EP2656408B1 - Actuator system, and control of an actuator - Google Patents
Actuator system, and control of an actuator Download PDFInfo
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- EP2656408B1 EP2656408B1 EP11801739.1A EP11801739A EP2656408B1 EP 2656408 B1 EP2656408 B1 EP 2656408B1 EP 11801739 A EP11801739 A EP 11801739A EP 2656408 B1 EP2656408 B1 EP 2656408B1
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- actuator
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- 238000000034 method Methods 0.000 claims description 6
- 230000001419 dependent effect Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/065—Large signal circuits, e.g. final stages
- H02N2/067—Large signal circuits, e.g. final stages generating drive pulses
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
Definitions
- Actuators such as multilayer actuators, are used in various fields, such as injection systems for engines. Actuators include piezo elements that expand when a voltage is applied. For injection systems, actuators with ever faster switching times and higher strokes are desired. Both requirements are contradictory: higher strokes require longer actuators because of the maximum ductility of the ceramic in the actuators. The speed at which the actuator expands depends on the speed of sound in the actuator. Due to the limited speed of sound in the actuator and its switching times are longer with increasing length of the actuator. The strain spreads within the actuator in the form of an elastic wave. Each individual domain, ie each expanding piezoelectric element, is the source of a partial wave. These ultimately overlap to a total deformation. Due to the different maturities of the partial waves from the place of their formation to the actuator head even at ideal steep driving voltage of the actuator results in a minimum edge time of Aktordehnung, that is, the time until the actuator has expanded, which can not be exceeded for physical reasons.
- the strokes or required travel can be achieved by mechanical translation by means of a rocker arm or by mechanical Translation can be achieved by means of a hydraulic amplifier.
- the JP 223315 A shows an actuator with a segmented outer electrode, the segments are controlled separately. This control makes it possible to control the actuator between more than two expansion stages.
- the JP 1093184 A shows an actuator with segmented outer electrodes, which allow a coarse and fine adjustment of the change in length of the actuator.
- the JP 63120480 A shows an actuator with segmented outer electrodes. This arrangement allows to control the actuator between more than two expansion stages.
- the DE 19802302 A shows an actuator with rectangular cross-section, the outer electrodes has on the four outer sides. This arrangement reduces cracking and improves heat dissipation.
- an actuator system with a control arrangement and an actuator, wherein the actuator is expandable in a predetermined direction.
- the actuator is arranged with stacked piezo elements, first and second internal electrodes, which are alternately arranged between the piezoelectric elements, a first external electrode, which is electrically conductively connected to the first internal electrodes, and a second Outer electrode which is electrically conductively connected to the second internal electrodes, is provided.
- the actuator comprises a plurality of actuator sections with a first actuator section which is arranged in the predetermined direction relative to a second actuator section.
- the second outer electrode comprises separate electrode segments which are each electrically conductively connected to the second internal electrodes in one of the actuator sections or in a group of the actuator sections.
- a first drive signal at the first actuator section or a first group of actuator sections and a second drive signal can be applied at a time offset to the second actuator section or a second group of actuator sections.
- the control arrangement is adapted to apply the first control signal to the first actuator section or the first group of actuator sections with a time delay to the second control signal at the second actuator section or the second group of actuator sections, so that the extension of the actuator in the respective AktorabĂȘten or groups of AktorabĂȘten through superimpose the control signals generated elastic partial waves.
- Each actuator section is electrically connected only to a part of the second internal electrodes.
- the separate, non-contacting or not directly electrically conductive interconnected electrode segments allow the Aktorabbalde offset in time, so that the stretching process is not set for all piezo elements at the same time in motion, but offset in time.
- the actuator comprises a plurality of sections, each with piezo elements and internal electrodes, which are actuated with a time delay become.
- the control is not carried out simultaneously for all areas of the entire actuator, but takes place with a time delay for their individual sections.
- the time offset is chosen so that it corresponds exactly to the speed of sound in the actuator. This will interfere with the Extending the actuator, the elastic partial waves such that there is a much shorter edge time for the expansion of the actuator than would be the case with simultaneous control of the outer electrode.
- the lower limit of the edge time is no longer limited by the length of the entire actuator, but by the length of the individual areas.
- the first outer electrode also comprises separate electrode segments which are each electrically connected to only a part of the first inner electrodes, namely to the first inner electrodes in one of the actuator sections or in a group of the Aktorabitese.
- the provision of two segmented outer electrodes allows greater degrees of freedom in the design of the actuator.
- the division of the segments in the first and second outer electrode may coincide.
- the segmentation is asymmetric.
- the electrode segments are each electrically conductively connected to either the first or the second internal electrodes in adjacent actuator sections.
- first and segmented second outer electrodes this enables a first electrode segment of the first outer electrode to be electrically conductively connected to the first inner electrodes in a first actuator section and a second actuator section adjacent to the first, and a second electrode segment of the second outer electrode to be connected to the second inner electrodes in FIG second actuator section and in a third, the second adjacent Aktorabites is electrically connected.
- the first and second outer electrodes are arranged offset from one another in such a way that they electrically conductively contact both inner electrodes in the same and in different actuator sections.
- At least the electrode segments of the second outer electrode each comprise a terminal to which a drive signal can be applied.
- the time-offset control signals enable the time-offset control of the actuator sections. With segmented first outer electrode, their segments also have terminals.
- An actuator system comprises an actuator and a control arrangement, by means of which a first control signal to one of the AktorabĂȘte and a second control signal is time-shifted applied to a further Aktorabites.
- the actuator can expand in one direction, for example due to its fixation on the actuator base.
- a first actuator section is arranged in this direction relative to a second actuator section, wherein the control arrangement is adapted to apply the first drive signal to the first actuator section with a time delay to the second drive signal at the second actuator section.
- the control arrangement applies the control signals to its electrode segments and the other outer electrode can be connected to a reference potential.
- the control arrangement is suitable, the electrode segments connected to the first inner electrodes and the electrode segments connected to the second Internal electrodes are connected to apply voltages of different signs with respect to a reference potential. The application of different control signals on both outer electrodes allows a better, more flexible control of the actuator.
- the time offset is selected as a function of the speed of sound in the actuator to compensate for runtime differences of the partial waves.
- a control of an actuator with stacked arranged piezo elements, first and second internal electrodes, which are arranged alternately between the piezo elements, wherein the actuator comprises a plurality of actuator sections, is defined in claim 8.
