EP2609161A1 - Liquid metal emulsion - Google Patents
Liquid metal emulsionInfo
- Publication number
- EP2609161A1 EP2609161A1 EP11760571.7A EP11760571A EP2609161A1 EP 2609161 A1 EP2609161 A1 EP 2609161A1 EP 11760571 A EP11760571 A EP 11760571A EP 2609161 A1 EP2609161 A1 EP 2609161A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- copper
- emulsion
- indium
- metal
- gallium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000839 emulsion Substances 0.000 title claims abstract description 134
- 229910001338 liquidmetal Inorganic materials 0.000 title claims abstract description 25
- 229910052738 indium Inorganic materials 0.000 claims abstract description 86
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 72
- 229910052733 gallium Inorganic materials 0.000 claims abstract description 68
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims abstract description 58
- 239000002904 solvent Substances 0.000 claims abstract description 52
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 24
- 239000000956 alloy Substances 0.000 claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 claims abstract description 17
- 239000010949 copper Substances 0.000 claims description 137
- 229910052802 copper Inorganic materials 0.000 claims description 82
- 238000000034 method Methods 0.000 claims description 78
- 239000004094 surface-active agent Substances 0.000 claims description 68
- 229910052751 metal Inorganic materials 0.000 claims description 56
- 239000002184 metal Substances 0.000 claims description 56
- 238000010438 heat treatment Methods 0.000 claims description 55
- 238000002604 ultrasonography Methods 0.000 claims description 55
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 45
- WNAHIZMDSQCWRP-UHFFFAOYSA-N dodecane-1-thiol Chemical group CCCCCCCCCCCCS WNAHIZMDSQCWRP-UHFFFAOYSA-N 0.000 claims description 40
- 239000002245 particle Substances 0.000 claims description 39
- 238000000151 deposition Methods 0.000 claims description 35
- -1 copper carboxylate Chemical class 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 29
- 229910052717 sulfur Inorganic materials 0.000 claims description 27
- GPRLSGONYQIRFK-MNYXATJNSA-N triton Chemical compound [3H+] GPRLSGONYQIRFK-MNYXATJNSA-N 0.000 claims description 27
- 229910052711 selenium Inorganic materials 0.000 claims description 22
- 239000002243 precursor Substances 0.000 claims description 21
- 239000000523 sample Substances 0.000 claims description 19
- 239000011248 coating agent Substances 0.000 claims description 18
- 238000000576 coating method Methods 0.000 claims description 18
- 229910000807 Ga alloy Inorganic materials 0.000 claims description 17
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 16
- 238000001816 cooling Methods 0.000 claims description 16
- 125000000217 alkyl group Chemical group 0.000 claims description 15
- 230000008018 melting Effects 0.000 claims description 15
- 238000002844 melting Methods 0.000 claims description 15
- 239000000203 mixture Substances 0.000 claims description 13
- 239000012691 Cu precursor Substances 0.000 claims description 11
- 229910000846 In alloy Inorganic materials 0.000 claims description 10
- 229920000136 polysorbate Polymers 0.000 claims description 10
- LZZYPRNAOMGNLH-UHFFFAOYSA-M Cetrimonium bromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[N+](C)(C)C LZZYPRNAOMGNLH-UHFFFAOYSA-M 0.000 claims description 9
- 230000008021 deposition Effects 0.000 claims description 9
- 150000003573 thiols Chemical group 0.000 claims description 8
- OPQARKPSCNTWTJ-UHFFFAOYSA-L copper(ii) acetate Chemical compound [Cu+2].CC([O-])=O.CC([O-])=O OPQARKPSCNTWTJ-UHFFFAOYSA-L 0.000 claims description 7
- 238000009835 boiling Methods 0.000 claims description 6
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 claims description 6
- 150000002739 metals Chemical class 0.000 claims description 6
- 238000005507 spraying Methods 0.000 claims description 6
- 125000006273 (C1-C3) alkyl group Chemical group 0.000 claims description 5
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical group Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 claims description 5
- ZKXWKVVCCTZOLD-UHFFFAOYSA-N copper;4-hydroxypent-3-en-2-one Chemical compound [Cu].CC(O)=CC(C)=O.CC(O)=CC(C)=O ZKXWKVVCCTZOLD-UHFFFAOYSA-N 0.000 claims description 5
- 150000002148 esters Chemical class 0.000 claims description 5
- FKRCODPIKNYEAC-UHFFFAOYSA-N ethyl propionate Chemical compound CCOC(=O)CC FKRCODPIKNYEAC-UHFFFAOYSA-N 0.000 claims description 5
- 238000007650 screen-printing Methods 0.000 claims description 5
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 4
- 229940068965 polysorbates Drugs 0.000 claims description 4
- JNYAEWCLZODPBN-JGWLITMVSA-N (2r,3r,4s)-2-[(1r)-1,2-dihydroxyethyl]oxolane-3,4-diol Chemical compound OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O JNYAEWCLZODPBN-JGWLITMVSA-N 0.000 claims description 3
- 125000003158 alcohol group Chemical group 0.000 claims description 3
- 239000000725 suspension Substances 0.000 claims description 3
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 claims 1
- 239000010409 thin film Substances 0.000 abstract description 10
- 230000000052 comparative effect Effects 0.000 description 49
- 239000010408 film Substances 0.000 description 38
- 230000015572 biosynthetic process Effects 0.000 description 30
- 239000010410 layer Substances 0.000 description 29
- 239000000243 solution Substances 0.000 description 27
- 239000011669 selenium Substances 0.000 description 26
- 210000004027 cell Anatomy 0.000 description 18
- 238000013019 agitation Methods 0.000 description 17
- 239000007788 liquid Substances 0.000 description 14
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 11
- 238000003786 synthesis reaction Methods 0.000 description 11
- 239000011593 sulfur Substances 0.000 description 10
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 9
- 238000003756 stirring Methods 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 239000012298 atmosphere Substances 0.000 description 8
- 238000010791 quenching Methods 0.000 description 8
- 230000000171 quenching effect Effects 0.000 description 8
- 150000003839 salts Chemical class 0.000 description 8
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 7
- 238000000137 annealing Methods 0.000 description 7
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 7
- 239000002105 nanoparticle Substances 0.000 description 7
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 229920002113 octoxynol Polymers 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 238000004528 spin coating Methods 0.000 description 5
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 4
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 4
