EP2607706B1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP2607706B1
EP2607706B1 EP12194041.5A EP12194041A EP2607706B1 EP 2607706 B1 EP2607706 B1 EP 2607706B1 EP 12194041 A EP12194041 A EP 12194041A EP 2607706 B1 EP2607706 B1 EP 2607706B1
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EP
European Patent Office
Prior art keywords
stator
disks
housing
spring element
vacuum pump
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Active
Application number
EP12194041.5A
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German (de)
French (fr)
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EP2607706A3 (en
EP2607706A2 (en
Inventor
Markus Henry
Jürgen BREZINA
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Leybold GmbH
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Leybold GmbH
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Publication of EP2607706A2 publication Critical patent/EP2607706A2/en
Publication of EP2607706A3 publication Critical patent/EP2607706A3/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump, in particular a turbomolecular pump.
  • Vacuum pumps such as turbomolecular pumps, have a plurality of rotor disks connected to a rotor shaft forming the high speed rotor.
  • a stator is disposed in the pump housing.
  • the stator has a plurality of stator disks and a plurality of stator rings.
  • the stator disks are each arranged between adjacent rotor disks.
  • a rotor disk is arranged at the pump inlet and stator disks are arranged at the pump outlet.
  • the stator disks are usually designed as ring segments, so that the individual stator segments forming a ring segments for mounting from the outside between adjacent rotor disks can be inserted.
  • stator rings are arranged between the stator disks.
  • the stator rings thus radially surround the rotor disks.
  • the stator rings are preferably separate components, wherein it is also possible that the stator rings are each connected to a stator disk or formed in one piece. With such composed of half-rings stator rings and - Slices can be achieved a better thermal conductivity. However, such stator rings are expensive.
  • the vacuum pump For mounting the vacuum pump is usually carried out an arrangement of the stator between the rotor discs and a corresponding arrangement of the stator between the stator discs.
  • the thus pre-assembled rotor-stator element is then inserted in the axial direction in the pump housing.
  • a radial mounting gap is provided.
  • the first stator disk or the first stator ring in the pumping direction abuts on an inner side of the pump housing in the axial direction.
  • the last stator ring in the pumping direction or the last stator disk is located on an inner side of a housing flange.
  • the housing flange is connected to the pump housing according to an annular cover, usually screwed.
  • stator discs are accurately positioned and also ensures good heat transfer between the stator and the pump housing.
  • a tolerance compensation must take place, wherein due to the large number of stator disks and stator rings, the tolerances can add in the axial direction.
  • the width of the axial joint gap must be selected such that also adding tolerances can be compensated.
  • the housing flange has a pump housing, in particular in the axial direction, defined position.
  • the housing flange is firmly connected to the pump housing or pulled to block.
  • the tolerance compensation, the axial positioning of the stator disks and the thermal coupling of the stator to the pump housing must thus be carried out in a different manner.
  • high vacuum side i. at the pump inlet, between the first stator and the inside of the housing to provide an elastomeric ring.
  • an elastomeric ring In addition to an increased installation effort, the provision of an elastomeric ring has the disadvantage that the material flows in particular during prolonged operation and thus deteriorates the position accuracy of the stator. Also, the heat transfer between the stator and the housing is deteriorated by the provision of the elastomeric ring, so that in particular after a long period of operation, the required heat dissipation may not be ensured. Furthermore, an elastomer ring has the disadvantage that the material evaporates and in that components of the elastomeric material pass into the gas to be delivered.
  • the object of the invention is to provide a vacuum pump in which the stator discs have a high positioning quality and the stator is also thermally coupled well to the pump housing.
  • the vacuum pump according to the invention which is in particular a turbomolecular pump, has a rotor arranged in a pump housing and a stator.
  • the rotor has a plurality of rotor disks, wherein in each case a stator disk is arranged between adjacent rotor disks.
  • Stator rings are arranged between adjacent stator disks.
  • a stator disc or a stator ring is arranged, which preferably bears against a housing inner side or an inner side of a housing flange.
