EP2667144B1 - Verfahren zum Abschätzen der Rauheit einer Oberfläche - Google Patents

Verfahren zum Abschätzen der Rauheit einer Oberfläche Download PDF

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EP2667144B1
EP2667144B1 EP13168347.6A EP13168347A EP2667144B1 EP 2667144 B1 EP2667144 B1 EP 2667144B1 EP 13168347 A EP13168347 A EP 13168347A EP 2667144 B1 EP2667144 B1 EP 2667144B1
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force sensor
force
ortho
roughness
movement
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EP2667144A1 (de
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Christelle Godin
Loris Olmos
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces

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  • the invention relates to a method for characterizing a surface state, and in particular to a method for estimating the roughness of a surface.
  • the process according to the invention is particularly applicable for carrying out quality control of surface conditions in the field of the paper, fabric, leather, wood, plastic or cosmetics industries.
  • the instrumental measurement of the properties, and particularly the roughness, of the surfaces from a mechanical and tactile point of view is very useful.
  • the method according to the invention can in particular be used, during the product design, to perform roughness checks to develop new surfaces while respecting a specification.
  • the method according to the invention can also be used to check the roughness of surfaces of elements during manufacture in order to detect and correct any drift in the surface condition of the elements produced.
  • the method according to the invention can also serve to recreate the sense of touch, the perception of textures of surfaces, whose roughness, playing a determining role in the sense of touch.
  • the knowledge of the surface state that is to say of the topology or the relief of this surface, and more particularly of the roughness of a surface, makes it possible to obtain information on the properties of this surface. , such as its sensitivity to corrosion and wear, or its properties of adhesion, sliding or rolling.
  • To determine a surface condition there are methods performing a measurement of the topography of the studied surface, and an extraction of parameters representative of the surface condition from the measured topography.
  • the document WO 2010/130631 A1 discloses a method of surface characterization using an artificial finger comprising a triaxial force sensor made of MEMS technology and embedded in an elastomer.
  • the artificial finger is moved on the surface to be characterized. This method makes it possible to estimate tactile sensory parameters of the surfaces studied, but is not suitable for making an estimate of the roughness of a surface.
  • An object of the present invention is to provide a method for making an estimate of the roughness of a studied surface, and which does not require the use of measuring apparatus of topographic profiles.
  • the method according to the invention therefore consists in using a tactile force sensor (for example forming part of an artificial finger), for example a 3D MEMS type force sensor, for estimating roughness using the only component ( F ortho ) of the tangential force to the surface which is orthogonal to the direction of movement of the sensor against the analyzed surface.
  • a tactile force sensor for example forming part of an artificial finger
  • a 3D MEMS type force sensor for estimating roughness using the only component ( F ortho ) of the tangential force to the surface which is orthogonal to the direction of movement of the sensor against the analyzed surface.
  • This method is equally applicable to surfaces with oriented roughnesses as well as to surfaces with undirected roughness.
  • Such a method also has the advantage of eliminating conventional devices (optics and mechanical feeler) for measuring topology.
  • it is not necessary to make an estimate of the profile of the studied surface, which would require knowing the inverse function of the force sensor used.
  • the method according to the invention is based in particular on the surprising effect that the variations of the orthogonal force in the sense of displacement of the force sensor make it possible to obtain a better estimate of the roughness of the studied surface than the variations of the force. parallel to the direction of displacement of the force sensor on the surface, thus going against a technical prejudice in this field.
  • the statistical parameter P is representative of the variations of the value of the measured ortho F force, it is well correlated with the roughness values obtained by conventional roughness measurements.
  • the function f () can be a linear function or not.
  • the values of the coefficients of this function can be determined beforehand via learning steps implemented from one or more surfaces whose roughness is known.
  • the force sensor may be of the triaxial type.
  • Such a force sensor makes it possible to measure all the components in the space of the force undergone by the force sensor, that is to say not only the force F ortho , but also a force F para , corresponding to the force parallel to the direction of movement of the force sensor, and a force F normal , corresponding to the normal force on the surface. These additional measurements can be used to determine other properties of the surface studied: sliding, friction, etc.
