EP2715139A1 - Vacuum pump - Google Patents
Vacuum pumpInfo
- Publication number
- EP2715139A1 EP2715139A1 EP12793624.3A EP12793624A EP2715139A1 EP 2715139 A1 EP2715139 A1 EP 2715139A1 EP 12793624 A EP12793624 A EP 12793624A EP 2715139 A1 EP2715139 A1 EP 2715139A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- chamber
- pump chamber
- stage
- side panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C13/00—Adaptations of machines or pumps for special use, e.g. for extremely high pressures
- F04C13/007—Venting; Gas and vapour separation during pumping
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/18—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
- F04C27/009—Shaft sealings specially adapted for pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/40—Pumps with means for venting areas other than the working chamber, e.g. bearings, gear chambers, shaft seals
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/30—Casings or housings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2280/00—Arrangements for preventing or removing deposits or corrosion
- F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
Definitions
- the present invention relates to a vacuum pump for use in a process such as a CVD process or an etching process which serves as part of fabrication methods for producing semiconductors, liquid crystals, solar cells, LEDs, etc., and more particularly to a vacuum pump for use in a process wherein a sublimable gas or a corrosive gas tends to flow into the vacuum pump.
- Vacuum pumps which are connected to a vacuum chamber to discharge a process gas introduced in the vacuum chamber, generally include a pump casing having an inlet port and an outlet port and a pump chamber defined therein, and rotors rotatably housed in the pump casing.
- the process gas which has flowed through the inlet port into the pump chamber, is compressed by the rotors and then discharged out of the pump chamber through the outlet port.
- the rotors are fixedly mounted on respective rotational shafts extending through the pump casing.
- Each of the rotational shafts has opposite ends rotatably supported by respective bearings that are disposed in respective bearing compartments on respective sides of the pump casing.
- the inlet port region of the pump casing of the vacuum pump which is connected to the vacuum chamber, is kept under a vacuum which is at the same level as the vacuum in the vacuum chamber and the outlet port region of the vacuum casing is kept substantially under the atmospheric pressure as it is vented to the atmosphere.
- the opposite ends of the rotational shafts are rotatably supported by the respective bearings, and are sealed by contact seals or non-contact seals to protect the bearings against damage by products that are generated by the process gas which has entered the bearings.
- the non-contact seals are widely used to seal the rotational shafts for protection against contact-induced damage of the rotational shafts.
- the pressure of a process gas in the vacuum pump increases stepwise as the process gas flows through the successive pump chambers, such as first, second, and third pump chambers, of the vacuum pump.
- the process gas is higher in pressure on the outlet side thereof than on the inlet side thereof. Therefore, the pressure of the process gas in the final-stage pump chamber is essentially equal to the atmospheric pressure on the outlet side (discharge port) thereof, and is lower than the atmospheric pressure on the inlet side thereof.
- the pressure of the process gas in the bearing compartment which is adjacent to the final-state pump chamber and houses bearings therein, is commensurate with the pressure (average pressure) in the final-state pump chamber.
- the pressure on the inlet side of the final-stage pump chamber changes due to an influx of the process gas from the vacuum chamber or the like. For example, when the process gas flows from the vacuum chamber into the final-stage pump chamber, the pressure on the inlet side of the final-stage pump chamber rises from 200 Torr to 300 Torr. On the other hand, the pressure on the outlet side of the final-stage pump chamber remains substantially unchanged from the atmospheric pressure because the outlet side is vented to the atmosphere through a pump discharge pipe.
- the dry pump disclosed in Japanese laid-open patent publication No. 2005- 105829 serves to minimize vaporization of the lubricant for effectively keeping the lubricant in the lubricant chamber at a low temperature while at the same time keeping the pump chamber at a high temperature to lend itself to the discharging of a gas such as a condensable gas or a sublimable gas.
