EP2600323A2 - Procédé et un dispositif de réception orthochromatique d'une image numérique - Google Patents

Procédé et un dispositif de réception orthochromatique d'une image numérique Download PDF

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Publication number
EP2600323A2
EP2600323A2 EP12455010.4A EP12455010A EP2600323A2 EP 2600323 A2 EP2600323 A2 EP 2600323A2 EP 12455010 A EP12455010 A EP 12455010A EP 2600323 A2 EP2600323 A2 EP 2600323A2
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EP
European Patent Office
Prior art keywords
line
sensors
color
images
pixel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12455010.4A
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German (de)
English (en)
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EP2600323A3 (fr
Inventor
Konrad Mayer
Andreas Vrabl
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AIT Austrian Institute of Technology GmbH
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AIT Austrian Institute of Technology GmbH
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Publication date
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Publication of EP2600323A2 publication Critical patent/EP2600323A2/fr
Publication of EP2600323A3 publication Critical patent/EP2600323A3/fr
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07D—HANDLING OF COINS OR VALUABLE PAPERS, e.g. TESTING, SORTING BY DENOMINATIONS, COUNTING, DISPENSING, CHANGING OR DEPOSITING
    • G07D13/00—Handling of coins or of valuable papers, characterised by a combination of mechanisms not covered by a single one of groups G07D1/00 - G07D11/00

Definitions

  • the invention relates to a method and a device for color-accurate recording of a digital image of transported printing units.
  • the invention now solves the problem of color distortion in flutter effects, which can occur when the hue or the ratio of different spectral intensities to each other with multiple line or TDI cameras looking at the same place is checked.
  • Multiple cameras are used when a single color camera is unavailable or too expensive. For example, there are hardly any line scan cameras that simultaneously record visible and near infrared spectral ranges. In this case, the arrangement of several cameras, each with a suitable spectral sensitivity is inevitable.
  • the fluttering of a printing unit has the problem that, due to the different viewing angles of individual recording units with different wavelength sensitivity, the detected hue, i. the ratio of the brightness values at different wavelengths in individual wavelength ranges to each other, and the detected color saturation due to the warping or tilting of the printing unit relative to the light source and the respective recording unit deviates from the hue and the color saturation of the printing unit.
  • the determination and testing of the hue or the ratio of visible to infrared reflectance is an essential criterion which must be strictly adhered to for the individual areas of the bill to be checked. Even small deviations of the hue cause a bill to be detected as invalid and rejected. By strongly fluttering the bill, as mentioned above, a false color tone can be detected and this bill can be discriminated as being flawed or fake even though it is actually true.
  • the invention solves this problem in a device of the type mentioned above with the characterizing features of claim 1. Furthermore, the invention solves this problem in a device of the type mentioned above with the characterizing features of claim 2. Furthermore, the invention solves the problem in a method of the type mentioned above with the features of claim 13.
  • a conveying device for conveying the objects to be picked, in particular of printing units or bills, in a predetermined conveying direction and at least two arranged on each different receiving units, associated with each other, line sensors, each receiving unit each has an optics provided.
  • each line sensor includes a number of pixel sensors, each having a line of sight from the optics, the visual rays of each line sensor are each in a line sensor associated Seimmere so that the recording units are arranged such that the heights of the associated line sensors identical are and are at an angle to the conveying direction of the conveyor, and the mutually associated line sensors are each designed for the detection of light in mutually different wavelength ranges.
  • a conveying device for conveying the objects to be picked in a predetermined conveying direction and at least two receiving units each comprising an optical system, wherein a number of line sensors is arranged on each receiving unit, each of the line sensors of a receiving unit each having a line sensor of each of the remaining Receiving units is provided, such that each line sensor includes a number of pixel sensors, each having an outgoing optical line of sight, and these visual rays of each line sensor are each in a line sensor associated with the levelness, and that the receiving units are arranged such the elevations of the respectively associated line sensors are identical to one another and are at an angle to the conveying direction of the conveyor, and the associated line sensors are each for the detection of light in v oncoat different wavelength ranges are formed.
