EP2615439A1 - Magnetoelastischer Kraftsensor und Verfahren zum Kompensieren einer Abstandsabhängigkeit in einem Messsignal eines derartigen Sensors - Google Patents

Magnetoelastischer Kraftsensor und Verfahren zum Kompensieren einer Abstandsabhängigkeit in einem Messsignal eines derartigen Sensors Download PDF

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Publication number
EP2615439A1
EP2615439A1 EP12151083.8A EP12151083A EP2615439A1 EP 2615439 A1 EP2615439 A1 EP 2615439A1 EP 12151083 A EP12151083 A EP 12151083A EP 2615439 A1 EP2615439 A1 EP 2615439A1
Authority
EP
European Patent Office
Prior art keywords
distance
sensor
transmitting coil
magnetic field
force sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12151083.8A
Other languages
German (de)
English (en)
French (fr)
Inventor
Hans-Gerd Brummel
Uwe Linnert
Carl Udo Maier
Jochen Ostermaier
Uwe Pfeifer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to EP12151083.8A priority Critical patent/EP2615439A1/de
Priority to US14/370,563 priority patent/US9645022B2/en
Priority to EP12791125.3A priority patent/EP2769192B1/de
Priority to KR1020147019100A priority patent/KR102027607B1/ko
Priority to PCT/EP2012/071978 priority patent/WO2013104447A1/de
Publication of EP2615439A1 publication Critical patent/EP2615439A1/de
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
    • G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
    • G01L3/101—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means
    • G01L3/105—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means involving inductive means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
    • G01L1/125—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using magnetostrictive means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
    • G01L1/127—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using inductive means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/58—Wireless transmission of information between a sensor or probe and a control or evaluation unit

