EP3423801A1 - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- EP3423801A1 EP3423801A1 EP17704217.3A EP17704217A EP3423801A1 EP 3423801 A1 EP3423801 A1 EP 3423801A1 EP 17704217 A EP17704217 A EP 17704217A EP 3423801 A1 EP3423801 A1 EP 3423801A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pressure sensor
- annular
- cover
- region
- base body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
Definitions
- the present invention relates to a pressure sensor for measuring a pressure in a fluid, ie in a liquid or in a gas, having the features of the preamble of claim 1.
- Such a pressure sensor is known, for example, from WO 2004/042337 A1. It comprises a monolithic basic body, which has a ring area and a membrane area. In this case, the annular area encloses a cavity in a circumferential direction. The membrane area closes this cavity at an axial end of the ring area. Furthermore, the pressure sensor is equipped with an internal electrical circuit having a measuring range. This measuring area is arranged on a side facing away from the cavity outside of the body on the membrane area.
- the known pressure sensor can be configured as an absolute pressure sensor. For this purpose, a separate vacuum chamber is integrated into the membrane area. The effort required for this is relatively large.
- the base body is made of plastic. Furthermore, in the known pressure sensor, the internal circuit is exposed to environmental influences, which can lead to contamination and / or damage to the circuit.
- monolithic body in the present context a body made in or of one piece which does not have separate components assembled to form the body.
- Typical monolithic bodies are molded parts, sintered parts, castings.
- the base body is made of a ceramic.
- an absolute pressure sensor in which a lid is placed on the body of the metallic base to form an integrated, so not separate reference pressure chamber.
- the reference pressure chamber there is a predetermined negative pressure different from 0 bar. Thermal effects are compensated with appropriate electronics.
- EP 1 363 1 16 A1 Another absolute pressure sensor is known from EP 1 363 1 16 A1, in which the main body consists of metal and in which a separate reference pressure chamber is attached to the main body, in which a predetermined negative pressure of 0 bar also prevails. Electrical connections of the pressure sensor are guided over or through a bottom plate of the reference pressure chamber to the outside. The wiring of the circuit of the body with this bottom plate is relatively expensive to manufacture.
- Such a pressure sensor can be particularly advantageous as an absolute pressure sensor, wherein a temperature-independent embodiment is preferred.
- the present invention is concerned with the problem of providing an improved or at least another embodiment for a pressure sensor of the type described above, which is characterized in particular by an improved protection of the internal circuit. Furthermore, a particularly simple to produce construction is desired.
- the invention is based on the general idea of equipping the pressure sensor with a cover, by means of which at least the measuring range of the internal electrical circuit can be covered.
- an annular disc is provided, which is arranged axially between the cover and the base body and which encloses the measuring area in the circumferential direction.
- the annular disc serves as an axial spacer element in order to prevent axial contact between the measuring region or the membrane region and the cover.
- a gap can be created axially between the base body and the cover, in which the measuring range is located and which ensures the required mobility of the diaphragm region relative to the cover. Due to the cover, the internal electrical circuit is efficiently protected at least in the measuring range.
- an extremely compact construction can be created at least axially for the pressure sensor.
- the annular disc has an annular body and a central opening which is completely enclosed by the annular body in the circumferential direction. Furthermore, the annular disc is applied to the cavity facing away from the axial outer side of the base body. The annular disc is dimensioned so that the measuring range of the internal electrical circuit is within the central opening and is enclosed by the annular body in the circumferential direction.
- the cover is designed disk-shaped and on a facing away from the body axia- len outer side of the annular disc arranged so that it covers the central opening. Thus, the annular disc is sandwiched axially between the base body and the cover.
- the annular disc is designed separately, so that it represents a separate component or a separate component with respect to the main body and the cover.
- the annular disk may be arranged as a separate component between the base body and the cover and be securely connected in a suitable manner to the base body and to the cover.
- the annular disc is preferably a separate component which is protected by a coating of a bonding material, e.g. Lot or adhesive, in particular glass solder, is formed. This coating is applied to the base and / or to the cover, e.g. printed.
