EP2827314B1 - Vacuum assembly with a vacuum device and method for detecting communicated data in a communication line between a vacuum device and a central control device - Google Patents

Vacuum assembly with a vacuum device and method for detecting communicated data in a communication line between a vacuum device and a central control device Download PDF

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Publication number
EP2827314B1
EP2827314B1 EP14169692.2A EP14169692A EP2827314B1 EP 2827314 B1 EP2827314 B1 EP 2827314B1 EP 14169692 A EP14169692 A EP 14169692A EP 2827314 B1 EP2827314 B1 EP 2827314B1
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EP
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Prior art keywords
vacuum
data
communication line
central control
communication
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German (de)
French (fr)
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EP2827314A1 (en
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Jochen BÖTTCHER
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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    • GPHYSICS
    • G08SIGNALLING
    • G08CTRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C19/00Electric signal transmission systems
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids

Definitions

  • a vacuum arrangement with a vacuum device wherein the vacuum device has a communication module and a control device with a radio module.
  • the technical problem underlying the invention is to provide a vacuum assembly with a vacuum device, with a local control of the vacuum device is possible.
  • an improved method for detecting data communicated in a communication line between a vacuum device and a central control device is provided.
  • the vacuum arrangement according to the invention with a vacuum device, which has a central control device for the vacuum device and a communication line between the vacuum device and the central control device, in which an additional device for detecting the data communicated in the communication line is arranged in and / or on the communication line characterized in that the device has a galvanic connection to the communication line.
  • the device is additionally designed as a data-evaluating and / or data-indicating device. This makes it possible to display the locally recorded data directly, for example, for commissioning or maintenance of the vacuum device. An evaluation of the data may also be useful so that errors can easily be determined during maintenance or commissioning.
  • the device is designed as a device which records the data during an uninterrupted communication between the vacuum device and the central control device.
  • the device in the absence of communication between the central control device and the vacuum device, the device is additionally designed as a data interrogating and / or the vacuum device controlling device.
  • the communication remains off, for example, if the central control device has not yet been connected or configured. Even in case of failure of the central control device communication remains off.
  • the device according to the invention can even intermittently automatically or manually query data in the vacuum device and / or make adjustments to the vacuum device. In this case, the device according to the invention behaves like a normal operating device.
  • connection is designed as a looped-in device
  • the continuous communication line is interrupted and closed again by a detour, that is, the detour line is looped into the continuous line.
  • the communication line can be designed according to the invention as RS485 or Profibus. Due to the symmetrical signal transmission, RS485 is characterized by a high tolerance to electromagnetic interference. Other types of communication lines are also possible.
  • the device can also record the data traffic and / or the data. As a result, the logging possible errors is feasible.
  • the vacuum device is designed as a vacuum pump or as a vacuum measuring means, for example as a measuring tube.
  • the use of a communication between a central control device and vacuum device not interrupting device is advantageous.
  • the inventive method for detecting data communicated in a communication line between a vacuum device and a central control device, in which the data is detected by a device without interrupting the communication between the data device and the central control device, is characterized in that the data from the Communication line contactless, preferably inductive or capacitive detected without separation of a bus cable.
  • the method according to the invention has the advantage that the communication between the central control device and the vacuum device can continue unhindered and still the data is recorded locally without interrupting the communication.
  • This data can be additionally evaluated or displayed, for example.
  • This method can be advantageously used in particular during the start-up or maintenance of a vacuum device, since in this case only the required, that is desired data, the anyway between the central control device and the vacuum device by means of the communication line be communicated by the device and displayed or evaluated as needed.
  • the data is detected via a non-galvanic connection.
  • This embodiment has the advantage that no additional connectors are necessary.
  • the coupling is possible at any suitable location without interference with the communication line and it is also the greatest non-reaction achievable.
  • the data of the communication line are preferably detected inductively or capacitively.
  • the communication line used is preferably an RS485 standard or a Profibus. Other types of communication line are also possible according to the invention.
  • the device can change the communicated data during the communication between the vacuum device and the central control device. If the device is suitably connected, the device can influence the ongoing communication, for example filtering telegrams, supplementing or changing data contents with information. A recording of the data traffic and / or the data is also conceivable and advantageous for logging the processes over a shorter or longer period of time.
  • a further advantageous embodiment of the invention provides that a vacuum pump or a vacuum measuring means, for example a measuring tube, is used as the vacuum device.
  • the method according to the invention can be used particularly advantageously with these devices.
  • the vacuum arrangement according to the invention as well as the method according to the invention is limited to vacuum applications.
  • the method and the vacuum arrangement have the advantage over the prior art that they make compact and inexpensive designs for advantageous use in commissioning and in the operation of vacuum systems and vacuum applications possible.
  • the vacuum arrangement with a vacuum device and the device for detecting the data communicated in the communication line can, as already stated, have a display.
  • This display can be designed, for example, in the form of indicators, character-based, graphical or mixed displays, as acoustic transmitters, as digital or analogue outputs and / or as relays.
  • the influence of the vacuum arrangement according to the invention on the display or the operation can be formed, for example, by automatically scrolling through all the relevant values by manual selection by means of keys and / or by changing the operating mode.
  • the vacuum arrangement according to the invention as well as the method according to the invention allow a local and non-reactive detection of data in vacuum systems, that is in vacuum arrangements with a vacuum device. These local and non-reactive data can also be evaluated and displayed locally and without feedback.
  • Fig. 1 shows a vacuum arrangement according to the invention.
  • a vacuum device 1 is connected.
  • it is a vacuum pump 1a with flanged control electronics 1b.
  • the control electronics 1b can optionally be flanged or spatially separated and connected via a cable to the vacuum pump 1a.
  • the vacuum device 1 can also be a controllable valve, a measuring tube or the like.
  • the vacuum device 1 has a communication module 2, which is arranged directly on the control electronics 1b in the example shown. However, it may also be separate from this, for example in an adjacent control cabinet, and then communicate with the vacuum device 1 via a cable.
  • the control electronics 2 is connected via a communication line 7 to a central control device 5.
  • a communication line 7 to a central control device 5.
  • central control device 5 further vacuum devices (not shown) via other communication lines (also not shown) may be connected.
  • a device 4 is coupled to the communication line 7.
  • the device 4 acquires data that is exchanged in the communication line 7 between the vacuum device 1 and the central control device 5. The detection takes place without the Communication between the vacuum device 1 and the central control device 5 is interrupted.
  • the device 4 detects the data communicated in the communication line 7 either temporarily or permanently.
  • the device 4 detects the essential parameters such as speed, pressure, power, temperature, software version and the like.
  • the device 4 may also send control data such as setting commands sent to the vacuum device, such as "on / off", “accelerate” and the like, namely, when the communication from the central controller 5 is absent. This may be the case if the central controller fails or is not yet connected or configured.
  • the device 4 can also automatically or manually query data in the communication module 2 and, as already stated, optionally make settings. In this case, the device 4 behaves like a normal operating device. As soon as the communication with the central control device 5 starts, no active participation in the communication takes place, that is, no messages are filtered by the device 4, data contents are supplemented or changed by information, but only the data communicated in the communication line 7 are detected , observed and / or evaluated.
  • Fig. 2 shows the communication line 7, to which the device 4 is connected by means of a coupling 3, which is designed as a non-galvanic coupling 6.
  • a coupling 3 which is designed as a non-galvanic coupling 6.
  • the non-galvanic coupling 6 no additional connectors are necessary.
  • the connection is possible at any suitable point of the communication line 7. As a result, the greatest freedom from reaction is achieved.
  • Fig. 3 is the device 4 via the coupling 3, which is designed as a galvanic coupling 9, connected to the communication line 7.
  • the galvanic coupling 9 means that another analog subscriber is connected to the communication line 7.
  • This variant has the advantage that the coupling takes place by means of simple components.
  • Fig. 4 shows a further embodiment in which the device 4 is looped by means of a 2-port coupling 10 in the communication line 7. With this embodiment, a filtering and processing of the data traffic is possible.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Description

