JPH0193184A - Laminated type piezoelectric actuator - Google Patents

Laminated type piezoelectric actuator

Info

Publication number
JPH0193184A
JPH0193184A JP62249976A JP24997687A JPH0193184A JP H0193184 A JPH0193184 A JP H0193184A JP 62249976 A JP62249976 A JP 62249976A JP 24997687 A JP24997687 A JP 24997687A JP H0193184 A JPH0193184 A JP H0193184A
Authority
JP
Japan
Prior art keywords
displacement
voltage
piezoelectric actuator
hysteresis
external electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62249976A
Other languages
Japanese (ja)
Inventor
Yaichi Asano
浅野　弥一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP62249976A priority Critical patent/JPH0193184A/en
Publication of JPH0193184A publication Critical patent/JPH0193184A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices

Landscapes

  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE:To decrease an actuator in hysteresis as a system by a method wherein an actuator is composed of two parts which are main displacement section which generates a primary displacement and a correcting displacement section which shows a displacement that corrects the hysteresis of the main displacement section. CONSTITUTION:External electrodes 6 are divided into two pairs of external electrodes 4 and 4' so as to make a piezoelectric actuator divided into parts which are able to make displacement independently of each other. Voltage from a power source 5 is impressed on the electrodes 4 and 4' so as to obtain a primary displacement of the piezoelectric actuator, and voltage from a power source 5' is applied on the electrode 4' so as to correct hysteresis of the primary displacement. Provided that the voltage impressed on the primary displacement section is, for example, 0-100V, displacement of 8-21mum occurs corresponding to the impressed voltage and the hysteresis loop error of a film is 3mum or so, and when voltage impressed on the correcting section is made to be -25-+25V, and a variation period of the voltage is so set as to be half of that of the primary voltage, the displacement of the correcting section is made to be -1.5-+1.5mum, which corrects a hysteresis portion of the primary displacement, so that a total relation of voltage and displacement is made almost linear.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は圧電縦効果を利用し、電気的入力エネルギーを
変位や力の機械エネルギーに変換する積層型圧電アクチ
エータタに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laminated piezoelectric actuator that utilizes the piezoelectric longitudinal effect to convert electrical input energy into mechanical energy in the form of displacement or force.

〔従来の技術〕[Conventional technology]

圧電アクチュエータは、電磁式アクチュエータの代替を
始めとして、広い分野でアクチュエータとしての応用が
進められている。電磁式アクチュエータが電流駆動であ
るのに対して、圧電アクチュエータは電圧駆動で有シ１
本質的に消費電力は圧電アクチュエータの方が少ない。Piezoelectric actuators are being applied as actuators in a wide range of fields, including replacing electromagnetic actuators. While electromagnetic actuators are current-driven, piezoelectric actuators are voltage-driven.
Piezoelectric actuators inherently consume less power.

また、応答性が優れている１等の長所がある。It also has the advantage of being excellent in response.

積層屋圧電アクチュエータは、一対の外部電極を有し、
各外部電極には複数の内部電極が接続されている。この
積層型圧電アクチュエータは前記一対の外部電極を入力
端子として、入力電圧に応じた変位量や力を発生するの
が一般的である。The laminated piezoelectric actuator has a pair of external electrodes,
A plurality of internal electrodes are connected to each external electrode. This laminated piezoelectric actuator generally uses the pair of external electrodes as input terminals to generate a displacement amount or force according to an input voltage.

〔発−が解決しようとする問題点〕[Problems that the project is trying to solve]

この場合、圧電アクチュエータの電圧−変位特性は、印
加電圧を、ＯＶからある電圧まで増加させた時の変位の
軌跡と、前記ある電圧からＯｖまで降下させた時の変位
の軌跡では一致せず、ヒステリシス特性を有するのが一
般的である。In this case, the voltage-displacement characteristics of the piezoelectric actuator do not match the locus of displacement when the applied voltage is increased from OV to a certain voltage and the locus of displacement when it is lowered from the certain voltage to Ov, Generally, it has hysteresis characteristics.

