EP3358608A4 - Thermal bonding sheet, and thermal bonding sheet with dicing tape - Google Patents

Thermal bonding sheet, and thermal bonding sheet with dicing tape Download PDF

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Publication number
EP3358608A4
EP3358608A4 EP16851600.3A EP16851600A EP3358608A4 EP 3358608 A4 EP3358608 A4 EP 3358608A4 EP 16851600 A EP16851600 A EP 16851600A EP 3358608 A4 EP3358608 A4 EP 3358608A4
Authority
EP
European Patent Office
Prior art keywords
thermal bonding
bonding sheet
dicing tape
sheet
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP16851600.3A
Other languages
German (de)
French (fr)
Other versions
EP3358608A1 (en
Inventor
Yuki Sugo
Nao KAMAKURA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority claimed from PCT/JP2016/078570 external-priority patent/WO2017057429A1/en
Publication of EP3358608A1 publication Critical patent/EP3358608A1/en
Publication of EP3358608A4 publication Critical patent/EP3358608A4/en
Pending legal-status Critical Current

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    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
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    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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    • H01L2924/0635Acrylic polymer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/06Polymers
    • H01L2924/068Polycarbonate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1305Bipolar Junction Transistor [BJT]
    • H01L2924/13055Insulated gate bipolar transistor [IGBT]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1306Field-effect transistor [FET]
    • H01L2924/13091Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/35Mechanical effects
    • H01L2924/351Thermal stress
    • H01L2924/3512Cracking
    • H01L2924/35121Peeling or delaminating

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Organic Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Dicing (AREA)
  • Die Bonding (AREA)
EP16851600.3A 2015-09-30 2016-09-28 Thermal bonding sheet, and thermal bonding sheet with dicing tape Pending EP3358608A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015194206 2015-09-30
JP2016184505A JP6858520B2 (en) 2015-09-30 2016-09-21 Sheet for heat bonding and sheet for heat bonding with dicing tape
PCT/JP2016/078570 WO2017057429A1 (en) 2015-09-30 2016-09-28 Thermal bonding sheet, and thermal bonding sheet with dicing tape

Publications (2)

Publication Number Publication Date
EP3358608A1 EP3358608A1 (en) 2018-08-08
EP3358608A4 true EP3358608A4 (en) 2018-10-03

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US (1) US10707184B2 (en)
EP (1) EP3358608A4 (en)
JP (1) JP6858520B2 (en)
CN (1) CN108174617B (en)
TW (1) TWI695045B (en)

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JP6967839B2 (en) 2016-03-23 2021-11-17 日東電工株式会社 Heat bonding sheet, heat bonding sheet with dicing tape, manufacturing method of bonded body, power semiconductor device
JP6864505B2 (en) 2016-06-24 2021-04-28 日東電工株式会社 Heat-bonding sheet and heat-bonding sheet with dicing tape
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JP7007827B2 (en) * 2017-07-28 2022-01-25 日東電工株式会社 Die bond film, dicing die bond film, and semiconductor device manufacturing method
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JP2023098498A (en) * 2021-12-28 2023-07-10 三菱マテリアル株式会社 Bonding sheet, and method for producing bonded body

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EP3358608A1 (en) 2018-08-08
JP2017069560A (en) 2017-04-06
US10707184B2 (en) 2020-07-07
TW201720896A (en) 2017-06-16
US20180269175A1 (en) 2018-09-20
JP6858520B2 (en) 2021-04-14
CN108174617B (en) 2021-06-01
CN108174617A (en) 2018-06-15
TWI695045B (en) 2020-06-01

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