- this disclosed dry pump has nothing to do with the protection against the process gas of the bearings that is disposed in a bearing compartment disposed on a side of the pump casing. It has widely been customary to introduce a purge gas, such as an N 2 gas or the like, into the non-contact seals on the rotational shafts to prevent the process gas from leaking into the bearings.
- the present invention has been made in view of the above situation in the background art. It is therefore an object of the present invention to provide a vacuum pump which is capable of preventing a process gas introduced into pump chambers from leaking into bearings effectively for thereby protecting the bearings against the process gas.
- the present invention provides a vacuum pump comprising a pump casing having an inlet port, an outlet port, and a pump chamber defined therein, a rotational shaft having opposite ends rotatably supported by bearings and extending longitudinally in the pump casing, and a rotor housed in the pump chamber and coupled to the rotational shaft for rotation in unison with the rotational shaft.
- the pump casing has an atmosphere-vented compartment defined therein which is held in fluid communication with the outlet port of the pump casing and vented to the atmosphere.
- the atmosphere-vented compartment which is held in fluid communication with the outlet port of the pump casing and vented to the atmosphere is provided near the outlet port, even when the pressure in the pump chamber changes and non-contact seals are used to seal the rotational shaft, a chamber that is positioned outside the atmosphere- vented compartment and houses one of the bearing therein is maintained substantially at the atmospheric pressure at all times. Therefore, a process gas, which is introduced from a vacuum chamber into the pump chamber, is reliably prevented from leaking into the chamber positioned outside the atmosphere-vented compartment and housing one of the bearings therein. The bearing is thus protected against the process gas.
- the pump chamber comprises a plurality of pump chambers held in fluid communication with each other, and the rotor comprises a plurality of rotors disposed respectively in the pump chambers for rotation in unison with the rotational shaft.
- the vacuum pump is a multistage vacuum pump
- the pressure on an inlet side of the final-stage pump chamber is lower than the atmospheric pressure.
- the pressure (average pressure) in the final-stage pump chamber changes, e.g., increases.
- the atmosphere-vented compartment is disposed outside the final-stage pump chamber, such a change in the pressure (average pressure) in the final-stage pump chamber is prevented from affecting the pressure in the chamber positioned outside the atmosphere-vented compartment and housing one of the bearings therein.
- the vacuum pump further comprises a side panel disposed on an end wall of the pump casing, the rotational shaft extending through the side panel, the side panel having a purge gas passage defined therein for supplying a purge gas to a portion of the rotational shaft which is disposed in the side panel.
- the purge gas passage is defined in the side panel through which the rotational shaft extends, for supplying the purge gas to the portion of the rotational shaft which is disposed in the side panel, a non-contact seal is provided between the side panel and the rotational shaft for preventing the rotational shaft from suffering contact-induced wear.
- the process gas which has flowed into the pump chamber, is prevented from leaking into the chamber positioned outside the atmosphere-vented compartment and housing one of the bearings therein.
- the bearing is thus reliably protected against the process gas.
- FIG. 1 is a vertical sectional front view of a vacuum pump according to an embodiment of the present invention.
- FIG. 2 is a vertical sectional side view of a first-stage pump chamber of a main pump of the vacuum pump provided in the vacuum pump shown in FIG. 1. Description of Embodiments
- FIG. 1 is a vertical sectional front view of a vacuum pump 10 according to an embodiment of the present invention.
- the vacuum pump 10 includes a booster pump 12 disposed on a vacuum side and a main pump 14 disposed on an atmosphere side, which are connected to each other by a joint pipe 16.
- the main pump 14 comprises a six-stage roots vacuum pump
- the booster pump 12 comprises a single-stage roots vacuum pump.
- the booster pump 12 includes a pump casing 22 having a substantially cylindrical outer barrel 20 with a pump chamber 18 defined therein, and a pair of rotational shafts 26 disposed through the pump casing 22 and synchronously rotatable about their own axes in respective opposite directions by energizing an electric motor 24.
- the pump chamber 18 houses a pair of rotor 28, such as two-lobed rotors, rotatably therein with a predetermined clearance therebetween.