Definitions

  • the present invention relates to a magnetoelastic force sensor, which can be used in particular in a magnetoelastic torsional or torque sensor.
  • the invention relates to a method for compensating a distance dependence in a measurement signal of a magnetoelastic force sensor, which can be used in particular in the context of a method for determining a torsion or a torque using a magnetoelastic force sensor.
  • the permeability of ferromagnetic materials is influenced by mechanical stresses.
  • This physical effect known as a magnetoelastic effect
  • the article is provided with a ferromagnetic layer, provided that the object does not itself consist of a ferromagnetic material or includes a ferromagnetic layer.
  • Magnetoelastic force sensors can then measure the stresses caused by an applied force by means of the magnetoelastic effect, whereby the force causing the stresses can be determined from the measurement result.
  • Magnetoelastic force sensors based on the magnetoelastic effect can be used i.a. be used for measuring torques in a rotating object, as a torque generates stresses in the rotating object.
  • the magnetoelastic sensors are characterized by high accuracy, with a Recalibration is just as little required as the approach of reference marks.
  • a magnetoelastic torque sensor used to measure the torque of drive shafts is off DE 10 2009 008 074 A1 known.
  • This document describes a measuring arrangement for detecting the torque of a shaft which comprises a torque sensor positioned at a predetermined gap distance from the surface of the shaft.
  • an electromagnetic coil is arranged without contact at a small distance from the surface of the shaft, which reacts to the change of the permeability in a ferromagnetic layer on the shaft or a per se ferromagnetic wave with a signal change.
  • the shaft must be subjected to torsional stresses, i. the magnetoelastic torque sensor must be disposed along the shaft between a driving torque and the reaction torque acting thereon. The wave formed from the ferromagnetic material is thereby part of the measuring device.
  • a first object of the present invention to provide an advantageous magnetoelastic force sensor.
  • a second object of the invention is to provide an advantageous torque sensor.
  • a third object is to provide a method for compensating a distance dependence in a measurement signal of a magnetoelastic force sensor.
  • a fourth object of the invention to provide an advantageous method for determining a torque by means of a magnetoelastic force sensor.
  • the third object is achieved by a method for compensating a distance dependence in a measurement signal of a magnetoelastic force sensor according to claim 7 and the fourth object by a A method for determining a torque according to claim 10.
  • the dependent claims contain advantageous embodiments of the invention.
  • a magnetoelastic force sensor comprises a sensor head with a transmission coil generating a magnetic field and at least one magnetic field sensor for measuring a magnetic flux caused by the magnetic field of the transmission coil in a measurement object.
  • the magnetoelastic force sensor comprises a detection device for detecting a the inductance of the transmitting coil reproducing or with this uniquely associated electrical quantity, for example the amplitude of the coil voltage.
  • the detection device can be configured analog or digital.
  • the detection of the inductance of the transmitting coil reproducing or clearly associated with this electrical variable using the detection device allows determining the distance of the transmitting coil - and thus the sensor head - of the measuring object, without an additional distance sensor needs to be present.
  • the inventive design of the magnetoelastic force sensor makes it possible to use the magnetoelastic force sensor itself as a distance sensor.
  • the unit of the force sensor with the distance sensor can avoid sources of error that can occur during the installation of an additional distance sensor, such as angle errors, which can be caused by an unequal adjustment of the two sensors.
  • the magnetoelastic force sensor also comprises a device for determining the distance of this sensor head from the measured object from the electrical variable .
  • the magnetoelastic force sensor can then also be used as a pure distance sensor.
  • the device for determining the distance of the sensor head from the measurement object may in particular comprise a memory with a stored relationship in which the values of the electrical output of the transmission coil that reflect the inductance of the transmission coil or are uniquely associated with it are those for the distance between the transmitter coil or the sensor head are related by the measurement object.
  • the memory may, for example, contain a look-up table representing a relationship or a functional relationship in the form of an equation.
  • the device for determination comprises the distance of the sensor head from the measurement object in this embodiment, an allocation unit which is directly or indirectly in communication both with the detection device and with the memory. Based on the stored relationship, the allocation unit assigns a distance of the transmission coil or of the sensor head from the measured object to the detected electrical quantity and generates a distance variable representing the assigned distance.
  • the latter additionally comprises a correction unit, which is connected directly or indirectly to the at least one magnetic field sensor and to receive the distance variable with the allocation unit. Based on the received distance size corrects the correction unit.
  • the measurement results of the at least one magnetic field sensor when measuring a caused by the magnetic field of the transmitting coil in the measurement object magnetic flux.
  • a torque sensor according to the invention is equipped with at least one magnetoelastic force sensor according to the invention.
  • a method for compensating a distance dependence in a measurement signal of a magnetoelastic force sensor with a magnetic coil generating a magnetic coil and at least one magnetic field sensor for measuring a caused by the magnetic field of the transmitting coil in a measurement object magnetic flux provided.
  • the measurement signal represents the magnetic flux caused in the measurement object.
  • an electrical quantity of the transmitting coil reproducing the inductance of the transmitting coil or clearly associated with this is detected.
  • the detection can be done, for example, analog or digital.