  • a stator element which presses apart the stator disks is arranged between two adjacent stator disks.
  • the spring element thus applies axial forces to the stator disks, so that the axially first and last stator disk or the axially first and last stator ring is pressed against the inside of the housing or the inside of the housing flange.
  • the spring element is a tolerance compensation of the stator and stator rings.
  • the spring element is designed such that a stator ring is replaced by the spring element.
  • the spring element in preferred embodiment, pointing in the direction of the rotor disc inner surface which is formed according to a stator ring. This ensures that even in the region of the spring element no or only a slightly higher return flow of the delivered gas takes place.
  • the spring element is arranged between two directly adjacent stator disks, so that the spring element bears against both stator disks, in particular directly, wherein the spring element may optionally additionally have a contact disk or the like in order to realize the largest possible possible contact.
  • the housing flange can thus, based on the housing, be pulled to block.
  • the spring element is preferably provided between two stator disks arranged in a central region. If, for example, ten stator disks are provided, then it is preferred for the spring element to be arranged in the region of the fourth, fifth or sixth stator disk in the axial direction. It is particularly preferred that the spring element is arranged between the two central stator disks. Possibly. can also be provided more than one spring element.
  • the arrangement of the spring element in a middle region has the particular advantage that the axial tolerances of the stator disks and stator rings do not add up completely, so that the overall tolerance in the axial direction is lower.
  • the spring element surrounds a rotor disk, in particular completely. It is particularly preferred that the spring element is annular. In an arrangement of the spring element in a central region, a good heat dissipation is already ensured by the one stator half on the pump housing or the housing flange.
  • the spring element may be formed of metal or have metal in order to improve the thermal conductivity between stator rings or stator disks in the central region.
  • the spring element may also have elastomer or be formed for example as an elastomer ring. This is possible because the occurring material evaporation in the middle range is acceptable.
  • the drawing shows a schematic, greatly simplified sectional view of a vacuum pump.
  • the vacuum pump has a rotor shaft 10 which carries a plurality of rotor disks 12 forming the rotor. Between adjacent rotor disks 12 stator disks 14 are arranged. Furthermore, a stator disc 14 is arranged in the region of a pump outlet 18 in the illustrated embodiment. In the area of a pump inlet 16, a rotor disk 12 is arranged. The stator disks 14 are arranged in a housing 20, wherein a stator ring 22 is arranged in each case between adjacent stator disks. The stator rings 22 thus each surround a rotor disk 12.
  • a spring element 24 is disposed in the illustrated embodiment between the two central stator rings 14, which replaces the corresponding stator ring.
  • the spring element 24, which is produced in particular from a metal ring, exerts axial forces on the stator disks 14 and the stator rings 22 in both axial directions 26, 28.
  • half of the stator disks 14 and the stator rings 22 are pressed in the direction of the inlet 16 or in the direction of the outlet 18.
  • the first stator disc 14 is pressed against a housing inner side 30 and abuts flat against this. As a result, a good heat transfer between the first stator 14 and the pump housing 20 is ensured.
  • a housing flange 32 is provided, which is connected to the housing 20, for example by screwing.
  • the housing flange 32 is pulled relative to the housing 20 to block, so that the housing flange 32 bears in particular flat on an outer side 34 of the housing.
  • An axial joint gap between the housing flange 32 and the housing 20 is not provided.
  • the housing flange 32 has a radially inwardly facing, annular projection 36. On an inner side 38 of the projection 36, based on a conveying direction 40, the last or outlet side stator disk is located.
  • the assembly of the vacuum pump is done by the example ring-segment-shaped stator 14 are inserted from the outside between the rotor disks 12. Between adjacent stator discs 14, the particular annular stator rings 22 and the spring element 24 are arranged. Subsequently, the preassembled stator-rotor unit is inserted into the housing 20. For this purpose, a radial mounting gap 42 is provided. Subsequently, the mounting of the housing flange 32, whereby the individual stator discs 14 are positioned accurately and at the same time due to the spring element 24 caused by the axial forces 26, 28 a flat contact for heat dissipation to the surfaces 30, 38 is realized.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

