EP3045728A1 - Spiral vacuum pump - Google Patents

Abstract

Spiral vacuum pump having a fixed first spiral and an orbiting second spiral engaging therein, in which an electric motor is provided for driving, which is integrated in and / or at least one orbiting disc and corresponding to the at least one disc in the spiral vacuum pump, which acts as a in the activated state an orbiting movement of the disc relative to the stator and thus the orbiting movement of the second spiral with respect to the first spiral effecting electric motor is formed, and wherein the at least one orbiting disc is mounted by means of at least one ball mounted in the stator shaft, or the spiral vacuum pump at least has two pumping stages.

Description

The invention relates to a spiral vacuum pump.

Spiral vacuum pumps, also called scroll pumps or spiral fluid conveyors, are vacuum pumps that operate on the displacement principle. A spiral vacuum pump consists of two nested spiral cylinders (Archimedean spirals). One of these spirals is fixed, the other moves on an eccentric drive (eccentric, eccentric shaft) on a circular path. One speaks of a centrally symmetric oscillation ("wobbling"). Thus, between the spirals, individual closed crescent-shaped cavities are created, their volume shrinking inward on and on. As a result, the fluid to be pumped, for example gas, is drawn in from the outside, compressed inside the pump and ejected through an opening in the center of the coil.

The height of the spiral walls, their distance and the speed define the suction power of a spiral vacuum pump.

The oscillating movement of the moving spiral is often generated in practice by an eccentric shaft. The movable scroll thereby orbits the axis of the drive shaft when the drive shaft rotates. The movable scroll must be prevented from rotating around its own axis. For this purpose, one to three anti-rotation mechanisms are often provided. Such a scroll pump is known, for example, from the prior art ( DE 199 14 770 A1 ) known. This belonging to the prior art scroll pump has the disadvantage that the pump has a relatively large space requirement, since the drive for the shaft is designed as a separate motor.

The prior art ( EP 0 798 463 A2 ) includes a scroll pump, which also has a large space requirement.

The technical problem underlying the invention is to provide a spiral vacuum pump, the pump power is increased over the prior art with a small space requirement of the pump. In addition, a spiral vacuum pump is to be specified, which is inexpensive to manufacture in reliable and durable operation.

This technical problem is solved by a spiral vacuum pump having the features of claim 1 or by a spiral vacuum pump having the features according to claim 2.

The spiral vacuum pump according to the invention having a fixed first spiral and an orbiting second spiral engaging therein, wherein the first spiral is arranged on a stator and wherein the second spiral is arranged on an orbiting disk, is characterized in that at least one stator and at least two orbiting Discs or that at least two stators and at least one orbiting disc are provided, and that for driving an electric motor is provided, which is integrated in and / or at least one orbiting disc and corresponding to the at least one disc in the spiral vacuum pump, as a in activated state an orbiting movement of the disc relative to the stator and thus the orbiting movement of the second spiral with respect to the first spiral causing the electric motor is formed, and that the spiral vacuum pump is formed at least two stages.

On the one hand, the two-stage design ensures that the pumping capacity of the pump is significantly increased.

If, according to a first advantageous embodiment, a stator is provided and two orbiting disks are arranged on both sides of the stator, mass balancing takes place if the disks are arranged, for example, diametrically opposite one another.

It is essential that the power of the spiral vacuum pump according to the invention can be significantly increased by the arrangement of a stator with a plurality of disks or a plurality of stators with at least one disk. This has an advantageous effect that in the at least one stator and the at least one orbiting disk, the electric motor is integrated, since this a simple construction of the spiral vacuum pump is possible.

The spiral vacuum pump according to the invention having a fixed first spiral and an orbiting second spiral engaging therein, wherein the first spiral is arranged on a stator and wherein the second spiral is arranged on an orbiting disk, is characterized in that at least one stator and at least one orbiting Disc are provided, and that for driving an electric motor is provided, which is integrated in and / or at least one orbiting disc and corresponding to the at least one disc in the spiral vacuum pump, as an activated state, an orbiting movement of the disc relative to the stator and that the orbiting movement of the second spiral with respect to the first spiral causing electric motor is formed, and that the at least one orbiting disk is mounted by means of at least one ball-mounted or slidably mounted in the stator shaft.