- This coating is in the course of further production of the pressure sensor, preferably by a thermal process, in particular by a baking, cured on the one hand, the separate body, namely the ring body is formed, while on the other hand at the same time a solid connection with the base body and the cover is generated.
- the annular disc serves as a connecting means for firmly connecting the cover to the base body.
- the disc-shaped cover has substantially the same cross section as the main body.
- the respective cross section is oriented perpendicular to the axial direction.
- cover and body have about the same diameter.
- the term "about” here includes deviations of at most ⁇ 10%, preferably of at most ⁇ 5%.
- the cover in cross section is at most the same size as the main body.
- the annular disc in cross-section is at most equal to the base body.
- the annular disk is slightly smaller in cross-section than the main body and / or slightly smaller than the Abscheid- smaller, preferably at most 10% smaller. Also conceivable are embodiments in which the cover and / or the annular disc has a smaller size
- the internal electrical circuit may have a contact region which has a plurality of electrical contact points which are arranged outside the membrane region, that is to say in the annular region on the axial outer side of the main body.
- the measuring range of the internal electrical circuit can then be electrically contacted via these contact points and corresponding conductor tracks of the contact region.
- This measuring range can be formed for example by a bridge circuit of strain-sensitive elements that change their electrical resistance in an elastic deformation.
- a Wheatstone bridge is used to connect strain gauges.
- Strain gauges can be formed by resistance paths. These resistance paths can be printed on the axial outside of the main body. Likewise, the contact area can be printed on the outside of the body. The contact area is expediently printed on the base body before the measuring range.
- the annular disk may expediently have a plurality of contact openings in the annular body, that is to say outside the central opening, which in each case belong to one of the Align contact points axially.
- the annular disk may expediently have a plurality of contact openings in the annular body, that is to say outside the central opening, which in each case belong to one of the Align contact points axially.
- the cover may expediently have a plurality of connection openings, which in each case are aligned axially with respect to one of the contact openings. Accordingly, it is possible to electrically contact the pads of the internal circuit through the cover and through the contact openings.
- an embodiment is advantageous in which an external electrical circuit is arranged on an axial outside of the cover facing away from the main body, which is electrically contacted by the connection openings and through the contact openings with the contact points of the internal electrical circuit.
- the external electrical circuit may be provided for connecting an evaluation electronics, which may in particular comprise a microprocessor.
- the external circuit can have, for example, balancing resistors in order to be able to calibrate the measuring range of the internal circuit during production.
- the external circuit comprises only connection points and / or conductor tracks which make it possible to connect the pressure sensor to a device processing the sensor signals.
- the electrical contacting of the external circuit with the internal circuit through the connection openings of the cover and through the contact openings of the annular disk simplifies the electrical contacting of the two circuits, which considerably simplifies the production of the pressure sensor.
- These direct solder joints do without additional connection aids. For example, no additional wires or tracks are required.
- Such direct solder joints can be realized in a particularly reliable and automated manner, which makes possible an inexpensive manufacture of the pressure sensor.
- the solder joints in the region of the connection openings can be realized by a solder layer, which is located on an inner wall of the cover, which encloses the respective connection opening in the circumferential direction.
- the measuring range of the internal circuit measuring resistors wherein the external circuit then expediently has a tuning range with balancing resistors for balancing the measuring resistors.
- the cover may have an evacuation opening which is fluidically connected to a chamber formed by means of the central opening, said chamber being bounded axially on the one hand by the membrane area, on the other by the cover and radially by the annular body.
- this evacuation opening it is possible to hermetically sealed chamber with a desired target pressure to apply. If the chamber is filled with a desired reference pressure, the evacuation opening can be closed by means of a suitable closure. The chamber then serves as a reference pressure chamber. Consequently, an absolute pressure measurement is then possible with respect to this reference pressure. If one of vacuum, so 0 bar different target pressure is used as the reference pressure, there is a temperature dependence of the absolute pressure measurement. This can be taken into account by a temperature measurement with a corresponding circuit.
