EP3341979A1 - Moisture-repellent protective layer - Google Patents
Moisture-repellent protective layerInfo
- Publication number
- EP3341979A1 EP3341979A1 EP16757642.0A EP16757642A EP3341979A1 EP 3341979 A1 EP3341979 A1 EP 3341979A1 EP 16757642 A EP16757642 A EP 16757642A EP 3341979 A1 EP3341979 A1 EP 3341979A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- protective layer
- piezoceramic
- particles
- actuator
- moisture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000011241 protective layer Substances 0.000 title claims abstract description 32
- 239000005871 repellent Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 claims abstract description 6
- 239000002245 particle Substances 0.000 claims description 29
- 239000010410 layer Substances 0.000 claims description 28
- 239000000919 ceramic Substances 0.000 claims description 24
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000000443 aerosol Substances 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- 238000005476 soldering Methods 0.000 claims description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 238000000034 method Methods 0.000 description 10
- 238000000576 coating method Methods 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 238000003487 electrochemical reaction Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 239000011149 active material Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000004447 silicone coating Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- JQMFQLVAJGZSQS-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-N-(2-oxo-3H-1,3-benzoxazol-6-yl)acetamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)CC(=O)NC1=CC2=C(NC(O2)=O)C=C1 JQMFQLVAJGZSQS-UHFFFAOYSA-N 0.000 description 1
- JAWMENYCRQKKJY-UHFFFAOYSA-N [3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-ylmethyl)-1-oxa-2,8-diazaspiro[4.5]dec-2-en-8-yl]-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]methanone Chemical compound N1N=NC=2CN(CCC=21)CC1=NOC2(C1)CCN(CC2)C(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F JAWMENYCRQKKJY-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000007596 consolidation process Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/02—Forming enclosures or casings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
Definitions
- Piezoceramic multilayer actuators consist of stacked thin layers of piezoelectrically active material (2), z.
- PZT lead zirconate titanate
- the outer electrodes (3), (4) connect the inner electrodes, whereby the inner electrodes are electrically connected in parallel and combined into two groups, which represent the two terminal poles of the actuator. Applying an electrical voltage to the terminal poles, this is transmitted in parallel to all internal electrodes and causes an electric field in all layers of active material, thereby mechanically deformed. The sum of all these mechanical deformations is available at the end faces of the actuator as usable strain (6) and / or force.
- Such a layer structure is usually produced by the cofiring method.
- the active material is provided before sintering as a so-called green film by a screen printing by means of noble metal paste with internal electrodes, pressed into actuator stacks, pyrolysed and then sintered, whereby the monolithic actuator is formed.
- the surfaces of the actuator body are then processed by a molding process, generally by grinding.
- This base metallization is by the application of a metallic material (4), z. B. by soldering a wire mesh reinforced. At this reinforced layer of the electrical connection wire (5) is soldered.
- the structure and production of such actuators and external electrodes is z.
- Piezoceramic actuators therefore react very sensitively to ambient humidity for the reasons stated, and can only be operated in pulsed mode during humid environments, so that the moisture can be desorbed again in the pulse pauses, or operated at a sufficiently high frequency.
- Actuators are always coated with an insulating layer to prevent electrical flashovers on the actuator surface. These coatings are mostly unfilled or filled polymers and are good to very well permeable to water vapor. There is no known polymeric coating that could solve the leakage problem. Previous possibilities to counteract the problem have not achieved satisfactory results.
- the inner electrodes can be slightly withdrawn into the interior of the actuator, so that a closed ceramic layer is formed on the actuator surface (buried electrodes, eg US2008048528). However, due to manufacturing tolerances, the closed ceramic layer must be at least about 0.2 mm thick. In operation, it is passively stretched and inevitably cracks, thereby losing its protective effect.
- actuator sections can be made with buried electrodes having a height of only about 2 mm. Since not enough mechanical tension can build up in such a short section during operation of the actuator, the sections theoretically do not crack (eg JP 8-236828). However, the freedom from cracking is only guaranteed theoretically (statistically). Examining such actuators, one finds quite a high proportion of actuators are still sensitive to moisture.
- an unsintered piezoceramic film onto the actuator surface and then sinter it (for example DE10021919).
- a layer of piezoceramic paste e.g. Apply by stencil printing and sinter. In both cases there is also a statistical risk of crack formation in the coating due to the operation of the actuator.