  • the force sensor may comprise at least one deformable membrane and a rod mechanically connected to the deformable membrane.
  • the force sensor may be disposed against the surface such that an axis of the rod is orthogonal to said surface and one of the measurement axes of the force sensor in the plane of said surface is parallel to the direction of movement of the force sensor.
  • the force sensor directly measures the orthogonal force to the displacement direction of the force sensor and parallel to the surface.
  • the statistical parameter P can be the standard deviation, or the variance, or the deviation from the mean, or the maximum amplitude of the variations of the value of the measured ortho F force, or the arithmetic mean of the maximum m amplitudes of the variations in the value of the measured ortho F force taken over a length equal to 1 / m of at least part of the displacement length of the force sensor on the surface, m being a number greater than or equal to 2.
  • m can be equal to 5.
  • the method may further comprise, prior to the calculation of the statistical parameter P , a step of high-pass filtering of the measurement of the force F ortho performed by the force sensor, the statistical parameter P being then calculated from the measurement filtered from the ortho force F.
  • ⁇ and ⁇ may be coefficients whose values are a function of the characteristics of the force sensor used and a force with which the force sensor is applied to said surface during displacement.
  • the method may further comprise, prior to calculating the roughness R , a step of estimating the values of the coefficients ⁇ and ⁇ from measurements, during relative displacements of the force sensor against k surfaces respectively of roughness Z k of known and distinct values and in a direction of movement substantially parallel to k surfaces, F ortho-k forces perceived by the force sensor in a direction which is substantially orthogonal to the direction of movement and parallel to k surfaces, k being a integer greater than or equal to 2.
  • ⁇ and ⁇ can be estimated by the implementation of a least squares linear regression algorithm from the roughness values Z k and statistical parameter values Q k representative of the variations of the ortho F forces. -k perceived by the force sensor when moving against k surfaces.
  • the relative displacement of the force sensor against the surface can be achieved by automated mechanical means able to move the force sensor against the surface and / or move the surface relative to the force sensor.
  • the invention also relates to a method for characterizing a surface state, comprising at least the implementation of a method for estimating a roughness R of the surface as described above.
  • This method may especially comprise a determination of other properties of the studied surface (sliding, friction, etc.) for example from the measurement of the force F X , or F para corresponding to the force parallel to the direction of movement of the sensor. force, and / or force F Z , or F normal , corresponding to the force normal to the surface.
  • FIG. 1 represents a surface characterization device 100 provided with a force sensor 104 used during a method for estimating a roughness R of a surface according to a particular embodiment.
  • the device 100 is an artificial finger having a gripping body 102.
  • the device 100 is provided with the force sensor 104, also called a force sensor, which is here a triaxial effort sensor 104 of the MEMS (Microsystem Electromechanical) type.
  • the force sensor 104 shown in detail on the figure 2 , comprises a deformable membrane 124, for example of circular shape, and a rod 126 mechanically connected to the center of the membrane 124.
  • the rod 126 has for example a cylindrical shape with an axis parallel to the axis Z of the orthogonal reference (X, Y, Z) shown in the figures.
  • the membrane 124 and the rod 126 are for example made from a single silicon monocrystal.
  • the rod 126 is embedded in a coating structure 108 of elastomer covering the force sensor 104 and thus protecting the force sensor 104.
  • the coating structure 108 is for example composed of polyurethane of the type LOCTITE 3957 having a hardness of 80 Shore A, thus approaching the mechanical properties (such as viscoelasticity) of the natural skin, while remaining sufficiently hard to avoid too rapid wear of the coating structure 108 due to the repetition of measurements made by the device 100.
  • the force sensor 104 is further recessed at one face of a flat support 106 based on a hard material, for example epoxy, integral with the body 102.
  • the forces experienced by the encapsulation structure 108 are transmitted to the rod 126 which deforms the membrane 124, these forces corresponding to the force perceived by the force sensor 104 during the displacement of the device 100 against the studied surface.
