EP2932565B1 - Contact element and method for producing same - Google Patents

Contact element and method for producing same Download PDF

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Publication number
EP2932565B1
EP2932565B1 EP13783859.5A EP13783859A EP2932565B1 EP 2932565 B1 EP2932565 B1 EP 2932565B1 EP 13783859 A EP13783859 A EP 13783859A EP 2932565 B1 EP2932565 B1 EP 2932565B1
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EP
European Patent Office
Prior art keywords
contact
contact element
spring
elements
spring section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
EP13783859.5A
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German (de)
French (fr)
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EP2932565A1 (en
Inventor
Bernd Rosenberger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosenberger Hochfrequenztechnik GmbH and Co KG
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Rosenberger Hochfrequenztechnik GmbH and Co KG
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Publication of EP2932565A1 publication Critical patent/EP2932565A1/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02Contact members
    • H01R13/22Contacts for co-operating by abutting
    • H01R13/24Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2407Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
    • H01R13/2428Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means using meander springs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R43/00Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
    • H01R43/16Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for manufacturing contact members, e.g. by punching and by bending

Definitions

  • the invention relates to a contact element having contact points for the electrically conductive connection of contact areas of spaced elements, e.g. Printed circuit boards.
  • the invention further relates to a method for producing such a contact element and to a contact device comprising a plurality of such contact elements.
  • Generic contact elements are used for example for the formation of so-called board-to-board (B2B) connector, with which two spaced-apart printed circuit boards are electrically connected.
  • B2B board-to-board
  • the contact elements are intended to ensure a loss-free transmission of the high-frequency signals in a defined tolerance range with respect to the parallelism, the distance and a lateral offset of the two circuit boards or its contact areas. Other requirements are cost-effective production and easy installation.
  • the axial and radial dimensions of the contact elements should be as small as possible, as a result of the further progressing miniaturization of the printed circuit boards or the printed conductors applied thereto, the number of side by side in a limited space to be arranged contact elements steadily increases.
  • spring contact pins in single-conductor and / or multiple-conductor construction.
  • Such spring contact pins include a sleeve and a partially guided within the sleeve head and a coil spring which is supported between the head and the sleeve.
  • Required for the coil spring properties with respect to spring force and block length require relatively large spring lengths, which have a correspondingly detrimental effect on the axial height of the spring contact pins.
  • an inner conductor which is designed in the form of a spring contact pin, serves as a signal conductor, while a peripheral conductor surrounding the inner conductor has the function of a return conductor and a shield for the inner conductor.
  • the outer conductor comprises a sleeve-shaped base body, which is slotted multiple times in the longitudinal direction. The non-slotted end of the base body forms the front side of a contact point for contacting a contact region of the circuit boards.
  • a sleeve of the outer conductor is displaceably guided, which forms at one end of the end face a contact point for contacting a contact region of the other printed circuit board.
  • a prestressed spring is supported between the base body and the sleeve.
  • Bias of the respective springs are among others Bias of the respective springs displaced, whereby despite possible tolerances in the distance of the contact areas of the circuit boards from each other a secure contact pressure can be provided.
  • the slit of the body this also has a certain flexibility in the lateral direction, which is to be achieved that even relatively large non-parallelism between the two contact areas can be compensated.
  • the known contact elements on relatively large dimensions, which are also due to their construction and the resulting function, not arbitrarily reduced.
  • the reduction of the diameter of male-female connections, as used, inter alia, in said SMP connectors only up to a certain limit possible because otherwise in the materials commonly used strength problems of plug and socket, especially in Mating the connector, would result.
  • the EP0184608 A2 discloses a contact element according to the preamble of claim 1.
  • the present invention seeks to provide a generic contact element, which is characterized by extremely small dimensions and thereby allows the formation of a contact device in which the largest possible number of these contact elements are housed in a given space.
  • a contact element according to independent claim 1 A method for producing such a contact element is the subject of independent claim 10.
  • a contact device comprising a plurality of such contact elements is the subject of independent claim 13.
  • Advantageous embodiments of the contact element according to the invention are the subject of the dependent claims and will become apparent from the following description of the invention ,
  • the basic idea of the invention is a miniaturization of a generic contact element by the use of alternative, for the production of such contact elements previously unused manufacturing process to achieve.
  • This basic idea was based on the finding that pure miniaturization of the known contact elements, inter alia due to the already mentioned strength problems, can not lead to success, but rather a change in the functional configuration would have to be associated with the miniaturization.
  • Another finding was then that such a functional redesign in conjunction with the desired dimensions probably can only be achieved by the contact element is formed in one piece.
  • the sought alternative manufacturing processes thus had to make it possible to produce highly complex geometries in extremely small dimensions at a reasonable cost, whereby a material would have to be processable which enables the integration of the functionalities required for generic contact elements.
  • This principle of the invention is implemented in a (three-dimensional) contact element with contact points for electrically conductive and space bridging connection of contact areas spaced elements, in particular printed circuit boards, which is formed entirely of one or more deposited materials, of which at least one is electrically conductive.
  • the "deposition" of (precipitation of) materials allows the design of extremely small yet highly complex geometries.
  • the further intended, preferred use of a metal for deposition and thus for the formation of the contact elements allows the integration of the essential, required for generic contact elements functionalities, namely the electrical conductivity and the generation of a contact pressure due to the electrical conductivity properties and the good elasticity of many metals the good contact of the contact points with the contact areas of the elements to be connected can be ensured in the miniaturized contact element.
  • plastics can also be used for a plurality of deposited metals. For this purpose, they should preferably have the required elasticity and / or be electrically conductive.
  • any suitable, known from the prior art method can be provided.
  • Particularly preferred methods for depositing and thus producing a contact element according to the invention are the so-called LiGA methods.
  • the term “ligand” is a compound from which the essential steps of this method descriptive terms “lithography”, “G alvanik” and “A bformung”.
  • the LiGA process (many variations are possible) is characterized by the ability to produce microstructures of extremely small dimensions of e.g. 0.2 ⁇ m, structural heights up to 3 mm, and aspect ratios of e.g. 50 (for detail structures as high as 500) of e.g. the materials plastic, metal or ceramic allows.
  • a contact element For producing a contact element by means of a LiGA process, provision can be made in particular to apply to a planar substrate, for example a silicon wafer or a polished disk of, for example, beryllium, copper, titanium, a photo- or X-ray-sensitive resist layer of, in particular, polymethylmethacrylate (PMMA) Negative, but preferably can be provided as a positive resist. If the substrate is not itself electrically conductive, this can be provided with a metallic seed layer. This can be done in particular by "sputter deposition" or vapor deposition. Thereafter, the resist layer is exposed and developed, whereby a negative mold of the contact element to be produced is formed.
  • a planar substrate for example a silicon wafer or a polished disk of, for example, beryllium, copper, titanium
  • PMMA polymethylmethacrylate
  • a deposition process is a material, preferably metal (or more materials or metals layer by layer) deposited on the substrate in the negative mold.
  • it can be provided to deposit the material (s) galvanically, although other deposition methods, such as PVD or CVD, are also possible.
  • the substrate, the seed layer and the deposited material remain first. This may already be the contact element, if an electrically conductive material, in particular a metal, has been deposited in at least one layer.
  • the contact element can then be detached from the substrate by, for example, etching the seed layer.
  • the finally deposited structure can also be provided to provide the finally deposited structure as a mold of an impression tool.
  • a further deposition with, in particular, a "overgrowth" (of a part) of the remaining resist layer and a subsequent removal of substrate and seed layer can be provided.
  • the contact element to be produced can then be produced by, for example, injection molding or hot stamping. This is particularly suitable for the production of the contact element or a main body of the contact element made of plastic. If the plastic is not electrically conductive, can then be provided to deposit an electrically conductive material, in particular a metal in the form of a coating
  • deposited structures with a greater thickness are required, it may be provided to use the described method for forming a mask, which in turn is then used for the targeted exposure of a thicker resist layer.
  • gold is often deposited in the mask, which is characterized by a strong absorption of X-radiation.
  • X-rays or ultraviolet (UV) light can be used to expose the resist layer, whereby the use of X-radiation tends to promise higher precision and the use of UV light reduces costs.
  • UV light ultraviolet
  • a contact element according to the invention In order to achieve the most cost-effective possible production of a contact element according to the invention by means of a method according to the invention, it can preferably be provided that a plurality of directly or indirectly contiguous contact elements are generated during the implementation of a LiGA process, which are then separated.
  • the contact element according to the invention (at least) have a spring portion which is elastically deformed when contacting the contact areas.
  • This spring portion extending from the one or more portions of the contact element by a lower spring stiffness with respect to the connection direction, i. the connecting line of the contact points, is distinguished, can serve in particular for the compensation of shape and position tolerances of the contact element and the contact areas to be connected and to ensure a defined contact pressure.
  • the spring section is arranged between two rigid support sections, which do not become relevant or not functionally deformed in the case of the forces regularly occurring during the contacting of the contact areas.
  • the support sections can in particular ensure a good (kink) stability of the contact element.
  • the spring portion may preferably be meander-shaped. Such a spring section can be easily produced by means of the method according to the invention.
  • the spring section can have a plurality of coaxially arranged, have arcuate spring tabs. Even such spring tabs can be produced according to the invention well. Particularly preferably, it can then be provided that adjacent spring tabs contact each other during the contacting of the two contact areas as a result of the deformation of the spring section. Thereby, the spring portion, if provided that this is part of the signal or current path, have a relatively low electrical resistance.
  • a latching connection can be provided, which holds the contact element in a spring portion partially deformed position.
  • the spring section can already be prestressed in an unloaded neutral position of the contact element, as a result of which it can already produce a relatively large contact pressure even with only slight further deformation during the contacting of the contact areas.
  • the sections forming the latching connection slide off one another.