- 150000004703 alkoxides Chemical class 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000000227 grinding Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000005987 sulfurization reaction Methods 0.000 description 4
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 description 4
- NHKIYYMFGJBOTK-UHFFFAOYSA-N 2,5-Dimethyl-1,4-dithiane-2,5-diol Chemical compound CC1(O)CSC(C)(O)CS1 NHKIYYMFGJBOTK-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- JYCQQPHGFMYQCF-UHFFFAOYSA-N 4-tert-Octylphenol monoethoxylate Chemical compound CC(C)(C)CC(C)(C)C1=CC=C(OCCO)C=C1 JYCQQPHGFMYQCF-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- 229910021617 Indium monochloride Inorganic materials 0.000 description 2
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 2
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- 230000001476 alcoholic effect Effects 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 125000001931 aliphatic group Chemical group 0.000 description 2
- 235000010323 ascorbic acid Nutrition 0.000 description 2
- 239000011668 ascorbic acid Substances 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical compound [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 description 2
- 229910052951 chalcopyrite Inorganic materials 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000002296 dynamic light scattering Methods 0.000 description 2
- APHGZSBLRQFRCA-UHFFFAOYSA-M indium(1+);chloride Chemical compound [In]Cl APHGZSBLRQFRCA-UHFFFAOYSA-M 0.000 description 2
- 239000000976 ink Substances 0.000 description 2
- 235000011076 sorbitan monostearate Nutrition 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 239000001677 (2R,5R)-1,4-dithiane-2,5-diol Substances 0.000 description 1
- 239000001302 (2R,5R)-2,5-dimethyl-1,4-dithiane-2,5-diol Substances 0.000 description 1
- YPGMOWHXEQDBBV-QWWZWVQMSA-N (4S,5S)-1,2-dithiane-4,5-diol Chemical compound O[C@@H]1CSSC[C@H]1O YPGMOWHXEQDBBV-QWWZWVQMSA-N 0.000 description 1
- YUIOPHXTILULQC-UHFFFAOYSA-N 1,4-Dithiane-2,5-diol Chemical compound OC1CSC(O)CS1 YUIOPHXTILULQC-UHFFFAOYSA-N 0.000 description 1
- USVCRBGYQRVTNK-UHFFFAOYSA-N 1-Mercapto-2-propanone Chemical compound CC(=O)CS USVCRBGYQRVTNK-UHFFFAOYSA-N 0.000 description 1
- KXROTPXCYDXGSC-UHFFFAOYSA-N 2-methyl-1,3-dithiane Chemical compound CC1SCCCS1 KXROTPXCYDXGSC-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- BWGNESOTFCXPMA-UHFFFAOYSA-N Dihydrogen disulfide Chemical compound SS BWGNESOTFCXPMA-UHFFFAOYSA-N 0.000 description 1
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- VHJLVAABSRFDPM-IMJSIDKUSA-N L-1,4-dithiothreitol Chemical compound SC[C@H](O)[C@@H](O)CS VHJLVAABSRFDPM-IMJSIDKUSA-N 0.000 description 1
- 150000000996 L-ascorbic acids Chemical class 0.000 description 1
- LSDPWZHWYPCBBB-UHFFFAOYSA-N Methanethiol Chemical compound SC LSDPWZHWYPCBBB-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910001370 Se alloy Inorganic materials 0.000 description 1
- HVUMOYIDDBPOLL-XWVZOOPGSA-N Sorbitan monostearate Chemical compound CCCCCCCCCCCCCCCCCC(=O)OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O HVUMOYIDDBPOLL-XWVZOOPGSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910000102 alkali metal hydride Inorganic materials 0.000 description 1
- 150000008046 alkali metal hydrides Chemical class 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229940072107 ascorbate Drugs 0.000 description 1
- 229960005070 ascorbic acid Drugs 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000007942 carboxylates Chemical class 0.000 description 1
- 150000004770 chalcogenides Chemical class 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- XUJNEKJLAYXESH-UHFFFAOYSA-N cysteine Natural products SCC(N)C(O)=O XUJNEKJLAYXESH-UHFFFAOYSA-N 0.000 description 1
- 235000018417 cysteine Nutrition 0.000 description 1
- 238000010908 decantation Methods 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 230000000368 destabilizing effect Effects 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 150000004887 dithianes Chemical class 0.000 description 1
- UROXMPKAGAWKPP-UHFFFAOYSA-N dodecane-2-thiol Chemical compound CCCCCCCCCCC(C)S UROXMPKAGAWKPP-UHFFFAOYSA-N 0.000 description 1
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- ANEDZEVDORCLPM-UHFFFAOYSA-N ethyl 1,3-dithiane-2-carboxylate Chemical compound CCOC(=O)C1SCCCS1 ANEDZEVDORCLPM-UHFFFAOYSA-N 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 210000000208 hepatic perisinusoidal cell Anatomy 0.000 description 1
- XQSBLCWFZRTIEO-UHFFFAOYSA-N hexadecan-1-amine;hydrobromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[NH3+] XQSBLCWFZRTIEO-UHFFFAOYSA-N 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000003760 magnetic stirring Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- QJAOYSPHSNGHNC-UHFFFAOYSA-N octadecane-1-thiol Chemical compound CCCCCCCCCCCCCCCCCCS QJAOYSPHSNGHNC-UHFFFAOYSA-N 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 238000010951 particle size reduction Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920005862 polyol Polymers 0.000 description 1
- 150000003077 polyols Chemical class 0.000 description 1
- 229950008882 polysorbate Drugs 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000001587 sorbitan monostearate Substances 0.000 description 1
- 229940035048 sorbitan monostearate Drugs 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 235000000346 sugar Nutrition 0.000 description 1
- 150000008163 sugars Chemical class 0.000 description 1
- 125000000446 sulfanediyl group Chemical group *S* 0.000 description 1
- 125000004434 sulfur atom Chemical group 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- YUKQRDCYNOVPGJ-UHFFFAOYSA-N thioacetamide Chemical compound CC(N)=S YUKQRDCYNOVPGJ-UHFFFAOYSA-N 0.000 description 1
- DLFVBJFMPXGRIB-UHFFFAOYSA-N thioacetamide Natural products CC(N)=O DLFVBJFMPXGRIB-UHFFFAOYSA-N 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/52—Electrically conductive inks
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K23/00—Use of substances as emulsifying, wetting, dispersing, or foam-producing agents
- C09K23/002—Inorganic compounds
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K23/00—Use of substances as emulsifying, wetting, dispersing, or foam-producing agents
- C09K23/42—Ethers, e.g. polyglycol ethers of alcohols or phenols
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02568—Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02614—Transformation of metal, e.g. oxidation, nitridation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02628—Liquid deposition using solutions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
Definitions
- the invention relates to an emulsion comprising droplets of a liquid metal of indium and / or gallium suspended in a solvent, its manufacturing process and its uses.