  • Such a device according to the invention makes it possible to carry out a TDI method and at the same time reduces the effects of the fluttering of printing units, in particular banknotes, during transport to the color tone determined during the recording since in this case several recording lines can be illuminated by flutter effects from different angles. is integrated and the effects can be approximately out.
  • the following measures can be carried out individually or in combination. It may be provided that the associated line sensors of the individual recording units capture the same area of objects of a flat flat object, and / or that the associated, in particular all, line sensors have the same number of pixel sensors, and / or that for each pixel sensor, each of the line sensors each of the respective line sensor associated line sensors each have a pixel sensor is provided which detects the same item point.
  • a structurally simple embodiment of the invention which allows an advantageous recording of objects, provides that the Seariae in which the visual rays of the pixel sensors of the associated line sensors are normal to the conveying direction or that the angle between the respective plane and a normal the conveying direction standing level is not more than 10 °, in particular at most 5 °.
  • the visual beams of the pixel sensors in each case of a line sensor are at an angle of at most 30 °, in particular at an angle of at most 15 °.
  • the object area covered by the associated line sensors extends normal to the direction of travel of the object, optionally with a deviation of at most 10 °, in particular at most 5 ° ,
  • the angle between two line beams of mutually associated line sensors, which image the same object point is at most 10 °, in particular at most 5 °.
  • each receiving unit in each case contains a number of line sensors, characterized by an accumulation unit connected downstream of the recording units, which dependent on the conveying speed of the conveyor according to a TDI method, the individual of the line sensors recorded line sensors accumulated at a time offset and at its output available.
  • the color line images of the associated line sensors or a composite of the line images of a comparison unit are supplied, which determines a comparison value for the match of the individual line images with a predetermined reference image and outputs a signal at its output when the Comparison value exceeds a predetermined threshold or falls below.
  • a structurally simple embodiment of the invention provides that the line directions of the individual line sensors in the same plane, in particular in the Seuße, lie and are tilted against each other.
  • An embodiment of the invention with which visually distortion-free images can be achieved, provides that the line sensors, viewed in the conveying direction of the conveyor, are arranged next to one another, in particular on a common straight line.
  • one unit is provided for determining a hue which determines the ratio of the respective brightness values to one another and as the hue value of the respective hue Pixels is available, in particular, the comparison of two color line images or two color images by comparing the thus determined ratio between the respective brightness values takes place.
  • the heights of the associated line sensors are identical and at an angle to the conveying direction of the conveyor, and the associated line sensors detect only light in different wavelength ranges, and in each case Line images are superimposed by associated line sensors and thereby a color line image is created, each of the line images is assigned to a color channel.
  • the invention relates to a method for recording line images of objects with a conveyor for conveying the objects to be recorded, in particular of printing units, such as bills, in a predetermined conveying direction and at least two arranged on each different receiving units, associated with each other line sensors, each receiving unit each about has optics, wherein each line sensor includes a number of pixel sensors, each having an outgoing optical line of sight, wherein the visual rays of each line sensor are each in a line sensor associated with the Seimmere.
  • the receiving units are arranged in such a way that the lifting levels of the associated line sensors are identical and at an angle to the conveying direction of the conveyor, and that the associated line sensors only detect light in mutually different wavelength ranges, and in each case line images of associated line sensors are superimposed and thereby a color line image is created, each of the line images is assigned to a color channel.
  • line images can be determined for different wavelength ranges, with the ratio of the individual color components being imaged with particularly great accuracy.
  • one hue is created in each case as the ratio of the respective brightness values to one another.
  • the advantages of the method according to the invention can be combined with the advantages of a TDI method by simultaneously taking several pictures of color line images at different object areas, wherein for each object area for each wavelength range a line image is determined by accumulation of all line images of this object area at the respective wavelength and in that in each case a color-line image is created for the respective subject area by the overlaying of line images of the same subject area.
  • a color image is created by assembling the individual color-line images.