  • the latching connection forming portions (this may preferably be the support portions) may thus guide the relative movement of the sections connected by the spring portion and thereby positively influence the stability of the contact element.
  • contact element In order to produce such a contact element, provision may be made for the contact element or elements to be deformed only after production and, if appropriate, after separation for latching the latching connection (s).
  • a signal or current path is formed, which bypasses the or the spring sections.
  • This embodiment is based on the idea that the spring section regularly by relatively small cross sections of the deposited, electrically conductive material and thus by a characterized by relatively high electrical resistance. A signal or current path should therefore extend without the inclusion of the spring section over the remaining sections of the contact element, which preferably have larger cross-sectional areas.
  • a contact device comprises a (preferably at least partially electrically insulating) receptacle having a plurality of through holes arranged side by side, and a plurality of contact elements according to the invention, wherein the contact elements are arranged in the through holes of the receptacle, which project beyond the receptacle with the contact points having sections.
  • the contact elements can be supported by the receptacle in the through holes in the lateral direction.
  • a first embodiment of a contact element 7 according to the invention is shown.
  • the one-piece, formed from an electrically conductive metal contact element 7 has been prepared according to the invention by means of a LiGA process whose basic process steps in the FIGS. 23 to 26 are shown by way of example.
  • a resist layer 2 of PMMA arranged on a substrate 1 is irradiated through a mask with synchrotron radiation 5.
  • the mask has a membrane 3 (for example of titanium) which is largely permeable to the synchrotron radiation and on which an absorber structure 4 made of a material which absorbs the synchrotron radiation (eg gold) is applied.
  • an absorber structure 4 made of a material which absorbs the synchrotron radiation (eg gold) is applied.
  • the resulting on the substrate 1 free spaces are then filled by electrodeposition of a metal 6 (see. Fig. 25 ).
  • a metal 6 see. Fig. 25 .
  • the desired structure of the deposited metal 6 is obtained.
  • the metal structure has the shape of one or more contact elements 7, which are connected to defined connection points, as shown in FIG Fig. 12 is shown by way of example for an embodiment of a contact element 7 according to the invention.
  • Connected contact elements 7 can be separated by a separation at joints 8, for example by means of a laser.
  • contact element 7 comprises two support sections 8, each forming a contact point 9, which are formed for contacting a contact region of an element (not shown).
  • the contact areas of the elements are thus to be connected in an electrically conductive manner in order in particular to transmit high-frequency signals.
  • the contact point 9 of the one, in the Fig. 1 and 2 Supporting section 8 shown above comprises a contact surface arranged obliquely with respect to a longitudinal axis 10 of the contact element 7 and a tip extending from this contact surface at the edge. The tip serves to penetrate a possibly existing oxide layer on the contact region to be contacted and if necessary to remove it as a result of a relative movement to the contact region. This should ensure a good contact with the lying below the oxide layer metal of the contact area.
  • the two relatively rigid support sections 8 are connected to one another via a meandering (main) spring section 11.
  • a displacement of the support elements 8 relative to each other with respect to the longitudinal axis 10 of the contact element leads to a deformation and bias of the (main) spring portion eleventh
  • Support section 8 shown below has at its lower end two more, parallel to each other and also meandering extending spring portions 12. These are connected at their one end in each case with the lower end of the support section 8 and with the other end in each case with the transverse part of a T-shaped piston 13.
  • the spring sections 12 facing away, slightly curved outer surface of the cross member forms the one contact point 9 of the contact element 7.
  • the two support sections 8 further each form a latching lug 14, which together form a latching connection, which limits a relative displacement of the support sections due to the then biased to train (main) spring section 11 after snapping.
  • the contact element 7 is still shown with released latching connection, as it is produced during the production by means of the method according to the invention.
  • the lower support portion 8 further includes a clamping portion 15 which extends slightly inclined relative to the longitudinal axis 10 of the contact element 7. As a result of this inclined course, the free end of the clamping portion 15 is pressed by the upper support portion 8 in its relative movement to the lower support portion 8 to the outside and thus elastically deflected.
  • This serves to fix the contact element 7 in a passage opening of a support plate 16 frictionally, as shown in the Fig. 7 is shown.
  • the non-positive fixation is intended in particular against a pressing out of the contact element 7 down Secure from the passage opening, wherein due to the configuration of the clamping portion 15 of the laterally directed pressure is proportional to the application of force from above to the contact element 7. This allows a secure non-positive fixation even at high forces (from above, with the corresponding counter-forces from below) can be achieved while the contact element 7 can be removed after the discharge of the upper support section 8 without significant effort from the through hole.
  • fixation of the contact element in the passage opening at a load upward is achieved form-fitting by striking a shoulder 16 of the lower support section 8 at a complementary paragraph 17 in the passage opening.
  • a contact element 7 can be made, with respect to the in the Fig. 2 to 7 Dimensions shown have the following dimensions: a: 5.61 mm; b: 0.424 mm; c: 0.008 mm; d: 0.012 mm; e: 0.012 mm; f: 0.018 mm; g: 0.013 mm; h: 0.028 mm; i: 0.042 mm; j: 0.015 mm; k: 0.01 mm; l: 0.01 mm; m: 0.018 mm; n: 0.01 mm; o: 0.018 mm; p: 0.12 mm (diameter); q: 5.02; r: 5.46 mm; s: 5.11 mm; t: 0.42 mm.
  • the (constant) thickness of this contact element 7 is 0.15 mm.
  • a section of a contact device according to the invention is shown.
  • This comprises a receptacle 18 with a plurality of through holes arranged in parallel, in each of which a contact element is arranged and fixed in the manner described.
  • a contact element 7 is arranged in only two of the three through holes.
  • a contact element 7 is shown in its held by the latching connection neutral position and the other with almost maximum stroke. This is intended to illustrate the tolerance-compensating function of the (main) spring section 11 of the contact elements 7.
  • a first exemplary arrangement is shown in which a total of nine contact elements 7 in a square arrangement with diagonal orientation of the individual contact elements 7 disclosed. It can be provided via the central contact element 7 (radio frequency) to transmit signals, while the others are connected to ground and serve as a counter-pole. This results in a shielded arrangement of the signal contact element 7, which corresponds functionally to the inner conductor of a conventional Koaxial giftedelements and is characterized at the same time by extremely small dimensions.
  • the in the Fig. 8 The arrangement shown may have the following dimensions according to the dimensions there: a: 0.4 mm; b: 0.566; c: 0.15 mm; d: 0.24 mm.
  • the signal and current path between the two contact points 9 of the contact element 7 is primarily formed by the two support sections 8 and connected to the lower support section 8 piston 13, which faces the spring sections 11, 12 by a larger cross-sectional area and thus a lower electrical resistance distinguished.
  • FIGS. 9 and 10 show a second embodiment of a contact element according to the invention 7.
  • This comprises a relatively stiff support section 8 and two spring sections 11.
  • the spring sections 11 each comprise three arcuate spring tabs 19, of which the respective outer is angled at its free end. In the region of the bend, the outer spring tabs 19 form on the outside each a contact point 9.
  • the free end of the bent portion also forms in each case a detent 14, which in conjunction with the locking lug 14th one of two locking arms 20 of the support section 8 forms a latching connection.
  • the support portion 8 forms on one side of a contact surface 21, via which the contact element 7 is supported in a through hole of a receptacle 18.
  • On the opposite side of the support portion 8 also forms a spring tab 22 which prints in the passage opening under bias against the adjacent opening wall and thereby increases the friction between the contact surface 21 and the opening wall. The contact element 7 is thereby frictionally held in the passage opening (see. Fig. 10 ).
  • the Fig. 9 shows the contact element in the mold, as it is produced in a method according to the invention.
  • neither the locking connections are engaged, nor contact the three spring tabs 19 of the two spring sections 11 each other.
  • Such contact and the engagement of the latching connections is effected by the exertion of compressive forces on the two contact points 9 and a deformation of the spring sections 11 effected thereby.
  • Contact element 7 shown for example, according to the dimensions there have the following dimensions: a: 1.3 mm; b: 1.0 mm; c: 0.39 mm; d: 0.72 mm.
  • the (constant) thickness of the contact element 7 can be 0.15 mm.
  • the Fig. 11 shows a possible arrangement a plurality of in the FIGS. 9 and 10 Shown is a parallel arrangement in a total of five rows. In this case, an arrangement for a symmetrical signal transmission (100 ⁇ impedance) is selected in the top row.
  • the contact elements 7 are provided for the signal transmission in pairs, with each connected to ground on each side of each pair of contact element 7.
  • a single-ended signal transmission 50 ⁇ impedance
  • the electrical insulation of all signal contact elements 7 is achieved by means of dielectric receiving elements 23, each receiving a signal contact element 7 and are themselves integrated into a receptacle 18.
  • the in the Fig. 11 The arrangement shown may have the following dimensions according to the dimensions there: a: 1.8 mm; b: 0.8 mm; c: 0.15 mm; d: 0.2 mm; e: 1.0 mm; f: 0.5 mm; g: 0.95 mm; h: 1.6 mm.
  • FIG. 12 to 14 Such an arrangement of the contact elements 7 in a board-to-board contact device 24 according to the invention for the connection of two printed circuit boards 25.
  • the connection is fixed via two pressure plates 26 and 27 screwed.
  • FIG. 15 a third embodiment of a contact element 7 according to the invention is shown. This corresponds largely to that of FIGS. 9 and 10 However, wherein the non-positive fixation in a through hole serving spring tab 22 merges into a terminal block 28. As a result, an improved fixation of the contact element 7 in a passage opening of a receptacle 18 can be realized.
  • the Fig. 16 again illustrates the simultaneous production of a plurality of inventive contact elements 7 in a process passage.
  • the metallic structure produced in the method according to the invention is shown, which comprises the contact elements 7, and a frame 29 holding the contact elements 7 via a respective connection point 8. Shown are a total of 95 contact elements 7, which were generated on a surface with the dimensions 16.1 mm x 9.4 mm.
  • the 17 to 19 show a fourth embodiment of a contact element according to the invention 7. This corresponds largely (also in terms of dimensions) of the embodiment according to the Fig. 1 to 6 , An essential difference is the design of the lower spring portion 12, which is formed here in the form of a curved, double spring tab.
  • the 17 to 19 show this contact element 7 in different positions.
  • the contact element 7 is shown as it is directly after the preparation by means of a method according to the invention.
  • the locking connection was already engaged and thereby biased the (main) spring section 11. This represents a neutral position of the prepared for use contact element 7.
  • the contact elements 7 are installed in the through hole of a receptacle 18 of a contact device according to the invention, as shown in the FIGS. 20 and 21 is shown.
  • the pushed-together contact element 9 is shown with use of the total of the (main) spring section 11 provided travel.
  • the spring force of the biased in the neutral position (main) spring portion 11 of the in Fig. 17 to 21 shown contact element 7 only about 0.04 N and in the fully collapsed position about 0.1 N.
  • the Fig. 22 shows a fifth embodiment of a contact element 7 according to the invention special feature in this Contact element 7 is that the two support sections 8 do not touch directly, but are exclusively connected to each other via the (main) spring section 11.
  • this contact element 7 thus represents the (main) spring portion 11 is a part of the signal and current path.
  • the fixation of the contact element 7 in a through hole of a receptacle 18 is effected by two spring-mounted clamping portions 31.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
  • Measuring Leads Or Probes (AREA)
  • Manufacturing Of Electrical Connectors (AREA)

