EP1903530B1 - Assembly with vacuum device and method for its operation - Google Patents

Assembly with vacuum device and method for its operation Download PDF

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Publication number
EP1903530B1
EP1903530B1 EP07017431.3A EP07017431A EP1903530B1 EP 1903530 B1 EP1903530 B1 EP 1903530B1 EP 07017431 A EP07017431 A EP 07017431A EP 1903530 B1 EP1903530 B1 EP 1903530B1
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EP
European Patent Office
Prior art keywords
data
vacuum device
vacuum
configuration data
bus system
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EP07017431.3A
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German (de)
French (fr)
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EP1903530A3 (en
EP1903530A2 (en
Inventor
Jochen BÖTTCHER
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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    • G—PHYSICS
    • G08—SIGNALLING
    • G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C17/00—Arrangements for transmitting signals characterised by the use of a wireless electrical link
    • G08C17/02—Arrangements for transmitting signals characterised by the use of a wireless electrical link using a radio link
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • G—PHYSICS
    • G08—SIGNALLING
    • G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C19/00—Electric signal transmission systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/40—Use of a multiplicity of similar components

Definitions

  • the invention relates to an arrangement with a vacuum device designed as a vacuum pump, a first bus system and a control unit according to the preamble of claim 1. It also relates to a method for operating this arrangement.
  • Vacuum devices can, for example, be turbomolecular pumps that are equipped with drive electronics, which today often have programmable microprocessor units. It can also be pressure measuring devices, valve control devices and more, insofar as these can be electronically controlled or monitored electronically.
  • a control unit sends control data to the connected vacuum devices via a bus system, which is usually an installation of electrical conductors between the connected devices.
  • Changes for example to the operating software, usually require manual intervention on the respective vacuum device. This can disrupt the communication of other vacuum devices and thus the process.
  • manual intervention requires, for example, the removal and re-insertion of connectors, for example the bus system, which can lead to errors and failures.
  • Access to one or more vacuum devices is often not possible due to an industrial bus system used by the user, to the extent desired by the user or manufacturer and necessary for adaptation to new operating circumstances.
  • the arrangement according to the invention has an administration unit which is connected to the bus system, the bus system being set up in such a way that it has communication means which, on the one hand, are adapted for a first data exchange between vacuum device and control unit and a second data exchange between vacuum device and the administration unit, wherein first and second data exchange are independent of each other.
  • the operating method for an arrangement with all the features of one or more of claims 1 or 2 has a step A, in which in the second data exchange either the configuration data or the operating data or both are transmitted from the vacuum device to the administration unit.
  • the independence between a first and a second data exchange makes it possible to read out data from the vacuum devices and to process them in the administration unit without disrupting the operation of the arrangement, ie the system comprising the vacuum devices, the bus system, the administration unit and the control unit.
  • operating data can be collected in the administration unit and the configuration data can be stored.
  • it can make sense to process only operating data or configuration data or both.
  • the processing of operating data allows users and / or manufacturers to carry out statistical evaluations over longer periods of time. This makes it possible, for example, to identify service cases early on. It is also possible to call up the configurations and current operating data at a time without interrupting the operation of the system.
  • the dependent claims 2 and 4 to 8 represent advantageous developments of the invention.
  • the administration and control unit are designed as part of a control unit. Fewer components are needed, i.e. the system is becoming cheaper. In addition, all functions are combined in one spatial location.
  • the status of the configuration data of the vacuum devices and thus the configuration of the system can be stored centrally at any time. This makes it possible to view the configuration without checking each individual vacuum device. It is advantageously possible to do this even during operation.
  • the measure according to claim 5 allows configuration data of one or more vacuum devices within the administration unit to be compared with similar data.
  • Sources of this comparison data can be configuration data originating from other vacuum devices or parts thereof.
  • the comparison data can also get into the administration unit in another way, for example by manual input by the user or connection of the administration unit to a computer network.
  • the comparison advantageously allows changes and / or deviations in the configurations to be shown.
  • the measure according to claim 6 facilitates the exchange of a vacuum device.
  • a replacement vacuum device can take the place of a vacuum device and receives the configuration data from the administrative unit. This means that no lengthy configuration work has to be carried out on site, the exchange is much faster, which saves time and money. It also guarantees that the configuration of the replacement vacuum device really matches that of the previous vacuum device. This avoids errors that can ultimately lead to technical failure.
  • the data exchange between the vacuum device and the administrative unit can be done cyclically according to claim 7. This is advantageous when creating statistics about operating data. It is also advantageous to routinely save the configuration and thus have the current status of the system in the configuration data memory.
  • a recipient 1 is shown, to which vacuum devices are connected via flanges.
  • the recipient can be a simple vacuum chamber, a multi-chamber system or part of a complex vacuum system, wherein the vacuum devices can be arranged at different points in the system.
  • a first vacuum pump 2 a second vacuum pump 3 and a measuring device 4 are shown.
  • the vacuum pump 2 has a pump part 2a with the pump system for generating a vacuum and an operating device 2b.
  • This operating device 2b contains the control electronics for driving the electrical and electronic components of the pump part 2a, in particular the drive motor.
  • the power unit and power pack can also be arranged in the operating device 2b.
  • the vacuum device 3 is a vacuum pump in which the pump part 3a with a pump system and operating device 3b are separated from one another and are connected to one another via one or more cables.
  • the vacuum device 4 is designed as a measuring device, for example a pressure measuring device, wherein it contains at least one electronics, from which measured values are passed on to connectable devices.
  • a control unit 6 is used in a known manner to control the vacuum devices.
  • individual vacuum devices can be switched on and off depending on the process taking place in the vacuum system from a central location.
  • a bus system 5 is provided for communication between the vacuum devices and the control unit, to which the control unit and vacuum devices are connected, for example via a cable connection 5a.
  • the connected devices and units are assigned addresses at which they can be reached for communication. Cables and radio links can be used as a means of communication to design the bus system.
  • Conventional protocols and methods can be used for the communication itself, for example Internet protocols or those which are used in the area of the industrially customary "programmable logic controller (PLC)".
  • an administration unit 7 is connected to the bus system 5 via a cable connection 5b.
  • This administrative unit collects and distributes configuration data of the vacuum devices.
  • the bus system is designed so that parallel communication can be carried out.
  • the bus system must be designed so that it allows quasi-simultaneous operation with several so-called masters. Examples of such bus systems are Ethernet and the "Process Field Bus” (Profibus).
  • the administration and control unit are masters.
  • the management unit 7 has a radio module and communicates via a radio link 5b 'with a radio module connected to a second bus system 5'.
  • the second bus system is arranged parallel to the first bus system 5, so that data can be exchanged via both.
  • a temporarily connectable administration unit can be implemented in a particularly simple manner. It can then take the form of a personal digital assistant (PDA), for example, or it can be a portable computer (“laptop”) equipped with a radio module. It is also conceivable to set up the complete bus system 5 'or parts thereof via radio connections.
  • PDA personal digital assistant
  • laptop portable computer
  • Control unit and administration unit are parts of a control unit 9, which is connected to the bus system 5 via a connection 5b ".
  • this connection can consist of several cables.
  • a cable on which the data of both can be used by suitable means Units 6 and 7 are given and the management unit can receive and send data via an external connection 10.
  • Such a connection can be, for example, a computer network connection such as an intranet or the Internet.
  • the data exchanges between the vacuum device and the control unit on the one hand and the vacuum device and the inventive management unit on the other hand are independent of one another.
  • the administration unit can read data from the vacuum device without significantly impairing the data exchange between the vacuum device and the control unit.
  • the data transferred in the data exchange consist of control data, operating data and configuration data.
  • the control data include, in particular, control commands and instructions that are transmitted from the control device to the vacuum device and, for example, trigger actions such as reading out a measured value, changing the speed, and the like.
  • the operating data include the actual values of the vacuum device and are only read out by the control and / or administrative unit. These are, for example, the speed, a pressure or a temperature.
  • the configuration data include such data as pump type, software version, settings of parameters such as number and duration of cycles of measured value recordings, temperature of temperature management systems, coolant flow, and the like.
  • the sum of all configuration data of a vacuum device forms a configuration data record, the configuration data describe the configuration of the vacuum device.
  • the control unit sends data to one or more vacuum devices via the bus system. This data is received by the operating devices on the vacuum devices, interpreted as commands and the associated actions triggered. If the vacuum device is a vacuum pump, such an action can, for example, accelerate from a standby state with reduced Rotor speed to final speed. Since the process flow in the recipient requires certain actions and states of the vacuum devices, the operating devices of the vacuum devices send operating data to the control unit that describe their condition. This transmission can take place at regular, predefined intervals or in response to a corresponding command from the control unit. Sending the data between the operating devices and the control unit represents a data exchange.
  • the management unit sends and receives data, this data exchange taking place with the vacuum devices and not hindering the data exchange described above.
  • This data is configuration data or operating data or both together.
  • This data can be used in a variety of ways, for example it can be displayed on a display device, stored in a data memory or transmitted over a computer network.
  • An example of the application of the method is that a vacuum pump contains a temperature sensor, the temperature signal of which is sent to the management unit as part of the operating data. This saves each temperature value or only a previously determined portion of the temperature values and is simultaneously displayed on a display device, for example a screen.
  • the administrative unit can represent the current operating and configuration data of the arrangement in whole or in part and thus to represent and visualize its state.
  • the management unit sends a command to the vacuum device, upon which the vacuum device transmits its configuration data in response. These are stored in a step B of the method in the administration unit, specifying the address of the vacuum device within the bus system, as a result of which the configuration data are assigned to the vacuum device. The vacuum device is then replaced and a vacuum device of the same type installed in its place in the arrangement. The management unit again sends a command to the address of the vacuum device and receives configuration data as a reaction. A comparison of all or part of the configuration data record now takes place in the administration unit.
  • Step A of transmitting configuration data or operating data or both together from one vacuum device to the administration unit can be event-controlled or cyclical. Cyclic means that the step is repeated after a specified time interval. This time interval is stored in the administration unit or in the vacuum device. It can be fixed or changeable. An example of event control is when a user operates the administrative unit and thereby triggers the data exchange.

