EP3017198B1 - Pompe à vide primaire sèche - Google Patents

Pompe à vide primaire sèche Download PDF

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Publication number
EP3017198B1
EP3017198B1 EP14736755.1A EP14736755A EP3017198B1 EP 3017198 B1 EP3017198 B1 EP 3017198B1 EP 14736755 A EP14736755 A EP 14736755A EP 3017198 B1 EP3017198 B1 EP 3017198B1
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EP
European Patent Office
Prior art keywords
passage
vacuum pump
valve
venturi
injection device
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Application number
EP14736755.1A
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German (de)
English (en)
French (fr)
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EP3017198A1 (fr
Inventor
Thierry Neel
Serge Brandolin
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Pfeiffer Vacuum SAS
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Pfeiffer Vacuum SAS
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Publication of EP3017198A1 publication Critical patent/EP3017198A1/fr
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles
    • F04F5/461—Adjustable nozzles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/48—Control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type

Definitions

  • the present invention relates to a dry primary vacuum pump for reducing the consumption of electrical energy. It relates in particular to the rotary lobe dry type vacuum pumps, such as a "Roots” type lobe pump, a "Claw” type nozzle pump, and a “Scroll” type scroll pump. , a screw pump, a piston pump, etc., in single or multi-stage version.
  • the electrical power required for gas compression is one of the important parameters in the energy consumption of dry primary vacuum pumps. This compression power is mainly used in the last two stages of compression in the case of a multi-stage pump of "Roots" or "Claw” type, and in the last steps in the case of a screw pump.
  • a known solution is to lower the pressure in the last compression stage using an ejector.
  • the ejector works from the principle of the Venturi effect. It makes it possible to obtain a pressure drop from the injection of a compressed fluid, such as a gas such as nitrogen or compressed air, for example, at a narrowing of the passage of the gases. A depression is thus created without direct consumption of electrical energy.
  • the arrangement of the ejector in the discharge pipe decreases the flow conductance of the pumped gases no longer able to absorb the large gas flows occurring for example during an evidrage enclosure.
  • a known solution of documents FR 2 952 683 A1 or EP 1 609 990 A1 consists in mounting the ejector in a parallel circuit, arranged in parallel with the non-return valve.
  • the gas borrows the branch circuit in which is mounted the ejector.
  • the injection of engine gas into the shrinkage of the bypass circuit produces a lowering of the pressure at the discharge and thus a decrease in the power consumed.
  • the check valve opens, bypassing the parallel circuit.
  • One of the aims of the present invention is to propose a simplified vacuum pump, which is more robust, more compact, less expensive to manufacture and whose maintenance is easier than that of the state of the art.
  • the through-passage valve thus forms both an ejector in the closed position to generate the Venturi effect when a motor gas is injected upstream of the venturi passage and an automatic discharge circuit in the open position to bypass the venturi effect. passage to Venturi effect in case of excess gas.
  • the absolute pressure obtained at the outlet of the last pumping stage is then lowered to a pressure of the order of 100 to 400 mbar instead of 1000mbar.
  • the decrease in electrical consumption also causes a drop in the temperature of the pump body so that the amount of calories to be evacuated is reduced and can lead to a reduction in the consumption of cooling water.
  • the lowering of the pressure at the outlet of the last pumping stage makes it possible to move the pumping conditions away from the flammability and explosion limits and to reduce the partial pressures of condensable and / or corrosive species. which significantly reduces the risk of corrosion on vacuum pump materials and the risk of clogging by condensate.
  • the pressure drop at the outlet of the last pumping stage reduces the noise level of the vacuum pump.
  • the depression attenuates the intensity of the low frequency pulsations of the last pumping stage.
  • the gases have an automatic discharge circuit created by the displacement in the open position of the thru-flow valve in the event of a strong pumping flow, so that the shrinkage formed by the venturi passage does not constitute an obstacle to pumping large gas flows. It is therefore not necessary to machine a parallel branch circuit in the pump body and / or to arrange an external bypass circuit with controlled valve, so that the vacuum pump is simplified, more compact, but also more robust and easier to maintain.