The bearing of the at least one orbiting disk by means of the at least two ball-bearing shafts in the stator has the advantage that the two shafts constitute a rotation prevention mechanism, without the need for additional rotation prevention mechanisms. In addition, the ball bearings of the waves a relatively low-wear and very reliable way of storage.

A further advantageous embodiment of the invention provides that at least two orbiting disks are each provided with a spiral, and that the stator has at least two spirals and that the spirals of the stator and the spirals of the two orbiting disks are arranged to mesh with one another.

This embodiment has the advantage that this is a two-stage pumping system, whereby the power of the spiral vacuum pump according to the invention is increased. The pumping stages can be arranged in parallel or series connection.

It is advantageously provided that the stator is disc-shaped and that in each case a spiral is arranged on both base surfaces of the disc of the stator. This embodiment has the advantage that a two-stage pumping system with a stator and two orbiting disks can be formed.

According to a further embodiment it is provided that at least two stators are provided. This allows even more pumping stages build.

There is also the possibility that between the stators each orbiting disc is arranged and that the disc has a spiral on both base surfaces. This results in a two-stage pumping system, which can be expanded by arranging further discs to a three- or four-stage pumping system.

A further advantageous embodiment of the invention provides that the at least two orbiting discs are arranged angularly offset from each other. By this arrangement, it is possible to avoid imbalances or gas-dynamic forces when driving the discs. It has been found to be particularly advantageous to arrange the at least two disks radially symmetrical to one another. This means that the at least two disks are arranged such that the center of gravity of all the disks taken together is arranged in the center of the at least one stator, or axially offset from the center of the at least one stator.

According to a further advantageous embodiment of the invention it is provided that two orbiting discs are provided, which are arranged diametrically opposite to each other with respect to the axis of rotation. This embodiment has the advantage that no imbalances occur, but a mass balance takes place. Imbalances would cause a special stress on the bearings. The overall system is advantageously balanced outwards.

An advantageous embodiment provides that in and / or on the at least one spiral vacuum pump, stator-side permanent magnets and in and / or on the at least one orbiting disk electromagnets are arranged, or vice versa. By this embodiment, the space-saving electric motor is formed.

Another advantageous embodiment of the invention provides that in and / or on the spiral vacuum pump electromagnets are arranged and the orbiting disk as Reluctance rotor is formed. This embodiment has the advantage that it is particularly simple and inexpensive.

A further advantageous embodiment of the invention provides that the pump stages of the spiral vacuum pump are connected in parallel and / or in series.

und das gesamte Saugvermögen ist $$S_{\mathit{Ges}}=1\cdot S_0$$

mit K _0i = Kompression der einzelnen Pumpstufen
und S ₀ = Saugvermögen der einzelnen Pumpstufen.In the series connection, the compression is determined by the product of the individual compressions of the individual pump stages, which means: $$K_{\mathit{Ges}}={\displaystyle \underset{i=1}{\overset{n}{\Pi }}}{K}_{0i}$$

and the total pumping speed is $$S_{\mathit{Ges}}=1\cdot S_0$$

with K _{0 i} = compression of the individual pump stages
and S ₀ = pumping speed of the individual pumping stages.

$$S_{\mathit{Ges}}=n\cdot S_0$$

mit n = Anzahl der Pumpstufen,
mit K ₀ = Kompression der einzelnen Pumpstufen.In a parallel connection is $$K_{\mathit{Ges}}\approx K_0$$

$$S_{\mathit{Ges}}=n\cdot S_0$$

with n = number of pump stages,
with K ₀ = compression of the individual pump stages.

Another particularly preferred embodiment of the invention provides that two orbiting disks are arranged on or on each shaft.