- a layer produced on the actuator surface by means of an air-flow deposition method is used as a protective layer against moisture (FIG. 2).
- the protective layer is preferably a ceramic layer, wherein the ceramic may preferably be selected from piezoceramic, aluminum oxide, zirconium oxide, or titanium oxide or other inorganic substances.
- the ceramic may preferably be selected from piezoceramic, aluminum oxide, zirconium oxide, or titanium oxide or other inorganic substances.
- RTIC Room Temperature Impact Consolidation
- the protective layer therefore basically consists of (broken and interconnected) particles.
- This particle layer can be annealed after application, in particular at temperatures ⁇ 800 ° C., preferably ⁇ 600 ° C., more preferably 300 ° C.
- the layer thicknesses of the layers thus produced can be in the range between 1 and 100 ⁇ m, with the range of 5 to 30 ⁇ m being particularly preferred.
- ADM-generated layers are very dense (relative density> 95% preferably> 98%), non-porous and do not contain any "grain boundaries" as they are produced by sintering processes Electrochemical conductivities such as occur in a sintered ceramic do not occur high density with sufficient protective effect be very thin and thus remain free of cracks during operation of the actuator.
- the moisture-protecting protective layer of the piezoceramic multilayer actuator consists according to a preferred embodiment of particles, preferably ceramic particles
- the protective layer of ceramic particles is preferably applied at temperatures ⁇ 600 ° C., preferably ⁇ 300 ° C., and at temperatures ⁇ 800 ° C., preferably ⁇ 600 ° C., particularly preferably after-treatment at 300 ° C.
- the protective layer of ceramic particles is applied by means of air-flow separation method, particularly preferably by means of aerosol deposition.
- the protective layer of ceramic particles surrounds the entire actuator with the exception of the end sides, wherein only protective layer-free locations for soldering the leads are kept open. In a further preferred embodiment, the protective layer of ceramic particles covers only the side surfaces of the actuator, which do not carry outer electrode layer. In a further preferred embodiment, the protective layer of ceramic particles does not conduct the electric current.
- the protective layer of ceramic particles does not undergo chemical reactions with water vapor.
- the protective layer consists of piezoceramic particles, aluminum oxide particles, zirconium oxide particles or titanium oxide particles.
- the protective layer has a layer thickness of 5-100 ⁇ , particularly preferably the range of 10-30 ⁇ on.
- the invention also encompasses a method for producing a piezoceramic multilayer actuator wherein the moisture-protecting protective layer is applied by means of an air-flow separation method, particularly preferably by means of aerosol deposition.
- the ceramic bodies for monolithic, piezoceramic multilayer actuators with dimensions of 7 ⁇ 7 ⁇ 30 mm 3 were produced and provided with outer electrode strips.
- Comparative Example 1 The actuators were washed with a nonaqueous medium, dried and coated with a conformal coating for isolation.
- Example 3 The actuators were washed with demineralised water, dried, and coated with a silicone coating (conformal coating) for insulation.
- Example 3 The actuators were coated with an ADM layer of piezoceramic. (SP505, layer thickness 10 ⁇ )
- the actuators were coated with an ADM layer of piezoceramic. (SP505, layer thickness 30 ⁇ )
- the actuators were coated with an ADM layer of piezoceramic (SP53, layer thickness 20 ⁇ ).
- the actuators manufactured according to the above procedure were connected to a voltage of 200 V (normal operating voltage) and the current was measured.
- the actuators were exposed to a temperature of 25 ° C and a humidity of 30% RH.
- the current first decreases rapidly (charge and polarization processes), reaches a minimum (Imin) and then increases rapidly (moisture ingress into the actuator).
- Imin a minimum
- moisture ingress into the actuator As a measure of the moisture resistance is the time until the current exceeds the value of 1 ⁇ for the first time (ta).