Description

Die Erfindung betrifft eine Anordnung mit einem als Vakuumpumpe ausgebildeten Vakuumgerät, einem ersten Bussystem und einer Steuereinheit gemäß dem Oberbegriff des Anspruchs 1. Sie betrifft außerdem ein Verfahren zum Betrieb dieser Anordnung.The invention relates to an arrangement with a vacuum device designed as a vacuum pump, a first bus system and a control unit according to the preamble of claim 1. It also relates to a method for operating this arrangement.

Anordnungen mit Vakuumgeräten bilden in Forschung und Industrie wichtige Systeme zur Erzeugung von Produkten oder zur Analyse von Stoffen. Die Fertigungsprozesse sind zunehmend komplex und hocheffizient geworden, und stellen immer unterschiedlichere Anforderungen an diese System. Um diesen Anforderungen zu genügen sind zum einen die Möglichkeiten der unterschiedlichen Konfiguration von Vakuumgeräten und -systemen gestiegen, zum anderen stellt der breite Anwendungsbereich harte Anforderungen an die Konstruktion und Qualitätskontrolle.Arrangements with vacuum devices are important systems in research and industry for the production of products or for the analysis of substances. The manufacturing processes have become increasingly complex and highly efficient, and place increasingly different demands on this system. In order to meet these requirements, the possibilities of different configurations of vacuum devices and systems have increased on the one hand, and on the other hand, the wide range of applications places tough requirements on design and quality control.