Die Erfindung betrifft eine Vakuumpumpe, insbesondere eine Turbomolekularpumpe.The invention relates to a vacuum pump, in particular a turbomolecular pump.

Vakuumpumpen, wie beispielsweise Turbomolekularpumpen, weisen mehrere mit einer Rotorwelle verbundene Rotorscheiben auf, die den schnelldrehenden Rotor ausbilden. Zusätzlich zu dem Rotor ist in dem Pumpengehäuse ein Stator angeordnet. Der Stator weist mehrere Statorscheiben sowie mehrere Statorringe auf. Die Statorscheiben sind jeweils zwischen benachbarten Rotorscheiben angeordnet. Üblicherweise ist am Pumpeneinlass eine Rotorscheibe und am Pumpenauslass Statorscheiben angeordnet. Die Statorscheiben sind üblicherweise als Ringsegmente ausgebildet, so dass die einzelnen eine Statorscheibe ausbildenden Ringsegmente zur Montage von außen zwischen benachbarte Rotorscheiben eingeschoben werden können. Da der Abstand der Statorscheiben exakt definiert sein muss, um ein Berühren der Rotor- und Statorscheiben zu vermeiden, sind zwischen den Statorscheiben Statorringe angeordnet. Die Statorringe umgeben somit radial jeweils die Rotorscheiben. Bei den Statorringen handelt es sich vorzugsweise um gesonderte Bauteile, wobei es auch möglich ist, dass die Statorringe jeweils mit einer Statorscheibe verbunden oder einstückig ausgebildet sind. Mit derartigen aus Halb-Ringen zusammengesetzten Statorringen und -scheiben kann eine bessere Wärmeleitfähigkeit erzielt werden. Allerdings sind derartige Statorringe teuer.Vacuum pumps, such as turbomolecular pumps, have a plurality of rotor disks connected to a rotor shaft forming the high speed rotor. In addition to the rotor, a stator is disposed in the pump housing. The stator has a plurality of stator disks and a plurality of stator rings. The stator disks are each arranged between adjacent rotor disks. Usually, a rotor disk is arranged at the pump inlet and stator disks are arranged at the pump outlet. The stator disks are usually designed as ring segments, so that the individual stator segments forming a ring segments for mounting from the outside between adjacent rotor disks can be inserted. Since the distance of the stator disks must be defined exactly to avoid contact between the rotor and stator disks, stator rings are arranged between the stator disks. The stator rings thus radially surround the rotor disks. The stator rings are preferably separate components, wherein it is also possible that the stator rings are each connected to a stator disk or formed in one piece. With such composed of half-rings stator rings and - Slices can be achieved a better thermal conductivity. However, such stator rings are expensive.

Zur Montage der Vakuumpumpe erfolgt üblicherweise ein Anordnen der Statorscheiben zwischen den Rotorscheiben sowie ein entsprechendes Anordnen der Statorringe zwischen den Statorscheiben. Das derart vormontierte Rotor-Stator-Element wird sodann in axialer Richtung in das Pumpengehäuse eingeschoben. Hierzu ist ein radialer Montagespalt vorgesehen. In montiertem Zustand liegt die in Pumprichtung erste Statorscheibe oder der erste Statorring an einer Innenseite des Pumpengehäuses in axialer Richtung an. Auf der gegenüberliegenden Seite liegt der in Pumprichtung letzte Statorring oder die letzte Statorscheibe an einer Innenseite eines Gehäuseflansches an. Der Gehäuseflansch wird entsprechend eines ringförmigen Deckels mit dem Pumpengehäuse verbunden, üblicherweise verschraubt. Bei der Montage besteht die Anforderung, dass die Statorscheiben exakt positioniert sind und ferner eine gute Wärmeübertragung zwischen dem Stator und dem Pumpengehäuse gewährleistet ist. Hierbei muss des Weiteren ein Toleranzausgleich erfolgen, wobei sich aufgrund der Vielzahl von Statorscheiben und Statorringen die Toleranzen in axialer Richtung addieren können. Zur exakten Positionierung der Statorscheiben und zur thermischen Ankopplung des Stators an dem Pumpengehäuse ist es bekannt, zwischen dem Gehäuseflansch und dem Gehäuse einen axialen Fügespalt vorzusehen. Durch Verbinden des Gehäuseflansches mit dem Pumpengehäuse kann aufgrund des axialen Fügespalts sichergestellt werden, dass der Stapel aus Statorscheiben und Statorringen sowohl gegen die Gehäuseinnenseite als auch gegen die Innenseite des Gehäuseflansches gedrückt wird, so dass sowohl eine Positionierung als auch eine thermische Ankopplung gewährleistet ist. Hierbei muss die Breite des axialen Fügespalts derart gewählt werden, dass auch sich addierende Toleranzen ausgeglichen werden können.For mounting the vacuum pump is usually carried out an arrangement of the stator between the rotor discs and a corresponding arrangement of the stator between the stator discs. The thus pre-assembled rotor-stator element is then inserted in the axial direction in the pump housing. For this purpose, a radial mounting gap is provided. In the assembled state, the first stator disk or the first stator ring in the pumping direction abuts on an inner side of the pump housing in the axial direction. On the opposite side, the last stator ring in the pumping direction or the last stator disk is located on an inner side of a housing flange. The housing flange is connected to the pump housing according to an annular cover, usually screwed. During assembly, there is a requirement that the stator discs are accurately positioned and also ensures good heat transfer between the stator and the pump housing. In this case, furthermore, a tolerance compensation must take place, wherein due to the large number of stator disks and stator rings, the tolerances can add in the axial direction. For exact positioning of the stator and the thermal coupling of the stator to the pump housing, it is known to provide an axial joint gap between the housing flange and the housing. By connecting the housing flange with the pump housing can be ensured due to the axial joint gap that the stack of stator and stator is pressed against both the inside of the housing and against the inside of the housing flange, so that both a positioning and a thermal coupling is guaranteed. In this case, the width of the axial joint gap must be selected such that also adding tolerances can be compensated.