- the rotors 28 are fixedly mounted respectively on the rotational shafts 26.
- the outer barrel 20 has an inlet port 20a defined in its wall and connected to a discharge pipe (not shown) extending from a vacuum chamber or the like that is to be evacuated by the vacuum pump 10, and an outlet port 20b defined in its wall and connected to the joint pipe 16.
- a process gas from the vacuum chamber or the like flows through the inlet port 24a into the pump chamber 18, is compressed by the rotors 28 in the pump chamber 18, and is then discharged through the outlet port 20b into the joint pipe 16.
- the outer circumferential surface of the outer barrel 20 of the pump casing 22, except the inlet port 20a and the outlet port 20b, is surrounded by a heater jacket 30 which is of a substantially hollow cylindrical shape. When energized, the heater jacket 30 heats the interior of the pump chamber 18.
- the booster pump 12 is generally kept at a high vacuum level (low pressure level) therein, and has a low temperature as it does not produce much heat of compression. Therefore, even if the pressure in the pump chamber 18 is low, a sublimable substance or the like contained in the process gas, which has flowed into the pump chamber 18, is liable to be deposited on the inner circumferential surface of the pump chamber 18. However, by increasing the temperature in the pump chamber 18 by the heater jacket 30 as described above, the sublimable substance or the like contained in the process gas, which has flowed into the pump chamber 18, is prevented from being deposited on the inner circumferential surface of the pump chamber 18.
- Two side panels 32a, 32b are disposed respectively on the axial ends of the pump casing 22.
- the rotational shafts 26 are rotatably supported at their outer ends by bearings 36a, 36b housed in bearing housings 34a, 34b that are mounted respectively on the side panels 32a, 32b.
- Two lubricant housings 40a, 40b for holding a lubricant therein are disposed on respective outer side surfaces of the side panels 32a, 32b.
- the electric motor 24 has a motor housing coupled to one of the lubricant housings 40b.
- the side panels 32a, 32b have respective purge gas passages 42a, 42b for supplying a purge gas, such as an N 2 gas or the like, to the portions of the rotational shafts 26 in the side panels 32a, 32b to prevent the process gas from flowing out of the pump chamber 18 into the bearings 36a, 36b.
- a purge gas such as an N 2 gas or the like
- the purge gas supplied from the purge gas passages 42a, 42b provides non-contact seals between the side panels 32a, 32b and the rotational shafts 26 for protecting the rotational shafts 26 against contact-induced wear.
- the main pump 14 of this embodiment comprises a six-stage roots vacuum pump, and includes a pump casing 56 having a substantially cylindrical outer barrel 54 with six pump chambers 50a-50f, i.e., first- through sixth-stage pump chambers 50a-50f, defined therein, an atmosphere-vented compartment 52 defined therein adjacent to the sixth-stage pump chamber 50f, and a pair of rotational shafts 60 disposed through the pump casing 56 and synchronously rotatable about their own axes in respective opposite directions by energizing an electric motor 58.
- a pump casing 56 having a substantially cylindrical outer barrel 54 with six pump chambers 50a-50f, i.e., first- through sixth-stage pump chambers 50a-50f, defined therein, an atmosphere-vented compartment 52 defined therein adjacent to the sixth-stage pump chamber 50f, and a pair of rotational shafts 60 disposed through the pump casing 56 and synchronously rotatable about their own axes in respective opposite directions by energizing an electric motor 58
- the first-stage pump chamber 50a which is disposed on a suction side of the main pump 14, houses a pair of rotors 62a, such as three-lobed rotors, rotatably therein, as shown in FIG. 2.
- the second-stage pump chamber 50b houses a pair of rotors 62b, such as three-lobed rotors, rotatably therein
- the third-stage pump chamber 50c houses a pair of rotors 62c, such as three-lobed rotors, rotatably therein.