- a rough vacuum with a maximum of 300 hPa a fine vacuum with a maximum of 1 hPa, a high vacuum (HV) with a maximum of 10 "3 hPa, an ultra-high vacuum (UHV) with a maximum of 10 " 7 hPa and an extremely high vacuum (XHV) with maximum 10 "12 hPa distinguished as an ideal vacuum (IV) with 0 hPa usually can be achieved only in the laboratory.
- HV high vacuum
- UHV ultra-high vacuum
- XHV extremely high vacuum
- IV ideal vacuum
- said closure can be designed as a solder plug.
- the evacuation opening can expediently be arranged radially outside the central opening and can be fluidically connected to a recess which is formed in the annular body and opens radially inward at the central opening. In this way, the region of the central opening in which the measuring range of the internal circuit is reliably protected against contamination, for example, when closing the evacuation opening, material of the closure can penetrate into the evacuation opening.
- an axial wall thickness of the annular disc is smaller than an axial wall thickness of the cover.
- the axial wall thickness of the annular disc ten times or even twenty times smaller than the wall thickness of the cover.
- an axial wall thickness of the cover may be smaller than an axial wall thickness of the annular region of the base body.
- the wall thickness of the cover can be five times or ten times smaller than the wall thickness of the base body in the ring area. In any case, an extremely compact design for the pressure sensor is realized.
- an axial wall thickness of the annular disc is smaller than an axial wall thickness of the membrane region.
- the axial wall thickness of the annular disc may be five times or ten times smaller than the wall thickness of the membrane area.
- annular region of the main body has an annular step facing the cavity, which surrounds the membrane region in the circumferential direction.
- the annular region has an increased strength at the transition to the membrane region.
- side facing away from the cavity outside of the body is flat. The outside is thus uniformly flat over the ring area and the membrane area. The flat outer side simplifies the printing of the internal circuit, which allows a low-cost mass production.
- the internal electrical circuit is printed on the outside of the body.
- the main body is preferably made of a ceramic.
- the annular disc may consist of a ceramic, preferably of a glass ceramic, in particular of a glass solder.
- the annular disc can be connected to the main body by a glass fusion connection.
- the cover consists of a ceramic.
- the cover with the annular disc which may also consist of a ceramic, preferably glass ceramic, in particular glass solder, may be connected by a glass melt connection.
- the annular disc is printed on the outside of the body after the internal circuit is applied to the outside of the body.
- the annular disc can first be liquefied and then cured.
- a glass ceramic preferably a glass solder
- the cover is applied to the printed annular disc before it is thermally treated.
- this makes it possible in the thermal treatment of Annular washer at the same time burn on the base body and the cover, whereby the annular disc connects the cover fixed to the body.
- the invention also relates to a use of a pressure sensor of the type described above for measuring a pressure in a fluid.
- the use according to the invention is characterized in that the fluid comes into direct contact with the membrane area on an inner side of the main body facing the cavity. Thus, the pressure in the fluid can be measured directly.
- annular disk is plasticized for attaching the cover to the base body.
- the material of the annular disc is liquefied or plasticized at least on the cover and the body facing axial sides so far that there is an intimate connection with the materials of the cover and the body.
- the annular disc is made of a glass ceramic, while the cover and the base body of at least one other, compatible ceramic, which has a higher melting point.
- the annular disc is preferably formed by glass solder.
- FIG. 3 is an exploded isometric view of the pressure sensor of FIG.
- FIG. 4 is an isometric view of the pressure sensor of FIG. 2, but at a different stage of development
- Fig. 5 is an isometric view as in Fig. 4, but in another
- Embodiment of the pressure sensor Embodiment of the pressure sensor.
- a pressure sensor 1 comprises a monolithic basic body 2, which is preferably made of a ceramic.
- the base body 2 has an annular region 3 and a disk-shaped membrane region 4.
- the annular region 3 encloses a cavity 6 in a circumferential direction 5 indicated by a double arrow.