- a drive voltage is applied in a time-delayed manner to a drive voltage between the first and the second internal electrodes in a second actuator section or in a second group of actuator sections such that the first drive signal is applied
- the first actuator section or the first group of actuator sections is delayed in time relative to the second control signal at the second actuator section or the second group of actuator sections, so that superimposed in the respective AktorabĂȘten or groups of Aktorabroughen generated by the control signals elastic partial waves.
- the actuator expands in one direction, wherein the first actuator portion is disposed in the direction relative to the second actuator portion, and wherein the first drive voltage to the second drive voltage is time-delayed.
- FIG. 1 shows a schematic sectional view of a conventional multilayer actuator 1 with stacked arranged piezo elements 16.
- First internal electrodes 5 and second internal electrodes 3 are arranged alternately between the piezo elements 16.
- the first internal electrodes 5 are electrically conductively connected to a first external electrode 4.
- the second internal electrodes 3 are electrically conductively connected to a second external electrode 2.
- the first and second inner electrodes 5 and 3 are each guided to an outer side of the actuator 1 and are electrically conductively connected there to the first outer electrode 4 and the second outer electrode 2, respectively. This can be done, for example, by printing a metal paste or by soldering metallic plates, which form the outer electrodes 4, 2.
- the first outer electrode 4 is connected to a reference potential 7.
- a control arrangement 6 applies to the second outer electrode 2 a drive signal, for example a time-variable drive potential, so that a drive voltage U lies between the first and second inner electrodes, as a function of which the actuator 1 is stretched or compressed.
- FIG. 2 shows by way of example the course of a drive signal, or voltage, U as a function of the time t.
- the rise of the signal U has a finite slope.
- the actuator 1 By applying the drive voltage U, the actuator 1 experiences a stroke.
- the expansion of the actuator 1 takes place in finite time.
- the strain propagates within the actuator 1 in the form of an elastic wave.
- Each individual domain, or piezoelement 16 is the source of a partial wave. These overlap, resulting in the overall deformation. Due to the different transit times of the partial waves from the place of their formation to the actuator head results in infinitely steep control time, which requires the elongation process, which can not be exceeded for physical reasons. The longer the actuator 1 and the larger the stroke, the larger this time is.
- FIG. 3 shows an embodiment of a multilayer actuator 1 having a first outer electrode 4 and a segmented second outer electrode 2, which has separate electrode segments 21, 22, 23.
- the separate electrode segments 21, 22, 23 are spatially separated from each other. They are neither direct electrically connected with each other, they still touch each other.
- the first outer electrode 4 is connected to a reference potential 7.
- the electrode segments 21, 22, 23 each have a terminal 210, 220, 230, via which they are connected to a control arrangement 6. Control signals can be applied via the terminals 210, 220, 230.
- FIG. 4 shows the actuator system with the actuator 1 and the control arrangement 6 in a three-dimensional representation.
- FIG. 5 shows a schematic sectional arrangement of the actuator 1.
- the actuator 1 comprises first and second internal electrodes 5, 3, which are electrically conductively connected to the first external electrodes 4 and the second external electrodes 2, respectively.
- the actuator 1 comprises a plurality of actuator sections 81, 82, 83. Each axially extending actuator section 81, 82, 83 corresponds to the axial extent of the electrode segments 21, 22, 23.
- the first electrode segment 21 is electrically conductive with the second internal electrodes 3 in FIG first actuator section 81 connected.
- the second electrode segment 22 is electrically conductively connected to the second internal electrodes 3 in the second actuator section 82.
- the third electrode segment 23 is electrically conductively connected to the second internal electrodes 3 in the third actuator section 83.
- the first internal electrodes 5 in the three actuator sections 81, 82, 83 are electrically conductively connected to the same first, continuous external electrode 4.
- FIG. 6 schematically shows the time course of the drive signals or the voltages U1, U2, U3, which abut the electrode segments 21, 22, 23 of the actuator 1.
- At the terminal 210 of the first electrode segment 21 is applied to a first drive voltage U1.
- At terminal 220 of the second Electrode segment 22 is applied to a second drive voltage U2.
- At the terminal 230 of the third electrode segment 23 is applied to a third drive voltage U3.
- the drive voltages U1, U2, U3 are time-delayed, so that the actuator sections 81, 82, 83 are actuated later, the closer they are to the actuator head.
- the actuator 1 is fixed to the actuator base or third actuator section 83.
- one AktorabĂȘt 81, 82, 83 which is arranged in the direction of Aktordehnung relative to another, is delayed controlled: First, the third AktorabĂȘt 83, then the second AktorabĂȘt 82, then the first Aktorabrough 81 is driven.
- the time offset is chosen so that it corresponds to the speed of sound in the actuator 1.
- the individual partial waves of the actuator sections 81, 82, 83 are superimposed in such a way that a substantially shorter expansion time results.
- the lower limit is no longer limited by the actuator length, but by the length of the individual actuator sections 81, 82, 83.
- FIG. 7 shows a further embodiment of an actuator 1 with a segmented first outer electrode 4 and a segmented second outer electrode 2.
- the first outer electrode 4 has a first, a second and a third electrode segment 41, 42, 43, in this case, different lengths.
- the second outer electrode 2 has a first, a second and a third electrode segment 21, 22, 23, in this case of different lengths.
- the actuator sections 81, 82, 83, 84, 85 extend axially between incisions between the electrode segments 21, 22, 23, 41, 42, 43.
- the actuator 1 is fixed to the actuator foot or fifth actuator section 85.
- each electrode segment 21, 22, 23, 41, 42, 43 is electrically connected, two are positioned at the edge, namely the upper and lower inner electrode, which are electrically conductively connected to the electrode segment 21, 22, 23, 41, 42, 43.
- the AktorabĂȘte 81, 82, 83, 84, 85 extend between two adjacent edge-mounted inner electrodes, which may be electrically conductively connected to the same or with different electrode segments 21, 22, 23, 41, 42, 43.
- the first actuator section 81 extends axially along the first electrode segment 41 of the first outer electrode 1.
- the second actuator section 82 extends axially from the edge-positioned inner electrode of the second electrode segment 42 of the first outer electrode 1 to that of the first electrode segment 21 of the second outer electrode 2 the segments 41, 42, 43 of the first outer electrode are arranged so that they are offset relative to the electrode segments 21, 22, 23 of the second outer electrode 2, the electrode segments 21, 22, 42, 43 with the inner electrodes of adjacent AktorabĂȘte 81, 82nd , 83, 84, 85 electrically conductively connected.