- the fourth-stage pump chamber 50d houses a pair of rotors 62d, such as three-lobed rotors, rotatably therein
- the fifth-stage pump chamber 50e houses a pair of rotors 62e, such as three-lobed rotors, rotatably therein
- the sixth-stage pump chamber 50e which is disposed on a discharge side of the main pump 14, houses a pair of rotors 62f, such as three-lobed rotors, rotatably therein.
- One linear array of rotors 62a- 62f is fixedly mounted on one of the rotational shafts 60, whereas the other linear array of rotors 62a-62f is fixedly mounted on the other rotational shaft 60.
- the pump casing 56 has a pair of end walls 64a, 64b closing the respective opposite ends of the outer barrel 54 and five, i.e., first through fifth, partition walls 66a-
- the end wall 64a and the first partition wall 66a define the first-stage pump chamber 50a therebetween in the outer barrel 54.
- the first partition wall 66a and the second partition wall 66b define the second-stage pump chamber 50b therebetween in the outer barrel 54.
- the second partition wall 66b and the third partition wall 66c define the third-stage pump chamber 50c therebetween in the outer barrel 54.
- the third partition wall 66c and the fourth partition wall 66d define the fourth-stage pump chamber 50d therebetween in the outer barrel 54.
- the fourth partition wall 66d and the fifth partition wall 66e define the fifth- stage pump chamber 50e therebetween in the outer barrel 54.
- the fifth partition wall 66e and the end wall 64b define the sixth-stage pump chamber 50f therebetween in the outer barrel 54.
- the outer barrel 54 has an inlet port 54a defined in its side wall which is connected to the joint pipe 16 and held in fluid communication with the upper inlet side of the first-stage pump chamber 50a, and an outlet port 54b defined in its side wall which is held in fluid communication with the lower outlet side of the sixth-stage (final-stage) pump chamber 50f.
- the outlet port 54b is also held in fluid communication with the atmosphere-vented compartment 52 through the end wall 64b. With this structure, the atmosphere-vented compartment 52 is allowed to vent to the atmosphere through the outlet port 54b.
- the outer barrel 54 of the pump casing 56 is of a double-walled structure including an inner wall 68 and an outer wall 70 disposed outside of and spaced a certain distance from the inner wall 68, with first through fifth gas passages 72a- 72e being defined therebetween.
- first gas passage 72a extends around the first- stage pump chamber 50a
- second gas passage 72b extends around the second- stage pump chamber 50b.
- the third gas passage 72c extends around the third-stage pump chamber 50c
- the fourth gas passage 72d extends around the fourth-stage pump chamber 50d
- the fifth gas passage 72e extends around the fifth-stage pump chamber 50e.
- the fifth gas passage 70e also extends around the sixth-stage pump chamber 50f.
- the gas passages 72a-72e have respective portions held in fluid communication with the respective pump chambers 50a-50e through the respective lower outlet sides thereof, and also have respective portions held in fluid communication with the respective pump chambers 50b-50f through the respective upper inlet sides thereof. Therefore, as shown in FIG. 2, the process gas that has flowed from the inlet port 54a into the first-stage pump chamber 50a through its upper inlet side is compressed in the first-stage pump chamber 50a, and then flows from the first-stage pump chamber 50a through its lower outlet side into the first gas passage 72a. Then, the process gas flows upwardly in the first gas passage 72a and reaches the upper inlet side of the second-stage pump chamber 50b.
- the process gas flows into the second-stage pump chamber 50b through its upper inlet side and is compressed in the second-stage pump chamber 50b, and then flows from the second-stage pump chamber 50b through its lower outlet side into the second gas passage 72b. Then, the process gas flows upwardly in the second gas passage 72b and reaches the upper inlet side of the third-stage pump chamber 50c. Subsequently, the process gas is compressed in and flows through the third- through sixth-stage pump chambers 50c-50f. Thereafter, the process gas is discharged from the lower outlet side of the sixth-stage pump chamber 50f through the outlet port 54b out of the main pump 14.