- deposits of the active layer of CIGS are generally carried out by methods generally comprising two steps.
- the first step of these processes consists in depositing a more or less amorphous copper-indium-gallium layer, possibly with sulfur, by vacuum cathodic sputtering, and the second step is a step of annealing under a selenium or sulfur atmosphere for obtain, if possible, on the one hand, the crystallization of the layer and, on the other hand, the stoichiometry between the different elements.
- This stoichiometry is very important because it determines the photovoltaic conversion efficiency of the layer.
- Non-vacuum CIGS layer deposition methods in which the precursors of copper, indium, gallium, sulfur or selenium are either in the form of a powder, for example obtained by mechanical grinding, or nanoparticles, ie ionic solutions.
- the precursors are ionic solutions, there is no stage of chemical or mechanical synthesis of the precursors.
- the elements Cu, In and Ga are provided in the form of commercial ionic salts.
- an ink is formulated from the ionic salts Cu (NO 3 ) 2, In (NO 3 ) 3 and SeCl 4 in a mixture of ethanol + terpineol + ethyl cellulose solvents.
- the absorber layer is deposited by coating ("paste coating"), raised to a temperature of 200 ° C. under ambient atmosphere at first, then between 300 ° C. and 500 ° C. under a stream of H 2 (5%). / Ar.
- thiourea SC (NH 2 ) 2 is used as solvent and precursor of the sulfur element.
- the CuCl 2 and InCl 3 salts are dissolved in thiourea SC (NH 2 ) 2, and vaporized on a substrate.
- the post-thermal annealing X-ray diffraction (XRD) analysis of the layers thus deposited confirms the presence of a major crystalline phase of chalcopyrite CIS, but also that of undesirable elements Cu x S crystalline, CuCl and In 2 S 3 , as described by Chen et al, in Preparation and Characterization of Copper Indium Disulfide Films by Easy Chemical Method, Mater. Se. & Eng. B 139 (2007) 88-94.
- Cu (CH 3 COO) 2 and indium In (CH 3 COO) 3 copper acetates can also serve as precursors to the formation of the CIS layer. Dissolved in a mixture of solvent diethanolamine + triethanolamine + propanol + ethanol, they are deposited in the tablecloth ("spin coating") in several successive layers, with an intermediate annealing at 300 ° C between each layer. To obtain the final layer of CIS, the reduction of copper and indium, as well as the addition of sulfur or selenium, are necessary. These steps can be carried out by the conventional sequence of reduction under H 2 (5%) + N 2 and sulfurization at 500 ° C, as described by Lee et al., In C lnS thin films deposited by sol.
- Milliron et al. Solution processed metal chalcogenide films for p-type transistors, Chem. Mater. (2006), 18, 587-590, describe a protocol for preparing a solution allowing the direct use of sulfur and selenium precursors, thereby eliminating the counterion removal step.
- the solution is spin-coated on a glass + molybdenum substrate, in successive layers, until a thickness of 500 nm is obtained.
- the complete CISSe / CdS / ZnO / ITO cell has a yield of 3.5%, as reported by Hou et al., In "Solution processed chalcopyrite thin film solar cell”, (2008).
- the methods for depositing a thin layer of Cu-In-Ga-X alloy where X is S or Se all have different disadvantages: either the use of processes implementing a vacuum, or the use of salts that are difficult to eliminate afterwards, ie the use of nanoparticles which are difficult to manufacture, the use of explosive products, or which do not make it possible to obtain good conversion yields, or else they must be carried out under an inert atmosphere.
- the aim of the invention is to overcome the disadvantages of the processes of the prior art by proposing a method which does not employ vacuum, which makes it possible to obtain good conversion efficiencies, which makes it possible to obtain the desired stoichiometry and which minimizes or even eliminates the use of a metal salt and which moreover can be implemented in the ambient atmosphere (under air).
- the invention proposes to use an emulsion of a liquid metal of indium and / or gallium to form the layer of Cu-In-Ga-X where X is S or Se, this emulsion containing droplets liquid metal in a solvent which is an alkanethiol or aliphatic mercaptan.
- the difficulty lies, in the invention, in obtaining an emulsion of a liquid metal of indium or gallium or an In-Ga alloy or a suspension of copper particles in an emulsion of a liquid metal.
- indium or gallium or an alloy of In-Ga-Cu which is stable to be applied by coating, spraying or spinning methods.
- stable is meant not only a physical stability, that is to say the absence of decantation or separation of the metal droplets of the constituents of the In-Ga alloy and the Cu particles but also a chemical stability, c that is, the metal or alloy is not oxidized during the various stages of their manufacture and the formation of a thin film or device containing this thin film.
- the invention provides an emulsion comprising droplets of liquid metal and a solvent, characterized in that:
- the metal is chosen from indium (In), gallium (Ga) and the alloys of these metals,
- the solvent is chosen from:
- the surfactant is chosen from surfactants comprising at least one thiol function, cetyltrimethylammonium bromide (CTAB), a surfactant from the family of sorbitan monostearates, preferably SPAN®, a surfactant of the polysorbate family, preferably "TWEEN®", an octylphenolethoxylate surfactant, preferably TRITON® XI 00, a surfactant comprising a pyrolidol group and mixtures thereof.
- CTL cetyltrimethylammonium bromide
- this emulsion contains 90% of the liquid metal droplets which have an average diameter of less than 1 ⁇ .
- the thiolated solvent has a boiling point at least 5 ° C higher than the melting point of the metal or metal alloy.
- the solvent is dodecanethiol.