This embodiment has the advantage that in each case one is provided by the stator cross-shaft which carries on each side of the disc-shaped stator each orbiting disk. Here, the shafts are mounted in ball bearings or plain bearings in the stator.

According to a further particularly preferred embodiment of the invention, it is provided that the at least one shaft has at least one offset. This offset achieves the orbital movement of the discs.

A further advantageous embodiment provides that the at least one shaft has a shaft section arranged in the stator and that a shaft section arranged in the orbiting disk is formed axially offset relative to the shaft section arranged in the stator. This embodiment has the advantage that no separate eccentric is required for the orbiting movement of the disc, but that the waves which serve to support the orbiting discs simultaneously determine the eccentricity.

The arrangement of two or more shafts, preferably three shafts, at the same time a rotation of the orbiting disk is given.

A further advantageous embodiment provides that the shafts have a first shaft section arranged in the stator and that a second shaft section arranged in a first orbiting disk is formed axially offset from the shaft section arranged in the stator and that one in a second orbiting Disc arranged third shaft portion offset from the first two shaft sections is formed.

According to this embodiment, two orbiting disks are associated with a stator. The axially offset shaft sections ensure that the disks advantageously move diametrically opposite one another orbitally relative to the stator. The arrangement of at least two, preferably three waves, a protection against rotation of the stator is guaranteed.

A further advantageous embodiment of the invention provides that at least one anti-rotation device is provided. If the at least one orbiting disk is mounted with only one shaft, there is a general possibility that the orbiting disk rotates about its own axis, which is undesirable since the proper engagement of the spirals of the fixed part and the orbiting disk must be ensured. For this reason, it makes sense to use a rotation prevention device.

According to an advantageous embodiment of the invention, the rotation preventing device is designed as at least one corrugated bellows. The orbiting disc and thus the movable scroll must be prevented from rotating around its own axis. This can be done via a bellows.

According to a further advantageous embodiment of the invention, a seal is provided on end faces of the at least one spiral. At the end faces, that is on the top of the spiral walls, usually a seal to the mating surface. This seal is beneficial Plastic formed. Other materials may be provided. Preference is given to using mixtures of different plastics. Advantageously, the seals have a rectangular cross section (so-called "tip seal"). With increasing service life, the seal wears out. So that the sealing effect is ensured even with increasing wear, there are various possibilities. An advantageous embodiment of the invention provides that the seal is formed as a trackable seal. Particularly advantageously, the seal is arranged on an elastic carrier material. If an elastic carrier material, for example a foam, is arranged underneath the seal, the elasticity of the carrier material causes the seal to be tracked and the prestressing is maintained even with advanced wear. There is also the possibility that the seal is formed as a gas-pressure trackable seal. If the seal has a rectangular cross-section, the seal can be pressed against the opposing surface with the required contact pressure due to a gas pressure of a gas to be conveyed arranged in a gap.

On the mating surface or the corresponding surface is advantageously arranged a so-called hardcoat coating. This is a coating that is particularly hard and advantageously has a smooth surface, so that the wear of the soft surface of the spiral or arranged in the spiral seal remains as low as possible. Instead of the hardcoat coating, another hard coating can also be provided.

According to another advantageous embodiment of the invention, the seal has at least one structure on an end face. Such structures are advantageously arranged in the end face of the seals. The structures may, for example, have a sawtooth-like cross section or dovetail-shaped cross sections.

Between these seals and the counter surface remain small gaps. The formation of the structures and the formation of very small gaps between the seal and the mating surface also cause a sealing effect.

A further advantageous embodiment of the invention provides that the seal is formed as a sealing with the counter surface forming a gap. This type of seal is sufficient in many cases, if the gap is chosen small enough. This embodiment has the advantage that no wear of the seal occurs in that a gap remains between the seal and the mating surface.

According to a further advantageous embodiment of the invention, it is provided that a cooling device is provided. The cooling device serves to cool the at least one pumping stage.

