EP3341138A1 - Akustischer sensor zum aussenden und/oder empfangen akustischer signale - Google Patents
Akustischer sensor zum aussenden und/oder empfangen akustischer signaleInfo
- Publication number
- EP3341138A1 EP3341138A1 EP16732298.1A EP16732298A EP3341138A1 EP 3341138 A1 EP3341138 A1 EP 3341138A1 EP 16732298 A EP16732298 A EP 16732298A EP 3341138 A1 EP3341138 A1 EP 3341138A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- membrane
- acoustic sensor
- acoustic
- electroacoustic
- electroacoustic transducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000012528 membrane Substances 0.000 claims abstract description 167
- 239000011324 bead Substances 0.000 claims description 13
- 230000007423 decrease Effects 0.000 claims description 7
- 230000005484 gravity Effects 0.000 claims 1
- 230000005284 excitation Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
- G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
- G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
- G10K9/125—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means with a plurality of active elements
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
- G10K9/18—Details, e.g. bulbs, pumps, pistons, switches or casings
- G10K9/20—Sounding members
Definitions
- the present invention relates to an acoustic sensor for emitting and / or receiving acoustic signals.
- a membrane In an acoustic sensor, a membrane is typically excited by means of an electroacoustic transducer. As a result, the membrane is set in vibration, whereby an acoustic signal is emitted from the membrane. In a corresponding manner, it is also possible to receive acoustic signals via the membrane.
- the electroacoustic transducer is arranged in a center of the membrane to this over its entire
- WO2013117437A1 discloses such an acoustic sensor. In this, however, occur very high punctual loads on the membrane.
- the acoustic sensor according to the invention for emitting and / or receiving acoustic signals comprises a membrane having a first surface and a second surface, wherein the first and the second surface
- a housing which the membrane and at least limits an expansion of the surface circumference of the membrane during operation of the acoustic sensor, and a first
- electroacoustic transducer located on a first portion of the first
- the membrane is arranged, wherein the first portion is located away from a centroid of the first surface of the membrane.
- the area perimeter of the membrane is limited in its extent to the extent that the area perimeter does not vary upon excitation of the membrane by the electroacoustic transducer.
- the membrane is bordered in particular by its surface circumference through the housing.
- the first electroacoustic transducer is arranged azentrisch on the first surface.
- the first electroacoustic transducer is thus not on the centroid of the membrane.
- the first portion is entirely outside the centroid of the first surface of the membrane.
- the first portion may also have a hole in which the
- Centroid of the first surface of the membrane is located, wherein the first electroacoustic transducer is disposed away from this hole on the membrane.
- the centroid is a center of the membrane. If the membrane has, for example, the shape of a circular disk, then a center of the circle is the centroid of the membrane.
- the first and second surfaces are in
- An inventive acoustic sensor is advantageous because even a small movement of the electro-acoustic transducer is converted into a strong movement of the membrane.
- the inventive arrangement of the first electro-acoustic transducer on the membrane particularly large areas of the membrane are created in which no electro-acoustic transducer is arranged. These can come with a particularly low
- Damping resistance oscillate and are whip-like excited by the first acoustic transducer.
- electroacoustic transducer is arranged, has a higher rigidity, as in the adjacent to the first portion region.
- the electroacoustic transducer has a higher rigidity, as in the adjacent to the first portion region.
- the acoustic sensor comprises a plurality of electroacoustic transducers, each of the electroacoustic transducers being arranged on respectively one associated subarea of the first surface of the diaphragm, wherein associated subregions do not overlap one another, and the associated subregions are remote from the
- Centroid of the first surface of the membrane lie.
- a variety are two or more electro-acoustic transducers.
- the first acoustic transducer is one of the electroacoustic transducers of the plurality of electroacoustic
- electroacoustic transducers starting from many sides are particularly efficiently excited.
- the electroacoustic transducers are excited by different electrical signals. In this way, a sensor array is created from a single membrane.
- a rigidity of the membrane in a region which lies between the associated partial regions of two electroacoustic transducers is lower than in the associated subregions of these electroacoustic transducers.
- the rigidity of the membrane is lower because a Thickness of the membrane is lower.
