EP3319756B1 - Pressure shoe comprising an expansion chamber - Google Patents

Pressure shoe comprising an expansion chamber Download PDF

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Publication number
EP3319756B1
EP3319756B1 EP16736852.1A EP16736852A EP3319756B1 EP 3319756 B1 EP3319756 B1 EP 3319756B1 EP 16736852 A EP16736852 A EP 16736852A EP 3319756 B1 EP3319756 B1 EP 3319756B1
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EP
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Prior art keywords
expansion
pressure shoe
workpiece section
expansion chamber
chambers
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EP16736852.1A
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German (de)
French (fr)
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EP3319756A1 (en
Inventor
Holger Steinwender
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Thielenhaus Technologies GmbH
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Thielenhaus Technologies GmbH
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B35/00Machines or devices designed for superfinishing surfaces on work, i.e. by means of abrading blocks reciprocating with high frequency
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/02Machines or devices using grinding or polishing belts; Accessories therefor for grinding rotationally symmetrical surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/16Machines or devices using grinding or polishing belts; Accessories therefor for grinding other surfaces of particular shape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/02Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
    • B24B47/06Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables by liquid or gas pressure only

Definitions

  • the present invention relates to a pressure shoe having a pressing surface for directly pressing finishing tape to a radial peripheral surface of a rotating workpiece portion during finish machining.
  • a pressure shoe with the aforementioned features is made EP 0 802 017 A1 known, wherein the Andschreibschuh is provided for processing a lying between the collar surfaces peripheral surface of the workpiece section.
  • the Andschreibschuh is provided for processing a lying between the collar surfaces peripheral surface of the workpiece section.
  • two expansion chambers to be considered as expansion elements are proposed in the region of the transitions on the pressure shoe. The two expansion chambers are acted upon by a common line during finishing machining with a fluid.
  • the fluid flows back and forth between the two expansion chambers during finish machining due to the driven relative axial movement between the pressure shoe and the workpiece, so that the expansion chambers expand in an oscillating manner. This ensures that the finishing tape is applied at all times in the transition areas between the peripheral surface and collar surfaces and on the collar surfaces. A targeted influence on the shape of the waistband or the transition areas between collar and peripheral surface is not intended.
  • the shape of the radial peripheral surface of the workpiece section to be machined can be specifically influenced, in particular with regard to crowning and / or out-of-roundness.
  • WO 2008 / 113,925 A1 Another Andrückschuh, which forms the preamble of claim 1, is made WO 2008 / 113,925 A1 known, wherein the expansion elements are formed by cylinders, with which in each case a pressure element can be selectively acted upon in the direction of the peripheral surface with pressure via a piston located in the respective cylinder. Since the cylinder piston units are arranged one behind the other in the circumferential direction, with such a pressure shoe only the targeted generation or removal of an ovality of a peripheral surface workpiece is possible.
  • a pressing device in which a clamping device designed as a shell is pivotally mounted.
  • the shell can be pivoted in response to a measured diameter by means of a piston, whereby the shell pushes the finishing tape on one side of the pivot axis of the shell stronger to the workpiece than on the opposite side of the pivot axis, so that the conicity of the workpiece surface is selectively influenced.
  • the problem is solved in particular by a pressure shoe with the features mentioned above, wherein the plurality of expansion elements are individually and independently radially expandable under deformation of the pressure surface in the direction of the peripheral surface of the workpiece portion, so that in the finish machining the shape of the peripheral surface of the workpiece section targeted different expansion of distributed over the pressing surface expansion elements can be influenced.
  • the expansion elements can be supplied with energy independently of each other so that they can deform individually in the axial direction.
  • the expansion elements can in particular be expanded in the radial direction mechanically, electromechanically, thermally, hydraulically or in another suitable manner. Due to the expansion, the pressure surface is deformed.
  • each expansion element is formed by an expansion chamber which is in each case connected individually to a line leading out of the pressure shoe and is expandable under pressure of the fluid radially under deformation of the pressure surface in the direction of the circumferential surface of the workpiece section. While the expansion element will be described in more detail below with respect to the fluid expandable expansion chamber, it is not intended that the teachings be limited to expansion chambers.
  • a plurality of independently expandable expansion chambers are provided, with which the profile of the integrally continuous pressure surface can be changed by deformation in the radial direction. It can thus be achieved that the shape of the pressing band of the pressure shoe pressing the finishing belt against the radial peripheral surface can be changed at least locally, which results in that the pressure of the finishing belt acting on the peripheral surface can be locally influenced. It is thus possible to predetermine the distribution of the pressure over the pressing surface, whereby the shape of the workpiece section to be machined, which can be achieved by the finish machining, can be influenced.
  • the pressure shoe is used in particular in a finish processing device which, in addition to the pressure shoe, comprises a rotary drive for the workpiece to be machined, an oscillation drive for generating an oscillating relative movement in the workpiece longitudinal direction between the workpiece and the pressure shoe and a finishing belt between the pressure surface and the radial peripheral surface of the pressure shoe ,
  • the finish processing device also comprises a control unit for carrying out the method according to the invention.
  • the pressing surface of the pressure shoe is in particular that surface in the form of a surface completely formed partial ring, which during machining radially inwardly in the direction of the workpiece section to be machined is directed.
  • the partial annular surface essentially has a radius which corresponds to the radius of the workpiece section to be machined. A (local) deviation from this radius can be achieved by pressurizing the expansion chambers.
  • the expansion chambers are thus formed in particular so within the Andschreibschuhs that when pressure is applied, the pressing surface of the Andschreibschuhs is deformed in the radial direction in the region of the respective expansion chamber. From the pressure-free rest position, the expansion chamber expands under the action of a fluid in the radial direction by at least two microns, preferably at least 5 microns, wherein the maximum expansion of the expansion chamber or the deformation of the pressure surface in the radial direction is at most 50 microns, preferably at most 30 .mu.m.
