EP2823182B1 - Installation de pompage amelioree et le procede de controle d'une telle installation de pompage - Google Patents

Installation de pompage amelioree et le procede de controle d'une telle installation de pompage Download PDF

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Publication number
EP2823182B1
EP2823182B1 EP13707630.3A EP13707630A EP2823182B1 EP 2823182 B1 EP2823182 B1 EP 2823182B1 EP 13707630 A EP13707630 A EP 13707630A EP 2823182 B1 EP2823182 B1 EP 2823182B1
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EP
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Prior art keywords
positive
displacement machine
pumping installation
gas
pumping
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EP13707630.3A
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German (de)
English (en)
French (fr)
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EP2823182A1 (fr
Inventor
Paul ALERS
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Ateliers Busch SA
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Ateliers Busch SA
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/10—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of internal-axis type with the outer member having more teeth or tooth equivalents, e.g. rollers, than the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/18—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature

Definitions

  • this invention relates to the technical field of volumetric machines and installations comprising such volumetric machines.
  • This invention is of particular interest to volumetric machines intended to receive compressible fluids (such as air) and which can be used as pumping machines.
  • this invention relates to the field of groups or pumping facilities comprising at least a first volumetric machine and a second volumetric machine, and the field of control methods pumping facilities of this type.
  • vacuum pumps that is to say, volumetric machines capable of extracting more or less completely the air (or another gas, or also a mixture of gas) contained in an enclosed volume or enclosure (eg in a "white room” used for the production of printed circuits).
  • Vacuum pumps Different types are known at this time. Among the best known and most widespread include pallet pumps, liquid ring pumps, screw pumps, scroll pumps (or Scroll) or lobe pumps (or Roots). Each of these different types Vacuum pumps have certain advantages (and disadvantages) that make them especially suitable for use in particular applications. As the characteristics of the different types of vacuum pumps are well known to those skilled in this technical field, a long elaboration of the various properties does not seem necessary to us.
  • Such a configuration typically consists of a so-called “primary” pump which is connected to the enclosure which must be evacuated and which first carries out a so-called “primary” vacuum, therefore pressures lying approximately in the range between 1 bar (10 3 mbar) and 1 mbar. Subsequently, the primary vacuum created by this primary pump is taken up by a so-called “secondary” pump, connected in series to the primary pump, which produces a larger vacuum.
  • the pressures at the outlet of a secondary pump are typically between 1 and 10 -4 mbar, although lower pressures are also possible.
  • a typical installation with two pumps is a combination of a Roots pump with another pump, eg a screw pump.
  • another pump eg a screw pump.
  • three (or more) pumps are also possible, as well as installations with pumps connected in parallel or with a combination of serial and parallel connections.
  • such a pumping unit typically comprises one or more valves (or valves), as well as an electronic and / or mechanical control module for controlling the flow of gas between the inlet and the outlet of the system.
  • valves or valves
  • electronic and / or mechanical control module for controlling the flow of gas between the inlet and the outlet of the system.
  • Elevated temperature within a pumping group is undesirable. It can in particular cause severe operating problems of the volumetric machines due for example to the chemical and / or physical reactions of the pumped gases. Some gases contain elements that can sublime or condense at high temperatures, producing residues inside the pumps. Over time, these residues can result in seizure or other malfunction of the pumps. Also, a temperature too high inside the pumps is very unfavorable for an optimal efficiency of the pumps, because of the fact that it is capable of causing a significant expansion of the metallic elements.
  • Cooling fluids typically have to be filtered, purified and / or changed from time to time, making the handling of the pumps also more complicated and costly.
  • Another result that the present invention aims to achieve is a pumping installation whose performance is maintained over time.
  • the present invention relates to a pumping installation comprising at least a first volumetric machine and a second volumetric machine, as well as a control module, in which a pumping installation a gas is evacuated from a volume enclosed by means of the first volumetric machine and / or the second volumetric machine, and wherein the pumping installation further comprises at least one control valve which is controlled by the control module to regulate the flow of gas between the enclosed volume and the output of the pumping system.
  • the main advantage of the present invention lies in the fact that the proposed pumping installation has means capable of controlling precisely the flow of gas to be pumped between the inlet and the outlet of the system. In this way, the collaboration between the volumetric machines can be adapted to the concrete needs of the situation, which makes it very easy to control the performance of the system. Therefore, it is also possible and easy to control the heating of the volumetric machines.
  • the present invention does not only concern a pumping installation according to the aforementioned embodiments but also a method of controlling such a pumping installation.
