EP3078246A1 - Method for forming an electrically conductive structure on a plastic substrate - Google Patents
Method for forming an electrically conductive structure on a plastic substrateInfo
- Publication number
- EP3078246A1 EP3078246A1 EP14796142.9A EP14796142A EP3078246A1 EP 3078246 A1 EP3078246 A1 EP 3078246A1 EP 14796142 A EP14796142 A EP 14796142A EP 3078246 A1 EP3078246 A1 EP 3078246A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- plastic substrate
- electron beam
- electrically conductive
- ink
- copper particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 75
- 238000000034 method Methods 0.000 title claims abstract description 43
- 239000002245 particle Substances 0.000 claims abstract description 64
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 55
- 229910052802 copper Inorganic materials 0.000 claims abstract description 55
- 239000010949 copper Substances 0.000 claims abstract description 55
- 238000010894 electron beam technology Methods 0.000 claims abstract description 50
- 238000007639 printing Methods 0.000 claims abstract description 9
- 239000007787 solid Substances 0.000 claims abstract description 6
- 238000010408 sweeping Methods 0.000 claims description 8
- 230000003647 oxidation Effects 0.000 claims description 5
- 238000007254 oxidation reaction Methods 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 238000005245 sintering Methods 0.000 abstract description 10
- 239000000976 ink Substances 0.000 description 46
- 239000004020 conductor Substances 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000009533 lab test Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001953 sensory effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000007704 wet chemistry method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1283—After-treatment of the printed patterns, e.g. sintering or curing methods
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/02—Printing inks
- C09D11/03—Printing inks characterised by features other than the chemical nature of the binder
- C09D11/037—Printing inks characterised by features other than the chemical nature of the binder characterised by the pigment
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/52—Electrically conductive inks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
- H05K1/097—Inks comprising nanoparticles and specially adapted for being sintered at low temperature
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0104—Properties and characteristics in general
- H05K2201/0129—Thermoplastic polymer, e.g. auto-adhesive layer; Shaping of thermoplastic polymer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/08—Treatments involving gases
- H05K2203/085—Using vacuum or low pressure
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/08—Treatments involving gases
- H05K2203/087—Using a reactive gas
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/09—Treatments involving charged particles
- H05K2203/092—Particle beam, e.g. using an electron beam or an ion beam
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/16—Inspection; Monitoring; Aligning
- H05K2203/163—Monitoring a manufacturing process
Definitions
- the invention relates to a method for forming an electrically conductive structure on a plastic substrate, in which initially an ink is printed on the plastic substrate.
- lithographic and galvanic methods are established. However, these methods are very complex and expensive and therefore less suitable for a small series production and rapid prototyping.
- Very flexible alternative techniques are direct writing methods, such as, for example, the aerosol and inkjet printing.
- the metal particles are coated with an organic layer that prevents agglomeration and sedimentation within the ink. In order to reduce the electrical resistance of printed wiring patterns printed with such inks, the organic components must be removed from the wiring patterns.
- a method is known in which a silver-containing ink is printed on a substrate.
- the ink also contains a dispersion stabilizer and a solvent.
- the entire substrate is heated to above 1 90 ° C. by means of an electron beam in order to remove organic material remaining on the substrate and thus to form conductive tracks of silver. Due to the heating of the substrate above 1 90 ° C, the process is limited in terms of the substrate materials to be used, in particular with respect to plastic materials. Another disadvantage is due to the expensive silver-containing ink required for this purpose.
- the invention is therefore based on the technical problem of providing a method by means of which the disadvantages of the prior art are overcome.
- an electrically conductive structure is also on
- Plastic substrates can be formed, in which an inexpensive ink is used and in which a high electrical conductivity of the formed on the substrate interconnect structure can be achieved.
- an ink containing electrically conductive solid particles is first printed on the plastic substrate at least on the surface regions on which the electrically conductive structure is to be formed.