圧電アクチュエータを微小位置決め装置等に応用する場
合、このヒステリシス特性を考慮しなければならず、応
用上制約があった。When applying a piezoelectric actuator to a micro-positioning device, etc., this hysteresis characteristic must be taken into consideration, which imposes restrictions on the application.

本発明の目的は、ヒステリシス特性を考慮する必要のな
い積層屋圧電アクチュエータを提供することにある。An object of the present invention is to provide a laminated piezoelectric actuator that does not require consideration of hysteresis characteristics.

本発明の別の目的は、１つのアクチュエータ系において
、独立して少なくとも２つの変位部分を有し、アクチュ
エータ本来の変位を発生させる主変位部と、その主変位
部の変位に微小変位だけ加算されるが又は減算される電
圧が印加されるヒステリシス補正用変位部とからなる構
造を有し、１つのアクチュエータ系としてヒステリシス
を少なくした積層型圧電アクチュエータを提供する事に
′　ある。Another object of the present invention is to have at least two independent displacement parts in one actuator system, including a main displacement part that generates the original displacement of the actuator, and a small displacement part that is added to the displacement of the main displacement part. The object of the present invention is to provide a laminated piezoelectric actuator which has a structure including a hysteresis correction displacement part to which a voltage that is applied or subtracted from the piezoelectric actuator is applied, and which reduces hysteresis as one actuator system.

〔問題点を解決するための手段〕[Means for solving problems]

本発明によれば、圧電体中の複数の内部電極層エータに
おいて、前記一対の外部電極が、前記圧電アクチュエー
タを部分的に各々独立に変位可能ならしめるように複数
対の分割外部電極に分割され、該複数対の分割外部電極
のうち一対の分割外部電極には前記圧電アクチュエータ
の主変位を得るように電圧が印加され、前記複数対の分
割外部電極のうち残りの分割外部電極には前記主変位の
゛ヒステリシスを補正するように電圧が印加されること
を特徴とする積層型圧電アクチュエータが得られる。According to the present invention, in the plurality of internal electrode layers in the piezoelectric body, the pair of external electrodes is divided into a plurality of pairs of divided external electrodes so that the piezoelectric actuator can be partially displaced independently. A voltage is applied to one pair of the plurality of pairs of divided external electrodes so as to obtain the main displacement of the piezoelectric actuator, and a voltage is applied to the remaining divided external electrodes among the plurality of pairs of divided external electrodes to obtain the main displacement of the piezoelectric actuator. A laminated piezoelectric actuator is obtained, which is characterized in that a voltage is applied to correct displacement hysteresis.

〔実施例〕〔Example〕

次に本発明の実施例について図面を参照して説明する。 Next, embodiments of the present invention will be described with reference to the drawings.

第１図を参照すると１本発明の一実施例による積層型圧
電アクチュエータは、圧電セラミックス３中に埋め込ま
れた複数の内部電極２が、互に隣接する内部電極が対向
電極をなすように、一対の外部電極６に接続されたもの
である。１は絶縁層である。前記一対の外部電極６は、
前記圧電アクチュエータを部分的に各々独立に変位可能
ならしめるように二対の分割外部電極４及び４′に分割
されている。該二対の分割外部電極４及び４′のうち一
対の分割外部電極４には前記圧電アクチュエータの主変
位を得るように電源５によって電圧が印加されている。Referring to FIG. 1, a laminated piezoelectric actuator according to an embodiment of the present invention has a plurality of internal electrodes 2 embedded in a piezoelectric ceramic 3 arranged in pairs such that adjacent internal electrodes form opposing electrodes. It is connected to the external electrode 6 of. 1 is an insulating layer. The pair of external electrodes 6 are
The piezoelectric actuator is divided into two pairs of divided external electrodes 4 and 4' so that the piezoelectric actuator can be partially displaced independently. A voltage is applied to one pair of the two pairs of divided external electrodes 4 and 4' by a power source 5 so as to obtain the main displacement of the piezoelectric actuator.