- the plurality of electroacoustic transducers is preferably arranged on a common printed circuit board.
- Each of the electroacoustic transducers is fixed on the printed circuit board.
- a relative movement of the electro-acoustic transducer is prevented against each other.
- a stroke of the membrane is increased in the areas between the electroacoustic transducers, since the membrane can not escape in another direction, since this is held in the starting position in the region of the electroacoustic transducers.
- the plurality of electroacoustic transducers is preferably mechanically connected to the membrane.
- the first electroacoustic transducer is an annular electroacoustic transducer and is arranged with one of its disk-shaped surfaces on the first surface of the membrane.
- the annular electroacoustic transducer has in particular the shape of a
- the electroacoustic transducer is with the
- a stiffness of the membrane in the first portion in which the annular electroacoustic transducer is arranged greater than in a partial area which is bordered by the annular electroacoustic transducer.
- the rigidity of the membrane is lower because a thickness of the membrane is lower.
- a bending moment of the membrane is reduced in this enclosed portion and this enclosed portion is excited to a particularly strong vibration.
- a particularly strong one Oscillation is characterized by a particularly large amplitude of the radiated sound pressure.
- a bead is a thin spot of the
- the acoustic sensor further comprises a support element, which is arranged on the side of the first surface of the membrane and forms a stop which limits a maximum amplitude of the membrane.
- the support element has a surface contour that corresponds in its course to a surface contour of the first surface of the membrane. It is also advantageous if the support element is a printed circuit board. In this way, the membrane can be protected from overstretching, for example by a blunt impact.
- the maximum amplitude of the membrane is a maximum stroke of the membrane.
- the electroacoustic transducer is a piezoelectric element or a bimetal. Both a piezo element and a bimetal can perform a small movement quickly and with great force. Thus, an acoustic sensor with a particularly large lever arm can be created, wherein the electro-acoustic transducer applies sufficient force to excite the membrane via this lever.
- 1 shows an acoustic sensor according to a first embodiment of the invention
- 2 shows a membrane of an acoustic sensor according to a second
- FIG. 3 shows an acoustic sensor according to a third embodiment of the invention
- FIG. 4 shows an acoustic sensor according to a fourth embodiment of the invention
- Figure 5 shows an acoustic sensor according to a fifth embodiment of the invention.
- FIG. 6 shows an acoustic sensor according to a sixth embodiment of the invention.
- FIG. 1 shows an acoustic sensor 10 according to a first embodiment of the invention.
- the acoustic sensor 10 comprises a membrane 20, a
- the membrane 20 has the form of a in this first embodiment
- Circular disc wherein the circular disc has a variable thickness.
- the two opposing surfaces 21, 22 of the membrane 20 are a first surface 21 and a second surface 22.
- the first surface 21 and the second surface 22 thus form opposite sides of the membrane.
- the second surface 22 lies on one side of the membrane 20, in which an acoustic signal from the acoustic sensor 10 in its environment
- a common area perimeter of the membrane 20 is defined.
- the diaphragm 20 is made of a flexible material.
- the membrane 20 may be made of any materials such as aluminum, fiber composites, rubber, plastics, and the like, and may be formed as required by casting, extrusion, and / or post-processing such as grinding, drilling, lasing.
- the housing 30 has the shape of a pot in this first embodiment.
- the membrane 20 spans an opening of this pot and thus an opening of the housing 30.
- the edge of the membrane 20 is welded to the housing 30.
- the housing 30 is made of a material which has a lower elasticity than the membrane 20.
- the edge of the membrane is held in a ground plane of the membrane 20, which in this first embodiment is a plane in which the circular disk-shaped membrane 20 is located.
- the membrane 20 is laterally clamped in the housing 30.
- a change in length of the first electroacoustic transducer 40 caused by the application of electrical voltage to the first electroacoustic transducer 40 forces the diaphragm 20 to bend and thus to move out of the housing. Due to the fact that the membrane 20 is outside the housing.
- Centroid 23 is excited, a lever is maximized over which a stroke of the membrane 20 is generated.
- the electroacoustic transducer 40 is a piezoelectric element or a bimetal in this first embodiment.
- the first electroacoustic transducer 40 is disposed on a first portion 24 of the first surface 21 of the membrane.
