EP2629050B2 - Capteur de triangulation - Google Patents

Capteur de triangulation Download PDF

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Publication number
EP2629050B2
EP2629050B2 EP12001008.7A EP12001008A EP2629050B2 EP 2629050 B2 EP2629050 B2 EP 2629050B2 EP 12001008 A EP12001008 A EP 12001008A EP 2629050 B2 EP2629050 B2 EP 2629050B2
Authority
EP
European Patent Office
Prior art keywords
light
triangulation
receiver
lens
segments
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP12001008.7A
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German (de)
English (en)
Other versions
EP2629050B1 (fr
EP2629050A1 (fr
Inventor
Friedhelm Wiethege
Gerhard Merettig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sick AG
Original Assignee
Sick AG
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Publication date
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Application filed by Sick AG filed Critical Sick AG
Priority to EP12001008.7A priority Critical patent/EP2629050B2/fr
Priority to US13/768,618 priority patent/US8958056B2/en
Publication of EP2629050A1 publication Critical patent/EP2629050A1/fr
Publication of EP2629050B1 publication Critical patent/EP2629050B1/fr
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G01C3/02—Details
    • G01C3/06—Use of electric means to obtain final indication
    • G01C3/08—Use of electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4816—Constructional features, e.g. arrangements of optical elements of receivers alone

