EP3074636B1 - Rotorscheibe sowie rotor für eine vakuumpumpe - Google Patents

Rotorscheibe sowie rotor für eine vakuumpumpe Download PDF

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Publication number
EP3074636B1
EP3074636B1 EP14789582.5A EP14789582A EP3074636B1 EP 3074636 B1 EP3074636 B1 EP 3074636B1 EP 14789582 A EP14789582 A EP 14789582A EP 3074636 B1 EP3074636 B1 EP 3074636B1
Authority
EP
European Patent Office
Prior art keywords
rotor
inner ring
retaining
rings
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP14789582.5A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP3074636A1 (de
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Publication of EP3074636A1 publication Critical patent/EP3074636A1/de
Application granted granted Critical
Publication of EP3074636B1 publication Critical patent/EP3074636B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/002—Details, component parts, or accessories especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • the invention relates to a rotor disk for a vacuum pump, in particular a turbomolecular pump, and a rotor having such rotor disks.
  • Vacuum pumps in particular turbomolecular vacuum pumps, have a rotor shaft mounted in a pump housing.
  • the particular driven by an electric motor rotor shaft carries a rotor which is surrounded by a stator arranged in the pump housing.
  • Turbomolecular pumps in particular have several rotor disks.
  • the individual rotor disks have a plurality of rotor blades.
  • Stator disks of the stator surrounding the rotor are arranged between adjacent rotor disks, wherein the stator disks likewise have stator vanes.
  • stator discs are usually in two parts in such rotors, so that they can be used from the outside between two adjacent rotor discs.
  • the object of the invention is to provide a rotor disk and a rotor having a plurality of rotor disks, in which the occurrence of stresses, in particular on the inner ring of the rotor disk, is reduced.
  • the object is achieved by a rotor disk according to claim 1 or a rotor according to claim 5.
  • the rotor disk according to the invention for a vacuum pump and in particular for a turbomolecular pump has a preferably substantially cylindrical inner ring. This is connected to radially outwardly extending wing elements and in particular integrally formed.
  • the inner ring has at least one expansion joint or a slot.
  • the provision of such expansion joint has the advantage that this thermal stresses can be compensated. Due to the provision of the slot, the occurrence of tangential stresses is reduced or possibly even completely avoided.
  • the occurrence of tangential stresses is at least significantly reduced by the provision according to the invention of an expansion joint. As a result, it is preferably possible to operate a rotor constructed from such rotor disks at higher rotational speeds.
  • the expansion joint or the slot preferably extends parallel to the wings over the entire width of the inner ring.
  • the inner ring of the rotor disk is thus completely slotted.
  • the slot or the expansion joint is inclined.
  • the inclination is designed such that damaging the wing elements is avoided by the slot.
  • the expansion joint or the slot is therefore arranged obliquely and in particular has the inclination of the wing. Relevant to a changing inclination of the wing, the wing tilt in the area of the blade foot, i. in the transition region of the connection of the wing elements with the inner ring.
  • the expansion joints are evenly distributed around the circumference of the inner ring.
  • the individual inner ring segments may possibly each carry only one wing element, so that an inner ring composed of a plurality of inner ring segments is provided.
  • the individual inner ring segments can be interconnected by connecting elements.
  • connecting elements made of an elastomer may be provided in the slots or expansion joints.
  • a connection of the individual inner ring segments during assembly to a rotor is possible.
  • the tendency to unbalance is reduced or prevented by unilateral stretching.
  • the provision of several, in particular evenly distributed on the circumference arranged expansion joints has the advantage that the stresses are better balanced and the deformation of individual segments is in each case smaller than the deformation of an entire ring segment with only one slot.
  • the wing elements are in the region of the blade root. tapers in the transition region between the wing elements and the inner ring.
  • the taper is realized by provided on both the top and at the bottom recesses. These recesses are preferably mirror-symmetrical in order to avoid imbalances. The recesses are thus mirror-symmetrical to a center line of the wing elements or to a central wing plane.
  • the provision of a taper of the wing elements in the area of the blade foot has positive effects on possibly occurring vibrations of the wing elements. This is particularly advantageous when mounted.
  • the invention relates to a rotor for a vacuum pump, in particular a turbomolecular pump.
  • the rotor has a plurality of rotor disks arranged in the longitudinal direction of the rotor or in the longitudinal direction of a rotor shaft, which are preferably designed as described above.
  • the at least one inner ring is surrounded by a retaining ring for fixing.
  • the retaining ring is in particular a reinforcing ring, which is preferably made of fiber-reinforced plastic, such as CFRP.
  • the retaining rings are at least partially formed and arranged such that a retaining ring surrounds each two adjacent inner rings of the rotor disks.
  • the retaining ring surrounds two adjacent inner rings in the longitudinal direction in each case partially.
  • an inner ring is thus fixed in a preferred embodiment by two retaining rings.
  • the retaining rings protrude in the longitudinal direction partially over the inner ring.
  • a part of the inner ring in the longitudinal direction is not surrounded by a retaining ring, wherein in this region of the inner ring the wing elements are connected to the inner ring, in particular integrally formed.
  • damping can be achieved by providing the retaining ring.
  • the wing elements are optionally vibrated depending on the operating condition. These vibrations can be reduced by the retaining ring.
  • the retaining ring thus has the additional function of a damper in this embodiment.