Due to the relative movement of the spirals to each other and the friction associated therewith, in connection with the compression of the gas a considerable waste heat. High temperatures contribute to increased wear of the seal. Therefore, the heat is advantageously led away from the spiral via a forced convection (fan). The heating of the components and the associated thermal expansion must be taken into account when designing the gaps between the spirals.

There is also the possibility, in particular in the case that the stator on both bases a spiral is assigned and cooling by convection because of difficult accessibility is difficult to provide, for example, in the stator channels through which a coolant is passed. This type of cooling may for example be combined with cooling via forced convection of the orbiting scrolls.

According to a further advantageous embodiment of the invention, at least one check valve is arranged on the outlet side. This prevents venting of the pump after switching off the drive. As a result, a rotation of the spiral against the specified direction of rotation can be avoided.

A further advantageous embodiment provides that at least one gas ballast valve is provided. As a result, gas is pumped from the atmosphere side into the pump chamber to prevent condensation of the gas. Advantageously, the gas ballast is supplied through the stator.

According to an advantageous embodiment of the invention it is provided that the stator has a first ring and that the orbiting disc has a second ring and that in the first ring and in the second ring, an electric motor is integrated, which as an activated state, an orbiting movement of the first ring relative to the second ring and thus the orbiting motion the second spiral is formed with respect to the first spiral causing electric motor.

This embodiment has the advantage that the electric motor can be accommodated in the two rings without structurally obstructing the spiral.

Another advantageous embodiment of the invention provides that the stator has a ring and in that in the ring and in the orbiting disc, the electric motor is integrated, as an activated state in an orbital movement of the disc relative to the ring and thus orbital movement of the second spiral with respect to the first spiral causing electric motor is formed. This embodiment has the advantage that no additional ring must be arranged on the orbiting disk, but the magnets are integrated in the disk, for example on the outer edge. The ring of the stator is advantageously arranged on the outer diameter of the stator, such that the ring surrounds the orbiting disk.

Fig. 1

einen Längsschnitt durch ein erstes Ausführungsbeispiel einer Spiralvakuumpumpe;

Fig. 2

einen Längsschnitt durch eine zweiflutige Spiralvakuumpumpe in Parallelschaltung;

Fig. 3

einen Längsschnitt durch eine zweistufige Spiralvakuumpumpe mit Reihenschaltung;

Fig. 4

einen Längsschnitt durch eine zweiflutige Spiralvakuumpumpe;

Fig. 5

einen Längsschnitt durch eine zweiflutige und zweistufige Spiralvakuumpumpe mit insgesamt vier Stufen;

Fig. 6

einen Längsschnitt durch eine zweiflutige Spiralvakuumpumpe;

Fig. 7

einen Längsschnitt durch verschiedene Dichtungsstrukturen;

Fig. 8

eine Ansicht eines Stators mit zwei orbitierenden Scheiben.

Further features and advantages of the invention will become apparent from the accompanying drawings, in which various embodiments of a spiral vacuum pump according to the invention are shown only by way of example, without limiting the invention to these embodiments. In the drawings show:

Fig. 1

a longitudinal section through a first embodiment of a spiral vacuum pump;

Fig. 2

a longitudinal section through a double-flow spiral vacuum pump in parallel circuit;

Fig. 3

a longitudinal section through a two-stage spiral vacuum pump with series connection;

Fig. 4

a longitudinal section through a double-flow spiral vacuum pump;

Fig. 5

a longitudinal section through a double-flow and two-stage spiral vacuum pump with a total of four stages;

Fig. 6

a longitudinal section through a double-flow spiral vacuum pump;

Fig. 7

a longitudinal section through various sealing structures;

Fig. 8

a view of a stator with two orbiting discs.

