EP2738627A3 - Micro-machined vapor cell - Google Patents

Micro-machined vapor cell Download PDF

Info

Publication number
EP2738627A3
EP2738627A3 EP13191631.4A EP13191631A EP2738627A3 EP 2738627 A3 EP2738627 A3 EP 2738627A3 EP 13191631 A EP13191631 A EP 13191631A EP 2738627 A3 EP2738627 A3 EP 2738627A3
Authority
EP
European Patent Office
Prior art keywords
vapor cell
micro
solenoid
machined
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP13191631.4A
Other languages
German (de)
French (fr)
Other versions
EP2738627A2 (en
EP2738627B1 (en
Inventor
Thomas Overstolz
Jacques Haesler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre Suisse dElectronique et Microtechnique SA CSEM
Original Assignee
Centre Suisse dElectronique et Microtechnique SA CSEM
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Filing date
Publication date
Application filed by Centre Suisse dElectronique et Microtechnique SA CSEM filed Critical Centre Suisse dElectronique et Microtechnique SA CSEM
Publication of EP2738627A2 publication Critical patent/EP2738627A2/en
Publication of EP2738627A3 publication Critical patent/EP2738627A3/en
Application granted granted Critical
Publication of EP2738627B1 publication Critical patent/EP2738627B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04F—TIME-INTERVAL MEASURING
    • G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/14—Apparatus for producing preselected time intervals for use as timing standards using atomic clocks
    • G04F5/145—Apparatus for producing preselected time intervals for use as timing standards using atomic clocks using Coherent Population Trapping

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  • Life Sciences & Earth Sciences (AREA)
  • Ecology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)

Abstract

The invention concerns a micro-machined vapor cell (1) comprising a central silicon element (10) forming a cavity (20) containing vapor cell reactants such as alkali metal or alkali metal azide, at least a buffer gas, and/or at least an anti relaxation coating; a first (30) and a second (40) glass caps sealing the cavity (20); and a solenoid (50) arranged to provide a homogeneous magnetic field to said vapor cell (1). The solenoid (50) is coiled directly on the central silicon element (10) of the vapor cell (1). This invention is an improvement for the highly miniaturized atomic clocks developments.
EP13191631.4A 2012-11-05 2013-11-05 Micro-machined vapor cell Active EP2738627B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201261722468P 2012-11-05 2012-11-05

Publications (3)

Publication Number Publication Date
EP2738627A2 EP2738627A2 (en) 2014-06-04
EP2738627A3 true EP2738627A3 (en) 2015-02-18
EP2738627B1 EP2738627B1 (en) 2021-05-12

Family

ID=49546292

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13191631.4A Active EP2738627B1 (en) 2012-11-05 2013-11-05 Micro-machined vapor cell

Country Status (1)

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EP (1) EP2738627B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2790810C1 (en) * 2021-11-09 2023-02-28 Федеральное Государственное Унитарное Предприятие "Всероссийский Научно-Исследовательский Институт Физико-Технических И Радиотехнических Измерений" (Фгуп "Вниифтри") Absorbing cell of a quantum frequency standard and methods of its application