Aus konstruktiven Gründen ist es jedoch häufig nicht möglich, einen axialen Fügespalt vorzusehen. Vielmehr besteht die Anforderung, dass der Gehäuseflansch eine zum Pumpengehäuse, insbesondere in axiale Richtung, definierte Lage aufweist. Üblicherweise wird hierbei der Gehäuseflansch fest mit dem Pumpengehäuse verbunden bzw. auf Block gezogen. Bei einer Konstruktion ohne axialen Fügespalt muss der Toleranzausgleich, die axiale Positionierung der Statorscheiben sowie die thermische Ankopplung des Stators an das Pumpengehäuse somit auf andere Weise erfolgen. Hierzu ist es bekannt, insbesondere hochvakuumseitig, d.h. am Pumpeneinlass, zwischen der ersten Statorscheibe und der Gehäuseinnenseite einen Elastomerring vorzusehen. Neben einem erhöhten Montageaufwand weist das Vorsehen eines Elastormerrings den Nachteil auf, dass das Material insbesondere bei längerer Betriebsdauer fließt und sich somit die Positionsgenauigkeit der Statorscheiben verschlechtert. Auch ist der Wärmeübergang zwischen der Statorscheibe und dem Gehäuse durch das Vorsehen des Elastomerrings verschlechtert, so dass insbesondere nach längerer Betriebsdauer die erforderliche Wärmeabfuhr ggf. nicht sichergestellt werden kann. Des Weiteren weist ein Elastormerring den Nachteil auf, dass das Material abdampft und insofern Bestandteile aus dem Elastormermaterial in das zu fördernde Gas gelangen. Des Weiteren ist es bei Pumpen, die keinen axialen Fügespalt zwischen dem Pumpengehäuse und dem Gehäuseflansch aufweisen, bekannt, anstelle des Vorsehens eines Elastormerrings einen unelastischen Zwischenring vorzusehen, der jedoch sodann exakt auf die einzelne Pumpe abgestimmt sein muss. Durch einen derartigen Ring muss die bei jeder einzelnen Pumpe variierende Toleranz ausgeglichen werden. Hierbei handelt es sich um ein aufwändiges Verfahren.For structural reasons, however, it is often not possible to provide an axial joint gap. Rather, there is the requirement that the housing flange has a pump housing, in particular in the axial direction, defined position. Usually, in this case, the housing flange is firmly connected to the pump housing or pulled to block. In a construction without an axial joint gap, the tolerance compensation, the axial positioning of the stator disks and the thermal coupling of the stator to the pump housing must thus be carried out in a different manner. For this purpose it is known, in particular high vacuum side, i. at the pump inlet, between the first stator and the inside of the housing to provide an elastomeric ring. In addition to an increased installation effort, the provision of an elastomeric ring has the disadvantage that the material flows in particular during prolonged operation and thus deteriorates the position accuracy of the stator. Also, the heat transfer between the stator and the housing is deteriorated by the provision of the elastomeric ring, so that in particular after a long period of operation, the required heat dissipation may not be ensured. Furthermore, an elastomer ring has the disadvantage that the material evaporates and in that components of the elastomeric material pass into the gas to be delivered. Furthermore, it is known for pumps that have no axial joint gap between the pump housing and the housing flange, instead of providing an elastomeric ring to provide an inelastic intermediate ring, but then must be matched exactly to the individual pump. Such a ring must compensate for the varying tolerance of each individual pump. This is a complex process.

Aus DE 100 10 371 sowie DE 90 13 672 ist das Vorsehen von Federringen zwischen zwei benachbarten Statorringen bekannt. Dies weist jedoch den Nachteil auf, dass durch derartige Distanz- oder Federringe die erforderliche geringe Toleranz nur schwer realisierbar ist.Out DE 100 10 371 such as DE 90 13 672 is the provision of spring washers between two adjacent stator known. However, this has the disadvantage that the required low tolerance is difficult to achieve by such spacers or spring rings.