  • the distance of the transmitting coil or of the sensor head, which carries the transmitting coil, from the measured object is then determined from the detected electrical variable. Based on the determined distance then the distance dependence is compensated in the measurement signal.
  • the distance of the transmitting coil or of the sensor head from the measured object can be determined from the detected electrical quantity, in particular by means of a predetermined relationship between values of the electrical coil of the transmitting coil reproducing the inductance of the transmitting coil or unambiguously linked thereto, and values for the distance between the transmitting coil and the sensor head of FIG the measured object on the other hand determined
  • the predetermined relationship may be in the form of a look-up table or algebraic equation.
  • the predetermined relationship between values of the electrical output of the transmitting coil reproducing or unambiguously associated with the inductance of the transmitting coil and the values of the distance between the transmitting coil or the sensor head from the measuring object can be determined, for example, by a calibration measurement. By making a calibration measurement, local peculiarities at the location of the measurement in the given relationship can also be taken into account in the given relationship.
  • the method according to the invention for compensating a distance dependence in the measurement signal of a magnetoelastic force sensor can in particular be part of a method for determining a torque by means of a magnetoelastic force sensor.
  • a magnetoelastic sensor relies on the inverse magnetostrictive effect, that is, the effect that ferromagnetic materials experience a change in magnetic permeability when mechanical stresses occur. Since mechanical stresses are induced by tensile and compressive forces as well as by torsion, the inverse magnetostrictive effect can be used for force and torque measurement and is therefore versatile.
  • Sensor heads for measuring the inverse magnetostrictive effect include a transmit or excitation coil that induces an alternating magnetic field in the ferromagnetic layer.
  • a response signal is generated in the layer whose magnetic flux density depends on the permeability of the layer. This in turn is determined by the mechanical stresses prevailing in the layer.
  • the magnetic flux density of the response signal is measured with a magnetic field sensor, which may be, for example, a receiving coil.
  • the magnetic flux density of the response signal determines the current intensity of the current induced in the receiving coil due to the magnetic flux density passing through it. From the current strength, the mechanical stresses in the ferromagnetic layer can then be calculated, from which in turn the stress-inducing force can be determined.
  • magnetic field sensors based on the Hall effect magnetic field sensors based on the GMR effect (English: giant magnetoresistance) or magnetic field sensors based on the AMR effect (anisotropic magnetoresistive effect) are also suitable as magnetic field sensors ,
  • FIG. 1 A first exemplary embodiment of a force sensor according to the invention is shown in FIG FIG. 1 shown.
  • the force sensor comprises a sensor head 1 with a U-shaped ferrite core 3, which two parallel aligned legs 5 and 7 has.
  • a transmitting or excitation coil 9 is applied, with which a magnetic field can be generated.
  • a magnetic field sensor 11 is arranged, which is formed in the present embodiment as a Hall sensor, but may also be another of the above-mentioned magnetic field sensors.
  • a magnetic field is generated by means of the transmitting coil 9, the magnetic flux density in FIG. 1 represented by the field lines B.
  • the field lines pass through a ferromagnetic layer 13 of a measurement object and are closed via the ferrite core 3.
  • the layer 13 can be applied to the object to be measured or introduced into this.
  • the measurement object itself can also consist of a ferromagnetic material.
  • the magnetic flux density of the magnetic field can be measured.
  • the measured value depends on the magnetic permeability in the ferromagnetic layer 13, which in turn is influenced by the stresses prevailing in the ferromagnetic layer. Therefore, the voltages prevailing in the ferromagnetic layer 13 can be calculated from the magnetic flux density measurement result obtained with the magnetic field sensor 11. Since the ferromagnetic layer 13 either represents the object itself or is connected to the object, the stresses prevailing in the ferromagnetic layer 13 also represent the stresses prevailing in the test object.
  • another electrical variable can be detected within the scope of the invention which is suitable for representing the inductance of the excitation coil.
  • the distance of the transmission coil 9 from the ferromagnetic layer 13, ie from the measurement object can be determined. Namely, if the air gap between the measuring object 13 and the sensor head 1 changes, the inductance of the transmitting coil 9 changes and this without the influence of the mechanical stresses in the measured object. Therefore, an electrical quantity representing the inductance of the transmitting coil 9, such as the amplitude of the transmitting coil voltage, may be used to determine the distance of the transmitting coil 9 from the measuring object. From the spatial arrangement of the transmission coil 9 on the sensor head, therefore, the distance of any point of the sensor head from the measurement object can be determined, in particular the distance of the magnetic field sensor 11 from the measurement object 13.
  • the force sensor has a device 15 for Determining the distance of the sensor head 1 from the measurement object 13 from the detected electrical variable.
  • this device 15 comprises a memory 16 and an allocation unit 17 which is connected to the detection device 14 and to the memory 16.
  • a relationship is stored in the memory 16 in which values of the inductance of the transmission coil 9 are reproduced or unambiguous linked electrical quantity (in the present embodiment, the amplitude the transmission coil voltage) are related to values for the distance of the transmitting coil 9 or the sensor head 1 from the measuring object 13.
  • a look-up table is stored in the memory 16 for this purpose, which contains an unambiguous assignment of values for the amplitude of the transmission coil voltage (or another suitable electrical variable) to values of the distance between the sensor head 1 and the measurement object 13.