  • the expansion chambers can be acted upon independently of one another, in particular with different pressures, so that the expansion chambers expand to different degrees in the radial direction and thus the pressure surface locally deformed differently strong.
  • the plurality of expansion chambers can extend parallel to one another along the pressing surface of the pressure shoe in the circumferential direction.
  • at least five expansion chambers arranged side by side in the axial direction are provided which run parallel to each other over the same length in the circumferential direction.
  • the pressing surface is in particular uniformly deformed along the respective expansion chamber.
  • the Andschreibschuh points so in the area of the expanded expansion chamber the same or a smaller radius than before the expansion.
  • the plurality of expansion chambers can extend parallel to one another along the pressing surface of the pressure shoe in the axial direction.
  • the preferred at least seven expansion chambers are arranged in the circumferential direction next to each other and extend over the same length along the pressing surface.
  • the object is also achieved by a method for operating a finish processing device according to claim 5.
  • a control unit is provided, which is given a size of the radial expansion and by regulating the pressure in the expansion chamber and / or the volume in the expansion chamber sets the predetermined radial expansion of the respective expansion chamber.
  • the fluid is in particular a liquid or a gas.
  • all expansion chambers are acted upon independently of one another by a fluid, so that the expansion chambers expand to different degrees in the radial direction.
  • the expansion chambers are so charged with fluid that the outer expansion chambers experience the greatest radial expansion and the inner expansion chambers the least radial expansion.
  • the expansion of the at least one expansion chamber is kept constant during finish machining. This is particularly preferred when the expansion chambers in the circumferential direction parallel to each other and thus the crown or taper of the workpiece to be machined section is determined by the expansion of the expansion chambers. In particular, it can be monitored whether the pressure and / or the volume of the fluid in the expansion chamber corresponds to the desired values, it being possible to readjust in the event of deviations.
  • the expansion of adjacent expansion chambers is different, so that a achievable by the finish machining shape of the peripheral surface of the workpiece section to be machined is predetermined by the different expansion.
  • the expansion chambers when the expansion chambers extend in the axial direction for influencing the out-of-roundness of the workpiece section to be machined, it can be provided that the expansion of each expansion chamber is changed in each case during the finish machining.
  • the expansion of each expansion chamber is changed in dependence on the rotational position of the workpiece section.
  • the expansion of the expansion chambers is controlled so that when a predetermined circumferential location of an expansion chamber, the radial expansion of this expansion chamber is always minimal, while investing a staggered circumferential location of the expansion chambers, the expansion chambers are maximally expanded.
  • the expansion of the expansion chambers is carried out in such a way that a lowworthtagende circumferential location is acted upon only by a small pressure through the respective expansion chamber, while a morebeltragende peripheral point is acted upon in each case with a larger pressure from the respective expansion chamber. It is understood that a finishing belt is always arranged between the pressing surface of the pressure shoe and the peripheral surface of the workpiece section to be machined during machining.
  • the plurality of expansion chambers when the plurality of expansion chambers extend in the circumferential direction, it may be provided for selectively influencing the crowning or conicity of the workpiece section to be machined that the expansion of each expansion chamber is changed depending on the axial relative position between Andschreibschuh and workpiece section. This ensures that the pressure surface is adapted to the crowning in the axial relative movement.
  • Fig. 1 shows a Andschreibschuh 1 with a radially inwardly directed, part-ring-shaped Andschreib lighting 2.
  • the expansion elements are designed as indicated expansion chambers 5.
  • the expansion chambers 5 are arranged side by side in the axial direction 8 and extend in the circumferential direction 7 parallel to each other.
  • a finishing belt (not shown) is arranged between the pressure surface 2 and a radial peripheral surface 3 of an only indicated workpiece section 4.
  • the workpiece section 4 rotates about an axis of rotation, while the workpiece section 4 and the pressure shoe 1 oscillate relative to each other in the axial direction 8, wherein the finishing belt, not shown, of the Andschreibconstruction 2 of the Andschreibschuhs 1 for machining on the radial peripheral surface 3 of the workpiece section 4 is pressed.
  • each expansion chamber 5 is individually connected to an outgoing from the Andschreibschuh 1 line 6, so that the expansion chambers 5 can be acted upon independently of each other with a fluid. If the expansion chamber 5 is acted upon by a fluid, the expansion chamber 5 expands with its Since the expansion chambers 5 are independently expandable, the profile of the pressing surface 2 along the axial direction 8 is adjustable, so that the crown of the workpiece portion 4 can be selectively influenced.
  • Fig. 3 is a cross section through two expansion chambers 5, wherein only the left expansion chamber 5 is acted upon by a fluid, so that the expansion chamber 5 is expanded in the radial direction 9.
  • FIG. 4 An alternative embodiment of the expansion chambers 5 is in Fig. 4 shown.
  • the expansion chambers 5 are bellows-shaped in their cross-section, so that a larger expansion in the radial direction 9 can be achieved. Also in Fig. 4 only the left expansion chamber 5 is acted upon by a fluid.
  • the expansion chambers 5 extend in the axial direction 8 parallel to each other and are arranged side by side in the circumferential direction 7. With such an arrangement of the expansion chambers 5, the out-of-roundness of the circumferential surface 3 of the workpiece section 4 to be machined can be influenced in a targeted manner.
  • Fig. 5 to 8 The application of force to the circumferential surface 3 of the workpiece section 4 by the expansion chambers 5 of the pressure shoe 1 in such a targeted processing of the out-of-roundness is in Fig. 5 to 8 shown.
  • the workpiece section 4 is egg-shaped here.
  • the expansion of the upper expansion chamber 5 of the left Andschreibschuhs 1, however, is initially at the rotation of 0 ° to 90 ° maximum and is slightly reduced until reaching the rotation angle of 135 °.
  • the present invention has the advantage that the shape of a circumferential surface 3 of a workpiece section 4 can be influenced in a targeted manner by finish machining with the pressure shoe 1.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Footwear And Its Accessory, Manufacturing Method And Apparatuses (AREA)

Description

Die vorliegende Erfindung betrifft einen Andrückschuh mit einer Andrückfläche zum unmittelbaren Andrücken von Finishband an eine radiale Umfangsfläche eines rotierenden Werkstückabschnitts während einer Finishbearbeitung.The present invention relates to a pressure shoe having a pressing surface for directly pressing finishing tape to a radial peripheral surface of a rotating workpiece portion during finish machining.