- the first electrode segment 21 of the second outer electrode 2 is electrically conductively connected to the second inner electrodes of the first and second Aktorabitess 81, 82 electrically conductive.
- the second electrode segment 42 of the first outer electrode 4 is electrically conductively connected to the first inner electrodes 5 in the second and third AktorabĂȘt 82, 83 electrically conductive.
- FIG. 8 shows the time course of the control signals or reference potentials with respect to a reference potential, U1, U2, U3, U4, U5, U6, of the control arrangement 6 in FIG. 7 to be provided.
- the first drive voltage U1 is applied to the terminal 410 of the first electrode segment 41 of the first outer electrode 4.
- the third drive voltage U3 is on Terminal 420 of the second electrode segment 42 of the first outer electrode 4 at.
- the fifth drive voltage U5 is applied to the terminal 430 of the third electrode segment 43 of the first outer electrode 4.
- the second drive voltage U2 is applied to the terminal 210 of the first electrode segment 21 of the second outer electrode 2.
- the fourth drive voltage U4 is applied to the terminal 220 of the second electrode segment 22 of the second outer electrode 2.
- the sixth drive voltage U6 is applied to the terminal 230 of the third electrode segment 23 of the second outer electrode 2.
- the signs of the first, third, fifth drive voltage U1, U3, U5 are opposite to the sign of the second, fourth and sixth drive voltage U2, U4, U6.
- the fifth actuator section 85 is initially driven.
- the fifth drive voltage U5 rises, which is applied to the third electrode segment 43 of the first outer electrode 4
- both the voltage between the first and second inner electrodes 5, 3 of the fifth actuator section 85 is increased as the potential difference increases, as well as started, the fourth actuator section 84 to drive.
- the fourth drive voltage U4 which is applied to the second electrode segment 22 of the second outer electrode 2
- both the voltage between the first and second internal electrodes 5, 3 of the fourth actuator section 84 is increased, as the potential difference increases, as has begun, the third actuator section 83 to drive. This activation is continued successively for the other actuator sections.
- the non-edge actuator sections 82, 83, 84 are due to the overlapping arrangement of the segments 21, 22, 23, 41, 42, 43 of the outer electrodes 4, 2 are each driven in two steps.
- the timing of the voltage rises or drops at the terminals 210, 220, 230, 410, 420, 430 for strain and compression is the same, the voltage rises or drops at individual terminals 210, 220, 230, 410, 420, 430 differ in terms of their sign when stretched and compressed.
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Description
Aktoren, beispielsweise Vielschichtaktoren, werden auf verschiedenen Gebieten eingesetzt, ein Beispiel sind Einspritzsysteme fĂŒr Motoren. Aktoren umfassen Piezoelemente, die sich bei Anlegen einer Spannung ausdehnen. FĂŒr Einspritzsysteme sind Aktoren mit immer schnelleren Schaltzeiten bei immer höheren HĂŒben gewĂŒnscht. Beide Forderungen widersprechen sich: FĂŒr höhere HĂŒbe sind wegen der maximalen Dehnbarkeit der Keramik in den Aktoren auch lĂ€ngere Aktoren erforderlich. Die Geschwindigkeit, mit der sich der Aktor ausdehnt, hĂ€ngt von der Schallgeschwindigkeit im Aktor ab. Durch die begrenzte Schallgeschwindigkeit im Aktor werden mit zunehmender LĂ€nge des Aktors auch dessen Schaltzeiten lĂ€nger. Die Dehnung breitet sich innerhalb des Aktors in Form einer elastischen Welle aus. Dabei ist jede einzelne DomĂ€ne, also jedes sich ausdehnende Piezoelement, Quelle einer Teilwelle. Diese ĂŒberlagern sich schlussendlich zu einer Gesamtverformung. Durch die unterschiedlichen Laufzeiten der Teilwellen vom Ort ihrer Entstehung bis zum Aktorkopf ergibt sich auch bei ideal steiler Ansteuerspannung des Aktors eine minimale Flankenzeit der Aktordehnung, das heiĂt der Zeit, bis der Aktor sich ausgedehnt hat, welche aus physikalischen GrĂŒnden nicht unterschritten werden kann.Actuators, such as multilayer actuators, are used in various fields, such as injection systems for engines. Actuators include piezo elements that expand when a voltage is applied. For injection systems, actuators with ever faster switching times and higher strokes are desired. Both requirements are contradictory: higher strokes require longer actuators because of the maximum ductility of the ceramic in the actuators. The speed at which the actuator expands depends on the speed of sound in the actuator. Due to the limited speed of sound in the actuator and its switching times are longer with increasing length of the actuator. The strain spreads within the actuator in the form of an elastic wave. Each individual domain, ie each expanding piezoelectric element, is the source of a partial wave. These ultimately overlap to a total deformation. Due to the different maturities of the partial waves from the place of their formation to the actuator head even at ideal steep driving voltage of the actuator results in a minimum edge time of Aktordehnung, that is, the time until the actuator has expanded, which can not be exceeded for physical reasons.
Zwei Methoden, um höhere HĂŒbe trotz oben genannter BeschrĂ€nkungen zu erreichen, verwenden relativ kurze Aktoren und haben damit einhergehend kurze Schaltzeiten. Die HĂŒbe oder geforderten Stellwege können durch mechanische Ăbersetzung mittels eines Kipphebels oder durch mechanische Ăbersetzung mittels eines hydraulischen VerstĂ€rkers erreicht werden.Two methods of achieving higher strokes, despite the limitations mentioned above, use relatively short actuators and, as a result, have short switching times. The strokes or required travel can be achieved by mechanical translation by means of a rocker arm or by mechanical Translation can be achieved by means of a hydraulic amplifier.
Die
Die
Die
Die
Es stellt sich die Aufgabe, einen hinsichtlich der oben genannten Aspekte verbesserten Aktor bereitzustellen.It is an object to provide an improved in terms of the above aspects actuator.
Die Aufgabe wird durch einen Aktor mit den Merkmalen des Patentanspruchs 1 gelöst.The object is achieved by an actuator having the features of
Es ist ein Aktorsystem mit einer Steueranordnung und einem Aktor vorgesehen, wobei der Aktor in eine vorgegebene Richtung ausdehnbar ist.There is provided an actuator system with a control arrangement and an actuator, wherein the actuator is expandable in a predetermined direction.