Description

Die Erfindung betrifft ein Kontaktelement mit Kontaktstellen zur elektrisch leitenden Verbindung von Kontaktbereichen beabstandeter Elemente, z.B. Leiterplatten. Die Erfindung betrifft weiterhin ein Verfahren zur Herstellung eines solchen Kontaktelements sowie eine Kontaktvorrichtung, die eine Mehrzahl solcher Kontaktelemente umfasst.The invention relates to a contact element having contact points for the electrically conductive connection of contact areas of spaced elements, e.g. Printed circuit boards. The invention further relates to a method for producing such a contact element and to a contact device comprising a plurality of such contact elements.

Gattungsgemäße Kontaktelemente werden beispielsweise zur Ausbildung sogenannter Board-to-Board- (B2B-) Verbinder eingesetzt, mit denen zwei voneinander beabstandet angeordnete Leiterplattem elektrisch leitend verbunden werden.Generic contact elements are used for example for the formation of so-called board-to-board (B2B) connector, with which two spaced-apart printed circuit boards are electrically connected.

Die Kontaktelemente sollen dabei eine möglichst verlustfreie Übertragung der Hochfrequenzsignale auch in einem definierten Toleranzbereich bezüglich der Parallelität, des Abstands sowie eines seitlichen Versatzes der beiden Leiterplatten bzw. dessen Kontaktbereichen sicherstellen. Weitere Anforderungen sind eine kostengünstige Herstellung sowie eine einfache Montage. Zudem sollen die axialen und radialen Abmessungen der Kontaktelemente möglichst klein sein, da durch die weiter fortschreitende Miniaturisierung der Leiterplatten bzw. der darauf aufgebrachten Leiterbahnen die Anzahl der nebeneinander in einem begrenzten Raum anzuordnenden Kontaktelemente stetig steigt.The contact elements are intended to ensure a loss-free transmission of the high-frequency signals in a defined tolerance range with respect to the parallelism, the distance and a lateral offset of the two circuit boards or its contact areas. Other requirements are cost-effective production and easy installation. In addition, the axial and radial dimensions of the contact elements should be as small as possible, as a result of the further progressing miniaturization of the printed circuit boards or the printed conductors applied thereto, the number of side by side in a limited space to be arranged contact elements steadily increases.

Bekannt ist, eine Verbindung zwischen zwei Leiterplatten mittels zwei, mit den Leiterplatten fest verbundenen Koaxialsteckverbindern sowie einem die beiden Koaxialsteckverbinder verbindenden Adapter, dem sogenannten "Bullet", herzustellen. Dieser Adapter ermöglicht einen axialen und radialen Toleranzausgleich, sowie den Ausgleich von Parallelitätstoleranzen. Typische hierfür eingesetzte Koaxialsteckverbinder sind SMP, Mini-SMP oder FMC.It is known to produce a connection between two printed circuit boards by means of two coaxial connectors fixedly connected to the printed circuit boards and an adapter connecting the two coaxial connectors, the so-called "Bullet". This adapter allows axial and radial tolerance compensation, as well as the compensation of parallelism tolerances. Typical coaxial connectors used for this purpose are SMP, mini-SMP or FMC.

Alternativ werden elektrische Verbindungen zwischen zwei Leiterplatten auch über Federkontaktstifte in Einzelleiter- und/oder Mehrfachleiteraufbau realisiert. Derartige Federkontaktstifte umfassen eine Hülse und einen teilweise innerhalb der Hülse geführten Kopf sowie eine Schraubenfeder, die sich zwischen dem Kopf und der Hülse abstützt. Die für die Schraubenfeder geforderten Eigenschaften bezüglich Federkraft und Blocklänge erfordern relativ große Federlängen, die sich entsprechend nachteilig auf die axiale Bauhöhe der Federkontaktstifte auswirken.Alternatively, electrical connections between two printed circuit boards are also realized via spring contact pins in single-conductor and / or multiple-conductor construction. Such spring contact pins include a sleeve and a partially guided within the sleeve head and a coil spring which is supported between the head and the sleeve. Required for the coil spring properties with respect to spring force and block length require relatively large spring lengths, which have a correspondingly detrimental effect on the axial height of the spring contact pins.

Aus der US 6,776,668 B1 ist weiterhin ein Koaxialkontaktelement bekannt, über das Hochfrequenzsignale zwischen zwei Leiterplatten übertragen werden sollen. Dabei dient ein Innenleiter, der in Form eines Federkontaktstifts ausgebildet ist, als Signalleiter, während ein den Innenleiter umgebender Außenleiter die Funktion eines Rückleiters sowie einer Schirmung für den Innenleiter aufweist. Der Außenleiter umfasst einen hülsenförmigen Grundkörper, der in Längsrichtung mehrfach geschlitzt ist. Das nicht geschlitzte Ende des Grundkörpers bildet stirnseitig eine Kontaktstelle zur Kontaktierung eines Kontaktbereichs einer der Leiterplatten aus. Auf dem Grundkörper ist eine Hülse des Außenleiters verschiebbar geführt, die an einem Ende stirnseitig eine Kontaktstelle zur Kontaktierung eines Kontaktbereichs der anderen Leiterplatte ausbildet. Zwischen dem Grundkörper und der Hülse stützt sich eine vorgespannte Feder ab. Bei der Verbindung der beiden Leiterplatten werden sowohl der Kopf des Innenleiters aus auch die Hülse des Außenleiters unter weiterer Vorspannung der jeweiligen Federn verschoben, wodurch trotz möglicher Toleranzen hinsichtlich des Abstands der Kontaktbereiche der Leiterplatten voneinander ein sicherer Kontaktdruck bereitgestellt werden kann. Durch die Schlitzung des Grundkörpers weist dieser zudem eine gewisse Flexibilität in seitlicher Richtung auf, wodurch erreicht werden soll, dass auch relativ große Nichtparallelitäten zwischen den beiden Kontaktbereichen ausgeglichen werden können.
Grundsätzlich weisen die bekannten Kontaktelemente relativ große Abmessungen auf, die zudem, bedingt durch ihre Konstruktion und die sich daraus ergebende Funktion, nicht beliebig verringerbar sind. Beispielsweise ist die Verringerung der Durchmesser von Stecker-Buchse-Verbindungen, wie sie u.a. bei den genannten SMP-Steckverbindern zum Einsatz kommen, nur bis zu einer gewissen Grenze möglich, da sich ansonsten bei den üblicherweise eingesetzten Werkstoffen Festigkeitsprobleme von Stecker und Buchse, insbesondere beim Zusammenstecken der Steckverbindung, ergeben würden.
From the US 6,776,668 B1 Furthermore, a coaxial contact element is known, via which high-frequency signals are to be transmitted between two printed circuit boards. In this case, an inner conductor, which is designed in the form of a spring contact pin, serves as a signal conductor, while a peripheral conductor surrounding the inner conductor has the function of a return conductor and a shield for the inner conductor. The outer conductor comprises a sleeve-shaped base body, which is slotted multiple times in the longitudinal direction. The non-slotted end of the base body forms the front side of a contact point for contacting a contact region of the circuit boards. On the main body, a sleeve of the outer conductor is displaceably guided, which forms at one end of the end face a contact point for contacting a contact region of the other printed circuit board. Between the base body and the sleeve, a prestressed spring is supported. When connecting the two circuit boards both the head of the inner conductor and the sleeve of the outer conductor are among others Bias of the respective springs displaced, whereby despite possible tolerances in the distance of the contact areas of the circuit boards from each other a secure contact pressure can be provided. By the slit of the body this also has a certain flexibility in the lateral direction, which is to be achieved that even relatively large non-parallelism between the two contact areas can be compensated.
Basically, the known contact elements on relatively large dimensions, which are also due to their construction and the resulting function, not arbitrarily reduced. For example, the reduction of the diameter of male-female connections, as used, inter alia, in said SMP connectors, only up to a certain limit possible because otherwise in the materials commonly used strength problems of plug and socket, especially in Mating the connector, would result.

Die EP0184608 A2 offenbart ein Kontaktelement entsprechend dem Oberbegriff des Anspruchs 1.The EP0184608 A2 discloses a contact element according to the preamble of claim 1.

Ausgehend von diesem Stand der Technik lag der Erfindung die Aufgabe zugrunde, ein gattungsgemäßes Kontaktelement anzugeben, das sich durch äußerst kleine Abmessungen auszeichnet und dadurch die Ausbildung einer Kontaktvorrichtung ermöglicht, bei der eine möglichst große Anzahl dieser Kontaktelemente auf einem vorgegebenen Raum untergebracht sind.Based on this prior art, the present invention seeks to provide a generic contact element, which is characterized by extremely small dimensions and thereby allows the formation of a contact device in which the largest possible number of these contact elements are housed in a given space.

Diese Aufgabe wird durch ein Kontaktelement gemäß dem unabhängigen Anspruchs 1 gelöst. Ein Verfahren zur Herstellung eines solchen Kontaktelements ist Gegenstand des unabhängigen Anspruchs 10. Eine Kontaktvorrichtung, die eine Mehrzahl solcher Kontaktelemente umfasst, ist Gegenstand des unabhängigen Anspruchs 13. Vorteilhafte Ausgestaltungen des erfindungsgemäßen Kontaktelements sind Gegenstand der abhängigen Ansprüche und ergeben sich aus der nachfolgenden Beschreibung der Erfindung.This object is achieved by a contact element according to independent claim 1. A method for producing such a contact element is the subject of independent claim 10. A contact device comprising a plurality of such contact elements is the subject of independent claim 13. Advantageous embodiments of the contact element according to the invention are the subject of the dependent claims and will become apparent from the following description of the invention ,

Grundgedanke der Erfindung ist, eine Miniaturisierung eines gattungsgemäßen Kontaktelements durch die Nutzung alternativer, für die Herstellung von solchen Kontaktelementen bislang ungenutzter Herstellungsverfahren zu erreichen. Dabei lag diesem Grundgedanken die Erkenntnis zugrunde, dass eine reine Miniaturisierung der bekannten Kontaktelemente u.a. aufgrund der bereits angesprochenen Festigkeitsprobleme nicht zum Erfolg führen kann, sondern mit der Miniaturisierung gleichzeitig eine Änderung der funktionalen Ausgestaltung verbunden sein müsste. Eine weitere Erkenntnis war dann, dass eine solche funktionale Neugestaltung in Verbindung mit den angestrebten Dimensionen wohl nur dadurch erreichbar ist, dass das Kontaktelement einteilig ausgebildet wird. Die gesuchten alternativen Herstellungsverfahren mussten somit ermöglichen, mit vertretbaren Kosten hochkomplexe Geometrien in äußerst kleinen Dimensionen herzustellen, wobei ein Werkstoff verarbeitbar sein müsste, der die Integration der für gattungsgemäße Kontaktelemente benötigten Funktionalitäten ermöglicht.The basic idea of the invention is a miniaturization of a generic contact element by the use of alternative, for the production of such contact elements previously unused manufacturing process to achieve. This basic idea was based on the finding that pure miniaturization of the known contact elements, inter alia due to the already mentioned strength problems, can not lead to success, but rather a change in the functional configuration would have to be associated with the miniaturization. Another finding was then that such a functional redesign in conjunction with the desired dimensions probably can only be achieved by the contact element is formed in one piece. The sought alternative manufacturing processes thus had to make it possible to produce highly complex geometries in extremely small dimensions at a reasonable cost, whereby a material would have to be processable which enables the integration of the functionalities required for generic contact elements.

Umgesetzt wird dieser Grundgedanke der Erfindung in einem (dreidimensionalen) Kontaktelement mit Kontaktstellen zur elektrisch leitenden und einen Raum überbrückenden Verbindung von Kontaktbereichen beabstandeter Elemente, insbesondere Leiterplatten, das vollständig aus einem oder mehreren abgeschiedenen Werkstoffen ausgebildet ist, von denen zumindest eines elektrisch leitend ist.This principle of the invention is implemented in a (three-dimensional) contact element with contact points for electrically conductive and space bridging connection of contact areas spaced elements, in particular printed circuit boards, which is formed entirely of one or more deposited materials, of which at least one is electrically conductive.