Fig. 1 1 shows a spiral vacuum pump 1 with a first stage 2 and a second stage 3. The first stage 2 consists of an orbiting disk 4 and a stator 5. The orbiting disk 4 carries a spiral 6. The stator 5 carries a spiral 7. The spirals 6 and 7 are arranged interlockingly. The spiral 6 seals to the stator 5. For this purpose, the stator 5 may have a so-called hardcoat coating or another hard coating on a mating surface 8. The orbiting disk 4 is in three shafts 9, of which in Fig. 1 only two waves are shown orbiting stored. The waves 9 are rotatably mounted in a stator 10 by means of ball bearings 11.

The second stage 3 also has an orbiting disk 12 and a stator 13. The disk 12 carries a spiral 14, the stator 13 carries a spiral 15. The spirals 14, 15 are also arranged intermeshing. The orbiting disk 12 is ball-mounted by means of the shafts 9 in the stator disk 10. The shafts 9 have a shaft portion 16 which is mounted in the stator 10. The shafts 9 furthermore each have two shaft sections 17, 18, which have an offset to the shaft section 16. By the offset 17, 18, the orbiting movement of the discs 4, 12 is caused.

The drive of the orbiting movement by means of an electric motor, which consists of a motor stator 19 and motor orbiter 20. The motor orbiter 20 is made according to Fig. 1 made of permanent magnets. The motor stator 10 has excitable electromagnets, which cause the orbiting movement of the discs 4, 12 and thus of the spirals 6, 14 with appropriate energization. If the electric motor, that is, the electromagnets 19 of the same is energized, then the electric motor acts as a drive, so that in the spaces between the two spirals 6, 7; 14, 15 arranged gas is compressed. The gas is transported from an inlet 21 of each stage 2, 3 to an outlet 22 and thereby compressed.

For sealing pumping chambers 23, a corrugated bellows 24 is provided in each pumping stage. In the Outlets 22, a check valve 25 is arranged in each case. The check valve 25 prevents Rückbelüften the spiral vacuum pump 1 after turning off the drive 18, 19. Thus, a rotation of the spirals 6, 7; 14, 15 are avoided against the specified direction of rotation.

In addition, a gas ballast valve 26 is provided in each pumping stage. Gas is pumped from the atmosphere side into the pump space 23 by the gas ballast valve 26 in order to avoid condensation of the gas to be pumped.

By the relative movement of the spirals 5, 6; 14, 15 and the friction associated therewith in connection with the compression of the gas a considerable waste heat. High temperatures lead to increased wear of the components, in particular of seals (in Fig. 1 not shown) between the coil 6 and the counter surface 8 and the coil 14 and the counter surface 27 at. For this reason, fans 28, which are shown only schematically, are provided to dissipate the heat via a forced convection.

Since the orbiting disks 4, 12 are supported by three shafts 9, no rotation preventing device is needed. The corrugated bellows 24 serve only for sealing the pumping spaces 23.

The shafts 9 are rotatably mounted in the discs 4, 12 via ball bearings 11.

The electric motor 19, 20 may also be constructed such that the motor orbiter 20 is made of a soft magnetic material, such as iron. The electromagnets arranged in the motor stator 19 can be designed, for example, as coils. In principle, it is also possible to form the motor orbiter 20 from electromagnets and the motor stator 19, for example, from permanent magnets or from a soft magnetic material.

Fig. 2 shows a vacuum pump 1, which is designed as a double-flow pump. The pump 1 is shown only schematically. The pump 1 has a stator 10, in which the shaft 9 is rotatably arranged by means of the ball bearings 11. At the in Fig. 2 illustrated embodiment, only one shaft 9 is provided to rotatably support the orbital discs 4, 12, which carry the spirals 6, 14. Since only one shaft 9 is provided, the bellows 24 serve as a rotation preventing mechanism, so that the orbiting discs 4, 12 do not rotate about its own axis.

The pump 1 according to Fig. 2 has an inlet 21. The gas is conveyed by the pumping stages 2, 3 in the direction of the respective outlet 22 and ejected there.

To cool the stators 5, 12 can turn fan (in Fig. 2 not shown) may be provided. In addition, 10 channels 29 are formed in the stator, through which a cooling medium for the removal of waste heat can be performed.

