EP3491446A1 - Dispositif pour dévier un rayonnement laser ou pour dévier la lumière - Google Patents

Dispositif pour dévier un rayonnement laser ou pour dévier la lumière

Info

Publication number
EP3491446A1
EP3491446A1 EP17740727.7A EP17740727A EP3491446A1 EP 3491446 A1 EP3491446 A1 EP 3491446A1 EP 17740727 A EP17740727 A EP 17740727A EP 3491446 A1 EP3491446 A1 EP 3491446A1
Authority
EP
European Patent Office
Prior art keywords
lens
lens array
lenses
laser radiation
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP17740727.7A
Other languages
German (de)
English (en)
Inventor
Iouri Mikliaev
Vitalij Lissotschenko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lilas GmbH
Original Assignee
Lilas GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lilas GmbH filed Critical Lilas GmbH
Publication of EP3491446A1 publication Critical patent/EP3491446A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0961—Lens arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/292—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection by controlled diffraction or phased-array beam steering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements

Definitions

  • the present invention relates to a device for deflecting a laser radiation, in particular for a SLS or an SLM method or a laser TV method, a device for
  • Deflecting light in particular for a Lidar or a Ladar method or for a scanning observation method or a tracking method, as well as an apparatus for performing an SLS or an SLM method or another
  • galvanic mirror scanning devices are used in the prior art to allow rapid movement of a focus range of laser radiation across a working plane permit, in which a metal powder or a polymer powder is located.
  • the scan speed achieved is approximately at a few meters per second.
  • the systems employed for the above methods must continue to be capable of allowing rapid jumps of the focus areas in the work plane from a first area to a second area spaced from the first area. This is because, for example, the area heated by the laser radiation requires time for cooling and heat diffusion is to be prevented. For example, if laser exposure were to occur through a focal region moving continuously over the working plane, uneven surface area heats could result because of heat transfer For example, depends on the shape of the cross section of the area to be heated.
  • the mirrors used in the prior art must be able to move very quickly and be accelerated very quickly.
  • the problem underlying the present invention is the provision of a device of the type mentioned above, with the fast movements and / or rapid jumps of focus areas are made possible in a working plane, in particular high laser powers can be used. Furthermore, a should
  • the device for deflecting a laser radiation comprises:
  • a first lens array with a plurality of side by side
  • a second lens array having a plurality of juxtaposed lenses disposed in the device such that, during operation of the device, the laser radiation transmitted through the first lens array at least partially passes through the second lens array
  • Lens arrays is arranged and the laser radiation passed through the first lens array deflects during operation of the device in the direction of the second lens array,
  • Laser power can be enabled.
  • rapid jumps of the focus area may be made possible from a first area to a second area spaced from the first area.
  • ten times higher scanning speeds can be achieved in the working plane without increasing the angular velocity of the mirrors or changing the focal length of the objective.
  • the device has a second movable, in particular rotatable or pivotable,
  • Mirror comprises, which deflects the laser radiation passed through the second lens array during operation of the device, preferably in the direction of the lens.
  • the device comprises first lens means disposed between the first lens array and the first one
  • the first lens means in particular as a converging lens, preferably as a spherical converging lens
  • the device can comprise second lens means which are arranged between the first mirror and the second
  • Lens array are arranged, wherein the second lens means
  • the first lens means and / or the second lens means may in this case be arranged in the apparatus such that they image the output-side focal plane of the first lens array into the input-side focal plane of the second lens array.
  • the speed with which the deflection angle changes or with which the focus area is moved in the working plane is significantly increased.
  • the speed can be increased over existing systems by a factor corresponding to the quotient of the focal length of the lens means and the focal length of the lenses of the lens array. This quotient can well be several dozen, so for example between 10 and 30 are.
  • the intensity of a focus area in the working plane in a region corresponding to a first diffraction order can become weaker, until it's almost zero, and in a second, from the first one
  • first lens means and / or the second lens means are arranged in the device in such a way that during operation of the device they Fourier-transform the laser radiation to be deflected.
  • the first mirror can be arranged in or in the region of the output-side Fourier plane of the first lens means and in or in the region of the input-side Fourier plane of the second lens means. Furthermore, the output-side focal plane of the first lens array of the input-side Fourier plane of the first
  • Lens means correspond or in the range of the input side
  • the Fourier plane of the first lens means may be arranged.
  • the input-side focal plane of the second lens array may correspond to the output-side Fourier plane of the second lens means or be arranged in the region of the output-side Fourier plane of the second lens means.
  • the device is a third
  • Lens disposed in the device such that during operation of the device through the first lens array
  • the third lens array passed laser radiation passes at least partially through the third lens array and the third lens array passed laser radiation passes at least partially through the second lens array.