  • the figure 1 represents a block diagram of an IP pump installation according to an embodiment of the present invention.
  • a first volumetric machine is represented in a simplified manner by a rectangle bearing the reference sign 10 and a second volumetric machine is represented by another rectangle bearing the reference sign 20.
  • an enclosed VE volume that is evacuated using the IP pumping facility.
  • This enclosed volume VE can correspond to a clean room (therefore a room in which temperature, humidity and / or pressure are controlled with the aim of creating and maintaining the environmental conditions necessary for various industrial or research applications), a production enclosure (eg in a machine tool) or any other volume in which pressure must be precisely controlled.
  • the first volumetric machine 10 may in particular be a screw pump.
  • a screw pump consists essentially of two parallel screws which are rotated in opposite directions. With this rotation, the gases inside the pump can be transported between the inlet and the output of the pump. Screw pumps are dry pumps, so pumps in which the pumped gases never come into contact with lubricating liquids that could result in contamination. Thanks to this feature, screw pumps can be used in applications requiring a high degree of hygiene (eg in the food industry).
  • the volumetric machine 10 can be made by any other type of suitable pump.
  • This first volumetric machine 10 is connected to the enclosed volume VE through a conduit (or pressure line) LP1.
  • This conduit LP1 may in particular correspond to a conventional pipe, metal or any other suitable material. Of course, other types of conduit LP1 are also possible.
  • the first volumetric machine 10 is thus arranged and arranged to directly evacuate the air (or any other gas inside the enclosed volume VE) and to release it at its outlet which is typically made by an exhaust port.
  • conduit LP2 is connected to the exhaust port of the first volumetric machine 10. Like the conduit LP1 which connects the enclosed volume VE to the first volumetric machine 10, the conduit LP2 can be a conventional pipe, but also made of another appropriate way. The conduit LP2 thus takes the gases at the output of the volumetric machine 10 and subsequently channels them to the second volumetric machine 20 via a third conduit LP3.
  • the second volumetric machine 20 which receives the stream of gases that have been evacuated from the volume enclosed by the first volumetric machine 10 via the conduit LP3 may in particular be a vane pump.
  • Pallet pumps consist of a stator and a rotor with sliding vanes which rotates tangentially to the stator. During rotation, the pallets stay in contact with the stator walls.
  • the stator walls in an area are covered with an oil bath that provides both pump sealing and lubrication for moving parts.
  • the vane pumps are therefore not dry pumps, and the pumped gases can come into contact with the lubricants. These pumps are therefore typically not used in applications having higher hygiene standards.
  • the volumetric machine 20 is not necessarily a vane pump and it can also be performed by another type of suitable pump.
  • the outlet (the exhaust port) of the second volumetric machine 20 is connected to a fourth conduit LP4 which serves to evacuate the gases pumped by the second volumetric machine 20 at the output of the IP pump installation.
  • the LP4 conduit may also be a conventional pipe made of metal or any other suitable material.
  • other types of ducts are also conceivable, as well as a solution in which the LP4 duct is not provided and the gases leaving the volumetric machine 20 are directly directed to the output of the pumping installation. IP.
  • a control valve VC is connected between the conduits LP2 and LP3, thus between the first volumetric machine 10 and the second volumetric machine 20.
  • This control valve VC serves essentially to control the flow of gases and particularly to prevent the flow of gas pumped in the direction "back", that is to say to the volumetric machine 10.
  • Such control valves are already known in the art and their operating principle can especially be based on a check valve. Of course, any other type of control valve can be used if these other valves meet the above conditions.
  • the control valve VC can itself be controlled by an external control module MC.
  • the control module MC is an electronic and / or mechanical device that makes it possible to direct the operation of the control valve VC in order to regulate the flow of gases between the conduit LP1 and the conduit LP2 and thus between the enclosed volume VE and the outlet of the IP pumping system.
  • a fifth LP5 conduit leading directly to the output of the IP pumping system is also connected to the VC control valve.
  • the IP pumping system operates in the following way: When the first volumetric machine 10 is started up, the gases are pumped from the enclosed volume VE.
  • Figure 2 schematically represents a diagram with the evolution of the pumping capacity (which is also called "flow" of the pump) in the enclosed volume VE which is evacuated only with this first volumetric machine 10.
  • figure 3 represents the evolution of the temperature in the first volumetric machine 10 which corresponds directly to the pumping capacity of the first volumetric machine as represented in FIG. figure 2 .
  • the figure 4 also shows a schematic diagram with the evolution of the pumping capacity in the enclosed volume VE, but in the case where this volume is evacuated only with the second volumetric machine 20.
  • this second volumetric machine 20 shows a rather constant evolution.
  • the temperature in the second volumetric machine 20 evolves similarly to that in the volumetric machine 10, so shows a net increase in temperature above a limit pressure.
  • the present invention proposes to adjust the control valve VC through the control module MC to switch the flow of gas between a first path in which the gas is pumped only by the first volumetric machine 10 and a second path in which the gas is pumped by both the first volumetric machine 10 and the second volumetric machine 20.