- the first portion 24 of the first surface 21 is thus an area on the first surface 21 of the membrane 20 which is covered by the first electroacoustic transducer 40.
- the first portion 24 is located entirely outside a centroid 23 of the first surface 21 of
- the first surface 21 is a round surface in this first embodiment. Therefore, the centroid 23 is a center of the first surface, wherein between the centroid 23 and the edge of the membrane 20 is a constant distance d1.
- the distance d1 is a radius of the circular disk-shaped membrane 20 and thus of the first surface 21.
- the first electroacoustic transducer 40 is arranged between the edge of the membrane 20 and the centroid 23 of the first surface 21.
- the first electroacoustic transducer 40 is a circular disk-shaped component in this first embodiment, which has a diameter which is smaller than the distance d1.
- a rigidity of the membrane 20 steadily decreases in a region adjoining the first partial region 24 starting from the first partial region 24. This is achieved in this first embodiment in that a thickness of the membrane 20 in the first portion 24 is greater than in the remaining regions of the membrane 20, wherein between the first portion 24 and the remaining regions of the membrane 20, a continuous transition is created.
- first portion 20 therefore has a constant first thickness in the first portion. Away from the first portion 24, the thickness of the membrane 20 decreases steadily until it is reduced to a second thickness which is less than the first thickness.
- the first partial area 24 with the first thickness is shown on the left in FIG. 1 and an area with the second thickness is shown on the right in FIG. Between these
- Regions of different thickness is adjacent to the first portion 24 area in which the thickness of the membrane 20 decreases steadily.
- FIG. 2 shows a membrane 20 of an acoustic sensor 10 according to a second embodiment of the invention.
- the second embodiment substantially corresponds to the first embodiment.
- a plurality of electroacoustic transducers 40, 41, 42 are disposed on the diaphragm 20.
- Each of the electroacoustic transducers 40, 41, 42 is arranged on a respectively associated subregion 24, 25, 26 of the first surface 21 of the membrane 20.
- the first electroacoustic transducer 40 is arranged in the first subregion 24, a second electroacoustic transducer 41 is arranged in a second subregion 25 and a third electroacoustic transducer 42 is arranged in a third subregion 26.
- the associated subregions 24, 25, 26 do not overlap each other.
- a region 27 is located between the first electroacoustic transducer 40 and the second electroacoustic transducer 41 and thus between the first partial region 24 and the second partial region 25.
- a rigidity of the membrane 20 is lower than in the first partial region 24 and the second partial region 25. This will achieved in that the thickness of the membrane decreases steadily starting from the first portion and increases only halfway between the first portion and the second portion again.
- the membrane 20 thus forms in its cross-section an arc between the first electroacoustic transducer 40 and the second electroacoustic transducer 41.
- the membrane 20 forms an arc between the second electroacoustic transducer 41 and the third electroacoustic transducer 42.
- a any number of electroacoustic transducers 40, 41, 42 are arranged on the membrane and thus a sensor array are created.
- the first electro-acoustic transducer 40 is indicated when it is excited by an electrical signal.
- the first electroacoustic transducer 40 will bend, expand or bend and expand upon excitation. Assume that the first electroacoustic transducer 40 flexes upon excitation. Thereby, a portion 62 of the membrane, which is arranged on the outer edge of the first electroacoustic transducer 40, applied to a torque, which is indicated by the first arrow 60. In this case, the section 62 of the membrane is a region of the membrane that extends away from the first electroacoustic transducer 40, starting from the first electroacoustic transducer 40.
- FIG. 3 shows an acoustic sensor 10 according to a third embodiment of the invention.
- the third embodiment of the invention corresponds to the previously described embodiments of the invention.
- the acoustic sensor 10 comprises the first electroacoustic transducer 40 and the second electroacoustic transducer 41 and thus a plurality of electroacoustic transducers.
- the first electroacoustic transducer 40 is arranged on the first subregion 24 and the second electroacoustic transducer 41 on the second subregion 25.
- Partial region 25 in this case has a lower rigidity than the first subregion 24 and the second subregion 25 according to the second embodiment. Both the first subregion 24 and the second subregion 25 lie between the centroid 23 of the membrane 20 and the edge of the membrane
- Centroid 25 of the first surface 21 of the membrane 20 does not overlap each other.