  • the Venturi effect passage has a shape of a nozzle having a narrowing.
  • the entry of the nozzle has a funnel shape whose neck is extended by a cylindrical central portion and ends with a flared shape.
  • the nozzle then has a shape optimized to generate a large pressure drop.
  • the through-passage valve head has a guide shape configured to cooperate with a complementary guide shape of the mouthpiece.
  • the complementary guide shapes are for example frustoconical or partially spherical.
  • the complementary guiding shapes make it possible to ensure the tightness as well as the correct positioning of the thru-flow valve at each return to the closed position, which makes it possible to ensure optimal operation in ejector according to the Venturi effect.
  • the through-flow valve is positioned at the inlet of a muffler of the vacuum pump.
  • the engine gas injection device is for example partially integrated into the pump body of the vacuum pump.
  • valve assembly and ejector is thus arranged in the heart of the vacuum pump and can therefore take advantage of the high temperature of the pump body in operation to be reheated. Consequently, by heating the through-flow valve, in particular by conduction with the heated pump body, the risks of clogging that may occur in the Venturi-effect passage, induced by the cooling of the condensable gases caused by the expansion of the gas into the atmosphere, are reduced. passage to Venturi effect.
  • the through-passage valve is arranged at one end of the discharge pipe, the end being connected to a pumped gas treatment device.
  • the discharge pipe is then maintained under low pressure from the gas outlet of the last pumping stage to the inlet of the gas treatment device, which may represent several meters of pipes.
  • the fact that the delivery line is maintained under low pressure makes it possible to preserve the gaseous condensable gaseous species, which can make it possible to avoid heating the discharge line.
  • the engine gas injection device may comprise a feed line, one end of which carries an injection nozzle, the thrust axis of the engine gas and the axis of the Venturi effect passage being aligned.
  • the vacuum pump may further include a resilient biasing member for biasing said through valve into the closed position.
  • the elastic return element is for example interposed between a head of the through-flow valve and an annular shoulder of the discharge pipe, downstream of the mouth in the flow direction of the gas pumping.
  • the through-passage valve is arranged vertically above the mouth.
  • the thru-passage valve can then be biased in the closed position against the gravity mouth.
  • the Venturi effect passage is formed in said through-flow valve.
  • the engine gas injection device is movable.
  • the engine gas injection device is then secured to the through-flow valve with a fixed predetermined distance between the output of the engine gas injection device and the inlet of the venturi passage, at least one inlet port of the pumped gas being formed between the output of the engine gas injection device and the entrance of the venturi passage.
  • the distance between the output of the engine gas injection device and the entrance of the venturi passage is controlled. It is then ensured to maintain proper centering and positioning of the through-flow valve with the injection of engine gas to achieve the Venturi effect.
  • the vacuum pump may further comprise a resilient return member interposed between the vacuum pump body and the engine gas injection device for biasing the through-flow valve in the open position. This improves the guiding and positioning of the engine gas injection device.
  • the through-passage valve has for example a rod extending the head, the rod having an outer shape tapering radially progressively at least partially from the head.
  • This tapering shape makes it possible to attenuate the turbulence of the gas stream possibly generated in its vicinity, and to progressively stabilize the flow of gases around its profile and thus to minimize any oscillations of the through-flow valve. It is further adapted to, if necessary, be inserted at the inlet of the vacuum pump muffler without blocking the passage but leaving an annular opening compatible with a strong flow in the open position of the through-flow valve.
  • the Venturi effect passage is formed in a protuberance integral with the engine gas injection device, with a fixed predetermined distance between the output of the engine gas injection device and the inlet of the passageway. Venturi effect, at least one inlet of the pumped gases being formed between the output of the engine gas injection device and the entrance of the venturi passage.
  • the protrusion cooperates with an additional seat formed in an opening of the through-flow valve.
