012-08-30 2014-08-19 Micron Technology, Inc. Memory array with power-efficient read architecture
US9595533B2 (en) * 2012-08-30 2017-03-14 Micron Technology, Inc. Memory array having connections going through control gates
KR20140028974A (en) * 2012-08-31 2014-03-10 에스케이하이닉스 주식회사 Three dimensional semiconductor memory device, memory system comprising the same, method of manufacturing the same and method of operating the same
JP2014063556A (en) * 2012-09-24 2014-04-10 Toshiba Corp Nonvolatile semiconductor memory device
US8958244B2 (en) * 2012-10-16 2015-02-17 Conversant Intellectual Property Management Inc. Split block decoder for a nonvolatile memory device
US9704580B2 (en) * 2012-10-22 2017-07-11 Conversant Intellectual Property Management Inc. Integrated erase voltage path for multiple cell substrates in nonvolatile memory devices
US9093152B2 (en) * 2012-10-26 2015-07-28 Micron Technology, Inc. Multiple data line memory and methods
US9472284B2 (en) * 2012-11-19 2016-10-18 Silicon Storage Technology, Inc. Three-dimensional flash memory system
US9064577B2 (en) * 2012-12-06 2015-06-23 Micron Technology, Inc. Apparatuses and methods to control body potential in memory operations
KR20140088384A (en) * 2013-01-02 2014-07-10 에스케이하이닉스 주식회사 Semiconductor memory device
KR20140088385A (en) * 2013-01-02 2014-07-10 에스케이하이닉스 주식회사 Semiconductor memory device
KR20140089792A (en) * 2013-01-07 2014-07-16 에스케이하이닉스 주식회사 Semiconductor device
US9224474B2 (en) * 2013-01-09 2015-12-29 Macronix International Co., Ltd. P-channel 3D memory array and methods to program and erase the same at bit level and block level utilizing band-to-band and fowler-nordheim tunneling principals
KR20140100143A (en) * 2013-02-05 2014-08-14 삼성전자주식회사 Programming and reading methods of nonvolatle memory device
TWI629683B (en) * 2013-03-14 2018-07-11 美商橫杆股份有限公司 Non-volatile memory with overwrite capability and low write amplification
US9208833B2 (en) * 2013-04-23 2015-12-08 Micron Technology Sequential memory operation without deactivating access line signals
US9147493B2 (en) * 2013-06-17 2015-09-29 Micron Technology, Inc. Shielded vertically stacked data line architecture for memory
KR20150002001A (en) * 2013-06-28 2015-01-07 에스케이하이닉스 주식회사 Semiconductor memory device
KR20150002000A (en) * 2013-06-28 2015-01-07 에스케이하이닉스 주식회사 Semiconductor device and operation method thereof
KR20150002002A (en) * 2013-06-28 2015-01-07 에스케이하이닉스 주식회사 Semiconductor memory apparatus
JP2015053094A (en) * 2013-09-06 2015-03-19 株式会社東芝 Semiconductor storage device
MX2016004948A (en) * 2013-10-17 2016-06-28 Dow Agrosciences Llc Processes for the preparation of pesticidal compounds.
KR102171611B1 (en) * 2013-12-31 2020-10-30 엘지디스플레이 주식회사 Stereopsis image display device
KR102180299B1 (en) * 2014-02-07 2020-11-18 에스케이하이닉스 주식회사 Semiconductor apparatus
KR102225989B1 (en) * 2014-03-04 2021-03-10 삼성전자주식회사 Nonvolatile memory system and operation method thereof
US11018149B2 (en) * 2014-03-27 2021-05-25 Intel Corporation Building stacked hollow channels for a three dimensional circuit device
KR20150135903A (en) * 2014-05-26 2015-12-04 에스케이하이닉스 주식회사 Semiconductor device and system having the same, and operating method thereof
KR20160036143A (en) * 2014-09-24 2016-04-04 에스케이하이닉스 주식회사 Non-volatile Memory Device Improved Voltage Drop Occurrence And Method of Driving The Same
US9362300B2 (en) * 2014-10-08 2016-06-07 Micron Technology, Inc. Apparatuses and methods for forming multiple decks of memory cells
US9349458B2 (en) * 2014-10-16 2016-05-24 Sandisk Technologies Inc. Biasing of unselected blocks of non-volatile memory to reduce loading
KR102293136B1 (en) * 2014-10-22 2021-08-26 삼성전자주식회사 Nonvolatile memory device, storage device having the same, operating method thereof
KR102397016B1 (en) * 2014-11-24 2022-05-13 삼성전자주식회사 Operatiing method of nonvolatile memory system
US10210937B2 (en) * 2014-12-08 2019-02-19 SK Hynix Inc. Semiconductor storage device with multiple blocks
US9881674B2 (en) * 2014-12-11 2018-01-30 Micron Technology, Inc. Sequential write and sequential write verify in memory device
US9972391B2 (en) * 2014-12-17 2018-05-15 Micron Technology, Inc. Apparatus, systems, and methods to operate a memory
US9324441B1 (en) * 2015-01-20 2016-04-26 Sandisk Technologies Inc. Fast adaptive trimming of operating parameters for non-volatile memory devices
US10074430B2 (en) 2016-08-08 2018-09-11 Micron Technology, Inc. Multi-deck memory device with access line and data line segregation between decks and method of operation thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11862238B2 (en) 2019-08-21 2024-01-02 Micron Technology, Inc. Multi-deck memory device including buffer circuitry under array

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CN108140416A (en) 2018-06-08
EP3497701A4 (en) 2020-08-05
CN108140416B (en) 2022-05-13
US20200013465A1 (en) 2020-01-09
US20180366198A1 (en) 2018-12-20
EP3497701A1 (en) 2019-06-19
JP2019528546A (en) 2019-10-10
US10354730B2 (en) 2019-07-16
US20180040377A1 (en) 2018-02-08
WO2018031474A1 (en) 2018-02-15
KR20190029767A (en) 2019-03-20
US10074430B2 (en) 2018-09-11
KR102271636B1 (en) 2021-07-05

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