  • the deformation of the membrane 124 by the rod 126 is then measured by transduction means, for example piezoresistive strain gages or capacitance-sensitive detectors, arranged on the membrane 124 and which deliver one or more signals representative of the force perceived by the force sensor 104.
  • the transducer means of the force sensor 104 may correspond to eight piezoresistive gauges 128 (their resistances varying as a function of the mechanical deformations they undergo), for example carried out by localized doping in the membrane 124, and arranged on two perpendicular axes in the plane of the membrane 124 (plane parallel to the plane (X, Y)) and electrically interconnected by forming two Wheatstone bridges around the rod 126.
  • the force sensor 104 When the encapsulation structure 108 of the device 100 is moved against a surface to be characterized, this displacement creates a force perceived by the force sensor 104.
  • the gauges 128 are then compressed or stretched, creating an imbalance of the center points A, B , C and D corresponding to the connection points between two gauges 128 arranged along the same axis.
  • the force sensor 104 is arranged such that an axis of the rod 126 is orthogonal to the surface characterized.
  • one of the measurement axes of the force sensor 104 (corresponding to one of the axes in which the gauges are aligned, corresponding to the X and Y axes represented on the figure 3 ) in the plane of the surface to be characterized is parallel to the direction of displacement of the force sensor 104.
  • S X , S Y and S Z correspond to the sensitivities of the force sensor 104 according to each of the axes X, Y and Z.
  • the sensitivities S X and S Y of the force sensor 104 are equal to about 200 ⁇ 10 mV.N -1
  • the sensitivity S Z of the force sensor 104 is equal to 51 ⁇ 2 mV.bar -1 .
  • a surface exploration device 200 In order to be able to automatically and accurately move the device 100 on the surface to be studied, it is coupled to a surface exploration device 200, an exemplary embodiment of which is shown in FIG. figure 4 , making it possible to move the device 100 against the studied surface which is arranged on a support, not shown, facing the device 100.
  • a surface exploration device moving the surface to be studied against the device 100 that could be kept fixed.
  • Such a device 200 has the advantages of allowing the analysis of a large number of types of surfaces, and allows a meticulous control of the parameters for implementing the method, for example that of the forces applied to the device 100 (that is ie with what force the device 100 is pressed against the surface studied) or the speed of movement of the device 100 against the studied surface.
  • the device 200 is placed on an anti-vibration marble 202 in order not to disturb the process in the event of external vibratory disturbances.
  • the support of the studied surface may be stainless steel and comprises for example magnets that can help maintain one or more surfaces to study.
  • This support has for example two possible states: advanced or retracted. These states are achieved for example with a double-acting cylinder which is activated or not, which makes it possible to come into contact with the surface to be studied with the device 100 or remove it.
  • a damper makes it possible to reduce the shock at the moment of contact between the studied surface and the device 100 in order to avoid a deterioration of the force sensor 104 and / or the coating 108.
  • To adjust the normal force ( along the axis Z) with which the device 100 is pressed against the surface studied the latter is brought into contact with the device 100, then its position along the Z axis is adjusted accurately for example with a micrometric screw.
  • the device 200 comprises two motors 204 which make it possible to move an arm 206, at the end of which the device 100 is fixed, in two orthogonal directions of a plane parallel to the studied surface (one allowing a horizontal displacement of the device 100 , parallel to the axis X, and the other allowing a vertical displacement of the device 100, parallel to the axis Y).
  • the device 100 is first disposed against the surface 150 using the surface exploration device 200 previously described.
  • the coating structure 108 of the device 100 is then rubbed against the surface 150 by horizontally moving the device 100, that is to say parallel to the axis X (the studied surface being disposed in a plane parallel to the (X, Y) plane), for example with a speed of exploration equal to about 5 mm / s.
  • the direction of movement of the device 100 is referenced symbolically by a horizontal arrow referenced 152.
