EP2929759B1 - Verfahren und steuerungseinrichtung zum betrieb einer plasmaerzeugungseinrichtung - Google Patents

Verfahren und steuerungseinrichtung zum betrieb einer plasmaerzeugungseinrichtung Download PDF

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Publication number
EP2929759B1
EP2929759B1 EP13795530.8A EP13795530A EP2929759B1 EP 2929759 B1 EP2929759 B1 EP 2929759B1 EP 13795530 A EP13795530 A EP 13795530A EP 2929759 B1 EP2929759 B1 EP 2929759B1
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EP
European Patent Office
Prior art keywords
ignition
plasma
voltage
anode
cathode
Prior art date
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Active
Application number
EP13795530.8A
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German (de)
English (en)
French (fr)
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EP2929759A1 (de
Inventor
Florian LIECHTI
Albert FRIEDERY
Hartmut KOSCHNITZKE
René GRÖBER
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Oerlikon Metco AG
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Oerlikon Metco AG
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0081—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature by electric means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/36—Circuit arrangements

Definitions

  • the invention relates to a method for operating a plasma generating device according to the preamble of claim 1 and to a control device for operating a plasma generating device according to the preamble of claim 15.
  • Applicants offer plasma coating systems for substrates in which a plasma is produced in a so-called plasma torch between an anode and a cathode, into which a spray material in powder form is injected.
  • the plasma is formed by the ionization of a gas flowing between the anode and the cathode, which flings the injected powder onto the substrate surface.
  • a plasma torch may be considered as a plasma generating device.
  • a pre-settable number of voltage pulses several thousand volts high and lasting in the millisecond range are applied as an ignition voltage between the anode and the cathode. If the ignition attempt was unsuccessful, another attempt is started.
  • a check is continuously carried out during the ignition process as to whether the ignition of the plasma has taken place.
  • the ignition voltage is increased from an initial ignition voltage and upon detection of a successful ignition of the plasma, the voltage between anode and cathode is reduced to the sustain voltage.
  • the ignition voltage can be designed as a DC voltage, AC voltage of any frequency or as a pulsed DC voltage with arbitrary pulse pause ratio and any pulse shape
  • a control device for operating a plasma generating device which is intended to apply a sustaining voltage between an anode and a cathode, between which a plasma is to be formed, and for igniting the plasma between the anode and the cathode Apply ignition voltage.
  • a control device for operating a plasma generating device which is intended to apply a sustaining voltage between an anode and a cathode, between which a plasma is to be formed, and for igniting the plasma between the anode and the cathode Apply ignition voltage.
  • it is intended to continuously perform a test during the ignition process, whether the ignition of the plasma has occurred, to increase the ignition voltage from an initial ignition voltage and after detection of a successful ignition of the plasma to the voltage between the anode and cathode to the maintenance voltage to reduce.
  • the ignition voltage is applied only as long as necessary for the ignition process and also no unnecessarily high, but only the ignition voltage actually required for the ignition of the plasma is applied.
  • the application of high voltage pulses can lead to damage to the plasma generating device, so for example a plasma torch.
  • Such voltage pulses are when using the inventive method or the inventive control device avoided, so that damage due to voltage pulses are avoided and thus a gentle operation of the plasma generating device is made possible.
  • electromagnetic waves are generated by repetitive voltage pulses, which can interfere with the operation of electronic devices in the vicinity of the plasma generating device sensitive. When using the method according to the invention or the control device according to the invention, repetitive voltage pulses are avoided so that no or at least no disturbing electromagnetic waves are generated.
  • the plasma generating device is designed in particular as a plasma torch of a system for plasma coating of substrates. However, it may also be embodied, for example, as part of an apparatus for arc welding, plasma cutting, high speed flame spraying, flame wire spraying or flame powder spraying. It is also possible to use the plasma generating device for igniting combustion processes.
  • the sustaining voltage is generated in particular by a maintenance voltage source and the ignition voltage from a separate ignition voltage source, both of which are controlled by a controller of the plasma generating device. But it is also possible that only one voltage source is provided, which generates both the maintenance voltage, so also the ignition voltage.
  • the maintenance voltage is applied in particular before or at the same time as the start of the ignition process.
  • a current flowing between the anode and the cathode is measured.
  • a so-called ignition current can be measured, that is, a current that flows on the basis of the ignition voltage.
  • anode and Cathode electrically isolated from each other.