The pump according to Fig. 2 is designed as a double-flow pump with a parallel connection.

Fig. 3 shows the pump 1, which is designed as a two-stage pump with a series circuit. The pump 1 with its components is shown only schematically. Since only the principle of series connection is to be shown, neither shaft nor drive are shown. The pump 1 according to Fig. 3 has an inlet 21. The gas is pumped from the pumping stage 2, that is to say the spirals 6, 7, to an intermediate outlet 30. Through a guide 31, the gas is passed into an outer region of the second pumping stage 3 and conveyed in the pumping stage 3 by the spirals 14, 15 in the direction of the outlet 22.

The corrugated bellows 24 again has a sealing function in this embodiment and may additionally have a rotation prevention function. In the pump 1, the discs 32, 33 are formed as fixed discs. The disk 34 is formed as orbiting disk. This means that the spirals 6, 14 perform an orbiting motion in the fixed scrolls 7, 15 by the orbiting disk 34.

Fig. 4 shows a double-flow vacuum pump 1, which is also shown only schematically. On the representation of seals, drive and shaft was omitted in the schematic representation. According to Fig. 4 the discs 32, 33 are also formed as fixed discs. The disk 34 is formed as orbiting disk. The disk 32 carries the spiral 7, the disk 33 carries the spiral 15. The orbiting disk 34 carries the spirals 6 and 14. The spirals are shown only schematically, but are engaged, so that a gas can be promoted. The disc 34 is mounted on the shaft 9 in the disc 33 by means of the ball bearing 11. To seal the ball bearing 11, a corrugated bellows 24 is provided. The gas enters the pump 1 through the inlet opening 21 and is distributed there according to the arrows A. In the disc 34, a passage 35 is provided, through which the gas passes from the pumping stage 3 into the pumping stage 2. From the pumping stage 2, the gas exits through the outlet opening 22.

Fig. 5 shows a further pump 1, which is formed double-flow and two stages. In total, four pump stages 2, 3; 36, 37 provided. The discs 32, 33 are formed as fixed discs. The disc 32 simultaneously forms the stator, in which the shaft 9 ball-bearing (ball bearing not shown) is arranged. The disc 32 also forms the stator of the pumping stage 36. In addition, a disc 38 forms a stator for the pumping stage 37. The disc 39 is formed as an orbiting disc.

The spiral vacuum pump 1 has an inlet 21. The gas is guided according to the arrows A in the pumping stages 3, 37. By means of intermediate outlets 30 and guides 31, the gas passes into the pumping stages 2, 36 which are sealed by a corrugated bellows 24. From there, the gas is supplied to the outlet 22 through a guide 41.

Fig. 5 shows a vacuum pump 1 with a stator 10 and two orbiting discs 4, 12. Die Discs 4, 12 are mounted orbiting by means of a shaft 9. The shaft 9 is by ball bearings (in Fig. 6 not shown) rotatably mounted in the disc 10. The gas passes through an inlet 21 into the spiral vacuum pump 1. Via a guide 41, the gas is supplied to the outlet 22. It is provided in each pump stage 2, 3 each have a bellows 24 for sealing and as a rotation preventing mechanism. The gas is conveyed in the direction of the arrows from the inlet 21 in the direction of the outlet 22.

The orbiting disk 4 has a spiral 6, the orbiting disk 12 has a spiral 14. The stator 10 has two spirals 40, 53.

The pumps according to the Fig. 2 to 6 are shown only schematically. These pumps are like the pump according to Fig. 1 for the storage of the shaft or shafts 9 each ball bearing. The spirals interlock in such a way that a gas delivery is possible. For this purpose, the spirals 6, 7; 14, 15 to counter surfaces 8, 27 from.

Fig. 7 shows the disc 5 with the spiral 7 and the disc 4 with the spiral 6. In Fig. 7 are several ways of sealing the coils 6, 7 to the discs 4, 5 shown.