  • the retaining ring covers the recesses forming the taper. A part of the retaining ring is thus on the top or bottom of the wing elements. In this way, a good damping of vibrations of the wing elements can be realized. It is particularly preferred in this embodiment that the retaining rings have fiber-reinforced plastic, wherein it is particularly preferred to form the retaining rings as CFRP tubes.
  • a clamping element is preferably provided within the inner ring.
  • the clamping element presses the individual inner ring segments against the retaining ring, so that a defined position of the inner ring segments is ensured.
  • the inner rings in conjunction with the retaining rings and possibly additionally with the clamping elements form a self-supporting construction. It is preferred to additionally provide a carrier element within the inner rings.
  • the carrier element may be the rotor shaft itself or an element to be connected to the rotor shaft.
  • Such an element to be connected to the rotor shaft is preferably designed as a hollow cylinder, so that the rotor shaft projects at least partially into the hollow cylinder, wherein the hollow cylinder then carries the inner rings.
  • the carrier element which is designed in particular as a hollow cylinder, has, in a preferred embodiment, a holding projection pointing radially outward, preferably annular.
  • a holding projection pointing radially outward, preferably annular.
  • the carrier element designed in particular as a hollow cylinder may have an opening provided in the longitudinal direction which is at least partially closed by a cover element.
  • the cover element may in this case serve to fix an outer inner ring and / or an outer retaining ring.
  • the lid member may in turn have a step-shaped radially outwardly facing approach.
  • the cover element is used in particular for positionally accurate fixation of the inner rings and the retaining rings on the support element.
  • a rotor disk 10 has an inner ring 12, on the outer side 14 of which a plurality of wing elements 16 distributed uniformly around the circumference are arranged.
  • the wing elements 16 are in this case in particular integrally connected to the inner ring 12.
  • the inner ring 12 has in sectional view ( Fig. 2 ) two substantially cylindrically shaped ring elements 18, wherein between the two ring elements 18 each of the wing elements 16 are connected to the ring member 12.
  • a rotor In a first preferred embodiment of a rotor ( Fig. 3 ) are several of the in the FIGS. 1 and 2 Rotor disks shown arranged in the longitudinal direction 20 on a support member 22.
  • the support member 22 is formed as a hollow cylinder, so that this can be plugged onto a rotor shaft, not shown, and fixed on this.
  • the support element 22 has at its in Fig. 3 lower end a stepped holding lug 24 with a step 26.
  • five rotor disks 10 are arranged on an outer side 28 of the carrier element in the longitudinal direction in the illustrated embodiment.
  • the rotor disks 10 each have a slot or an expansion joint 30 (FIG. Fig. 1 ) on.
  • the inner rings 12 of the rotor disks 10 are surrounded by holding or reinforcing rings 32.
  • a slot 30 having inner rings 10 are pressed together and inserted into the formed as a closed rings retaining rings 32.
  • a retaining ring 32 in each case surrounds two ring elements 18 of two adjacent inner rings 12 with the exception of the two outer inner rings 12 Fig. 3
  • Lower retaining ring 32 on the one hand surrounds the ring element 18 of the lower inner ring 12 and the step 26 of the retaining lug 24 of the support element 22nd
  • stator disks arranged between the rotor disks 10 are in this case formed as closed rings and are already arranged between them during assembly of the rotor disks. It is also possible that these are, for example, two-part stator disks, which are inserted from the outside between two adjacent rotor disks 10 after complete assembly of the rotor.
  • upper rotor disk 10 is connected via an upper retaining ring with a cover member 34.
  • the cover element 34 has a holding projection 36, which likewise has a step 38 in the exemplary embodiment shown.
  • the upper retaining ring 32 thus abuts against the ring element 18 of the upper inner ring 12 and on the step 38 of the retaining lug 36 of the cover element 34.
  • the cover 34 is inserted into an opening 40 of the carrier element 22 designed as a hollow cylinder.
  • the lid 34 has a bore 42.
  • FIG. 4 illustrated preferred embodiment of the rotor according to the invention are similar or identical components with the same reference numerals.
  • This embodiment has the essential difference that the rotor disks have not only one slot 30 but a plurality of slots, so that individual rotor segments or inner ring segments are provided.
  • the individual rotor segments 42 in composite form then again form a rotor disk which corresponds to the rotor disk 10 in its function.
  • a recess is arranged on the inner side of the inner ring segments 44, in which a clamping element 46 is arranged.
  • the clamping element is in particular annular. Incidentally, the assembly and arrangement of the individual elements is carried out according to the basis Fig. 3 described embodiment.
  • each wing element 16 by two opposing recesses 50.
  • the recesses 50 are formed as circumferential annular groove-like recesses.
  • the recesses 50 are designed mirror-symmetrically to a center line 52 of the wing member 16.
  • the radial width of the retaining rings 32 which are in particular CFRP tubes, is selected such that the retaining rings 32 completely cover the recesses 50.
  • the retaining rings 32 bear against an upper side 54 and an underside 56 of the wing elements. This system is preferably over several millimeters. Due to the abutment of the retaining rings 32 on the upper side 54 and the underside 56 of the wing elements 16, the retaining rings 32 additionally act as damping elements.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP14789582.5A 2013-11-30 2014-10-28 Rotorscheibe sowie rotor für eine vakuumpumpe Active EP3074636B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202013010937.8U DE202013010937U1 (de) 2013-11-30 2013-11-30 Rotorscheibe sowie Rotor für eine Vakuumpumpe
PCT/EP2014/073143 WO2015078648A1 (de) 2013-11-30 2014-10-28 Rotorscheibe sowie rotor für eine vakuumpumpe