Das "Abscheiden" von (Niederschlägen von) Werkstoffen ermöglicht die Ausgestaltung extrem kleiner und dennoch hochkomplexer Geometrien. Die weiterhin vorgesehene, bevorzugte Verwendung eines Metalls zur Abscheidung und damit zur Ausbildung der Kontaktelemente ermöglicht aufgrund der elektrische leitenden Eigenschaften sowie der guten Elastizität vieler Metalle die Integration der wesentlichen, für gattungsgemäße Kontaktelemente benötigten Funktionalitäten, nämlich der elektrischen Leitfähigkeit sowie der Erzeugung eines Kontaktdrucks, durch den ein guter Kontakt der Kontaktstellen mit den Kontaktbereichen der zu verbindenden Elemente sichergestellt werden kann, in das miniaturisierte Kontaktelement. Anstelle einer Ausbildung des Kontaktelements vollständig aus einem oder mehreren abgeschiedenen Metallen können beispielsweise auch Kunststoffe verwendet werden. Hierzu sollten diese vorzugsweise die geforderte Elastizität aufweisen und/oder elektrisch leitend sein. Alternativ kann aber auch durch das zusätzliche Abscheiden einer oder mehrerer Metallschichten ein teilweise aus Kunststoff bestehendes Kontaktelement elektrisch leitend ausgebildet, insbesondere in einem letzten Abscheideschritt beschichtet werden.The "deposition" of (precipitation of) materials allows the design of extremely small yet highly complex geometries. The further intended, preferred use of a metal for deposition and thus for the formation of the contact elements allows the integration of the essential, required for generic contact elements functionalities, namely the electrical conductivity and the generation of a contact pressure due to the electrical conductivity properties and the good elasticity of many metals the good contact of the contact points with the contact areas of the elements to be connected can be ensured in the miniaturized contact element. Instead of a training of the contact element completely from one or For example, plastics can also be used for a plurality of deposited metals. For this purpose, they should preferably have the required elasticity and / or be electrically conductive. Alternatively, however, can also be formed by the additional deposition of one or more metal layers, a partially made of plastic contact element electrically conductive, in particular in a final deposition step.

Zur Abscheidung des Werkstoffs oder der Werkstoffe können beliebige geeignete, aus dem Stand der Technik bekannte Verfahren vorgesehen sein. Besonders bevorzugte Verfahren zur Abscheidung und somit zur Herstellung eines erfindungsgemäßen Kontaktelements sind die sogenannten LiGA-Verfahren. Bei dem Begriff "LiGA" handelt es sich um eine Verbindung aus den die wesentlichen Schritte dieser Verfahren beschreibenden Begriffe "Lithographie", "Galvanik" und "Abformung".For the deposition of the material or materials, any suitable, known from the prior art method can be provided. Particularly preferred methods for depositing and thus producing a contact element according to the invention are the so-called LiGA methods. The term "ligand" is a compound from which the essential steps of this method descriptive terms "lithography", "G alvanik" and "A bformung".

Das bzw. die LiGA-Verfahren (zahlreiche Abwandlungen sind möglich) zeichnet sich dadurch aus, dass es die Herstellung von Mikrostrukturen mit äußerst geringen Abmessungen von z.B. 0,2 µm, Strukturhöhen bis 3 mm, und Aspektverhältnissen von z.B. 50 (für Detailstrukturen sogar bis 500) aus z.B. den Materialien Kunststoff, Metall oder Keramik ermöglicht.The LiGA process (many variations are possible) is characterized by the ability to produce microstructures of extremely small dimensions of e.g. 0.2 μm, structural heights up to 3 mm, and aspect ratios of e.g. 50 (for detail structures as high as 500) of e.g. the materials plastic, metal or ceramic allows.

Zur Herstellung eines Kontaktelements mittels eines LiGA-Verfahrens kann insbesondere vorgesehen sein, auf einem ebenen Substrat, z.B. einem Siliziumwafer oder einer polierten Scheibe aus z.B. Beryllium, Kupfer, Titan, eine foto- oder röntgenempfindliche Resistschicht aus insbesondere Polymethylmethacrylat (PMMA) aufzubringen, die als Negativ-, vorzugsweise jedoch als Positivresist vorgesehen sein kann. Sofern das Substrat nicht selbst elektrisch leitend ist, kann dieses mit einer metallischen Keimschicht versehen werden. Dies kann insbesondere durch "Sputterdeposition" oder Aufdampfen erfolgen. Danach wird die Resistschicht belichtet und entwickelt, wodurch eine Negativform des herzustellenden Kontaktelements entsteht. In einem Abscheideverfahren wird ein Werkstoff, vorzugsweise Metall (oder auch mehrere Werkstoffe bzw. Metalle schichtweise) auf dem Substrat in der Negativform abgeschieden. Vorzugsweise kann vorgesehen sein, das oder die Werkstoffe galvanisch abzuscheiden, wobei auch andere Abscheideverfahren, wie z.B. PVD oder CVD möglich sind. Nach dem Entfernen des verbliebenen Resists bleiben zunächst das Substrat, die Keimschicht und der abgeschiedene Werkstoff. Hierbei kann es sich bereits um das Kontaktelement handeln, sofern in mindestens einer Schicht ein elektrisch leitender Werkstoff, insbesondere ein Metall abgeschieden wurde. Das Kontaktelement kann dann noch durch beispielsweise Ätzen der Keimschicht von dem Substrat gelöst werden.For producing a contact element by means of a LiGA process, provision can be made in particular to apply to a planar substrate, for example a silicon wafer or a polished disk of, for example, beryllium, copper, titanium, a photo- or X-ray-sensitive resist layer of, in particular, polymethylmethacrylate (PMMA) Negative, but preferably can be provided as a positive resist. If the substrate is not itself electrically conductive, this can be provided with a metallic seed layer. This can be done in particular by "sputter deposition" or vapor deposition. Thereafter, the resist layer is exposed and developed, whereby a negative mold of the contact element to be produced is formed. In a deposition process is a material, preferably metal (or more materials or metals layer by layer) deposited on the substrate in the negative mold. Preferably, it can be provided to deposit the material (s) galvanically, although other deposition methods, such as PVD or CVD, are also possible. After removing the remaining resist, the substrate, the seed layer and the deposited material remain first. This may already be the contact element, if an electrically conductive material, in particular a metal, has been deposited in at least one layer. The contact element can then be detached from the substrate by, for example, etching the seed layer.

Alternativ kann auch vorgesehen sein, die abschließend abgeschiedene Struktur als Form eines Abformwerkzeugs vorzusehen. Dazu kann ein weiteres Abscheiden mit insbesondere einem "Überwachsen" (eines Teils) der verbliebenen Resistschicht und ein anschließendes Entfernen von Substrat und Keimschicht vorgesehen sein. Das herzustellende Kontaktelement kann dann durch beispielsweise Spritzgießen oder Heißprägen hergestellt werden. Dies eignet sich insbesondere für die Herstellung des Kontaktelements bzw. eines Grundkörpers des Kontaktelements aus Kunststoff. Sofern der Kunststoff nicht elektrisch leitend ist, kann dann noch vorgesehen sein, einen elektrisch leitenden Werkstoff, insbesondere ein Metall in Form einer Beschichtung abzuscheidenAlternatively it can also be provided to provide the finally deposited structure as a mold of an impression tool. For this purpose, a further deposition with, in particular, a "overgrowth" (of a part) of the remaining resist layer and a subsequent removal of substrate and seed layer can be provided. The contact element to be produced can then be produced by, for example, injection molding or hot stamping. This is particularly suitable for the production of the contact element or a main body of the contact element made of plastic. If the plastic is not electrically conductive, can then be provided to deposit an electrically conductive material, in particular a metal in the form of a coating

Sofern abgeschiedene Strukturen mit einer größeren Stärke benötigt werden, kann vorgesehen sein, das beschriebene Verfahren zur Ausbildung einer Maske zu nutzen, die dann wiederum zur gezielten Belichtung einer stärkeren Resistschicht eingesetzt wird. In diesen Fällen wird in der Maske häufig Gold abgeschieden, das sich durch eine starke Absorption von Röntgenstrahlung auszeichnet. Zudem kann vorgesehen sein, die Goldabscheidung auf einer Titanmembran vorzunehmen (dich sich somit bei der Maskenherstellung zwischen dem Substrat und der Resistschicht befand), die sich durch eine äußerste geringe Absorption der Röntgenstrahlung auszeichnet.If deposited structures with a greater thickness are required, it may be provided to use the described method for forming a mask, which in turn is then used for the targeted exposure of a thicker resist layer. In these cases, gold is often deposited in the mask, which is characterized by a strong absorption of X-radiation. In addition, it may be provided to carry out the gold deposition on a titanium membrane (thus you were in the mask production between the substrate and the resist layer), which is characterized by an extremely low absorption of the X-radiation.

Zur Belichtung der Resistschicht können insbesondere Röntgenstrahlen oder ultraviolettes (UV-) Licht genutzt werden, wobei die Nutzung von Röntgenstrahlung tendenziell eine höhere Präzision und die Nutzung von UV-Licht geringere Kosten verspricht.In particular, X-rays or ultraviolet (UV) light can be used to expose the resist layer, whereby the use of X-radiation tends to promise higher precision and the use of UV light reduces costs.

Um eine möglichst kostengünstige Herstellung eines erfindungsgemäßen Kontaktelements mittels eines erfindungsgemäßen Verfahrens zu erreichen, kann vorzugsweise vorgesehen sein, dass bei der Durchführung eines LiGA-Verfahrens gleichzeitig eine Mehrzahl von direkt oder indirekt zusammenhängenden Kontaktelementen erzeugt werden, die anschließend vereinzelt werden.In order to achieve the most cost-effective possible production of a contact element according to the invention by means of a method according to the invention, it can preferably be provided that a plurality of directly or indirectly contiguous contact elements are generated during the implementation of a LiGA process, which are then separated.

In einer bevorzugten Ausgestaltung kann das erfindungsgemäße Kontaktelement (mindestens) einen Federabschnitt aufweisen, der bei der Kontaktierung der Kontaktbereiche elastisch verformt ist. Dieser Federabschnitt, der sich von dem oder den übrigen Abschnitten des Kontaktelements durch eine geringere Federsteifigkeit bezogen auf die Verbindungsrichtung, d.h. die Verbindungslinie der Kontaktstellen, auszeichnet, kann insbesondere für den Ausgleich von Form- und Lagetoleranzen des Kontaktelements und der zu verbindenden Kontaktbereiche sowie zur Sicherstellung eines definierten Kontaktdrucks dienen.In a preferred embodiment, the contact element according to the invention (at least) have a spring portion which is elastically deformed when contacting the contact areas. This spring portion extending from the one or more portions of the contact element by a lower spring stiffness with respect to the connection direction, i. the connecting line of the contact points, is distinguished, can serve in particular for the compensation of shape and position tolerances of the contact element and the contact areas to be connected and to ensure a defined contact pressure.

Besonders bevorzugt kann dabei vorgesehen sein, dass der Federabschnitt zwischen zwei steifen Tragabschnitten angeordnet ist, die sich bei den bei der Kontaktierung der Kontaktbereiche regelmäßig auftretenden Kräften nicht relevant bzw. nicht funktional verformen. Die Tragabschnitte können insbesondere eine gute (Knick-)Stabilität des Kontaktelements sicherstellen.Particularly preferably, it may be provided that the spring section is arranged between two rigid support sections, which do not become relevant or not functionally deformed in the case of the forces regularly occurring during the contacting of the contact areas. The support sections can in particular ensure a good (kink) stability of the contact element.

Der Federabschnitt kann vorzugsweise mäanderförmig ausgebildet ist. Ein solcher Federabschnitt ist mittels des erfindungsgemäßen Verfahrens gut herstellbar.The spring portion may preferably be meander-shaped. Such a spring section can be easily produced by means of the method according to the invention.