Anordnungen des Standes der Technik weisen wenigstens ein Vakuumgerät, ein Bussystem und eine Steuereinheit auf. Bei Vakuumgeräten kann es sich beispielsweise um Turbomolekularpumpen handeln, die mit Antriebselektroniken ausgestattet sind, welche heute oftmals programmierbare Mikroprozessoreinheiten aufweisen. Es kann sich auch um Druckmessgeräte, Ventilsteuereinrichtungen und mehr handeln, soweit diese elektronisch fernsteuerbar oder überwachbar sind. Über ein Bussystem, welches meist eine Installation aus elektrischen Leitern zwischen den angeschlossenen Geräten ist, sendet eine Steuereinheit Steuerdaten an die angeschlossenen Vakuumgeräte.Prior art arrangements have at least one vacuum device, a bus system and a control unit. Vacuum devices can, for example, be turbomolecular pumps that are equipped with drive electronics, which today often have programmable microprocessor units. It can also be pressure measuring devices, valve control devices and more, insofar as these can be electronically controlled or monitored electronically. A control unit sends control data to the connected vacuum devices via a bus system, which is usually an installation of electrical conductors between the connected devices.

Durch den Aufbau gemäß Stand der Technik entstehen nun eine Reihe von Problemen, durch die die Anordnungen mit Vakuumgeräten nicht mehr den heutigen Anforderungen entsprechen.Due to the structure according to the state of the art, a number of problems now arise, by means of which the arrangements with vacuum devices no longer meet today's requirements.

Änderungen, beispielsweise an der Betriebsoftware, erfordern in der Regel einen manuellen Eingriff am jeweiligen Vakuumgerät. Dies kann die Kommunikation anderer Vakuumgeräte und damit den Prozess stören. Zudem erfordert der manuelle Eingriff beispielsweise das Abziehen und Wiederaufstecken von Steckverbindern, beispielsweise des Bussystems, was zu Fehlern und Ausfällen führen kann.Changes, for example to the operating software, usually require manual intervention on the respective vacuum device. This can disrupt the communication of other vacuum devices and thus the process. In addition, manual intervention requires, for example, the removal and re-insertion of connectors, for example the bus system, which can lead to errors and failures.

Der Zugriff auf ein oder mehrere Vakuumgeräte ist oft durch ein vom Anwender verwendetes industrielles Bussystem nicht im vom Anwender oder Hersteller gewünschten und für die Anpassung an neue Betriebsumstände notwendigen Umfang möglich.Access to one or more vacuum devices is often not possible due to an industrial bus system used by the user, to the extent desired by the user or manufacturer and necessary for adaptation to new operating circumstances.

Die Einrichtung eines Systems zur Datenerfassung im Rahmen der Anordnung mit einem Vakuumgerät kann unmöglich werden, wenn sie nicht bereits in der Planungsphase des Anwenders berücksichtigt wird. Ist dieses System darüber hinaus untrennbar in den Prozess des Anwenders zu integrieren, so verursacht dies Kosten, die der Anwender eventuell nicht zu tragen bereit ist. Dies liegt unter anderem an folgendem: Bei kompakt gestalteten Geräten, wie sie bei Vakuumpumpen üblicherweise vorkommen, ist u.a. aus Platz- und Preisgründen die Zahl der Steckverbinder gering zu halten, so dass verschiedene Funktionen auf einem Steckverbinder realisiert werden. Anwender insbesondere größerer Anlagen konfektionieren ihre Kabel und Steckverbinder oft vor, so dass es aufwändig ist, nachträglich an Funktionen zu gelangen, die bereits durch die Steckverbinder des Anwenders belegt sind.Setting up a system for data acquisition in the context of the arrangement with a vacuum device can become impossible if it is not already taken into account in the planning phase of the user. If this system is also inseparably integrated into the process of the user, this causes costs that the user may not be willing to bear. Among other things, this is due to the following: With compactly designed devices, as they usually occur with vacuum pumps, to keep the number of connectors low for space and price reasons, so that different functions can be implemented on one connector. Users of larger systems, in particular, often pre-assemble their cables and connectors, so that it is difficult to subsequently access functions that are already occupied by the user's connectors.

Ein weiterer Nachteil ist, dass Vakuumgeräte in den beschriebenen Anordnungen nur aufwändig ersetzt werden können. Hierzu muss meist die komplette Anordnung außer Betrieb gesetzt werden. Dann wird das Vakuumgerät gegen ein neues ausgetauscht und sämtliche Einstellungen des alten Vakuumgeräts manuell am Austauschvakuumgerät eingestellt. Dies kann einige Zeit in Anspruch nehmen. Die US 6 272 400 B1 offenbart eine Anordnung gemäß dem Oberbegriff des Anspruchs 1. Weiterer Stand der Technik ist aus US 2003/0014160 A1 , EP 0 809 164 A1 und US 5 793 963 A bekannt.Another disadvantage is that vacuum devices can only be replaced with great effort in the arrangements described. To do this, the entire arrangement usually has to be taken out of operation. The vacuum device is then exchanged for a new one and all settings of the old vacuum device are set manually on the replacement vacuum device. This can take some time. The US 6 272 400 B1 discloses an arrangement according to the preamble of claim 1. Further prior art is from US 2003/0014160 A1 , EP 0 809 164 A1 and US 5 793 963 A known.

Es ist eine Aufgabe der Erfindung, die herkömmlichen Anordnungen mit Vakuumgerät so zu verbessern, dass oben genannte Nachteile beseitigt werden.It is an object of the invention to improve the conventional vacuum device arrangements so as to eliminate the above-mentioned drawbacks.