残シの分割外部電極４′には前記主変位のヒステリシス
を補正するようにもう一つの電源５′によって電圧が印
加されている。A voltage is applied to the remaining divided external electrodes 4' by another power source 5' so as to correct the hysteresis of the main displacement.

よシ具体的には、この積層屋圧電アクチュエータは、上
面や底面に平行な方向の断面が５■Ｘ５ｍで、高さは２
４■である。また、この積層型圧電アクチュエータは、
一対の分割外部電極４で挾まれ、１１５μｍ間隔で内部
電極２が１４４４４層積れた主変位部ｌＯと、残シの分
割外部電極で挾まれ、３６層積層されたヒステリシス補
正用変位部ノ １０とが一体となって焼結されている。Specifically, this laminated roof piezoelectric actuator has a cross section of 5 x 5 m in the direction parallel to the top and bottom surfaces, and a height of 2.
It is 4■. In addition, this laminated piezoelectric actuator is
The main displacement part 10 is sandwiched between a pair of divided external electrodes 4 and has 14,444 layers of internal electrodes 2 stacked at 115 μm intervals, and the hysteresis correction displacement part 10 is sandwiched by the remaining divided external electrodes and has 36 stacked layers. are sintered together.

第２図を参照すると−Ｐ、。及びＰ、。′は、それぞれ
、主変位部１０とヒステリシス補正変位部１０′に印加
する電圧ノ４ターンを示している。Referring to FIG. 2, -P. and P. ' indicates four turns of the voltage applied to the main displacement section 10 and the hysteresis correction displacement section 10', respectively.

第３図は主変位部１０の電圧−変位特性を示す。FIG. 3 shows the voltage-displacement characteristics of the main displacement section 10.

第４図はヒステリシス補正用変位部１０′の電圧−変位
特性を示す。FIG. 4 shows the voltage-displacement characteristics of the hysteresis correction displacement section 10'.

第２図から第６図を用いて以下に説明する。各図中、Ａ
−Ｆは対応して記号を符している。This will be explained below using FIGS. 2 to 6. In each figure, A
-F is marked with a corresponding symbol.

主変位部１０に第２図中Ｐ、。に示すごとく電圧印加す
ると、変位は第３図に示すごとく原点→Ａ→Ｂと立上っ
た後Ｂ４１８→ＣＯＤ→Ｂのくシ返しとなりヒステリシ
スを描く。P in FIG. 2 to the main displacement part 10. When a voltage is applied as shown in FIG. 3, the displacement rises from the origin to A to B and then repeats from B418 to COD to B, thus drawing hysteresis.

点線ＣＢがヒステリシスのない理想的な変位軌跡とする
とヒステリシス補正用変位部１０′は、第２図中、Ｐ、
。′に示すごとく電圧を印加すると、第４図に示すごと
く変位する。即ち、主変位部１０がＣ４０４Ｂと変位す
るときは、ヒステリシス補正用変位部１０′はＣ・→Ｄ
４Ｂの変位軌跡と点線ＣＢとの変位の差分だけ加算され
るように変位する。Assuming that the dotted line CB is an ideal displacement locus without hysteresis, the hysteresis correction displacement section 10' is defined as P,
. When a voltage is applied as shown in ', the displacement occurs as shown in FIG. That is, when the main displacement section 10 is displaced to C404B, the hysteresis correction displacement section 10' is displaced from C.→D.
The displacement is performed so that the difference in displacement between the displacement locus of 4B and the dotted line CB is added.