Die Erfindung betrifft eine Vakuumanordnung mit einem Vakuumgerät sowie ein Verfahren zur Erfassung von in einer Kommunikationsleitung zwischen einem Vakuumgerät und einer zentralen Steuereinrichtung kommunizierten Daten.The invention relates to a vacuum arrangement with a vacuum device and to a method for detecting data communicated in a communication line between a vacuum device and a central control device.

Aus dem Stand der Technik ( DE 10 2006 045 024 A1 ) ist eine Vakuumanordnung mit einem Vakuumgerät bekannt, wobei das Vakuumgerät ein Kommunikationsmodul aufweist sowie ein Kontrollgerät mit einem Funkmodul.From the prior art ( DE 10 2006 045 024 A1 ), a vacuum arrangement with a vacuum device is known, wherein the vacuum device has a communication module and a control device with a radio module.

Derartige Vakuumgeräte, die mit einer zentralen Steuereinrichtung mittels einer Kommunikationsleitung verbunden sind, weisen den Nachteil auf, dass zum Beispiel bei einer Wartung des Vakuumgerätes keine lokalen Daten abrufbar sind.Such vacuum devices, which are connected to a central control device by means of a communication line, have the disadvantage that, for example, during a maintenance of the vacuum device no local data can be retrieved.

Insbesondere bei der Inbetriebnahme oder zu Wartungszwecken ist es häufig erwünscht, eine lokale Kontrolle wesentlicher Parameter durchführen zu können. Hierzu ist es gemäß dem Stand der Technik erforderlich, die Kommunikation mit der zentralen Steuerung zu unterbrechen, um lokal ein Anzeigegerät anzuschließen.In particular, during commissioning or for maintenance purposes, it is often desirable to be able to carry out a local control of essential parameters. For this purpose, according to the prior art, it is necessary to interrupt the communication with the central controller in order to connect a display device locally.

Zum Stand der Technik ( US 2003/00141610 A1 ) gehört ein Vakuumsystem, bei dem Statusinformationen an einen Server geleitet werden. Die Daten von den Vakuumgeräten werden über einen HUB und Ethernet-Leitung ober über das Internet an den Server geleitet.The prior art ( US 2003/00141610 A1 ) includes a vacuum system that sends status information to a server. The data from the vacuum devices are routed to the server via a HUB and Ethernet line via the Internet.

Die Daten, die von den Vakuumgeräten an den Server geleitet werden, werden sämtlichst über den HUB geleitet. An den HUB greift ein "warmspare"-Server an. Diese zum Stand der Technik gehörende Vorrichtung weist den Nachteil auf, dass ein HUB, in dem sämtliche Kommunikationsleitungen sternförmig zusammenlaufen, erforderlich ist.The data sent from the vacuum devices to the server are all routed through the HUB. At the HUB attacks a "warm spare" server. This belonging to the prior art device has the disadvantage that a HUB, in which all communication lines converge star-shaped, is required.

Weiterhin gehört zum Stand der Technik ( EP 1 903 530 A2 ) eine Anordnung mit einem Vakuumgerät und Verfahren zu deren Betrieb. Gemäß diesem Stand der Technik ist eine Verwaltungseinheit vorgesehen, die Daten empfängt und sendet, die zwischen verschiedenen Vakuumgeräten und einer Steuereinheit ausgetauscht werden. Der Austausch der Daten der Verwaltungseinheit mit den Vakuumgeräten dient dem Zweck, dass die Verwaltungseinheit auf einen Befehl an das Vakuumgerät hin von dem Vakuumgerät dessen Konfigurationsdaten erhält. Das Vakuumgerät kann anschließend, beispielsweise bei einem Defekt ausgetauscht werden und die Verwaltungseinheit konfiguriert das neue Vakuumgerät analog zu dem ersetzten Vakuumgerät, wodurch der Aufwand beim Austausch eines Vakuumgerätes deutlich minimiert wird.Furthermore belongs to the state of the art ( EP 1 903 530 A2 ) An arrangement with a vacuum device and method for its operation. According to this prior art, a management unit is provided which receives and transmits data exchanged between different vacuum devices and a control unit. The exchange of data of the administrative unit with the vacuum devices serves the purpose that the administrative unit to a command the vacuum device from the vacuum device whose configuration data receives. The vacuum device can then be replaced, for example in the event of a defect, and the administrative unit configures the new vacuum device analogously to the replaced vacuum device, whereby the outlay for replacing a vacuum device is significantly minimized.