  • the table can be created, for example, by calibrating the amplitude of the transmission coil voltage to the distance of the sensor head 1 from the measurement object 13.
  • the allocation unit 17 receives from the detection device 14 the detected amplitude of the transmission coil voltage (or, if another electrical variable representing the inductance of the transmission coil 9 is selected, the detected value of this quantity) and determines the distance of the sensor head 1 from the measurement object 13, in FIG it assigns a distance to the detected amplitude value based on the look-up table stored in memory 16. The assigned distance is then output by the allocation unit 17 in the form of a suitable distance variable representing the distance. This size can be output via an output to the outside, so that the magnetoelastic force sensor can also be operated as a pure distance sensor.
  • the distance variable is also output to a correction unit 18.
  • This receives in addition to the distance size and a measured variable, which is determined by a connected to the magnetic field sensor 1 evaluation unit 19 on the basis of the measurement signal of the magnetic field sensor 11.
  • the correction unit 18 then corrects the measured variable based on the distance signal and outputs a corrected measured variable as the measurement result of the magnetoelastic force sensor.
  • a distance dependence of the original measured variable is then compensated.
  • the magnetoelastic force sensor is therefore insensitive to variations in the distance between the sensor head 1 and the measurement object 13.
  • FIGS. 2 and 3 A second embodiment of a sensor head according to the invention 21 and a magnetoelastic torsion or torque sensor constructed therewith is in the FIGS. 2 and 3 shown. Elements corresponding to those of the first embodiment are denoted by the same reference numerals as in FIG FIG. 1 and will not be explained again to avoid repetition. The explanation of the second embodiment is therefore limited to the differences from the first embodiment.
  • FIG. 2 shows a side view through the sensor head 21 along the line II-II in FIG. 3 ,
  • FIG. 3 shows a plan view of the ferromagnetic material facing the side of the sensor head 21st
  • the sensor head 21 of the second embodiment has a ferrite core 23 with a middle leg 25 and four outer legs surrounding the middle leg 25 on 27. On the middle leg 25, the transmitting coil 9 is arranged.
  • the magnetic field sensors 11 are located on the outer legs 27.
  • the geometry of the ferrite core 21 is selected in the present embodiment so that the legs form two pairs of legs, in each of which two legs are opposite each other on opposite sides of the central leg 25.
  • the two pairs of legs have a 90 ° to each other twisted orientation, so that a point symmetry in the arrangement of the outer legs 27 with respect to the middle leg 25 is present.
  • This embodiment of the sensor head 21 allows a two-dimensional detection of forces, such as, for example, for measuring torsions in a shaft 33 or torques of a shaft advantageous is.
  • the shaft 33 can either consist of a ferromagnetic material or be coated with such.
  • the sensor head For determining the torsion on the shaft 33, the sensor head is aligned with the connecting line between opposing outer legs 27 of a pair of legs along the torsional forces occurring in the torsion, which are perpendicular to each other.
  • a tensile force prevails in one direction and a compressive force in the direction perpendicular thereto.
  • the magnetic permeability of the ferromagnetic material of the shaft 33 becomes larger in one direction and smaller in the other direction.
  • the permeabilities in the two directions can be detected separately from each other, so that, for example, by a subtraction, the torsion of the shaft from the detected permeabilities and the resulting tensile or compressive stresses can be determined. Since a torsion arises in a rotating shaft due to the driving torque and the opposite reaction torque acting thereon, whose magnitude depends on the torque, the torsion causing torque can be determined from the detected torsion.
  • the in the FIGS. 2 and 3 shown sensor head 21 is part of a magnetoelastic torsion or torque sensor, as in FIG. 1 shown electromagnetic force sensor of the first embodiment comprises a detection device, a device for determining the distance of the sensor head of the measurement object and a correction unit.
  • the detection device, the device for determining the distance of the sensor head from the measurement object and the correction unit correspond in their design and arrangement of those FIG. 1 and are therefore for the sake of clarity in the FIGS. 2 and 3 not shown.
  • an algebraic equation can be used to assign the measured values for the electrical variable representing the inductance of the transmitting coil to the respective distance values.
  • the symmetry described with reference to the second exemplary embodiment is advantageous, but not absolutely necessary, since the influences of the measuring signals occurring in the case of a non-symmetrical arrangement can in principle be taken into account during the processing of the measuring signals.
  • the leg, which carries the transmitting coil is equipped with a magnetic field sensor, two legs are sufficient.
  • the evaluation of the signals of a sensor head equipped with four symmetrically arranged legs is simpler, especially if this is done in the FIGS. 2 and 3 having shown geometry.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
EP12151083.8A 2012-01-13 2012-01-13 Magnetoelastischer Kraftsensor und Verfahren zum Kompensieren einer Abstandsabhängigkeit in einem Messsignal eines derartigen Sensors Withdrawn EP2615439A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP12151083.8A EP2615439A1 (de) 2012-01-13 2012-01-13 Magnetoelastischer Kraftsensor und Verfahren zum Kompensieren einer Abstandsabhängigkeit in einem Messsignal eines derartigen Sensors
US14/370,563 US9645022B2 (en) 2012-01-13 2012-11-07 Magneto-elastic force sensor and method for compensating distance dependency in a measurement signal of such a sensor
EP12791125.3A EP2769192B1 (de) 2012-01-13 2012-11-07 Magnetoelastischer torsions- oder drehmomentsensor und verfahren zum ermitteln einer torsion oder eines drehmomentes mit hilfe eines derartigen sensors.
KR1020147019100A KR102027607B1 (ko) 2012-01-13 2012-11-07 자기 탄성식 힘센서 및 상기 유형의 센서의 측정 신호 내의 거리 종속성을 보상하기 위한 방법
PCT/EP2012/071978 WO2013104447A1 (de) 2012-01-13 2012-11-07 Magnetoelastischer kraftsensor und verfahren zum kompensieren einer abstandsabhängigkeit in einem messsignal eines derartigen sensors