  • a completed ignition of the plasma is detected in particular when the measured current exceeds a definable current threshold.
  • the recognition may still depend on the condition that said current threshold must be exceeded for a definable period of time without interruption.
  • the ignition voltage is no longer increased but rather reduced to the sustain voltage.
  • the reduction takes place in particular abruptly after the detection of the ignition. But it is also possible that the ignition voltage is reduced along a predetermined course.
  • the initial ignition voltage is in particular 0 V, but it can also have a different value.
  • the ignition voltage is increased to ignite the plasma in particular strictly monotonically increasing.
  • the increase takes place, in particular, with a constant gradient, which can be, for example, between 100 V / ms and 10000 V / ⁇ s. But it is also possible that the ignition voltage is increased in other ways, for example, it can be increased gradually.
  • the ignition voltage is applied by an ignitor, which is separated after ignition from the anode and / or cathode.
  • the separation takes place in particular by opening one or two switches, which are arranged between the ignitor and the anode or the cathode.
  • the said switches are in particular also actuated by the mentioned control device of the plasma generating device. Due to the separation of the igniter from the anode and / or the cathode, there can be no disturbing interactions between the ignitor and the other components of the plasma generator.
  • an identification parameter is assigned to the anode-cathode pair used, and the ignition of the plasma is carried out as a function of the identification parameter.
  • the ignition can be tuned to the actual existing anode-cathode pair, so for example matched to the actual existing plasma torch.
  • a tuned initial ignition voltage, a coordinated course of the ignition voltage can be used in the increase and / or the lowering of the maintenance voltage.
  • the identification parameter identifies a plasma torch and may be embodied, for example, as a serial number or serial number of the plasma torch.
  • the identification parameter can in particular be determined automatically, for example, the plasma torch can have its own burner control device in which the identification parameter is stored and can be read out by the control device of the plasma generating device. However, it is also possible for the identification parameter to be entered manually in the control device of the plasma generation device.
  • At least one parameter of the course of the ignition voltage is detected until the ignition of the plasma, stored and evaluated.
  • a so-called end ignition voltage ie the ignition voltage at the time of detection of the ignition is stored.
  • other parameters such as, for example, the slope of the ignition voltage can be stored instead or in addition. From the stored parameters can be drawn conclusions about the state of the plasma generating device.
  • the parameters can be further processed, in particular after storage. For example, averages can be calculated or filtering performed.
  • the named identification parameter is stored together with the mentioned parameter.
  • the stored parameters can, for example, for the described, matched to the actual existing anode-cathode pair implementation of the ignition be used.
  • the identification parameter of the anode-cathode pair used is determined in particular before the ignition of the plasma, and the ignition then takes place as a function of the characteristic variable stored for this anode-cathode pair.
  • a time profile of the stored parameter is evaluated. This is to be understood in particular as meaning that the characteristic quantities ascertained and stored during different ignition processes are compared with one another. From the changes in the parameters can be drawn conclusions about changes in the properties of the plasma generating device.
  • the changes in the parameter are determined in particular in relation to an associated comparative value. For this purpose, it is monitored whether a currently determined characteristic variable deviates from the associated comparison value by a definable measure. If this is the case, for example, it can be concluded that the plasma generator must be checked and, if necessary, parts repaired or replaced. For this purpose, a message can be displayed by the control device of the plasma generating device or an alarm can be triggered.
  • the named measure can be embodied, for example, as a definable absolute limit, for example a voltage limit for the change in the ignition voltage or, for example, as a definable percentage deviation from the associated comparison value.
  • the aforementioned comparison value can be set and stored, for example, for a specific type of plasma generation device.
  • the comparison value can also be determined and stored in particular from stored parameters.
  • This comparison value can be embodied, for example, as the first determined characteristic variable, that is to say, for example, the first ignition voltage required for the ignition of the plasma.
  • a plasma generating device 10 which can be embodied for example as part of a plasma torch of a system for plasma coating substrates, has an anode-cathode pair 11 with an anode 12 and a cathode 13 between which a plasma is to be formed.
  • a gas such as argon, helium, hydrogen, nitrogen, or a mixture thereof, which is ionized upon formation of the plasma, flows between anode 12 and cathode 13.