Der Aktor ist mit stapelförmig angeordneten Piezoelementen, ersten und zweiten Innenelektroden, die zwischen den Piezoelementen abwechselnd angeordnet sind, einer ersten AuĂenelektrode, die elektrisch leitend mit den ersten Innenelektroden verbunden ist, und einer zweiten AuĂenelektrode, die elektrisch leitend mit den zweiten Innenelektroden verbunden ist, vorgesehen. Der Aktor umfasst eine Vielzahl von Aktorabschnitten mit einem ersten Aktorabschnitt, der in der vorgegebenen Richtung relativ zu einem zweiten Aktorabschnitt angeordnet ist. Die zweite AuĂenelektrode umfasst separate Elektrodensegmente, die jeweils mit den zweiten Innenelektroden in einem der Aktorabschnitte oder in einer Gruppe der Aktorabschnitte elektrisch leitend verbunden sind.The actuator is arranged with stacked piezo elements, first and second internal electrodes, which are alternately arranged between the piezoelectric elements, a first external electrode, which is electrically conductively connected to the first internal electrodes, and a second Outer electrode which is electrically conductively connected to the second internal electrodes, is provided. The actuator comprises a plurality of actuator sections with a first actuator section which is arranged in the predetermined direction relative to a second actuator section. The second outer electrode comprises separate electrode segments which are each electrically conductively connected to the second internal electrodes in one of the actuator sections or in a group of the actuator sections.
Mittels der Steueranordnung ist ein erstes Ansteuersignal am ersten Aktorabschnitt oder einer ersten Gruppe von Aktorabschnitten und ein zweites Ansteuersignal zeitversetzt an dem zweiten Aktorabschnitt oder einer zweiten Gruppe von Aktorabschnitten anlegbar. Die Steueranordnung ist geeignet, das erste Ansteuersignal an dem ersten Aktorabschnitt oder der ersten Gruppe von Aktorabschnitten zeitverzögert zum zweiten Ansteuersignal an dem zweiten Aktorabschnitt oder der zweiten Gruppe von Aktorabschnitten anzulegen, sodass sich die beim Ausdehnen des Aktors in den jeweiligen Aktorabschnitten oder Gruppen von Aktorabschnitten durch die Ansteuersignale erzeugten elastischen Teilwellen ĂŒberlagern.By means of the control arrangement, a first drive signal at the first actuator section or a first group of actuator sections and a second drive signal can be applied at a time offset to the second actuator section or a second group of actuator sections. The control arrangement is adapted to apply the first control signal to the first actuator section or the first group of actuator sections with a time delay to the second control signal at the second actuator section or the second group of actuator sections, so that the extension of the actuator in the respective Aktorabschnitten or groups of Aktorabschnitten through superimpose the control signals generated elastic partial waves.
Jeder Aktorabschnitt ist nur mit einem Teil der zweiten Innenelektroden elektrisch leitend verbunden. Die separaten, sich nicht berĂŒhrenden oder nicht direkt elektrisch leitend miteinander verbundenen Elektrodensegmente erlauben die Aktorabschnitte zeitlich versetzt anzusteuern, sodass der Dehnungsvorgang nicht fĂŒr alle Piezoelemente zeitgleich in Gang gesetzt wird, sondern zeitlich versetzt.Each actuator section is electrically connected only to a part of the second internal electrodes. The separate, non-contacting or not directly electrically conductive interconnected electrode segments allow the Aktorabschnitte offset in time, so that the stretching process is not set for all piezo elements at the same time in motion, but offset in time.
Der Aktor umfasst mehrere Abschnitte, jeweils mit Piezoelementen und Innenelektroden, welche zeitversetzt angesteuert werden. Die Ansteuerung erfolgt nicht gleichzeitig fĂŒr alle Bereiche des gesamten Aktors, sondern erfolgt zeitversetzt fĂŒr deren einzelne Abschnitte. In vorteilhafter Weise wird der Zeitversatz so gewĂ€hlt, dass er exakt der Schallgeschwindigkeit im Aktor entspricht. Dadurch ĂŒberlagern sich beim Ausdehnen des Aktors die elastischen Teilwellen derart, dass sich eine wesentlich kĂŒrzere Flankenzeit ergibt fĂŒr die Ausdehnung des Aktors als dies bei gleichzeitiger Ansteuerung der AuĂenelektrode der Fall wĂ€re. Die untere Grenze der Flankenzeit wird nicht mehr durch die LĂ€nge des gesamten Aktors begrenzt, sondern durch die LĂ€nge der einzelnen Bereiche.The actuator comprises a plurality of sections, each with piezo elements and internal electrodes, which are actuated with a time delay become. The control is not carried out simultaneously for all areas of the entire actuator, but takes place with a time delay for their individual sections. Advantageously, the time offset is chosen so that it corresponds exactly to the speed of sound in the actuator. This will interfere with the Extending the actuator, the elastic partial waves such that there is a much shorter edge time for the expansion of the actuator than would be the case with simultaneous control of the outer electrode. The lower limit of the edge time is no longer limited by the length of the entire actuator, but by the length of the individual areas.
Weitere vorteilhafte Ausgestaltungen der Erfindung sind in den abhĂ€ngigen PatentansprĂŒchen angegeben.Further advantageous embodiments of the invention are specified in the dependent claims.
In einem AusfĂŒhrungsbeispiel umfasst auch die erste AuĂenelektrode separate Elektrodensegmente, die jeweils nur mit einem Teil der ersten Innenelektroden, nĂ€mlich mit den ersten Innenelektroden in einem der Aktorabschnitte oder in einer Gruppe der Aktorabschnitte, elektrisch leitend verbunden sind. Das Vorsehen zweier segmentierter AuĂenelektroden erlaubt gröĂere Freiheitsgrade beim Design des Aktors. Die Aufteilung der Segmente bei der ersten und zweiten AuĂenelektrode kann ĂŒbereinstimmen. Alternativ ist die Segmentierung asymmetrisch.In one embodiment, the first outer electrode also comprises separate electrode segments which are each electrically connected to only a part of the first inner electrodes, namely to the first inner electrodes in one of the actuator sections or in a group of the Aktorabschnitte. The provision of two segmented outer electrodes allows greater degrees of freedom in the design of the actuator. The division of the segments in the first and second outer electrode may coincide. Alternatively, the segmentation is asymmetric.