Alternativ kann der Federabschnitt mehrere koaxial angeordnete, bogenförmige Federlaschen aufweisen. Auch solche Federlaschen lassen sich erfindungsgemäß gut herstellen. Besonders bevorzugt kann dann noch vorgesehen sein, dass benachbarte Federlaschen bei der Kontaktierung der zwei Kontaktbereiche infolge der Verformung des Federabschnitts kontaktieren. Dadurch kann der Federabschnitt, sofern vorgesehen ist, dass dieser Teil des Signal- oder Strompfads ist, einen relativ geringen elektrischen Widerstand aufweisen.Alternatively, the spring section can have a plurality of coaxially arranged, have arcuate spring tabs. Even such spring tabs can be produced according to the invention well. Particularly preferably, it can then be provided that adjacent spring tabs contact each other during the contacting of the two contact areas as a result of the deformation of the spring section. Thereby, the spring portion, if provided that this is part of the signal or current path, have a relatively low electrical resistance.

In einer weiterhin bevorzugten Ausgestaltung des erfindungsgemäßen Kontaktelements kann eine Rastverbindung vorgesehen sein, die das Kontaktelement in einer den Federabschnitt teilweise verformten Stellung hält. Dadurch kann der Federabschnitt in einer unbelasteten Neutralstellung des Kontaktelements bereits vorgespannt sein, wodurch dieses auch bei nur geringer weiterer Verformung bei der Kontaktierung der Kontaktbereiche bereits einen relativ großen Kontaktdruck erzeugen kann.In a further preferred embodiment of the contact element according to the invention, a latching connection can be provided, which holds the contact element in a spring portion partially deformed position. As a result, the spring section can already be prestressed in an unloaded neutral position of the contact element, as a result of which it can already produce a relatively large contact pressure even with only slight further deformation during the contacting of the contact areas.

Weiterhin bevorzugt kann dann vorgesehen sein, dass bei einer weiteren Verformung des Federabschnitts die die Rastverbindung ausbildenden Abschnitte aneinander abgleiten. Die die Rastverbindung ausbildenden Abschnitte (hierbei kann es sich vorzugsweise um die Tragabschnitte handeln) können somit die Relativbewegung der durch den Federabschnitt verbundenen Abschnitte führen und dadurch die Stabilität des Kontaktelements positiv beeinflussen.Further preferably, it can then be provided that in a further deformation of the spring section, the sections forming the latching connection slide off one another. The latching connection forming portions (this may preferably be the support portions) may thus guide the relative movement of the sections connected by the spring portion and thereby positively influence the stability of the contact element.

Zur Herstellung eines solchen Kontaktelements kann vorgesehen sein, dass das oder die Kontaktelemente erst nach der Herstellung und ggf. nach einer Vereinzelung zum Einrasten der Rastverbindung(en) verformt werden.In order to produce such a contact element, provision may be made for the contact element or elements to be deformed only after production and, if appropriate, after separation for latching the latching connection (s).

In einer weiterhin bevorzugten Ausgestaltung des erfindungsgemäßen Kontaktelements kann vorgesehen sein, dass zwischen den Kontaktstellen ein Signal- oder Strompfad ausgebildet ist, der den oder die Federabschnitte umgeht. Dieser Ausführungsform liegt der Gedanke zugrunde, dass der Federabschnitt regelmäßig durch relativ kleine Querschnitte des abgeschiedenen, elektrisch leitenden Werkstoffs und somit durch einen relativ hohen elektrischen Widerstand gekennzeichnet ist. Ein Signal- oder Strompfad sollte sich somit ohne Einbezug des Federabschnitts über die übrigen Abschnitte des Kontaktelements erstrecken, die vorzugsweise größere Querschnittsflächen aufweisen.In a further preferred embodiment of the contact element according to the invention can be provided that between the contact points a signal or current path is formed, which bypasses the or the spring sections. This embodiment is based on the idea that the spring section regularly by relatively small cross sections of the deposited, electrically conductive material and thus by a characterized by relatively high electrical resistance. A signal or current path should therefore extend without the inclusion of the spring section over the remaining sections of the contact element, which preferably have larger cross-sectional areas.

Eine erfindungsgemäße Kontaktvorrichtung umfasst eine (vorzugsweise zumindest teilweise elektrisch isolierende) Aufnahme, die eine Mehrzahl von nebeneinander angeordneten Durchgangsöffnungen aufweist, sowie mehrere erfindungsgemäße Kontaktelemente, wobei die Kontaktelemente in den Durchgangsöffnungen der Aufnahme angeordnet sind, wobei diese die Aufnahme mit die Kontaktstellen aufweisenden Abschnitten überragen. Dadurch kann eine einfach handhabbare Einheit mit einer Vielzahl erfindungsgemäßer Kontaktelemente erzeugt werden. Zudem können die Kontaktelemente durch die Aufnahme in den Durchgangsöffnungen in seitlicher Richtung abgestützt sein.A contact device according to the invention comprises a (preferably at least partially electrically insulating) receptacle having a plurality of through holes arranged side by side, and a plurality of contact elements according to the invention, wherein the contact elements are arranged in the through holes of the receptacle, which project beyond the receptacle with the contact points having sections. As a result, an easily manageable unit with a multiplicity of contact elements according to the invention can be produced. In addition, the contact elements can be supported by the receptacle in the through holes in the lateral direction.

Die Erfindung wird nachfolgend anhand von in den Zeichnungen dargestellten Ausführungsbeispielen näher erläutert. In den Zeichnungen zeigt:

Fig.1:
eine erste Ausführungsform eines erfindungsgemäßen Kontaktelements in einer perspektivischen Ansicht;
Fig. 2:
das Kontaktelement gemäß Fig. 1 in einer Seitenansicht;
Fig. 3:
einer Vergrößerung des Ausschnitts III in Fig. 2;
Fig. 4:
einer Vergrößerung des Ausschnitts IV in Fig. 2;
Fig. 5:
einer Vergrößerung des Ausschnitts V in Fig. 2;
Fig. 6:
einer Vergrößerung des Ausschnitts VI in Fig. 2;
Fig. 7:
einen Ausschnitt einer erfindungsgemäßen Kontaktvorrichtung mit Kontaktelementen gemäß den Fig. 1 bis 6 in einem Querschnitt;
Fig. 8:
eine Anordnung der Kontaktelemente in der Kontaktvorrichtung gemäß Fig. 7;
Fig.9:
eine zweite Ausführungsform eines erfindungsgemäßen Kontaktelements in einer perspektivischen Ansicht;
Fig. 10:
einen Ausschnitt einer erfindungsgemäßen Kontaktvorrichtung mit Kontaktelementen gemäß den Fig. 10 bis 12 in einem Querschnitt;
Fig. 11:
eine Anordnung der Kontaktelemente in der Kontaktvorrichtung gemäß Fig. 12;
Fig. 12:
ein System aus zwei Leiterplatten und einer Kontaktvorrichtung gemäß Fig. 11 in einer perspektivischen Explosionsansicht;
Fig. 13:
das System gemäß Fig. 12 in einer Seitenansicht;
Fig. 14:
eine Vergrößerung des Ausschnitts XIV in Fig. 12;
Fig.15:
eine dritte Ausführungsform eines erfindungsgemäßen Kontaktelements in einer Seitenansicht;
Fig. 16:
eine Vielzahl zusammenhängend hergestellter Kontaktelemente gemäß den Fig. 15;
Fig.17:
eine vierte Ausführungsform eines erfindungsgemäßen Kontaktelements in einer ersten Stellung;
Fig. 18:
das Kontaktelement gemäß Fig. 17 in einer zweiten Stellung;
Fig. 19:
das Kontaktelement gemäß Fig. 17 in einer dritten Stellung;
Fig. 20:
eine erfindungsgemäße Kontaktvorrichtung mit Kontaktelementen gemäß den Fig. 17 bis 19 in einer perspektivischen Ansicht;
Fig. 21:
einen Diagonalschnitt durch die Kontaktvorrichtung gemäß Fig. 20;
Fig. 22:
eine fünfte Ausführungsform eines erfindungsgemäßen Kontaktelements in einer ersten Stellung;
Fig. 23:
einen ersten Schritt eines erfindungsgemäßen Verfahrens;
Fig. 24:
einen zweiten Schritt eines erfindungsgemäßen Verfahrens;
Fig. 25:
einen dritten Schritt eines erfindungsgemäßen Verfahrens; und
Fig. 26:
einen vierten Schritt eines erfindungsgemäßen Verfahrens.
The invention will be explained in more detail with reference to embodiments shown in the drawings. In the drawings shows:
Fig.1:
a first embodiment of a contact element according to the invention in a perspective view;
Fig. 2:
the contact element according to Fig. 1 in a side view;
3:
an enlargement of section III in Fig. 2 ;
4:
an enlargement of the section IV in Fig. 2 ;
Fig. 5:
an enlargement of the section V in Fig. 2 ;
Fig. 6:
an enlargement of the section VI in Fig. 2 ;
Fig. 7:
a section of a contact device according to the invention with Contact elements according to the Fig. 1 to 6 in a cross section;
Fig. 8:
an arrangement of the contact elements in the contact device according to Fig. 7 ;
Figure 9:
a second embodiment of a contact element according to the invention in a perspective view;
Fig. 10:
a detail of a contact device according to the invention with contact elements according to the 10 to 12 in a cross section;
Fig. 11:
an arrangement of the contact elements in the contact device according to Fig. 12 ;
Fig. 12:
a system of two printed circuit boards and a contact device according to Fig. 11 in an exploded perspective view;
Fig. 13:
the system according to Fig. 12 in a side view;
Fig. 14:
an enlargement of the section XIV in Fig. 12 ;
Figure 15:
a third embodiment of a contact element according to the invention in a side view;
Fig. 16:
a plurality of contiguous manufactured contact elements according to the Fig. 15 ;
Figure 17:
a fourth embodiment of a contact element according to the invention in a first position;
Fig. 18:
the contact element according to Fig. 17 in a second position;
Fig. 19:
the contact element according to Fig. 17 in a third position;
Fig. 20:
a contact device according to the invention with contact elements according to the 17 to 19 in a perspective view;
Fig. 21:
a diagonal section through the contact device according to Fig. 20 ;
Fig. 22:
a fifth embodiment of a contact element according to the invention in a first position;
Fig. 23:
a first step of a method according to the invention;
Fig. 24:
a second step of a method according to the invention;
Fig. 25:
a third step of a method according to the invention; and
Fig. 26:
a fourth step of a method according to the invention.

In den Fig. 1 bis 6 ist eine erste Ausführungsform eines erfindungsgemäßen Kontaktelements 7 dargestellt. Das einteilige, aus einem elektrisch leitenden Metall ausgebildete Kontaktelement 7 ist erfindungsgemäß mittels eines LiGA-Verfahrens hergestellt worden, dessen grundlegende Verfahrensschritte in den Fig. 23 bis 26 beispielhaft dargestellt sind.In the Fig. 1 to 6 a first embodiment of a contact element 7 according to the invention is shown. The one-piece, formed from an electrically conductive metal contact element 7 has been prepared according to the invention by means of a LiGA process whose basic process steps in the FIGS. 23 to 26 are shown by way of example.