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Application Number Priority Date Filing Date Title
EP12151083.8A EP2615439A1 (de) 2012-01-13 2012-01-13 Magnetoelastischer Kraftsensor und Verfahren zum Kompensieren einer Abstandsabhängigkeit in einem Messsignal eines derartigen Sensors

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EP2615439A1 true EP2615439A1 (de) 2013-07-17

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EP12151083.8A Withdrawn EP2615439A1 (de) 2012-01-13 2012-01-13 Magnetoelastischer Kraftsensor und Verfahren zum Kompensieren einer Abstandsabhängigkeit in einem Messsignal eines derartigen Sensors
EP12791125.3A Active EP2769192B1 (de) 2012-01-13 2012-11-07 Magnetoelastischer torsions- oder drehmomentsensor und verfahren zum ermitteln einer torsion oder eines drehmomentes mit hilfe eines derartigen sensors.

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EP12791125.3A Active EP2769192B1 (de) 2012-01-13 2012-11-07 Magnetoelastischer torsions- oder drehmomentsensor und verfahren zum ermitteln einer torsion oder eines drehmomentes mit hilfe eines derartigen sensors.

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US (1) US9645022B2 (ko)
EP (2) EP2615439A1 (ko)
KR (1) KR102027607B1 (ko)
WO (1) WO2013104447A1 (ko)

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WO2015144456A1 (de) * 2014-03-27 2015-10-01 Siemens Aktiengesellschaft Sensor auf magnetoelastischer basis
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US10473535B2 (en) 2017-01-27 2019-11-12 General Electric Company Methods and systems for non-contact magnetostrictive sensor runout compensation
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US20140366637A1 (en) 2014-12-18
US9645022B2 (en) 2017-05-09
EP2769192B1 (de) 2017-03-22
KR20140116862A (ko) 2014-10-06
WO2013104447A1 (de) 2013-07-18

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