- the membrane region 4 closes This axial cavity 7 is indicated by a double arrow and relates to a longitudinal central axis 8 of the pressure sensor 1.
- the axial direction 7 extends parallel to the longitudinal central axis 8.
- the circumferential direction 5 rotates about the longitudinal central axis 8.
- An unspecified radial direction also relates to the longitudinal central axis eighth
- the pressure sensor 1 is also equipped with an internal electrical circuit 9, which may have a measuring area 10 and a contact area 11.
- the measuring region 10 comprises a plurality of measuring resistors 12.
- the contact region 11 has a plurality of electrical contact points 13, which are electrically connected via printed conductors 38 to the measuring region 10 or to the measuring resistors 12.
- a Wheatstone bridge is formed in the measuring region 10.
- the internal circuit 9 is arranged on a side facing away from the cavity 6 axial outer side 14 of the base body 2.
- This outer side 14 of the main body 2 is in this case formed jointly by the central membrane region 4 and the annular region 3, which surrounds the membrane region 4.
- the measuring area 10 is arranged on the membrane area 4.
- the contact region 11 can extend into the annular region 3.
- the contact area 11 and the measuring area 10 are printed on the outside 14 of the main body 2, e.g. by screen printing, and then baked.
- the pressure sensor 1 is equipped with an annular disc 15 which has an annular body 16 and a central opening 17 formed therein.
- the annular body 16 completely encloses the central opening 17 in the circumferential direction 5.
- the annular disc 15 is arranged axially on the axial outer side 14 of the main body 2.
- the annular disc 15 may also be printed on the outer side 14 of the main body 2, for example by screen printing.
- the annular disc 15 or its annular body 16 consists of a glass solder.
- the pressure sensor 1 is provided with a disc-shaped cover 18, which is shown in Fig. 2 is transparent.
- the cover 18 may also consist of a ceramic, in particular of a glass ceramic.
- the cover 18 is arranged axially on a side facing away from the base body 2 axial outer side 19 of the annular disk 15. In this case, the cover 18 is dimensioned so that it completely covers the central opening 17 of the annular disc 15.
- the perpendicular to the longitudinal central axis 8 extending cross-sections of base body 2, annular disc 15 and cover 18 are designed approximately equal, so that no radially over the base body 2 projecting interference contour.
- the annular disc 15 in the annular body 16, spaced and separate from the central opening 17 a plurality of contact openings 20 which are each axially aligned with one of the contact points 13.
- the respective contact opening 20 penetrates the annular body 15 axially.
- the cover 18 is provided with a plurality of connection openings 21 which penetrate axially through the cover 18.
- the connection openings 21 are each arranged axially aligned with one of the contact openings 20.
- exactly one connection opening 21 is provided for each contact opening 20.
- the internal circuit 9 or its contact area 1 1 has exactly four compact locations 13 are also exactly four contact openings 20 in the annular disc 15 and exactly four connection openings 21 in the cover 18 are provided.
- the pressure sensor 1 is equipped with an external electrical circuit 22, which is arranged on an axial outside 23 of the cover 18 facing away from the main body 2.
- This external circuit 22 can also be produced by means of printing technology and be printed on the cover 18, for example by screen printing.
- the external circuit 22 can now be electrically contacted through the connection openings 21 and through the contact openings 20 with the contact points 13 of the internal circuit 9.
- the external circuit 22 corresponding contact points 24, which can be electrically connected, for example by means of direct solder joints, which are not shown here, with the contact points 13 of the internal circuit 9, these direct solder joints through the connection openings 21 and through the contact openings 20th extend through.
- the external circuit 22 may, according to the embodiment shown in FIGS. 1 to 4, be provided with an integrated circuit 25, e.g. a microprocessor or the like to connect to equip the pressure sensor 1, for example, with a transmitter.
- the external circuit 22 has a matching region 37 with a plurality of balancing resistors 26, by means of which the measuring resistors 12 of the internal circuit 9 can be adjusted.