  • the gas evacuated from the enclosed volume VE passes through the conduit LP1 and the first volumetric machine 10, arrives at the valve of VC control through the LP2 conduit and is then directly directed to the output of the IP pumping installation through the LP5 conduit.
  • the gas evacuated from the enclosed volume VE in the second case passes first through the conduit LP1, the first volumetric machine 10 and the second conduit LP2 to arrive at the control valve VC which directs it not to the outlet but to the second volumetric machine 20. Thereafter, the gas pumped by the second volumetric machine 20 out of the IP pumping installation through the LP4 conduit.
  • this switching is controlled temporally.
  • the IP pumping installation can in a first operating phase operate as in the first case described above, so with the gases that are pumped by the first path. Subsequently, after a certain period of time, the IP pump installation can operate as in the second case described above, so with the gases that are pumped by the second course.
  • Switching between the first and second paths can be programmed "static". It would be possible, for example, to program a switchover after operation in the first operating mode (run VE -> LP1 -> 10 -> LP2 -> VC -> LP5) of 20 or 30 seconds. In this case, the control module would count the time elapsed since the start of the pumping installation and instruct the control valve after reaching the preprogrammed time to change the gas flow path.
  • FIGS. 6 and 7 show schematically the evolution of the pumping capacity in the enclosed volume VE as it is evacuated both with the first volumetric machine 10 and the second volumetric machine 20, and the evolution of the corresponding temperature.
  • FIG 8 illustrates a second embodiment of the present invention schematically.
  • this second embodiment of the present invention comprises a third volumetric machine 30 which is interposed between the enclosed volume VE and the first volumetric machine 10.
  • the conduit LP1 is divided into two parts, namely the LP1 'conduits. and LP1. "Of course, other options for interconnection are quite conceivable.
  • This third volumetric machine 30 may typically be a Roots pump. Its function corresponds to the function of a "booster" pump which is used in a conventional manner in pumping installations known today. It would of course also be possible to use another type of volumetric machines or to add advantages, without departing from the spirit of the present invention.
  • the figures 9 and 10 illustrate respectively a third and a fourth embodiment of the present invention. These two embodiments of the present invention differ from the first and second embodiments of the present invention at a significant point which will be explained below.
  • the IP pumping installation also comprises a first volumetric machine 10 and a second volumetric machine 20 which are used to evacuate the enclosed volume VE (in particular a clean room, a production chamber or any other volume in which the pressure must be controlled in a precise way).
  • the first volumetric machine 10 may be a dry pump, eg a screw pump, but also any other suitable volumetric machine.
  • the second volumetric machine 20 it may in particular be a vane pump, but it is of course possible to make this second volumetric machine 20 by means of another suitable volumetric machine.
  • a pipe or pressure line LP1 connects this first volumetric machine 10 to the enclosed volume VE.
  • the output of the first volumetric machine 10 (then normally an exhaust port of the pump) is on its side connected to another conduit LP2 which can also be a conventional pipe, but also another suitable conduit.
  • This second duct LP2 takes the gases at the outlet of the volumetric machine 10 and channels them via a control valve VC to the second volumetric machine 20.
  • a third duct LP3 is also provided to connect the control valve VC to the second volumetric machine 20.
  • the output of the second volumetric machine 20 is connected to a fourth conduit LP4 which serves to evacuate the gases pumped by the second volumetric machine 20 at the exit of the pumping installation.
  • this LP4 conduit can also be a conventional pipe, made of metal or any other suitable material.
  • other types of ducts are also conceivable, as well as a solution in which the LP4 duct is not provided and the gases leaving the volumetric machine 20 are directly directed to the output of the pumping installation. IP.
  • the control valve VC is connected between the first volumetric machine 10 and the second volumetric machine 20.
  • the function of this control valve VC is also in this third embodiment of the present invention, first of all. control the flow of gases and particularly to prevent the flow of pumped gases in the "backward" direction, therefore to the volumetric machine 10.
  • the IP pump installation according to this third embodiment of the present invention also comprises a control module MC. It is this control module MC which directs the operation of the control valve VC so that it can regulate the flow of gases between the conduit LP1 and the conduit LP2 and thus between the enclosed volume VE and the output of the installation IP pumping.
  • a fifth conduit LP5 leading directly to the outlet of the IP pump installation can also be provided at the outlet of the VC control valve.
  • the IP pumping system according to this third embodiment of the present invention essentially corresponds to the IP pump installation of the first embodiment of the present invention, shown in FIG. figure 1 .
  • the operation of the IP pump installation according to this third embodiment differs significantly from the operation of the IP pump installation according to the first embodiment of the present invention.
  • the control valve VC is closed, that is to say, it is arranged not to allow the flow of gas between the first volumetric machine 10 and the second volumetric machine 20 through the conduit LP3.