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Publication number Priority date Publication date Assignee Title
JP6957187B2 (en) * 2017-04-18 2021-11-02 浜松ホトニクス株式会社 Chip manufacturing method and silicon chip
US10976386B2 (en) 2018-07-17 2021-04-13 Hi Llc Magnetic field measurement system and method of using variable dynamic range optical magnetometers
US11262420B2 (en) 2018-08-17 2022-03-01 Hi Llc Integrated gas cell and optical components for atomic magnetometry and methods for making and using
WO2020040882A1 (en) 2018-08-20 2020-02-27 Hi Llc Magnetic field shaping components for magnetic field measurement systems and methods for making and using
US10627460B2 (en) 2018-08-28 2020-04-21 Hi Llc Systems and methods including multi-mode operation of optically pumped magnetometer(s)
US11237225B2 (en) 2018-09-18 2022-02-01 Hi Llc Dynamic magnetic shielding and beamforming using ferrofluid for compact Magnetoencephalography (MEG)
US11370941B2 (en) 2018-10-19 2022-06-28 Hi Llc Methods and systems using molecular glue for covalent bonding of solid substrates
US11307268B2 (en) 2018-12-18 2022-04-19 Hi Llc Covalently-bound anti-relaxation surface coatings and application in magnetometers
US11294008B2 (en) 2019-01-25 2022-04-05 Hi Llc Magnetic field measurement system with amplitude-selective magnetic shield
WO2020167450A1 (en) 2019-02-12 2020-08-20 Hi Llc Neural feedback loop filters for enhanced dynamic range magnetoencephalography (meg) systems and methods
US11360164B2 (en) 2019-03-29 2022-06-14 Hi Llc Integrated magnetometer arrays for magnetoencephalography (MEG) detection systems and methods
US11269027B2 (en) 2019-04-23 2022-03-08 Hi Llc Compact optically pumped magnetometers with pump and probe configuration and systems and methods
US11131723B2 (en) 2019-05-03 2021-09-28 Hi Llc Single controller for wearable sensor unit that includes an array of magnetometers
US11839474B2 (en) 2019-05-31 2023-12-12 Hi Llc Magnetoencephalography (MEG) phantoms for simulating neural activity
US11131729B2 (en) 2019-06-21 2021-09-28 Hi Llc Systems and methods with angled input beams for an optically pumped magnetometer
US11415641B2 (en) 2019-07-12 2022-08-16 Hi Llc Detachable arrangement for on-scalp magnetoencephalography (MEG) calibration
WO2021026143A1 (en) 2019-08-06 2021-02-11 Hi Llc Systems and methods having an optical magnetometer array with beam splitters
US11747413B2 (en) 2019-09-03 2023-09-05 Hi Llc Methods and systems for fast field zeroing for magnetoencephalography (MEG)
US11474129B2 (en) 2019-11-08 2022-10-18 Hi Llc Methods and systems for homogenous optically-pumped vapor cell array assembly from discrete vapor cells
CN111024123B (en) * 2019-12-18 2022-01-21 北京航空航天大学 Method for manufacturing multi-layer OTS coating in alkali metal air chamber
US11801003B2 (en) 2020-02-12 2023-10-31 Hi Llc Estimating the magnetic field at distances from direct measurements to enable fine sensors to measure the magnetic field from the brain using a neural detection system
US11604236B2 (en) 2020-02-12 2023-03-14 Hi Llc Optimal methods to feedback control and estimate magnetic fields to enable a neural detection system to measure magnetic fields from the brain
US11980466B2 (en) 2020-02-12 2024-05-14 Hi Llc Nested and parallel feedback control loops for ultra-fine measurements of magnetic fields from the brain using a neural detection system
US11872042B2 (en) 2020-02-12 2024-01-16 Hi Llc Self-calibration of flux gate offset and gain drift to improve measurement accuracy of magnetic fields from the brain using a wearable neural detection system
US11977134B2 (en) 2020-02-24 2024-05-07 Hi Llc Mitigation of an effect of capacitively coupled current while driving a sensor component over an unshielded twisted pair wire configuration
US11428756B2 (en) 2020-05-28 2022-08-30 Hi Llc Magnetic field measurement or recording systems with validation using optical tracking data
US11779251B2 (en) 2020-05-28 2023-10-10 Hi Llc Systems and methods for recording neural activity
WO2021242682A1 (en) 2020-05-28 2021-12-02 Hi Llc Systems and methods for recording biomagnetic fields of the human heart
US11766217B2 (en) 2020-05-28 2023-09-26 Hi Llc Systems and methods for multimodal pose and motion tracking for magnetic field measurement or recording systems
US11604237B2 (en) 2021-01-08 2023-03-14 Hi Llc Devices, systems, and methods with optical pumping magnetometers for three-axis magnetic field sensing
US11803018B2 (en) 2021-01-12 2023-10-31 Hi Llc Devices, systems, and methods with a piezoelectric-driven light intensity modulator
US12007454B2 (en) 2021-03-11 2024-06-11 Hi Llc Devices, systems, and methods for suppressing optical noise in optically pumped magnetometers

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6265945B1 (en) * 1999-10-25 2001-07-24 Kernco, Inc. Atomic frequency standard based upon coherent population trapping
US20050007118A1 (en) * 2003-04-09 2005-01-13 John Kitching Micromachined alkali-atom vapor cells and method of fabrication
US20060022761A1 (en) * 2004-07-16 2006-02-02 Abeles Joseph H Chip-scale atomic clock (CSAC) and method for making same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101774529B (en) * 2010-01-26 2012-11-14 北京航空航天大学 MEMS atom cavity chip and preparation method thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6265945B1 (en) * 1999-10-25 2001-07-24 Kernco, Inc. Atomic frequency standard based upon coherent population trapping
US20050007118A1 (en) * 2003-04-09 2005-01-13 John Kitching Micromachined alkali-atom vapor cells and method of fabrication
US20060022761A1 (en) * 2004-07-16 2006-02-02 Abeles Joseph H Chip-scale atomic clock (CSAC) and method for making same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2790810C1 (en) * 2021-11-09 2023-02-28 Федеральное Государственное Унитарное Предприятие "Всероссийский Научно-Исследовательский Институт Физико-Технических И Радиотехнических Измерений" (Фгуп "Вниифтри") Absorbing cell of a quantum frequency standard and methods of its application

Also Published As

Publication number Publication date
EP2738627A2 (en) 2014-06-04
EP2738627B1 (en) 2021-05-12

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