  • Lens arrays is arranged, it can be ensured that in the region of the third lens array existing partial beams of the
  • Laser radiation in each case only enter into a lens of the second lens array. This minimizes losses.
  • the device comprises control means which move the first mirror at a first speed during operation of the device, in particular with a first one
  • Regions that correspond to different orders of diffraction, are gradually applied to the areas of the working plane lying between the first acted upon with laser radiation areas of the working plane with laser radiation.
  • the device for deflecting light comprises:
  • a first lens array with a plurality of side by side
  • a lens which is arranged on the side facing away from the first mirror side of the second lens array.
  • the device for deflecting light may optionally be in the
  • the device may deflect light instead of laser radiation when used for a scanning observation method or a tracking method.
  • a photodetector can be arranged in front of the first lens array.
  • the device can also deflect light formed as laser radiation when it is used for a lidar or a ladar method.
  • the device for carrying out an SLS or an SLM method or another scanning method comprises a device according to the invention for deflecting a laser radiation or a device according to the invention for deflecting light.
  • Fig. 1 is a schematic view of a first embodiment of a device according to the invention
  • Fig. 2 shows schematically a movement of the focus area with the
  • Device deflected laser radiation in a working plane
  • Fig. 3 is a schematic view of a second embodiment of a device according to the invention.
  • the illustrated in Fig. 1 embodiment of a device for deflecting laser radiation 1 comprises a first lens array 2, which has a plurality of juxtaposed lenses 3.
  • These lenses 3 can be arranged next to each other cylindrical lenses whose cylinder axes perpendicular to the
  • Direction may be aligned in which the lenses 3 are arranged side by side.
  • the cylindrical lenses can as biconvex or
  • Plano-convex lenses are formed. It is also possible to use spherical lenses instead of the cylindrical lenses. ln the propagation direction of the laser radiation behind the first
  • Lens array 2 is a first Fourierransformationselement serving as a lens means 4 is arranged.
  • This first lens means 4 is formed in the illustrated embodiment as a spherical biconvex lens. There are certainly other designs of the first
  • the distance between the focal plane of the lenses 3 of the first lens array 2 and the first Fourier transform element serving as the lens means 4 corresponds to the focal length Fi of
  • Focal length of the lenses 3 of the first lens array 2 is.
  • This laser radiation 1 may be formed, for example, as a plane wave, which is exactly from the left in Fig. 1 and parallel to the optical axis of
  • Lens arrays 2 impinges on the first lens array 2.
  • Laser radiation 1 is after passing through the first
  • Lens array 2 in the focal plane of the lenses 3 are split into a plurality of spaced-apart partial beams, which have in the focal plane of the lenses 3 beam waist.
  • the device further comprises a movable, in particular rotatable or pivotable, first mirror 5.
  • the mirror 5 is movable or pivotable about an axis which in the
  • FIG. 1 Drawing plane of FIG. 1 extends into it. This is indicated by the arrow 6.
  • the first mirror 5 is in the region of the output-side focal plane of the first Fourier transformation element serving as the lens means 4 arranged.
  • the partial beams of the laser radiation generated by the lenses 3 of the first lens array 2 are reflected by the first mirror 5 upwards in FIG.
  • the device further comprises a second one
  • This second lens means 7 is also formed in the illustrated embodiment as a spherical biconvex lens. There are quite other designs of the second lens means 7 conceivable.
  • first lens means 4 and / or the second lens means 7 it is possible to form the first lens means 4 and / or the second lens means 7 not as individual biconvex lenses but as a plurality of lenses.
  • two lenses can be used in each case
  • Propagation direction of the laser radiation are arranged closely behind one another.
  • the device further comprises a second lens array 8 having a plurality of juxtaposed lenses 9.
  • These lenses 9 may be arranged side by side cylindrical lenses whose cylinder axes perpendicular to the
  • Direction may be aligned in which the lenses 9 are arranged side by side.
  • the cylindrical lenses can as biconvex or
  • Plano-convex lenses are formed. It is also possible to use spherical lenses instead of the cylindrical lenses.
  • Fourier transform element serving lens means 7 corresponds to the focal length F2 of the second lens means 7.
  • the distance between the second lens array 8 and the second lens means 7 thus F2 +, wherein the focal length of the lenses 9 of the second lens
  • Lens arrays 8 is.
  • the two-dimensional intensity distribution of the laser radiation 1 to be deflected in the input-side focal plane of the first lens means 4 is determined by the first lens means 4
  • the input-side focal plane of the first lens means 4 can also be used as the object plane and the
  • Focal plane of the first lens means 4 converted into an angular distribution in the Fourier plane. This means that, in the Fourier plane, those partial beams which have the same angle in the input-side focal plane or object plane coincide in the Fourier plane at the same location.
  • the output-side focal plane of the second lens means 7 can also be referred to as the image plane, in which an image of the juxtaposed beam waistings is produced, which are present in the output-side focal plane of the lenses 3 of the first lens array 2.
  • the focal lengths Fi and F2 of the lens means 4, 7 may be the same or different from each other.
  • the lens means 4, 7 form a telescope having a factor of 1 magnification when the focal lengths Fi and F2 are the same. If the focal lengths Fi and F2 of the lens means 4, 7 are different, the result is one
