EP2811259A4 - Dispositif de mesurage confocal - Google Patents
Dispositif de mesurage confocalInfo
- Publication number
- EP2811259A4 EP2811259A4 EP13744197.8A EP13744197A EP2811259A4 EP 2811259 A4 EP2811259 A4 EP 2811259A4 EP 13744197 A EP13744197 A EP 13744197A EP 2811259 A4 EP2811259 A4 EP 2811259A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- measurement device
- confocal measurement
- confocal
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
- G01B9/02035—Shaping the focal point, e.g. elongated focus
- G01B9/02036—Shaping the focal point, e.g. elongated focus by using chromatic effects, e.g. a wavelength dependent focal point
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
- G01B9/02042—Confocal imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
- G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012022539A JP5834979B2 (ja) | 2012-02-03 | 2012-02-03 | 共焦点計測装置 |
PCT/JP2013/050769 WO2013114959A1 (fr) | 2012-02-03 | 2013-01-17 | Dispositif de mesurage confocal |
Publications (4)
Publication Number | Publication Date |
---|---|
EP2811259A1 EP2811259A1 (fr) | 2014-12-10 |
EP2811259A4 true EP2811259A4 (fr) | 2015-08-12 |
EP2811259B1 EP2811259B1 (fr) | 2019-07-03 |
EP2811259B9 EP2811259B9 (fr) | 2019-11-20 |
Family
ID=48905001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP13744197.8A Active EP2811259B9 (fr) | 2012-02-03 | 2013-01-17 | Dispositif de mesure confocal |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP2811259B9 (fr) |
JP (1) | JP5834979B2 (fr) |
CN (1) | CN104067090B (fr) |
TW (1) | TWI500918B (fr) |
WO (1) | WO2013114959A1 (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105301004A (zh) * | 2015-11-05 | 2016-02-03 | 苏州威盛视信息科技有限公司 | 一种光源检测装置 |
US10317344B2 (en) * | 2016-09-07 | 2019-06-11 | Kla-Tencor Corporation | Speed enhancement of chromatic confocal metrology |
JP6819376B2 (ja) * | 2017-03-14 | 2021-01-27 | オムロン株式会社 | 変位計測装置 |
JP6880508B2 (ja) * | 2017-10-02 | 2021-06-02 | オムロン株式会社 | センサヘッド |
US11313671B2 (en) * | 2019-05-28 | 2022-04-26 | Mitutoyo Corporation | Chromatic confocal range sensing system with enhanced spectrum light source configuration |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1975554A1 (fr) * | 2007-03-30 | 2008-10-01 | Mitutoyo Corporation | Configuration de l'objectif d'un capteur chromatique |
DE102008020902A1 (de) * | 2008-04-18 | 2009-10-29 | Universität Stuttgart | Anordnung und Verfahren zur konfokalen, spektralen Zweistrahl-Interferometrie |
WO2010094805A1 (fr) * | 2009-02-23 | 2010-08-26 | Sirona Dental Systems Gmbh | Caméra dentaire tenue manuellement et procédé de relevé optique tridimensionnel |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5785651A (en) * | 1995-06-07 | 1998-07-28 | Keravision, Inc. | Distance measuring confocal microscope |
US5785851A (en) | 1996-08-23 | 1998-07-28 | Vesuvius Crucible Company | High capacity filter |
CN1376907A (zh) * | 2001-03-23 | 2002-10-30 | 成都中科百奥科技有限公司 | 激光共聚焦生物芯片扫描装置 |
JP2004126394A (ja) * | 2002-10-04 | 2004-04-22 | Nikon Corp | 回折光学素子 |
DE10321885B4 (de) * | 2003-05-07 | 2016-09-08 | Universität Stuttgart | Anordnung und Verfahren zur hochdynamischen, konfokalen Technik |
US7212330B2 (en) * | 2004-03-22 | 2007-05-01 | Angstrom, Inc. | Three-dimensional imaging system for pattern recognition |
JP2007147299A (ja) * | 2005-11-24 | 2007-06-14 | Kobe Steel Ltd | 変位測定装置及び変位測定方法 |
US7791712B2 (en) * | 2007-03-27 | 2010-09-07 | Mitutoyo Corporation | Chromatic confocal sensor fiber interface |
US20090296075A1 (en) * | 2008-05-29 | 2009-12-03 | Nanometrics Incorporated | Imaging Diffraction Based Overlay |
TW201017149A (en) * | 2008-08-06 | 2010-05-01 | Invitrox Inc | Use of focused light scattering techniques in biological applications |
NL2004539A (en) * | 2009-06-22 | 2010-12-23 | Asml Netherlands Bv | Object inspection systems and methods. |
JP2011170028A (ja) * | 2010-02-17 | 2011-09-01 | Canon Inc | 回折光学素子及びそれを有する撮像光学系 |
-
2012
- 2012-02-03 JP JP2012022539A patent/JP5834979B2/ja active Active
-
2013
- 2013-01-17 CN CN201380006127.8A patent/CN104067090B/zh active Active
- 2013-01-17 EP EP13744197.8A patent/EP2811259B9/fr active Active
- 2013-01-17 WO PCT/JP2013/050769 patent/WO2013114959A1/fr active Application Filing
- 2013-01-18 TW TW102101886A patent/TWI500918B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1975554A1 (fr) * | 2007-03-30 | 2008-10-01 | Mitutoyo Corporation | Configuration de l'objectif d'un capteur chromatique |
DE102008020902A1 (de) * | 2008-04-18 | 2009-10-29 | Universität Stuttgart | Anordnung und Verfahren zur konfokalen, spektralen Zweistrahl-Interferometrie |
WO2010094805A1 (fr) * | 2009-02-23 | 2010-08-26 | Sirona Dental Systems Gmbh | Caméra dentaire tenue manuellement et procédé de relevé optique tridimensionnel |
Non-Patent Citations (3)
Title |
---|
RUPRECHT A K ET AL: "CHROMATIC CONFOCAL DETECTION FOR HIGH-SPEED MICROTOPOGRAPHY MEASUREMENTS", PROCEEDINGS OF SPIE, S P I E - INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, US, vol. 5302, no. 1, 1 January 2003 (2003-01-01), pages 53 - 60, XP009084987, ISSN: 0277-786X, ISBN: 978-1-62841-467-7, DOI: 10.1117/12.525658 * |
See also references of WO2013114959A1 * |
W. LYDA ET AL: "<title>Chromatic confocal spectral interferometry for technical surface characterization</title>", PROCEEDINGS OF SPIE, vol. 7432, 20 August 2009 (2009-08-20), pages 74320Z - 74320Z-9, XP055084346, ISSN: 0277-786X, DOI: 10.1117/12.826902 * |
Also Published As
Publication number | Publication date |
---|---|
JP5834979B2 (ja) | 2015-12-24 |
TW201337239A (zh) | 2013-09-16 |
EP2811259B1 (fr) | 2019-07-03 |
TWI500918B (zh) | 2015-09-21 |
EP2811259B9 (fr) | 2019-11-20 |
JP2013160628A (ja) | 2013-08-19 |
EP2811259A1 (fr) | 2014-12-10 |
WO2013114959A1 (fr) | 2013-08-08 |
CN104067090A (zh) | 2014-09-24 |
CN104067090B (zh) | 2016-10-12 |
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