  • the distance between the output of the engine gas injection device and the entrance of the venturi passage is controlled. It is then ensured to maintain proper centering and positioning of the through-flow valve with the injection of engine gas to achieve the Venturi effect.
  • the protuberance and the additional seat in the opening of the thru-flow valve may have complementary guide shapes, such as frustoconical or partially spherical.
  • the invention relates to a dry primary vacuum pump for pumping an enclosure such as a process enclosure, intended for example for the manufacture of substrates in the semiconductor industry, LEDs, flat screens or solar panels.
  • the dry primary vacuum pump is for example "rotary lobes” such as “Roots” type lobes, or “Claw” or “Scroll” -type spiral type, or screw type, or piston type, or another similar principle, in single or multi-stage version.
  • the dry primary vacuum pump 1 is multi-stage. It comprises for example six pumping stages TA, T1, T2, T3, T4, TR, connected in series between a suction 4 and a discharge 5 of the vacuum pump 1 and in which a gas to be pumped can circulate from the suction 4 to the discharge 5, the discharge pressure 5 is generally of the order of atmospheric pressure.
  • rotating shafts extend by rotors and are driven on the side of the discharge stage TR by a motor M of the vacuum pump. 1.
  • the rotors have conjugate or complementary profiles, rotating inside the pump body 6 in the opposite direction. During rotation, the gas to be pumped is trapped in the free space between the rotors and the pump body 6, and is driven by the rotors to the next stage or to the discharge 5 after the last pump stage TR.
  • the vacuum pump 1 is called “dry” because in operation, the rotors rotate inside the pump body 6 of the vacuum pump 1 in the opposite direction, without any mechanical contact between the rotors and the pump body 6, which allows the total absence of oil in the pumping stages TA, T1, T2, T3, T4, TR, in contrast to vacuum pumps called lubricated vane.
  • Each pumping stage TA, T1, T2, T3, T4, TR comprises an input and a respective output.
  • the successive pumping stages TA, T1, T2, T3, T4, TR are connected in series one after the other by respective output pipes, also called inter-stage pipes, connecting the output of the pumping stage. preceding the entrance of the next floor (see arrows in solid lines on the figure 1 ).
  • the first pump stage TA whose input communicates with the suction 4 of the vacuum pump 1 is also called the “suction stage”.
  • the last pump stage TR whose output 8 communicates with the discharge 5 of the vacuum pump 1 is also called “discharge stage", the discharge pressure being generally of the order of atmospheric pressure.
  • the vacuum pump 1 further comprises a discharge pipe 9, connecting the outlet 8 of the last pump stage TR to the discharge 5.
  • the vacuum pump 1 also comprises a through-valve 10 (or "check-valve with through passage” in English) arranged in the discharge pipe 9, a Venturi effect passage 11 passing through the through-flow valve 10.
  • the Venturi effect passage 11 is formed in the through-passage valve 10.
  • the passage Venturi effect 11 allows the passage of gas between the outlet 8 of the last pump stage TR and the discharge 5. It is arranged so that the axis of the Venturi effect passage 11 and the axis of the discharge pipe 9 are aligned, the venturi passageway and the discharge pipe 9 are coaxial.
  • the through-passage valve 10 is for example arranged at the inlet of the muffler 14 of the vacuum pump 1, the muffler 14 being arranged upstream of the discharge 5.
  • This thru-flow valve 10 is axially movable between a closed position ( figure 1 ) in which it is in contact with a seat of a mouth 12 of the discharge pipe 9 and forces the passage of gases through the passage Venturi effect 11, and an open position ( figure 2 ) in which it is disposed away from the mouth 12 of the discharge pipe 9.
  • the Venturi effect passage 11 is a through duct forming a narrowing for the passage of gases to achieve "ejector" operation when a motor gas is injected at the inlet 11a.
  • the ejector thus obtained operates as a small auxiliary vacuum pump, comprising no moving element and in which the lowering of pressure is obtained by converting the kinetic energy of an auxiliary fluid, the engine gas.