Ein Andrückschuh mit den vorgenannten Merkmalen ist aus EP 0 802 017 A1 bekannt, wobei der Andrückschuh zur Bearbeitung einer zwischen Bundflächen liegenden Umfangsfläche des Werkstückabschnittes vorgesehen ist. Damit das zwischen Andrückschuh und Werkstück liegende Finishband während der axialen Relativbewegung zwischen Andrückschuh und Werkstück jederzeit an den gerundeten Übergängen zwischen Umfangsfläche und seitlichen Bundflächen anliegt, sind zwei als Expansionselemente aufzufassende Expansionskammern im Bereich der Übergänge an dem Andrückschuh vorgeschlagen. Die beiden Expansionskammern werden über eine gemeinsame Leitung während der Finishbearbeitung mit einem Fluid beaufschlagt. Das Fluid fließt während der Finishbearbeitung aufgrund der angetriebenen axialen Relativbewegung zwischen Andrückschuh und Werkstück zwischen den zwei Expansionskammern hin und her, so dass die Expansionskammern oszillierend expandieren. Hierdurch wird gewährleistet, dass das Finishband jederzeit in den Übergangsbereichen zwischen Umfangsfläche und Bundflächen und an den Bundflächen anliegt. Eine gezielte Beeinflussung der Form der Bundfläche oder der Übergangsbereiche zwischen Bundflächen und Umfangsfläche ist dabei nicht beabsichtigt.A pressure shoe with the aforementioned features is made EP 0 802 017 A1 known, wherein the Andrückschuh is provided for processing a lying between the collar surfaces peripheral surface of the workpiece section. In order for the finishing belt lying between the pressure shoe and the workpiece to abut at any time on the rounded transitions between the peripheral surface and the lateral collar surfaces during the axial relative movement between the pressure shoe and the workpiece, two expansion chambers to be considered as expansion elements are proposed in the region of the transitions on the pressure shoe. The two expansion chambers are acted upon by a common line during finishing machining with a fluid. The fluid flows back and forth between the two expansion chambers during finish machining due to the driven relative axial movement between the pressure shoe and the workpiece, so that the expansion chambers expand in an oscillating manner. This ensures that the finishing tape is applied at all times in the transition areas between the peripheral surface and collar surfaces and on the collar surfaces. A targeted influence on the shape of the waistband or the transition areas between collar and peripheral surface is not intended.

Es besteht der Wunsch, dass bei der Finishbearbeitung die Form der radialen Umfangsfläche des zu bearbeitenden Werkstückabschnitts gezielt insbesondere in Hinblick auf Balligkeit und/oder Unrundheit beeinflusst werden kann.There is a desire that during finish machining, the shape of the radial peripheral surface of the workpiece section to be machined can be specifically influenced, in particular with regard to crowning and / or out-of-roundness.

Ein weiterer Andrückschuh, welcher den Oberbegriff des Anspruchs 1 bildet, ist aus WO 2008 / 113 925 A1 bekannt, wobei die Expansionselemente durch Zylinder gebildet sind, mit denen über einen in dem jeweiligen Zylinder befindlichen Kolben jeweils ein Andrückelement gezielt in Richtung der Umfangsfläche mit Druck beaufschlagt werden kann. Da die Zylinderkolbeneinheiten in Umfangsrichtung hintereinander angeordnet sind, ist mit einem solchen Andrückschuh lediglich die gezielte Erzeugung oder Entfernung einer Unrundheit einer Umfangsfläche Werkstückes möglich.Another Andrückschuh, which forms the preamble of claim 1, is made WO 2008 / 113,925 A1 known, wherein the expansion elements are formed by cylinders, with which in each case a pressure element can be selectively acted upon in the direction of the peripheral surface with pressure via a piston located in the respective cylinder. Since the cylinder piston units are arranged one behind the other in the circumferential direction, with such a pressure shoe only the targeted generation or removal of an ovality of a peripheral surface workpiece is possible.

Aus DE 196 50 155 C1 ist zudem eine Andrückvorrichtung bekannt, bei der eine als Schale ausgebildete Anpreßvorrichtung schwenkbar gelagert ist. Die Schale kann in Abhängigkeit von einem gemessenen Durchmesser mittels eines Kolben verschwenkt werden, wodurch die Schale das Finishband auf einer Seite der Schwenkachse der Schale stärker an das Werkstück drückt als auf der der Schwenkachse gegenüberliegenden Seite, so dass die Konizität der Werkstückoberfläche gezielt beeinflusst wird.Out DE 196 50 155 C1 In addition, a pressing device is known in which a clamping device designed as a shell is pivotally mounted. The shell can be pivoted in response to a measured diameter by means of a piston, whereby the shell pushes the finishing tape on one side of the pivot axis of the shell stronger to the workpiece than on the opposite side of the pivot axis, so that the conicity of the workpiece surface is selectively influenced.

Aufgabe der vorliegenden Erfindung ist es daher, die mit Bezug zum Stand der Technik geschilderten Probleme zumindest teilweise zu lösen und insbesondere einen alternativen Andrückschuh und ein Verfahren zum Betreiben einer Finishbearbeitungsvorrichtung anzugeben, mit denen die Form der radialen Umfangsfläche des zu bearbeitenden Werkstückabschnitts gezielt beeinflusst werden kann, wobei insbesondere wünschenswert ist, dass unterschiedliche Profilformen der Umfangsfläche mit genau einem Andrückschuh erzielt werden können.It is therefore an object of the present invention to at least partially solve the problems described with reference to the prior art, and in particular to provide an alternative pressure shoe and a method for operating a finish processing device with which the shape of the radial peripheral surface of the workpiece section to be machined can be specifically influenced , wherein it is particularly desirable that different profile shapes of the peripheral surface can be achieved with exactly one Andrückschuh.

Gelöst wird diese Aufgabe durch einen Andrückschuh und ein Verfahren mit den Merkmalen der unabhängigen Ansprüche. Vorteilhafte Weiterbildungen des Andrückschuhs und des Verfahrens sind in den abhängigen Ansprüchen und in der Beschreibung angegeben.This object is achieved by a pressure shoe and a method having the features of the independent claims. Advantageous developments of the pressure shoe and the method are given in the dependent claims and in the description.

