EP3057739A4 - Beschichteter schleifartikel und verfahren zur herstellung davon - Google Patents

Beschichteter schleifartikel und verfahren zur herstellung davon Download PDF

Info

Publication number
EP3057739A4
EP3057739A4 EP14853327.6A EP14853327A EP3057739A4 EP 3057739 A4 EP3057739 A4 EP 3057739A4 EP 14853327 A EP14853327 A EP 14853327A EP 3057739 A4 EP3057739 A4 EP 3057739A4
Authority
EP
European Patent Office
Prior art keywords
making
same
abrasive article
coated abrasive
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14853327.6A
Other languages
English (en)
French (fr)
Other versions
EP3057739A1 (de
EP3057739B1 (de
Inventor
Jilliann M. NELSON
Scott W. Peterson
Charles J. Studiner, Iv
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of EP3057739A1 publication Critical patent/EP3057739A1/de
Publication of EP3057739A4 publication Critical patent/EP3057739A4/de
Application granted granted Critical
Publication of EP3057739B1 publication Critical patent/EP3057739B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/20Lapping pads for working plane surfaces
    • B24B37/22Lapping pads for working plane surfaces characterised by a multi-layered structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001Manufacture of flexible abrasive materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D2203/00Tool surfaces formed with a pattern

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Laser Beam Processing (AREA)
EP14853327.6A 2013-10-18 2014-10-13 Beschichteter schleifartikel und verfahren zur herstellung davon Active EP3057739B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201361892996P 2013-10-18 2013-10-18
PCT/US2014/060253 WO2015057562A1 (en) 2013-10-18 2014-10-13 Coated abrasive article and method of making the same

Publications (3)

Publication Number Publication Date
EP3057739A1 EP3057739A1 (de) 2016-08-24
EP3057739A4 true EP3057739A4 (de) 2017-06-28
EP3057739B1 EP3057739B1 (de) 2020-12-09

Family

ID=52828580

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14853327.6A Active EP3057739B1 (de) 2013-10-18 2014-10-13 Beschichteter schleifartikel und verfahren zur herstellung davon

Country Status (6)

Country Link
US (1) US20160263722A1 (de)
EP (1) EP3057739B1 (de)
JP (1) JP2016539011A (de)
KR (1) KR20160071416A (de)
CN (1) CN105636746B (de)
WO (1) WO2015057562A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI609742B (zh) * 2015-04-20 2018-01-01 中國砂輪企業股份有限公司 研磨工具
TWI603813B (zh) * 2015-04-20 2017-11-01 中國砂輪企業股份有限公司 研磨工具及其製造方法
EP3541573A4 (de) * 2016-11-16 2020-07-29 3M Innovative Properties Company Strukturierter schleifartikel mit merkmalen mit verbesserter struktureller integrität
WO2019102331A1 (en) * 2017-11-21 2019-05-31 3M Innovative Properties Company Coated abrasive disc and methods of making and using the same
US11554579B2 (en) * 2020-07-21 2023-01-17 Sensitile Systems, Llc Structure that forms a visual representation and method for making the same
CN114211410B (zh) * 2021-12-29 2023-12-05 安徽光智科技有限公司 光学元件抛光膜填充胶及其制备方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5667842A (en) * 1993-10-27 1997-09-16 Minnesota Mining And Manufacturing Company Abrasive articles incorporating addition polymerizable resins and reactive diluents, and methods of making said abrasive articles
CA2134156A1 (en) * 1993-11-22 1995-05-23 Thomas P. Klun Coatable compositions, abrasive articles made therefrom, and methods of making and using same
US5958794A (en) * 1995-09-22 1999-09-28 Minnesota Mining And Manufacturing Company Method of modifying an exposed surface of a semiconductor wafer
US6322652B1 (en) * 1998-09-04 2001-11-27 3M Innovative Properties Company Method of making a patterned surface articles
US6458018B1 (en) * 1999-04-23 2002-10-01 3M Innovative Properties Company Abrasive article suitable for abrading glass and glass ceramic workpieces
US7632434B2 (en) * 2000-11-17 2009-12-15 Wayne O. Duescher Abrasive agglomerate coated raised island articles
US20050276967A1 (en) * 2002-05-23 2005-12-15 Cabot Microelectronics Corporation Surface textured microporous polishing pads
US20060154579A1 (en) * 2005-01-12 2006-07-13 Psiloquest Thermoplastic chemical mechanical polishing pad and method of manufacture
TWI385050B (zh) * 2005-02-18 2013-02-11 Nexplanar Corp 用於cmp之特製拋光墊及其製造方法及其用途
EP1944125B1 (de) * 2005-08-25 2012-01-25 Hiroshi Ishizuka Werkzeug mit sinterkörperpolierfläche und herstellungsverfahren dafür
US20070235902A1 (en) * 2006-03-31 2007-10-11 3M Innovative Properties Company Microstructured tool and method of making same using laser ablation
CN101925441B (zh) * 2007-12-31 2013-08-14 3M创新有限公司 经等离子处理的磨料制品及其制造方法
JP5596030B2 (ja) * 2008-06-26 2014-09-24 スリーエム イノベイティブ プロパティズ カンパニー 多孔質エレメントを有する研磨パッド及びその製造方法と使用方法
EP2459343B1 (de) * 2009-07-28 2020-06-17 3M Innovative Properties Company Beschichteter schleifartikel und verfahren zur abtragung beschichteter schleifartikel
US8894466B2 (en) * 2009-12-03 2014-11-25 3M Innovative Properties Company Method of electrostatic deposition of particles, abrasive grain and articles
JP5767325B2 (ja) * 2010-07-02 2015-08-19 スリーエム イノベイティブ プロパティズ カンパニー 被覆研磨材物品
KR102207743B1 (ko) * 2013-08-10 2021-01-26 어플라이드 머티어리얼스, 인코포레이티드 제어된 컨디셔닝을 용이하게 하는 재료 조성을 갖는 cmp 패드들

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
No further relevant documents disclosed *

Also Published As

Publication number Publication date
JP2016539011A (ja) 2016-12-15
KR20160071416A (ko) 2016-06-21
EP3057739A1 (de) 2016-08-24
US20160263722A1 (en) 2016-09-15
CN105636746A (zh) 2016-06-01
EP3057739B1 (de) 2020-12-09
WO2015057562A1 (en) 2015-04-23
CN105636746B (zh) 2017-10-13

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