  • the vacuum pump 1 further comprises a motor gas injection device 13 configured to inject the engine gas, such as compressed nitrogen or dry compressed air (or “CDA” for "Compressed Dry Air” in English) or another compressed neutral gas, at the inlet 11a of the Venturi effect passage 11.
  • the absolute compression pressure of the engine gas is at least of the order of 3 bars.
  • the engine gas is injected at least when the thru-flow valve 10 is in the closed position.
  • the engine gas injection device 13 comprises a feed line 23, one end of which carries an injection nozzle 22.
  • the injection nozzle 22 is formed by a narrowed section 26 of the feed line 23.
  • the diameter of the narrowed section 26 is for example of the order of 1 millimeter.
  • the narrowed section 26 provides the desired acceleration of the engine gas to achieve the Venturi effect.
  • the injection nozzle is formed by a nozzle for example injector type of hard material, such as a ruby injector pre-drilled an injection port.
  • the engine gas injection device 13 is partly integrated in a housing of the pump body 6.
  • the injection nozzle 22 thus opens at the outlet 8 of the last discharge stage TR.
  • a seal 24 is further interposed between the engine gas injection device 13 and the housing of the pump body 6, to ensure the tightness of the latter ( figure 4 ).
  • the Venturi effect passage 11 has a nozzle shape with a narrowing.
  • the Venturi effect passage 11 has a "supersonic" nozzle shape: the inlet 11a of the Venturi effect passage 11, that is to say the side of the Venturi effect passage 11 communicating with the outlet 8 of the pumping stage TR, has a funnel shape whose neck is extended by the narrowed section having the shape of a cylindrical central portion 11b.
  • the cylindrical central portion 11b ends downstream with a flared shape 11c ( figures 4 and 7 ).
  • the diameter of the cylindrical central portion of the passage Venturi effect 11 is for example between 2 and 10 millimeters, such as of the order of 3 millimeters for a discharge pipe 9 for example of the order of 25 millimeters in diameter.
  • the total length of the Venturi effect passage 11 is for example of the order of 20 to 30 millimeters with the length of the central cylindrical portion 11b of the Venturi effect passage 11, for example of the order of 14 to 16 millimeters.
  • This form of passage Venturi effect 11 is called supersonic with a first convergent section followed by a divergent section. It makes it possible to obtain supersonic gas velocities as well as to optimize the flow of the gases pumped into the Venturi effect passage 11 by limiting the pressure drops but by presenting a narrowing adapted to generate the "Venturi effect".
  • the output of the engine gas injection device 13 is oriented facing the inlet 11a of the Venturi effect passage 11 for injecting a motor gas in a main direction aligned in the axis of the Venturi passage 11.
  • the distance d between the output of the engine gas injection device 13 and the inlet 11a of the Venturi effect passage 11 in the closed position of the thru-flow valve is small, for example between 0.5 and 2 millimeters.
  • the diameter of the output of the engine gas injection device 13 is less than or equal to the diameter of the inlet 11a of the Venturi effect passage 11.
  • the output of the engine gas injection device 13 is received in the inlet 11a of the Venturi effect passage 11, at the inlet of the cylindrical central portion 11b.
  • the outlet 8 of the last pump stage TR and the axis of the injection nozzle 22 make an angle ⁇ , for example between 0 and 90 °, to facilitate integration into the vacuum pump 1 ( figure 4 ).
  • the via valve 10 is further configured to be in the open position when the outlet pressure of the last pump stage TR is greater than a predetermined pressure threshold. More specifically, the through-flow valve 10 is configured to be in the open position when the pressure difference ⁇ P between the outlet pressure 8 of the last pump stage TR and the discharge pressure 5 is greater than a predetermined threshold, such as only between 150 and 200mbar.
  • the through-passage valve 10 is biased in the closed position against the mouth 12 by an elastic return element, such as a helical spring 18.