Gelöst wird die Aufgabe insbesondere durch einen Andrückschuh mit den eingangs genannten Merkmalen, wobei die mehreren Expansionselemente jeweils einzeln und unabhängig voneinander radial unter Verformung der Andrückfläche in Richtung der Umfangsfläche des Werkstückabschnitts expandierbar sind, so dass bei der Finishbearbeitung die Form der Umfangsfläche des Werkstückabschnittes gezielt durch unterschiedliche Expansion der über die Andrückfläche verteilten Expansionselemente beeinflussbar ist.The problem is solved in particular by a pressure shoe with the features mentioned above, wherein the plurality of expansion elements are individually and independently radially expandable under deformation of the pressure surface in the direction of the peripheral surface of the workpiece portion, so that in the finish machining the shape of the peripheral surface of the workpiece section targeted different expansion of distributed over the pressing surface expansion elements can be influenced.

Es ist also vorgesehen, dass den Expansionselementen unabhängig voneinander Energie so zugeführt werden kann, dass sie sich in axialer Richtung einzeln verformen können. Die Expansionselemente können insbesondere mechanisch, elektromechanisch, thermisch, hydraulisch oder auf andere geeignete Weise in radialer Richtung expandiert werden. Durch die Expansion wird die Andrückfläche verformt.It is therefore envisaged that the expansion elements can be supplied with energy independently of each other so that they can deform individually in the axial direction. The expansion elements can in particular be expanded in the radial direction mechanically, electromechanically, thermally, hydraulically or in another suitable manner. Due to the expansion, the pressure surface is deformed.

Erfindungsgemäß ist jedes Expansionselement durch eine Expansionskammer gebildet, die jeweils einzeln mit einer aus dem Andrückschuh herausführenden Leitung verbunden ist und jeweils unter Druckbeaufschlagung des Fluids radial unter Verformung der Andrückfläche in Richtung der Umfangsfläche des Werkstückabschnitts expandierbar ist. Im Folgenden wird zwar das Expansionselement mit Bezug zu der mittels Fluid expandierbaren Expansionskammer näher beschrieben, es ist jedoch nicht beabsichtigt, dass die Lehre auf Expansionskammern beschränkt ist.According to the invention, each expansion element is formed by an expansion chamber which is in each case connected individually to a line leading out of the pressure shoe and is expandable under pressure of the fluid radially under deformation of the pressure surface in the direction of the circumferential surface of the workpiece section. While the expansion element will be described in more detail below with respect to the fluid expandable expansion chamber, it is not intended that the teachings be limited to expansion chambers.

Es ist erfindungsgemäß vorgesehen, dass mehrere unabhängig voneinander expandierbare Expansionskammern vorgesehen sind, mit denen das Profil der einteilig zusammenhängenden Andrückfläche durch Verformung in radialer Richtung geändert werden kann. Somit kann erreicht werden, dass die Form der das Finishband gegen die radiale Umfangsfläche drückenden Andrückfläche des Andrückschuhs zumindest lokal verändert werden kann, was darin resultiert, dass der auf die Umfangsfläche wirkende Druck des Finishbandes lokal beeinflussbar ist. Es ist somit möglich, die Verteilung des Drucks über die Andrückfläche gezielt vorzugeben, wodurch die durch die Finishbearbeitung erzielbare Form des zu bearbeitenden Werkstückabschnitts beeinflussbar ist.It is inventively provided that a plurality of independently expandable expansion chambers are provided, with which the profile of the integrally continuous pressure surface can be changed by deformation in the radial direction. It can thus be achieved that the shape of the pressing band of the pressure shoe pressing the finishing belt against the radial peripheral surface can be changed at least locally, which results in that the pressure of the finishing belt acting on the peripheral surface can be locally influenced. It is thus possible to predetermine the distribution of the pressure over the pressing surface, whereby the shape of the workpiece section to be machined, which can be achieved by the finish machining, can be influenced.

Der Andrückschuh kommt insbesondere in einer Finishbearbeitungsvorrichtung zum Einsatz, die neben dem Andrückschuh einen Rotationsantrieb für das zu bearbeitende Werkstück, einen Oszillationsantrieb zur Erzeugung einer oszillierenden Relativbewegung in Werkstücklängsrichtung zwischen dem Werkstück und dem Andrückschuh und ein Finishband zwischen der Andrückfläche und der radialen Umfangsfläche des Andrückschuhs umfasst. Somit kann der Andrückschuh während der Rotationsbewegung des Werkstückes in axialer Richtung oszillierend das Finishband auf die Umfangsfläche des Werkstücks andrücken. Die Finishbearbeitungsvorrichtung umfasst insbesondere auch eine Steuereinheit zur Durchführung des erfindungsgemäßen Verfahrens.The pressure shoe is used in particular in a finish processing device which, in addition to the pressure shoe, comprises a rotary drive for the workpiece to be machined, an oscillation drive for generating an oscillating relative movement in the workpiece longitudinal direction between the workpiece and the pressure shoe and a finishing belt between the pressure surface and the radial peripheral surface of the pressure shoe , Thus, during the rotational movement of the workpiece, the pressure shoe can oscillate in the axial direction to press the finishing belt against the peripheral surface of the workpiece. In particular, the finish processing device also comprises a control unit for carrying out the method according to the invention.

Die Andrückfläche des Andrückschuhs ist insbesondere jene Fläche in Form eines flächig vollständig ausgebildeten Teilringes, die während der Bearbeitung radial nach innen in Richtung des zu bearbeitenden Werkstückabschnitts gerichtet ist. Die Teilringfläche weist im Wesentlichen einen Radius auf, der dem Radius des zu bearbeitenden Werkstückabschnitts entspricht. Eine (lokale) Abweichung von diesem Radius kann durch Druckbeaufschlagung der Expansionskammern erreicht werden.The pressing surface of the pressure shoe is in particular that surface in the form of a surface completely formed partial ring, which during machining radially inwardly in the direction of the workpiece section to be machined is directed. The partial annular surface essentially has a radius which corresponds to the radius of the workpiece section to be machined. A (local) deviation from this radius can be achieved by pressurizing the expansion chambers.