- the surfactant is TRITON® X.
- the metal is indium.
- the metal is gallium.
- the metal is an alloy of indium and gallium.
- the alloy of indium and gallium comprises 70% by weight of indium and 30% by weight of gallium, relative to the total weight of indium and gallium.
- the emulsion further comprises Cu ° metal copper particles having a size (greater dimension) of between 10 nm and 1 ⁇ , preferably between 10 nm and 500 nm (measured at scanning electron microscope (SEM), transmission electron microscope (TEM) or dynamic light scattering (DLS) or a precursor thereof in organometallic or salt form.
- SEM scanning electron microscope
- TEM transmission electron microscope
- DLS dynamic light scattering
- the copper metal precursor is copper chloride (CuCl 2 ), copper nitrate ( ⁇ ( ⁇ O 3 ) 2 ), a copper carboxylate of formula Cu (OOCR) 2 , where R is a linear C 1 -C 3 alkyl group, preferably copper acetate, a copper ⁇ -diketonate of formula C (R 1 COCH 2 CO 2 ) 2, where R 1 and R 2 are, preferably copper acetylacetonate, a copper alkoxide of the formula Cu (OR 3 ) 2 , wherein R 3 is a linear Ci-C 4 alkyl, or of the formula Cu (OR 4 ) 2 R 5 in which R 4 is a linear Ci-C 2 alkyl and R 5 is H or a linear alcohol group C 2 or a C 1 -C 4 linear alkyl, an alcohol of formula HOCH 2 CH 2 NR 3 R 7 with R 6 and R 7 which are the same or different and are independently selected from one of other among H, Me, And,
- the copper metal precursor is selected from copper alkoxides Cu (OCH 2 CH 2 ) 2 NH, Cu (OCH 2 CH 2 ) 2 NnBu, or Cu (OCH 2 CH 2 ) 2 NEt or a mixture thereof.
- the volume ratio surfactant / solvent is between 10 "4 and 10 " 2 inclusive.
- the invention also proposes a method for manufacturing an emulsion according to the invention, comprising droplets of a liquid metal, characterized in that it comprises the following steps: a) introduction of a metal chosen from indium, gallium and the alloys of these metals in a solvent chosen from:
- n is between 5 and 19 inclusive and R is a methyl or ethyl group
- step b) heating the suspension obtained in step a) to a temperature above the melting point of the metal and below the boiling point of the solvent,
- step d) applying utrasons for 15 minutes while maintaining the same temperature as in steps b) and c), with a probe of 20 kHz, amplitude of 75%, e) cooling of the emulsion obtained in step d) , and
- ambient temperature is meant, in the invention, a temperature between 15 and 30 ° C inclusive.
- the metal is indium and the heating temperature in steps b), c) and d) is 180 ° C.
- the metal is gallium
- the heating temperature in steps b), c) and d) is 70 ° C.
- the metal is an alloy of indium and gallium
- the surfactant is preferably selected from surfactants optionally having at least one thiol function, cetyltrimethylammonium bromide (CTAB), a surfactant of the family of monostearate sorbitan, preferably SPAN ®, a surfactant of the family of polysorbates, preferably the "TWEEN ®" octylphénodiathoxylate a surfactant, preferably TRITON ® XI 00, a surfactant comprising a pyrolidol group and mixtures thereof.
- CAB cetyltrimethylammonium bromide
- Step b) preferably lasts between 30 minutes and 90 minutes.
- step c As for the cooling of step c), it can be a natural or forced cooling.
- the process of the invention preferably also comprises, after step c), a step of adding copper particles or a copper precursor chosen from copper chloride particles.
- CuCl 2 copper nitrate (Cu (NO 3 ) 2), a copper carboxylate of formula Cu (OOCR) 2 , where R is a linear C 1 -C 3 alkyl group, preferably copper acetate, a copper ⁇ -diketonate of formula Cu (RiCOCH 2 COR 2 ) 2, in which R 1 and R 2 are, preferably copper acetylacetonate, a copper alkoxide of formula Cu (OR 3 ) 2 , in which R 3 is a linear alkyl C l -C 4, or of formula Cu (oR 4) 2 NRs wherein R4 is a linear alkyl to C 2 and R 5 is H or linear alcohol C 2 or a linear C1- C 4 , an alcohol of formula HOCH 2 CH 2 NR 6 R 7 with R 6 and R 7 which are identical or
- the copper precursor is selected from copper alkoxides Cu (OCH 2 CH 2 ) 2 NH, Cu (OCH 2 CH 2 ) 2 NnBu, or Cu (OCH 2 CH 2 ) 2 NEt or a mixture thereof. this.
- the solvent is dodecanethiol.
- the surfactant is TRITON ® XI 00.
- the invention also proposes a process for depositing a film made of a metal chosen from indium and gallium and the alloys thereof, characterized in that it comprises the following steps:
- the deposition step a) is carried out by coating, screen printing or spraying said emulsion.
- the heat treatment step b) is carried out at a temperature above 120 ° C and below 300 ° C for a period of between 10 minutes and 60 minutes.
- the invention further provides a method of depositing a Cu-In-Ga-X film wherein X is S or Se, characterized in that it comprises the following steps:
- the invention also proposes a method for manufacturing an active layer of a photo voltaic device, characterized in that it comprises a step of depositing a Cu-In-Ga-X film where X is S and / or or Se, or a mixture of both, on at least one surface of a substrate, by the method of the aforementioned invention.
- the invention also proposes a method of manufacturing a photovoltaic device, characterized in that it comprises a step of depositing a Cu-In-Ga-X film where X is S or Se on at least one surface of a substrate by the method according to the invention mentioned above.
- the photovoltaic device is a photovoltaic cell or a photovoltaic panel, or a photovoltaic cell.
- the invention finally proposes the use of an emulsion according to the invention for depositing a film of a metal selected from indium and gallium and alloys thereof on the surface of at least one substrate.