Aufgabe der Erfindung ist es, eine Vakuumpumpe zu schaffen, bei der die Statorscheiben eine hohe Positionierungsgüte aufweisen und der Stator ferner thermisch gut an das Pumpengehäuse gekoppelt ist.The object of the invention is to provide a vacuum pump in which the stator discs have a high positioning quality and the stator is also thermally coupled well to the pump housing.

Die Lösung der Aufgabe erfolgt erfindungsgemäß durch die Merkmale des Anspruchs 1.The object is achieved according to the invention by the features of claim 1.

Die erfindungsgemäße Vakuumpumpe, bei der es sich insbesondere um eine Turbomolekularpumpe handelt, weist einen in einem Pumpengehäuse angeordneten Rotor und einen Stator auf. Der Rotor weist mehrere Rotorscheiben auf, wobei zwischen benachbarten Rotorscheiben jeweils eine Statorscheibe angeordnet ist. Zwischen benachbarten Statorscheiben sind Statorringe angeordnet. Am Pumpeneinlass und am Pumpenauslass ist jeweils eine Statorscheibe oder ein Statorring angeordnet, die bzw. der vorzugsweise an einer Gehäuseinnenseite bzw. einer Innenseite eines Gehäuseflansches anliegt. Hierdurch ist die Wärmeübertragung zwischen Stator und Pumpengehäuse gewährleistet. Erfindungsgemäß ist zwischen zwei benachbarten Statorscheiben ein die Statorscheiben auseinanderdrückendes Federelement angeordnet. Das Federelement bringt somit auf die Statorscheiben Axialkräfte auf, so dass die axial erste und letzte Statorscheibe bzw. der axial erste und letzte Statorring gegen die Gehäuseinnenseite bzw. die Innenseite des Gehäuseflansches gedrückt wird. Hierdurch ist eine exakte Positionierung der Statorscheiben sowie ein guter Wärmeübergang zwischen Stator und Pumpengehäuse gewährleistet. Insbesondere erfolgt durch das Federelement ein Toleranzausgleich der Statorscheiben und Statorringe. Bei dem erfindungsgemäßen Vorsehen eines Federelements zwischen zwei benachbarten Statorscheiben kann ein axialer Fügespalt zwischen dem Gehäuseflansch und dem Gehäuse entfallen, so dass der Gehäuseflansch in axial definierter Position gegenüber dem Pumpengehäuse angeordnet ist.The vacuum pump according to the invention, which is in particular a turbomolecular pump, has a rotor arranged in a pump housing and a stator. The rotor has a plurality of rotor disks, wherein in each case a stator disk is arranged between adjacent rotor disks. Stator rings are arranged between adjacent stator disks. At the pump inlet and at the pump outlet in each case a stator disc or a stator ring is arranged, which preferably bears against a housing inner side or an inner side of a housing flange. As a result, the heat transfer between the stator and pump housing is guaranteed. According to the invention, a stator element which presses apart the stator disks is arranged between two adjacent stator disks. The spring element thus applies axial forces to the stator disks, so that the axially first and last stator disk or the axially first and last stator ring is pressed against the inside of the housing or the inside of the housing flange. As a result, an exact positioning of the stator and a good heat transfer between the stator and the pump housing is guaranteed. In particular, by the spring element is a tolerance compensation of the stator and stator rings. In the provision according to the invention of a spring element between two adjacent stator disks, an axial joint gap between the housing flange and the housing can be omitted, so that the housing flange is arranged in an axially defined position relative to the pump housing.

Erfindungsgemäß ist das Federelement derart ausgebildet, dass durch das Federelement ein Statorring ersetzt wird. Hierbei weist das Federelement in bevorzugter Ausführungsform eine in Richtung der Rotorscheibe weisende Innenfläche auf, die entsprechend einem Statorring ausgebildet ist. Hierdurch ist gewährleistet, dass auch im Bereich des Federelements kein oder nur ein geringfügig höheres Rückströmen des geförderten Gases erfolgt.According to the invention, the spring element is designed such that a stator ring is replaced by the spring element. Here, the spring element in preferred embodiment, pointing in the direction of the rotor disc inner surface which is formed according to a stator ring. This ensures that even in the region of the spring element no or only a slightly higher return flow of the delivered gas takes place.