Das der Erfindung zugrunde liegende technische Problem besteht darin, eine Vakuumanordnung mit einem Vakuumgerät anzugeben, mit der eine lokale Kontrolle des Vakuumgerätes möglich ist. Darüber hinaus soll ein verbessertes Verfahren zur Erfassung von in einer Kommunikationsleitung zwischen einem Vakuumgerät und einer zentralen Steuereinrichtung kommunizierten Daten angegeben werden.The technical problem underlying the invention is to provide a vacuum assembly with a vacuum device, with a local control of the vacuum device is possible. In addition, an improved method for detecting data communicated in a communication line between a vacuum device and a central control device is provided.

Dieses technische Problem wird durch eine Vakuumanordnung mit den Merkmalen gemäß Anspruch 1 sowie durch ein Verfahren mit den Merkmalen gemäß Anspruch 14 gelöst.This technical problem is solved by a vacuum arrangement having the features according to claim 1 and by a method having the features according to claim 14.

Die erfindungsgemäße Vakuumanordnung mit einem Vakuumgerät, welche eine zentrale Steuereinrichtung für das Vakuumgerät und eine Kommunikationsleitung zwischen dem Vakuumgerät und der zentralen Steuereinrichtung aufweist, bei dem in und/oder an der Kommunikationsleitung eine zusätzliche Vorrichtung zum Erfassen der in der Kommunikationsleitung kommunizierten Daten angeordnet ist, zeichnet sich dadurch aus, dass die Vorrichtung einen galvanischen Anschluss an die Kommunikationsleitung aufweist.The vacuum arrangement according to the invention with a vacuum device, which has a central control device for the vacuum device and a communication line between the vacuum device and the central control device, in which an additional device for detecting the data communicated in the communication line is arranged in and / or on the communication line characterized in that the device has a galvanic connection to the communication line.

Unter Vakuumanordnung im Sinne der vorliegenden Erfindung wird eine Anordnung mit einem Vakuumgerät verstanden, die zusätzlich eine zentrale Steuereinrichtung für das Vakuumgerät aufweist. Zu der Vakuumanordnung gehört auch eine Kommunikationsleitung zwischen dem Vakuumgerät und der zentralen Steuereinrichtung.Under vacuum arrangement in the context of the present invention, an arrangement with a vacuum device is understood, which additionally has a central control device for the vacuum device. The vacuum arrangement also includes a communication line between the vacuum device and the central control device.

Die zusätzliche Vorrichtung, die in und/oder an der Kommunikationsleitung zum Erfassen der in der Kommunikationsleitung kommunizierten Daten angeordnet ist, erlaubt die Erfassung der lokalen Daten des entsprechenden Vakuumgerätes, so dass die wesentlichen Parameter, wie zum Beispiel Drehzahl, Druck, Leistung, Softwarestand, Temperatur und dergleichen abgefragt werden können. Diese Erfassung ist insbesondere bei der Inbetriebnahme oder zu Wartungszwecken vorteilhaft, um die lokale Kontrolle des Vakuumgerätes zu erzielen.The additional device, which is arranged in and / or on the communication line for detecting the data communicated in the communication line, allows the detection of the local data of the corresponding vacuum device, so that the essential parameters, such as speed, pressure, power, software version, Temperature and the like can be queried. This detection is particularly advantageous during commissioning or for maintenance purposes to achieve local control of the vacuum device.

Gemäß der Erfindung erfolgt der Anschluss in oder an der Kommunikationsleitung galvanisch. Hierbei erfolgt ein direkter Anschluss an die Kommunikationsleitung, wodurch einfache Komponenten verwendbar sind oder eine Filterung und Bearbeitung des Datenverkehrs möglich ist.According to the invention, the connection takes place galvanically in or on the communication line. In this case, a direct connection to the communication line, whereby simple components can be used or a filtering and processing of the data traffic is possible.

Gemäß einer vorteilhaften Weiterbildung der Erfindung ist die Vorrichtung zusätzlich als eine Daten auswertende und/oder Daten anzeigende Vorrichtung ausgebildet. Hierdurch ist es möglich, die lokal erfassten Daten unmittelbar anzuzeigen, beispielsweise für die Inbetriebnahme oder Wartung des Vakuumgerätes. Eine Auswertung der Daten kann ebenfalls sinnvoll sein, damit bei der Wartung oder Inbetriebnahme Fehler leicht ermittelt werden können.According to an advantageous development of the invention, the device is additionally designed as a data-evaluating and / or data-indicating device. This makes it possible to display the locally recorded data directly, for example, for commissioning or maintenance of the vacuum device. An evaluation of the data may also be useful so that errors can easily be determined during maintenance or commissioning.

Gemäß einer besonders bevorzugten Ausführungsform der Erfindung ist die Vorrichtung als eine die Daten während einer unterbrechungsfreien Kommunikation zwischen dem Vakuumgerät und der zentralen Steuereinrichtung erfassende Vorrichtung ausgebildet.According to a particularly preferred embodiment of the invention, the device is designed as a device which records the data during an uninterrupted communication between the vacuum device and the central control device.

Die Erfindung wird gemäß dieser Ausführungsform zeitweise oder dauerhaft in und/oder an der Kommunikationsleitung zwischen dem Vakuumgerät und der zentralen Steuerung angeordnet. Die Vorrichtung liest die vorbeikommenden Daten mit. Es kann eine Auswahl getroffen werden, welche der Daten in der Vorrichtung lokal angezeigt werden sollen.The invention according to this embodiment temporarily or permanently in and / or on the communication line arranged between the vacuum device and the central controller. The device reads the passing data. A selection can be made as to which of the data in the device should be displayed locally.

Der besondere Vorteil dieser Ausführungsform liegt darin, dass die Kommunikation zwischen dem Vakuumgerät und der zentralen Steuereinrichtung nicht unterbrochen wird, sondern dass diese unbeeinflusst weiter durchgeführt wird und dass die Vorrichtung gemäß der Erfindung sämtliche oder nur ausgewählte, in der Kommunikationsleitung kommunizierten Daten erfasst und nach den Wünschen des Benutzers weiter verarbeitet, das heißt auswertet und/oder anzeigt.The particular advantage of this embodiment is that the communication between the vacuum device and the central control device is not interrupted, but that this is carried out unaffected further and that the device according to the invention detects all or only selected, communicated in the communication line data and after the Desires of the user further processed, that is evaluates and / or displays.