Gelöst wird diese Aufgabe durch eine Anordnung mit einem Vakuumgerät mit den Merkmalen des ersten Patentanspruchs. Sie wird außerdem gelöst durch ein Verfahren zum Betrieb dieser Anordnung nach Anspruch 3.
Die erfindungsgemäße Anordnung weist eine Verwaltungseinheit auf, die an das Bussystem angeschlossen ist, wobei das Bussystem so eingerichtet ist, dass es Kommunikationsmittel aufweist, die für einen ersten Datenaustausch zwischen Vakuumgerät und Steuereinheit einerseits und einem zweiten Datenaustausch zwischen Vakuumgerät und der Verwaltungseinheit angepasst sind, wobei erster und zweiter Datenaustausch unabhängig voneinander sind.
Das Betriebsverfahren für eine Anordnung mit allen Merkmalen eines oder mehrerer der Ansprüche 1 oder 2 weist einen Schritt A, in welchem im zweiten Datenaustausch entweder die Konfigurationsdaten oder die Betriebsdaten oder beide zusammen vom Vakuumgerät an die Verwaltungseinheit übertragen werden.This object is achieved by an arrangement with a vacuum device with the features of the first claim. It is also solved by a method for operating this arrangement according to claim 3.
The arrangement according to the invention has an administration unit which is connected to the bus system, the bus system being set up in such a way that it has communication means which, on the one hand, are adapted for a first data exchange between vacuum device and control unit and a second data exchange between vacuum device and the administration unit, wherein first and second data exchange are independent of each other.
The operating method for an arrangement with all the features of one or more of claims 1 or 2 has a step A, in which in the second data exchange either the configuration data or the operating data or both are transmitted from the vacuum device to the administration unit.

Die Unabhängigkeit zwischen einem ersten und einem zweiten Datenaustausch ermöglicht es, Daten der Vakuumgeräte auszulesen und in der Verwaltungseinheit zu verarbeiten, ohne den Betrieb der Anordnung, d.h. das die Vakuumgeräte, das Bussystem, die Verwaltungseinheit und die Steuereinheit aufweisende System, zu stören. Durch das erfindungsgemäße Verfahren können in der Verwaltungseinheit Betriebsdaten gesammelt und die Konfigurationsdaten gespeichert werden. Je nach Anwendung kann es sinnvoll sein, nur Betriebsdaten oder Konfigurationsdaten oder beide zu verarbeiten. Die Verarbeitung von Betriebsdaten erlaubt es Anwender und/oder Hersteller, statistische Auswertungen über längere Zeiträume hinweg durchzuführen. Hierdurch ist es beispielsweise möglich, Servicefälle frühzeitig zu erkennen. Auch ist es möglich, zu einem Zeitpunkt die Konfigurationen und aktuellen Betriebsdaten abzurufen, ohne den Betrieb des Systems zu unterbrechen. Die abhängigen Ansprüche 2 und 4 bis 8 stellen vorteilhafte Weiterbildungen der Erfindung dar.The independence between a first and a second data exchange makes it possible to read out data from the vacuum devices and to process them in the administration unit without disrupting the operation of the arrangement, ie the system comprising the vacuum devices, the bus system, the administration unit and the control unit. Using the method according to the invention, operating data can be collected in the administration unit and the configuration data can be stored. Depending on the application, it can make sense to process only operating data or configuration data or both. The processing of operating data allows users and / or manufacturers to carry out statistical evaluations over longer periods of time. This makes it possible, for example, to identify service cases early on. It is also possible to call up the configurations and current operating data at a time without interrupting the operation of the system. The dependent claims 2 and 4 to 8 represent advantageous developments of the invention.

Der Vorteil der Maßnahme nach Anspruch 2, die Kommunikationsmittel ein zweites Bussystem aufweisen zu lassen, liegt in der leichten Nachrüstbarkeit bei Systemen, wo die Verwaltungseinheit nicht schon beim Bau geplant wurde.The advantage of the measure according to claim 2, that the communication means have a second bus system, lies in the easy retrofitting of systems where the administrative unit was not already planned during construction.

Erfindungsgemäß sind die Verwaltungs- und Steuereinheit als Teil einer Kontrolleinheit gestaltet. Es werden weniger Komponenten gebraucht, d.h. das System wird preiswerter. Außerdem sind alle Funktionen an einer räumlichen Stelle zusammengefasst.According to the invention, the administration and control unit are designed as part of a control unit. Fewer components are needed, i.e. the system is becoming cheaper. In addition, all functions are combined in one spatial location.

Durch die Weiterbildung des Verfahrens nach Anspruch 4 kann der Stand der Konfigurationsdaten der Vakuumgeräte und damit die Konfiguration des Systems zu jedem Zeitpunkt zentral gespeichert werden. Damit ist es möglich, die Konfiguration zu betrachten, ohne jedes einzelne Vakuumgerät zu überprüfen. Es ist vorteilhaft möglich, dies auch bei laufendem Betrieb zu tun.By further developing the method according to claim 4, the status of the configuration data of the vacuum devices and thus the configuration of the system can be stored centrally at any time. This makes it possible to view the configuration without checking each individual vacuum device. It is advantageously possible to do this even during operation.

Die Maßnahme nach Anspruch 5 erlaubt es, Konfigurationsdaten eines oder mehrerer Vakuumgeräte innerhalb der Verwaltungseinheit mit gleichartigen Daten zu vergleichen. Quellen dieser Vergleichsdaten können von anderen Vakuumgeräten stammende Konfigurationsdaten oder Teile davon sein. Die Vergleichsdaten können aber auch auf andere Weise in die Verwaltungseinheit gelangen, beispielweise durch Handeingabe des Benutzers oder Anbindung der Verwaltungseinheit an ein Computernetzwerk. Der Vergleich erlaubt vorteilhaft, Änderungen und/oder Abweichungen der Konfigurationen aufzuzeigen.The measure according to claim 5 allows configuration data of one or more vacuum devices within the administration unit to be compared with similar data. Sources of this comparison data can be configuration data originating from other vacuum devices or parts thereof. However, the comparison data can also get into the administration unit in another way, for example by manual input by the user or connection of the administration unit to a computer network. The comparison advantageously allows changes and / or deviations in the configurations to be shown.