  • an elastic return element such as a helical spring 18.
  • the thru-flow valve is arranged vertically above the mouth.
  • the thru-passage valve can then be biased in the closed position against the gravity mouth.
  • the through-flow valve 10 is pushed upward, disengaging the mouth 12 for the passage of the gases.
  • the through-passage valve 10 has a disk-shaped head 20 and a rod 21 extending the head 20, the rod 21 having a shape tapering radially progressively from the head 20.
  • the head 20 has a form of disc acting as a shutter: when the thru-flow valve 10 is in the closed position, the head 20 bears against the seat formed by the mouth 12 of the Venturi effect passage 11.
  • the rod 21 of the thru-flow valve 10 has a length sufficient to accommodate at least part of the Venturi effect passage 11 with a length optimized for ejector operation.
  • the spring 18 is interposed between the head 20 of the via valve 10 and an annular shoulder 19 of the discharge pipe 9, the annular shoulder 19 being arranged downstream of the mouth 12, in the direction of flow of the pump. gases.
  • the annular shoulder 19 also forms, for example, a device for holding the silencer 14 ( figure 4 ).
  • the thru-flow valve 10 is thus coaxially mounted in the spring 18, the rod 21 extending inside the latter.
  • the through-flow valve head 10 has a guide shape 20a configured to cooperate with a guide shape. complementary 12a of the mouth 12 forming the seat of the head 20 of the thru-flow valve 10.
  • the guiding shapes 20a of the part of the head 20 in contact with the seat 12 and the complementary guiding shape 12a of the seat 12 have complementary frustoconical shapes ( figure 4 ).
  • these complementary guide shapes are partially spherical.
  • the complementary guiding shapes 12a, 20a make it possible to self-center the through-flow valve 10 in the axis of the discharge pipe 9 and facing the injection nozzle 22, which makes it possible to ensure optimum operation by ejector according to the Venturi effect.
  • the rod 21 has for example an outer shape tapering radially 21a gradually at least partially from the head 20 to reduce turbulence of the gas flow possibly generated in its vicinity.
  • This outer shape tapering 21a also allows the gas flow to be progressively stabilized around its profile and thus to minimize any oscillations of the through-flow valve 10.
  • the end 21b of the rod 21 has for example a cylindrical shape whose diameter is adapted to be inserted at the inlet of the muffler 14 of the vacuum pump 1 without blocking the passage but leaving an annular opening for the gas compatible with a strong flow in the open position of the thru-way valve 10.
  • the outside diameter of the cylindrical end 21b of the rod 21 is of the order of 8 millimeters.
  • the outside diameter of the end 21b is thus of the same order of magnitude as the diameter of the flared end 11c of the Venturi effect passage 11.
  • the rod 21 has a tapered outer shape 21a, for example substantially frustoconical from the head 20 to a central portion 11b of the Venturi effect passage 11, extended by a cylindrical portion at the end 21b.
  • the engine gas injection device 13 may also comprise a heat exchanger 25 ( figure 1 ) in contact with the pump body 6 of the vacuum pump 1 so as to heat the motor gas before it arrives in the supply line 23. The calories released by the pump body 6 of the vacuum pump are thus used. to heat the engine gas.
  • the dry primary vacuum pump 1 may also include heating blankets (not shown) to promote the heating of the engine gas.
  • Through-flow valve 10 is for example made of aluminum, stainless steel, Ni-resist cast iron or coated with coatings such as Ni-P, Ni-B, SiC, BN, Al 2 O 3 , Si 3 N type. 3 , YtO 2 , ZrO 2 , particularly resistant to corrosion and for some, also to abrasion.
  • the flow of gas to be pumped is for example less than 100slm.
  • the outlet pressure 8 of the vacuum pump is lower than the atmospheric pressure of the discharge 5, the through-flow valve 10 is then in the closed position ( figure 1 ).
  • the head 20 of the via valve 10 rests against the seat of the discharge pipe 9 formed by the mouth 12.