- electrically conductive solid particles copper particles are used according to the invention. It has an advantageous effect here that copper-particle-containing inks are cheaper than inks in which the electrically conductive particles consist of noble metals. Because an oxidation Of copper particles during storage at atmospheric conditions usually can not be prevented, are the term copper particles in the sense of the invention also to understand such copper particles on the surface of which is partially or completely formed an oxide layer. It is expressly mentioned, however, that oxidation of the copper particles is neither required nor desired for the process according to the invention. Therefore, according to the invention, the term “copper particles” also means oxides and alloys which have a copper content of at least 90%.
- a path energy is selected with an energy input into the printed ink such that sintering of the copper particles is effected as a result of sweeping the ink with the electron beam.
- the sintering of the copper particles causes adjacent copper particles to be fused together only at certain points or in smaller surface areas, whereby only a good electrically conductive contact is made from a copper particle to adjacent copper particles and thus an electrically conductive structure is formed.
- organic components of the ink are removed from the plastic substrate at the same time.
- the method according to the invention is also suitable for temperature-sensitive substrates, such as plastic substrates , suitable. With the method according to the invention but also conductive structures on other substrate materials, such as semiconductors, G lasers or ceramics, are formed. embodiments
- a plastic substrate 1 is shown schematically, on which an electrically conductive structure is to be formed. According to the invention is on the
- Plastic substrate 1 first printed an ink containing electrically conductive particles in the form of copper particles.
- the printing of the ink takes place at least in the surface regions of the plastic substrate 1, on which an electrically conductive structure 2 is to be formed. In the embodiment associated with FIG. 1, only those surface regions of the plastic substrate 1 have been printed with the ink on which the electrically conductive structure 2 is to be formed.
- Any ink printing processes known in the art may be used in the process of printing the ink, such as inkjet, aerosoljet, spray or screen printing.
- An ink used according to the invention is characterized in that the proportion of copper particles in the ink is at least 15% by weight and the copper particles have a size in the range from 5 nm to 100 ⁇ m. Preference is given to using copper particles having a size in the range from 5 nm to 1 ⁇ m, because it is also possible to form particularly narrow and filigree conductor track structures with particles of this size.
- the ink may also contain solvents, water, and additives for controlling ink viscosity, as well known from other inks for printing circuits.
- a copper-containing ink is used, which is formed as a low-viscosity suspension having a viscosity of less than 5 Pa s (pascal second).
- the copper particles of the printed ink are sintered only on the surface portions of the plastic substrate 1 on which the electroconductive structure 2 is to be formed, and thus an electrically conductive contact is formed between adjacent copper particles within these surface regions.
- the plastic substrate 1 is introduced into a vacuum chamber, not shown in Fig. 1.
- the surface regions of the plastic substrate 1 on which the electrically conductive structure 2 is to be formed are swept over by means of an electron beam 3 with a first energy of the line, which causes sintering of the copper particles.
- an electron beam is particularly suitable because such an electron beam can be generated with a very small beam focus and thus very narrow conductor track structures can be formed. Furthermore, an electron beam is very quickly deflected with high precision, resulting in a high
- an electron beam 3 which is generated by an electron beam generator 4, with a power of 1 W to 1 50 W, wherein a feed of the electron beam 3, with which the electron beam 3 sweeps over the plastic substrate 1, at a speed of 0, 1 m / s to 100 m / s is applied.
- the plastic substrate 1 can be introduced into the vacuum chamber and then checked to see whether the plastic substrate 1 is properly aligned in the vacuum chamber. If the check reveals that the plastic substrate is aligned correctly, the surface of the plastic substrate 1 is scanned with the electron beam 3 in accordance with a predetermined geographical pattern of the electrically conductive structure to be formed.
- backscattered electrons and / or secondary electrons are detected by means of a sensor device (not shown in FIG.
- Electron beam 3 is controlled. In this procedure, it can be checked and ensured that the position of the electron beam 3 on the surface of the plastic substrate lies within the surface regions on which the electrically conductive structure is to be formed.