- the membrane 20 has a bead 29 which extends along the edge of the membrane 20 and circumscribes all the electroacoustic transducers 40, 41 arranged on the membrane 20.
- the bead 29 is thereby a taper of the thickness of the membrane 20.
- the bead 29 thus extends a trench on the first surface 21 of the membrane 20, which has a circular course along the edge of the membrane 20.
- the electroacoustic transducers 40, 41 are arranged within this annular course of the bead 29. Due to the shape of the membrane 20 can without changing the electro-acoustic transducer 40, 41, 42, the directional characteristic and the maximum stroke, the
- Resonance frequency and other parameters of the acoustic sensor 10 can be adjusted. This is also done by the bead 29. So is the bead
- Opening angle causes a larger Schallschwingungshub. If the bead 29 is dispensed with and the electroacoustic transducer is positioned further outward on the diaphragm 20, the result is a larger sound-radiating surface of the diaphragm 20, and thus a narrower directional characteristic at a lower level
- the area between the electroacoustic transducers 40, 41 may also have further beads, which are not shown in FIG.
- FIG. 4 shows an acoustic sensor 10 according to a fourth embodiment of the invention.
- the fourth embodiment of the invention corresponds to the first to third embodiments of the invention, however, the acoustic sensor includes only the first electroacoustic transducer 40 and not a plurality
- the first electroacoustic transducer is designed as an annular electroacoustic transducer 43, which has substantially the shape of a perforated disc.
- the annular electroacoustic transducer 43 is arranged with one of its disk-shaped surfaces on the first surface 21 of the membrane 20. In this case, the annular electroacoustic transducer 43 and thus the first subregion 24 surrounds the centroid 23 of the first surface 21 of the membrane 20.
- This subregion 28 is thus the region of the membrane 20 which lies within the inner ring circumference of the electroacoustic transducer 43.
- the thickness of the membrane 20 in this subregion 28 is less than in the first subregion 24.
- FIG. 5 shows an acoustic sensor 10 according to a fifth embodiment of the invention.
- the fifth embodiment corresponds to the first to fourth embodiments of the invention.
- the acoustic sensor 10 further comprises a support element 50, which on the side of the first surface 21 of the membrane
- the support member 50 is disposed in an interior of the acoustic sensor 10.
- a located on the side of the membrane 20 surface of the support member 50 is shaped such that in an arrangement of the support member 50 in the acoustic
- a gap between the support member 50 and the membrane 20 with the electro-acoustic transducers 40, 41 is formed, which has a substantially constant gap thickness. Only in the area of the electroacoustic transducers 40, 41 can this gap be minimized in its extent in order to enable contacting of the electroacoustic transducers 40, 41. For this purpose, it is advantageous if the support element 50 is at the same time a printed circuit board. A contacting can then take place via conductor tracks on the support element
- the gap is an elastic insulating material
- the support element 50 is fixed in its position relative to the housing 30. If there is a blunt impact on the second surface 22 of the
- FIG. 6 shows an acoustic sensor 10 according to a sixth
- the plurality of electroacoustic transducers 40, 41 are arranged on a common printed circuit board 70.
- a position of the electroacoustic transducers 40, 41 is fixed relative to one another.
- the first electroacoustic transducer 40 and the second electroacoustic transducer 41 can not be forced apart upon excitation of the diaphragm 20.
- the diaphragm 20 is forced into the region between the first electroacoustic transducer 40 and the second electroacoustic transducer 41 to vibrate with a greater amplitude when passing through the first and second electroacoustic transducers
- Transducer 40, 41 is excited.
- the rigidity of the membrane 20 is adjusted by a thickness of the membrane 20. It follows that sensitive areas of the acoustic sensor 10 in which the electroacoustic transducers 40, 41, 42 are arranged are protected by a thicker and therefore more robust membrane than the remaining area of the acoustic sensor 10. At the same time, the areas of the membrane 20 are , in which no electroacoustic transducer 40, 41, 42 is arranged, low mass and can therefore produce a large area a narrow directional characteristic.