  • the device 100 could be moved in a different way against the studied surface. In this case, it is considered that the axis X always corresponds to the direction of movement of the device 100 on the studied surface 150.
  • the device 100 is orthogonally disposed to the studied surface 150, that is to say such as the axis of the rod 126 (parallel to the Z axis as shown in FIG. figure 2 ) of the force sensor 104 is orthogonal to the plane of the surface 150 (which is parallel to the plane (X, Y)).
  • the components of the force perceived by the force sensor 104 during its displacement against the surface 150 correspond to the components F para and F orth of this force in the plane of the studied surface 150 and to the normal normal component F on the surface 150. It is also conceivable that the device 100 is not orthogonally disposed on the surface 150 during its displacement against this surface 150.
  • the force with which the device 100 is applied against the surface 150 may be adapted in particular in order to compensate for any flatness defects of the surface 150, and to avoid, for example, any breakage of the contact between the device 100 and the surface 150 during its operation.
  • This initial normal force is for example equal to about 0.5 N. During the exploration of the surface studied, this normal force can vary between about 0.2 N and 1.2 N because of flatness defects of this surface 150.
  • the forces generated by the roughness of the surface 150 are transmitted to the rod 126 which deforms the membrane 124 of the force sensor 104.
  • the force F ortho perceived by the force sensor 104 (step 304) is measured. This measurement corresponds to the voltage U Y delivered by the force sensor 104. Only the voltage U Y , that is to say the signal delivered by the sensor 104 which is proportional to the force F ortho (depending on the direction parallel to the studied surface 150 and orthogonal to the direction of movement 152 of the device 100) perceived by the sensor 104 will be used in the following process to determine the roughness R of the studied surface.
  • the measurement of ortho F alone is information that is related solely to the topology of the studied surface 150 and which is not disturbed by local variations in the adhesion and slip properties of the materials of the surface 150 and the coating 108, unlike the signal U X which corresponds to the measurement of the force F para perceived by the sensor 104 in the direction of movement 152 of the sensor 104.
  • the variations of the values of the signal Y Y come in particular from the stresses caused by the hollows and the lateral bumps to the axis of movement of the device 100 on the surface 150 which are representative elements of the roughness of the surface 150 that is to be characterized.
  • the possible variations of the normal force of the device 100 against the surface 150 have no impact on the measurement of F ortho performed which is independent of this effort.
  • a large evaluation length is preferably chosen in order to have the best possible results.
  • the sensor 104 also delivers, during the exploration of the surface 150, the voltages U X and U Z. These signals can be used during this process: for example, the period during which the device 100 moves against the surface 150 can be accurately determined by a detection of edges on the signal U X , which allows for example to easily eliminate the parts of the signal U Y that are delivered by the sensor 104 while the latter does not yet move against the surface 150.
  • a high-pass filtering of the signal F ortho (t) is carried out in order to center the values of the samples around 0 and to eliminate the coarse variations of this signal which correspond to the defects of shapes and the undulations of the surface 150 and not to the roughnesses that we seek to characterize (step 308).
  • This filtering can be performed with a cut-off wavelength equal to about 1/5 of the evaluation length, that is to say the length on which the device 100 is rubbed on the surface 150. It is possible to choose a cutoff wavelength equal to about 2.5 mm, which corresponds to a cutoff frequency of about 2 Hz for a speed of movement of the device 100 on the surface 150 equal to about 5 mm / s.
  • a statistical parameter P is calculated that is representative of the variations of values of the signal F ortho (t) (step 310).
  • This deviation from the avdev average (F ortho (t)) can be compared to the arithmetical average deviation of the roughness of the surface, generally called Ra.
  • the statistical parameter P may correspond to the maximum amplitude of F ortho (t), equal to: max (F ortho (t)) min (F ortho (t)), with max (F ortho ( t)) corresponding to the maximum value of F ortho (t) and min (F ortho (t)) corresponding to the minimum value of F ortho (t).