- FIGS. 1 and 2 are photographs taken under the scanning electron microscope of an indium emulsion according to the invention
- FIGS. 3 and 4 are photographs taken under a scanning electron microscope of an indium emulsion prepared by applying ultrasound only once and this at a power lower than that used in the process according to the invention ,
- FIGS. 5 and 6 are photographs taken by scanning electron microscopy of an indium emulsion prepared by applying ultrasound only during the cooling of the emulsion
- FIGS. 7, 8 and 9 are photographs taken under a scanning electron microscope of an indium emulsion prepared by applying ultrasound only during the heating of the emulsion,
- FIGS. 10 and 11 are photographs taken under a scanning electron microscope of an indium emulsion prepared by once again applying ultrasound, at the end of the protocol, with respect to the indium emulsion prepared according to FIG. 'invention,
- FIGS. 12 and 13 are photographs taken under a scanning electron microscope of an indium emulsion prepared without a surfactant and at a temperature of 150.degree.
- FIGS. 14, 15 and 16 are photographs taken under a scanning electron microscope of an indium emulsion prepared by heating at 150 ° C. but adding a surfactant,
- FIGS. 17 and 18 are photographs taken under a scanning electron microscope of an indium emulsion prepared by applying a single ultrasound and by quenching the emulsion with water cooled to 0 ° C. ,
- FIGS. 19 and 20 are photographs taken under a scanning electron microscope of an emulsion of indium prepared as the emulsion shown in Figures 17 and 18 above except the quenching which was carried out with liquid nitrogen,
- FIGS. 21 and 22 are photographs taken under a scanning electron microscope of an indium emulsion prepared as the emulsions shown in FIGS. 17, 18, 19 and 20 but without quenching for cooling and using twice as much surfactant,
- FIGS. 23, 24 and 25 are photographs taken under a scanning electron microscope of an indium emulsion prepared as the emulsion represented in FIGS. 21 and 22 but using four times less surfactant,
- FIGS. 26, 27, 28 are scanning electron micrographs of an indium emulsion prepared as the emulsion shown in FIGS. 19 and 20 but adding copper at the end of the ultrasound,
- FIGS. 29, 30 and 31 are photographs taken under a scanning electron microscope of a gallium emulsion prepared by the process according to the invention.
- FIGS. 32, 33 and 34 are photographs taken under a scanning electron microscope of a gallium emulsion prepared without a heating period before and during the application of the utltrasons, and
- FIGS. 35 and 36 are photographs taken under a scanning electron microscope of a gallium emulsion prepared without applying cold ultrasound.
- FIGS. 37, 38 and 39 are photographs taken under a scanning electron microscope of an indium-gallium emulsion comprising 30% by weight of gallium and 70% by weight of indium prepared by the process of the invention .
- FIGS. 40, 41 and 42 are photographs taken under a scanning electron microscope of an indium-gallium emulsion comprising 30% by weight of gallium and 70% by weight of indium prepared by the process of the invention further comprising a final step of applying cold ultrasound.
- the invention lies in the formation and use of an emulsion of a metal selected from In, Ga and an alloy comprising them, liquid, in a solvent.
- a first object of the invention is an emulsion which comprises droplets of liquid metal of In and / or Ga suspended in a solvent.
- the metal of In and / or Ga To be liquid, it must be melted, that is to say that it is necessary that the emulsion be brought to a temperature at least equal to the melting temperature of the In-Ga alloy.
- the solvent must have a boiling point higher than the melting point of the In-Ga alloy.
- the melting point of indium is 156 ° C. That of gallium is 30 ° C.
- the melting point is 120 ° C.
- the solvent must therefore have a boiling point greater than 120 ° C., preferably greater than 130 ° C. for the In-Ga alloy mentioned above but greater than 156 ° C. for In and greater than 30 ° C. for Ga.
- This alloy is particularly suitable because the CIGS-based cells with the best performance require these relative proportions of Ga and In in order to have an optimum band gap.
- This solvent must moreover, according to the invention, be a thiolated solvent.
- the preferred thiolated solvents have one of the following formulas 1 to 3:
- n is between 5 and 19, inclusive, and R and C3 ⁇ 4 or -CH 2 -CH 3.
- the solvent is dodecanthiol.
- the emulsion of the invention also comprises a surfactant which allows the formation and stabilization of the emulsion and also the reduction of the size of the liquid metal droplets.
- 90% of the liquid metal droplets will have a size less than 1 ⁇ .
- nonionic surfactants are preferred.
- the preferred surfactants for the emulsion of the invention are cetylammonium bromide (CTAB), surfactants having thiol functions, such as dodecanethiol, octadecanethiol, molecules having a pyrolidol group, surfactants of the family of polysorbates, such as TWEEN ® , surfactants from the sorbitan monostearate family, such as SPAN ® surfactants, octylphenolethoxylate surfactants, such as TRITON ® XI 00.
- CTAB cetylammonium bromide
- surfactants having thiol functions such as dodecanethiol, octadecanethiol, molecules having a pyrolidol group
- surfactants of the family of polysorbates such as TWEEN ®
- surfactants from the sorbitan monostearate family such as SPAN ® surfactants
- thiol surfactants of the formula CH 3 (CH 2) n (CH 2) m N (CH 3) 3 + Br ⁇ wherein n and m are as shown in Table 1 below: Table 1. Structure of thiolated surfactants
- thiol-containing surfactant comprising two sulfur atoms having the structure CH 3 (C3 ⁇ 4) 5 S (CH 2) 6 S (CH 2) 6 N (CH 3) 3 + Br "is also preferred.
- the mixtures of these surfactants can also be used to obtain a stable emulsion and reduce the size of the droplets.
- This emulsion comprising droplets of liquid metal of In and / or Ga suspended in a solvent can be used for depositing an In and / or Ga film on at least one surface of a substrate, applying this emulsion by coating, or by screen printing, or by spraying, on the desired surface.
- Copper can then be introduced by any method known to those skilled in the art thus formed and it can then be selenized or sulfrified this film by any method known to those skilled in the art, such as by annealing under an atmosphere of selenium or sulfur vapor of the indium-gallium-Cu film obtained. But, preferably, the copper is introduced into the emulsion of the invention comprising droplets of liquid metal of In and / or Ga suspended in a solvent.
- Copper can be introduced, and this is a preferred embodiment of the invention, in the form of metallic copper particles of oxidation degree 0.
- the copper particles are preferably less than 1 ⁇ m, preferably less than 10 nm.
- the copper can of course be introduced into the emulsion of the invention comprising droplets of In-Ga liquid alloy suspended in a solvent in the form of its precursors known in the art, such as chloride.