逆に、主変位部１０がＢ−→Ｅ→Ｃと変位するときは、
ヒステリシス補正用変位部１０′は、ＢＥＥ→Ｃの変位
軌跡と占線ＣＢとの変位の差分だけ減算されるようにマ
イナスの変位をする。Conversely, when the main displacement part 10 is displaced from B-→E→C,
The hysteresis correction displacement unit 10' performs a negative displacement so that the difference in displacement between the BEE→C displacement locus and the occupancy line CB is subtracted.

この結果、第５図に示すごとく、第５図（Ｃ）に示した
主変位部１０の変位と、第５図（ｂ）に示したヒステリ
シス補正用変位部１０’の変位が合成され。As a result, as shown in FIG. 5, the displacement of the main displacement section 10 shown in FIG. 5(C) and the displacement of the hysteresis correction displacement section 10' shown in FIG. 5(b) are combined.

第５図（ａ）に示した変位が１つのアクチュエータ系の
変位となり、第６図に示す如くヒステリシスの係として
表わし、従来型のヒステリシスと比較したものを第１表
に示す。The displacement shown in FIG. 5(a) is the displacement of one actuator system, and is expressed as a function of hysteresis as shown in FIG. 6. Table 1 shows a comparison with the conventional hysteresis.

第１表に示すごとくヒステリシスを３％と少なくするこ
とが出来たので、精密Ｘ−Ｙテーブル等の縦型的な制御
が可能となる。As shown in Table 1, since the hysteresis could be reduced to 3%, vertical control of precision X-Y tables and the like becomes possible.

〔発明の効果〕〔Effect of the invention〕

以上述べたごとく本発明によれば、圧電アクチユエータ
を部分的に独立に変位可能ならしめるように、一対の外
部電極を複数対の分割外部電極に分割し、アクチュエー
タ本来の変位を発生させる主変位部のほかに、ヒステリ
シスを補正するだめのヒステリシス補正用変位部を設け
たので、ヒステリシスが小さいという利点を持った積層
型圧電アクチュエータの提供が可能となった。As described above, according to the present invention, a pair of external electrodes is divided into a plurality of pairs of divided external electrodes so that the piezoelectric actuator can be partially displaced independently, and the main displacement part generates the original displacement of the actuator. In addition to this, since a hysteresis correction displacement portion is provided to correct hysteresis, it is possible to provide a laminated piezoelectric actuator that has the advantage of small hysteresis.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の一実施例による積層型圧電アクチュエ
ータを示す図である。 １・・・絶縁層、２・・・内部電極、３・・・圧電セラ
ミックス、４及び４′・・・分割外部電極、５及び５′
・・・電源。 第２図は第１図の積層型圧電アクチュエータの２つの電
源の出力電圧ノ４ターンを示した図である。 第３図は第１図の積層型圧電アクチュエータの主変位部
１０の電圧−変位特性を示した図である・第４図は第１
図の積層型圧電アクチュエータのヒステリシス補正用変
位部１０’の電圧−変位特性を示した図である。 第５図は第１図の積層型圧電アクチュエータの時間−変
位特性を示した図である。 第６図は第１図の積層型圧電アクチュエータの電圧−変
位特性を示した図である。 第１図 第３図 電圧（■） 第６図 電圧（Ｖ）FIG. 1 is a diagram showing a laminated piezoelectric actuator according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Insulating layer, 2... Internal electrode, 3... Piezoelectric ceramics, 4 and 4'... Divided external electrode, 5 and 5'
···power supply. FIG. 2 is a diagram showing four turns of output voltages of two power supplies of the laminated piezoelectric actuator of FIG. 1. FIG. 3 is a diagram showing the voltage-displacement characteristics of the main displacement section 10 of the laminated piezoelectric actuator shown in FIG.
It is a figure which showed the voltage-displacement characteristic of the displacement part 10' for hysteresis correction of the laminated piezoelectric actuator of a figure. FIG. 5 is a diagram showing the time-displacement characteristics of the laminated piezoelectric actuator shown in FIG. 1. FIG. 6 is a diagram showing voltage-displacement characteristics of the laminated piezoelectric actuator shown in FIG. 1. Figure 1 Figure 3 Voltage (■) Figure 6 Voltage (V)