- the requisite sensor devices for detecting secondary and backscattered electrons with associated evaluation and control device are known, for example, from electron beam welding, and can be easily integrated into devices and methods for forming a conductive structure.
- the plastic substrate 1 by means of the electron beam 3 with a second energy range covered wherein the second energy range is chosen smaller than the first energy range.
- both surface regions of the plastic substrate 1 can be covered on which an electrically conductive structure 2 is to be formed, as well as surface areas on which no electrically conductive structure 2 is to be formed.
- secondary and / or backscattered electrons are detected by means of the sensor device.
- a contrast image of the surface of the plastic substrate 1 formed therefrom can then be determined whether the plastic substrate 1 is properly aligned within the vacuum chamber and / or if the electron beam 3, when it sweeps over the surfaces of the plastic substrate 1 with the first path energy, still within the surface areas act on which the electrically conductive structure 2 is to be formed.
- the electron beam 3 can be switched during the sweeping of the surface of the plastic substrate with the first path energy at time intervals to the second path energy, with the second energy path, the entire surface of the plastic substrate 1 to check its position on the surface of the plastic substrate 1 and then continue the sweeping of the plastic substrate 1 with the first path energy.
- the necessary control means for switching the path energy of an electron beam and for controlling the direction of an electron beam are known.
- the plastic substrate 1 has been printed only in the surface areas with the ink containing copper particles, on which the electrically conductive structure 2 should be formed.
- the entire surface of the plastic substrate 1 can be printed with the copper-containing ink or coated with copper particles.
- the ink is then removed from the other surface portions of the plastic substrate 1 in which the copper particles were not sintered by the electron beam. This can be done, for example, by the ink, which is not supplied with the electron beam 3 with the first energy of the path, from the surface of the ink
- Plastic substrate 1 is removed by mechanical or chemical means.
- the electrical conductivity of an electrically conductive structure 2 produced according to the invention can be further increased further by introducing a gas reducing the oxidation of the copper particles into the vacuum chamber during the charging of the ink containing copper particles with the electron beam 3.
- the hydrogen gas has proved to be particularly suitable because it extracts oxygen from an oxidized surface layer of copper particles and combines with this to water, which evaporates from the ink.
- An oxidized boundary layer in the case of copper particles is reduced in this way and thus the electrical conductivity of the formed electrically conductive structure 2 is increased.
- a hydrogen-containing gas can also be used for this purpose.
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013113485.8A DE102013113485A1 (en) | 2013-12-04 | 2013-12-04 | A method of forming an electrically conductive structure on a plastic substrate |
PCT/EP2014/074373 WO2015082179A1 (en) | 2013-12-04 | 2014-11-12 | Method for forming an electrically conductive structure on a plastic substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
EP3078246A1 true EP3078246A1 (en) | 2016-10-12 |
Family
ID=51871080
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14796142.9A Withdrawn EP3078246A1 (en) | 2013-12-04 | 2014-11-12 | Method for forming an electrically conductive structure on a plastic substrate |
Country Status (7)
Country | Link |
---|---|
US (1) | US20160324010A1 (en) |
EP (1) | EP3078246A1 (en) |
JP (1) | JP6290417B2 (en) |
KR (1) | KR20160094425A (en) |
CN (1) | CN106165551A (en) |
DE (1) | DE102013113485A1 (en) |
WO (1) | WO2015082179A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108496055B (en) | 2016-04-15 | 2020-10-27 | 惠普发展公司,有限责任合伙企业 | Three-dimensionally printed load cell component |
