EP3034882A3 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP3034882A3
EP3034882A3 EP15195879.0A EP15195879A EP3034882A3 EP 3034882 A3 EP3034882 A3 EP 3034882A3 EP 15195879 A EP15195879 A EP 15195879A EP 3034882 A3 EP3034882 A3 EP 3034882A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
pumping
gap
during operation
fulfilled during
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP15195879.0A
Other languages
German (de)
English (en)
Other versions
EP3034882A2 (fr
Inventor
Bernd Hofmann
Jan Hofmann
Mirko Mekota
Johannes Schnarr
Michael Schweighöfer
Tobias Stoll
Peter Vorwerk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP3034882A2 publication Critical patent/EP3034882A2/fr
Publication of EP3034882A3 publication Critical patent/EP3034882A3/fr
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP15195879.0A 2014-12-17 2015-11-23 Pompe à vide Pending EP3034882A3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014118881.0A DE102014118881A1 (de) 2014-12-17 2014-12-17 Vakuumpumpe

Publications (2)

Publication Number Publication Date
EP3034882A2 EP3034882A2 (fr) 2016-06-22
EP3034882A3 true EP3034882A3 (fr) 2016-10-26

Family

ID=54697495

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15195879.0A Pending EP3034882A3 (fr) 2014-12-17 2015-11-23 Pompe à vide

Country Status (3)

Country Link
EP (1) EP3034882A3 (fr)
JP (1) JP2016114061A (fr)
DE (1) DE102014118881A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3473858B1 (fr) * 2017-10-17 2020-07-01 Pfeiffer Vacuum Gmbh Procédé d'optimisation de durée de vie des paliers à rouleaux d'une pompe à vide
GB2579028A (en) * 2018-11-14 2020-06-10 Edwards Ltd Molecular drag stage

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3627642A1 (de) * 1985-08-14 1987-02-26 Rikagaku Kenkyusho Vakuumpumpe mit gewindekanal
DE10020946A1 (de) * 2000-04-28 2001-11-15 Siemens Ag Läufer für eine Induktionsmaschine mit hohen Drehzahlen
US20010041134A1 (en) * 2000-01-07 2001-11-15 Matsumi Iwane Rotor for transferring air
WO2006111159A1 (fr) * 2005-04-22 2006-10-26 Temic Automotive Electric Motors Gmbh Paquet de toles stator/rotor
DE102011114280A1 (de) * 2011-09-26 2013-03-28 Daimler Ag Stator einer elektrischen Maschine
EP2631488A2 (fr) * 2012-02-23 2013-08-28 Pfeiffer Vacuum Gmbh Pompe à vide
DE202013002969U1 (de) * 2013-03-27 2014-06-30 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
EP2829734A1 (fr) * 2013-07-26 2015-01-28 Pfeiffer Vacuum Gmbh Pompe à vide
EP2995820A1 (fr) * 2014-09-11 2016-03-16 Pfeiffer Vacuum Gmbh Pompe à vide avec rotor de moteur soudé et avec des aimants agencés en forme de v

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2617290B2 (ja) * 1984-05-29 1997-06-04 株式会社日立製作所 真空ポンプ
JPS6355396A (ja) * 1986-08-21 1988-03-09 Hitachi Ltd タ−ボ真空ポンプ
JP3427950B2 (ja) * 1994-11-17 2003-07-22 株式会社島津製作所 モレキュラドラッグポンプ
JP2002168192A (ja) * 2000-12-01 2002-06-14 Seiko Instruments Inc 真空ポンプ
DE10337939A1 (de) * 2003-08-18 2005-03-24 Vorwerk & Co. Interholding Gmbh Reluktanzmotor

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3627642A1 (de) * 1985-08-14 1987-02-26 Rikagaku Kenkyusho Vakuumpumpe mit gewindekanal
US20010041134A1 (en) * 2000-01-07 2001-11-15 Matsumi Iwane Rotor for transferring air
DE10020946A1 (de) * 2000-04-28 2001-11-15 Siemens Ag Läufer für eine Induktionsmaschine mit hohen Drehzahlen
WO2006111159A1 (fr) * 2005-04-22 2006-10-26 Temic Automotive Electric Motors Gmbh Paquet de toles stator/rotor
DE102011114280A1 (de) * 2011-09-26 2013-03-28 Daimler Ag Stator einer elektrischen Maschine
EP2631488A2 (fr) * 2012-02-23 2013-08-28 Pfeiffer Vacuum Gmbh Pompe à vide
DE202013002969U1 (de) * 2013-03-27 2014-06-30 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
EP2829734A1 (fr) * 2013-07-26 2015-01-28 Pfeiffer Vacuum Gmbh Pompe à vide
EP2995820A1 (fr) * 2014-09-11 2016-03-16 Pfeiffer Vacuum Gmbh Pompe à vide avec rotor de moteur soudé et avec des aimants agencés en forme de v

Also Published As

Publication number Publication date
JP2016114061A (ja) 2016-06-23
DE102014118881A1 (de) 2016-06-23
EP3034882A2 (fr) 2016-06-22

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