- the outer barrel 54 of the pump casing 56 is of the double-walled structure having the gas passages 72a-72e defined therein, the interiors of the pump chambers 50a-50f are reliably thermally insulated from the exteriors thereof by the high-temperature process gas flowing through the gas passages 72a- 72e, for thereby maintaining the interior of the main pump 14 at a high temperature to prevent a sublimable gas or the like contained in the process gas from being converted into a solid substance and deposited in the main pump 14, i.e., on the inner circumferential surface of the pump casing 56.
- the high-temperature process gas which flows through the gas passages 72a-72e from the lower outlet sides of the pump chambers 50a-50e to the upper inlet sides of the pump chambers 50b-50f in the next stages is effective to heat the pump chambers 50a-50f.
- the outer circumferential surface of the outer barrel 54 of the pump casing 56 is surrounded by a thermally insulative jacket 74 which is of a substantially hollow cylindrical shape.
- the thermally insulative jacket 74 thermally insulates the interiors of the pump chambers 50a- 5 Of from the exteriors thereof, thereby keeping the interiors of the pump chambers 50a- 5 Of constant in temperature.
- Two side panels 80a, 80b are disposed respectively on the end walls 64a, 64b of the pump casing 56.
- the rotational shafts 60 are rotatably supported at their outer ends by bearings 84a, 84b housed in bearing housings 82a, 82b that are mounted respectively on the side panels 80a, 80b.
- Two lubricant housings 88a, 88b, for holding a lubricant therein, are disposed on respective outer side surfaces of the side panels 80a, 80b.
- the electric motor 58 has a motor housing coupled to one of the lubricant housings 88b.
- the side panels 80a, 80b have respective purge gas passages 90a, 90b for supplying a purge gas, such as an N 2 gas or the like, to the portions of the rotational shafts 60 in the side panels 80a, 80b to prevent the process gas from flowing out of the pump chambers 50a- 50f into the bearings 84a, 84b.
- the purge gas supplied from the purge gas passages 90a, 90b provides non-contact seals between the side panels 80a, 80b and the rotational shafts 60 for protecting the rotational shafts 60 against contact-induced wear.
- the purge gas, which has flowed through the purge gas passage 90b also flows into the atmospheric- vented compartment 52.
- the atmospheric-vented compartment 52 which is held in fluid communication with the outlet port 54b and vented to the atmosphere, is defined between the end wall 64b near the sixth-stage (final-stage) pump chamber 5 Of wherein the process gas is of the highest pressure and the side panel 80b which is disposed adjacent to the end wall 64b.
- the lubricant housing 88b which houses therein the bearing housing 82 with the bearings 84b disposed therein is mounted on the side panel 80b.
- a chamber R which is positioned outside the atmosphere-vented compartment 52 and houses the bearings 84b therein i.e., a chamber R which is surrounded by the side panel 80b and the lubricant housing 88b, is maintained essentially at the atmospheric pressure at all times.
- the process gas, which has flowed into the pump chambers 50a-50f, is thus reliably prevented from leaking into the chamber R that is positioned outside the atmosphere-vented compartment 52 and houses the bearings 84b therein.
- the bearings 84b are thus protected against the process gas. [0034] The reasons why the bearings 84b are protected against the process gas will be described below.
- the sixth-stage (final-stage) pump chamber 50f is positioned directly next to the side panel 80b, or in other words, if the atmosphere- vented compartment 52 is dispensed with, then the pressure in the chamber R which is positioned outside the atmosphere-vented compartment 52 and houses the bearing 84b therein, i.e., the chamber R which is surrounded by the side panel 80b and the lubricant housing 88b, is substantially equal to the average pressure in the sixth-stage (final-stage) pump chamber 5 Of.
- the pressure on the outlet side of the sixth-stage pump chamber 5 Of is the atmospheric pressure of 760 Torr and the pressure on the inlet side thereof is, e.g., 200 Torr, which is lower than the atmospheric pressure
- the atmospheric-vented compartment 52 which is held in fluid communication with the outlet port 54b and vented to the atmosphere, is defined between the end wall 64b near the sixth-stage (final-stage) pump chamber 50f and the side panel 80b which is disposed adjacent to the end wall 64b.