Die Maßnahme nach Anspruch 6 erleichtert den Austausch eines Vakuumgeräts. Ein Ersatzvakuumgerät kann an die Stelle eines Vakuumgeräts treten und bekommt von der Verwaltungseinheit die Konfigurationsdaten überspielt. Hierdurch müssen keine langwierigen Konfigurationsarbeiten vor Ort durchgeführt werden, der Austausch geht viel schneller, wodurch Zeit und Geld gespart wird. Außerdem ist garantiert, dass die Konfiguration des Ersatzvakuumgeräts wirklich derjenigen des vorherigen Vakuumgeräts entspricht. Damit werden Fehler, die letztlich zu technischem Versagen führen können, vemieden.The measure according to claim 6 facilitates the exchange of a vacuum device. A replacement vacuum device can take the place of a vacuum device and receives the configuration data from the administrative unit. This means that no lengthy configuration work has to be carried out on site, the exchange is much faster, which saves time and money. It also guarantees that the configuration of the replacement vacuum device really matches that of the previous vacuum device. This avoids errors that can ultimately lead to technical failure.

Der Datenaustausch zwischen Vakuumgerät und Verwaltungseinheit kann nach Anspruch 7 zyklisch geschehen. Dies ist vorteilhaft beim Erstellen von Statistiken über Betriebsdaten. Es ist auch vorteilhaft, um routinemäßig die Konfiguration zu speichern und so im Konfigurationsdatenspeicher den aktuellen Stand des Systems zu haben.The data exchange between the vacuum device and the administrative unit can be done cyclically according to claim 7. This is advantageous when creating statistics about operating data. It is also advantageous to routinely save the configuration and thus have the current status of the system in the configuration data memory.

Es kann vorteilhaft sein, das Verfahren nach Anspruch 8 weiterzuentwickeln und den Austausch von Konfigurationsdaten oder Betriebsdaten oder beiden zusammen ereignisgesteuert durchzuführen. Dies erlaubt es beispielsweise einem Servicetechniker, den Austausch zu starten, um so die Konfigurationsdaten eines Vakuumgeräts unmittelbar vor dem Austausch eines Vakuumgeräts in die Verwaltungseinheit einzulesen.It can be advantageous to further develop the method according to claim 8 and to carry out the exchange of configuration data or operating data or both together in an event-controlled manner. This allows, for example, a service technician to start the exchange in order to read the configuration data of a vacuum device into the administration unit immediately before the exchange of a vacuum device.

Anhand von Ausführungsbeispielen soll die Erfindung näher erläutert werden. Es zeigen:

  • Fig. 1: Schematische Darstellung einer ersten Anordnung mit Vakuumgerät.
  • Fig. 2: Schematische Darstellung einer zweiten Anordnung mit Vakuumgerät.
  • Fig. 3: Schematische Darstellung einer dritten Anordnung mit Vakuumgerät.
The invention will be explained in more detail with the aid of exemplary embodiments. Show it:
  • Fig. 1 : Schematic representation of a first arrangement with vacuum device.
  • Fig. 2 : Schematic representation of a second arrangement with vacuum device.
  • Fig. 3 : Schematic representation of a third arrangement with vacuum device.

In den folgenden Figuren 1 bis 3 ist ein Rezipient 1 gezeigt, an dem über Flansche Vakuumgeräte angeschlossen sind. Der Rezipient kann eine einfache Vakuumkammer, eine Mehrkammeranlage oder Teil eines komplexen Vakuumsystems sein, wobei die Vakuumgeräte an verschiedenen Punkten des Systems angeordnet sein können. Als Vakuumgeräte sind in den Figuren 1 bis 3 eine erste Vakuumpumpe 2, eine zweite Vakuumpumpe 3 und ein Messgerät 4 dargestellt. Die Vakuumpumpe 2 weist einen Pumpenteil 2a mit dem Pumpsystem zur Erzeugung eines Vakuums und ein Betriebsgerät 2b auf. Dieses Betriebsgerät 2b beinhaltet die Steuerelektronik zum Antreiben der elektrischen und elektronischen Kompenenten des Pumpenteils 2a, insbesondere des Antriebsmotors. Im Betriebsgerät 2b können auch Leistungsteil und Netzteil angeordnet sein. Das Vakuumgerät 3 ist eine Vakuumpumpe, bei dem Pumpenteil 3a mit einem Pumpsystem und Betriebsgerät 3b getrennt voneinander sind und über eines oder mehrere Kabel miteinander in Verbindung stehen. Das Vakuumgerät 4 ist in den Beispielen als ein Messgerät ausgebildet, beispielsweise ein Druckmessgerät, wobei es mindestens eine Elektronik beinhaltet, von der Messwerte an anschließbare Geräte weitergegeben werden. Eine Steuereinheit 6 dient in bekannter Weise zur Steuerung der Vakuumgeräte. Hier kann beispielsweise von zentraler Stelle aus das Ein- und Ausschalten von einzelnen Vakuumgeräten abhängig von dem in dem Vakuumsystem ablaufenden Prozess geschehen. Zur Kommunikation zwischen den Vakuumgeräten und der Steuereinheit ist ein Bussystem 5 vorgesehen, an welches Steuereinheit und Vakuumgeräte angeschlossen sind, beispielsweise über eine Kabelverbindung 5a. Den angeschlossenen Geräten und Einheiten werden Adressen zugewiesen, an denen sie zur Kommunikation erreichbar sind. Als Komunikationsmittel zur Gestaltung des Bussystems können Kabel und Funkstrecken zum Einsatz kommen. Zur Kommunikation selbst können übliche Protokolle und Verfahren genutzt werden, beispielsweise Internetprotokolle oder solche, die im Bereich der industrieüblichen "speicherprogrammierbare Steuerung (SPS)" genutzt werden.In the following Figures 1 to 3 a recipient 1 is shown, to which vacuum devices are connected via flanges. The recipient can be a simple vacuum chamber, a multi-chamber system or part of a complex vacuum system, wherein the vacuum devices can be arranged at different points in the system. As vacuum devices are in the Figures 1 to 3 a first vacuum pump 2, a second vacuum pump 3 and a measuring device 4 are shown. The vacuum pump 2 has a pump part 2a with the pump system for generating a vacuum and an operating device 2b. This operating device 2b contains the control electronics for driving the electrical and electronic components of the pump part 2a, in particular the drive motor. The power unit and power pack can also be arranged in the operating device 2b. The vacuum device 3 is a vacuum pump in which the pump part 3a with a pump system and operating device 3b are separated from one another and are connected to one another via one or more cables. In the examples, the vacuum device 4 is designed as a measuring device, for example a pressure measuring device, wherein it contains at least one electronics, from which measured values are passed on to connectable devices. A control unit 6 is used in a known manner to control the vacuum devices. Here, for example, individual vacuum devices can be switched on and off depending on the process taking place in the vacuum system from a central location. A bus system 5 is provided for communication between the vacuum devices and the control unit, to which the control unit and vacuum devices are connected, for example via a cable connection 5a. The connected devices and units are assigned addresses at which they can be reached for communication. Cables and radio links can be used as a means of communication to design the bus system. Conventional protocols and methods can be used for the communication itself, for example Internet protocols or those which are used in the area of the industrially customary "programmable logic controller (PLC)".

