EP2861946A2 - Capteur et procédé pour déterminer une température - Google Patents

Capteur et procédé pour déterminer une température

Info

Publication number
EP2861946A2
EP2861946A2 EP13739960.6A EP13739960A EP2861946A2 EP 2861946 A2 EP2861946 A2 EP 2861946A2 EP 13739960 A EP13739960 A EP 13739960A EP 2861946 A2 EP2861946 A2 EP 2861946A2
Authority
EP
European Patent Office
Prior art keywords
temperature
sensor
dielectric
voltage
determining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP13739960.6A
Other languages
German (de)
English (en)
Inventor
Dieter GÖTSCH
Richard Matz
Ruth MÄNNER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP2861946A2 publication Critical patent/EP2861946A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/34—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/34—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements
    • G01K7/343—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements the dielectric constant of which is temperature dependant

Definitions

  • the invention relates to a sensor and to a method for determining a temperature.
  • thermocouples of metal or metal oxides application.
  • Such a thermocouple consists of two wires or tracks, which are brought into contact at the hot measuring point by crossing or soldering.
  • thermoelectric voltage can be tapped, which is characteristic of the material pairing and depends on the temperature difference between the hot and cold side of the Thermoe ⁇ element.
  • thermocouples can be easily applied to various surfaces, for example by spray coating, they are subject to several problems. Due to the dependence of the thermal voltage on a temperature difference, a reference temperature must always be provided to enable absolute temperature measurements. Since thermocouples are passive components, the sensitivity, the signal-to-noise ratio and the like. can not be influenced by external control.
  • the object of the present invention is therefore to provide a sensor and a method of the type mentioned at the outset. be provided, which allow a particularly simple, sensitive and reliable measurement of high temperatures.
  • An inventive sensor for determining a temperature comprises a first insulating layer of a first dielectric, which is arranged between a first and a second conductive layer made of a conductive material.
  • a second insulating layer of a second dielectric is disposed between the second and third conductive layers of a conductive material.
  • a capacitive temperature sensor in the form of a two-layer capacitor, which acts as a capacitive AC voltage divider.
  • a ratio of an input AC voltage applied between the first and third conductive layers and an AC output voltage tapped between the second and third conductive layers is determined.
  • the AC output voltage depends only on the capacitances between the first and second and the second and third conductive layers. These capacitances are in turn a function of the permittivities of the dielectrics and thus depend directly on the temperature.
  • thermocouples thus not only a temperature difference, but a direct measure of an absolute temperature is determined. The provision of a reference temperature can therefore be dispensed with, so that a particularly simple and precise measurement of high temperatures is made possible with the sensor and method according to the invention.
  • oxide ceramics for the dielectrics.
  • alumina is used for the first dielectric
  • zirconia is used for the second dielectric.
  • Both oxides are rea ⁇ accordingly temperature-stable and differ greatly in the temperature dependence of their permittivities so that a high accuracy of the temperature measurement can be guaranteed.
  • metal alloys or ceramics may also be temperature stable, such as pending do ⁇ indium tin oxide may be used. All of the mentioned classes of substances are also suitable for resisting the high temperatures which are to be measured.
  • a particularly reliable temperature measurement to be granted afford ⁇ it is convenient to determine the ratio for differing ⁇ che frequencies of the input AC voltage. This improves the measurement accuracy especially in electromagnetic ⁇ table disturbed environments.
  • the temperature can be determined by means of a corresponding characteristic curve, which is specific for a given type of sensor and can be determined in a simple calibration measurement, from the relationship between input and output changeover voltage.
  • An analytical evaluation is also possible if the exact temperature dependence of the permittivities of the two dielectrics is known.
  • FIG. 1 shows a schematic sectional view through an exemplary embodiment of a sensor according to the invention
  • a generally designated 10 Sensor for high temperature measurements includes a first dielectric 12, which is arranged between a first 14 and a second conductive layer 16, and a second dielectric 18, Zvi ⁇ rule of the second and a third conductive layer 20 is disposed.
  • the dielectrics are temperature-resistant oxide ceramics, with the first and second dielectrics differing in the temperature dependence of their permittivities.
  • the conductive layers may consist of metals or metal alloys with appropriately selected melting point or of conductive ceramics, such as doped indium-tin oxide.
  • the sensor 10 thus acts as a capacitive Senditionsstei ⁇ ler.
  • the voltage ratio V2 / V1 depends for a given Sen ⁇ sorgeometrie and AC input voltage Vi from nurello of the capacitances between the first 14 and second conductive layer 16 and between the second 16 and third conductive layer twentieth These capacitances are in turn a function of the permittivities of the dielectrics 12 and 18.
  • alumina have (FIG 2) and zirconia (FIG 3) significantly different permittivities and, moreover, a significantly different temperature ⁇ turbutkeit the permittivity.
  • the figures show ever ⁇ wells the frequency response of the relative permittivity for seven different temperatures.
  • the curves show the behavior from 300K to 900K in 100K increments from bottom to top.
  • FIG 4 illustrates results for any given Fre acid sequence of the AC input voltage Vi a significant temperature dependence of the ratio V2 / V1.
  • a sensor 10 with 1 cm 2 capacitor surface, a first dielectric 12 made of a 106 ym zirconia film and a second dielectric of a 165 ym thick aluminum oxide film was used. It can be clearly seen that the dependence of the voltage ratio on the temperature in the range between 500 and 800 K shows a particularly strong slope. The sensor 10 is thus particularly accurate in this temperature range. Overall, such a sensor 10 is provided which allows the Mes ⁇ solution of absolute temperatures in high temperature ranges. Since the sensitivity can be controlled by increasing the input AC voltage and by selecting the frequency of the AC input voltage, the sensor 10 is particularly suitable for use in environments with strong electromagnetic disturbances.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Thermistors And Varistors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