- R is a linear C 1 -C 3 alkyl group, preferably copper acetate, a copper ⁇ -diketonate of formula Cu (R 1 COCH 2 COR) 2 , where R 1 and R 2 are, preferably copper acetylacetonate, a copper alkoxide of formula CuCOR 2, in which R 3 is a linear Ci-C 4 alkyl, or of formula Cu (OR 4 ) 2 NR 5 in which R 4 is a linear Ci alkyl -C 2 and R 5 is H or linear alcohol C 2 or a linear alkyl to C 4, an alcohol of formula HOCH 2 CH 2 NR e R 7 with R 6 and R 7 which are identical or different and are independently selected from H, Me, Et, Pr, Bu.
- the precursors carboxylates, ⁇ -diketonates and copper alkoxides can, by heat treatment in a reducing medium lead to the formation of metallic copper nanoparticles of oxidation degree 0.
- alkali metal hydrides such as ascorbic acid esters, ascorbic acid, sugars and polyols such as ethylene glycol, diethylene glycol, propylene glycoi, etc .... Because copper alkoxides are more easily reduced than copper carboxylates or ⁇ -diketonates, these precursors will preferably be used in the invention.
- the preferred copper alkoxides of the invention have a longer aliphatic chain with a butyl or hexyl group.
- alkoxides are viscous liquids at room temperature, they can therefore be added directly to the emulsion without having to add solvent, which is a significant advantage: what has not been added will not be removed.
- alkoxides grouped in the following Table 3 will be used even more preferably because they have a metal copper reduction temperature of oxidation degree report reported in Table 3.
- this emulsion should not be destabilized. It is therefore necessary that this temperature is not too high, and
- the reduction temperature in the case where the reduction takes place after the coating is applied to the substrate, the reduction temperature must also not be too high, since it would be possible to sublimate copper alkoxide, which would make the control of the stoichiometry of the formed film.
- the copper precursors described above can be used on the In-Ga film already formed or introduced into the lamp itself.
- the preferred precursors of copper to be added in the emulsion before the formation of the film, or after formation of the In-Ga film are copper alkoxides of formula Cu (OCH 2 CH 2 ) 2 NH, Cu (OCH 2 CH 2 ) 2 NnBu and Cu (OCH 2 CH 2 ) 2 NEt, because the final amount of copper formed after reduction is important and, furthermore, being liquid, they can be added undiluted to the emulsion.
- the copper alkoxides used in the invention are copper (II) alkoxides not copper (I) alkoxides because their synthesis makes it possible to use less solvent than the synthesis of copper (I) alkoxides, because of the low solubility of CuCl in alcohol or THF. CuCl leading to the formation of copper (I) alkoxides.
- copper precursors that can be used in the invention, either to be added in the In and / or Ga liquid metal emulsion, or to be applied to the In and / or Ga film already formed.
- alcohols of formula HOCH 2 CH 2 NRR 'with R and R' are the same or different and are independently selected from H, Me, Et, Pr or Bu.
- a second subject of the invention is an emulsion comprising droplets of indium and / or gallium liquid metal and particles of copper or copper precursors suspended in a solvent.
- the solvent is here again a thiolated solvent as defined above.
- This emulsion can be used for the formation of a thin film of Cu-In-Ga or Cu-In or Cu-Ga alloy on at least one surface of the substrate.
- this sulfurization or selenization can be carried out by a heat treatment of the film or more exactly of the surface of the substrate on which this film is deposited with selenium or sulfur in the form of steam, as is known in the art.
- a third object of the invention is the use of the emulsion of the invention not containing copper particles for the formation of an In and / or Ga metal film on a substrate or for forming a Cu-In or Ga-In or Cu-In-Ga film on a surface of a substrate or to form a Cu-In-S or Cu-In-Se alloy film or Cu-Ga-S or Cu-Ga-Se or Cu-In on a surface of a substrate and more particularly for the formation of an active layer of a photovoltaic device which can be a photovoltaic cell, a photovoltaic cell, or a photovoltaic panel.
- a fourth object of the invention is the use of the emulsion of the invention comprising copper particles or a copper precursor as described above for the formation of a thin film of Cu-In alloy or Cu-In-S or Cu-In-Se or Cu-Ga or Cu-In-Ga-S or Cu-In-Ga-Se on the surface of a substrate, and in particular for the formation of an active layer a photovoltaic device such as a battery, a cell or a photovoltaic panel.
- a fifth subject of the invention is a method of depositing an indium and / or gallium metal film which comprises the deposition of an In and / or Ga emulsion according to the invention not comprising copper on a surface. least one surface of a treatment and the heat treatment of this at least one surface.
- the deposition is carried out by coating said emulsion on the surface of the substrate and the heat treatment step is carried out at a temperature above 120 ° C. for a period of 10 to 60 minutes, when the alloy of -Ga is an alloy comprising 70% by weight of indium and 30% by weight of gallium.
- the coating step is carried out at a temperature above 160 ° C for a period of 10 minutes to 60 minutes.
- the coating step is carried out at a temperature above 30 ° C for a period of 10 to 60 minutes.
- a sixth object of the invention is a method for depositing a Cu-In-Ga film on at least one surface of a substrate which comprises the steps of depositing an In metal film and / or Ga according to the method of the fifth subject of the invention and then the introduction of copper in the desired stoichiometry in this film.
- a preferred method of the invention for depositing a Cu-In or Cu-Ga or Cu-In-Ga film on at least one surface of a substrate comprises the steps of depositing an emulsion according to the invention comprising copper particles or a precursor thereof, as previously described, on said surface of the substrate and the heat treatment of this surface to freeze the structure of the deposited film.
- a first heat treatment at 150 ° C. makes it possible to freeze the structure of the film
- a second heat treatment at 250 ° C. for example and in any case at a temperature above the boiling point of the solvent allows its removal by evaporation.