Insbesondere ist das Federelement zwischen zwei unmittelbar benachbarten Statorscheiben angeordnet, so dass das Federelement an beiden Statorscheiben, insbesondere unmittelbar anliegt, wobei das Federelement gegebenenfalls zusätzlich eine Anlagescheibe oder dergleichen aufweisen kann, um eine möglichst flächige Anlage zu realisieren. Der Gehäuseflansch kann somit, bezogen auf das Gehäuse, auf Block gezogen werden.In particular, the spring element is arranged between two directly adjacent stator disks, so that the spring element bears against both stator disks, in particular directly, wherein the spring element may optionally additionally have a contact disk or the like in order to realize the largest possible possible contact. The housing flange can thus, based on the housing, be pulled to block.

Vorzugsweise ist das Federelement zwischen zwei in einem mittleren Bereich angeordneten Statorscheiben vorgesehen. Sind beispielsweise zehn Statorscheiben vorgesehen, so ist es bevorzugt, dass das Federelement im Bereich der in axialer Richtung vierten, fünften oder sechsten Statorscheibe angeordnet ist. Besonders bevorzugt ist es, dass das Federelement zwischen den beiden mittleren Statorscheiben angeordnet ist. Ggf. kann auch mehr als ein Federelement vorgesehen sein. Das Anordnen des Federelements in einem mittleren Bereich hat insbesondere den Vorteil, dass sich die axialen Toleranzen der Statorscheiben und Statorringe nicht vollständig addieren, so dass die Gesamttoleranz in axialer Richtung geringer ist.The spring element is preferably provided between two stator disks arranged in a central region. If, for example, ten stator disks are provided, then it is preferred for the spring element to be arranged in the region of the fourth, fifth or sixth stator disk in the axial direction. It is particularly preferred that the spring element is arranged between the two central stator disks. Possibly. can also be provided more than one spring element. The arrangement of the spring element in a middle region has the particular advantage that the axial tolerances of the stator disks and stator rings do not add up completely, so that the overall tolerance in the axial direction is lower.

Vorzugsweise umgibt das Federelement eine Rotorscheibe, insbesondere vollständig. Besonders bevorzugt ist es, dass das Federelement ringförmig ausgebildet ist. Bei einer Anordnung des Federelements in einem mittleren Bereich ist bereits eine gute Wärmeabfuhr von der jeweils einen Statorhälfte auf das Pumpengehäuse bzw. den Gehäuseflansch gewährleistet. Gegebenenfalls kann das Federelement aus Metall ausgebildet sein oder Metall aufweisen, um die Wärmeleitfähigkeit zwischen Statorringen bzw. Statorscheiben im mittleren Bereich zu verbessern.Preferably, the spring element surrounds a rotor disk, in particular completely. It is particularly preferred that the spring element is annular. In an arrangement of the spring element in a central region, a good heat dissipation is already ensured by the one stator half on the pump housing or the housing flange. Optionally, the spring element may be formed of metal or have metal in order to improve the thermal conductivity between stator rings or stator disks in the central region.

Das Federelement kann jedoch auch Elastomer aufweisen oder beispielsweise als Elastomerring ausgebildet sein. Dies ist möglich, da die hierbei auftretende Materialabdampfung im mittleren Bereich akzeptabel ist.However, the spring element may also have elastomer or be formed for example as an elastomer ring. This is possible because the occurring material evaporation in the middle range is acceptable.

Nachfolgend wird die Erfindung anhand einer bevorzugten Ausführungsform unter Bezugnahme auf die anliegende Zeichnung näher erläutert.The invention will be explained in more detail with reference to a preferred embodiment with reference to the accompanying drawings.

Die Zeichnung zeigt eine schematische, stark vereinfachte Schnittansicht einer Vakuumpumpe.The drawing shows a schematic, greatly simplified sectional view of a vacuum pump.

Die Vakuumpumpe weist eine Rotorwelle 10 auf, die mehrere den Rotor ausbildende Rotorscheiben 12 trägt. Zwischen benachbarten Rotorscheiben 12 sind Statorscheiben 14 angeordnet. Ferner ist im Bereich eines Pumpenauslasses 18 im dargestellten Ausführungsbeispiel eine Statorscheibe 14 angeordnet. Im Bereich eines Pumpeneinlasses 16 ist eine Rotorscheibe 12 angeordnet. Die Statorscheiben 14 sind in einem Gehäuse 20 angeordnet, wobei zwischen benachbarten Statorscheiben jeweils ein Statorring 22 angeordnet ist. Die Statorringe 22 umgeben somit jeweils eine Rotorscheibe 12.The vacuum pump has a rotor shaft 10 which carries a plurality of rotor disks 12 forming the rotor. Between adjacent rotor disks 12 stator disks 14 are arranged. Furthermore, a stator disc 14 is arranged in the region of a pump outlet 18 in the illustrated embodiment. In the area of a pump inlet 16, a rotor disk 12 is arranged. The stator disks 14 are arranged in a housing 20, wherein a stator ring 22 is arranged in each case between adjacent stator disks. The stator rings 22 thus each surround a rotor disk 12.