- the pressure in the atmospheric- vented compartment 52 remains unchanged from the atmospheric pressure, and hence the pressure in the chamber R which is positioned outside the atmosphere-vented compartment 52 and houses the bearings 84b therein, i.e., a chamber R which is surrounded by the side panel 80b and the lubricant housing 88b, is not affected by the change in the pressure in the sixth-stage pump chamber 50f, but is maintained essentially at the atmospheric pressure.
- the vacuum pump 10 thus constructed operates by energizing the electric motor 24 of the booster pump 12 and the electric motor 58 of the main pump 14 to actuate the booster pump 12 and the main pump 14 to discharge the process gas, which has been introduced into, e.g., a vacuum chamber, from the vacuum chamber.
- a vacuum chamber e.g., a vacuum chamber
- the chamber R which is positioned outside the atmosphere-vented compartment 52 and houses the bearings 84b therein, i.e., a chamber R which is surrounded by the side panel 80b and the lubricant housing 88b, is maintained essentially at the atmospheric pressure at all times, the process gas that has been introduced into the main pump 14 is reliably prevented from leaking into the bearings 84b. Therefore, the bearings 84b are protected against the process gas.
- the present invention has been described with reference to preferred embodiments, it is understood that the present invention is not limited to the embodiments described above within the scope of the inventive concept as expressed herein.
- the present invention is applied to a multistage roots vacuum pump.
- the principles of the present invention are also applicable to vacuum pumps of different types, e.g., a single-stage roots vacuum pump, a claw vacuum pump, a screw vacuum pump, or a vacuum pump including at least two of roots, claw, and screw pump mechanisms on common rotational shafts.
- the present invention is applicable to a vacuum pump for use in a process wherein a sublimable gas or a corrosive gas tends to flow into the vacuum pump.
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Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011123980A JP5677202B2 (en) | 2011-06-02 | 2011-06-02 | Vacuum pump |
PCT/JP2012/064346 WO2012165645A1 (en) | 2011-06-02 | 2012-05-29 | Vacuum pump |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2715139A1 true EP2715139A1 (en) | 2014-04-09 |
EP2715139A4 EP2715139A4 (en) | 2014-12-17 |
EP2715139B1 EP2715139B1 (en) | 2018-01-10 |
Family
ID=47259490
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP12793624.3A Active EP2715139B1 (en) | 2011-06-02 | 2012-05-29 | Vacuum pump |
Country Status (7)
Country | Link |
---|---|
US (1) | US20140112815A1 (en) |
EP (1) | EP2715139B1 (en) |
JP (1) | JP5677202B2 (en) |
KR (1) | KR101760550B1 (en) |
CN (1) | CN103477080A (en) |
TW (1) | TWI554684B (en) |
WO (1) | WO2012165645A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9752571B2 (en) * | 2012-07-03 | 2017-09-05 | Brian J. O'Connor | Multiple segment lobe pump |
US10760573B2 (en) * | 2014-06-27 | 2020-09-01 | Ateliers Busch Sa | Method of pumping in a system of vacuum pumps and system of vacuum pumps |
WO2017031807A1 (en) * | 2015-08-27 | 2017-03-02 | 上海伊莱茨真空技术有限公司 | Non-coaxial vacuum pump with multiple driving chambers |