Definitions

  • the invention relates to a Triangulationslichttaster with at least one light emitter for emitting a light signal in a detection zone, a light receiver having a plurality of receiver elements for receiving diffuse and / or specularly reflected light from the detection zone, and a receiving optical system, which is arranged in the beam path in front of the light receiver is, wherein the position of a light spot generated by the reflected light on the light receiver results in a triangulation direction in dependence on the distance of the object.
  • Such a light sensor such as in DE 198 50 270 A1 includes a light emitter, such as a light emitting diode or a laser, and optionally a transmitting optics to emit a light beam in a detection zone to an optionally located there to be detected object.
  • the transmitted light can be reflected by such an object and detected by a light receiver, which forms a receiving unit together with a receiving optics.
  • the light receiver consists in known solutions of a row of photosensitive receiver elements.
  • the position of a light spot generated by the reflected light on the light receiver changes in the so-called triangulation direction.
  • the distance between the object and the light sensor can thus be determined.
  • such a light receiver must have a plurality of photosensitive receiver elements which are arranged side by side in the triangulation direction.
  • the light receiver comprises at least two receiver elements, a so-called near element being struck by a light beam when reflected by an object located in a near zone in front of the triangulation light switch, and a remote element being hit by a light beam is reflected by an object located in a distant area in front of the triangulation light sensor.
  • the difference between the photodiode currents of these two elements is formed.
  • the receiver element, the receiving optics or a mirror moves mechanically and center of gravity of the light spot imaged by the light receiver centered on the physically existing divider between near and far element.
  • the light spot is e.g. imaged on a multi-segmented light receiver.
  • a triangulation light sensor with background or Vor groundausblendung simulate such systems a differential diode with electronically adjustable divider.
  • When using light receivers with multiple receiver elements of the divider is to be adjusted in this way electronically only in discrete stages and can only be on the physically existing dividers between the individual receiver elements.
  • the light receiver To adjust the boundary between foreground and background, the light receiver must be divided into sufficiently small receiver elements. This also requires the use of high resolution and long photodiode arrays with a large number of receiver elements.
  • the European patent application EP 1 111 332 B1 describes a method by which the determination of the position of the center of gravity of a light spot on a line of photodiodes can be determined with an accuracy that is no longer dependent on the spatial dimensions of the individual photodiode cells, ie the receiver elements.
  • the size of the photodiode cells is selected such that a light spot strikes at least three adjacent photodiode cells and the position of the center of gravity is determined by suitable evaluation of the signals.
  • this three-element criterion for given geometry of the receiver element array may no longer be met.
  • an enlargement of the light spot may be achieved.
  • One way to increase the size of the light spot is to place the light receiver outside the focus of the receiving optics. In this case, infrafocal or extrafocal arrangements are conceivable.
  • toric receiving optics are used in other known solutions which have different focal lengths in the sagittal and meridional planes.
  • an image takes place in the sagittal and meridional planes with different magnifications, so that the planes of sharpness of the sagittal and meridional planes lie one behind the other.
  • a light receiver is brought into the focal plane of the shorter focal length, it lies in the triangulation direction infrafokal outside the focal plane.
  • the image in the triangulation direction is blurred and thus widened.
  • the light spot on the light receiver but in the relevant Triangulationsraum considerable blurring, so that the detection precision is deteriorated here.
  • the receiving optics of the triangulation light scanner comprises at least one multiply segmented lens element which consists of a plurality of lens segments with spaced-apart optical axes in the triangulation direction.
  • the aspect ratio of the length to width of the light spot on the light receiver, as well as the homogeneity or the irradiation curve in Triangulationsraum can be determined by the number of segments, the segment width and the distance of the optical axes of the individual segments to each other as required. For a given aspect ratio, the higher the number of segments, the greater the homogeneity.
  • An essential advantage of a triangulation light scanner with such a receiving optical system is that when the nominal distance between the receiving optical system and the light receiver is present, each of the resulting individual images can be sharply imaged on the light receiver.
  • the uniformity can be adapted over a wide range.
  • the fulfillment of the above-described three-element criterion and an optimal ratio of light spot to receiver element size can be achieved, whereby a high detection sensitivity can be ensured.
  • the individual lens segments additionally have different focal lengths which are adapted to the geometry and the requirements of the particular application, that is, if e.g. the space requirement is low.
  • the individual lens segments prefferably have free-form surfaces as surfaces which are used to set the desired geometry and uniformity of the imaged light spot.
  • Another embodiment of the invention provides the use of a receiving optical system comprising at least one free-form lens element having at least one free-form surface which is shaped such that the free-form lens element corresponds to a multi-segmented lens element, which in the triangulation from several lens segments with spaced apart optical axes.
  • a free-form lens element simulates the above-described lens segment-split lens element of the first embodiment, so that the same effects as the multi-segment lens element described above can be achieved.
  • the receiving optical system has at least one diffractive-optical element which is designed such that its optical deflection properties correspond to a multi-segmented lens element which consists of a plurality of lens segments with spaced-apart optical axes in the triangulation direction.
  • the appropriately designed diffractive optical element assumes the function of the multi-segmented lens element.
  • Such a diffractive optical element is easy to manufacture and is very easy to use and adjust.
  • Both in embodiments with a lens element having a freeform surface configured as described above, as well as with a designed as described diffractive optical element can be simulated as lens segments, for example, which have different focal lengths in addition to the offset of their optical axes.
  • Fig. 1 shows a Triangulationstaster 10.
  • a light source 12 for example a laser diode
  • light 24 is sent through a transmitting optical system 16 in the direction of a detection zone, which is indicated by the arrow 22.
  • the light 24 strikes an object 20 in the detection zone 22 and is reflected back by this object to the triangulation light scanner 10.
  • the light receiver 14 the light beam 26 shows the light path of a light beam, which is reflected at an object 20, which is located in the position A
  • the light beam 28 shows the beam path of a light beam from a Object 20 is reflected, which is in the position B
  • the light beam 30 shows the beam path of the light beam, which is reflected by an object 20, which is located in the position C.
  • This light receiver 14 consists of a number of photodiode elements which are arranged side by side in the triangulation direction 46.
  • the signal of this photodiode array is - as shown schematically here - evaluated by an evaluation unit 32, which can shoot back to the position of the object 20 from the position of the center of gravity of the light spot formed on the light receiver 14.
  • the components of the triangulation probe can be arranged in a housing 11, the receiving optics 18 representing an aperture. There is a unique geometric relationship between the position of the center of gravity of the light spot on the light receiver 14 and the position of the object 20.
  • the individual receiver elements of the light receiver 14 have a different extension in Triangulationsraum 46 to account for the fact that with smaller distance between the object 20 and the Triangulationslichttaster 10, the change in position of the light spot on the light receiver 14 with displacement of Object 20 is greater by a certain absolute value than the change in the position of the light spot on the light receiver 14 at the same absolute displacement when the object 20 is located at a greater distance from the triangulation light 10.
  • the evaluation unit 32 determines the distance of the object 20 from the triangulation light scanner 10 from the position of the center of gravity of the light spot in the triangulation direction 46.
  • the receiving optics 18 is shown enlarged, with the triangulation 46 is in the image plane.
  • the receiving optics here comprise a segmented lens element 18 having a plurality of segments 180, 182, 184, 186, 188, 190 and 192.
  • this segmented lens element 18 can be imagined so that an originally integral lens is divided into segments, which are shifted so that they have different optical axes.
  • the lens element 180 has the optical axis 60, the lens element 182 the optical axis 62, the lens element 184 the optical axis 64, the lens element 186 the optical axis 66, the lens element 188 the optical axis 68, the lens element 190 the optical axis 70 and the lens element 192, the optical axis 72nd
  • a non-segmented lens element 19 is shown, wherein here ray paths are drawn, as they are present when the object 20 and the light receiver 14 are respectively in the focal plane.
  • the optical axis is also designated by reference numeral 60 here.
  • each of the resulting individual images is sharply displayed on the light receiver.
  • the uniformity can be adapted over a wide range.
  • the above-described three-element criterion and an optimal ratio of light spot to receiver element size can be achieved by a corresponding number of segments.
  • Fig. 4 shows the top view of a light receiver 14 in this application.
  • the receiver elements m + 1, m + 2, m + 3 are struck by light spots which are reflected by an object 20 positioned at a greater distance from the triangulation light scanner 10 in the detection zone 22, while the receiver elements m-1, m- 2 are hit by light spots when the object 20 is closer to the Triangulationslichttaster 10.
  • FIG. 4 the figure extends through the in Fig. 2 shown receiving optical system 18 resulting light spot 40 here via three receiver elements m + 1, m and m-1. Dashed and only by way of example, the light spots are shown here, as they result from the optical imaging by a respective segment of the receiving optical system 18. These individual light spots add up to the total light spot 40.
  • a light spot 40 is formed which has an extension 42 in the triangulation direction 46 and an extension 44 transverse to the triangulation direction 46.
  • the described embodiment is a very simple and easy to implement possibility, in which case the focal lengths of the individual lens segments are the same.
  • Other embodiments contemplate that the focal lengths of the individual lens elements differ in addition to their different optical axis, so that an adjustment e.g. at a limited space requirement the triangulation light sensor can be realized more easily.
  • the individual lens segments have free-form surfaces that allow corresponding imaging geometries resulting from the circumstances and the space required.
  • the receiving optical system 18 is formed by a free-form lens element, which is shaped so that it simulates the segmented lens element 18, which in Fig. 2 is shown.
  • Such a free-form element has the advantage that less manufacturing limits for any increase in the number of segments must be adhered to.
  • a segmented lens element is possible in which the individual segments can in turn be formed as free-form surfaces or any combinations of free-form segments with spherical or aspherical segments.
  • the function of the multi-segmented lens element is taken over by a correspondingly designed diffractive-optical element.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Claims (3)

