EP2738627A3 - Cellule de vapeur micro-usinée - Google Patents

Cellule de vapeur micro-usinée Download PDF

Info

Publication number
EP2738627A3
EP2738627A3 EP13191631.4A EP13191631A EP2738627A3 EP 2738627 A3 EP2738627 A3 EP 2738627A3 EP 13191631 A EP13191631 A EP 13191631A EP 2738627 A3 EP2738627 A3 EP 2738627A3
Authority
EP
European Patent Office
Prior art keywords
vapor cell
micro
solenoid
machined
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP13191631.4A
Other languages
German (de)
English (en)
Other versions
EP2738627A2 (fr
EP2738627B1 (fr
Inventor
Thomas Overstolz
Jacques Haesler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre Suisse dElectronique et Microtechnique SA CSEM
Original Assignee
Centre Suisse dElectronique et Microtechnique SA CSEM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Suisse dElectronique et Microtechnique SA CSEM filed Critical Centre Suisse dElectronique et Microtechnique SA CSEM
Publication of EP2738627A2 publication Critical patent/EP2738627A2/fr
Publication of EP2738627A3 publication Critical patent/EP2738627A3/fr
Application granted granted Critical
Publication of EP2738627B1 publication Critical patent/EP2738627B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G04HOROLOGY
    • G04FTIME-INTERVAL MEASURING
    • G04F5/00Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/14Apparatus for producing preselected time intervals for use as timing standards using atomic clocks
    • G04F5/145Apparatus for producing preselected time intervals for use as timing standards using atomic clocks using Coherent Population Trapping

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Ecology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
EP13191631.4A 2012-11-05 2013-11-05 Cellule de vapeur micro-usinée Active EP2738627B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201261722468P 2012-11-05 2012-11-05

Publications (3)

Publication Number Publication Date
EP2738627A2 EP2738627A2 (fr) 2014-06-04
EP2738627A3 true EP2738627A3 (fr) 2015-02-18
EP2738627B1 EP2738627B1 (fr) 2021-05-12

Family

ID=49546292

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13191631.4A Active EP2738627B1 (fr) 2012-11-05 2013-11-05 Cellule de vapeur micro-usinée

Country Status (1)

Country Link
EP (1) EP2738627B1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2790810C1 (ru) * 2021-11-09 2023-02-28 Федеральное Государственное Унитарное Предприятие "Всероссийский Научно-Исследовательский Институт Физико-Технических И Радиотехнических Измерений" (Фгуп "Вниифтри") Поглощающая ячейка квантового стандарта частоты и способы ее применения