- a stiffness of the membrane 20 can also be adapted in all embodiments of the invention by forming the membrane 20 from different materials. This allows a sensor according to the invention with a membrane 20 of constant thickness.
- the membrane 20 is made of
- the electroacoustic transducer can be arranged between two layers of the membrane 20.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015216163.3A DE102015216163A1 (de) | 2015-08-25 | 2015-08-25 | Akustischer Sensor zum Aussenden und/oder Empfangen akustischer Signale |
PCT/EP2016/064836 WO2017032483A1 (de) | 2015-08-25 | 2016-06-27 | Akustischer sensor zum aussenden und/oder empfangen akustischer signale |
Publications (1)
Publication Number | Publication Date |
---|---|
EP3341138A1 true EP3341138A1 (de) | 2018-07-04 |
Family
ID=56235833
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP16732298.1A Withdrawn EP3341138A1 (de) | 2015-08-25 | 2016-06-27 | Akustischer sensor zum aussenden und/oder empfangen akustischer signale |
Country Status (5)
Country | Link |
---|---|
US (1) | US20180250710A1 (de) |
EP (1) | EP3341138A1 (de) |
CN (1) | CN107921481A (de) |
DE (1) | DE102015216163A1 (de) |
WO (1) | WO2017032483A1 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102018106333A1 (de) * | 2018-03-19 | 2019-09-19 | HELLA GmbH & Co. KGaA | Sensorvorrichtung zur Erfassung von Schall, insbesondere zur Erfassung von Körperschall an einem Fahrzeug |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8728509D0 (en) * | 1987-12-05 | 1988-01-13 | Rolls Royce Plc | Acoustic emission transducer |
KR100781467B1 (ko) * | 2006-07-13 | 2007-12-03 | 학교법인 포항공과대학교 | 공기중 파라메트릭 트랜스미팅 어레이를 이용한 초지향성초음파 거리측정을 위한 멤스 기반의 다공진 초음파트랜스듀서 |
EP2272753B1 (de) * | 2009-07-06 | 2013-02-27 | EADS Deutschland GmbH | Gasflusssteuerungsvorrichtung |
US8357981B2 (en) * | 2010-05-28 | 2013-01-22 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Transducer devices having different frequencies based on layer thicknesses and method of fabricating the same |
US8680695B2 (en) * | 2011-04-19 | 2014-03-25 | Eastman Kodak Company | Energy harvesting using MEMS composite transducer |
DE102011079646A1 (de) * | 2011-07-22 | 2013-02-07 | Robert Bosch Gmbh | Ultraschallsensorvorrichtung zum Erfassen und/oder Senden von Ultraschall |
DE102012201884A1 (de) | 2012-02-09 | 2013-08-14 | Robert Bosch Gmbh | Schallwandler |
JP6065421B2 (ja) * | 2012-06-15 | 2017-01-25 | セイコーエプソン株式会社 | 超音波プローブおよび超音波検査装置 |
US9029963B2 (en) * | 2012-09-25 | 2015-05-12 | Sand 9, Inc. | MEMS microphone |
CN105144749A (zh) * | 2013-04-24 | 2015-12-09 | 株式会社村田制作所 | 超声波产生装置 |
JP2015118016A (ja) * | 2013-12-18 | 2015-06-25 | セイコーエプソン株式会社 | 物理量センサー、圧力センサー、高度計、電子機器および移動体 |
-
2015
- 2015-08-25 DE DE102015216163.3A patent/DE102015216163A1/de not_active Withdrawn
-
2016
- 2016-06-27 WO PCT/EP2016/064836 patent/WO2017032483A1/de active Application Filing
- 2016-06-27 US US15/754,736 patent/US20180250710A1/en not_active Abandoned
- 2016-06-27 CN CN201680048871.8A patent/CN107921481A/zh active Pending
- 2016-06-27 EP EP16732298.1A patent/EP3341138A1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
WO2017032483A1 (de) | 2017-03-02 |
DE102015216163A1 (de) | 2017-03-02 |
US20180250710A1 (en) | 2018-09-06 |
CN107921481A (zh) | 2018-04-17 |
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Legal Events
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STAA | Information on the status of an ep patent application or granted ep patent |
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