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
Claims
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015216317 | 2015-08-26 | ||
DE102015216516 | 2015-08-28 | ||
DE102015219796 | 2015-10-13 | ||
DE102015223685 | 2015-11-30 | ||
PCT/EP2016/070163 WO2017032868A1 (en) | 2015-08-26 | 2016-08-26 | Moisture-repellent protective layer |
Publications (1)
Publication Number | Publication Date |
---|---|
EP3341979A1 true EP3341979A1 (en) | 2018-07-04 |
Family
ID=56802493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP16757642.0A Withdrawn EP3341979A1 (en) | 2015-08-26 | 2016-08-26 | Moisture-repellent protective layer |
Country Status (6)
Country | Link |
---|---|
US (1) | US20180269375A1 (en) |
EP (1) | EP3341979A1 (en) |
JP (1) | JP2018526823A (en) |
CN (1) | CN107924988A (en) |
DE (1) | DE102016216065A1 (en) |
WO (1) | WO2017032868A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102019206018B4 (en) * | 2019-04-26 | 2022-08-25 | Pi Ceramic Gmbh | Electromechanical actuator with ceramic insulation, method for its production and method for controlling such an actuator |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3330538A1 (en) | 1983-08-24 | 1985-03-14 | Siemens AG, 1000 Berlin und 8000 München | Piezoelectric actuator |
US4803763A (en) | 1986-08-28 | 1989-02-14 | Nippon Soken, Inc. | Method of making a laminated piezoelectric transducer |
US5281885A (en) | 1989-11-14 | 1994-01-25 | Hitachi Metals, Ltd. | High-temperature stacked-type displacement device |
US5092360A (en) | 1989-11-14 | 1992-03-03 | Hitachi Metals, Ltd. | Flow rated control valve using a high-temperature stacked-type displacement device |
US5406164A (en) | 1993-06-10 | 1995-04-11 | Brother Kogyo Kabushiki Kaisha | Multilayer piezoelectric element |
JPH07226541A (en) | 1994-02-09 | 1995-08-22 | Brother Ind Ltd | Multilayered piezoelectric element |
JP3239670B2 (en) | 1995-02-27 | 2001-12-17 | 株式会社デンソー | Multilayer piezoelectric body |
DE10021919C2 (en) * | 2000-02-04 | 2002-03-07 | Pi Ceramic Gmbh | Process for producing monolithic piezoceramic multilayer actuators and monolithic piezoceramic multilayer actuators |
DE102004031596A1 (en) | 2004-06-30 | 2006-02-09 | Robert Bosch Gmbh | piezo actuator |
JP2009178982A (en) * | 2008-01-31 | 2009-08-13 | Brother Ind Ltd | Method for manufacturing piezoelectric actuator and method for manufacturing liquid transferring device |
DE102011081279A1 (en) * | 2011-08-19 | 2013-02-21 | Siemens Aktiengesellschaft | Process for the electrical passivation of electromechanical components |
CN103748702B (en) * | 2011-08-30 | 2016-09-07 | 京瓷株式会社 | Piezoelektrisches mehrschichtelement and possess the piezoelectric actuator of this Piezoelektrisches mehrschichtelement, injection apparatus and fuel injection system |
DE202013012023U1 (en) | 2012-01-11 | 2015-04-29 | Ceramtec Gmbh | Actuator module with a multilayer actuator arranged in a housing and a constantly extremely low leakage current at the actuator surface |
-
2016
- 2016-08-26 US US15/755,178 patent/US20180269375A1/en not_active Abandoned
- 2016-08-26 CN CN201680048796.5A patent/CN107924988A/en active Pending
- 2016-08-26 DE DE102016216065.6A patent/DE102016216065A1/en not_active Withdrawn
- 2016-08-26 WO PCT/EP2016/070163 patent/WO2017032868A1/en active Application Filing
- 2016-08-26 JP JP2018509916A patent/JP2018526823A/en active Pending
- 2016-08-26 EP EP16757642.0A patent/EP3341979A1/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
DE102016216065A1 (en) | 2017-03-02 |
CN107924988A (en) | 2018-04-17 |
JP2018526823A (en) | 2018-09-13 |
WO2017032868A1 (en) | 2017-03-02 |
US20180269375A1 (en) | 2018-09-20 |
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Legal Events
Date | Code | Title | Description |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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Effective date: 20180326 |
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AX | Request for extension of the european patent |
Extension state: BA ME |
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RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: SCHREINER, HANS-JUERGEN Inventor name: BINDIG, REINER Inventor name: MOOS, RALF Inventor name: SCHUBERT, MICHAEL Inventor name: EINHELLINGER-MUELLER, TANJA Inventor name: SCHMIDT, TOBIAS |
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DAV | Request for validation of the european patent (deleted) | ||
DAX | Request for extension of the european patent (deleted) | ||
STAA | Information on the status of an ep patent application or granted ep patent |
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18D | Application deemed to be withdrawn |
Effective date: 20181020 |