- the method according to the invention further comprises, after step c) a step of adding copper particles or a copper precursor chosen from copper chloride particles (CuCl 2 ), copper nitrate (Cu (NO 3 ) 2 ), a copper carboxylate of formula Cu (OOCR) 2 , where R is a linear C 1 -C 3 alkyl group, preferably copper acetate, a ⁇ -diketonate of copper of formula Cu (RiCOCH 2 COR 2 ) 2 , where R 1 and R 2 are, preferably copper acetylacetonate, a copper alkoxide of formula Cu (OR 3 ) 2, in which R is a C 1 -C 4 linear alkyl, or of formula Cu (OR 4 ) 2 NR 5 in which j is a linear alkyie in Q to C 2 and R 5 is H or a linear alcohol group C 2 or a linear alkyl in C 1 to C 4 , an alcohol of formula HOCH 2 CH 2 NR 6 R 7 with R
- the copper precursor is selected from copper alkoxides Cu (OCH 2 CH 2 ) 2 NH, Cu (OCH 2 CH 2 ) 2NnBu, or Cu (OCH 2 CH 2 ) 2 NEt or a mixture thereof .
- the preferred solvent is dodecanethiol.
- the preferred surfactant is TRITON ® XI 00.
- the deposition of the emulsion on the desired surface is carried out by coating said emulsion on this surface.
- the In-Ga alloy is an alloy comprising
- a seventh subject of the invention is a process for depositing a Cu-In-Ga-X film where X is S or Se which comprises depositing a Cu-In-Ga film according to one of the processes described above, that is to say by forming an In-Ga film and then introducing copper or by direct formation from the emulsion of the invention containing copper, or a precursor thereof a Cu-In or Cu-Ga or Cu-In-Ga film on the surface of a substrate and the thermal treatment of this surface in the presence of X vapor, that is to say sulfur or selenium.
- this heat treatment is carried out between 300 ° C and 600 ° C.
- This method can be used for the manufacture of an active layer of a photovoltaic, for the manufacture of a photovoltaic device such as a photovoltaic cell, or a photovoltaic panel, or a photovoltaic cell and in particular for depositing a photovoltaic cell.
- metal film selected from indium and gallium.
- an eighth object of the invention comprises the following steps:
- the deposition step a) is carried out by coating or spraying said emulsion.
- step b the heat treatment is carried out between
- the protocol used is the following:
- the protocol used is the following:
- the emulsion obtained is represented in FIGS. 3 and 4.
- Example 2 the procedure was as in Example 1 but without surfactant and without applying ultrasound after cooling.
- the emulsion obtained is shown in FIGS. 5 and 6.
- the protocol used is the following:
- the emulsion obtained is represented in FIGS. 7 to 9.
- the protocol used is the following:
- the emulsion obtained is represented in FIGS. 10 and 11.
- the protocol used is the following:
- the emulsion obtained is represented in FIGS. 14, 15 and 16.
- the protocol is as follows:
- the contents of the flask are poured into a bottle cooled with liquid nitrogen.
- the protocol is as follows:
- the emulsion obtained is shown in FIGS. 21 and 22.
- the protocol is as follows:
- the protocol is as follows:
- the emulsion obtained is represented in FIGS. 26, 27 and 28. Results of syntheses of indium emulsions.
- the heating temperature of the solvent was also studied.
- Comparative tests 8 and 9 compared to Comparative Example 4 show that the sudden cooling of the emulsion does not block the size of the particles.
- Table 4 summarizes the various manufacturing parameters and the size of the droplets obtained by the process according to the invention and according to the comparative examples.
- the protocol used is the following:
- Example No. 2 The procedure was as in Example No. 2, but without applying ultrasound after cooling the emulsion.
- the protocol used is the following:
- the emulsion obtained is represented in FIGS. 35 and 36.
- the melting temperature of gallium is 30 ° C. It is therefore possible, by virtue of the energy dissipated by the ultrasonic waves, to obtain a temperature higher than this melting temperature and thus to be able to produce a gallium emulsion.
- the particles are highly polydisperse and have diameters greater than one micrometer (Comparative Example 13).
- a temperature above the melting point of the gallium was then used.
- an emulsion prepared according to the method of the invention that is to say by applying a second ultrasound after cooling of the gallium emulsion at room temperature was manufactured.
- the application of ultrasound a second time at room temperature made it possible to further reduce the size of the particles and to obtain particles that are for the most part smaller than ⁇ .
- the emulsion obtained is represented in FIGS. 37, 38 and 39.
- Example No. 3 The procedure was as in Example No. 3, with a cold application of ultrasound in addition.
- the protocol used is the following:
- FIGS. 40, 41 and 42 apply cold ultrasound for 15 minutes at 200W / cm 2 .
- the emulsion obtained is shown in FIGS. 40, 41 and 42.
