JPH0193184A - Laminated type piezoelectric actuator - Google Patents
Laminated type piezoelectric actuatorInfo
- Publication number
- JPH0193184A JPH0193184A JP62249976A JP24997687A JPH0193184A JP H0193184 A JPH0193184 A JP H0193184A JP 62249976 A JP62249976 A JP 62249976A JP 24997687 A JP24997687 A JP 24997687A JP H0193184 A JPH0193184 A JP H0193184A
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- voltage
- piezoelectric actuator
- hysteresis
- external electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 70
- 238000000034 method Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
Landscapes
- Control Of Position Or Direction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は圧電縦効果を利用し、電気的入力エネルギーを
変位や力の機械エネルギーに変換する積層型圧電アクチ
エータタに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laminated piezoelectric actuator that utilizes the piezoelectric longitudinal effect to convert electrical input energy into mechanical energy in the form of displacement or force.
圧電アクチュエータは、電磁式アクチュエータの代替を
始めとして、広い分野でアクチュエータとしての応用が
進められている。電磁式アクチュエータが電流駆動であ
るのに対して、圧電アクチュエータは電圧駆動で有シ1
本質的に消費電力は圧電アクチュエータの方が少ない。Piezoelectric actuators are being applied as actuators in a wide range of fields, including replacing electromagnetic actuators. While electromagnetic actuators are current-driven, piezoelectric actuators are voltage-driven.
Piezoelectric actuators inherently consume less power.
また、応答性が優れている1等の長所がある。It also has the advantage of being excellent in response.
積層屋圧電アクチュエータは、一対の外部電極を有し、
各外部電極には複数の内部電極が接続されている。この
積層型圧電アクチュエータは前記一対の外部電極を入力
端子として、入力電圧に応じた変位量や力を発生するの
が一般的である。The laminated piezoelectric actuator has a pair of external electrodes,
A plurality of internal electrodes are connected to each external electrode. This laminated piezoelectric actuator generally uses the pair of external electrodes as input terminals to generate a displacement amount or force according to an input voltage.
この場合、圧電アクチュエータの電圧−変位特性は、印
加電圧を、OVからある電圧まで増加させた時の変位の
軌跡と、前記ある電圧からOvまで降下させた時の変位
の軌跡では一致せず、ヒステリシス特性を有するのが一
般的である。In this case, the voltage-displacement characteristics of the piezoelectric actuator do not match the locus of displacement when the applied voltage is increased from OV to a certain voltage and the locus of displacement when it is lowered from the certain voltage to Ov, Generally, it has hysteresis characteristics.
圧電アクチュエータを微小位置決め装置等に応用する場
合、このヒステリシス特性を考慮しなければならず、応
用上制約があった。When applying a piezoelectric actuator to a micro-positioning device, etc., this hysteresis characteristic must be taken into consideration, which imposes restrictions on the application.
本発明の目的は、ヒステリシス特性を考慮する必要のな
い積層屋圧電アクチュエータを提供することにある。An object of the present invention is to provide a laminated piezoelectric actuator that does not require consideration of hysteresis characteristics.
本発明の別の目的は、1つのアクチュエータ系において
、独立して少なくとも2つの変位部分を有し、アクチュ
エータ本来の変位を発生させる主変位部と、その主変位
部の変位に微小変位だけ加算されるが又は減算される電
圧が印加されるヒステリシス補正用変位部とからなる構
造を有し、1つのアクチュエータ系としてヒステリシス
を少なくした積層型圧電アクチュエータを提供する事に
′ ある。Another object of the present invention is to have at least two independent displacement parts in one actuator system, including a main displacement part that generates the original displacement of the actuator, and a small displacement part that is added to the displacement of the main displacement part. The object of the present invention is to provide a laminated piezoelectric actuator which has a structure including a hysteresis correction displacement part to which a voltage that is applied or subtracted from the piezoelectric actuator is applied, and which reduces hysteresis as one actuator system.