Gemäß einer weiteren vorteilhaften Ausführungsform der Erfindung ist vorgesehen, dass bei ausbleibender Kommunikation zwischen der zentralen Steuereinrichtung und dem Vakuumgerät die Vorrichtung zusätzlich als eine Daten abfragende und/oder das Vakuumgerät steuernde Vorrichtung ausgebildet ist. Die Kommunikation bleibt beispielsweise aus, wenn die zentrale Steuerungseinrichtung noch nicht angeschlossen oder projektiert ist. Auch bei einem Ausfall der zentralen Steuereinrichtung bleibt die Kommunikation aus. In diesem Fall der ausbleibenden Kommunikation kann die erfindungsgemäße Vorrichtung selbst zeitweise automatisch oder manuell Daten bei dem Vakuumgerät abfragen und/oder Einstellungen an dem Vakuumgerät vornehmen. In diesem Fall verhält sich die erfindungsgemäße Vorrichtung wie ein normales Bediengerät. Sobald die Kommunikation mit der zentralen Steuerung einsetzt, was abhängig von der Topologie - in oder an der Kommunikationsleitung - durch direkten Empfang oder Beurteilung der Signalqualität erfolgen kann, erfolgt keine aktive Teilnahme mehr an der Kommunikation, das heißt, es werden von der erfindungsgemäßen Vorrichtung keine Telegramme mehr gesendet, sondern nur wie gemäß der Hauptausführungsform der Erfindung vorgesehen, die vorbeikommenden Daten beobachtet und/oder ausgewertet. Das bedeutet, dass die Vorrichtung ausschließlich bei ausbleibender Kommunikation zwischen dem Vakuumgerät und der zentralen Steuereinrichtung selbst aktiv Daten bei dem Vakuumgerät abfragt und/oder Einstellungen an dem Vakuumgerät vornimmt.According to a further advantageous embodiment of the invention, it is provided that in the absence of communication between the central control device and the vacuum device, the device is additionally designed as a data interrogating and / or the vacuum device controlling device. The communication remains off, for example, if the central control device has not yet been connected or configured. Even in case of failure of the central control device communication remains off. In this case, the lack of communication, the device according to the invention can even intermittently automatically or manually query data in the vacuum device and / or make adjustments to the vacuum device. In this case, the device according to the invention behaves like a normal operating device. As soon as the communication with the central control starts, which can take place depending on the topology - in or on the communication line - by direct reception or assessment of the signal quality, there is no active participation in the communication, that is, there are no devices of the invention Telegrams sent more, but only as according to the main embodiment provided the invention, watching the passing data and / or evaluated. This means that the device only actively interrogates data in the vacuum device and / or makes adjustments to the vacuum device exclusively in the absence of communication between the vacuum device and the central control device itself.

Gemäß einer vorteilhaften Ausführungsform der Erfindung ist entweder ein zusätzlicher Teilnehmer (ein Anschluss) oder eine eingeschleifte Vorrichtung (zwei unabhängige Ports) vorgesehen.According to an advantageous embodiment of the invention, either an additional subscriber (a connection) or a looped-in device (two independent ports) is provided.

Ist der Anschluss als eingeschleifte Vorrichtung ausgebildet, wird die durchgehende Kommunikationsleitung unterbrochen und durch einen Umweg wieder geschlossen, das heißt, die Umwegleitung wird in die durchgehende Leitung eingeschleift.If the connection is designed as a looped-in device, the continuous communication line is interrupted and closed again by a detour, that is, the detour line is looped into the continuous line.

Es besteht auch die Möglichkeit, andere galvanische Anschlüsse vorzusehen.It is also possible to provide other galvanic connections.

Die Kommunikationsleitung kann gemäß der Erfindung als RS485 oder als Profibus ausgebildet sein. Aufgrund der symmetrischen Signalübertragung ist RS485 durch eine hohe Toleranz gegenüber elektromagnetischen Störungen gekennzeichnet. Andere Arten von Kommunikationsleitungen sind ebenfalls möglich.The communication line can be designed according to the invention as RS485 or Profibus. Due to the symmetrical signal transmission, RS485 is characterized by a high tolerance to electromagnetic interference. Other types of communication lines are also possible.

Die Vorrichtung gemäß der Erfindung kann gemäß einer weiteren Ausführungsform der Erfindung als eine die kommunizierten Daten ändernde Vorrichtung ausgebildet sein. Die Vorrichtung kann also bei geeigneter Anschaltung auch die laufende Kommunikation beeinflussen, zum Beispiel Telegramme filtern, Dateninhalte um Informationen ergänzen oder ändern.The device according to the invention can be designed according to a further embodiment of the invention as a device changing the data communicated. The device can therefore also influence the current communication, for example, filtering telegrams, supplementing or modifying data contents with information if the connection is suitable.

Gemäß einer weiteren vorteilhaften Ausführungsform kann die Vorrichtung auch den Datenverkehr und/oder die Daten aufzeichnen. Hierdurch ist die Protokollierung möglicher Fehler durchführbar.According to a further advantageous embodiment, the device can also record the data traffic and / or the data. As a result, the logging possible errors is feasible.

Vorteilhaft weist die Vorrichtung Bedienelemente und/oder eine optische Anzeigevorrichtung und/oder eine akustische Anzeigevorrichtung auf. Im einfachsten Fall können Indikatoren, zum Beispiel LED's zur Anzeige von Daten oder Betriebszuständen vorgesehen sein. Zusätzlich können Bedienelemente wie Taster oder Schalter vorgesehen sein, um beispielsweise einen Betriebsmodus oder die anzuzeigenden Daten zu wählen. Darüber hinaus können auch Displays zur Anzeige von Zeichen oder Grafiken Verwendung finden bis hin zum reinen Betriebsmodus in üblichen Bedien- und Anzeigegeräten. Es ist auch möglich, gemäß einer weiteren Ausführungsform der Erfindung, akustische Signale vorzusehen, zum Beispiel zur Warnung bei Überschreitung voreingestellter Werte.The device advantageously has operating elements and / or a visual display device and / or an acoustic display device. In the simplest case, indicators, for example LEDs for displaying data or operating states can be provided. In addition, controls such as buttons or switches may be provided to select, for example, an operating mode or the data to be displayed. In addition, displays can also be used to display characters or graphics to the pure operating mode in usual operating and display devices. It is also possible, according to a further embodiment of the invention, to provide acoustic signals, for example to warn when exceeding preset values.