In der Fig. 23 ist dargestellt, wie eine auf einem Substrat 1 angeordnete Resistschicht 2 aus PMMA durch eine Maske mit Synchrotron-Strahlung 5 bestrahlt wird. Die Maske weist eine für die Synchrotron-Strahlung weitgehend durchlässige Membran 3 (z.B. aus Titan) auf, auf der eine Absorberstruktur 4 aus einem die Synchrotron-Strahlung stark absorbierenden Werkstoff (z.B. Gold) aufgebracht ist. Dies führt in den bestrahlten Abschnitten der Resistschicht 2 zu einer Umwandlung der langkettigen Moleküle des PMMA in kurzkettige Moleküle, die sich in einem nasschemischen Entwicklungsschritt selektiv gegen die nicht bestrahlten Abschnitte auflösen und damit entfernen lassen (vgl. Fig. 24).In the Fig. 23 It is shown how a resist layer 2 of PMMA arranged on a substrate 1 is irradiated through a mask with synchrotron radiation 5. The mask has a membrane 3 (for example of titanium) which is largely permeable to the synchrotron radiation and on which an absorber structure 4 made of a material which absorbs the synchrotron radiation (eg gold) is applied. This results in the irradiated portions of the resist layer 2 to a conversion of the long-chain molecules of PMMA into short-chain molecules, which selectively dissolve in a wet-chemical development step against the unirradiated sections and thus can be removed (see. Fig. 24 ).

Die sich so auf dem Substrat 1 ergebenden Freiräume werden daraufhin durch galvanische Abscheidung eines Metalls 6 aufgefüllt (vgl. Fig. 25). Nach einem Auflösen der verbliebenen Resistschicht 2 (vgl. Fig. 26) und dem Ablösen von dem Substrat 1 wird die gewünschte Struktur aus dem abgeschiedenen Metall 6 erhalten.The resulting on the substrate 1 free spaces are then filled by electrodeposition of a metal 6 (see. Fig. 25 ). After dissolving the remaining resist layer 2 (see. Fig. 26 ) and detachment from the substrate 1, the desired structure of the deposited metal 6 is obtained.

In den Fig. 25 und 26 ist diese lediglich beispielhaft als eine beliebige Metallstruktur dargestellt. Erfindungsgemäß weist die Metallstruktur die Form eines oder mehrerer, an definierten Verbindungspunkten zusammenhängender Kontaktelemente 7 auf, wie dies in der Fig. 12 beispielhaft für eine Ausführungsform eines erfindungsgemäßen Kontaktelements 7 dargestellt ist. Zusammenhängende Kontaktelemente 7 können durch einen Trennen an Verbindungsstellen 8, beispielsweise mittels eines Lasers, vereinzelt werden.In the FIGS. 25 and 26 this is merely exemplified as any metal structure. According to the invention, the metal structure has the shape of one or more contact elements 7, which are connected to defined connection points, as shown in FIG Fig. 12 is shown by way of example for an embodiment of a contact element 7 according to the invention. Connected contact elements 7 can be separated by a separation at joints 8, for example by means of a laser.

Das in den Fig. 1 bis 6 dargestellte Kontaktelement 7 umfasst zwei Tragabschnitte 8, die jeweils eine Kontaktstelle 9 ausbilden, die zur Kontaktierung eines Kontaktbereichs eines Elements (nicht dargestellt) ausgebildet sind. Mittels des Kontaktelements 7 sollen somit die Kontaktbereiche der Elemente elektrisch leitend verbunden werden, um insbesondere Hochfrequenzsignale zu übertragen. Die Kontaktstelle 9 des einen, in den Fig. 1 und 2 oben dargestellten Tragabschnitts 8 umfasst eine schräg bezüglich einer Längsachse 10 des Kontaktelements 7 angeordnete Kontaktfläche sowie eine sich randseitig aus dieser Kontaktfläche erstreckende Spitze. Die Spitze dient dazu, eine ggf. vorhandene Oxidschicht auf dem zu kontaktierenden Kontaktbereich zu durchdringen und ggf. infolge einer Relativbewegung zu dem Kontaktbereich abzutragen. Dadurch soll ein guter Kontakt mit dem unter der Oxidschicht liegenden Metall des Kontaktbereichs sichergestellt werden.That in the Fig. 1 to 6 illustrated contact element 7 comprises two support sections 8, each forming a contact point 9, which are formed for contacting a contact region of an element (not shown). By means of the contact element 7, the contact areas of the elements are thus to be connected in an electrically conductive manner in order in particular to transmit high-frequency signals. The contact point 9 of the one, in the Fig. 1 and 2 Supporting section 8 shown above comprises a contact surface arranged obliquely with respect to a longitudinal axis 10 of the contact element 7 and a tip extending from this contact surface at the edge. The tip serves to penetrate a possibly existing oxide layer on the contact region to be contacted and if necessary to remove it as a result of a relative movement to the contact region. This should ensure a good contact with the lying below the oxide layer metal of the contact area.

Die zwei relativ steif ausgebildeten Tragabschnitte 8 sind über einen mäanderförmig verlaufenden (Haupt-)Federabschnitt 11 miteinander verbunden. Ein Verschieben der Tragelemente 8 relativ zueinander bezüglich der Längsachse 10 des Kontaktelements führ zu einer Verformung und Vorspannung des (Haupt-)Federabschnitts 11.The two relatively rigid support sections 8 are connected to one another via a meandering (main) spring section 11. A displacement of the support elements 8 relative to each other with respect to the longitudinal axis 10 of the contact element leads to a deformation and bias of the (main) spring portion eleventh

Der in den Fig. 1 und 2 unten dargestellte Tragabschnitt 8 weist an seinem unteren Ende noch zwei weitere, parallel zueinander angeordnete und ebenfalls mäanderförmig verlaufende Federabschnitte 12 auf. Diese sind an ihrem einen Ende jeweils mit dem unteren Ende des Tragabschnitts 8 und mit dem anderen Ende jeweils mit dem Querteil eines T-förmigen Kolbens 13 verbunden. Die den Federabschnitten 12 abgewandte, leicht gekrümmte Außenfläche des Querteils bildet die eine Kontaktstelle 9 des Kontaktelements 7 aus.The in the Fig. 1 and 2 Support section 8 shown below has at its lower end two more, parallel to each other and also meandering extending spring portions 12. These are connected at their one end in each case with the lower end of the support section 8 and with the other end in each case with the transverse part of a T-shaped piston 13. The spring sections 12 facing away, slightly curved outer surface of the cross member forms the one contact point 9 of the contact element 7.

Die zwei Tragabschnitte 8 bilden weiterhin jeweils eine Rastnase 14 aus, die zusammen eine Rastverbindung ausbilden, die nach dem Einrasten eine Relativverschiebung der Tragabschnitte infolge der dann auf Zug vorgespannten (Haupt-)Federabschnitt 11 begrenzt. In den Fig. 1 bis 3 ist das Kontaktelement 7 noch mit gelöster Rastverbindung dargestellt, so wie es bei der Herstellung mittels des erfindungsgemäßen Verfahrens erzeugt wird. Durch eine Druckbelastung auf die beiden Enden des Kontaktelements 7 kann die Rastverbindung unter temporärer elastischer Auslenkung der die Rastnasen 14 aufweisenden Abschnitte der Tragabschnitte 8 eingerastet werden. Dabei wird der (Haupt-)Federabschnitt 11 auf Zug vorgespannt.The two support sections 8 further each form a latching lug 14, which together form a latching connection, which limits a relative displacement of the support sections due to the then biased to train (main) spring section 11 after snapping. In the Fig. 1 to 3 the contact element 7 is still shown with released latching connection, as it is produced during the production by means of the method according to the invention. By a pressure load on the two ends of the contact element 7, the locking connection under temporary elastic deflection of the locking lugs 14 having portions of the support portions 8 are engaged. In this case, the (main) spring portion 11 is biased to train.

Gleichzeitig wird eine funktional entsprechende Rastverbindung zwischen dem unteren Tragabschnitt 8 und dem Kolben 13 ausgebildet, wobei die Federabschnitte 12 auf Druck vorgespannt werden (vgl. Fig. 5).At the same time a functionally corresponding locking connection between the lower support portion 8 and the piston 13 is formed, wherein the spring portions 12 are biased to pressure (see. Fig. 5 ).

Der untere Tragabschnitt 8 weist weiterhin einen Klemmabschnitt 15 auf, der geringfügig gegenüber der Längsachse 10 des Kontaktelements 7 geneigt verläuft. Infolge dieses geneigten Verlaufs wird das freie Ende des Klemmabschnitts 15 durch den oberen Tragabschnitt 8 bei dessen Relativbewegung zu dem unteren Tragabschnitt 8 nach außen gedrückt und somit elastisch ausgelenkt. Dies dient dazu, das Kontaktelement 7 in einer Durchgangsöffnung einer Tragplatte 16 kraftschlüssig zu fixieren, wie dies in der Fig. 7 dargestellt ist. Dabei soll die kraftschlüssige Fixierung insbesondere gegen ein Herausdrücken des Kontaktelements 7 nach unten aus der Durchgangsöffnung sichern, wobei infolge der Ausgestaltung des Klemmabschnitts 15 der seitlich gerichtete Druck proportional zu der Kraftausübung von oben auf das Kontaktelement 7 ist. Dadurch kann eine sichere kraftschlüssige Fixierung auch bei hohen Kräften (von oben, mit den entsprechenden Gegenkräfte von unten) erreicht werden, während gleichzeitig das Kontaktelement 7 nach der Entlastung des oberen Tragabschnitts 8 ohne wesentlichen Kraftaufwand aus der Durchgangsöffnung entfernt werden kann.The lower support portion 8 further includes a clamping portion 15 which extends slightly inclined relative to the longitudinal axis 10 of the contact element 7. As a result of this inclined course, the free end of the clamping portion 15 is pressed by the upper support portion 8 in its relative movement to the lower support portion 8 to the outside and thus elastically deflected. This serves to fix the contact element 7 in a passage opening of a support plate 16 frictionally, as shown in the Fig. 7 is shown. In this case, the non-positive fixation is intended in particular against a pressing out of the contact element 7 down Secure from the passage opening, wherein due to the configuration of the clamping portion 15 of the laterally directed pressure is proportional to the application of force from above to the contact element 7. This allows a secure non-positive fixation even at high forces (from above, with the corresponding counter-forces from below) can be achieved while the contact element 7 can be removed after the discharge of the upper support section 8 without significant effort from the through hole.

Die Fixierung des Kontaktelements in der Durchgangsöffnung bei einer Belastung nach oben wird formschlüssig durch einen Anschlagen eines Absatzes 16 des unteren Tragabschnitts 8 an einem komplementären Absatz 17 in der Durchgangsöffnung erreicht.The fixation of the contact element in the passage opening at a load upward is achieved form-fitting by striking a shoulder 16 of the lower support section 8 at a complementary paragraph 17 in the passage opening.

Das erfindungsgemäße Verfahren ermöglicht die Herstellung äußerst kleiner Kontaktelemente 7. Beispielsweise kann damit ein Kontaktelement 7 hergestellt werden, das bezüglich der in den Fig. 2 bis 7 dargestellten Bemaßungen folgende Dimensionen aufweist: a: 5,61 mm; b: 0,424 mm; c: 0,008 mm; d: 0,012 mm; e: 0,012 mm; f: 0,018 mm; g: 0,013 mm; h: 0,028 mm; i: 0,042 mm; j: 0,015 mm; k: 0,01 mm; l: 0,01 mm; m: 0,018 mm; n: 0,01 mm; o: 0,018 mm; p: 0,12 mm (Durchmesser); q: 5,02; r: 5,46 mm; s: 5,11 mm; t: 0,42 mm. Die (konstante) Stärke dieses Kontaktelements 7 beträgt 0,15 mm.The inventive method allows the production of extremely small contact elements 7. For example, thus a contact element 7 can be made, with respect to the in the Fig. 2 to 7 Dimensions shown have the following dimensions: a: 5.61 mm; b: 0.424 mm; c: 0.008 mm; d: 0.012 mm; e: 0.012 mm; f: 0.018 mm; g: 0.013 mm; h: 0.028 mm; i: 0.042 mm; j: 0.015 mm; k: 0.01 mm; l: 0.01 mm; m: 0.018 mm; n: 0.01 mm; o: 0.018 mm; p: 0.12 mm (diameter); q: 5.02; r: 5.46 mm; s: 5.11 mm; t: 0.42 mm. The (constant) thickness of this contact element 7 is 0.15 mm.