La présente invention concerne un capteur (10) pour déterminer une température, comprenant une première couche isolante (12) faite d'un premier diélectrique et disposée entre une première (14) et une deuxième couche conductrice (16) faites d'un matériau conducteur, le capteur comprenant également une seconde couche isolante (18) faite d'un second diélectrique et disposée entre la deuxième couche conductrice (16) et une troisième couche conductrice (20) faite d'un matériau conducteur, le premier et le second diélectrique ayant une dépendance à la température de leur permittivité respective, différente. L'invention concerne aussi un procédé pour déterminer une température au moyen d'un tel capteur (10).
EP13739960.6A 2012-08-22 2013-07-12 Capteur et procédé pour déterminer une température Withdrawn EP2861946A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012214922.8A DE102012214922A1 (de) 2012-08-22 2012-08-22 Sensor und Verfahren zum Bestimmen einer Temperatur
PCT/EP2013/064788 WO2014029557A2 (fr) 2012-08-22 2013-07-12 Capteur et procédé pour déterminer une température

Publications (1)

Publication Number Publication Date
EP2861946A2 true EP2861946A2 (fr) 2015-04-22

Family

ID=48856593

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13739960.6A Withdrawn EP2861946A2 (fr) 2012-08-22 2013-07-12 Capteur et procédé pour déterminer une température

Country Status (5)

Country Link
US (1) US20150219504A1 (fr)
EP (1) EP2861946A2 (fr)
CN (1) CN104685330A (fr)
DE (1) DE102012214922A1 (fr)
WO (1) WO2014029557A2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9515243B2 (en) 2014-12-22 2016-12-06 Infineon Technologies Ag Temperature sensor
CN110081995B (zh) * 2019-04-08 2020-01-14 吉林大学 基于蝎子缝感受器的仿生柔性温度传感器及其制备方法
CN112284562A (zh) * 2020-10-23 2021-01-29 许继集团有限公司 一种应用于开关设备的温度测量装置及测量方法
WO2024129845A1 (fr) * 2022-12-16 2024-06-20 Lam Research Corporation Détermination de températures de composant de chambre de traitement

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3210607A (en) * 1961-09-07 1965-10-05 Texas Instruments Inc Ferroelectric capacitor apparatus
US3759104A (en) * 1972-03-09 1973-09-18 M Robinson Capacitance thermometer
US3774089A (en) * 1972-04-18 1973-11-20 Bell & Howell Co Temperature indicating apparatus using oppositely varying capacitors
US4545254A (en) * 1984-06-01 1985-10-08 Ceramphysics, Inc. Materials and methods for pressure and temperature sensors at cryogenic temperatures
DD263821A1 (de) * 1986-07-04 1989-01-11 Akad Wissenschaften Ddr Kapazitives thermometer
US5788376A (en) * 1996-07-01 1998-08-04 General Motors Corporation Temperature sensor
KR100680173B1 (ko) * 2004-09-03 2007-02-08 삼성전자주식회사 용량형 온도센서
US7637656B2 (en) * 2006-04-13 2009-12-29 Radatec, Inc. Temperature measurement using changes in dielectric constant and associated resonance
JP5400560B2 (ja) * 2009-10-16 2014-01-29 アズビル株式会社 静電容量型センサ
FR2985309B1 (fr) * 2012-01-02 2014-01-24 Commissariat Energie Atomique Capteur de temperature capacitif comprenant deux condensateurs en pont diviseur de tension

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2014029557A2 *

Also Published As

Publication number Publication date
CN104685330A (zh) 2015-06-03
DE102012214922A1 (de) 2014-02-27
US20150219504A1 (en) 2015-08-06
WO2014029557A3 (fr) 2014-06-12
WO2014029557A2 (fr) 2014-02-27

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