WO2019209340A1 (en) * | 2018-04-27 | 2019-10-31 | Hewlett-Packard Development Company, L.P. | Containers with gas vessel |
CZ308757B6 (en) * | 2020-03-03 | 2021-04-28 | Západočeská Univerzita V Plzni | Resistor manufacturing method for power applications |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4278702A (en) * | 1979-09-25 | 1981-07-14 | Anthony J. Casella | Method of making printed circuit board by induction heating of the conductive metal particles on a plastic substrate |
DE3629474A1 (en) * | 1986-08-29 | 1988-03-03 | Licentia Gmbh | Method of providing raised structures and delay-line support for a travelling-wave tube fabricated by said method |
GB2336161B (en) | 1998-04-06 | 2003-03-26 | John Michael Lowe | Method of providing conductive tracks on a printed circuit and apparatus for use in carrying out the method |
US6537052B1 (en) * | 1999-08-23 | 2003-03-25 | Richard J. Adler | Method and apparatus for high speed electron beam rapid prototyping |
US20050173380A1 (en) * | 2004-02-09 | 2005-08-11 | Carbone Frank L. | Directed energy net shape method and apparatus |
US20050255253A1 (en) | 2004-05-13 | 2005-11-17 | White John M | Apparatus and methods for curing ink on a substrate using an electron beam |
US7625063B2 (en) * | 2004-11-04 | 2009-12-01 | Applied Materials, Inc. | Apparatus and methods for an inkjet head support having an inkjet head capable of independent lateral movement |
US20070193026A1 (en) * | 2006-02-23 | 2007-08-23 | Chun Christine Dong | Electron attachment assisted formation of electrical conductors |
JP2009004669A (en) * | 2007-06-25 | 2009-01-08 | Panasonic Corp | Method for manufacturing metal wiring substrate and metal wiring substrate formed by using it |
CN104894538A (en) * | 2008-10-17 | 2015-09-09 | Ncc纳诺责任有限公司 | Method for reducing thin films on low temperature substrates |
KR20100082558A (en) | 2009-01-09 | 2010-07-19 | 삼성에스디아이 주식회사 | Conductive ink composition for printed circuit board and method of producing printed circuit board |
JP5387034B2 (en) * | 2009-02-20 | 2014-01-15 | 大日本印刷株式会社 | Conductive substrate |
JP5616070B2 (en) * | 2010-01-21 | 2014-10-29 | 株式会社フジクラ | Electron beam curing conductive paste and circuit board manufacturing method using the same |
US20140097002A1 (en) * | 2012-10-05 | 2014-04-10 | Tyco Electronics Amp Gmbh | Electrical components and methods and systems of manufacturing electrical components |
-
2013
- 2013-12-04 DE DE102013113485.8A patent/DE102013113485A1/en not_active Withdrawn
-
2014
- 2014-11-12 CN CN201480066514.5A patent/CN106165551A/en active Pending
- 2014-11-12 JP JP2016536655A patent/JP6290417B2/en not_active Expired - Fee Related
- 2014-11-12 US US15/100,464 patent/US20160324010A1/en not_active Abandoned
- 2014-11-12 KR KR1020167017785A patent/KR20160094425A/en not_active Application Discontinuation
- 2014-11-12 WO PCT/EP2014/074373 patent/WO2015082179A1/en active Application Filing
- 2014-11-12 EP EP14796142.9A patent/EP3078246A1/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JP2016541121A (en) | 2016-12-28 |
DE102013113485A1 (en) | 2015-06-11 |
WO2015082179A1 (en) | 2015-06-11 |
JP6290417B2 (en) | 2018-03-07 |
CN106165551A (en) | 2016-11-23 |
US20160324010A1 (en) | 2016-11-03 |
KR20160094425A (en) | 2016-08-09 |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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AX | Request for extension of the european patent |
Extension state: BA ME |
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RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: MATTAUSCH, GOESTA Inventor name: FAHLAND, MATTHIAS Inventor name: WINCKLER, FALK Inventor name: GRAFFEL, BENJAMIN Inventor name: MOSCH, SINDY Inventor name: WEISS, STEFAN Inventor name: JURK, ROBERT |
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DAX | Request for extension of the european patent (deleted) | ||
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
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18D | Application deemed to be withdrawn |
Effective date: 20170131 |