FR3065040B1 (en) * | 2017-04-07 | 2019-06-21 | Pfeiffer Vacuum | PUMPING GROUP AND USE |
DE202017003212U1 (en) * | 2017-06-17 | 2018-09-18 | Leybold Gmbh | Multi-stage Roots pump |
CN107084135A (en) * | 2017-06-29 | 2017-08-22 | 德耐尔节能科技(上海)股份有限公司 | A kind of dry-type spiral vacuum pump |
CN114096753B (en) * | 2019-06-19 | 2023-06-09 | 樫山工业株式会社 | Vacuum pump |
FR3119209B1 (en) * | 2021-01-25 | 2023-03-31 | Pfeiffer Vacuum | Dry type vacuum pump and pump unit |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010134427A1 (en) * | 2009-05-20 | 2010-11-25 | 三菱重工業株式会社 | Dry vacuum pump |
WO2011019048A1 (en) * | 2009-08-14 | 2011-02-17 | 株式会社アルバック | Dry pump |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0733834B2 (en) * | 1986-12-18 | 1995-04-12 | 株式会社宇野澤組鐵工所 | Inner partial-flow reverse-flow cooling multistage three-leaf vacuum pump in which the outer peripheral temperature of the housing with built-in rotor is stabilized |
JPH05296171A (en) * | 1992-04-13 | 1993-11-09 | Ulvac Japan Ltd | Shaft seal mechanism for positive displacement vacuum pump without using sealing fluid |
GB9708397D0 (en) * | 1997-04-25 | 1997-06-18 | Boc Group Plc | Improvements in vacuum pumps |
JP4007130B2 (en) | 2002-09-10 | 2007-11-14 | 株式会社豊田自動織機 | Vacuum pump |
JP4232505B2 (en) * | 2003-03-27 | 2009-03-04 | アイシン精機株式会社 | Vacuum pump |
JP3991918B2 (en) * | 2003-05-19 | 2007-10-17 | 株式会社豊田自動織機 | Roots pump |
JP2005105829A (en) | 2003-09-26 | 2005-04-21 | Aisin Seiki Co Ltd | Dry pump |
JP4767625B2 (en) * | 2005-08-24 | 2011-09-07 | 樫山工業株式会社 | Multi-stage Roots type pump |
JP5313260B2 (en) * | 2008-10-10 | 2013-10-09 | 株式会社アルバック | Dry pump |
CN201396281Y (en) * | 2009-03-19 | 2010-02-03 | 孙成忠 | Multistage three-blade Roots vacuum pump |
JP5473400B2 (en) * | 2009-05-20 | 2014-04-16 | 三菱重工業株式会社 | Dry vacuum pump and sealing method thereof |
JP5330896B2 (en) * | 2009-05-20 | 2013-10-30 | 三菱重工業株式会社 | Dry vacuum pump |
-
2011
- 2011-06-02 JP JP2011123980A patent/JP5677202B2/en active Active
-
2012
- 2012-05-25 TW TW101118674A patent/TWI554684B/en active
- 2012-05-29 KR KR1020137028886A patent/KR101760550B1/en active IP Right Grant
- 2012-05-29 WO PCT/JP2012/064346 patent/WO2012165645A1/en active Application Filing
- 2012-05-29 CN CN2012800187110A patent/CN103477080A/en active Pending
- 2012-05-29 US US14/119,858 patent/US20140112815A1/en not_active Abandoned
- 2012-05-29 EP EP12793624.3A patent/EP2715139B1/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010134427A1 (en) * | 2009-05-20 | 2010-11-25 | 三菱重工業株式会社 | Dry vacuum pump |
WO2011019048A1 (en) * | 2009-08-14 | 2011-02-17 | 株式会社アルバック | Dry pump |
Non-Patent Citations (1)
Title |
---|
See also references of WO2012165645A1 * |
Also Published As
Publication number | Publication date |
---|---|
JP2012251471A (en) | 2012-12-20 |
JP5677202B2 (en) | 2015-02-25 |
TW201307685A (en) | 2013-02-16 |
WO2012165645A1 (en) | 2012-12-06 |
CN103477080A (en) | 2013-12-25 |
TWI554684B (en) | 2016-10-21 |
US20140112815A1 (en) | 2014-04-24 |
KR101760550B1 (en) | 2017-07-21 |
KR20140023958A (en) | 2014-02-27 |
EP2715139B1 (en) | 2018-01-10 |
EP2715139A4 (en) | 2014-12-17 |
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