本発明によれば、圧電体中の複数の内部電極層エータに
おいて、前記一対の外部電極が、前記圧電アクチュエー
タを部分的に各々独立に変位可能ならしめるように複数
対の分割外部電極に分割され、該複数対の分割外部電極
のうち一対の分割外部電極には前記圧電アクチュエータ
の主変位を得るように電圧が印加され、前記複数対の分
割外部電極のうち残りの分割外部電極には前記主変位の
゛ヒステリシスを補正するように電圧が印加されること
を特徴とする積層型圧電アクチュエータが得られる。According to the present invention, in the plurality of internal electrode layers in the piezoelectric body, the pair of external electrodes is divided into a plurality of pairs of divided external electrodes so that the piezoelectric actuator can be partially displaced independently. A voltage is applied to one pair of the plurality of pairs of divided external electrodes so as to obtain the main displacement of the piezoelectric actuator, and a voltage is applied to the remaining divided external electrodes among the plurality of pairs of divided external electrodes to obtain the main displacement of the piezoelectric actuator. A laminated piezoelectric actuator is obtained, which is characterized in that a voltage is applied to correct displacement hysteresis.
次に本発明の実施例について図面を参照して説明する。 Next, embodiments of the present invention will be described with reference to the drawings.
第1図を参照すると1本発明の一実施例による積層型圧
電アクチュエータは、圧電セラミックス3中に埋め込ま
れた複数の内部電極2が、互に隣接する内部電極が対向
電極をなすように、一対の外部電極6に接続されたもの
である。1は絶縁層である。前記一対の外部電極6は、
前記圧電アクチュエータを部分的に各々独立に変位可能
ならしめるように二対の分割外部電極4及び4′に分割
されている。該二対の分割外部電極4及び4′のうち一
対の分割外部電極4には前記圧電アクチュエータの主変
位を得るように電源5によって電圧が印加されている。Referring to FIG. 1, a laminated piezoelectric actuator according to an embodiment of the present invention has a plurality of internal electrodes 2 embedded in a piezoelectric ceramic 3 arranged in pairs such that adjacent internal electrodes form opposing electrodes. It is connected to the external electrode 6 of. 1 is an insulating layer. The pair of external electrodes 6 are
The piezoelectric actuator is divided into two pairs of divided external electrodes 4 and 4' so that the piezoelectric actuator can be partially displaced independently. A voltage is applied to one pair of the two pairs of divided external electrodes 4 and 4' by a power source 5 so as to obtain the main displacement of the piezoelectric actuator.
残シの分割外部電極4′には前記主変位のヒステリシス
を補正するようにもう一つの電源5′によって電圧が印
加されている。A voltage is applied to the remaining divided external electrodes 4' by another power source 5' so as to correct the hysteresis of the main displacement.
よシ具体的には、この積層屋圧電アクチュエータは、上
面や底面に平行な方向の断面が5■X5mで、高さは2
4■である。また、この積層型圧電アクチュエータは、
一対の分割外部電極4で挾まれ、115μm間隔で内部
電極2が14444層積れた主変位部lOと、残シの分
割外部電極で挾まれ、36層積層されたヒステリシス補
正用変位部ノ
10とが一体となって焼結されている。Specifically, this laminated roof piezoelectric actuator has a cross section of 5 x 5 m in the direction parallel to the top and bottom surfaces, and a height of 2.
It is 4■. In addition, this laminated piezoelectric actuator is
The main displacement part 10 is sandwiched between a pair of divided external electrodes 4 and has 14,444 layers of internal electrodes 2 stacked at 115 μm intervals, and the hysteresis correction displacement part 10 is sandwiched by the remaining divided external electrodes and has 36 stacked layers. are sintered together.
第2図を参照すると−P、。及びP、。′は、それぞれ
、主変位部10とヒステリシス補正変位部10′に印加
する電圧ノ4ターンを示している。Referring to FIG. 2, -P. and P. ' indicates four turns of the voltage applied to the main displacement section 10 and the hysteresis correction displacement section 10', respectively.
第3図は主変位部10の電圧−変位特性を示す。FIG. 3 shows the voltage-displacement characteristics of the main displacement section 10.
第4図はヒステリシス補正用変位部10′の電圧−変位
特性を示す。FIG. 4 shows the voltage-displacement characteristics of the hysteresis correction displacement section 10'.
第2図から第6図を用いて以下に説明する。各図中、A
−Fは対応して記号を符している。This will be explained below using FIGS. 2 to 6. In each figure, A
-F is marked with a corresponding symbol.
主変位部10に第2図中P、。に示すごとく電圧印加す
ると、変位は第3図に示すごとく原点→A→Bと立上っ
た後B418→COD→Bのくシ返しとなりヒステリシ
スを描く。P in FIG. 2 to the main displacement part 10. When a voltage is applied as shown in FIG. 3, the displacement rises from the origin to A to B and then repeats from B418 to COD to B, thus drawing hysteresis.