The spiral section 42 has a structured surface. In the present case, the surface is sawtooth-shaped in cross-section. By means of a correspondingly selected narrow gap 43, the spiral section 42 seals against the counter surface 44 of the disk 4.

The spiral portion 45 of the spiral 6 has an elastic support material 46 and a seal 47. The seal 47 abuts against the counter surface 8 and thus seals against the counter surface 8. By the elastic carrier material 46, the seal 47 is tracked in case of wear of the seal 47. The mating surface 8 advantageously has a so-called hard coat coating to minimize wear.

The spiral section 48 also has a seal 49. The seal 49 is disposed in a channel 50 of the spiral portion 48, that is, in the fixed scroll 7. The seal 49 seals against the counter surface 44 from.

The seal 49 is rectangular in cross-section, as in Fig. 7 shown. The length L is greater than the width B of the seal 49. The seal 49 is arranged in the channel 50 such that a gap 51 remains in the region of the narrow side with the width B and a gap 51 in the region of the longitudinal side of the seal 49.

This means that the seal 49 is made more flexible in the radial direction. In the column 51, 52 reaches the pumping and compressing gas. As a result, the seal 49 is tracked automatically with wear of the seal, so that a sealing effect between the seal 49 and the counter surface 44 is ensured over a long period.

As in the Fig. 1 to 6 shown, the pumping direction of the gas is always provided from radially outside to radially inside.

Fig. 8 shows the stator 10. In front of the plane of the stator 10, the orbiting disk 4 is arranged, which sits on the shaft portion 17. Behind the stator 10, the orbiting disk 12 is arranged, which is arranged on the shaft portion 18. The discs 4, 12 are arranged diametrically opposite each other, so that in the drive of the discs 4, 12 no imbalance occurs, that is, that there is a mass balance.

reference numerals

1

Scroll vacuum pump

2

pump stage

3

pump stage

4

orbiting disc

5

stator

6

spiral

7

spiral

8th

counter surface

9

wave

10

stator

11

ball-bearing

12

orbiting disc

13

stator

14

spiral

15

spiral

16

shaft section

17

shaft section

18

shaft section

19

motor stator

20

motor Orbiter

21

inlet

22

outlet

23

pump chambers

24

bellows

25

check valve

26

Gas ballast valve

27

counter surface

28

Fan

29

channels

30

intermediate outlet

31

guide

32

Disc fixed

33

Disc fixed

34

Disk orbiting

35

passage

36

pump stage

37

pump stage

38

Disc fixed

39

Disc fixed

40

spiral

41

guide

42

spiral section

43

gap

44

counter surface

45

spiral section

46

elastic carrier material

47

poetry

48

spiral section

49

poetry

50

channel

51

gap

52

gap

53

spiral

A

arrows

B

width

L

length

Claims (15)