Die Elektrodensegmente sind in einem AusfĂŒhrungsbeispiel jeweils mit entweder den ersten oder den zweiten Innenelektroden in benachbarten Aktorabschnitten elektrisch leitend verbunden. Dies ermöglicht bei segmentierter erster und segmentierter zweiter AuĂenelektrode, dass ein erstes Elektrodensegment der ersten AuĂenelektrode mit den ersten Innenelektroden in einem ersten Aktorabschnitt und einem zweiten, zum ersten benachbarten Aktorabschnitt elektrisch leitend verbunden ist und dass ein zweites Elektrodensegment der zweiten AuĂenelektrode mit den zweiten Innenelektroden im zweiten Aktorabschnitt und in einem dritten, zum zweiten benachbarten Aktorabschnitt elektrisch leitend verbunden ist. Mit anderen Worten: die ersten und zweiten AuĂenelektroden sind derart versetzt zueinander angeordnet, sodass sie sowohl Innenelektroden im selben als auch in verschiedenen Aktorabschnitten elektrisch leitend kontaktieren.In one exemplary embodiment, the electrode segments are each electrically conductively connected to either the first or the second internal electrodes in adjacent actuator sections. With segmented first and segmented second outer electrodes, this enables a first electrode segment of the first outer electrode to be electrically conductively connected to the first inner electrodes in a first actuator section and a second actuator section adjacent to the first, and a second electrode segment of the second outer electrode to be connected to the second inner electrodes in FIG second actuator section and in a third, the second adjacent Aktorabschnitt is electrically connected. In other words, the first and second outer electrodes are arranged offset from one another in such a way that they electrically conductively contact both inner electrodes in the same and in different actuator sections.
In einem AusfĂŒhrungsbeispiel umfassen zumindest die Elektrodensegmente der zweiten AuĂenelektrode jeweils ein Terminal, an dem ein Ansteuersignal anlegbar ist. Die zeitlich versetzten Ansteuersignale ermöglichen die zeitversetzte Ansteuerung der Aktorabschnitte. Bei segmentierter erster AuĂenelektrode haben deren Segmente auch Terminals.In one embodiment, at least the electrode segments of the second outer electrode each comprise a terminal to which a drive signal can be applied. The time-offset control signals enable the time-offset control of the actuator sections. With segmented first outer electrode, their segments also have terminals.
Ein Aktorsystem umfasst einen Aktor und eine Steueranordnung, mittels derer ein erstes Ansteuersignal an einen der Aktorabschnitte und eine zweites Ansteuersignal zeitversetzt an einen weiteren Aktorabschnitt anlegbar ist.An actuator system comprises an actuator and a control arrangement, by means of which a first control signal to one of the Aktorabschnitte and a second control signal is time-shifted applied to a further Aktorabschnitt.
Der Aktor kann sich in eine Richtung ausdehnen, beispielsweise auf Grund seiner Fixierung am AktorfuĂ. Ein erster Aktorabschnitt ist in dieser Richtung relativ zu einem zweiten Aktorabschnitt angeordnet, wobei die Steueranordnung geeignet ist, das erste Ansteuersignal am ersten Aktorabschnitt zeitverzögert zum zweiten Ansteuersignal am zweiten Aktorabschnitt anzulegen.The actuator can expand in one direction, for example due to its fixation on the actuator base. A first actuator section is arranged in this direction relative to a second actuator section, wherein the control arrangement is adapted to apply the first drive signal to the first actuator section with a time delay to the second drive signal at the second actuator section.
Wenn lediglich eine segmentierte AuĂenelektrode vorgesehen ist, legt die Steueranordnung die Steuersignale an deren Elektrodensegmente an und die andere AuĂenelektrode kann mit einem Bezugspotenzial verbunden sein. Bei zwei segmentierten AuĂenelektroden ist die Steueranordnung geeignet, die Elektrodensegmente, die mit den ersten Innenelektroden verbunden sind, und die Elektrodensegmente, die mit zweiten Innenelektroden verbunden sind, mit Spannungen unterschiedlicher Vorzeichen bezogen auf ein Bezugspotenzial zu beaufschlagen. Das Anlegen verschiedener Ansteuersignale an beiden AuĂenelektroden ermöglicht eine bessere, flexiblere Ansteuerung des Aktors.If only one segmented outer electrode is provided, the control arrangement applies the control signals to its electrode segments and the other outer electrode can be connected to a reference potential. In the case of two segmented outer electrodes, the control arrangement is suitable, the electrode segments connected to the first inner electrodes and the electrode segments connected to the second Internal electrodes are connected to apply voltages of different signs with respect to a reference potential. The application of different control signals on both outer electrodes allows a better, more flexible control of the actuator.
Der Zeitversatz wird in AbhÀngigkeit der Schallgeschwindigkeit im Aktor gewÀhlt, um Laufzeitunterschiede der Teilwellen auszugleichen.The time offset is selected as a function of the speed of sound in the actuator to compensate for runtime differences of the partial waves.
Eine Ansteuerung eines Aktors mit stapelförmig angeordneten Piezoelementen, ersten und zweiten Innenelektroden, die zwischen den Piezoelementen abwechselnd angeordnet sind, wobei der Aktor eine Vielzahl von Aktorabschnitten umfasst, ist in Anspruch 8 definiert. Zwischen den ersten und den zweiten Innenelektroden wird in einem ersten Aktorabschnitt oder einer ersten Gruppe von Aktorabschnitten eine Ansteuerspannung zeitversetzt zu einer Ansteuerspannung zwischen den ersten und den zweiten Innenelektroden in einem zweiten Aktorabschnitt oder in einer zweiten Gruppe von Aktorabschnitten derart angelegt, dass das erste Ansteuersignal an dem ersten Aktorabschnitt oder der ersten Gruppe von Aktorabschnitten zeitverzögert zum zweiten Ansteuersignal an dem zweiten Aktorabschnitt oder der zweiten Gruppe von Aktorabschnitten liegt, sodass sich die in den jeweiligen Aktorabschnitten oder Gruppen von Aktorabschnitten durch die Ansteuersignale erzeugten elastischen Teilwellen ĂŒberlagern.A control of an actuator with stacked arranged piezo elements, first and second internal electrodes, which are arranged alternately between the piezo elements, wherein the actuator comprises a plurality of actuator sections, is defined in claim 8. Between the first and the second internal electrodes, in a first actuator section or a first group of actuator sections, a drive voltage is applied in a time-delayed manner to a drive voltage between the first and the second internal electrodes in a second actuator section or in a second group of actuator sections such that the first drive signal is applied The first actuator section or the first group of actuator sections is delayed in time relative to the second control signal at the second actuator section or the second group of actuator sections, so that superimposed in the respective Aktorabschnitten or groups of Aktorabschnitten generated by the control signals elastic partial waves.