Die Expansionskammern sind also insbesondere so innerhalb des Andrückschuhs ausgebildet, dass bei Druckbeaufschlagung die Andrückfläche des Andrückschuhs im Bereich der jeweiligen Expansionskammer in radialer Richtung verformt wird. Aus der druckfreien Ruhelage expandiert die Expansionskammer unter Beaufschlagung eines Fluides in radialer Richtung um mindestens zwei µm [Mikrometer], bevorzugt mindestens 5 µm, wobei die maximale Expansion der Expansionskammer beziehungsweise die Verformung der Andrückfläche in radialer Richtung höchstens 50 µm, bevorzugt höchstens 30µm beträgt.The expansion chambers are thus formed in particular so within the Andrückschuhs that when pressure is applied, the pressing surface of the Andrückschuhs is deformed in the radial direction in the region of the respective expansion chamber. From the pressure-free rest position, the expansion chamber expands under the action of a fluid in the radial direction by at least two microns, preferably at least 5 microns, wherein the maximum expansion of the expansion chamber or the deformation of the pressure surface in the radial direction is at most 50 microns, preferably at most 30 .mu.m.

Wenn die mehreren, insbesondere mindestens zwei, bevorzugt mindestens fünf Expansionskammern jeweils mit einer aus dem Andrückschuh herausgeführten Leitung verbunden sind, können die Expansionskammern unabhängig voneinander insbesondere mit unterschiedlichen Drücken beaufschlagt werden, so dass die Expansionskammern unterschiedlich stark in radialer Richtung expandieren und somit die Andrückfläche lokal unterschiedlich stark verformt wird.If the plurality, in particular at least two, preferably at least five expansion chambers are each connected to a line led out of the pressure shoe, the expansion chambers can be acted upon independently of one another, in particular with different pressures, so that the expansion chambers expand to different degrees in the radial direction and thus the pressure surface locally deformed differently strong.

Um die Balligkeit oder die Konizität des zu bearbeitenden Werkstückabschnitts gezielt beeinflussen zu können, kann vorgesehen sein, dass die mehreren Expansionskammern parallel zueinander entlang der Andrückfläche des Andrückschuhs in Umfangsrichtung verlaufen. Bevorzugt sind mindestens fünf in axialer Richtung nebeneinander angeordnete Expansionskammern vorgesehen, die jeweils über die gleiche Länge in Umfangsrichtung parallel zueinander verlaufen. Die Andrückfläche wird insbesondere entlang der jeweiligen Expansionskammer gleichmäßig verformt. Der Andrückschuh weist also im Bereich der expandierten Expansionskammer den gleichen oder einen geringeren Radius als vor der Expansion auf.In order to be able to influence the crowning or the conicity of the workpiece section to be machined in a targeted manner, provision can be made for the plurality of expansion chambers to extend parallel to one another along the pressing surface of the pressure shoe in the circumferential direction. Preferably, at least five expansion chambers arranged side by side in the axial direction are provided which run parallel to each other over the same length in the circumferential direction. The pressing surface is in particular uniformly deformed along the respective expansion chamber. The Andrückschuh points so in the area of the expanded expansion chamber the same or a smaller radius than before the expansion.

Um die Unrundheit des Werkstückabschnittes gezielt beeinflussen zu können, kann vorgesehen sein, dass die mehreren Expansionskammern parallel zueinander entlang der Andrückfläche des Andrückschuhs in axialer Richtung verlaufen. Die bevorzugt mindestens sieben Expansionskammern sind in Umfangsrichtung nebeneinander angeordnet und erstrecken sich über die gleiche Länge entlang der Andrückfläche.In order to be able to influence the out-of-roundness of the workpiece section in a targeted manner, provision can be made for the plurality of expansion chambers to extend parallel to one another along the pressing surface of the pressure shoe in the axial direction. The preferred at least seven expansion chambers are arranged in the circumferential direction next to each other and extend over the same length along the pressing surface.

Die Aufgabe wird auch gelöst durch ein Verfahren zum Betreiben einer Finishbearbeitungsvorrichtung gemäß Anspruch 5.The object is also achieved by a method for operating a finish processing device according to claim 5.

Insbesondere wird beim Beaufschlagen der Druck und/oder das Volumen des Fluids erfasst, so dass auf die Größe der Expansion der Expansionskammer in radialer Richtung geschlossen werden kann. In diesem Zusammenhang kann insbesondere vorgesehen sein, dass eine Steuereinheit ausgebildet ist, der eine Größe der radialen Expansion vorgegeben wird und die durch Regeln des Druckes in der Expansionskammer und/oder des Volumens in der Expansionskammer die vorgegebene radiale Expansion der jeweiligen Expansionskammer einstellt.In particular, when pressurized and / or the volume of the fluid is detected, so that the size of the expansion of the expansion chamber can be closed in the radial direction. In this context, it may in particular be provided that a control unit is provided, which is given a size of the radial expansion and by regulating the pressure in the expansion chamber and / or the volume in the expansion chamber sets the predetermined radial expansion of the respective expansion chamber.

Das Fluid ist insbesondere eine Flüssigkeit oder ein Gas.The fluid is in particular a liquid or a gas.

Erfindungsgemäß werden alle Expansionskammern unabhängig voneinander mit einem Fluid beaufschlagt, so dass die Expansionskammern unterschiedlich stark in radialer Richtung expandieren. Insbesondere werden die Expansionskammern so mit Fluid beaufschlagt, dass die außenliegenden Expansionskammern die größte radiale Expansion erfahren und die innenliegenden Expansionskammern die geringste radiale Expansion.According to the invention, all expansion chambers are acted upon independently of one another by a fluid, so that the expansion chambers expand to different degrees in the radial direction. In particular, the expansion chambers are so charged with fluid that the outer expansion chambers experience the greatest radial expansion and the inner expansion chambers the least radial expansion.