Publications (2)

Publication Number Publication Date
EP3074636A1 EP3074636A1 (de) 2016-10-05
EP3074636B1 true EP3074636B1 (de) 2017-09-20

Family

ID=51795643

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14789582.5A Active EP3074636B1 (de) 2013-11-30 2014-10-28 Rotorscheibe sowie rotor für eine vakuumpumpe

Country Status (8)

Country Link
US (1) US9932987B2 (ja)
EP (1) EP3074636B1 (ja)
JP (1) JP6118951B2 (ja)
KR (1) KR101758033B1 (ja)
CN (1) CN105874209B (ja)
DE (1) DE202013010937U1 (ja)
SG (1) SG11201604214YA (ja)
WO (1) WO2015078648A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014100622A1 (de) * 2014-01-21 2015-07-23 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotoranordnung für eine Vakuumpumpe und Rotoranordnung für eine Vakuumpumpe
EP4151860A3 (de) * 2022-12-22 2023-04-05 Pfeiffer Vacuum Technology AG Vakuumpumpe

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1185625B (de) * 1963-07-19 1965-01-21 Bmw Triebwerkbau Ges M B H Einteilig gegossenes Laufrad fuer Heissdampf- oder Gasturbinen
JPS59113990A (ja) * 1982-12-22 1984-06-30 Hitachi Ltd タ−ボ分子ポンプのロ−タ製造方法
JPS60234777A (ja) * 1984-05-04 1985-11-21 Hitachi Ltd タ−ボ分子ポンプのロ−タの製作方法
US4702671A (en) 1985-05-30 1987-10-27 General Electric Company Slip ring expansion joint
JP3160039B2 (ja) * 1991-08-22 2001-04-23 エヌティエヌ株式会社 ターボ分子ポンプと動翼の加工方法
DE10020673C2 (de) * 2000-04-27 2002-06-27 Mtu Aero Engines Gmbh Ringstruktur in Metallbauweise
US6846159B2 (en) * 2002-04-16 2005-01-25 United Technologies Corporation Chamfered attachment for a bladed rotor
DE102007048703A1 (de) 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
CN101424276A (zh) * 2007-10-29 2009-05-06 乐金电子(天津)电器有限公司 空调器风扇固定卡子
CN201241862Y (zh) * 2007-12-19 2009-05-20 泰维科技股份有限公司 组合式微型轴流风扇
EP2322763A1 (de) 2009-11-17 2011-05-18 Siemens Aktiengesellschaft Turbinen- oder Verdichterschaufel
JP5106588B2 (ja) 2010-07-16 2012-12-26 Ｎｅｃアクセステクニカ株式会社 連結構造
JP2013194870A (ja) * 2012-03-22 2013-09-30 Nisshin Steel Co Ltd 金属管の接続方法
US20140037488A1 (en) * 2012-07-31 2014-02-06 John Stewart Glen Vane-type Compressors and Expanders with Minimal Internal Energy Losses

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
SG11201604214YA (en) 2016-07-28
DE202013010937U1 (de) 2015-03-02
KR20160070159A (ko) 2016-06-17
JP6118951B2 (ja) 2017-04-19
CN105874209A (zh) 2016-08-17
EP3074636A1 (de) 2016-10-05
US20170023002A1 (en) 2017-01-26
CN105874209B (zh) 2017-11-03
KR101758033B1 (ko) 2017-07-14
JP2016538472A (ja) 2016-12-08
WO2015078648A1 (de) 2015-06-04
US9932987B2 (en) 2018-04-03

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