In der Fig. 7 ist ein Ausschnitt einer erfindungsgemäßen Kontaktvorrichtung dargestellt. Diese umfasst eine Aufnahme 18 mit einer Mehrzahl von parallel angeordneten Durchgangsöffnungen, in denen jeweils ein Kontaktelement angeordnet und auf die beschriebene Art und Weise fixiert ist. In der Fig. 7 ist beispielhaft in lediglich zwei der drei Durchgangsöffnungen ein Kontaktelement 7 angeordnet. Zudem ist das eine Kontaktelement 7 in seiner durch die Rastverbindung gehaltenen Neutralstellung und das andere mit fast maximalem Hub dargestellt. Dies soll die toleranzausgleichende Funktion des (Haupt-)Federabschnitts 11 der Kontaktelemente 7 verdeutlichen.In the Fig. 7 a section of a contact device according to the invention is shown. This comprises a receptacle 18 with a plurality of through holes arranged in parallel, in each of which a contact element is arranged and fixed in the manner described. In the Fig. 7 is exemplified in only two of the three through holes, a contact element 7 is arranged. In addition, a contact element 7 is shown in its held by the latching connection neutral position and the other with almost maximum stroke. This is intended to illustrate the tolerance-compensating function of the (main) spring section 11 of the contact elements 7.

Die konkrete Anordnung der Durchgangsöffnungen und damit der Kontaktelemente 7 in der Aufnahme 18 erfolgt in Abhängigkeit von der mit der Kontaktvorrichtung zu erzielenden Funktion. In der Fig. 8 ist eine erste beispielhafte Anordnung dargestellt, bei der insgesamt neun Kontaktelemente 7 in quadratischer Anordnung mit diagonaler Ausrichtung der einzelnen Kontaktelemente 7 offenbart. Vorgesehen sein kann, über das mittige Kontaktelement 7 (Hochfrequenz-)Signale zu übertragen, während die anderen an Masse angeschlossen sind und als Gegenpol dienen. Dadurch ergibt sich eine abgeschirmte Anordnung des Signal-Kontaktelements 7, die funktional dem Innenleiter eines herkömmlichen Koaxialkontaktelements entspricht und sich gleichzeitig durch äußerst kleine Abmessungen auszeichnet. Die in der Fig. 8 dargestellte Anordnung kann entsprechend der dortigen Bemaßung folgende Abmessungen aufweisen: a: 0,4 mm; b: 0,566; c: 0,15 mm; d: 0,24 mm.The concrete arrangement of the passage openings and thus the contact elements 7 in the receptacle 18 takes place in dependence on the function to be achieved with the contact device. In the Fig. 8 a first exemplary arrangement is shown in which a total of nine contact elements 7 in a square arrangement with diagonal orientation of the individual contact elements 7 disclosed. It can be provided via the central contact element 7 (radio frequency) to transmit signals, while the others are connected to ground and serve as a counter-pole. This results in a shielded arrangement of the signal contact element 7, which corresponds functionally to the inner conductor of a conventional Koaxialkontaktelements and is characterized at the same time by extremely small dimensions. The in the Fig. 8 The arrangement shown may have the following dimensions according to the dimensions there: a: 0.4 mm; b: 0.566; c: 0.15 mm; d: 0.24 mm.

Der Signal- und Strompfad zwischen den zwei Kontaktstellen 9 des Kontaktelements 7 wird primär von den beiden Tragabschnitten 8 sowie dem mit dem unteren Tragabschnitt 8 verbundenen Kolben 13 ausgebildet, die sich gegenüber den Federabschnitten 11, 12 durch eine größere Querschnittsfläche und dadurch einen geringeren elektrischen Widerstand auszeichnen. Durch die Berührung der zwei Tragabschnitte 8 bzw. des unteren Tragabschnitts 8 mit dem Kolben 13 im Bereich der Rastverbindungen sowie des Klemmabschnitts 15 ist der Signal- bzw. Strompfad unter Umgehung der Federabschnitte 11, 12 ausgebildet.The signal and current path between the two contact points 9 of the contact element 7 is primarily formed by the two support sections 8 and connected to the lower support section 8 piston 13, which faces the spring sections 11, 12 by a larger cross-sectional area and thus a lower electrical resistance distinguished. By the contact of the two support portions 8 and the lower support portion 8 with the piston 13 in the region of the locking connections and the clamping portion 15 of the signal or current path, bypassing the spring sections 11, 12 is formed.

Die Fig. 9 und 10 zeigen eine zweite Ausführungsform eines erfindungsgemäßen Kontaktelements 7. Dieses umfasst einen relativ steifen Tragabschnitt 8 sowie zwei Federabschnitte 11. Die Federabschnitte 11 umfassen jeweils drei bogenförmig verlaufende Federlaschen 19, von denen die jeweils äußere an ihrem freien Ende abgewinkelt ist. Im Bereich der Abwinkelung bilden die äußeren Federlaschen 19 außenseitig jeweils eine Kontaktstelle 9 aus. Das freie Ende des abgewinkelten Abschnitts bildet zudem jeweils eine Rastnase 14 aus, die in Verbindung mit der Rastnase 14 eines von zwei Rastarmen 20 des Tragabschnitts 8 eine Rastverbindung ausbildet.The FIGS. 9 and 10 show a second embodiment of a contact element according to the invention 7. This comprises a relatively stiff support section 8 and two spring sections 11. The spring sections 11 each comprise three arcuate spring tabs 19, of which the respective outer is angled at its free end. In the region of the bend, the outer spring tabs 19 form on the outside each a contact point 9. The free end of the bent portion also forms in each case a detent 14, which in conjunction with the locking lug 14th one of two locking arms 20 of the support section 8 forms a latching connection.

Der Tragabschnitt 8 bildet auf einer Seite eine Anlagefläche 21 aus, über die sich das Kontaktelement 7 in einer Durchgangsöffnung einer Aufnahme 18 abstützt. Auf der gegenüberliegenden Seite bildet der Tragabschnitt 8 zudem eine Federlasche 22 aus, die in der Durchgangsöffnung unter Vorspannung gegen die benachbarte Öffnungswand druckt und dadurch die Reibung zwischen der Anlagefläche 21 und der Öffnungswand verstärkt. Das Kontaktelement 7 wird dadurch kraftschlüssig in der Durchgangsöffnung gehalten (vgl. Fig. 10).The support portion 8 forms on one side of a contact surface 21, via which the contact element 7 is supported in a through hole of a receptacle 18. On the opposite side of the support portion 8 also forms a spring tab 22 which prints in the passage opening under bias against the adjacent opening wall and thereby increases the friction between the contact surface 21 and the opening wall. The contact element 7 is thereby frictionally held in the passage opening (see. Fig. 10 ).

Die Fig. 9 zeigt das Kontaktelement in der Form, wie es in einem erfindungsgemäßen Verfahren hergestellt wird. In dieser Form sind weder die Rastverbindungen eingerastet, noch kontaktieren die drei Federlaschen 19 der zwei Federabschnitte 11 einander. Ein solcher Kontakt sowie das Einrasten der Rastverbindungen wird durch das Ausüben von Druckkräften auf die beiden Kontaktstellen 9 und eine dadurch erfolgte Deformation der Federabschnitte 11 bewirkt.The Fig. 9 shows the contact element in the mold, as it is produced in a method according to the invention. In this form, neither the locking connections are engaged, nor contact the three spring tabs 19 of the two spring sections 11 each other. Such contact and the engagement of the latching connections is effected by the exertion of compressive forces on the two contact points 9 and a deformation of the spring sections 11 effected thereby.

Das in den Fig. 9 und 10 dargestellte Kontaktelement 7 kann beispielsweise entsprechend der dortigen Bemaßungen folgende Dimensionen aufweisen: a: 1,3 mm; b: 1,0 mm; c: 0,39 mm; d: 0,72 mm. Die (konstante) Stärke des Kontaktelements 7 kann 0,15 mm betragen.That in the FIGS. 9 and 10 Contact element 7 shown, for example, according to the dimensions there have the following dimensions: a: 1.3 mm; b: 1.0 mm; c: 0.39 mm; d: 0.72 mm. The (constant) thickness of the contact element 7 can be 0.15 mm.

Die Fig. 11 zeigt eine mögliche Anordnung eine Mehrzahl der in den Fig. 9 und 10 dargestellten Kontaktelemente 7 in einer Aufnahme 18. Gezeigt ist eine parallele Anordnung in insgesamt fünf Reihen. Dabei ist in der obersten Reihe eine Anordnung für eine symmetrische Signalübertragung (100 Ω Impedanz) gewählt. Somit sind die Kontaktelemente 7 für die Signalübertragung paarweise vorgesehen, wobei sich beidseitig jedes Paars jeweils ein an Masse angeschlossenes Kontaktelement 7 anschließt. In den vier unteren Reihen ist dagegen eine single-ended Signalübertragung (50 Ω Impedanz) vorgesehen, so dass die Signal-Kontaktelemente 7 und die Masse-Kontaktelement 7 abwechselnd angeordnet sind. Die elektrische Isolation aller Signal-Kontaktelemente 7 wird mittels dielektrischer Aufnahmeelemente 23 erreicht, die jeweils ein Signal-Kontaktelement 7 aufnehmen und selbst in eine Aufnahme 18 integriert sind.The Fig. 11 shows a possible arrangement a plurality of in the FIGS. 9 and 10 Shown is a parallel arrangement in a total of five rows. In this case, an arrangement for a symmetrical signal transmission (100 Ω impedance) is selected in the top row. Thus, the contact elements 7 are provided for the signal transmission in pairs, with each connected to ground on each side of each pair of contact element 7. In the four lower rows, however, a single-ended signal transmission (50 Ω impedance) is provided, so that the signal contact elements 7 and the Ground contact element 7 are arranged alternately. The electrical insulation of all signal contact elements 7 is achieved by means of dielectric receiving elements 23, each receiving a signal contact element 7 and are themselves integrated into a receptacle 18.

Die in der Fig. 11 dargestellte Anordnung kann entsprechend der dortigen Bemaßung folgende Abmessungen aufweisen: a: 1,8 mm; b: 0,8 mm; c: 0,15 mm; d: 0,2 mm; e: 1,0 mm; f: 0,5 mm; g: 0,95 mm; h: 1,6 mm.The in the Fig. 11 The arrangement shown may have the following dimensions according to the dimensions there: a: 1.8 mm; b: 0.8 mm; c: 0.15 mm; d: 0.2 mm; e: 1.0 mm; f: 0.5 mm; g: 0.95 mm; h: 1.6 mm.