  • argon or nitrogen is used for the formation of the plasma. Only after ignition, if necessary, other gases are added.
  • the anode 12 and the cathode 13 are electrically connected to both a sustain voltage source 14 and an ignition voltage source 15.
  • the sustain voltage source 14 and the ignition voltage source 15 are driven by a controller 16 of the plasma generating device 10.
  • the anode-cathode pair 11 also has a burner control device 17 in which inter alia an identification parameter in the form of a serial number of the anode-cathode pair 11 is stored.
  • the burner control device 17 is in signal communication with the controller 16, so that the controller 16 can read out said serial number and perform the driving of the sustain voltage source 14 and / or the ignition voltage source 15 depending on the serial number.
  • a first switch 18 and between the ignition voltage source 15 and the cathode 13 a second switch 19 is arranged, by means of which the connections between the anode 12 and the cathode 13 and the ignition voltage source 15 can be interrupted.
  • the switches 18 and 19 are also controlled by the controller 16.
  • Fig. 2 the waveforms of an ignition voltage U z generated by the ignition voltage source 15 and a sustaining voltage U A generated by the sustaining voltage source 14 during ignition of the plasma in the plasma generating device 10 over time are shown, the curves are shown only qualitatively and not to scale.
  • the control device 16 reads out the serial number of the anode-cathode pair 11, that is to say an identification parameter of the anode-cathode pair 11 from the burner control device 17.
  • this information is required in order to adapt the course of the ignition process to the actually present anode-cathode pair 11; on the other hand, a parameter of the course of the ignition voltage U z is detected until the ignition of the plasma has taken place and stored assigned to the serial number.
  • the sustaining voltage source U In preparation for the actual ignition operation, at the time t0, the sustaining voltage source U generates the constant sustaining voltage U A which is applied to the anode-cathode pair 11 and thus between the anode and the cathode.
  • the sustaining voltage U A is, for example, about 100 V.
  • the switches 18 and 19 Provided the switches 18 and 19 are opened are, they are driven at the time t0 so that they close and so the anode-cathode pair 11 is electrically connected to the ignition voltage source 15.
  • the ignition voltage source 15 starting from an initial ignition voltage U ZA of 0 V, starts to generate the ignition voltage U z which, in addition to the sustaining voltage U A, is applied to the anode-cathode pair 11 and thus between the anode and cathode.
  • the ignition voltage U z is increased along a straight line with a constant slope and thus strictly monotonically increasing.
  • the slope used is selected in particular depending on the above-mentioned serial number of the anode-cathode pair 11.
  • a table is stored in the control device 16, in which slopes of the ignition voltage are assigned to the serial numbers.
  • a current flowing via the ignition voltage source 15, a so-called ignition current is measured by means of a current measuring device which is integrated in the ignition voltage source 15 and not separately illustrated.
  • a definable current threshold which may likewise depend on the abovementioned serial number of the anode-cathode pair 11
  • the ignition voltage U z is abruptly reduced to 0 V, so that then between the anode 12 and cathode 13 only the sustaining voltage U A is applied.
  • the switches 18 and 19 are driven so that they open and so the anode-cathode pair 11 is electrically disconnected from the ignition voltage source 15.
  • the end ignition voltage U ZE produced at the time t Z by the ignition voltage source 15 and thus applied between the anode 12 and the cathode 13 is detected by the ignition voltage source 15 and forwarded to the control device 16.
  • the final ignition voltage U ZE is for example between 6 kV and 21 kV. It can be regarded as a parameter of the course of the ignition voltage UZ until ignition of the plasma has taken place.
  • the final ignition voltage UZE is common with the above serial number of the anode-cathode pair 11 stored in the control device 16.
  • the control device 16 evaluates the time profile of the end ignition voltage UZE. For this purpose, the current end ignition voltage UZE is compared with a comparison value. If the actual end ignition voltage UZE deviates by a definable difference value, which can be, for example, between approximately 5 kV and 30 kV, a problem is identified at the current anode-cathode pair 11, for example, excessive wear, and a corresponding one Note on a not separately shown screen of the controller 16 shown.
  • a definable difference value which can be, for example, between approximately 5 kV and 30 kV
  • said reference value may be fixed for a specific type of anode-cathode pair.
  • the comparison value can also be designed as the first end ignition voltage determined after the current anode-cathode pair or the plasma generation device has been put into operation.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
  • Arc Welding Control (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
EP13795530.8A 2012-12-04 2013-11-27 Verfahren und steuerungseinrichtung zum betrieb einer plasmaerzeugungseinrichtung Active EP2929759B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP13795530.8A EP2929759B1 (de) 2012-12-04 2013-11-27 Verfahren und steuerungseinrichtung zum betrieb einer plasmaerzeugungseinrichtung