  • the statistical parameter P may correspond to the average roughness depth, denoted R Z , corresponding to the arithmetic mean of the greatest roughness depths separated from different contiguous measuring sections.
  • the statistical parameter P is derived from the time signal F ortho (t), itself obtained from the temporal signal U Y (t) .
  • the roughnesses do not necessarily have particular periodicities (except for oriented roughnesses) and no characteristic line would emerge from a frequency spectrum of F ortho (t) or U Y (t) .
  • the five statistical parameters indicated above are the most representative for estimating roughness R because they make it possible to perform better differentiation between surfaces of different roughness.
  • these five parameters have a linear link between their values and the value of the corresponding roughness.
  • the statistical parameter P corresponds preferably to the standard deviation ⁇ which is the parameter from which it is possible to make the best estimate of the roughness R.
  • the statistical parameter P corresponds to a statistical parameter representative of the variations of the values of F ortho (t) or U Y (t) .
  • this statistical parameter P is calculated from the ortho force F orthogonal to the direction of movement of the force sensor 104, and not from the component F para parallel to the direction of movement of the sensor 104, this parameter P is therefore independent of the normal force with which the device 100 is applied against the surface 150 and the coefficient of friction of the device 100 against the surface 150.
  • the statistical parameter P is calculated from the signal F ortho (t) filtered, this parameter can therefore be noted P (F ortho (t)).
  • P (F ortho (t)) it is possible to calculate the statistical parameter P directly from the signal U Y (t), corresponding in this case to P (U Y (t)), which makes it possible not to have to perform the calculation of F ortho (t) and calibration to determine the sensitivity S Y of the sensor 104.
  • ⁇ and ⁇ being coefficients whose values depend on the characteristics of the force sensor 104 used and the normal force with which the sensor 104 is applied against the surface 150.
  • the values of the coefficients ⁇ and ⁇ are known, or determined at prior learning.
  • the roughness R thus calculated is well representative of the depths and heights of the hollows and bumps present on the studied surface 150.
  • This learning phase is implemented from k reference surfaces, whose roughness, denoted Z k , are known and different, where k is an integer greater than or equal to 2.
  • Z k roughness
  • the number of passages on the same surface is noted j and is assumed identical for each of the surfaces explored. More the Numbers of surfaces k and of passages j are important, the more the training realized is robust.
  • Statistical parameters Q k representative of the variations of the signals U Yk (t) (or signals F ortho-k (t) calculated from the signals U Yk (t) ), corresponding, for example, to the standard deviation, the variance , the average deviation, the maximum amplitude or the average roughness depth, are then calculated from the signals obtained with these known roughness surfaces Z k .
  • the statistical parameter P being in this case calculated from all the measurements of U Y (t) (or F ortho). (t) ) of the different passages of the sensor 104 on the surface 150.
  • U Y (t) or F ortho). (t)
  • Such a variant makes it possible to attenuate certain point defects of the signals which can appear on a single passage of the sensor against the surface 150.
  • These variants can advantageously be made by using a matrix of several devices 100, each equipped with a force sensor similar to the sensor 104, making it possible to simultaneously perform several measurements on different zones of the studied surface 150.
  • This matrix of devices 100 may be disposed at the end of the arm 206 which can therefore move simultaneously, at the same speed and in the same direction, the set of devices 100.
  • the device 100 is moved against the surface 150 by the device 200 for surface exploration, ensuring a precise and automated movement of the device 100 against the surface 150.
  • the operator must make sure to move the device 100 parallel to the axis X of the force sensor 104 so that the voltage U Y delivered by the force sensor 104 corresponds to the orthogonal force to the direction of displacement of the force sensor 104.
  • the device 100 will also be held perpendicular to the surface 150 by the operator. Such manual manipulation is for example envisaged when the surface to be studied is not flat and difficult to access by the device 200.
  • the roughness is calculated solely from the force F ortho perceived by the force sensor 104 in a direction orthogonal to the direction of movement of the sensor 104 and parallel to the surface 150, obtained via the voltage U Y delivered by the force sensor 104 when the device 100 is well orthogonal to the surface 150 and moved along the X axis of the sensor 104, the voltages U X and U Z delivered by the force sensor 104 can be used to calculate other properties of the surface 150.
