EP3166909A1 - Laminated ceramic molded article having recesses - Google Patents
Laminated ceramic molded article having recessesInfo
- Publication number
- EP3166909A1 EP3166909A1 EP15744498.5A EP15744498A EP3166909A1 EP 3166909 A1 EP3166909 A1 EP 3166909A1 EP 15744498 A EP15744498 A EP 15744498A EP 3166909 A1 EP3166909 A1 EP 3166909A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- ceramic
- molded body
- recesses
- plates
- sintered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
- C04B37/005—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/006—Micropumps
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/616—Liquid infiltration of green bodies or pre-forms
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/04—Ceramic interlayers
- C04B2237/06—Oxidic interlayers
- C04B2237/062—Oxidic interlayers based on silica or silicates
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/04—Ceramic interlayers
- C04B2237/06—Oxidic interlayers
- C04B2237/064—Oxidic interlayers based on alumina or aluminates
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/04—Ceramic interlayers
- C04B2237/06—Oxidic interlayers
- C04B2237/066—Oxidic interlayers based on rare earth oxides
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/04—Ceramic interlayers
- C04B2237/08—Non-oxidic interlayers
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/04—Ceramic interlayers
- C04B2237/08—Non-oxidic interlayers
- C04B2237/083—Carbide interlayers, e.g. silicon carbide interlayers
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/04—Ceramic interlayers
- C04B2237/09—Ceramic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/341—Silica or silicates
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/343—Alumina or aluminates
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/345—Refractory metal oxides
- C04B2237/348—Zirconia, hafnia, zirconates or hafnates
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/365—Silicon carbide
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/366—Aluminium nitride
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/368—Silicon nitride
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/58—Forming a gradient in composition or in properties across the laminate or the joined articles
- C04B2237/582—Forming a gradient in composition or in properties across the laminate or the joined articles by joining layers or articles of the same composition but having different additives
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/62—Forming laminates or joined articles comprising holes, channels or other types of openings
Definitions
- the invention relates to ceramic molded bodies with recesses, processes for their preparation and their use.
- Dry-pressed, extruded or foil-cast ceramic moldings can be milled or punched particularly easily in the still unsintered state.
- a plurality of shaped bodies for example by an applied ceramic paste, moldings with more complicated geometries such as undercut openings can be produced.
- a ceramic shaped body has been developed with recesses, which is characterized in that the shaped body contains at least two plates (joining parts) of ceramic material, namely a lower bottom plate, an upper cover plate and optionally one or more intermediate plate (s), the Stapeiförmig lie on each other and are connected to each other flat to the molding and wherein between the plates (parts to be joined) a joining material (paste) is located.
- a method for producing the shaped body is proposed, which is characterized a. that flat ceramic greenware plates are possibly made with recesses from a ceramic base material, which is mixed with green body sintering aids, and then these are sintered to create flat ceramic plates,
- the ceramic plates may be lasered or hard machined to bring in the required recesses and
- a paste of the agitated ceramic base material is applied to the sintered ceramic plates in a staggered manner with sintering aids, the ceramic boards thus coated, also referred to as joining parts, being stacked into a stack and this stack being sintered.
- Aluminum nitride AIN and as sintering aid Y 2 O 3 or CaO is preferably used as the ceramic base material.
- the parts to be joined have a thickness of less than 2 mm, preferably ⁇ 1 mm.
- metallizations are applied to the parts to be joined before or after the sintering of the stack. These are preferably printed on and then sintered or cured. To create cooling or heating chambers and channels, these are lasered into the ceramic plates as recesses in such a way that cooling or heating structures, such as channels or meanders, are formed in the joined shaped body. If, after lasering, wall structures remain in the ceramic plates, the cooling or heating medium can be directed to those locations where special cooling or heating or tempering is required.
- connecting elements or closing elements are connected to the shaped body, which are sintered in one embodiment and which are connected to the recesses.
- the connecting elements are advantageously connecting tubes with a hose nozzle or tube pieces, which have a projecting flange, which is connected in the region of the recesses with the molding or which is sintered between two ceramic plates.
- a shaped body according to the invention is characterized in that the shaped body consists of at least two ceramic plates, a lower base plate, optionally one or more intermediate plate (s) and an upper cover plate, wherein bores in the base plate or cover plate, in the base plate or the intermediate plate (s) Channels and / or recesses are arranged, wherein the bores are connected to the channels and / or recesses.
- the shaped body is a micropump, which is characterized in that it consists of three ceramic plates, a lower one Base plate with an axis on which a metallic or metallized impeller is arranged, an intermediate plate which contains the delivery space and the supply lines and an upper cover plate which covers the delivery space and the supply lines.
- sintered flat ceramic plates are first lasered in accordance with the invention in order to introduce the required recesses. Then a paste of agitated ceramic is applied by screen printing, roller (or other coating method). The coated parts are then assembled into a stack and sintered again.