Gemäß einer besonders bevorzugten Ausführungsform der Erfindung ist das Vakuumgerät als Vakuumpumpe oder als Vakuummessmittel, beispielsweise als Messröhre, ausgebildet. Insbesondere bei diesen Geräten ist der Einsatz einer eine Kommunikation zwischen zentraler Steuereinrichtung und Vakuumgerät nicht unterbrechenden Vorrichtung von Vorteil.According to a particularly preferred embodiment of the invention, the vacuum device is designed as a vacuum pump or as a vacuum measuring means, for example as a measuring tube. In particular, in these devices, the use of a communication between a central control device and vacuum device not interrupting device is advantageous.

Das erfindungsgemäße Verfahren zur Erfassung von in einer Kommunikationsleitung zwischen einem Vakuumgerät und einer zentralen Steuereinrichtung kommunizierten Daten, bei dem die Daten ohne Unterbrechung der Kommunikation zwischen dem Datengerät und der zentralen Steuereinrichtung von einer Vorrichtung erfasst werden, zeichnet sich dadurch aus, dass die Daten aus der Kommunikationsleitung kontaktlos, vorzugsweise induktiv oder kapazitiv erfasst werden ohne Auftrennung eines Buskabels.The inventive method for detecting data communicated in a communication line between a vacuum device and a central control device, in which the data is detected by a device without interrupting the communication between the data device and the central control device, is characterized in that the data from the Communication line contactless, preferably inductive or capacitive detected without separation of a bus cable.

Das erfindungsgemäße Verfahren weist den Vorteil auf, dass die Kommunikation zwischen der zentralen Steuereinrichtung und dem Vakuumgerät ungehindert weiter fortgeführt werden kann und trotzdem die Daten ohne Unterbrechung der Kommunikation lokal erfasst werden. Diese Daten können zum Beispiel zusätzlich ausgewertet oder angezeigt werden. Dieses Verfahren ist insbesondere bei der Inbetriebnahme oder Wartung eines Vakuumgerätes vorteilhaft einsetzbar, da in diesem Fall lediglich die erforderlichen, das heißt gewünschten Daten, die ohnehin zwischen der zentralen Steuerungseinrichtung und dem Vakuumgerät mittels der Kommunikationsleitung kommuniziert werden, von der Vorrichtung erfasst und bei Bedarf angezeigt oder ausgewertet werden.The method according to the invention has the advantage that the communication between the central control device and the vacuum device can continue unhindered and still the data is recorded locally without interrupting the communication. This data can be additionally evaluated or displayed, for example. This method can be advantageously used in particular during the start-up or maintenance of a vacuum device, since in this case only the required, that is desired data, the anyway between the central control device and the vacuum device by means of the communication line be communicated by the device and displayed or evaluated as needed.

Damit ist es möglich, ein Vakuumgerät lokal in Betrieb zu nehmen oder zu warten.This makes it possible to locally commission or maintain a vacuum device.

Sollte die Kommunikation zwischen Vakuumgerät und der zentralen Steuereinrichtung ausbleiben, ist es möglich, dass die Vorrichtung ausschließlich bei ausbleibender Kommunikation automatisch oder manuell Daten des Vakuumgerätes abfragt und/oder das Vakuumgerät steuert. Die Kommunikation kann ausbleiben, wenn eine zentrale Steuereinrichtung noch nicht angeschlossen oder projektiert ist, oder wenn die zentrale Steuereinrichtung einen Fehler aufweist. In diesem Fall ist es möglich, dass die Vorrichtung Aufgaben der zentralen Steuereinrichtung übernimmt, um das Vakuumgerät zu steuern.If the communication between the vacuum device and the central control device does not occur, it is possible that the device only automatically or manually interrogates data of the vacuum device and / or controls the vacuum device exclusively in the absence of communication. The communication can be omitted if a central control device is not yet connected or configured, or if the central control device has an error. In this case, it is possible for the device to perform tasks of the central controller to control the vacuum device.

Gemäß der Erfindung werden die Daten über einen nicht-galvanischen Anschluss erfasst. Das bedeutet, dass eine galvanische Trennung zwischen der Erfassungsvorrichtung und der Kommunikationsleitung vorliegt. Diese Ausführungsform weist den Vorteil auf, dass keine zusätzlichen Steckverbinder notwendig sind. Die Ankopplung ist an jeder geeigneten Stelle ohne Eingriff in die Kommunikationsleitung möglich und es ist darüber hinaus die größte Rückwirkungsfreiheit erzielbar. In diesem Fall werden die Daten der Kommunikationsleitung vorzugsweise induktiv oder kapazitiv erfasst.According to the invention, the data is detected via a non-galvanic connection. This means that there is a galvanic isolation between the detection device and the communication line. This embodiment has the advantage that no additional connectors are necessary. The coupling is possible at any suitable location without interference with the communication line and it is also the greatest non-reaction achievable. In this case, the data of the communication line are preferably detected inductively or capacitively.

Diese Erfassungsarten haben sich als vorteilhaft wegen der zuverlässigen Arbeitsweise herausgestellt.These types of detection have proven to be advantageous because of the reliable operation.

Als Kommunikationsleitung wird vorzugsweise ein RS485-Standard oder ein Profibus verwendet. Andere Arten der Kommunikationsleitung sind gemäß der Erfindung auch möglich.The communication line used is preferably an RS485 standard or a Profibus. Other types of communication line are also possible according to the invention.

Gemäß einer weiteren vorteilhaften Ausführungsform der Erfindung kann die Vorrichtung die kommunizierten Daten während der Kommunikation zwischen dem Vakuumgerät und der zentralen Steuereinrichtung verändern. Bei geeigneter Anschaltung der Vorrichtung kann die Vorrichtung die laufende Kommunikation beeinflussen, zum Beispiel Telegramme filtern, Dateninhalte um Informationen ergänzen oder ändern. Eine Aufzeichnung des Datenverkehrs und/oder der Daten ist ebenfalls denkbar und vorteilhaft, um die Abläufe über einen kürzeren oder längeren Zeitraum zu protokollieren.According to a further advantageous embodiment of the invention, the device can change the communicated data during the communication between the vacuum device and the central control device. If the device is suitably connected, the device can influence the ongoing communication, for example filtering telegrams, supplementing or changing data contents with information. A recording of the data traffic and / or the data is also conceivable and advantageous for logging the processes over a shorter or longer period of time.