  • the voltage U Z can be used to estimate the bearing force of the device 100 against the surface 150
  • the voltage U X can be used to estimate the friction between the device 100 and the surface 150, through the calculation of the coefficient of friction which is defined as the ratio between F para (proportional to U X ) and F normal (proportional to U Z and constant for a perfectly flat surface).
  • F ortho the measurement of F ortho
  • information is obtained which is only related to the topology of the surface 150, and that from the measurement of F para
  • the measurement of the normal force F can also serve to separate the influence of the bearing force with respect to these contact properties.
  • the coefficient values of such a nonlinear relationship can be determined by learning, via nonlinear regression.

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Claims (11)

  1. Verfahren zum Abschätzen einer Rauigkeit R einer Oberfläche (150), umfassend wenigstens die folgenden Schritte:
    - relatives Verlagern (302) wenigstens eines Kraftsensors (104) gegen die Oberfläche (150) und entlang einer Verlagerungsrichtung (152), die im Wesentlichen parallel zu der Oberfläche (150) ist,
    - Messen (304), während der Relativ-Verlagerung (302) des Kraftsensors (104) bezüglich der Oberfläche (150), wenigstens einer Kraft Fortho, die durch den Kraftsensor (104) entlang einer Richtung erfasst wird, die im Wesentlichen orthogonal zu der Verlagerungsrichtung (152) und parallel zu der Oberfläche (150) ist;
    - Berechnen (310) wenigstens eines statistischen Parameters P, der repräsentativ ist für Variationen des Werts der gemessenen Kraft Fortho,
    - Berechnen (312) der Rauigkeit R gemäß: R = f P ,
    Figure imgb0020
    wobei f() eine bekannte Funktion ist, in der wenigstens ein Teil der Koeffizienten Werte hat, die eine Funktion der Eigenschaften des verwendeten Kraftsensors (104) und einer Kraft sind, mit der der Kraftsensor (104) während der Verlagerung auf die Oberfläche (150) gedrückt wird.
  2. Verfahren nach Anspruch 1, bei dem der Kraftsensor (104) vom Triaxialtyp ist.
  3. Verfahren nach einem der vorhergehenden Ansprüche, bei dem der Kraftsensor (104) wenigstens eine verformbare Membran (124) und eine Stange (126) umfasst, die mechanisch mit der verformbaren Membran (124) verbunden ist, und bei dem während der Verlagerung (302) des Kraftsensors (104) gegen die Oberfläche (150) der Kraftsensor (104) derart angeordnet ist, dass eine Achse der Stange (126) orthogonal zu der Oberfläche (150) ist, und dass eine der Messachsen des Kraftsensors (104) in der Ebene der Oberfläche (150) parallel zur Verlagerungsrichtung des Kraftsensors (104) ist.
  4. Verfahren nach einem der vorhergehenden Ansprüche, bei dem der statistische Parameter P die Standardabweichung oder die Varianz oder die mittlere Abweichung oder die maximale Amplitude der Variationen des Werts der gemessenen Kraft Fortho oder das arithmetische Mittel von m maximalen Amplituden der Variationen des Werts der gemessenen Kraft Fortho ist, aufgenommen auf einer Länge gleich 1/m von wenigstens einem Teil der Verlagerungslänge des Kraftsensors (104) auf der Oberfläche (150), wobei m eine Zahl größer oder gleich 2 ist.
  5. Verfahren nach einem der vorhergehenden Ansprüche, bei dem der statistische Parameter P direkt ausgehend von einem Signal Uy(t) berechnet wird, das einer vom Kraftsensor (104) gelieferten Spannung entspricht, die aufgezeichnet und dann digitalisiert wird und die repräsentativ ist für die gemessene Kraft Fortho, oder ausgehend von einem Signal Fortho(t) = Uy(t)/Sy, wobei Sy der Empfindlichkeit des Kraftsensors (104) entlang der Richtung im Wesentlichen orthogonal zur Verlagerungsrichtung (152) und parallel zur Oberfläche (150) entspricht.