Im ersten Ausführungsbeispiel nach Figur 1 ist eine Verwaltungseinheit 7 über eine Kabelverbindung 5b an das Bussystem 5 angeschlossen. Diese Verwaltungseinheit sammelt und verteilt Konfigurationsdaten der Vakuumgeräte. Das Bussystem ist in diesem Beispiel so ausgeführt, dass eine parallele Kommunikation durchgeführt werden kann. Insbesondere muss das Bussystem so gestaltet sein, dass es den quasigleichzeitigen Betrieb mit mehreren sogenannten Mastern erlaubt. Beispiele solcher Bussysteme sind Ethernet und der "Process Field Bus" (Profibus). Verwaltungs- und Steuereinheit sind in diesem Zusammenhang Master.In the first embodiment Figure 1 an administration unit 7 is connected to the bus system 5 via a cable connection 5b. This administrative unit collects and distributes configuration data of the vacuum devices. In this example, the bus system is designed so that parallel communication can be carried out. In particular, the bus system must be designed so that it allows quasi-simultaneous operation with several so-called masters. Examples of such bus systems are Ethernet and the "Process Field Bus" (Profibus). In this context, the administration and control unit are masters.

Im zweiten Ausführungsbeispiel nach Figur 2 besitzt die Verwaltungseinheit 7 ein Funkmodul und kommuniziert über eine Funkverbindung 5b' mit einem an ein zweites Bussystem 5' angeschlossenen Funkmodul. Das zweite Bussystem ist parallel zum ersten Bussystem 5 angeordnet, so dass über beide ein Datenaustausch stattfinden kann. Mit der Funkverbindung 5b' als Verbindung zum Bussystem lässt sich besonders einfach eine temporär anschließbare Verwaltungseinheit realisieren. Sie kann dann beispielsweise die Form eines Personal Digital Assistant (PDA) annehmen oder ein mit einem Funkmodul ausgerüsteter tragbarer Computer ("Laptop") sein. Denkbar ist auch, das komplette Bussystem 5' oder Teile davon über Funkverbindungen aufzubauen.In the second embodiment Figure 2 The management unit 7 has a radio module and communicates via a radio link 5b 'with a radio module connected to a second bus system 5'. The second bus system is arranged parallel to the first bus system 5, so that data can be exchanged via both. With the radio connection 5b 'as a connection to the bus system, a temporarily connectable administration unit can be implemented in a particularly simple manner. It can then take the form of a personal digital assistant (PDA), for example, or it can be a portable computer (“laptop”) equipped with a radio module. It is also conceivable to set up the complete bus system 5 'or parts thereof via radio connections.

Im dritten Ausführungsbeispiel der Anordnung nach Figur 3 sind Steuereinheit und Verwaltungseinheit Teile einer Kontrolleinheit 9, welche über eine Verbindung 5b" an das Busssystem 5 angeschlossen ist. Diese Verbindung kann wie gezeigt aus mehreren Kabeln bestehen. Alternativ ist es denkbar, ein Kabel zu verwenden, auf welches durch geeignete Mittel die Daten beider Einheiten 6 und 7 gegeben werden. Über eine Außenverbindung 10 ist es der möglich Verwaltungseinheit, Daten zu empfangen und zu senden. Eine solche Verbindung kann beispielsweise eine Computernetzwerkverbindung wie Intranet oder Internet sein.In the third embodiment of the arrangement Figure 3 Control unit and administration unit are parts of a control unit 9, which is connected to the bus system 5 via a connection 5b ". As shown, this connection can consist of several cables. Alternatively, it is conceivable to use a cable on which the data of both can be used by suitable means Units 6 and 7 are given and the management unit can receive and send data via an external connection 10. Such a connection can be, for example, a computer network connection such as an intranet or the Internet.