Der Aktor dehnt sich in eine Richtung aus, wobei der erste Aktorabschnitt in der Richtung relativ zu dem zweiten Aktorabschnitt angeordnet ist, und wobei die erste Ansteuerspannung zur zweiten Ansteuerspannung zeitverzögert ist. Nachfolgend wird die Erfindung unter Bezugnahme auf die Zeichnung anhand von AusfĂŒhrungsbeispielen erklĂ€rt.The actuator expands in one direction, wherein the first actuator portion is disposed in the direction relative to the second actuator portion, and wherein the first drive voltage to the second drive voltage is time-delayed. The invention will be explained below with reference to the drawings by means of exemplary embodiments.
Es zeigen:
Figur 1- ein AusfĂŒhrungsbeispiel eines Aktors ohne segmentierte AuĂenelektroden,
Figur 2- den zeitlichen Verlauf der Ansteuerspannung fĂŒr diesen,
Figur 3- ein AusfĂŒhrungsbeispiel eines Aktors mit einer segmentierten AuĂenelektrode,
Figur 4- eine perspektivische Ansicht desselben,
Figur 5- eine schematische Schnittdarstellung desselben,
Figur 6- den zeitlichen Verlauf der Ansteuerspannungen, die an den Elektrodensegmenten anliegen,
- Figur 7
- ein weiteres AusfĂŒhrungsbeispiel eines Aktors mit zwei segmentierten AuĂenelektroden,
- Figur 8
- den zeitlichen Verlauf der Ansteuerspannungen, die an den Elektrodensegmenten anliegen,
- FIG. 1
- An embodiment of an actuator without segmented outer electrodes,
- FIG. 2
- the time course of the drive voltage for this,
- FIG. 3
- an embodiment of an actuator with a segmented outer electrode,
- FIG. 4
- a perspective view of the same,
- FIG. 5
- a schematic sectional view of the same,
- FIG. 6
- the time profile of the drive voltages applied to the electrode segments,
- FIG. 7
- Another embodiment of an actuator with two segmented outer electrodes,
- FIG. 8
- the time profile of the drive voltages applied to the electrode segments,
Die erste AuĂenelektrode 4 ist mit einem Bezugspotenzial 7 verbunden. Eine Steueranordnung 6 legt an die zweite AuĂenelektrode 2 ein Ansteuersignal, beispielsweise ein zeitverĂ€nderliches Ansteuerpotenzial an, sodass zwischen den ersten und zweiten Innenelektroden eine Ansteuerspannung U liegt, in AbhĂ€ngigkeit derer der Aktor 1 gedehnt oder gestaucht wird.The first
Durch Anlegen der Ansteuerspannung U erfĂ€hrt der Aktor 1 einen Hub. Die Ausdehnung des Aktors 1 erfolgt in endlicher Zeit. Die Dehnung breitet sich innerhalb des Aktors 1 in Form einer elastischen Welle aus. Dabei ist jede einzelne DomĂ€ne, oder Piezoelement 16, Quelle einer Teilwelle. Diese ĂŒberlagern sich, woraus die Gesamtverformung resultiert. Durch die unterschiedlichen Laufzeiten der Teilwellen vom Ort ihrer Entstehung bis zum Aktorkopf ergibt sich auch bei unendlich steiler Ansteuerung eine Zeit, die der Dehnungsprozess erfordert, welche aus physikalischen GrĂŒnden nicht unterschritten werden kann. Je lĂ€nger der Aktor 1 und je gröĂer der Hub desto gröĂer ist auch diese Zeit.By applying the drive voltage U, the
Durch Ansteigen der sechsten Ansteuerspannung U6 wird zunĂ€chst der fĂŒnfte Aktorabschnitt 85 angesteuert. Mit Ansteigen der fĂŒnften Ansteuerspannung U5, welche am dritten Elektrodensegment 43 der ersten AuĂenelektrode 4 anliegt, wird sowohl die Spannung zwischen den ersten und zweiten Innenelektroden 5, 3 des fĂŒnften Aktorabschnitts 85 erhöht, da sich die Potenzialdifferenz erhöht, als auch begonnen, den vierten Aktorabschnitt 84 anzusteuern. Mit Ansteigen der vierten Ansteuerspannung U4, welche am zweiten Elektrodensegment 22 der zweiten AuĂenelektrode 2 anliegt, wird sowohl die Spannung zwischen den ersten und zweiten Innenelektroden 5, 3 des vierten Aktorabschnitts 84 erhöht, da sich die Potenzialdifferenz erhöht, als auch begonnen, den dritten Aktorabschnitt 83 anzusteuern. Diese Ansteuerung wird sukzessive fĂŒr die anderen Aktorabschnitte fortgesetzt.By increasing the sixth drive voltage U6, the
Die nicht randseitigen Aktorabschnitte 82, 83, 84 werden auf Grund der ĂŒberlappenden Anordnung der Segmente 21, 22, 23, 41, 42, 43 der AuĂenelektroden 4, 2 jeweils in zwei Schritten angesteuert.The
Es sei bemerkt, dass die zeitliche Abfolge der Spannungsanstiege beziehungsweise -abfĂ€lle an den Terminals 210, 220, 230, 410, 420, 430 fĂŒr Dehnung und Stauchung die gleiche ist, sich die Spannungsanstiege beziehungsweise -abfĂ€lle an einzelnen Terminals 210, 220, 230, 410, 420, 430 bei Dehnung und Stauchung aber hinsichtlich ihres Vorzeichens unterscheiden.It should be noted that the timing of the voltage rises or drops at the
Es sei bemerkt, dass die Merkmale der AusfĂŒhrungsbeispiele kombinierbar sind.It should be noted that the features of the embodiments can be combined.