Selbstverständlich besteht auch die Möglichkeit, das in den Fig. 9 und 10 dargestellte Kontaktelement 7 in der in der Fig. 8 dargestellten Anordnung vorzusehen. Mögliche Dimensionen können dann sein: a: 0,8 mm; b: 1,13 mm; c: 0,43 mm.Of course, there is also the possibility of that in the FIGS. 9 and 10 illustrated contact element 7 in the in the Fig. 8 to provide the arrangement shown. Possible dimensions can then be: a: 0.8 mm; b: 1.13 mm; c: 0.43 mm.

Die Fig. 12 bis 14 zeigen eine solche Anordnung der Kontaktelemente 7 in einer erfindungsgemäßen Board-to-Board-Kontaktvorrichtung 24 zur Verbindung von zwei Leiterplatten 25. Die Fixierung der Verbindung erfolgt dabei über zwei Druckplatten 26 und Verschraubungen 27.The Fig. 12 to 14 Such an arrangement of the contact elements 7 in a board-to-board contact device 24 according to the invention for the connection of two printed circuit boards 25. The connection is fixed via two pressure plates 26 and 27 screwed.

In der Fig. 15 ist eine dritte Ausführungsform eines erfindungsgemäßen Kontaktelements 7 dargestellt. Dieses entspricht weitgehend demjenigen der Fig. 9 und 10, wobei jedoch die zur kraftschlüssigen Fixierung in einer Durchgangsöffnung dienende Federlasche 22 in eine Klemmleiste 28 übergeht. Dadurch kann eine verbesserte Fixierung des Kontaktelements 7 in einer Durchgangsöffnung einer Aufnahme 18 realisiert werden.In the Fig. 15 a third embodiment of a contact element 7 according to the invention is shown. This corresponds largely to that of FIGS. 9 and 10 However, wherein the non-positive fixation in a through hole serving spring tab 22 merges into a terminal block 28. As a result, an improved fixation of the contact element 7 in a passage opening of a receptacle 18 can be realized.

Die Fig. 16 verdeutlicht nochmals die gleichzeitige Herstellung einer Vielzahl erfindungsgemäßer Kontaktelemente 7 in einem Verfahrensdurchgang. Dort ist die in dem erfindungsgemäßen Verfahren hergestellte metallische Struktur dargestellt, die die Kontaktelemente 7, sowie einen die Kontaktelemente 7 über jeweils eine Verbindungsstelle 8 haltenden Rahmen 29 umfasst. Gezeigt sind insgesamt 95 Kontaktelemente 7, die auf einer Fläche mit den Abmessungen 16,1 mm x 9,4 mm erzeugt wurden.The Fig. 16 again illustrates the simultaneous production of a plurality of inventive contact elements 7 in a process passage. There, the metallic structure produced in the method according to the invention is shown, which comprises the contact elements 7, and a frame 29 holding the contact elements 7 via a respective connection point 8. Shown are a total of 95 contact elements 7, which were generated on a surface with the dimensions 16.1 mm x 9.4 mm.

Die Fig. 17 bis 19 zeigen eine vierte Ausführungsform eines erfindungsgemäßen Kontaktelements 7. Dieses entspricht weitgehend (auch hinsichtlich der Abmessungen) der Ausführungsform gemäß den Fig. 1 bis 6. Ein wesentlicher Unterschied ist die Ausgestaltung des unteren Federabschnitts 12, der hier in Form einer gebogen verlaufenden, doppelten Federlasche ausgebildet ist. Die Fig. 17 bis 19 zeigen dieses Kontaktelement 7 in verschiedenen Stellungen. In der Fig. 17 ist das Kontaktelement 7 dargestellt, wie es direkt nach der Herstellung mittels eines erfindungsgemäßen Verfahrens vorliegt. In der Fig. 18 wurde die Rastverbindung bereits eingerastet und dadurch der (Haupt-)Federabschnitt 11 vorgespannt. Dies stellt eine Neutralstellung des für die Nutzung vorbereiteten Kontaktelements 7 dar. In dieser Neutralstellung werden die Kontaktelemente 7 in den Durchgangsöffnung einer Aufnahme 18 einer erfindungsgemäßen Kontaktvorrichtung verbaut, wie dies in den Fig. 20 und 21 dargestellt ist. In der Fig. 19 ist das zusammengeschobene Kontaktelement 9 mit Nutzung des gesamten von dem (Haupt-)Federabschnitt 11 zur Verfügung gestellten Federwegs dargestellt.The 17 to 19 show a fourth embodiment of a contact element according to the invention 7. This corresponds largely (also in terms of dimensions) of the embodiment according to the Fig. 1 to 6 , An essential difference is the design of the lower spring portion 12, which is formed here in the form of a curved, double spring tab. The 17 to 19 show this contact element 7 in different positions. In the Fig. 17 the contact element 7 is shown as it is directly after the preparation by means of a method according to the invention. In the Fig. 18 the locking connection was already engaged and thereby biased the (main) spring section 11. This represents a neutral position of the prepared for use contact element 7. In this neutral position, the contact elements 7 are installed in the through hole of a receptacle 18 of a contact device according to the invention, as shown in the FIGS. 20 and 21 is shown. In the Fig. 19 the pushed-together contact element 9 is shown with use of the total of the (main) spring section 11 provided travel.

Hervorzuheben sind noch die äußerst geringen Federkräfte, die bei der Verformung des/der Federabschnitts/-e 11, 12 erfindungsgemäßer Kontaktelemente 7 erzielbar sind. Beispielsweise kann die Federkraft des in der Neutralstellung vorgespannten (Haupt-)Federabschnitts 11 des in den Fig. 17 bis 21 dargestellten Kontaktelements 7 lediglich ca. 0,04 N und in der vollständig zusammengeschobenen Stellung ca. 0,1 N betragen. Relevant sind die geringen Federkräfte, wenn eine Vielzahl erfindungsgemäßer Kontaktelemente 7 in enger Anordnung in einer erfindungsgemäßen Kontaktvorrichtung kombiniert werden sollen. Dann bleibt auch die Summe dieser Federkräfte und damit die Belastung der elektrisch zu verbindenden Elemente (Leiterplatten) und die gegebenenfalls auf aufzubringenden Steckkräfte zur Verbindung der Elemente vergleichsweise gering.Particularly noteworthy are the extremely low spring forces which can be achieved in the deformation of the / the spring portion / -e 11, 12 inventive contact elements 7. For example, the spring force of the biased in the neutral position (main) spring portion 11 of the in Fig. 17 to 21 shown contact element 7 only about 0.04 N and in the fully collapsed position about 0.1 N. Relevant are the low spring forces when a plurality of inventive contact elements 7 are to be combined in a close arrangement in a contact device according to the invention. Then also the sum of these spring forces and thus the load on the elements to be electrically connected (circuit boards) and possibly applied to the insertion forces for connecting the elements remains relatively low.

Die Fig. 22 zeigt noch eine fünfte Ausführungsform eines erfindungsgemäßen Kontaktelements 7. Besonderheit bei diesem Kontaktelement 7 ist, dass die zwei Tragabschnitte 8 sich nicht direkt berühren, sondern ausschließlich über den (Haupt-)Federabschnitt 11 miteinander verbunden sind. Bei diesem Kontaktelement 7 stellt somit der (Haupt-)Federabschnitt 11 einen Teil des Signal- und Strompfads dar. Die Fixierung des Kontaktelements 7 in einer Durchgangsöffnung einer Aufnahme 18 wird durch zwei federnd gelagerte Klemmabschnitte 31 bewirkt.The Fig. 22 shows a fifth embodiment of a contact element 7 according to the invention special feature in this Contact element 7 is that the two support sections 8 do not touch directly, but are exclusively connected to each other via the (main) spring section 11. In this contact element 7 thus represents the (main) spring portion 11 is a part of the signal and current path. The fixation of the contact element 7 in a through hole of a receptacle 18 is effected by two spring-mounted clamping portions 31.

Claims (11)

  1. Contact element (7) having contact points (9) for the electrically conductive connection of contact regions of mutually spaced elements, wherein said contact element is completely formed of one or more deposited materials, of which at least one is electrically conductive, characterised by a spring section (11, 12) which is elastically deformed when contact is made with the two contact regions, and a snap-lock connection which holds the contact element (7) in a position in which the spring section (11, 12) is partially deformed.
  2. Contact element (7) according to claim 1, characterised in that the spring section (11, 12) is arranged between two rigid supporting sections (8).
  3. Contact element (7) according to one of the preceding claims, characterised in that the spring section (11, 12) is meander-formed in design.
  4. Contact element (7) according to one of the preceding claims, characterised in that the spring section (11, 12) has several coaxially arranged curved spring tabs (19), wherein adjacent spring tabs (19) make contact when contact is made with the two contact regions.
  5. Contact element (7) according to one of the preceding claims, characterised in that, on a further deformation of the spring section (11, 12), the sections forming the snap-lock connection slide against each other.
  6. Contact element (7) according to claims 2, characterised in that the snap-lock connection is formed by the supporting sections (8).
  7. Contact element (7) according to one of the preceding claims, characterised through a signal or current path between the contact points (9) which bypasses the spring section (11, 12).
  8. Method for the manufacture of a contact element (7) according to one of the preceding claims using a LiGA method.
  9. Method according to claim 8, characterised in that, in a LiGA method, a plurality of connected contact elements (7) is created which contact elements are subsequently separated.
  10. Method according to claim 8 or 9 characterised in that the contact element(s) (7) is/are deformed following manufacture and possibly following separation in order to engage the snap-lock connection(s).
  11. Contact device having a mounting (18) which possesses a plurality of through-openings, as well as having several contact elements (7) according to one of the claims 1 to 7, wherein the contact elements (7) are arranged in the through-openings and wherein the sections of said contact elements containing the contact points (9) project beyond the mounting (18).
EP13783859.5A 2012-12-11 2013-10-30 Contact element and method for producing same Active EP2932565B1 (en)

Applications Claiming Priority (2)

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DE102012024185.2A DE102012024185A1 (en) 2012-12-11 2012-12-11 Contact element and method for its production
PCT/EP2013/003276 WO2014090356A1 (en) 2012-12-11 2013-10-30 Contact element and method for producing same

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EP2932565A1 EP2932565A1 (en) 2015-10-21
EP2932565B1 true EP2932565B1 (en) 2016-09-21

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US (1) US9755345B2 (en)
EP (1) EP2932565B1 (en)
JP (1) JP6126236B2 (en)
KR (1) KR101933891B1 (en)
CN (1) CN104838544B (en)
CA (1) CA2887694C (en)
DE (1) DE102012024185A1 (en)
TW (1) TWM484814U (en)
WO (1) WO2014090356A1 (en)

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DE102021130901A1 (en) 2021-11-25 2023-05-25 Vat Holding Ag connecting device

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Publication number Publication date
CA2887694A1 (en) 2014-06-19
JP6126236B2 (en) 2017-05-10
WO2014090356A1 (en) 2014-06-19
KR20150093659A (en) 2015-08-18
JP2016504726A (en) 2016-02-12
DE102012024185A1 (en) 2014-06-12
US9755345B2 (en) 2017-09-05
EP2932565A1 (en) 2015-10-21
TWM484814U (en) 2014-08-21
CN104838544A (en) 2015-08-12
CN104838544B (en) 2017-07-18
CA2887694C (en) 2018-12-04
KR101933891B1 (en) 2019-03-25
US20150280346A1 (en) 2015-10-01

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