- the external circuit 33 can also be equipped with input and output terminals 31, via which electrical signals can be picked up or supplied by the pressure sensor 1.
- the cover 18 can optionally be equipped with an evacuation opening 27 which extends axially completely through the cover 18.
- This evacuation The fluid opening 27 is in fluid communication with a chamber 28, which is formed axially between the cover 18 and the base body 2 by means of the central opening 17 of the annular disk 15. Accordingly, this chamber 28 is delimited axially on the one hand by the membrane region 4, on the other hand axially by the cover 18 and radially by the annular body 16. Thus, this chamber 28 is hermetically sealed except for the evacuation 27.
- a comparison pressure can be applied to the axial outer side 14 of the main body 2 in the diaphragm region 4 via the evacuation port 27. If a predetermined comparison pressure is used, this can be generated in the chamber 28 and secured therein by the evacuation port 27 is sealed by means of a closure 29.
- closure 29 for example, a solder plug comes into consideration.
- solder or brazing material here come both metallic solders and ceramic solders, such. Glass solder, into consideration.
- the chamber 28 is evacuated before closing with the shutter 29, so that there is a vacuum in it as the reference pressure.
- a vacuum in it as the reference pressure.
- at least one fine vacuum ie a pressure of at most 1 hPa or 0.001 bar.
- the pressure sensor 1 then represents an absolute pressure sensor that operates substantially independently of the temperature.
- the evacuation opening 27 can be arranged radially outside the central opening 17.
- the annular disc 15 is provided in the region of the annular body 16 with a recess 30 which penetrates the annular body 16 axially and which opens radially inward into the central opening 17, that is open to it.
- the evacuation port 27 is thus fluidly connected through this recess 30 with the central opening 17.
- base body 2 has an axial height 32.
- the height 32 of the main body 2 simultaneously corresponds to the axial wall thickness 32 of the annular region 3.
- the annular disc 15 has an axial wall thickness 33.
- the cover 18 has an axial wall thickness 34.
- an axial wall thickness 35 registered the membrane area 4.
- the wall thickness 34 of the cover 18 is greater than the wall thickness 35 of the membrane area 4.
- the wall thickness 35 of the membrane area is 35 4 greater than the wall thickness 33 of the annular disc 15.
- the axial wall thickness 33 of the annular disc 15 is suitably dimensioned so that no contact between the measuring area 10 and the cover 18 is formed even with the maximum expected deformation of the membrane area 4.
- the maximum expected deformation of the diaphragm region 4 occurs at the maximum pressure for which the respective pressure sensor 1 is provided, including an optionally provided safety reserve.
- axial contact can occur between the membrane region 4 and the cover 18, as a result of which the membrane region 4 can be protected from a further deformation exceeding its elastic limit.
- the annular region 3 has an annular step 36, which faces the cavity 6.
- the annular step 36 is located in one of the outer side 14 of the base body 2 facing the axial end of the annular region. 3
- the ring step 36 can be reworked in the course of the production of the main body 2 in order to have as narrow tolerances for the spatial extent and in particular for the wall thickness 35 of the membrane region 4 in the membrane region 4 to be able to comply.
- the side facing away from the cavity 6 outside 14 of the body 2 is just configured so that it represents a flat surface.
- this outer side 14 of the main body 2 can be printed particularly easily, for example to apply the internal circuit 9 and, in particular, to apply the annular disc 15.
- the pressure sensor 1 can thus be provided to first print the main body 2 on its outer side 14 with the internal circuit 9.
- the annular disc 15 can be printed.
- the cover 18 is applied. When baking the annular disc 15, this is plasticized both with the base body 2 and with the cover 18.
- the printed-on annular disk 15 consists of glass solder, which firmly bonds to the base body 2 on the one hand and to the cover 18 on the other hand during the firing.
- the annular disk 15 is thus formed in a preferred embodiment by a glass solder layer which attaches the cover 18 to the base body 2. This is of particular advantage since it is thus possible to dispense with separate fastening means.