- 11
- Aktoractuator
- 4, 24, 2
- AuĂenelektrodeouter electrode
- 5, 35, 3
- Innenelektrodeinner electrode
- 66
- Steueranordnungcontrol arrangement
- 77
- Bezugspotenzialreference potential
- 1616
- Piezoelementpiezo element
- 21, 21, 23, 41, 42, 4321, 21, 23, 41, 42, 43
- Elektrodensegmentelectrode segment
- 81, 82, 83, 84, 8581, 82, 83, 84, 85
- Aktorabschnittactuator section
- 210, 210, 230, 410, 420, 430210, 210, 230, 410, 420, 430
- Terminalterminal
Claims (10)
- Actuator system comprising a control arrangement (6) and an actuator (1), wherein the actuator (1), which is expandable in a predefined direction, comprises- piezoelements (16) arranged in a stacked fashion,- first and second internal electrodes (5, 3) arranged alternately between the piezoelements (16),- a first external electrode (4), which is electrically conductively connected to the first internal electrodes (5),- a second external electrode (2), which is electrically conductively connected to the second internal electrodes (3),- a plurality of actuator sections (81, 82, 83, 84, 85) comprising a first actuator section (81, 82, 83, 84, 85), which is arranged in the predefined direction relative to a second actuator section (81, 82, 83, 84, 85), wherein the second external electrode (2) comprises separate electrode segments (21, 22, 23), which are electrically conductively connected in each case to the second internal electrodes (3) in one of the actuator sections (81, 82, 83, 84, 85) or in a group of the actuator sections (81, 82, 83, 84, 85),
characterized in that, by means of the control arrangement (6), a first control signal (U1, U2, U3, U4, U5, U6) can be applied to the first actuator section (81, 82, 83, 84, 85) or a first group of actuator sections (81, 82, 83, 84, 85) and a second control signal (U1, U2, U3, U4, U5, U6) can be applied in a time-shifted manner to the second actuator section (81, 82, 83, 84, 85) or a second group of actuator sections (81, 82, 83, 84, 85) in such a way that the first control signal (U1, U2, U3, U4, U5, U6) is at the first actuator section or the first group of actuator sections in a time-delayed manner with respect to the second control signal (U1, U2, U3, U4, U5, U6) at the second actuator section or the second group of actuator sections, so that the elastic partial waves generated by the control signals during the expansion of the actuator in the respective actuator sections or groups of actuator sections are superimposed. - Actuator system according to Claim 1,
characterized in that
the first external electrode (4) comprises separate electrode segments (41, 42, 43) which are electrically conductively connected in each case to the first internal electrodes (5) in one of the actuator sections (81, 82, 83, 84, 85) or in a group of the actuator sections (81, 82, 83, 84, 85). - Actuator system according to Claim 1 or 2,
characterized in that
the electrode segments (21, 22, 23, 41, 42, 43) are electrically conductively connected in each case to either the first or the second internal electrodes (5, 3) in adjacent actuator sections (81, 82, 83, 84, 85). - Actuator system according to any of the preceding claims,
characterized in that
a first electrode segment (42, 43) is electrically conductively connected to the first internal electrodes (5) in a first and a second actuator section (82, 83; 84, 85) adjacent thereto, and in that a second electrode segment (21, 22) is electrically conductively connected to the second internal electrodes (3) in the second and in a third actuator section (82, 81; 84, 83) adjacent thereto. - Actuator system according to any of the preceding claims,
characterized in that
at least the electrode segments (21, 22, 23) of the second external electrode (2) in each case comprise a terminal (210, 220, 230), to which a control signal (U1, U2, U3, U4, U6) can be applied. - Actuator system according to any of the preceding claims,
characterized in that
the control arrangement (6) is suitable for applying voltages (U1, U2, U3, U4, U5, U6) having different signs relative to a reference-ground potential (7) to the electrode segments (41, 42, 43) connected to the first internal electrodes (5) and the electrode segments (21, 22, 23) connected to second internal electrodes (3). - Actuator system according to any of the preceding claims,
characterized in that
the time shift is dependent on the velocity of sound in the actuator (1). - Method for the control of an actuator (1), which is expandable in a predefined direction, comprising piezoelements (16) arranged in a stacked fashion, first and second internal electrodes (5, 3) arranged alternately between the piezoelements (16), wherein the actuator (1) comprises a multiplicity of actuator sections (81, 82, 83, 84, 85) comprising a first actuator section (81, 82, 83, 84, 85), which is arranged in the predefined direction relative to a second actuator section (81, 82, 83, 84, 85), and a first control voltage is applied between the first and second internal electrodes (5, 3) in the first actuator section (81, 82, 83, 84, 85) or in a first group of actuator sections (81, 82, 83, 84, 85) in a time-shifted manner with respect to a second control voltage applied between the first and second internal electrodes (5, 3) in the second actuator section (81, 82, 83, 84, 85) or in a second group of actuator sections (81, 82, 83, 84, 85) in such a way that the first control signal (U1, U2, U3, U4, U5, U6) is at the first actuator section or the first group of actuator sections in a time-delayed manner with respect to the second control signal (U1, U2, U3, U4, U5, U6) at the second actuator section or the second group of actuator sections, so that the elastic partial waves generated by the control signals during the expansion of the actuator in the respective actuator sections or groups of actuator sections are superimposed.
- Control method according to Claim 8,
characterized in that
the actuator (1) is expandable in one direction, wherein the first actuator section (81, 82, 83, 84, 85) is arranged in the direction relative to the second actuator section (81, 82, 83, 84, 85), and wherein the first control voltage is time-delayed with respect to the second control voltage. - Control method according to Claim 8 or 9,
characterized in that
the time shift is chosen in a manner dependent on the velocity of sound in the actuator (1).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102010055621A DE102010055621A1 (en) | 2010-12-22 | 2010-12-22 | Actuator, actuator system and control of an actuator |