- the ceramic is made of AIN, which is usually added with a sintering aid such as Y 2 O 3 in a concentration of 2-5%
- a joining material having a slightly increased or decreased concentration of Y 2 O 3 to the base material, enhanced diffusion of the Y 2 O 3 or the YAIO phases formed can be achieved from the joining material into the moldings, which leads to an almost complete freedom from defects in the joining zone and to hermetically sealed components.
- the moldings can also be metallized inside as well as on the surface.
- An internal metallization can be carried out particularly suitable with refractory metals such as platinum, molybdenum or tungsten.
- An external metallization can be done with the known methods / materials (W, Mo, Ag, Cu etc.). It can be introduced into the individual levels of the shaped body openings with different diameters, for example via lasers (exact geometry), wherein the openings through the shaped body consistently the same size, or staggered, or can be arbitrarily alternating.
- Channels or meanders which can be used for tempering can also be incorporated into the joined shaped bodies.
- the shaped bodies can also have recesses for reasons of weight saving, with ultimately only a fine, stable ceramic framework being created.
- shaped bodies joined from n planes can also be hermetically sealed laterally like tiles with other shaped bodies. Use is made of such layered shaped bodies, e.g. in vacuumchucks, hotplates, coolers.
- a paste of AIN and Y 2 O 3 is prepared by suspending the solids in a suitable oil (screen printing oil or paste organics). The is printed by screen printing on the plates to be joined and then coated plates then placed / glued. This arrangement of three bonded AIN plates is sintered at suitable temperatures in N 2 .
- Moldings for cooling power components, light sources or temperature-sensitive components can also be produced with the moldings according to the invention.
- the shaped bodies according to the invention thus comprise a plurality of plates, each of which consists of a ceramic material and are stacked on top of each other and flatly connected to the shaped body.
- the shaped body preferably has metallizations on its surface, onto which power components can be soldered.
- a cooling or heating structure i. Flow paths for a cooling or heating medium, which are acted upon by a cooling or heating medium, preferably a cooling or heating fluid, so that the cooling or heating structure can be used for tempering.
- the cooling or heating medium is pumped through the cooling or heating structure, sucked or can flow through gravity.
- cooling or heating medium can be conducted into the molded body, there are at least two openings in the bottom plate or in the cover plate which can be connected to connection flanges.
- the cooling or heating channels are in the axial direction parallel to the surface sides of the bottom or top plate.
- At least one elevation which is at the same height as the edge region of the bottom plate, is located in the bottom plate of the shaped body according to the invention.
- These surveys thus have the full height of the bottom plate and serve firstly to guide the cooling or heating medium and secondly as a support surface for the cover plate or the ceramic plate located above it.
- the ceramic material of the ceramic plates may be selected from one or more of the following groups: aluminum oxide, aluminum nitride, silicon nitride, silicon carbide or a mixed ceramic of aluminum oxide and zirconium oxide (ATZ or ZTA) or silicon oxide (aluminosilicate).
- the ceramic shaped bodies according to the invention can be used as heatable vacuum chucks for the production of Si wafers.
- the ceramic shaped bodies according to the invention are suitable for use as a setetter plate, for example for metal injection molding.
- the ceramic shaped bodies according to the invention can also be used as a (heatable / coolable) module for the temperature control of energy stores such as batteries or rechargeable batteries.
- FIG. 1 shows a detail of a ceramic shaped body 1 according to the invention, which consists of several ceramic plates 3.
- intermediate plates made of a ceramic material.
- a ceramic cover plate 8 is placed and sintered.
- holes 10 are introduced, through which a cooling medium can be introduced into the molding.
- recesses 2 are lasered, which form bores, channels and recesses 12 in the molding.
- connection elements 4 are connected to the molded body 1.
- These connection elements have in the embodiment shown a projecting flange 6 and a through hole 17, which communicates with the recesses 2 or recesses 12. (Not shown: the connecting elements may be in the form of hose nozzles or pipe pieces).
- the projecting flange 6 is either adhered to the molded body 1, but can also be sintered between two ceramic plates 3.
- FIG. 2 shows the same embodiment as in FIG. 1, but only with one connection element 4.
- FIG. 3 shows the same embodiment as in FIGS. 1 and 2, but additionally with a closure element 5 and a bottom plate 9.
- FIGS. 4 and 5 show a shaped body 1 according to the invention, which in this embodiment represents the exemplary embodiment of a micropump.
- the micropump consists of three ceramic plates 3, a lower base plate 9 with an axis 13 on which a metallic or metallized impeller 14 (only schematically drawn) is arranged, an intermediate plate 7, which contains a conveying space 15 as a recess 12 and with leads 16 and Channels 1 1 for the medium to be conveyed.
- An upper cover plate 8 covers the delivery chamber 15 and the supply lines 16.
- Reference numeral 18 schematically shows a paste before sintering. In Figure 5, the impeller 14 is not shown.