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP12195367 2012-12-04
PCT/EP2013/074851 WO2014086636A1 (de) 2012-12-04 2013-11-27 Verfahren und steuerungseinrichtung zum betrieb einer plasmaerzeugungseinrichtung
EP13795530.8A EP2929759B1 (de) 2012-12-04 2013-11-27 Verfahren und steuerungseinrichtung zum betrieb einer plasmaerzeugungseinrichtung

Publications (2)

Publication Number Publication Date
EP2929759A1 EP2929759A1 (de) 2015-10-14
EP2929759B1 true EP2929759B1 (de) 2017-08-16

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Country Status (7)

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US (1) US9756713B2 (enrdf_load_stackoverflow)
EP (1) EP2929759B1 (enrdf_load_stackoverflow)
JP (2) JP6807154B2 (enrdf_load_stackoverflow)
CN (1) CN104969665B (enrdf_load_stackoverflow)
CA (1) CA2888299C (enrdf_load_stackoverflow)
ES (1) ES2647851T3 (enrdf_load_stackoverflow)
WO (1) WO2014086636A1 (enrdf_load_stackoverflow)

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US9756713B2 (en) * 2012-12-04 2017-09-05 Oerliken Metco Ag, Wohlen Method and control unit for operating a plasma generation apparatus
US10886104B2 (en) 2019-06-10 2021-01-05 Advanced Energy Industries, Inc. Adaptive plasma ignition
US11398369B2 (en) * 2019-06-25 2022-07-26 Applied Materials, Inc. Method and apparatus for actively tuning a plasma power source
US11688584B2 (en) 2020-04-29 2023-06-27 Advanced Energy Industries, Inc. Programmable ignition profiles for enhanced plasma ignition
JP7671680B2 (ja) * 2021-10-29 2025-05-02 東京エレクトロン株式会社 プラズマ処理方法及びプラズマ処理装置

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Also Published As

Publication number Publication date
EP2929759A1 (de) 2015-10-14
ES2647851T3 (es) 2017-12-26
WO2014086636A1 (de) 2014-06-12
JP2019192647A (ja) 2019-10-31
CN104969665B (zh) 2018-04-13
US9756713B2 (en) 2017-09-05
CA2888299A1 (en) 2014-06-12
JP2016506025A (ja) 2016-02-25
CA2888299C (en) 2021-08-10
US20150319834A1 (en) 2015-11-05
JP6807154B2 (ja) 2021-01-06
CN104969665A (zh) 2015-10-07

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