  1. Palpeur de lumière à triangulation (10) comprenant
    - au moins un émetteur de lumière (12) pour émettre un signal lumineux (24) dans une zone de détection (22),
    - un récepteur de lumière (14), qui comprend plusieurs éléments récepteurs (m-2, m-1, m, m+1, m+2), pour recevoir de la lumière (26, 28, 30) provenant de la zone de détection (22), qui est réfléchie de manière diffuse et/ou à la manière d'un miroir par un objet (20) à détecter, et
    - une optique de réception (18) qui est agencée dans le trajet des rayons entre la zone de détection et le récepteur de lumière (14),
    dans lequel la position d'une tache lumineuse (40) engendrée sur le récepteur de lumière (14) par la lumière réfléchie (26, 28, 30) dans une direction de triangulation (46) résulte en fonction de l'éloignement de l'objet (20),
    dans lequel l'optique de réception comprend au moins un élément de lentille (18) segmenté de manière multiple, qui est composé de plusieurs segments de lentilles (180, 182, 184, 186, 188, 190, 192) avec des axes optiques (60, 62, 64, 66, 68, 70, 72) écartés les uns des autres en direction de triangulation (46), et dans lequel la tache lumineuse (40) engendrée sur le récepteur de lumière (14) est formée de plusieurs images individuelles qui se chevauchent en direction de triangulation (46), telles que chaque image individuelle est engendrée au moyen de l'un des segments de lentilles (180, 182, 184, 186, 188, 190, 192),
    caractérisé en ce que
    l'élément de lentille (18) segmenté de manière multiple correspond à un agencement qui est engendré par une subdivision d'une lentille initialement intégrale pour donner les plusieurs segments de lentilles (180, 182, 184, 186, 188, 190, 192) et par un décalage des plusieurs segments de lentilles (180, 182, 184, 186, 188, 190, 192) en direction de triangulation de telle façon que les plusieurs segments de lentilles (180, 182, 184, 186, 188, 190, 192) sont écartés les uns des autres en correspondance de la distance de leurs axes optiques (60, 62, 64, 66, 68, 70, 72) les uns des autres.
  2. Palpeur de lumière à triangulation selon la revendication 1, caractérisé en ce que les plusieurs segments de lentilles ont additionnellement des distances focales différentes.
  3. Palpeur de lumière à triangulation selon l'une des revendications 1 ou 2, caractérisé en ce que les segments de lentilles (180, 182, 184, 186, 188, 190, 192) sont agencés et conçus de manière que la tache lumineuse engendrée par l'optique de réception (18) sur le récepteur de lumière (14) est allongée en direction de triangulation (46), de préférence de telle manière qu'elle tombe sur au moins trois éléments récepteurs (m-1, m, m+1).
EP12001008.7A 2012-02-16 2012-02-16 Capteur de triangulation Active EP2629050B2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP12001008.7A EP2629050B2 (fr) 2012-02-16 2012-02-16 Capteur de triangulation
US13/768,618 US8958056B2 (en) 2012-02-16 2013-02-15 Triangulation light sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP12001008.7A EP2629050B2 (fr) 2012-02-16 2012-02-16 Capteur de triangulation