In diesem Zusammenhang ist es bevorzugt, dass die Expansion der mindestens einen Expansionskammer während der Finishbearbeitung konstant gehalten wird. Dies ist insbesondere bevorzugt, wenn die Expansionskammern in Umfangsrichtung parallel zueinander verlaufen und somit die Balligkeit oder Konizität des zu bearbeitenden Werkstückabschnitts durch die Expansion der Expansionskammern vorgegeben wird. Insbesondere kann überwacht werden, ob der Druck und/oder das Volumen des Fluids in der Expansionskammer den gewünschten Werten entspricht, wobei bei Abweichungen nachgeregelt werden kann.In this connection, it is preferable that the expansion of the at least one expansion chamber is kept constant during finish machining. This is particularly preferred when the expansion chambers in the circumferential direction parallel to each other and thus the crown or taper of the workpiece to be machined section is determined by the expansion of the expansion chambers. In particular, it can be monitored whether the pressure and / or the volume of the fluid in the expansion chamber corresponds to the desired values, it being possible to readjust in the event of deviations.

Insbesondere ist vorgesehen, dass die Expansion benachbarter Expansionskammern unterschiedlich ist, so dass durch die unterschiedliche Expansion eine durch die Finishbearbeitung erreichbare Form der Umfangsfläche des zu bearbeitenden Werkstückabschnitts vorgegeben wird.In particular, it is provided that the expansion of adjacent expansion chambers is different, so that a achievable by the finish machining shape of the peripheral surface of the workpiece section to be machined is predetermined by the different expansion.

Insbesondere wenn die Expansionskammern in axialer Richtung zur Beeinflussung der Unrundheit des zu bearbeitenden Werkstückabschnitts verlaufen, kann vorgesehen sein, dass die Expansion jeder Expansionskammer jeweils während der Finishbearbeitung geändert wird. Um der gewünschten Unrundheit eine Form vorzugeben, ist hierbei insbesondere vorgesehen, dass die Expansion jeder Expansionskammer in Abhängigkeit von der Drehstellung des Werkstückabschnitts geändert wird. Die Expansion der Expansionskammern wird dabei so geregelt, dass bei Anlage einer vorbestimmten Umfangsstelle an einer Expansionskammer die radiale Expansion dieser Expansionskammer immer minimal ist, während bei Anlage einer dazu versetzten Umfangsstelle an den Expansionskammern die Expansionskammern jeweils maximal expandiert sind. Die Expansion der Expansionskammern erfolgt dabei in einer solchen Weise, dass eine gering abzutragende Umfangsstelle jeweils nur mit einem geringen Druck durch die jeweilige Expansionskammer beaufschlagt wird, während eine stärker abzutragende Umfangstelle jeweils mit einem größeren Druck von der jeweiligen Expansionskammer beaufschlagt wird. Es versteht sich, dass während der Bearbeitung immer ein Finishband zwischen Andrückfläche des Andrückschuhs und Umfangsfläche des zu bearbeitenden Werkstückabschnitts angeordnet ist.In particular, when the expansion chambers extend in the axial direction for influencing the out-of-roundness of the workpiece section to be machined, it can be provided that the expansion of each expansion chamber is changed in each case during the finish machining. To the desired runout to specify a shape, in this case it is provided in particular that the expansion of each expansion chamber is changed in dependence on the rotational position of the workpiece section. The expansion of the expansion chambers is controlled so that when a predetermined circumferential location of an expansion chamber, the radial expansion of this expansion chamber is always minimal, while investing a staggered circumferential location of the expansion chambers, the expansion chambers are maximally expanded. The expansion of the expansion chambers is carried out in such a way that a low abzutragende circumferential location is acted upon only by a small pressure through the respective expansion chamber, while a more abzutragende peripheral point is acted upon in each case with a larger pressure from the respective expansion chamber. It is understood that a finishing belt is always arranged between the pressing surface of the pressure shoe and the peripheral surface of the workpiece section to be machined during machining.

Insbesondere wenn die mehreren Expansionskammern in Umfangsrichtung verlaufen, kann zur gezielten Beeinflussung der Balligkeit oder Konizität des zu bearbeitenden Werkstückabschnitts vorgesehen sein, dass die Expansion jeder Expansionskammer in Abhängigkeit von der axialen Relativstellung zwischen Andrückschuh und Werkstückabschnitts geändert wird. Somit wird erreicht, dass die Andrückfläche bei der axialen Relativbewegung an die Balligkeit angepasst wird.In particular, when the plurality of expansion chambers extend in the circumferential direction, it may be provided for selectively influencing the crowning or conicity of the workpiece section to be machined that the expansion of each expansion chamber is changed depending on the axial relative position between Andrückschuh and workpiece section. This ensures that the pressure surface is adapted to the crowning in the axial relative movement.

Die Erfindung sowie das technische Umfeld werden im Folgenden anhand der Figuren beschrieben, wobei darauf hinzuweisen ist, dass die Figuren bevorzugte Ausführungsformen der Erfindung zeigen. Es zeigen schematisch

Fig. 1:
einen Andrückschuh und ein Werkstückabschnitt,
Fig. 2:
den Andrückschuh im Längsschnitt,
Fig. 3:
einen Querschnitt durch Expansionskammern des Andrückschuhs,
Fig. 4:
einen Querschnitt durch eine weitere Ausführungsform der Expansionskammern und
Fig. 5 bis 8:
ein Werkstückabschnitt während der Finishbearbeitung zur gezielten Erzeugung einer Unrundheit.
The invention and the technical environment are described below with reference to the figures, wherein it should be noted that the figures show preferred embodiments of the invention. It show schematically
Fig. 1:
a pressure shoe and a workpiece section,
Fig. 2:
the pressure shoe in longitudinal section,
3:
a cross section through expansion chambers of the Andrückschuhs,
4:
a cross-section through a further embodiment of the expansion chambers and
5 to 8:
a workpiece portion during finish machining for the purpose of producing an out-of-roundness.

Fig. 1 zeigt einen Andrückschuh 1 mit einer radial nach innen gerichteten, teilringförmig ausgebildeten Andrückfläche 2. In dem Andrückschuh 1 sind die Expansionselemente als angedeutete Expansionskammern 5 ausgebildet. Die Expansionskammern 5 sind in axialer Richtung 8 nebeneinander angeordnet und verlaufen in Umfangsrichtung 7 parallel zueinander. Fig. 1 shows a Andrückschuh 1 with a radially inwardly directed, part-ring-shaped Andrückfläche 2. In the Andrückschuh 1, the expansion elements are designed as indicated expansion chambers 5. The expansion chambers 5 are arranged side by side in the axial direction 8 and extend in the circumferential direction 7 parallel to each other.