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6957187B2 (ja) * 2017-04-18 2021-11-02 浜松ホトニクス株式会社 チップの製造方法、及び、シリコンチップ
US10976386B2 (en) 2018-07-17 2021-04-13 Hi Llc Magnetic field measurement system and method of using variable dynamic range optical magnetometers
WO2020036666A1 (fr) 2018-08-17 2020-02-20 Hi Llc Magnétomètre à pompage optique
US10983177B2 (en) 2018-08-20 2021-04-20 Hi Llc Magnetic field shaping components for magnetic field measurement systems and methods for making and using
US10627460B2 (en) 2018-08-28 2020-04-21 Hi Llc Systems and methods including multi-mode operation of optically pumped magnetometer(s)
WO2020060652A1 (fr) 2018-09-18 2020-03-26 Hi Llc Blindage magnétique dynamique et formation de faisceau utilisant un ferrofluide pour magnéto-encéphalographie (meg) compacte
US11370941B2 (en) 2018-10-19 2022-06-28 Hi Llc Methods and systems using molecular glue for covalent bonding of solid substrates
US11307268B2 (en) 2018-12-18 2022-04-19 Hi Llc Covalently-bound anti-relaxation surface coatings and application in magnetometers
US11294008B2 (en) 2019-01-25 2022-04-05 Hi Llc Magnetic field measurement system with amplitude-selective magnetic shield
EP3924743A1 (fr) 2019-02-12 2021-12-22 Hi LLC Filtres à boucle de rétroaction neurale pour systèmes et procédés de magnétoencéphalographie (meg) à plage dynamique améliorée
WO2020205219A1 (fr) 2019-03-29 2020-10-08 Hi Llc Réseaux de magnétomètres intégrés pour systèmes et procédés de détection de magnétoencéphalographie (meg)
US11269027B2 (en) 2019-04-23 2022-03-08 Hi Llc Compact optically pumped magnetometers with pump and probe configuration and systems and methods
US11131724B2 (en) 2019-05-03 2021-09-28 Hi Llc Systems and methods for measuring current output by a photodetector of a wearable sensor unit that includes one or more magnetometers
US11839474B2 (en) 2019-05-31 2023-12-12 Hi Llc Magnetoencephalography (MEG) phantoms for simulating neural activity
US11131729B2 (en) 2019-06-21 2021-09-28 Hi Llc Systems and methods with angled input beams for an optically pumped magnetometer
US11415641B2 (en) 2019-07-12 2022-08-16 Hi Llc Detachable arrangement for on-scalp magnetoencephalography (MEG) calibration
WO2021026143A1 (fr) 2019-08-06 2021-02-11 Hi Llc Systèmes et procédés ayant un réseau de magnétomètre optique avec séparateurs de faisceau
US11747413B2 (en) 2019-09-03 2023-09-05 Hi Llc Methods and systems for fast field zeroing for magnetoencephalography (MEG)
US11474129B2 (en) 2019-11-08 2022-10-18 Hi Llc Methods and systems for homogenous optically-pumped vapor cell array assembly from discrete vapor cells
CN111024123B (zh) * 2019-12-18 2022-01-21 北京航空航天大学 一种碱金属气室内多层ots涂层制作方法
US11801003B2 (en) 2020-02-12 2023-10-31 Hi Llc Estimating the magnetic field at distances from direct measurements to enable fine sensors to measure the magnetic field from the brain using a neural detection system
US11980466B2 (en) 2020-02-12 2024-05-14 Hi Llc Nested and parallel feedback control loops for ultra-fine measurements of magnetic fields from the brain using a neural detection system
US11872042B2 (en) 2020-02-12 2024-01-16 Hi Llc Self-calibration of flux gate offset and gain drift to improve measurement accuracy of magnetic fields from the brain using a wearable neural detection system
US11604236B2 (en) 2020-02-12 2023-03-14 Hi Llc Optimal methods to feedback control and estimate magnetic fields to enable a neural detection system to measure magnetic fields from the brain
US11977134B2 (en) 2020-02-24 2024-05-07 Hi Llc Mitigation of an effect of capacitively coupled current while driving a sensor component over an unshielded twisted pair wire configuration
US11428756B2 (en) 2020-05-28 2022-08-30 Hi Llc Magnetic field measurement or recording systems with validation using optical tracking data
US11779250B2 (en) 2020-05-28 2023-10-10 Hi Llc Systems and methods for recording biomagnetic fields of the human heart
US11766217B2 (en) 2020-05-28 2023-09-26 Hi Llc Systems and methods for multimodal pose and motion tracking for magnetic field measurement or recording systems
US11779251B2 (en) 2020-05-28 2023-10-10 Hi Llc Systems and methods for recording neural activity
US11604237B2 (en) 2021-01-08 2023-03-14 Hi Llc Devices, systems, and methods with optical pumping magnetometers for three-axis magnetic field sensing
US11803018B2 (en) 2021-01-12 2023-10-31 Hi Llc Devices, systems, and methods with a piezoelectric-driven light intensity modulator
US12007454B2 (en) 2021-03-11 2024-06-11 Hi Llc Devices, systems, and methods for suppressing optical noise in optically pumped magnetometers

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6265945B1 (en) * 1999-10-25 2001-07-24 Kernco, Inc. Atomic frequency standard based upon coherent population trapping
US20050007118A1 (en) * 2003-04-09 2005-01-13 John Kitching Micromachined alkali-atom vapor cells and method of fabrication
US20060022761A1 (en) * 2004-07-16 2006-02-02 Abeles Joseph H Chip-scale atomic clock (CSAC) and method for making same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101774529B (zh) * 2010-01-26 2012-11-14 北京航空航天大学 一种mems原子腔芯片及其制备方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6265945B1 (en) * 1999-10-25 2001-07-24 Kernco, Inc. Atomic frequency standard based upon coherent population trapping
US20050007118A1 (en) * 2003-04-09 2005-01-13 John Kitching Micromachined alkali-atom vapor cells and method of fabrication
US20060022761A1 (en) * 2004-07-16 2006-02-02 Abeles Joseph H Chip-scale atomic clock (CSAC) and method for making same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2790810C1 (ru) * 2021-11-09 2023-02-28 Федеральное Государственное Унитарное Предприятие "Всероссийский Научно-Исследовательский Институт Физико-Технических И Радиотехнических Измерений" (Фгуп "Вниифтри") Поглощающая ячейка квантового стандарта частоты и способы ее применения