Die Datenaustausche zwischen Vakuumgerät und Steuereinheit einerseits und Vakuumgerät und erfindungsgemäßer Verwaltungseinheit andererseits sind unabhängig voneinander. Das bedeutet insbesondere, dass die Verwaltungseinheit Daten aus dem Vakuumgerät auslesen kann, ohne den Datenaustausch zwischen Vakuumgerät und Steuereinheit wesentlich zu beeinträchtigen. Gewährleistet wird dies durch den oben beschriebenen Aufbau der Anordnung. Die im Datenaustausch übertragenen Daten setzen sich aus Steuerdaten, Betriebsdaten und Konfigurationsdaten zusammen. Dabei umfassen die Steuerdaten insbesondere Stellbefehle und Anweisungen, die vom Steuergerät auf das Vakuumgerät übertragen werden und beispielsweise Aktionen auslösen wie Auslesen eines Messwertes, Ändern der Drehzahl, und dergleichen. Die Betriebsdaten umfassen die Ist-Werte des Vakuumgeräts und werden von Steuer- und/oder Verwaltungseinheit nur ausgelesen. Hierbei handelt es sich beispielsweise um die Drehzahl, einen Druck oder eine Temperatur. Die Konfigurationsdaten umfassen die solche Daten wie Pumpentyp, Softwarestand, Einstellungen von Parametern wie beispielsweise Zyklenzahl und -dauer von Messwertaufnahmen, Temperatur von Temperaturmanagementsystemen, Kühlmittelfluss, und dergleichen. Die Summe aller Konfigurationsdaten eines Vakuumgeräts bildet einen Konfigurationsdatensatz, die Konfigurationsdaten beschreiben die Konfiguration des Vakuumgeräts.The data exchanges between the vacuum device and the control unit on the one hand and the vacuum device and the inventive management unit on the other hand are independent of one another. This means in particular that the administration unit can read data from the vacuum device without significantly impairing the data exchange between the vacuum device and the control unit. This is guaranteed by the structure of the arrangement described above. The data transferred in the data exchange consist of control data, operating data and configuration data. The control data include, in particular, control commands and instructions that are transmitted from the control device to the vacuum device and, for example, trigger actions such as reading out a measured value, changing the speed, and the like. The operating data include the actual values of the vacuum device and are only read out by the control and / or administrative unit. These are, for example, the speed, a pressure or a temperature. The configuration data include such data as pump type, software version, settings of parameters such as number and duration of cycles of measured value recordings, temperature of temperature management systems, coolant flow, and the like. The sum of all configuration data of a vacuum device forms a configuration data record, the configuration data describe the configuration of the vacuum device.

Das Verfahren zum Betreiben der oben beschriebenen Anordnung wird nachfolgend beispielhaft erläutert.The method for operating the arrangement described above is explained below by way of example.

Die Steuereinheit sendet über das Bussystem Daten an einzelne oder mehrere Vakuumgeräte. Diese Daten werden von den Betriebsgeräten an den Vakuumgeräten empfangen, als Befehle interpretiert und die zugehörigen Aktionen ausgelöst. Wenn das Vakuumgerät eine Vakuumpumpe ist, kann solche eine Aktion beispielsweise das Beschleunigen aus einem Standbyzustand mit verminderter Rotordrehzahl auf Enddrehzahl sein. Da das Ablaufen des Prozesses im Rezipienten bestimmte Aktionen und Zustände der Vakuumgeräte bedingt, senden die Betriebsgeräte der Vakuumgeräte Betriebsdaten an die Steuereinheit, die ihren Zustand beschreiben. Dieses Senden kann in regelmäßigen, vordefinierten Abständen oder als Reaktion auf einen entsprechenden Befehl der Steuereinheit geschehen. Das Versenden der Daten zwischen den Betriebsgeräten und der Steuereinheit stellt einen Datenaustausch dar.The control unit sends data to one or more vacuum devices via the bus system. This data is received by the operating devices on the vacuum devices, interpreted as commands and the associated actions triggered. If the vacuum device is a vacuum pump, such an action can, for example, accelerate from a standby state with reduced Rotor speed to final speed. Since the process flow in the recipient requires certain actions and states of the vacuum devices, the operating devices of the vacuum devices send operating data to the control unit that describe their condition. This transmission can take place at regular, predefined intervals or in response to a corresponding command from the control unit. Sending the data between the operating devices and the control unit represents a data exchange.

Die erfindungsgemäße Verwaltungseinheit sendet und empfängt Daten, wobei dieser Datenaustausch mit den Vakuumgeräten stattfindet und den zuvor beschriebenen Datenaustausch nicht behindert. Bei diesen Daten handelt es sich um Konfigurationsdaten oder Betriebsdaten oder beides zusammen. Diese Daten können vielfältig genutzt werden, beispielsweise können sie auf einem Anzeigegerät angezeigt, in einem Datenspeicher abgelegt oder über ein Computernetzwerk übertragen werden. Ein Beispiel für die Anwendung des Verfahrens ist, dass eine Vakuumpumpe einen Temperatursensor enthält, dessen Temperatursignal als Teil der Betriebsdaten an die Verwaltungseinheit gesendet wird. Diese speichert jeden Temperaturwert oder nur einen vorher festgelegten Anteil der Temperaturwerte ab und zeigt sich gleichzeitig auf einem Anzeigegerät, beispielsweise einem Bildschirm, an. Auch ist es möglich, dass die Verwaltungseinheit die aktuellen Betriebs- und Konfigurationsdaten der Anordnung ganz oder teilweise darstellt und so ihren Zustand repräsentiert und visualisiert.The management unit according to the invention sends and receives data, this data exchange taking place with the vacuum devices and not hindering the data exchange described above. This data is configuration data or operating data or both together. This data can be used in a variety of ways, for example it can be displayed on a display device, stored in a data memory or transmitted over a computer network. An example of the application of the method is that a vacuum pump contains a temperature sensor, the temperature signal of which is sent to the management unit as part of the operating data. This saves each temperature value or only a previously determined portion of the temperature values and is simultaneously displayed on a display device, for example a screen. It is also possible for the administrative unit to represent the current operating and configuration data of the arrangement in whole or in part and thus to represent and visualize its state.