点線CBがヒステリシスのない理想的な変位軌跡とする
とヒステリシス補正用変位部10′は、第2図中、P、
。′に示すごとく電圧を印加すると、第4図に示すごと
く変位する。即ち、主変位部10がC404Bと変位す
るときは、ヒステリシス補正用変位部10′はC・→D
4Bの変位軌跡と点線CBとの変位の差分だけ加算され
るように変位する。Assuming that the dotted line CB is an ideal displacement locus without hysteresis, the hysteresis correction displacement section 10' is defined as P,
. When a voltage is applied as shown in ', the displacement occurs as shown in FIG. That is, when the main displacement section 10 is displaced to C404B, the hysteresis correction displacement section 10' is displaced from C.→D.
The displacement is performed so that the difference in displacement between the displacement locus of 4B and the dotted line CB is added.
逆に、主変位部10がB−→E→Cと変位するときは、
ヒステリシス補正用変位部10′は、BEE→Cの変位
軌跡と占線CBとの変位の差分だけ減算されるようにマ
イナスの変位をする。Conversely, when the main displacement part 10 is displaced from B-→E→C,
The hysteresis correction displacement unit 10' performs a negative displacement so that the difference in displacement between the BEE→C displacement locus and the occupancy line CB is subtracted.
この結果、第5図に示すごとく、第5図(C)に示した
主変位部10の変位と、第5図(b)に示したヒステリ
シス補正用変位部10’の変位が合成され。As a result, as shown in FIG. 5, the displacement of the main displacement section 10 shown in FIG. 5(C) and the displacement of the hysteresis correction displacement section 10' shown in FIG. 5(b) are combined.
第5図(a)に示した変位が1つのアクチュエータ系の
変位となり、第6図に示す如くヒステリシスの係として
表わし、従来型のヒステリシスと比較したものを第1表
に示す。The displacement shown in FIG. 5(a) is the displacement of one actuator system, and is expressed as a function of hysteresis as shown in FIG. 6. Table 1 shows a comparison with the conventional hysteresis.
第1表に示すごとくヒステリシスを3%と少なくするこ
とが出来たので、精密X−Yテーブル等の縦型的な制御
が可能となる。As shown in Table 1, since the hysteresis could be reduced to 3%, vertical control of precision X-Y tables and the like becomes possible.
以上述べたごとく本発明によれば、圧電アクチユエータ
を部分的に独立に変位可能ならしめるように、一対の外
部電極を複数対の分割外部電極に分割し、アクチュエー
タ本来の変位を発生させる主変位部のほかに、ヒステリ
シスを補正するだめのヒステリシス補正用変位部を設け
たので、ヒステリシスが小さいという利点を持った積層
型圧電アクチュエータの提供が可能となった。As described above, according to the present invention, a pair of external electrodes is divided into a plurality of pairs of divided external electrodes so that the piezoelectric actuator can be partially displaced independently, and the main displacement part generates the original displacement of the actuator. In addition to this, since a hysteresis correction displacement portion is provided to correct hysteresis, it is possible to provide a laminated piezoelectric actuator that has the advantage of small hysteresis.
第1図は本発明の一実施例による積層型圧電アクチュエ
ータを示す図である。
1・・・絶縁層、2・・・内部電極、3・・・圧電セラ
ミックス、4及び4′・・・分割外部電極、5及び5′
・・・電源。
第2図は第1図の積層型圧電アクチュエータの2つの電
源の出力電圧ノ4ターンを示した図である。
第3図は第1図の積層型圧電アクチュエータの主変位部
10の電圧−変位特性を示した図である・第4図は第1
図の積層型圧電アクチュエータのヒステリシス補正用変
位部10’の電圧−変位特性を示した図である。
第5図は第1図の積層型圧電アクチュエータの時間−変
位特性を示した図である。
第6図は第1図の積層型圧電アクチュエータの電圧−変
位特性を示した図である。
第1図
第3図
電圧(■)
第6図
電圧(V)FIG. 1 is a diagram showing a laminated piezoelectric actuator according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Insulating layer, 2... Internal electrode, 3... Piezoelectric ceramics, 4 and 4'... Divided external electrode, 5 and 5'
···power supply. FIG. 2 is a diagram showing four turns of output voltages of two power supplies of the laminated piezoelectric actuator of FIG. 1. FIG. 3 is a diagram showing the voltage-displacement characteristics of the main displacement section 10 of the laminated piezoelectric actuator shown in FIG.