Also Published As

Publication number Publication date
EP2738627A2 (fr) 2014-06-04
EP2738627B1 (fr) 2021-05-12

Similar Documents

Publication Publication Date Title
EP2738627A3 (fr) Cellule de vapeur micro-usinée
WO2015100221A3 (fr) Sondes de spectrométrie de masse et systèmes d'ionisation d'un échantillon
WO2013130274A3 (fr) Alliage d'aluminium avec ajouts de scandium, de zirconium et d'erbium
MX2015014132A (es) Lamina de aleacion de aluminio para formacion por prensado, proceso para manufactura del mismo, y producto formado por prensado del mismo.
EP2365403A3 (fr) Système oscillateur
WO2012098546A3 (fr) Composés antioxydants, anti-inflammatoires, antirayons, chélateurs métalliques et leurs utilisations
EP2351864A4 (fr) Alliage à module constant à dureté élevée insensible au magnétisme, son procédé de fabrication, spiral, dispositif d'entraînement mécanique et montre
WO2014000967A3 (fr) Capteur acoustique doté d'une membrane en matériau composite renforcé par fibres
MX2011008936A (es) Anticuerpos que contienen peptidos terapeuticos mimeticos de tpo/epo.
WO2012051557A3 (fr) Ensemble lunettes
WO2015092012A3 (fr) Procédé de fabrication d'un composant horloger
WO2014091490A3 (fr) Diagnostic de maladies auto-immunes utilisant un profil spécifique d'anticorps
EP2570874A3 (fr) Tiges et procédés pour fixer un capteur atomique
WO2011157261A3 (fr) Procédé de mesure dynamométrique optique à faibles vibrations, notamment à températures élevées
WO2016016666A9 (fr) Alliages de rhodium
WO2010136814A3 (fr) Dépôt électrolytique de zirconium élémentaire
MX2013005417A (es) Tabla para remo.
WO2016016832A3 (fr) Montre-bracelet
WO2014153569A3 (fr) Complication horlogère d'un baromètre enregistreur
EP2530414A3 (fr) Soupape de compensation pour environnements, tels qu'une chambre froide, dans laquelle la pression est différente de l'atmosphère
WO2015090944A3 (fr) Montre comprenant un capteur de pression barométrique
FR2967166B1 (fr) Materiau metallique a gradient d'elasticite
WO2011135079A3 (fr) Actionneur auto-rétractable
WO2008141837A3 (fr) Dispositif pour générateur d'oscillations
EP2565733A3 (fr) Pièce d'horlogerie

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20131105

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

RIC1 Information provided on ipc code assigned before grant

Ipc: G04F 5/14 20060101AFI20140922BHEP

Ipc: H03L 7/26 20060101ALI20140922BHEP

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

RIC1 Information provided on ipc code assigned before grant

Ipc: G04F 5/14 20060101AFI20150109BHEP

Ipc: H03L 7/26 20060101ALI20150109BHEP

R17P Request for examination filed (corrected)

Effective date: 20150703

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20200320

RIC1 Information provided on ipc code assigned before grant

Ipc: G04F 5/14 20060101AFI20201023BHEP

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20201208

RIN1 Information on inventor provided before grant (corrected)

Inventor name: OVERSTOLZ, THOMAS

Inventor name: HAESLER, JACQUES

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

REG Reference to a national code

Ref country code: DE

Ref legal event code: R083

Ref document number: 602013077432

Country of ref document: DE

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

RIN2 Information on inventor provided after grant (corrected)

Inventor name: HAESLER, JACQUES

Inventor name: OVERSTOLZ, THOMAS

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602013077432

Country of ref document: DE

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1392584

Country of ref document: AT

Kind code of ref document: T

Effective date: 20210615

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG9D

REG Reference to a national code

Ref country code: AT

Ref legal event code: MK05

Ref document number: 1392584

Country of ref document: AT

Kind code of ref document: T

Effective date: 20210512

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20210512

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210812

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210913

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210812

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210813

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210912

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 602013077432

Country of ref document: DE

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20220215

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210912

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20211105

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20211130

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20211130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20211105

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20131105

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20231123

Year of fee payment: 11

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20231123

Year of fee payment: 11

Ref country code: DE

Payment date: 20231120

Year of fee payment: 11

Ref country code: CH

Payment date: 20231201

Year of fee payment: 11

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210512