Eine weitere vorteilhafte Ausführungsform der Erfindung sieht vor, dass als Vakuumgerät eine Vakuumpumpe oder ein Vakuummessmittel, beispielsweise eine Messröhre verwendet wird. Das erfindungsgemäße Verfahren ist bei diesen Geräten besonders vorteilhaft einsetzbar.A further advantageous embodiment of the invention provides that a vacuum pump or a vacuum measuring means, for example a measuring tube, is used as the vacuum device. The method according to the invention can be used particularly advantageously with these devices.

Die erfindungsgemäße Vakuumanordnung wie auch das erfindungsgemäße Verfahren ist auf Vakuumanwendungen beschränkt. Das Verfahren und die Vakuumanordnung weisen den Vorteil gegenüber dem Stand der Technik auf, dass sie kompakte und günstige Bauformen zum vorteilhaften Einsatz bei Inbetriebnahme und bei dem Betrieb von Vakuumanlagen und Vakuumanwendungen möglich machen.The vacuum arrangement according to the invention as well as the method according to the invention is limited to vacuum applications. The method and the vacuum arrangement have the advantage over the prior art that they make compact and inexpensive designs for advantageous use in commissioning and in the operation of vacuum systems and vacuum applications possible.

Die Vakuumanordnung mit einem Vakuumgerät und der Vorrichtung zum Erfassen der in der Kommunikationsleitung kommunizierten Daten kann, wie schon ausgeführt, eine Anzeige aufweisen. Diese Anzeige kann beispielsweise in Form von Indikatoren, zeichenbasierten, grafischen oder gemischten Displays, als akustische Geber, als digitale oder analoge Ausgänge und/oder als Relais ausgebildet sein.The vacuum arrangement with a vacuum device and the device for detecting the data communicated in the communication line can, as already stated, have a display. This display can be designed, for example, in the form of indicators, character-based, graphical or mixed displays, as acoustic transmitters, as digital or analogue outputs and / or as relays.

Die Einflussnahme der erfindungsgemäßen Vakuumanordnung auf die Anzeige oder die Bedienung kann beispielsweise durch automatisches Durchrollen aller relevanten Werte durch eine manuelle Auswahl durch Tasten und/oder durch Änderung der Betriebsart ausgebildet sein.The influence of the vacuum arrangement according to the invention on the display or the operation can be formed, for example, by automatically scrolling through all the relevant values by manual selection by means of keys and / or by changing the operating mode.

Die erfindungsgemäße Vakuumanordnung wie auch das erfindungsgemäße Verfahren erlauben eine lokale und rückwirkungsfreie Erfassung von Daten in Vakuumanlagen, das heißt in Vakuumanordnungen mit einem Vakuumgerät. Diese lokal und rückwirkungsfrei erfassten Daten können ebenfalls lokal und rückwirkungsfrei ausgewertet und angezeigt werden.The vacuum arrangement according to the invention as well as the method according to the invention allow a local and non-reactive detection of data in vacuum systems, that is in vacuum arrangements with a vacuum device. These local and non-reactive data can also be evaluated and displayed locally and without feedback.

Weitere Merkmale und Vorteile der Erfindung ergeben sich anhand der zugehörigen Zeichnung, in der mehrere Ausführungsbeispiele einer erfindungsgemäßen Vakuumanordnung nur beispielhaft dargestellt sind. In der Zeichnung zeigen:

Fig. 1
eine schematische Darstellung einer erfindungsgemäßen Vakuumanordnung;
Fig. 2
eine schematische Darstellung einer nichtgalvanischen Ankopplung an die Kommunikationsleitung;
Fig. 3
eine schematische Darstellung einer galvanischen Ankopplung an einer Kommunikationsleitung;
Fig. 4
eine schematische Darstellung einer 2-PortAnkopplung.
Further features and advantages of the invention will become apparent from the accompanying drawings, in which several embodiments of a vacuum arrangement according to the invention are shown by way of example only. In the drawing show:
Fig. 1
a schematic representation of a vacuum arrangement according to the invention;
Fig. 2
a schematic representation of a non-galvanic coupling to the communication line;
Fig. 3
a schematic representation of a galvanic coupling to a communication line;
Fig. 4
a schematic representation of a 2-port coupling.

Fig. 1 zeigt eine erfindungsgemäße Vakuumanordnung. An einem Rezipienten 8 ist ein Vakuumgerät 1 angeschlossen. Im gezeigten Beispiel handelt es sich um eine Vakuumpumpe 1a mit angeflanschter Steuerelektronik 1b. Die Steuerelektronik 1b kann wahlweise angeflanscht oder räumlich getrennt und über ein Kabel mit der Vakuumpumpe 1a verbunden sein. Es kann sich bei dem Vakuumgerät 1 auch um ein steuerbares Ventil, eine Messröhre oder dergleichen handeln. Das Vakuumgerät 1 weist ein Kommunikationsmodul 2 auf, welches im gezeigten Beispiel direkt an der Steuerelektronik 1b angeordnet ist. Es kann jedoch auch getrennt von diesem sein, beispielsweise in einem benachbarten Schaltschrank, und dann über ein Kabel mit dem Vakuumgerät 1 in Verbindung stehen. Fig. 1 shows a vacuum arrangement according to the invention. At a recipient 8, a vacuum device 1 is connected. In the example shown, it is a vacuum pump 1a with flanged control electronics 1b. The control electronics 1b can optionally be flanged or spatially separated and connected via a cable to the vacuum pump 1a. The vacuum device 1 can also be a controllable valve, a measuring tube or the like. The vacuum device 1 has a communication module 2, which is arranged directly on the control electronics 1b in the example shown. However, it may also be separate from this, for example in an adjacent control cabinet, and then communicate with the vacuum device 1 via a cable.