  • beam waistings of sub-beams of the laser radiation 1 arranged next to one another are generated in the input-side focal plane of the second lens array 8. These partial beams pass through the lenses 9 of the lens array 8 and emerge as kol I in the first beam of these, the transverse dimension of the transverse dimension of the lenses 9 corresponds. The emerging from all lenses 9 partial beams form at the output of the second lens array 8.
  • Lens arrays 8 a common kol I in (7) laser radiation 10 with a common uninterrupted wavefront.
  • the beam waistings shown in the input-side focal plane of the second lens array 8 are displaced, in particular to the left or to the right in FIG. 1 or in the direction in which the Lenses 9 are arranged side by side.
  • the deflection angle corresponds approximately to the quotient of the displacement in the transverse direction of the focal plane and the focal length of the lenses 9.
  • each of the individual sub-beams has its own phase shift.
  • Corresponding to diffraction maxima corresponds to the phase shift between adjacent partial beams of the wavelength or an integer multiple of the wavelength of the laser radiation.
  • Diffraction order is transferred to the adjacent diffraction order.
  • the intensity of a diffraction order has reached its maximum, the intensity of the preceding or adjacent order is equal to zero.
  • the intensity of the barely reduce intensely intensive order and at the same time increase the intensity of the next diffraction order.
  • the intensity of the laser radiation is thus successively increased and reduced in succession in directions spaced at equal angular intervals or switched on and off.
  • the device further comprises a movable, in particular rotatable or pivotable, second mirror 11.
  • the mirror 11 is movable or pivotable about an axis which in the
  • FIG. 1 Drawing plane of FIG. 1 extends into it. This is indicated by the arrow 12.
  • the second mirror 11 reflects the laser radiation 10 emerging from the second lens array 8 to the right in FIG. 1.
  • the device further comprises an objective 13, in particular a focusing objective or an F-theta objective.
  • an objective 13 in particular a focusing objective or an F-theta objective.
  • the laser radiation 10 emerging from the second lens array 8 and reflected by the mirror 11 passes through.
  • focus areas 15a, 15b, 15c, 15d, 15e, 15f, 15g are generated in a working plane (see Figure 2).
  • spaced focus areas 15a, 15b, 15c, 15d, 15e, 15f, 15g correspond to the individual diffraction orders, which
  • Continuous pivoting or rotation of the first mirror 5 in turn increase in intensity and decrease again.
  • the laser radiation of different orders emerging in different directions from the lens array 8 are focused into focus areas 15a, 15b, 15c, 15d, 15e, 15f, 15g, which are equidistant from each other.
  • Focus area 15a decrease and at the same time increase the intensity of the adjacent second focus area 15b until it reaches the maximum intensity. This is illustrated in FIG. 2 by the arrow 16ab.
  • the focus area 15a is thus not scanned over the work plane 14 to transition to the focus area 15b. Rather, the focus area 15a expires slowly while the focus area 15b gains intensity. The space of the working plane 14 lying between these two focus areas 15a, 15b is during the
  • the pivoting or rotating of the first mirror 5 a pivoting or rotating the second mirror 11 superimposed.
  • the first mirror has once applied to all the focus areas 15a, 15b, 15c, 15d, 15e, 15f, 15g successively with laser radiation
  • the second mirror is continuously pivoted or rotated so that when
  • Focus area is shifted slightly to the right in Fig.2. This is indicated by the dotted focus area 15a '.
  • the second mirror 11 moves the laser radiation 10 in the
  • the illustrated in Figure 3 second embodiment takes into account this problem. It differs from the first in that the device according to FIG. 3 additionally comprises a third lens array 17 which has a plurality of lenses 18 arranged next to one another.
  • These lenses 18 may be arranged side by side cylindrical lenses whose cylinder axes may be aligned perpendicular to the direction in which the lenses 18
  • the cylindrical lenses can be designed as biconvex or plano-convex lenses. It is also possible to use spherical lenses instead of the cylindrical lenses.
  • the third lens array 17 is arranged in the input-side focal plane of the second lens array 8 and thus exactly where the beam waist of the partial beams are imaged.
  • the lenses 18 of the third lens array 17 act at this position as field lenses, which form the partial beams such that in each case one of the partial beams impinges exactly on one of the lenses 9 of the second lens array 8.
  • Continuous scanning motions are methods of deflecting laser radiation that are different from SLS or SLM methods or light useful, such as for a laser television, a Lidar- or a Ladar system and for
  • FIG. 1 Corresponding movements of focus areas in the working plane 14 are shown in FIG. There are from left to right the scanning angle and from bottom to top the time in arbitrary
  • the second mirror 11 performs relatively fast movements, whereas the first mirror 5 performs relatively slow movements.
  • the second mirror 11 scans in each case in one direction over an angular range which corresponds to the distance between two diffraction orders 19.
  • the angle traveled by the deflected laser radiation due to the pivoting or rotation of the second mirror 11 are indicated in FIG. 4 by solid arrows 20.
  • the second mirror 11 slows down and accelerates in the opposite direction.
  • the laser light source or, in the case of a scanning camera, one instead of the other
  • Laser light source arranged photodetector to be turned off. Continue to take place during the braking and
  • Diffraction order 19 is transferred. This transition from one Diffraction order 19 to the next is indicated in Figure 4 with the dashed arrows 21.