  • the gas to be pumped takes the passage to Venturi effect 11, through the via valve 10 (arrows solid line).
  • a motor gas is injected at the inlet 11a of the Venturi effect passage 11 (dashed arrows)
  • a vacuum is generated, causing a pressure drop by the Venturi effect at the outlet 8 of the vacuum pump 1.
  • the passage the Venturi effect 11 thus forms an ejector with the engine gas injection device 13.
  • the engine gas can be injected continuously.
  • a control unit for managing the injection of engine gas depending on the level of the electrical power consumed by the primary vacuum pump 1 or the operating state of the process enclosure: in production, in roughing or waiting ("stand-by" in English).
  • the absolute pressure obtained is, for example, the order of 100 to 400mbar. This depression generates a decrease in the electrical power consumed by the vacuum pump 1 of the order of 30 to 70%.
  • the pressure difference ⁇ P between the pressure of the outlet 8 of the last pump stage TR and the discharge pressure 5 becomes greater than the predetermined pressure threshold.
  • This gaseous surplus, greater than 100slm, such as of the order of 500 to 600 slm, occurs for example in case of roughing of the enclosure connected to the vacuum pump 1 or such as when starting the vacuum pump 1 , that is, for pumping gases from atmospheric pressure.
  • the through-flow valve 10 forms both an ejector in the closed position to generate the Venturi effect when a motor gas injected upstream of the Venturi effect passage 11 and a discharge circuit in the open position to bypass the venturi effect. passage to Venturi effect.
  • the gases thus have an automatic discharge circuit created by the displacement in the open position of the thru-flow valve in the event of a strong pumping flow, so that the constriction formed by the Venturi effect passage 11 does not constitute a obstacle to pumping.
  • Absolute pressure is obtained at the outlet of the last pumping stage of the order of 100 to 400 mbar, generating a reduction in the consumption of the electrical power without affecting the pumping performance (gaseous flow as a function of pressure).
  • the decrease in the consumption of electrical power also causes a drop in temperature of the pump body 6 so that the amount of calories to be evacuated is reduced and can lead to a reduction in cooling water consumption.
  • the lowering of the pressure at the outlet of the last pump stage TR makes it possible to move the pumping conditions away from the flammability and explosion limits and to reduce the partial pressures of condensable and / or corrosive species, This significantly reduces the risk of corrosion on vacuum pump materials and the risk of clogging by condensate.
  • the pressure drop at the outlet of the last pump stage TR of the vacuum pump 1 also reduces the noise level of the vacuum pump. Indeed, the depression attenuates the intensity of the low frequency pulses of the last pump stage TR.
  • the assembly forming a valve and ejector is thus arranged in the heart of the vacuum pump 1 and can therefore take advantage of the high temperature of the pump body 6 in operation to be heated. Consequently, by heating the through-flow valve 10, in particular by conduction with the heated pump body 6, the risks of clogging that may occur in the Venturi effect passage 11, induced by the cooling of the condensable gases caused by the expansion of the pressure, are reduced. gas in the Venturi passage 11.
  • the discharge pipe 9 extends to an end connected to a device for treating gas pumped (or "scrubber” or “gas abatment in English).
  • the gas treatment devices are generally connected to the discharge of the vacuum pumps, for the depollution of the pumped gases when they have a toxicity.
  • the thru-flow valve 10 is arranged in this end of the discharge pipe 9, near the inlet of the pumped gas treatment device.
  • the engine gas injection device 13 is partly housed in the discharge pipe 9, near the through-flow valve 10 to ensure the ejector function and depression.
  • the injection nozzle 22 thus opens at the outlet 8 of the last discharge stage TR, after the muffler of the vacuum pump 1.
  • the discharge pipe 9 is then kept under low pressure from the outlet 8 of the gases of the vacuum pump 1 to the inlet of the gas treatment device, this which can have several meters of pipes.