Die Steuerelektronik 2 ist über eine Kommunikationsleitung 7 mit einer zentralen Steuereinrichtung 5 verbunden. An der zentralen Steuereinrichtung 5 können weitere Vakuumgeräte (nicht dargestellt) über weitere Kommunikationsleitungen (ebenfalls nicht darstellt) verbunden sein.The control electronics 2 is connected via a communication line 7 to a central control device 5. At the central control device 5 further vacuum devices (not shown) via other communication lines (also not shown) may be connected.

Über einen Anschluss 3 ist eine Vorrichtung 4 an der Kommunikationsleitung 7 angekoppelt. Die Vorrichtung 4 erfasst Daten, die in der Kommunikationsleitung 7 zwischen dem Vakuumgerät 1 und der zentralen Steuereinrichtung 5 ausgetauscht werden. Die Erfassung erfolgt, ohne dass die Kommunikation zwischen dem Vakuumgerät 1 und der zentralen Steuereinrichtung 5 unterbrochen wird.Via a connection 3, a device 4 is coupled to the communication line 7. The device 4 acquires data that is exchanged in the communication line 7 between the vacuum device 1 and the central control device 5. The detection takes place without the Communication between the vacuum device 1 and the central control device 5 is interrupted.

Die Vorrichtung 4 erfasst die in der Kommunikationsleitung 7 kommunizierten Daten entweder zeitweise oder dauerhaft. Die Vorrichtung 4 erfasst hierzu die wesentlichen Parameter wie Drehzahl, Druck, Leistung, Temperatur, Softwarestand und dergleichen. Die Vorrichtung 4 kann auch Steuerdaten wie beispielsweise Stellbefehle, die an das Vakuumgerät gesendet werden, beispielsweise "An/Aus", "Beschleunigen" und dergleichen versenden, nämlich wenn die Kommunikation von der zentralen Steuerung 5 ausbleibt. Dies kann der Fall sein, wenn die zentrale Steuerung ausfällt oder noch nicht angeschlossen oder projektiert ist.The device 4 detects the data communicated in the communication line 7 either temporarily or permanently. The device 4 detects the essential parameters such as speed, pressure, power, temperature, software version and the like. The device 4 may also send control data such as setting commands sent to the vacuum device, such as "on / off", "accelerate" and the like, namely, when the communication from the central controller 5 is absent. This may be the case if the central controller fails or is not yet connected or configured.

In diesem Fall kann die Vorrichtung 4 auch automatisch oder manuell Daten bei dem Kommunikationsmodul 2 abfragen und wie schon ausgeführt, gegebenenfalls Einstellungen vornehmen. In diesem Falle verhält sich die Vorrichtung 4 wie ein normales Bediengerät. Sobald die Kommunikation mit der zentralen Steuereinrichtung 5 einsetzt, erfolgt keine aktive Teilnahme mehr an der Kommunikation, das heißt, es werden durch die Vorrichtung 4 keine Telegramme gefiltert, Dateninhalte um Informationen ergänzt oder geändert, sondern nur die in der Kommunikationsleitung 7 kommunizierten Daten werden erfasst, beobachtet und/oder ausgewertet.In this case, the device 4 can also automatically or manually query data in the communication module 2 and, as already stated, optionally make settings. In this case, the device 4 behaves like a normal operating device. As soon as the communication with the central control device 5 starts, no active participation in the communication takes place, that is, no messages are filtered by the device 4, data contents are supplemented or changed by information, but only the data communicated in the communication line 7 are detected , observed and / or evaluated.

Durch diese erfindungsgemäße Vakuumanordnung ist eine lokale Überwachung der Vakuumpumpe 1 zeitweise oder dauerhaft ohne Rückwirkung auf die Kommunikation zwischen dem Vakuumgerät 1 und der zentralen Steuereinrichtung 5 möglich. Dies ist besonders vorteilhaft bei der Inbetriebnahme und der Wartung von Vakuumanlagen.By means of this vacuum arrangement according to the invention, local monitoring of the vacuum pump 1 is possible temporarily or permanently without any effect on the communication between the vacuum device 1 and the central control device 5. This is particularly advantageous in the commissioning and maintenance of vacuum systems.

Fig. 2 zeigt die Kommunikationsleitung 7, an der die Vorrichtung 4 mittels einer Ankopplung 3, die als nicht-galvanische Ankopplung 6 ausgebildet ist, angeschlossen ist. Bei der nicht-galvanischen Ankopplung 6 sind keine zusätzlichen Steckverbinder notwendig. Die Anschaltung ist an jeder geeigneten Stelle der Kommunikationsleitung 7 möglich. Hierdurch wird die größte Rückwirkungsfreiheit erzielt. Fig. 2 shows the communication line 7, to which the device 4 is connected by means of a coupling 3, which is designed as a non-galvanic coupling 6. In the non-galvanic coupling 6 no additional connectors are necessary. The connection is possible at any suitable point of the communication line 7. As a result, the greatest freedom from reaction is achieved.

Bei der nicht-galvanischen Ankopplung werden die Daten aus der Kommunikationsleitung 7 kontaktlos, wie zum Beispiel induktiv oder kapazitiv erfasst, ohne dass das Buskabel 7 aufgetrennt werden muss. Es ist auch eine Anbindung per Funk denkbar.In the non-galvanic coupling, the data from the communication line 7 contactless, such as inductive or capacitive detected without the bus cable 7 must be separated. It is also a connection via radio conceivable.

Gemäß Fig. 3 ist die Vorrichtung 4 über die Ankopplung 3, die als galvanische Ankopplung 9 ausgebildet ist, an der Kommunikationsleitung 7 angeschlossen. Die galvanische Ankopplung 9 bedeutet, dass analog ein weiterer Teilnehmer an der Kommunikationsleitung 7 angeschlossen ist. Diese Variante weist den Vorteil auf, dass die Ankopplung mittels einfacher Komponenten erfolgt.According to Fig. 3 is the device 4 via the coupling 3, which is designed as a galvanic coupling 9, connected to the communication line 7. The galvanic coupling 9 means that another analog subscriber is connected to the communication line 7. This variant has the advantage that the coupling takes place by means of simple components.