A spiral vacuum pump having a fixed first volute and an orbiting second volute engaging therein, the first volute being disposed on a stator and the second volute being disposed on an orbiting disk,
characterized in that at least one stator (5, 13, 32, 33, 38) and at least two orbiting discs (4, 12, 34, 39) or at least two stators (5, 13, 32, 33, 38) and at least an orbiting disc (4, 12, 34, 39) are provided, and that for driving an electric motor (19, 20) is provided, in and / or at least one orbiting disc (4, 12, 34, 39) and corresponding to which at least one disc (4, 12, 34, 39) is integrated in the spiral vacuum pump (1) which, as an activated state, has an orbiting movement of the disc (4, 12, 34, 39) relative to the stator (5, 13 , 32, 33, 38) and thus the orbiting movement of the second spiral (6) with respect to the first spiral (7) causing the electric motor (19, 20) is formed, and that the spiral vacuum pump (1) is formed at least two stages. A spiral vacuum pump having a fixed first volute and an orbiting second volute engaging therein, the first volute being disposed on a stator and the second volute being disposed on an orbiting disk,
characterized in that at least one stator (5, 13, 32, 33, 38) and at least one orbiting disc (4, 12, 34, 39) are provided, and that for driving an electric motor (19, 20) is provided which in and / or at least one orbiting disc (4, 12, 34, 39) and corresponding to the at least a disc (4, 12, 34, 39) is integrated in the spiral vacuum pump (1), which as an activated state, an orbiting movement of the disc (4, 12, 34, 39) relative to the stator (5, 13, 32, 33, 38) and thus the orbiting movement of the second spiral (6) with respect to the first spiral (7) causing the electric motor (19, 20) is formed, and that the at least one orbiting disc (4, 12, 34, 39) by means of at least a in the stator (5, 13, 32, 33, 38) ball-mounted or slidably mounted shaft (9) is mounted. Spiral vacuum pump according to one of the preceding claims, characterized in that at least two orbiting discs (4, 12) each having a spiral (6, 14) are provided, and that the stator (10) has at least two spirals (40, 53), and in that the spirals (40, 53) of the stator (10) and the spirals (6, 14) of the two orbiting discs (4, 12) are arranged so as to engage one another. Spiral vacuum pump according to one of the preceding claims, characterized in that the stator (5, 13, 32, 33, 38) is disc-shaped, and that in each case a spiral (6, 14) is arranged on both base surfaces of the disc of the stator (10) , Spiral vacuum pump according to one of the preceding claims, characterized in that at least two stators (5, 13, 32, 33, 38) are provided, in particular that between the stators (32, 38, 32, 33) in each case an orbiting disc (39, 34 ), and that the disc (39, 34) has a spiral (54) on both base surfaces. Spiral vacuum pump according to one of the preceding claims, characterized in that the at least two orbiting discs (4, 12) are arranged angularly offset from each other, or that the at least two discs (4, 12) are arranged radially symmetrically to one another. Spiral vacuum pump according to one of the preceding claims, characterized in that two orbiting discs (4, 12) are provided, which are arranged diametrically opposite to each other with respect to the axis of rotation. Spiral vacuum pump according to one of the preceding claims, characterized in that in and / or on the spiral vacuum pump (1) stator permanent magnets and in and / or on the at least one orbiting disc (4, 12) electromagnets (20) are arranged, or vice versa. Spiral vacuum pump according to one of the preceding claims, characterized in that in and / or on the spiral vacuum pump (1) electromagnets (20) are arranged and the orbiting disk (4, 12) is designed as a reluctance rotor. Spiral vacuum pump according to one of claims 2 to 9, characterized in that the at least one shaft (9) has at least one offset. Spiral vacuum pump according to one of claims 2 to 10, characterized in that the at least one shaft (9) in the stator (10) arranged shaft portion (16), and in that in the orbiting disc (4) arranged shaft portion (17) offset axially to which in the stator (10) arranged shaft portion (16) is formed. Spiral vacuum pump according to one of Claims 2 to 11, characterized in that the shafts (9) have a first shaft section (16) arranged in the stator (10), and in that a second shaft section (17) arranged in a first orbiting disk (4) extends axially offset from that in the stator (10) arranged shaft portion (16) is formed, and in that in a second orbiting disk (12) arranged third shaft portion (18) offset from the first two shaft portions (16, 17) is formed. Spiral vacuum pump according to one of the preceding claims, characterized in that at least one rotation preventing device (24) is provided, in particular that the rotation preventing device is formed as at least one corrugated bellows (24). Spiral vacuum pump according to one of the preceding claims, characterized in that at end faces of the at least one spiral (6, 7) a seal (47, 49) is provided, in particular that the seal (47, 49) is formed of plastic, preferably that the Seal (47, 49) is designed as a trackable seal, particularly preferred that the seal (49) is formed as a gas-pressure trackable seal (49). Spiral vacuum pump according to one of claims 19 to 23, characterized in that on a counter-surface (8, 44) to the seal (47, 49) a hardcoat coating or other hard coating is arranged.

Images