Während der Finishbearbeitung ist ein nicht gezeigtes Finishband zwischen der Andrückfläche 2 und einer radialen Umfangsfläche 3 eines nur angedeuteten Werkstückabschnittes 4 angeordnet. Während der Finishbearbeitung rotiert der Werkstückabschnitt 4 um eine Rotationsachse, während der Werkstückabschnitt 4 und der Andrückschuh 1 in der axialen Richtung 8 relativ zueinander oszillieren, wobei das nicht dargestellte Finishband von der Andrückfläche 2 des Andrückschuhs 1 zum spanenden Abtrag auf die radiale Umfangsfläche 3 des Werkstückabschnittes 4 gedrückt wird.During finish machining, a finishing belt (not shown) is arranged between the pressure surface 2 and a radial peripheral surface 3 of an only indicated workpiece section 4. During finish machining, the workpiece section 4 rotates about an axis of rotation, while the workpiece section 4 and the pressure shoe 1 oscillate relative to each other in the axial direction 8, wherein the finishing belt, not shown, of the Andrückfläche 2 of the Andrückschuhs 1 for machining on the radial peripheral surface 3 of the workpiece section 4 is pressed.

Aus dem in Fig. 2 dargestellten Längsschnitt durch den Andrückschuh 1 im Bereich einer Expansionskammer 5 wird deutlich, dass jede Expansionskammer 5 einzeln mit einer aus dem Andrückschuh 1 herausführenden Leitung 6 verbunden ist, so dass die Expansionskammern 5 unabhängig voneinander mit einem Fluid beaufschlagt werden können. Wird die Expansionskammer 5 mit einem Fluid beaufschlagt, so expandiert die Expansionskammer 5 mit dem ihr zugeordneten Abschnitt der Andrückfläche 2 in radialer Richtung 9. Da die Expansionskammern 5 unabhängig voneinander expandierbar sind, ist das Profil der Andrückfläche 2 entlang der axialen Richtung 8 einstellbar, so dass die Balligkeit des Werkstückabschnitts 4 gezielt beeinflusst werden kann.From the in Fig. 2 illustrated longitudinal section through the Andrückschuh 1 in the region of an expansion chamber 5 is clear that each expansion chamber 5 is individually connected to an outgoing from the Andrückschuh 1 line 6, so that the expansion chambers 5 can be acted upon independently of each other with a fluid. If the expansion chamber 5 is acted upon by a fluid, the expansion chamber 5 expands with its Since the expansion chambers 5 are independently expandable, the profile of the pressing surface 2 along the axial direction 8 is adjustable, so that the crown of the workpiece portion 4 can be selectively influenced.

In Fig. 3 ist ein Querschnitt durch zwei Expansionskammern 5 dargestellt, wobei lediglich die linke Expansionskammer 5 mit einem Fluid beaufschlagt ist, so dass die Expansionskammer 5 in radialer Richtung 9 expandiert ist.In Fig. 3 is a cross section through two expansion chambers 5, wherein only the left expansion chamber 5 is acted upon by a fluid, so that the expansion chamber 5 is expanded in the radial direction 9.

Eine alternative Ausgestaltung der Expansionskammern 5 ist in Fig. 4 dargestellt. Die Expansionskammern 5 sind in ihrem Querschnitt faltenbalgartig ausgebildet, so dass eine größere Expansion in radialer Richtung 9 erzielbar ist. Auch in Fig. 4 ist lediglich die linke Expansionskammer 5 mit einem Fluid beaufschlagt.An alternative embodiment of the expansion chambers 5 is in Fig. 4 shown. The expansion chambers 5 are bellows-shaped in their cross-section, so that a larger expansion in the radial direction 9 can be achieved. Also in Fig. 4 only the left expansion chamber 5 is acted upon by a fluid.

Alternativ kann vorgesehen sein, dass die Expansionskammern 5 in axialer Richtung 8 parallel zueinander verlaufen und in Umfangsrichtung 7 nebeneinander angeordnet sind. Bei einer solchen Anordnung der Expansionskammern 5 kann die Unrundheit der Umfangsfläche 3 des zu bearbeitenden Werkstückabschnitts 4 gezielt beeinflusst werden.Alternatively it can be provided that the expansion chambers 5 extend in the axial direction 8 parallel to each other and are arranged side by side in the circumferential direction 7. With such an arrangement of the expansion chambers 5, the out-of-roundness of the circumferential surface 3 of the workpiece section 4 to be machined can be influenced in a targeted manner.

Die Kraftbeaufschlagung der Umfangsfläche 3 des Werkstückabschnitts 4 durch die Expansionskammern 5 des Andrückschuhs 1 bei einer solchen gezielten Bearbeitung der Unrundheit ist in Fig. 5 bis 8 dargestellt. Im Querschnitt ist der Werkstückabschnitt 4 hier eiförmig.The application of force to the circumferential surface 3 of the workpiece section 4 by the expansion chambers 5 of the pressure shoe 1 in such a targeted processing of the out-of-roundness is in Fig. 5 to 8 shown. In cross-section, the workpiece section 4 is egg-shaped here.

Während bei der in Fig. 5 dargestellten Ausrichtung alle Expansionskammern 5 maximal expandiert sind, wird die Expansion jeder einzelnen Expansionskammer 5 bei der Rotation des Werkstückabschnitts 4 an die gewünschte Unrundheit angepasst, wobei F0 größer ist als F1 und F1 größer ist als F2. So ist in Fig. 6 die Expansion der Expansionskammern 5 nach einer Rotation um 45° gezeigt, in Fig. 7 nach einer Rotation um 90° und in Fig. 8 nach einer Rotation um 135°.While at the in Fig. 5 When all the expansion chambers 5 are maximally expanded, the expansion of each individual expansion chamber 5 is adapted to the desired runout during the rotation of the workpiece section 4, wherein F 0 is greater than F 1 and F 1 is greater than F 2 . So is in Fig. 6 the expansion of the expansion chambers 5 after a rotation of 45 ° shown in Fig. 7 after a rotation of 90 ° and in Fig. 8 after a rotation of 135 °.