Fig. 4 zeigt ein weiteres Ausführungsbeispiel, bei dem die Vorrichtung 4 mittels einer 2-Port-Ankopplung 10 in der Kommunikationsleitung 7 eingeschleift ist. Mit diesem Ausführungsbeispiel ist eine Filterung und Bearbeitung des Datenverkehrs möglich. Fig. 4 shows a further embodiment in which the device 4 is looped by means of a 2-port coupling 10 in the communication line 7. With this embodiment, a filtering and processing of the data traffic is possible.

Bezugszahlenreference numerals

11
Vakuumgerätvacuum device
1a1a
Vakuumpumpevacuum pump
1b1b
Steuerelektronikcontrol electronics
22
Kommunikationsmodulcommunication module
33
Ankopplungcoupling
44
Vorrichtungcontraption
55
zentrale Steuereinrichtungcentral control device
66
nicht-galvanische Ankopplungnon-galvanic coupling
77
Kommunikationsleitungcommunication line
88th
Rezipientrecipient
99
galvanische Ankopplunggalvanic coupling
1010
2-Port-Ankopplung2-port coupling

Claims (20)

  1. Vacuum assembly with a vacuum device, which has a central control device for the vacuum device and a communication line between the vacuum device and the central control device, with an additional apparatus (4) for detecting the data communicated in the communication line (7) being arranged in and/or on the communication line (7),
    characterised in that the apparatus (4) has a galvanic connection (9) to the communication line (7).
  2. Vacuum assembly according to claim 1, characterised in that the apparatus (4) is configured as an apparatus (4) that evaluates and/or displays data.
  3. Vacuum assembly according to claim 1 or 2, characterised in that the apparatus (4) is configured as an apparatus (4) that detects the data during an interruption-free communication between the vacuum device (1) and the central control device (5).
  4. Vacuum assembly according to any one of the preceding claims, characterised in that, when there is no communication between the central control device (5) and the vacuum device (1), the apparatus (4) is additionally configured as an apparatus (4) that interrogates data and/or controls the vacuum device (1).
  5. Vacuum assembly according to claim 1, characterised in that the connection (9) is configured as an additional user.
  6. Vacuum assembly according to claim 1, characterised in that the connection (9) is configured as a looped-in apparatus (4) with two independent ports.
  7. Vacuum assembly according to any one of the preceding claims, characterised in that the communication line (7) is configured as an RS485 or as a PROFIBUS.
  8. Vacuum assembly according to any one of the preceding claims, characterised in that the apparatus (4) is configured as an apparatus (4) that changes the communicated data.
  9. Vacuum assembly according to any one of the preceding claims, characterised in that the apparatus (4) is configured as an apparatus (4) that records the data and/or data traffic.
  10. Vacuum assembly according to any one of the preceding claims, characterised in that the apparatus (4) has operating elements and/or a visual notification apparatus and/or an acoustic notification apparatus.
  11. Vacuum assembly according to claim 10, characterised in that the operating elements are configured as push buttons or switches.
  12. Vacuum assembly according to claim 10, characterised in that the visual notification is configured in the form of indicators or in the form of at least one display.
  13. Vacuum assembly according to any one of the preceding claims, characterised in that the vacuum device (1) is configured as a vacuum pump or as a vacuum measuring means.
  14. Method for detecting data communicated in a communication line between a vacuum device and a central control device, in which the data are detected by an apparatus (4) without interruption of the communication between the vacuum device (1) and the central control device (5),
    characterised in that the data are detected from the communication line (7) contactlessly, preferably inductively or capacitively, without disconnection of a bus cable (7).
  15. Method according to claim 14, characterised in that the apparatus (4) additionally evaluates and/or displays the data for detection of the data.
  16. Method according to either one of claims 14 or 15,
    characterised in that the apparatus (4) automatically or manually interrogates data of the vacuum device (1) and/or controls the vacuum device (1) exclusively when there is no communication between the vacuum device (1) and the central control device (5).
  17. Method according to any one of claims 14 to 16,
    characterised in that an RS485 or a PROFIBUS is used as communication line (7).
  18. Method according to any one of claims 14 to 17,
    characterised in that the apparatus (4) changes the communicated data during the communication between the vacuum device (1) and the central control device (5).
  19. Method according to any one of claims 14 to 18,
    characterised in that the apparatus (4) records the communicated data and/or the data traffic.
  20. Method according to any one of claims 14 to 19,
    characterised in that a vacuum pump or a vacuum measuring means is used as the vacuum device (1).
EP14169692.2A 2013-06-20 2014-05-23 Vacuum assembly with a vacuum device and method for detecting communicated data in a communication line between a vacuum device and a central control device Active EP2827314B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013106474.4A DE102013106474A1 (en) 2013-06-20 2013-06-20 Arrangement with a vacuum device and method for detecting data communicated in a communication line between a vacuum device and a central control device

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EP2827314A1 EP2827314A1 (en) 2015-01-21
EP2827314B1 true EP2827314B1 (en) 2017-09-27

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DE (1) DE102013106474A1 (en)

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Publication number Priority date Publication date Assignee Title
DE19815097C2 (en) * 1998-04-03 2002-03-14 Siemens Ag bus master
DE10032774A1 (en) * 2000-07-06 2002-01-17 Endress Hauser Gmbh Co field device
US7016751B2 (en) * 2001-07-13 2006-03-21 Helix Technology Corporation Vacuum system central control information server
DE10252277A1 (en) * 2002-11-11 2004-05-27 Abb Patent Gmbh Method for operating field devices of regulating circuit e.g. for process engineering equipment, involves manipulated adjustments on mobile operating device in form of data stream from central control device
US20080123522A1 (en) * 2006-07-28 2008-05-29 David Charles Elliott Redundancy coupler for industrial communications networks
DE102006045024A1 (en) 2006-09-23 2008-03-27 Pfeiffer Vacuum Gmbh Arrangement with vacuum device
DE102006045022A1 (en) * 2006-09-23 2008-03-27 Pfeiffer Vacuum Gmbh Arrangement with vacuum device and method for derem operation
US8387463B2 (en) * 2008-10-06 2013-03-05 Rosemount Inc. Pressure-based diagnostic system for process transmitter
DE102008061435A1 (en) * 2008-12-10 2010-06-17 Pfeiffer Vacuum Gmbh Device connectable to a vacuum pump
EP2466405A1 (en) * 2010-12-15 2012-06-20 Siemens Aktiengesellschaft Control system for an industrial device with optional switching to different central units

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