Publications (3)

Publication Number Publication Date
EP2629050A1 EP2629050A1 (fr) 2013-08-21
EP2629050B1 EP2629050B1 (fr) 2013-09-25
EP2629050B2 true EP2629050B2 (fr) 2017-02-15

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EP (1) EP2629050B2 (fr)

Families Citing this family (14)

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Publication number Priority date Publication date Assignee Title
DE102013205801B4 (de) * 2013-04-02 2016-11-10 Sick Ag Triangulationslichttaster
EP3588061B1 (fr) 2014-12-23 2023-04-19 Apple Inc. Système et procédé d'inspection optique comprenant la prise en compte des variations de la longueur du trajet optique dans un échantillon
ES2654805T3 (es) * 2015-08-14 2018-02-15 Sick Ag Sensor óptico
KR102615932B1 (ko) 2015-09-01 2023-12-21 애플 인크. 물질의 비접촉 감지를 위한 레퍼런스 스위치 아키텍처
DE102015119668B3 (de) * 2015-11-13 2017-03-09 Sick Ag Optoelektronischer Sensor und Verfahren zur Erfassung eines Objekts
CN114719977A (zh) 2016-04-21 2022-07-08 苹果公司 用于参考切换的光学系统
GB2550443B (en) * 2016-05-16 2022-05-25 Zumtobel Lighting Inc Multi channel light sensor
DE102016114432A1 (de) * 2016-08-04 2018-02-08 Sick Ag Optoelektronischer Sensor und Verfahren zur Erfassung eines Objekts
US11579080B2 (en) 2017-09-29 2023-02-14 Apple Inc. Resolve path optical sampling architectures
DE102018102402A1 (de) * 2018-02-02 2019-08-08 Sick Ag Triangulationslichttaster
WO2019160949A1 (fr) 2018-02-13 2019-08-22 Masseta Technologies Llc Dispositif à photonique intégrée ayant des coupleurs de sortie de bord intégrés
WO2020069822A1 (fr) * 2018-10-02 2020-04-09 Asml Netherlands B.V. Appareil de triangulation laser et procédé d'étalonnage
WO2022056142A1 (fr) 2020-09-09 2022-03-17 Apple Inc. Système optique d'atténuation de bruit
WO2023015562A1 (fr) * 2021-08-13 2023-02-16 华为技术有限公司 Lidar et dispositif terminal

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Also Published As

Publication number Publication date
EP2629050B1 (fr) 2013-09-25
US8958056B2 (en) 2015-02-17
EP2629050A1 (fr) 2013-08-21
US20130215409A1 (en) 2013-08-22

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