- the annular disc 15 can be realized by the printing process particularly inexpensive. Inn assembled state, the annular disc 15 is disposed axially between the cover 18 and the base body 2, wherein it has both the base body 2 and the cover 18 each have a large-area contact, namely along its entire annular body 16.
- the pressure sensor 1 presented here can be used in such a way that a fluid whose pressure is to be measured by means of the pressure sensor 1 can come into direct contact with the membrane region 4 at an inner side 39 of the base body 2 facing the cavity 6, in order to provide a direct pressure measurement enable.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102016203428.6A DE102016203428B3 (en) | 2016-03-02 | 2016-03-02 | pressure sensor |
PCT/EP2017/052643 WO2017148660A1 (en) | 2016-03-02 | 2017-02-07 | Pressure sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
EP3423801A1 true EP3423801A1 (en) | 2019-01-09 |
Family
ID=57961265
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP17704217.3A Withdrawn EP3423801A1 (en) | 2016-03-02 | 2017-02-07 | Pressure sensor |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP3423801A1 (en) |
DE (1) | DE102016203428B3 (en) |
WO (1) | WO2017148660A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102019209030B3 (en) * | 2019-06-21 | 2020-09-24 | Metallux Ag | Pressure sensor device |
DE102021214945A1 (en) | 2021-12-22 | 2023-06-22 | Metallux Ag | Sensor unit for a sensor device for measuring pressure and/or force |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3668499D1 (en) * | 1985-03-27 | 1990-03-01 | Siemens Ag | CAPACITIVE PRESSURE SENSOR. |
DE3874884T2 (en) * | 1988-04-21 | 1993-04-29 | Marelli Autronica | ELECTRICAL FORCE AND / OR DEFLECTION SENSOR, ESPECIALLY FOR USE AS A PRESSURE SENSOR. |
DE10221219B4 (en) * | 2002-05-13 | 2007-06-28 | Ifm Electronic Gmbh | pressure sensor |
JP3824964B2 (en) | 2002-05-17 | 2006-09-20 | 長野計器株式会社 | Absolute pressure sensor |
DE10252023B3 (en) | 2002-11-06 | 2004-07-15 | Metallux Gmbh | pressure sensor |
DE202004007128U1 (en) * | 2004-05-03 | 2004-09-16 | I F M Electronic Gmbh | Sensor, for static and/or dynamic monitoring of a physical quantity of a liquid or free flowing medium useful for measuring the temperature, pressure, streaming velocity of a liquid or solid medium in hydraulic and pneumatic applications |
DE102008051400A1 (en) | 2008-10-11 | 2010-06-17 | Metallux Ag | pressure sensor |
US8215176B2 (en) * | 2009-05-27 | 2012-07-10 | Continental Automotive Systems, Inc. | Pressure sensor for harsh media sensing and flexible packaging |
DE102010061322A1 (en) * | 2010-12-17 | 2012-06-21 | Turck Holding Gmbh | Pressure sensor has cup-shaped depression that is formed from the bottom of diaphragm to front side of measuring cell to form monolithic structure such that front side edge of depression is supported on sealing ring |
ITTO20121130A1 (en) * | 2012-12-21 | 2014-06-22 | Metallux Sa | PRESSURE SENSOR |
DE102014213941A1 (en) | 2013-08-09 | 2015-02-12 | Continental Automotive Systems, Inc. | Absolute pressure sensor with improved lid connection edge |
JP5975970B2 (en) * | 2013-11-20 | 2016-08-23 | 日立オートモティブシステムズ株式会社 | Pressure sensor |
-
2016
- 2016-03-02 DE DE102016203428.6A patent/DE102016203428B3/en active Active
-
2017
- 2017-02-07 WO PCT/EP2017/052643 patent/WO2017148660A1/en active Application Filing
- 2017-02-07 EP EP17704217.3A patent/EP3423801A1/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
WO2017148660A1 (en) | 2017-09-08 |
DE102016203428B3 (en) | 2017-02-23 |
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