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Laser Beam Processing (AREA)

Abstract

Dispostif servant à dévier un rayonnement laser (1), en particulier pour un procédé de frittage sélectif par laser ou un procédé de fusion sélective par laser, qui comprend un premier réseau de lentilles (2) constitué d'une pluralité de lentilles juxtaposées (3), un second réseau de lentilles (8) constitué d'une pluralité de lentilles juxtaposées (9), un premier miroir (5) mobile, en particulier rotatif ou pivotant, qui est disposé entre les deux réseaux de lentilles (2, 8) et qui, lorsque le dispositif est en fonctionnement, dévie le rayonnement laser (1) traversant le premier réseau de lentilles (2) en direction du deuxième réseau de lentilles (8), ainsi qu'un objectif (13) qui, lorsque le dispositif est en fonctionnement, focalise le rayonnement laser (10) traversant le deuxième réseau de lentilles (8) dans un plan de travail (14).
EP17740727.7A 2016-07-28 2017-07-14 Dispositif pour dévier un rayonnement laser ou pour dévier la lumière Withdrawn EP3491446A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016113978.5A DE102016113978B4 (de) 2016-07-28 2016-07-28 Vorrichtung zum Ablenken einer Laserstrahlung oder zum Ablenken von Licht
PCT/EP2017/067934 WO2018019625A1 (fr) 2016-07-28 2017-07-14 Dispositif pour dévier un rayonnement laser ou pour dévier la lumière

Publications (1)

Publication Number Publication Date
EP3491446A1 true EP3491446A1 (fr) 2019-06-05

Family

ID=59366422

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17740727.7A Withdrawn EP3491446A1 (fr) 2016-07-28 2017-07-14 Dispositif pour dévier un rayonnement laser ou pour dévier la lumière

Country Status (5)

Country Link
US (1) US11796792B2 (fr)
EP (1) EP3491446A1 (fr)
DE (1) DE102016113978B4 (fr)
RU (1) RU2747369C2 (fr)
WO (1) WO2018019625A1 (fr)

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US11828879B2 (en) 2020-07-29 2023-11-28 Lg Innotek Co., Ltd. Vibrated polarizing beam splitter for improved return light detection
DE102020209944A1 (de) 2020-08-06 2022-02-10 Robert Bosch Gesellschaft mit beschränkter Haftung LiDAR-System

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JPH11133354A (ja) * 1997-10-31 1999-05-21 Minolta Co Ltd 像投影装置
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Also Published As

Publication number Publication date
DE102016113978B4 (de) 2021-09-02
US11796792B2 (en) 2023-10-24
RU2019105622A (ru) 2020-08-28
RU2019105622A3 (fr) 2020-11-10
RU2747369C2 (ru) 2021-05-04
DE102016113978A1 (de) 2018-02-01
WO2018019625A1 (fr) 2018-02-01
US20190155020A1 (en) 2019-05-23

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