  • the fact that the discharge pipe 9 is kept under low pressure makes it possible to preserve the gaseous condensable gaseous species, which may in certain cases make it possible to avoid heating the discharge pipe 9.
  • the engine gas injection device 13 is integral with the through-passage valve 10 in which the Venturi effect passage 11 is formed. At least one inlet 28 for the pumped gases is provided between the outlet of the injection device. of the engine gas 13 and the inlet 11a of the Venturi effect passage 11.
  • the engine gas injection device 13 is for example fixed to the through-passage valve 10 via a connection 27 having at least one inlet port 28 of the pumped gases and maintaining a predetermined distance d, for example between 0.5 and 2 millimeters, between the output of the engine gas injection device 13 and the inlet 11a of the Venturi effect passage 11.
  • connection 27 is for example formed of a cylinder provided with peripheral longitudinal slots forming the inlet ports 28 for the pumped gases from the outlet 8 of the last pump stage TR.
  • a seal 24 may be interposed between the base 30 of the gas injection device 13 and a corresponding housing formed in the pump body 6.
  • a channel 31 is formed in the bottom of the housing of the pump body 6 to a supply of engine gas (not shown).
  • the housing of the pump body 6 is dimensioned so that in the open position, the base 30 of the gas injection device 13 remains centered in the housing, to facilitate the guiding of the displacement of the throttle valve assembly - engine gas injection device 13.
  • the base 30 of the gas injection device 13 and the housing have complementary guidance.
  • the channel 31 of the housing has for example a guide tube 34 around the feed line 23, configured to fit into a corresponding cavity of the base 30 of the gas injection device 13 ( figures 10b and 11b ).
  • the guide tube 34 allows the guiding and self-centering the gas injection device 13 and also, limits the exposure of the supply line 23 to the high pressure of the supply, generally of the order of 3 and 7bars.
  • the guide tube 34 makes it possible to limit the leakage of the engine gas by reducing the "sliding fit" functional clearance and therefore without the use of a seal, used in piston.
  • the through-flow valve 10 In the closed position, the through-flow valve 10 is in contact with the seat of the mouth 12 of the discharge pipe 9, which forces the passage of the pumped gases through the Venturi effect passage 11.
  • the base 30 of the engine gas injection device 13 is centered in the housing of the pump body 6.
  • the supply line 23 of the engine gas injection device 13 then communicates with the channel 31 formed in the bottom of the housing of the pump body 6.
  • the distance between the injection nozzle 22 and the Venturi effect passage 11 remains fixed, which ensures proper centering and positioning between the through-flow valve and the engine gas injection device.
  • the variant embodiments illustrated on the Figures 11a and 11b differ from Figures 10a and 10b by the arrangement of an elastic return member 29 in the housing of the vacuum pump body 6.
  • the resilient return member such as a coil spring, is interposed between the vacuum pump body 6 and the base 30 of the engine gas injection device 13. It solicits the thru-flow valve 10 in the open position. This improves the guiding and positioning of the engine gas injection device 13.
  • the thru-flow valve 15 has a disc-shaped head 20 in which an opening is formed, but does not have a rod in which the passage Venturi effect would be received.
  • the passage Venturi effect 11 is formed in a protrusion 32 integral with the engine gas injection device 13, at least one inlet 28 of the pumped gases being formed between the output of the engine gas injection device 13 and the 11a of the Venturi passage 11.
  • the protrusion 32 matches with an additional seat 33 formed in an opening of the via valve 15.
  • the protrusion 32 is for example fixed to the engine gas injection device 13 by a connection 27 such as that defined above, maintaining a predetermined distance d, for example between 0.5 and 2 millimeters, between the output of the device. injection of engine gas 13 and the inlet 11a of the Venturi effect passage 11.
  • the head 20 of the through valve 15 is in contact with the seat of the mouth 12 of the discharge pipe 9.
  • the protrusion 32 is in contact either continuously or with a minimum clearance ⁇ on the zone d support between the additional seat 33 and the protrusion 32 so that the pressure drop across the clearance ⁇ is sufficient to minimize the leakage gas flow on the support zone.