Erfindungsgemäß ist im dargestellten Ausführungsbeispiel zwischen den beiden mittleren Statorringen 14 ein Federelement 24 angeordnet, das den entsprechenden Statorring ersetzt. Durch das insbesondere aus einem Metallring hergestellte Federelement 24 werden in beide Axialrichtungen 26, 28 Axialkräfte auf die Statorscheiben 14 sowie die Statorringe 22 ausgeübt. Hierdurch wird im dargestellten Ausführungsbeispiel jeweils die Hälfte der Statorscheiben 14 sowie der Statorringe 22 in Richtung des Einlasses 16 bzw. in Richtung des Auslasses 18 gedrückt. Im Bereich des Einlasses 16 wird die erste Statorscheibe 14 gegen eine Gehäuseinnenseite 30 gedrückt und liegt an dieser flächig an. Hierdurch ist ein guter Wärmeübergang zwischen der ersten Statorscheibe 14 und dem Pumpengehäuse 20 gewährleistet.According to the invention, a spring element 24 is disposed in the illustrated embodiment between the two central stator rings 14, which replaces the corresponding stator ring. The spring element 24, which is produced in particular from a metal ring, exerts axial forces on the stator disks 14 and the stator rings 22 in both axial directions 26, 28. In this way, in the illustrated embodiment, in each case half of the stator disks 14 and the stator rings 22 are pressed in the direction of the inlet 16 or in the direction of the outlet 18. In the region of the inlet 16, the first stator disc 14 is pressed against a housing inner side 30 and abuts flat against this. As a result, a good heat transfer between the first stator 14 and the pump housing 20 is ensured.

Auf der Auslassseite 18 ist ein Gehäuseflansch 32 vorgesehen, der mit dem Gehäuse 20, beispielsweise durch Verschrauben, verbunden ist. Im dargestellten Ausführungsbeispiel ist der Gehäuseflansch 32 gegenüber dem Gehäuse 20 auf Block gezogen, so dass der Gehäuseflansch 32 an einer Außenseite 34 des Gehäuses insbesondere flächig anliegt. Ein axialer Fügespalt zwischen dem Gehäuseflansch 32 und dem Gehäuse 20 ist nicht vorgesehen. Der Gehäuseflansch 32 weist einen radial nach innen weisenden, ringförmigen Ansatz 36 auf. An einer Innenseite 38 des Ansatzes 36 liegt die, bezogen auf eine Förderrichtung 40, letzte bzw. auslassseitige Statorscheibe an.On the outlet side 18, a housing flange 32 is provided, which is connected to the housing 20, for example by screwing. In the illustrated embodiment, the housing flange 32 is pulled relative to the housing 20 to block, so that the housing flange 32 bears in particular flat on an outer side 34 of the housing. An axial joint gap between the housing flange 32 and the housing 20 is not provided. The housing flange 32 has a radially inwardly facing, annular projection 36. On an inner side 38 of the projection 36, based on a conveying direction 40, the last or outlet side stator disk is located.

Die Montage der Vakuumpumpe erfolgt, indem die beispielsweise ringsegmentförmig ausgebildeten Statorscheiben 14 von außen zwischen die Rotorscheiben 12 gesteckt werden. Zwischen benachbarte Statorscheiben 14 werden die insbesondere ringförmig ausgebildeten Statorringe 22 sowie das Federelement 24 angeordnet. Anschließend erfolgt ein Einstecken der vormontierten Stator-Rotor-Einheit in das Gehäuse 20. Hierzu ist ein radialer Montagespalt 42 vorgesehen. Anschließend erfolgt die Montage des Gehäuseflansches 32, wodurch die einzelnen Statorscheiben 14 exakt positioniert werden und gleichzeitig aufgrund der durch das Federelement 24 hervorgerufenen Axialkräfte 26, 28 ein flächiger Kontakt zur Wärmeabfuhr an den Flächen 30, 38 realisiert ist.The assembly of the vacuum pump is done by the example ring-segment-shaped stator 14 are inserted from the outside between the rotor disks 12. Between adjacent stator discs 14, the particular annular stator rings 22 and the spring element 24 are arranged. Subsequently, the preassembled stator-rotor unit is inserted into the housing 20. For this purpose, a radial mounting gap 42 is provided. Subsequently, the mounting of the housing flange 32, whereby the individual stator discs 14 are positioned accurately and at the same time due to the spring element 24 caused by the axial forces 26, 28 a flat contact for heat dissipation to the surfaces 30, 38 is realized.