- FIGS. 6 and 7 a shaped body 1 is shown prior to sintering from two ceramic plates 3.
- This consists of a bottom plate 9 and a cover plate 8.
- a recess 2 is lasered.
- two holes 10 lead from the outside into the recess 2.
- a survey 19 is arranged, whose surface is at the same height as the edge region 21 of the bottom plate 9.
- This elevation 19 thus has the full height of the bottom plate 9 and serves firstly to guide the cooling medium and secondly as a bearing surface for the cover plate 8.
- the elevation 19 is arranged between the bores 10, so that a desired flow path is formed.
- FIGS. 11 and 12 each show a connecting element 4 with radial projections 6.
- the connection element 4 according to FIG. 12 is made of a flexible material, for. B. rubber and can close the channels with its hooks 20.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ceramic Products (AREA)
- Furnace Charging Or Discharging (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014213480 | 2014-07-10 | ||
DE102014215968 | 2014-08-12 | ||
PCT/EP2015/065830 WO2016005557A1 (en) | 2014-07-10 | 2015-07-10 | Laminated ceramic molded article having recesses |
Publications (1)
Publication Number | Publication Date |
---|---|
EP3166909A1 true EP3166909A1 (en) | 2017-05-17 |
Family
ID=53762137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP15744498.5A Withdrawn EP3166909A1 (en) | 2014-07-10 | 2015-07-10 | Laminated ceramic molded article having recesses |
Country Status (6)
Country | Link |
---|---|
US (1) | US20170267591A1 (en) |
EP (1) | EP3166909A1 (en) |
KR (1) | KR20170028985A (en) |
CN (1) | CN106536451A (en) |
DE (1) | DE102015212941A1 (en) |
WO (1) | WO2016005557A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6556323B2 (en) * | 2016-02-26 | 2019-08-07 | 京セラ株式会社 | Ceramic joint |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5804289A (en) * | 1995-07-19 | 1998-09-08 | Tokuyama Corporation | Aluminum nitride junction structure |
US20020007911A1 (en) * | 2000-01-20 | 2002-01-24 | Akira Kuibira | Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder; and semiconductor manufacturing apparatus |
US20070144667A1 (en) * | 2005-12-27 | 2007-06-28 | Ngk Insulators, Ltd. | Aluminum nitride bonded body, and manufacturing method of the same |
US20130319762A1 (en) * | 2012-02-29 | 2013-12-05 | Jonathan H. Harris | Transient liquid phase, pressureless joining of aluminum nitride components |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6572830B1 (en) * | 1998-10-09 | 2003-06-03 | Motorola, Inc. | Integrated multilayered microfludic devices and methods for making the same |
AU2573901A (en) * | 1999-11-12 | 2001-06-06 | Trustees Of The University Of Pennsylvania, The | Minute electromechanical actuation and fluid control devices and integrated systems based on low temperature co-fired ceramic (ltcc) tape technology |
CN1533370A (en) * | 2001-07-19 | 2004-09-29 | Ҿ쳵���ʽ���� | Ceramic connection body, method of connecting ceramic bodies and ceramic structure body |
EP1645329A4 (en) * | 2003-07-11 | 2010-05-19 | Ngk Insulators Ltd | Microreactor |
US7504070B2 (en) * | 2003-07-11 | 2009-03-17 | Ngk Insulators, Ltd. | Micro reactor |
-
2015
- 2015-07-10 US US15/324,954 patent/US20170267591A1/en not_active Abandoned
- 2015-07-10 WO PCT/EP2015/065830 patent/WO2016005557A1/en active Application Filing
- 2015-07-10 DE DE102015212941.1A patent/DE102015212941A1/en active Pending
- 2015-07-10 CN CN201580037487.3A patent/CN106536451A/en active Pending
- 2015-07-10 KR KR1020177003536A patent/KR20170028985A/en unknown
- 2015-07-10 EP EP15744498.5A patent/EP3166909A1/en not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5804289A (en) * | 1995-07-19 | 1998-09-08 | Tokuyama Corporation | Aluminum nitride junction structure |
US20020007911A1 (en) * | 2000-01-20 | 2002-01-24 | Akira Kuibira | Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder; and semiconductor manufacturing apparatus |
US20070144667A1 (en) * | 2005-12-27 | 2007-06-28 | Ngk Insulators, Ltd. | Aluminum nitride bonded body, and manufacturing method of the same |
US20130319762A1 (en) * | 2012-02-29 | 2013-12-05 | Jonathan H. Harris | Transient liquid phase, pressureless joining of aluminum nitride components |
Non-Patent Citations (1)
Title |
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See also references of WO2016005557A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO2016005557A1 (en) | 2016-01-14 |
US20170267591A1 (en) | 2017-09-21 |
CN106536451A (en) | 2017-03-22 |
DE102015212941A1 (en) | 2016-01-14 |
KR20170028985A (en) | 2017-03-14 |
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