  • This minimized gaseous leakage flow allows an acceptable operation of the ejector upstream of the opening of the thru-flow valve 15, which forces the passage of the gases through the Venturi effect passage 11 formed in the protuberance 32.
  • the protrusion 32 and the additional seat 33 are complementary guide shapes, such as frustoconical shapes, as shown in FIG. figure 12 .
  • the frustoconical outer shape of the protuberance 32 tapering radially progressively reduces the turbulence of the gas flow.
  • the distance between the output of the engine gas injection device 13 and the inlet 11a of the Venturi effect passage 11 remains fixed. It is then ensured to maintain correct centering and positioning of the thru-flow valve 15 with the injection of engine gas to obtain the Venturi effect.
  • the dry vacuum pump has a lower power consumption, is therefore more energy efficient but also cooling water and have reduced risks of clogging and corrosion.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP14736755.1A 2013-07-04 2014-07-03 Pompe à vide primaire sèche Active EP3017198B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1356534A FR3008145B1 (fr) 2013-07-04 2013-07-04 Pompe a vide primaire seche
PCT/EP2014/064259 WO2015001059A1 (fr) 2013-07-04 2014-07-03 Pompe à vide primaire sèche

Publications (2)

Publication Number Publication Date
EP3017198A1 EP3017198A1 (fr) 2016-05-11
EP3017198B1 true EP3017198B1 (fr) 2017-02-01

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EP14736755.1A Active EP3017198B1 (fr) 2013-07-04 2014-07-03 Pompe à vide primaire sèche

Country Status (7)

Country Link
US (1) US10544809B2 (ko)
EP (1) EP3017198B1 (ko)
JP (1) JP6348584B2 (ko)
KR (1) KR102199323B1 (ko)
FR (1) FR3008145B1 (ko)
TW (1) TWI623688B (ko)
WO (1) WO2015001059A1 (ko)

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DE102017203877A1 (de) * 2017-03-09 2018-09-13 Polytec Plastics Germany Gmbh & Co. Kg Geschaltete Saugstrahlpumpe
US10982663B2 (en) * 2017-05-30 2021-04-20 Ulvac, Inc. Vacuum pump
KR101838660B1 (ko) * 2017-12-04 2018-03-14 (주)대명엔지니어링 진공 펌프
FR3076582B1 (fr) * 2018-01-09 2020-01-24 Pfeiffer Vacuum Pompe a vide de type seche et procede de commande d'un moteur synchrone de pompe a vide
US10914521B2 (en) * 2019-01-24 2021-02-09 Versum Materials Us, Llc System and method for drying and analytical testing of containers
CN110296109B (zh) * 2019-07-26 2023-12-15 厦门市鼎际信息科技有限公司 一种多层聚能气泵
CN111059084B (zh) * 2019-12-09 2021-11-23 行益科技(宁波)有限公司 微型集成式真空发生器与发生方法以及微型真空发生组件
CN111207119A (zh) * 2020-03-06 2020-05-29 北京首创环境科技有限公司 一种具有自适应能力的文丘里真空泵
CN114709154B (zh) * 2022-05-12 2022-08-02 拓荆科技(北京)有限公司 一种真空发生机构、真空发生组件及抽气装置

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Also Published As

Publication number Publication date
WO2015001059A1 (fr) 2015-01-08
TW201512542A (zh) 2015-04-01
US20160369820A1 (en) 2016-12-22
EP3017198A1 (fr) 2016-05-11
FR3008145A1 (fr) 2015-01-09
KR20160033134A (ko) 2016-03-25
US10544809B2 (en) 2020-01-28
JP2016523343A (ja) 2016-08-08
JP6348584B2 (ja) 2018-06-27
FR3008145B1 (fr) 2015-08-07
TWI623688B (zh) 2018-05-11
KR102199323B1 (ko) 2021-01-06

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