  • the volumetric machine 10 and the volumetric machine 20 can be started according to the known procedures. Therefore, thanks to the fact that the volumetric machine 10 is connected directly to the enclosed volume VE, the entrapped gases in the enclosed volume VE can be evacuated through the volumetric machine 10. During this time, all these pumped gases come out of the IP pumping system through the LP5 conduit.
  • the diagram shown in figure 2 illustrates the evolution of the pumping capacity (or the "flow" of the pump) in the enclosed volume VE which is evacuated only with the first volumetric machine 10, and a schematic representation of the evolution of the temperature in the first volumetric machine 10 which corresponds to the pumping capacity of this first volumetric machine 10 of the figure 2 is illustrated in the figure 3 .
  • These two diagrams therefore also correspond to the data that is obtained in the case that has been described with respect to the first embodiment of the present invention.
  • the third embodiment of the present invention like the first embodiment of the present invention, also proposes to adjust the control valve VC through the control module MC for switching the flow of gas between a first path in which the gas is pumped only by the first volumetric machine 10 and a second path in which the gas is pumped by both the first volumetric machine 10 and the second volumetric machine 20.
  • the manner in which this setting is realized in the IP pump installation according to the third embodiment of the present invention differs from the manner used in the IP pump installation according to the first embodiment of the present invention.
  • the IP pump installation according to the third embodiment of the present invention uses a temperature sensor TP placed at the output of the first volumetric machine 10.
  • This temperature sensor is capable of the temperature of the gases at the outlet of the first volumetric machine 10 and transmit this thermal information to the control module MC so that it can control the control valve VC.
  • the control of the VC control valve works as follows: While the sensible temperature at the output of the first machine 10 remains below a predetermined value, the control valve VC remains in the initial position, that is to say with the conduit LP3 closed, and with the release of the gases pumped from the enclosed volume VE by the leads LP5.
  • the limit temperature can be chosen in a "dynamic" manner, that is to say according to the pumped gases, to ensure that the temperature at the outlet of the first volumetric machine 10 does not exceed the critical value that This would result in chemical and / or physical reactions of the pumped gases and residues inside the volumetric machine 10.
  • This limit temperature can in particular be determined in a practical manner for each concrete application and stored in the control module MC in order to be able to be used in the setting of the VC control valve.
  • the second volumetric machine 20 also works, even if it is connected to the LP3 conduit which does not contain gas to be pumped (since the control valve VC closes this duct). Therefore, this second volumetric machine 20 tends to heat up.
  • the control module MC can set the control valve VC to open the door. leads LP3 to the passage of gases leaving the first volumetric machine 10 and passing through the conduit LP2. At the same time, the conduit LP5 is closed. From this moment, the gas is pumped by both the first volumetric machine 10 and the second volumetric machine 20. This second volumetric machine 20 stops pumping against an empty conduit LP3 and its temperature tends to drop to wait for the temperature optimal work.
  • the second volumetric machine 20 in such a configuration is susceptible to overheating, especially since it is normally desirable to use a "small" machine with dimensions that are reduced to a minimum.
  • this second volumetric machine 20 may comprise a cooling mechanism more or less sophisticated.
  • this cooling mechanism can also be dynamic, so be controlled by a temperature sensor (independent of the TP sensor) to start the cooling only if the temperature of the second volumetric machine exceeds a predetermined value.
  • this fourth embodiment of the present invention is shown in FIG. figure 10 .
  • this fourth embodiment of the present invention like the second embodiment of the present invention (cf. figure 8 ), also comprises a third volumetric machine 30 (typically a Roots pump) which is interposed between the enclosed volume VE and the first volumetric machine 10.
  • the function of the third volumetric machine 30 corresponds to the function of a booster pump which is used in a conventional manner in pumping installations known today. It would of course also be possible to use another type of volumetric machines or to add advantages, without departing from the spirit of the present invention.
  • the present invention is subject to many variations as to its implementation. Although several embodiments have been described, it is clear that it is not conceivable to exhaustively identify all the possible modes. It is of course conceivable to replace a means described by equivalent means without departing from the scope of the present invention. Also, it is quite possible to combine the elements described with respect to the particular embodiments to thereby create new embodiments of the present invention. We also wish to clarify that the various embodiments of the present invention can probably be combined to create other suitable embodiments. In particular, it is not possible to realize a new pumping installation which comprises both the main characteristic of the first two embodiments (ie a pressure sensor) with a temperature sensor as proposed. by the third and fourth embodiments of the present invention.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Control Of Non-Positive-Displacement Pumps (AREA)
EP13707630.3A 2012-03-05 2013-03-05 Installation de pompage amelioree et le procede de controle d'une telle installation de pompage Active EP2823182B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL13707630T PL2823182T3 (pl) 2012-03-05 2013-03-05 Udoskonalona instalacja pompująca i sposób sterowania taką instalacją pompującą