PCT/EP2011/073421 WO2012084957A1 (en) | 2010-12-22 | 2011-12-20 | Actuator, actuator system, and control of an actuator |
Publications (2)
Publication Number | Publication Date |
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EP2656408A1 EP2656408A1 (en) | 2013-10-30 |
EP2656408B1 true EP2656408B1 (en) | 2015-10-21 |
Family
ID=45406753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP11801739.1A Not-in-force EP2656408B1 (en) | 2010-12-22 | 2011-12-20 | Actuator system, and control of an actuator |
Country Status (6)
Country | Link |
---|---|
US (1) | US9419199B2 (en) |
EP (1) | EP2656408B1 (en) |
JP (1) | JP5837612B2 (en) |
CN (1) | CN103262273B (en) |
DE (1) | DE102010055621A1 (en) |
WO (1) | WO2012084957A1 (en) |
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JP5883202B1 (en) * | 2014-08-28 | 2016-03-09 | äșŹă»ă©æ ȘćŒäŒç€Ÿ | Piezoelectric element, and sound generator, sound generator, and electronic device including the same |
DE102015117203A1 (en) * | 2015-10-08 | 2017-04-13 | Epcos Ag | pressure sensor |
DE202016102203U1 (en) * | 2016-04-26 | 2016-06-29 | Epcos Ag | Multilayer component |
Family Cites Families (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3378704A (en) * | 1966-01-05 | 1968-04-16 | Bourns Inc | Piezoelectric multilayer device |
DE1591330B2 (en) * | 1966-09-30 | 1972-05-25 | Nippon Electric Co. Ltd., Tokio | PIEZOELECTRIC BENDING VIBRATOR |
GB1207974A (en) * | 1966-11-17 | 1970-10-07 | Clevite Corp | Frequency selective apparatus including a piezoelectric device |
US3489931A (en) * | 1968-08-30 | 1970-01-13 | Bourns Inc | Monolithic electrical transformer |
JPS5917876A (en) * | 1982-02-12 | 1984-01-30 | West Electric Co Ltd | Piezoelectric drive device |
US4564782A (en) * | 1983-09-02 | 1986-01-14 | Murata Manufacturing Co., Ltd. | Ceramic filter using multiple thin piezoelectric layers |
JPS6066882A (en) * | 1983-09-22 | 1985-04-17 | Murata Mfg Co Ltd | Piezoelectric displacement element and polarizing method thereof |
JPS6273787A (en) | 1985-09-27 | 1987-04-04 | Toshiba Corp | Displacement generator |
JPS6378582A (en) * | 1986-09-22 | 1988-04-08 | Hitachi Ltd | Electromechanical transducer |
JPS63120480A (en) | 1986-11-10 | 1988-05-24 | Tokin Corp | Lamination type piezoelectric actuator |
JPS63194377A (en) | 1987-02-06 | 1988-08-11 | Toyota Autom Loom Works Ltd | Method and apparatus for driving laminated piezoelectric element |
JPH0193184A (en) | 1987-10-05 | 1989-04-12 | Tokin Corp | Laminated type piezoelectric actuator |
EP0313072B1 (en) * | 1987-10-23 | 1993-05-05 | Hitachi, Ltd. | Method of and apparatus for conveying object by utilizing vibration |
US4932119A (en) | 1989-03-28 | 1990-06-12 | Litton Systems, Inc. | Method of making standard electrodisplacive transducers for deformable mirrors |
JPH05160459A (en) * | 1991-12-09 | 1993-06-25 | Hitachi Metals Ltd | Laminated displacement element |
DE4140676A1 (en) | 1991-12-10 | 1993-06-17 | Kraeussling Systems Gmbh | Piezo-actuator stack control method - is formed on N single piezo discs, only one of which is charged with electrical energy at one time |
JPH05327054A (en) | 1992-05-15 | 1993-12-10 | Nec Corp | System for driving a piezoelectric effect element |
JPH07223315A (en) | 1994-02-15 | 1995-08-22 | Fujitsu Ltd | Piezoelectric actuator and head for ink-jet printer |
US5686777A (en) | 1995-09-21 | 1997-11-11 | New Jersey Institute Of Technology | High accuracy piezoelectric positioning device |
JP2822994B2 (en) * | 1996-09-11 | 1998-11-11 | æ„æŹé»æ°æ ȘćŒäŒç€Ÿ | Mode-locked semiconductor laser |
DE19802302A1 (en) * | 1998-01-22 | 1999-07-29 | Bosch Gmbh Robert | Piezoelectric actuator used e.g. for a fuel injection valve, a hydraulic valve, a micro-pump or an electrical relay |
CN1138287C (en) * | 1999-06-01 | 2004-02-11 | æç«äž | Vabriting film extended multi-output composite structured piezoelectric transformer |
JP3838024B2 (en) * | 2000-11-27 | 2006-10-25 | æ ȘćŒäŒç€Ÿæç°èŁœäœæ | Vertically coupled multimode piezoelectric filter |
JP3852308B2 (en) | 2001-07-09 | 2006-11-29 | æ ȘćŒäŒç€Ÿæç°èŁœäœæ | Multilayer piezoelectric element, manufacturing method thereof, and piezoelectric actuator |
KR100474851B1 (en) | 2003-01-15 | 2005-03-09 | ìŒì±ì ììŁŒìíìŹ | Ink expelling method amd inkjet printhead adopting the method |
DE10321705A1 (en) | 2003-05-14 | 2004-12-02 | Marco Systemanalyse Und Entwicklung Gmbh | Piezoelectric drive element with several identical stacks of layers of piezoelectric material with electrodes, including electrical breakdown protection stack segments |
JP2005005680A (en) | 2003-05-21 | 2005-01-06 | Denso Corp | Piezoelectric actuator |
JP2005347484A (en) | 2004-06-02 | 2005-12-15 | Nano Control:Kk | Laminated piezoelectric actuator element, positioning device and positioning method |
DE502006000647D1 (en) | 2006-02-16 | 2008-05-29 | Delphi Tech Inc | Method for producing a piezoelectric component |
DE102007046315A1 (en) | 2007-09-27 | 2009-04-02 | Robert Bosch Gmbh | Piezoactuator module with a plurality of interconnected piezoelectric actuators and a method for its production |
JP2009266921A (en) | 2008-04-23 | 2009-11-12 | Honda Motor Co Ltd | Laminated piezoelectric actuator element |
JP2010245187A (en) | 2009-04-02 | 2010-10-28 | Honda Motor Co Ltd | Laminated piezoelectric actuator element |
DE102010048880A1 (en) * | 2010-10-19 | 2012-04-19 | Epcos Ag | Stackable piezoelectric actuator component |
DE102010055620A1 (en) * | 2010-12-22 | 2012-06-28 | Epcos Ag | Actuator, actuator system and control of an actuator |
-
2010
- 2010-12-22 DE DE102010055621A patent/DE102010055621A1/en not_active Withdrawn
-
2011
- 2011-12-20 CN CN201180061765.0A patent/CN103262273B/en not_active Expired - Fee Related
- 2011-12-20 US US13/995,940 patent/US9419199B2/en not_active Expired - Fee Related
- 2011-12-20 JP JP2013545311A patent/JP5837612B2/en not_active Expired - Fee Related
- 2011-12-20 WO PCT/EP2011/073421 patent/WO2012084957A1/en active Application Filing
- 2011-12-20 EP EP11801739.1A patent/EP2656408B1/en not_active Not-in-force
Also Published As
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US20130342083A1 (en) | 2013-12-26 |
WO2012084957A1 (en) | 2012-06-28 |
JP2014501478A (en) | 2014-01-20 |
EP2656408A1 (en) | 2013-10-30 |
US9419199B2 (en) | 2016-08-16 |
JP5837612B2 (en) | 2015-12-24 |
CN103262273B (en) | 2016-01-20 |
CN103262273A (en) | 2013-08-21 |
DE102010055621A1 (en) | 2012-06-28 |
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