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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FR1003453A FR2964044B1 (en) | 2010-08-26 | 2010-08-26 | LIQUID METAL EMULSION |
PCT/IB2011/053719 WO2012025893A1 (en) | 2010-08-26 | 2011-08-24 | Liquid metal emulsion |
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EP2609161A1 true EP2609161A1 (en) | 2013-07-03 |
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EP11760571.7A Withdrawn EP2609161A1 (en) | 2010-08-26 | 2011-08-24 | Liquid metal emulsion |
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US (1) | US20140147959A1 (en) |
EP (1) | EP2609161A1 (en) |
JP (1) | JP2013538893A (en) |
CN (1) | CN103068939B (en) |
FR (1) | FR2964044B1 (en) |
WO (1) | WO2012025893A1 (en) |
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FR2999557A1 (en) * | 2012-12-14 | 2014-06-20 | Commissariat Energie Atomique | SUSPENSION OF MONODISPERSED METAL SULFIDE AGGREGATES, PROCESS FOR PRODUCING THE SAME AND USES THEREOF |
FR3002234B1 (en) * | 2013-02-20 | 2015-04-03 | Commissariat Energie Atomique | INK COMPRISING METALLIC PARTICLES HAVING THEIR SURFACE OF DIALKYL DISULFIDE AND METHOD OF MAKING SUCH AN INK |
CN103418300B (en) * | 2013-08-29 | 2016-03-30 | 启东市海信机械有限公司 | For the stirring technique of the agitating device that lithium ion battery manufactures |
US9841327B2 (en) * | 2014-08-14 | 2017-12-12 | Purdue Research Foundation | Method of producing conductive patterns of nanoparticles and devices made thereof |
CN105860598B (en) * | 2016-04-11 | 2019-02-01 | 深圳市博恩实业有限公司 | Have thermally conductive function and paintable liquid metal composition and its preparation method and application |
CN108293836A (en) * | 2016-08-11 | 2018-07-20 | 云南科威液态金属谷研发有限公司 | A kind of liquid metal soil and preparation method thereof |
US11387013B1 (en) | 2017-05-24 | 2022-07-12 | United States Of America As Represented By The Secretary Of The Air Force | Residue free electrically conductive material |
US10784011B1 (en) | 2017-05-24 | 2020-09-22 | United States Of America As Represented By The Secretary Of The Air Force | Residue free electrically conductive material |
US10428234B2 (en) | 2017-09-25 | 2019-10-01 | United States Of America As Represented By The Secretary Of The Air Force | Liquid metal ink |
CN108421542B (en) * | 2018-03-22 | 2020-08-07 | 河南科技学院 | Application of liquid metal microspheres as pore-forming agent in preparation of monolithic column |
CN110769663B (en) * | 2018-07-27 | 2021-07-20 | 中国科学院理化技术研究所 | Recyclable liquid metal slurry for electromagnetic shielding and preparation method and application thereof |
US11406956B2 (en) | 2018-11-02 | 2022-08-09 | United States Of America As Represented By The Secretary Of The Air Force | Articles comprising core shell liquid metal encapsulate networks and method to control alternating current signals and power |
US11100223B2 (en) | 2018-11-02 | 2021-08-24 | United States Of America As Represented By The Secretary Of The Air Force | Core shell liquid metal encapsulates comprising multi-functional ligands and networks comprising same |
US11102883B2 (en) | 2018-11-02 | 2021-08-24 | United States Of America As Represented By The Secretary Of The Air Force | Substrates comprising a network comprising core shell liquid metal encapsulates comprising multi-functional ligands |
US10900848B2 (en) | 2018-11-02 | 2021-01-26 | United States Of America As Represented By The Secretary Of The Air Force | Articles comprising a resistor comprising core shell liquid metal encapsulates and method of detecting an impact |
US11062817B1 (en) | 2019-07-12 | 2021-07-13 | United States Of America As Represented By The Secretary Of The Air Force | Liquid metal encapsulates having non-native shells |
CN110818824B (en) * | 2019-11-08 | 2021-12-28 | 深圳大学 | Liquid metal-assisted ultrasonic polymerization method |
CN110779363B (en) * | 2019-11-19 | 2021-07-13 | 大连理工大学 | Pulsating heat pipe with liquid metal micro-nano liquid drops as working media |
CN111112632A (en) * | 2019-12-30 | 2020-05-08 | 浙江大学 | Preparation method of low-melting-point high-electric-conductivity high-heat-conductivity metal nanoparticles |
WO2022211218A1 (en) * | 2021-04-02 | 2022-10-06 | 한국과학기술원 | Liquid metal precursor solution, metal film manufacturing method using same, and electronic device comprising same |
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US7537955B2 (en) * | 2001-04-16 | 2009-05-26 | Basol Bulent M | Low temperature nano particle preparation and deposition for phase-controlled compound film formation |
EP1428243A4 (en) * | 2001-04-16 | 2008-05-07 | Bulent M Basol | Method of forming semiconductor compound film for fabrication of electronic device and film produced by same |
US7604843B1 (en) * | 2005-03-16 | 2009-10-20 | Nanosolar, Inc. | Metallic dispersion |
US8329501B1 (en) * | 2004-02-19 | 2012-12-11 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer from inter-metallic microflake particles |
JP4714859B2 (en) * | 2005-03-01 | 2011-06-29 | 国立大学法人 名古屋工業大学 | Method for synthesizing copper sulfide nanoparticles |
CN103824896A (en) * | 2006-02-23 | 2014-05-28 | 耶罗恩·K·J·范杜伦 | High-throughput printing of semiconductor precursor layer from inter-metallic nanoflake particles |
JP4829046B2 (en) * | 2006-08-30 | 2011-11-30 | 国立大学法人 名古屋工業大学 | Method for producing metal sulfide nanoparticles and photoelectric conversion element |
US20110177602A1 (en) * | 2007-06-27 | 2011-07-21 | Endress + Hauser Conducts Gesellschaft furMess-und Regeltechnik mbH +Co. KG | Composite Structure |
EP2266145A2 (en) * | 2008-03-04 | 2010-12-29 | Brent Bollman | Methods and devices for processing a precursor layer in a group via environment |
CN101234779A (en) * | 2008-03-06 | 2008-08-06 | 中国科学院化学研究所 | Method for preparing copper-indium-sulfur semi-conductor nano particles |
US20090260670A1 (en) * | 2008-04-18 | 2009-10-22 | Xiao-Chang Charles Li | Precursor ink for producing IB-IIIA-VIA semiconductors |
US8361891B2 (en) * | 2008-12-11 | 2013-01-29 | Xerox Corporation | Processes for forming channels in thin-film transistors |
US8709335B1 (en) * | 2009-10-20 | 2014-04-29 | Hanergy Holding Group Ltd. | Method of making a CIG target by cold spraying |
WO2011066205A1 (en) * | 2009-11-25 | 2011-06-03 | E. I. Du Pont De Nemours And Company | Aqueous process for producing crystalline copper chalcogenide nanoparticles, the nanoparticles so-produced, and inks and coated substrates incorporating the nanoparticles |
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2010
- 2010-08-26 FR FR1003453A patent/FR2964044B1/en not_active Expired - Fee Related
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2011
- 2011-08-24 CN CN201180041350.7A patent/CN103068939B/en not_active Expired - Fee Related
- 2011-08-24 WO PCT/IB2011/053719 patent/WO2012025893A1/en active Application Filing
- 2011-08-24 JP JP2013525405A patent/JP2013538893A/en active Pending
- 2011-08-24 US US13/819,300 patent/US20140147959A1/en not_active Abandoned
- 2011-08-24 EP EP11760571.7A patent/EP2609161A1/en not_active Withdrawn
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US20140147959A1 (en) | 2014-05-29 |
CN103068939B (en) | 2014-11-26 |
FR2964044B1 (en) | 2012-09-14 |
CN103068939A (en) | 2013-04-24 |
FR2964044A1 (en) | 2012-03-02 |
WO2012025893A1 (en) | 2012-03-01 |
JP2013538893A (en) | 2013-10-17 |
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