So ist beispielsweise die Expansion der oberen Expansionskammer 5 des rechten Andrückschuhs 1 bei einer Rotation um 45° (Fig. 6) am geringsten und steigt bis zum Erreichen eines Rotationswinkels von 135° (Fig. 8) wieder an.For example, the expansion of the upper expansion chamber 5 of the right Andrückschuhs 1 in a rotation of 45 ° ( Fig. 6 ) and increases until it reaches a rotation angle of 135 ° ( Fig. 8 ) back to.

Die Expansion der oberen Expansionskammer 5 des linken Andrückschuhs 1 ist hingegen zunächst bei der Rotation von 0° bis 90° maximal und wird bis zum Erreichen des Rotationswinkels von 135° leicht verringert.The expansion of the upper expansion chamber 5 of the left Andrückschuhs 1, however, is initially at the rotation of 0 ° to 90 ° maximum and is slightly reduced until reaching the rotation angle of 135 °.

Mit der vorliegenden Erfindung ist der Vorteil verbunden, dass die Form einer Umfangsfläche 3 eines Werkstückabschnittes 4 durch Finishbearbeitung mit dem Andrückschuh 1 gezielt beeinflusst werden kann.The present invention has the advantage that the shape of a circumferential surface 3 of a workpiece section 4 can be influenced in a targeted manner by finish machining with the pressure shoe 1.

BezugszeichenlisteLIST OF REFERENCE NUMBERS

11
Andrückschuhpresser
22
Andrückflächepressing surface
33
Umfangsflächeperipheral surface
44
WerkstückabschnittWorkpiece portion
55
Expansionskammerexpansion chamber
66
Leitungmanagement
77
Umfangsrichtungcircumferentially
88th
axiale Richtungaxial direction
99
radiale Richtungradial direction

Claims (10)

  1. A pressure shoe (1) comprising a press surface (2) for directly pressing finishing tape onto a radial circumferential surface (3) of a rotating workpiece section (4) during a finishing process, a plurality of elements, wherein the plurality of elements can be in each case pressurized individually and independently of one another in the direction of the circumferential surface (3) of the workpiece section (4), so that during the finishing process, the shape of the circumferential surface (3) of the workpiece section can be influenced in a targeted manner by means of different pressurization of the elements distributed over the press surface (2), characterized in that each element is formed by an expansion chamber (5), which is in each case connected individually to a line (6) leading out of the pressure shoe (1) and in each case can be expanded radially under pressurization of the fluid whilst deforming the integrally cohesive press surface (2) in the direction of the circumferential surface (3) of the workpiece section (4).
  2. The pressure shoe (1) according to Claim 1, wherein the plurality of expansion chambers (5) run parallel to one another in the circumferential direction (7) along the press surface (2) of the pressure shoe (1).
  3. The pressure shoe (1) according to Claim 1, wherein the plurality of expansion chambers (5) run parallel to one another in the axial direction (8) along the press surface (2) of the pressure shoe (1).
  4. The pressure shoe (1) according to one of the preceding claims, wherein the expansion of the expansion chambers (5) in the radial direction (9) is at most 50 µm.
  5. A method for operating a finishing device with a pressure shoe (1) according to one of the preceding claims, comprising at least the following steps:
    - pressing a finishing tape onto the radial circumferential surface (3) of the workpiece section (4) to be processed, using the pressure shoe (1),
    - expanding at least one of the plurality of expansion chambers (5), so that the expansion chambers (5) deforms the press surface (2) in the radial direction.
  6. The method according to Claim 5, wherein the expansion of the at least one expansion chamber (5) is kept constant during the finishing process.
  7. The method according to one of Claims 5 or 6, wherein the expansion of adjacent expansion chambers (5) is different.
  8. The method according to Claim 7, wherein the expansion of each expansion chamber (5) is changed in each case during the finishing process.
  9. The method according to Claim 8, wherein the expansion of each expansion chamber (5) is changed as a function of the rotational position of the workpiece section (4) .
  10. The method according to Claim 7 or 8, wherein the expansion of each expansion chamber (5) is changed as a function of the relative axial position between pressure shoe (1) and workpiece section (4).
EP16736852.1A 2015-07-10 2016-07-07 Pressure shoe comprising an expansion chamber Active EP3319756B1 (en)

Applications Claiming Priority (2)

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DE102015008814.9A DE102015008814A1 (en) 2015-07-10 2015-07-10 Pressure shoe with expansion chamber
PCT/EP2016/066123 WO2017009169A1 (en) 2015-07-10 2016-07-07 Pressure shoe comprising an expansion chamber

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US (1) US10589396B2 (en)
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JP (1) JP2018524190A (en)
DE (1) DE102015008814A1 (en)
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US4527359A (en) * 1984-04-23 1985-07-09 Timesavers, Inc. Segmented platen with diaphragm cylinder control
DE3643914A1 (en) * 1986-12-22 1988-06-30 Zeiss Carl Fa METHOD AND DEVICE FOR LAPPING OR POLISHING OPTICAL SURFACES
US5230184A (en) * 1991-07-05 1993-07-27 Motorola, Inc. Distributed polishing head
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DE19650155C1 (en) * 1996-12-04 1998-06-25 Supfina Grieshaber Gmbh & Co Fine finishing machine for workpieces
DE19738818B4 (en) * 1997-09-05 2005-03-24 Institut für Werkzeugmaschinen und Fertigungstechnik TU Braunschweig Method and device for the form-controlled superfinishing of a workpiece
US6607425B1 (en) * 2000-12-21 2003-08-19 Lam Research Corporation Pressurized membrane platen design for improving performance in CMP applications
JP4193513B2 (en) 2003-02-14 2008-12-10 日産自動車株式会社 Lapping machine
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US7335088B1 (en) * 2007-01-16 2008-02-26 Taiwan Semiconductor Manufacturing Company, Ltd. CMP system with temperature-controlled polishing head
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JP2018524190A (en) 2018-08-30
EP3319756A1 (en) 2018-05-16
DE102015008814A1 (en) 2017-01-12
US20180193973A1 (en) 2018-07-12
WO2017009169A1 (en) 2017-01-19
US10589396B2 (en) 2020-03-17
TR201909261T4 (en) 2019-07-22

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