Claims (10)

  1. Vacuum pump, particularly turbomolecular pump, comprising
    a rotor arranged in a pump housing (20) and comprising a plurality of rotor disks (12), and
    a stator arranged in the pump housing (20), said stator comprising stator disks (14) each arranged between adjacent rotor disks (12), and stator rings (22) arranged between the stator disks (14),
    wherein, between two adjacent stator disks (14), a spring element (24) is arranged which is operative to press apart the stator disks (14) and the stator rings (22),
    characterized in that
    the spring element (24) replaces a stator ring (22).
  2. Vacuum pump according to claim 1, characterized in that the spring element (24) is arranged in abutment on the two adjacent stator disks (14).
  3. Vacuum pump according to claim 1 or 2, characterized in that, under the effect of the spring element (24), an axial force (26, 28) acts on the stator disks (14) and the stator rings (22).
  4. Vacuum pump according to any one of claims 1 to 3, characterized in that the spring element (24) is arranged between two stator disks (14) arranged in an intermediate region, particularly between the two stator disks (14) in the mid-position.
  5. Vacuum pump according to any one of claims 1 to 4, characterized in that the spring element (24) surrounds a rotor disk (12) which particularly is ring-shaped.
  6. Vacuum pump according to any one of claims 1 to 5, characterized in that the spring element (24) comprises an elastomer.
  7. Vacuum pump according to any one of claims 1 to 6, characterized in that the stator, for heat transfer, is arranged in axial abutment on a housing inner side (30) and on a housing flange (32) opposite to thereto.
  8. Vacuum pump according to claim 7, characterized in that the housing flange (32) is tightly connected to the pump housing (20), particularly by threaded engagement.
  9. Vacuum pump according to claim 7 or 8, characterized in that the housing flange (32) is arranged in axial abutment on the pump housing (20).
  10. Vacuum pump according to any one of claims 1 to 9, characterized in that, between the stator disks (14) and the pump housing (20) as well as between the stator rings (22) and the pump housing (20), a radial installation gap (42) is provided.
EP12194041.5A 2011-12-23 2012-11-23 Vacuum pump Active EP2607706B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE202011109517U DE202011109517U1 (en) 2011-12-23 2011-12-23 vacuum pump

Publications (3)

Publication Number Publication Date
EP2607706A2 EP2607706A2 (en) 2013-06-26
EP2607706A3 EP2607706A3 (en) 2014-04-09
EP2607706B1 true EP2607706B1 (en) 2018-10-17

Family

ID=47428489

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12194041.5A Active EP2607706B1 (en) 2011-12-23 2012-11-23 Vacuum pump

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Country Link
EP (1) EP2607706B1 (en)
DE (1) DE202011109517U1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023213458A1 (en) * 2022-05-05 2023-11-09 Pfeiffer Vacuum Turbomolecular vacuum pump and assembly method thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2552793A (en) 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9013671U1 (en) * 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator for a turbomolecular vacuum pump
DE9013672U1 (en) * 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator for a turbomolecular vacuum pump
DE10010371A1 (en) * 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolecular pump
DE102008058149A1 (en) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbo-molecular pump, has rotor element arranged in pump housing, and stator rings surrounding rotor element, where rings exhibit attachment piece extending in longitudinal direction such that adjacent stator ring is arranged within piece

Non-Patent Citations (1)

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Title
None *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023213458A1 (en) * 2022-05-05 2023-11-09 Pfeiffer Vacuum Turbomolecular vacuum pump and assembly method thereof
FR3135306A1 (en) * 2022-05-05 2023-11-10 Pfeiffer Vacuum Turbomolecular vacuum pump and assembly process

Also Published As

Publication number Publication date
DE202011109517U1 (en) 2013-03-25
EP2607706A3 (en) 2014-04-09
EP2607706A2 (en) 2013-06-26

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