It is a figure which showed the voltage-displacement characteristic of the displacement part 10' for hysteresis correction of the laminated piezoelectric actuator of a figure. FIG. 5 is a diagram showing the time-displacement characteristics of the laminated piezoelectric actuator shown in FIG. 1. FIG. 6 is a diagram showing voltage-displacement characteristics of the laminated piezoelectric actuator shown in FIG. 1. Figure 1 Figure 3 Voltage (■) Figure 6 Voltage (V)
Claims (1)
電極が対向電極をなすように,一対の外部電極に接続さ
れた積層型圧電アクチュエータにおいて,前記一対の外
部電極が,前記圧電アクチュエータを部分的に各々独立
に変位可能ならしめるように複数対の分割外部電極に分
割され,該複数対の分割外部電極のうち一対の分割外部
電極には前記圧電アクチュエータの主変位を得るように
電圧が印加され,前記複数対の分割外部電極のうち残り
の分割外部電極には前記主変位のヒステリシスを補正す
るように電圧が印加されることを特徴とする積層型圧電
アクチュエータ。1. In a stacked piezoelectric actuator in which a plurality of internal electrode layers in a piezoelectric body are connected to a pair of external electrodes such that mutually adjacent internal electrodes form opposing electrodes, the pair of external electrodes are connected to the piezoelectric actuator. It is divided into a plurality of pairs of divided external electrodes so that each part can be displaced independently, and a voltage is applied to one pair of the divided external electrodes among the plurality of pairs of divided external electrodes so as to obtain the main displacement of the piezoelectric actuator. and a voltage is applied to the remaining divided external electrodes among the plurality of pairs of divided external electrodes so as to correct the hysteresis of the main displacement.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62249976A JPH0193184A (en) | 1987-10-05 | 1987-10-05 | Laminated type piezoelectric actuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62249976A JPH0193184A (en) | 1987-10-05 | 1987-10-05 | Laminated type piezoelectric actuator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0193184A true JPH0193184A (en) | 1989-04-12 |
Family
ID=17200987
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62249976A Pending JPH0193184A (en) | 1987-10-05 | 1987-10-05 | Laminated type piezoelectric actuator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0193184A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7999438B2 (en) | 2008-01-16 | 2011-08-16 | Advantest Corporation | Piezoelectric-drive apparatus, method of controlling piezoelectric-drive and electronic device |
WO2012084957A1 (en) * | 2010-12-22 | 2012-06-28 | Epcos Ag | Actuator, actuator system, and control of an actuator |
US9425378B2 (en) | 2010-12-22 | 2016-08-23 | Epcos Ag | Actuator, actuator system and actuation of an actuator |
US10416572B2 (en) | 2016-08-04 | 2019-09-17 | Asml Netherlands B.V. | Positioning system, method to position, lithographic apparatus and device manufacturing method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62154679A (en) * | 1985-12-26 | 1987-07-09 | Matsushita Electric Ind Co Ltd | Laminated piezoelectric displacement element |
JPS62165380A (en) * | 1986-01-14 | 1987-07-21 | Nec Corp | Laminated piezoelectric device |
-
1987
- 1987-10-05 JP JP62249976A patent/JPH0193184A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62154679A (en) * | 1985-12-26 | 1987-07-09 | Matsushita Electric Ind Co Ltd | Laminated piezoelectric displacement element |
JPS62165380A (en) * | 1986-01-14 | 1987-07-21 | Nec Corp | Laminated piezoelectric device |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7999438B2 (en) | 2008-01-16 | 2011-08-16 | Advantest Corporation | Piezoelectric-drive apparatus, method of controlling piezoelectric-drive and electronic device |
WO2012084957A1 (en) * | 2010-12-22 | 2012-06-28 | Epcos Ag | Actuator, actuator system, and control of an actuator |
US9419199B2 (en) | 2010-12-22 | 2016-08-16 | Epcos Ag | Actuator, actuator system, and control of an actuator |
US9425378B2 (en) | 2010-12-22 | 2016-08-23 | Epcos Ag | Actuator, actuator system and actuation of an actuator |
US10416572B2 (en) | 2016-08-04 | 2019-09-17 | Asml Netherlands B.V. | Positioning system, method to position, lithographic apparatus and device manufacturing method |
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