Claims (1)

【特許請求の範囲】[Claims] １．圧電体中の複数の内部電極層が，互に隣接する内部
電極が対向電極をなすように，一対の外部電極に接続さ
れた積層型圧電アクチュエータにおいて，前記一対の外
部電極が，前記圧電アクチュエータを部分的に各々独立
に変位可能ならしめるように複数対の分割外部電極に分
割され，該複数対の分割外部電極のうち一対の分割外部
電極には前記圧電アクチュエータの主変位を得るように
電圧が印加され，前記複数対の分割外部電極のうち残り
の分割外部電極には前記主変位のヒステリシスを補正す
るように電圧が印加されることを特徴とする積層型圧電
アクチュエータ。1. In a stacked piezoelectric actuator in which a plurality of internal electrode layers in a piezoelectric body are connected to a pair of external electrodes such that mutually adjacent internal electrodes form opposing electrodes, the pair of external electrodes are connected to the piezoelectric actuator. It is divided into a plurality of pairs of divided external electrodes so that each part can be displaced independently, and a voltage is applied to one pair of the divided external electrodes among the plurality of pairs of divided external electrodes so as to obtain the main displacement of the piezoelectric actuator. and a voltage is applied to the remaining divided external electrodes among the plurality of pairs of divided external electrodes so as to correct the hysteresis of the main displacement.
JP62249976A 1987-10-05 1987-10-05 Laminated type piezoelectric actuator Pending JPH0193184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62249976A JPH0193184A (en) 1987-10-05 1987-10-05 Laminated type piezoelectric actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62249976A JPH0193184A (en) 1987-10-05 1987-10-05 Laminated type piezoelectric actuator

Publications (1)

Publication Number Publication Date
JPH0193184A true JPH0193184A (en) 1989-04-12

Family

ID=17200987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62249976A Pending JPH0193184A (en) 1987-10-05 1987-10-05 Laminated type piezoelectric actuator

Country Status (1)

Country Link
JP (1) JPH0193184A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7999438B2 (en) 2008-01-16 2011-08-16 Advantest Corporation Piezoelectric-drive apparatus, method of controlling piezoelectric-drive and electronic device
WO2012084957A1 (en) * 2010-12-22 2012-06-28 Epcos Ag Actuator, actuator system, and control of an actuator
US9425378B2 (en) 2010-12-22 2016-08-23 Epcos Ag Actuator, actuator system and actuation of an actuator
US10416572B2 (en) 2016-08-04 2019-09-17 Asml Netherlands B.V. Positioning system, method to position, lithographic apparatus and device manufacturing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62154679A (en) * 1985-12-26 1987-07-09 Matsushita Electric Ind Co Ltd Laminated piezoelectric displacement element
JPS62165380A (en) * 1986-01-14 1987-07-21 Nec Corp Laminated piezoelectric device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62154679A (en) * 1985-12-26 1987-07-09 Matsushita Electric Ind Co Ltd Laminated piezoelectric displacement element
JPS62165380A (en) * 1986-01-14 1987-07-21 Nec Corp Laminated piezoelectric device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7999438B2 (en) 2008-01-16 2011-08-16 Advantest Corporation Piezoelectric-drive apparatus, method of controlling piezoelectric-drive and electronic device
WO2012084957A1 (en) * 2010-12-22 2012-06-28 Epcos Ag Actuator, actuator system, and control of an actuator
US9419199B2 (en) 2010-12-22 2016-08-16 Epcos Ag Actuator, actuator system, and control of an actuator
US9425378B2 (en) 2010-12-22 2016-08-23 Epcos Ag Actuator, actuator system and actuation of an actuator
US10416572B2 (en) 2016-08-04 2019-09-17 Asml Netherlands B.V. Positioning system, method to position, lithographic apparatus and device manufacturing method

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