In einem weiteren Beispiel sendet die Verwaltungseinheit einen Befehl an das Vakuumgerät, auf welchen dieses als Reaktion seine Konfigurationsdaten übermittelt. Diese werden in einem Schritt B des Verfahrens in der Verwaltungseinheit unter Angabe der Adresse des Vakuumgeräts innerhalb des Bussystems, wodurch eine Zuordnung der Konfigurationsdaten zum Vakuumgerät stattfindet, abgespeichert. Anschließend wird das Vakuumgerät ausgetauscht und ein vom Bautyp her gleiches Vakuumgerät an seine Stelle in die Anordnung eingebaut. Wieder sendet die Verwaltungseinheit einen Befehl an die Adresse des Vakuumgeräts und erhält als Reaktion Konfigurationsdaten übermittelt. In der Verwaltungseinheit findet nun ein Vergleich des ganzen oder eines Teils des Konfigurationsdatensatzes statt. Ist das Ergebnis des Vergleiches so, dass die Konfigurationsdaten des neuen Vakuumgeräts nicht denen des alten Vakuumgeräts entsprechen, werden die im Speicher der Verwaltungseinheit abgelegten Konfigurationsdaten ganz oder teilweise auf das Vakuumgerät überspielt, so dass es in der Folge die Funktion des alten Vakuumgeräts erfüllen kann.In a further example, the management unit sends a command to the vacuum device, upon which the vacuum device transmits its configuration data in response. These are stored in a step B of the method in the administration unit, specifying the address of the vacuum device within the bus system, as a result of which the configuration data are assigned to the vacuum device. The vacuum device is then replaced and a vacuum device of the same type installed in its place in the arrangement. The management unit again sends a command to the address of the vacuum device and receives configuration data as a reaction. A comparison of all or part of the configuration data record now takes place in the administration unit. If the result of the comparison is such that the configuration data of the new vacuum device does not correspond to that of the old vacuum device, all or part of the configuration data stored in the memory of the administration unit is transferred to the vacuum device so that it can subsequently fulfill the function of the old vacuum device.

Der Schritt A des Übertragens von Konfigurationsdaten oder Betriebsdaten oder beiden zusammen von einem Vakuumgerät an die Verwaltungseinheit kann ereignisgesteuert oder zyklisch erfolgen. Zyklisch heißt, dass nach Ablauf eines vorgegeben Zeitintervalls der Schritt wiederholt wird. Dieses Zeitintervall ist in der Verwaltungseinheit oder im Vakuumgerät abgelegt. Es kann festgelegt sein oder veränderlich sein. Ein Beispiel für eine Ereignissteuerung ist, wenn ein Anwender die Verwaltungseinheit bedient und dabei den Datenaustausch auslöst.Step A of transmitting configuration data or operating data or both together from one vacuum device to the administration unit can be event-controlled or cyclical. Cyclic means that the step is repeated after a specified time interval. This time interval is stored in the administration unit or in the vacuum device. It can be fixed or changeable. An example of event control is when a user operates the administrative unit and thereby triggers the data exchange.

Claims (8)

  1. An arrangement comprising a vacuum device (2, 3, 4) configured as a vacuum pump; a first bus system (5); and a control unit (6), wherein a management unit (7) is connected to the bus system and the bus system has communication means which are adapted for a first data exchange between the vacuum device (2, 3, 4) and the control unit (6), on the one hand, and for a second data exchange between the vacuum device (2, 3, 4) and the management unit (7), on the other hand, with the first and second data exchanges being independent of one another,
    characterized in that
    the control unit and the management unit are part of a control unit (9).
  2. An arrangement in accordance with claim 1, characterized in that the communication means comprise a second bus system (5').
  3. A method of operating an arrangement having all the features in accordance with one or more of the preceding claims, wherein the method comprises a step A in which either the configuration data or the operating data or both together are transmitted from the vacuum device (2, 3, 4) to the management unit (7) in the second data exchange.
  4. A method in accordance with claim 3, characterized in that, in a step B, the configuration data are stored in a configuration data memory, with an association taking place with the vacuum device (2, 3, 4) from which the configuration data originate.
  5. A method in accordance with claim 4, characterized in that the management unit (7) fully or partly compares the configuration data transmitted in the second data exchange with configuration data of the same kind present in the management unit (7).
  6. A method in accordance with claim 4 or claim 5, characterized in that, in a further step, the management unit (7) transmits either configuration data or operating software or both together to the vacuum device (2, 3, 4) in the second data exchange.
  7. A method in accordance with claim 3, characterized in that step A is cyclically repeated.
  8. A method in accordance with claim 3, characterized in that step A is event-controlled.
EP07017431.3A 2006-09-23 2007-09-06 Assembly with vacuum device and method for its operation Active EP1903530B1 (en)

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DE102013106474A1 (en) * 2013-06-20 2014-12-24 Pfeiffer Vacuum Gmbh Arrangement with a vacuum device and method for detecting data communicated in a communication line between a vacuum device and a central control device
EP3620663B1 (en) * 2018-09-06 2021-02-17 Pfeiffer Vacuum Gmbh Vacuum device
EP3626973B1 (en) * 2019-08-12 2022-08-03 Pfeiffer Vacuum Gmbh Vacuum system and method for identifying electronic modules in such a system
EP3620661B1 (en) * 2019-08-30 2021-10-06 Pfeiffer Vacuum Gmbh Connecting device, system and method for operating a connecting device
EP3951738B1 (en) * 2021-12-13 2023-12-13 Pfeiffer Vacuum Technology AG Apparatus and method for communication with a vacuum device

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