  6. Verfahren nach einem der vorhergehenden Ansprüche, ferner umfassend, vor der Berechnung (310) des statistischen Parameters P, einen Schritt (308) der Hochpassfilterung der Messung der Kraft Fortho, die vom Kraftsensor (104) durchgeführt wird, wobei der statistische Parameter P anschließend ausgehend von der gefilterten Messung der Kraft Fortho berechnet wird.
  7. Verfahren nach einem der vorhergehenden Ansprüche, bei dem die Rauigkeit R wie folgt ist: R = αP + β
    Figure imgb0021
    wobei α und β Koeffizienten sind, deren Werte eine Funktion der Eigenschaften des verwendeten Kraftsensors (104) und einer Kraft sind, mit der der Kraftsensor (104) während der Verlagerung auf die Oberfläche (150) gedrückt wird.
  8. Verfahren nach Anspruch 7, ferner umfassend, vor der Berechnung (312) der Rauigkeit R, einen Schritt der Abschätzung der Werte der Koeffizienten α und β ausgehend von Messungen, während Relativ-Verlagerungen des Kraftsensors (104) gegen k Oberflächen mit jeweiligen Rauigkeiten Zk mit bekannten und unterschiedlichen Werten und entlang einer Verlagerungsrichtung im Wesentlichen parallel zu den k Oberflächen, von Kräften Fortho-k, die durch den Kraftsensor (104) entlang einer Richtung erfasst werden, die im Wesentlichen orthogonal zur Verlagerungsrichtung und parallel zu den k Oberflächen ist, wobei k eine ganze Zahl größer oder gleich 2 ist.
  9. Verfahren nach Anspruch 8, bei dem die Werte von α und β abgeschätzt werden durch Anwendung eines Algorithmus zur linearen Regression durch die Methode der kleinsten Quadrate ausgehend von den Werten der Rauigkeiten Zk und von Werten von statistischen Parametern Qk, die repräsentativ sind für die Variationen der Kräfte Fortho-k, die durch den Kraftsensor (104) während seiner Verlagerung gegen k Oberflächen erfasst werden.
  10. Verfahren nach einem der vorhergehende Ansprüche, bei dem die Relativ-Verlagerung des Kraftsensors (104) gegen die Oberfläche (150) durch automatisierte mechanische Mittel (200) realisiert wird, die dazu ausgelegt sind, den Kraftsensor (104) gegen die Oberfläche (150) zu verlagern und/oder die Oberfläche (150) bezüglich des Kraftsensors (104) zu verlagern.
  11. Verfahren zur Charakterisierung eines Zustands einer Oberfläche (150), umfassend wenigstens die Verwendung eines Verfahrens zur Abschätzung einer Rauigkeit R der Oberfläche (150) nach einem der vorhergehenden Ansprüche.
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JP3992853B2 (ja) * 1998-09-30 2007-10-17 株式会社ミツトヨ 表面追従型測定機
FR2881521B1 (fr) * 2005-02-03 2007-03-02 Commissariat Energie Atomique Dispositif et procede de mesure de forces de frottement
KR100868029B1 (ko) * 2007-07-10 2008-11-11 한국과학기술연구원 질감 측정 장치 및 그 방법
FR2943129B1 (fr) 2009-03-12 2011-09-30 Commissariat Energie Atomique Dispositif de caracterisation tactile de texture de surface
FR2945340B1 (fr) 2009-05-11 2011-11-25 Commissariat Energie Atomique Procede de caracterisation tactile de texture de surface.

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FR2991041B1 (fr) 2014-07-04
EP2667144A1 (de) 2013-11-27
US20130312502A1 (en) 2013-11-28
US9297632B2 (en) 2016-03-29
FR2991041A1 (fr) 2013-11-29

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