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH00285/12A CH706231B1 (fr) 2012-03-05 2012-03-05 Installation de pompage et procédé de contrôle d'une telle installation.
PCT/EP2013/054396 WO2013131911A1 (fr) 2012-03-05 2013-03-05 Installation de pompage amelioree et le procede de controle d'une telle installation de pompage

Publications (2)

Publication Number Publication Date
EP2823182A1 EP2823182A1 (fr) 2015-01-14
EP2823182B1 true EP2823182B1 (fr) 2018-10-31

Family

ID=47827204

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Application Number Title Priority Date Filing Date
EP13707630.3A Active EP2823182B1 (fr) 2012-03-05 2013-03-05 Installation de pompage amelioree et le procede de controle d'une telle installation de pompage

Country Status (17)

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US (1) US11204036B2 (xx)
EP (1) EP2823182B1 (xx)
JP (1) JP2015509569A (xx)
KR (1) KR102002066B1 (xx)
CN (1) CN104204518B (xx)
AU (1) AU2013229569A1 (xx)
CA (1) CA2866211C (xx)
CH (1) CH706231B1 (xx)
DK (1) DK2823182T3 (xx)
ES (1) ES2706018T3 (xx)
HK (1) HK1204034A1 (xx)
IN (1) IN2014MN01761A (xx)
PL (1) PL2823182T3 (xx)
PT (1) PT2823182T (xx)
RU (1) RU2014140216A (xx)
TR (1) TR201818673T4 (xx)
WO (1) WO2013131911A1 (xx)

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CN113982928B (zh) * 2021-10-29 2024-05-07 山东宽量节能环保技术有限公司 一种螺杆真空泵与液环真空泵串并联组合系统

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Also Published As

Publication number Publication date
US20150204332A1 (en) 2015-07-23
EP2823182A1 (fr) 2015-01-14
CH706231A1 (fr) 2013-09-13
DK2823182T3 (da) 2019-01-07
CA2866211C (fr) 2019-08-27
CH706231B1 (fr) 2016-07-29
KR102002066B1 (ko) 2019-07-19
PT2823182T (pt) 2018-12-24
RU2014140216A (ru) 2016-04-27
AU2013229569A1 (en) 2014-09-25
US11204036B2 (en) 2021-12-21
PL2823182T3 (pl) 2019-04-30
HK1204034A1 (en) 2015-11-06
KR20140135181A (ko) 2014-11-25
ES2706018T3 (es) 2019-03-27
WO2013131911A1 (fr) 2013-09-12
CN104204518B (zh) 2017-03-08
CA2866211A1 (fr) 2013-09-12
CN104204518A (zh) 2014-12-10
IN2014MN01761A (xx) 2015-07-03
TR201818673T4 (tr) 2019-01-21
JP2015509569A (ja) 2015-03-30

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