  • the determined color line images or the determined color image is compared with a reference image or reference line images and a comparison value for the correspondence of the individual color line images with respectively associated reference line images or the color image a predetermined reference image is determined, wherein the comparison value is optionally compared with a predetermined threshold value and a signal is emitted when the comparison value exceeds or falls below a predetermined threshold.
  • two color line images or two color images are compared by comparing at least one relationship between each the brightness values of the individual color channels is determined that for each two corresponding pixels, one of which is on one and the other on the other color image or color line image, a pixel deviation is determined and that the pixel deviations are accumulated and thereby a total deviation between the color images or the color line images is determined.
  • Fig. 1 shows a detection device according to a first preferred embodiment in an oblique view.
  • Fig. 2 shows the in Fig. 1 shown detection device from another angle in the oblique.
  • Fig. 3 shows the in Fig. 1 illustrated embodiment of the invention in a front view.
  • Fig. 4 shows the in Fig. 1 illustrated embodiment in side elevation.
  • Fig. 5 shows a second preferred embodiment of the invention in side elevation.
  • Fig. 6 shows a further preferred embodiment of the invention in a front view.
  • Fig. 7 shows a further preferred embodiment of the invention with three receiving units in a front view.
  • Fig. 8 shows a further preferred embodiment for making TDI images in side view.
  • Fig. 9 shows the in Fig. 8 illustrated embodiment of the invention in a front view.
  • Fig. 10 shows schematically the further processing of the recorded image information.
  • Fig. 11 schematically shows the further processing of the recorded image information with a TDI method
  • Fig. 1 and Fig. 2 show a preferred detection device in the oblique view.
  • the detection device comprises two receiving units 1a, 1b each having a line sensor 2a, 2b, shown in FIG Fig. 3 ,
  • Each line sensor 2a, 2b comprises a number of pixel sensors 3a, 3b, shown in FIG Fig. 3 , which are each arranged in a row.
  • the pixel sensors 3a, 3b arranged on a line sensor 2a, 2b are each sensitive to the same wavelength and are of identical design.
  • two lighting units 13 are provided.
  • pixel sensors 3a, 3b are arranged with different wavelength sensitivity.
  • all the pixel sensors 3a of the first pick-up unit 1a are sensitive to red light
  • all the pixel sensors 3b of the second pick-up unit 1b are sensitive to blue light.
  • the individual line sensors 2a, 2b are identical except for the different wavelength sensitivity.
  • both line sensors 2 a, 2 b each include an optic 4 a, 4 b, which images the light emanating from an object region 5 onto the line sensor 2 a, 2 b of the respective recording unit 1 a, 1 b.
  • the detection device comprises a conveyor 6, the flat objects 7, in particular printing units, such as banknotes, along a predetermined direction of travel R, represented by the arrow, through the receiving area of the receiving units 1a, 1b transported.
  • a free-flight path as in FIG Fig. 4 illustrated, formed. This has the advantage that the object 7 can be recorded and imaged from both sides.
  • the detection device has two lighting units 13, which illuminate the object to be recorded 7 from all sides. If a recording is to be carried out from both sides of the article 7, lighting units 13 can also be arranged on the underside of the conveyor 6.
  • Fig. 3 shows the first embodiment of the invention in a front view.
  • the line sensors 2a, 2b of the receiving units 1a, 1b lie in the plane of the illustration.
  • For each one pixel sensor 3a, 3b is through the respective optics 4a, 4b of the receiving unit 1a, 1b respectively a Sehstrahl 9; 9a, 9b given.
  • All visual rays 9a, 9b emerging from the pixels 3a, 3b of a line sensor 2a, 2b are all in a plane of rise 10, shown in FIG Fig. 2 ,
  • Each line sensor 2 a, 2 b is thus assigned a lifting plane 10.
  • the two heights 10 of the line sensors 2a, 2b are identical, ie all outgoing from the line sensors 2a, 2b visual rays 9a, 9b lie in one and the same plane.
  • the two line sensors 2a, 2b are associated with each other and each form the same subject area 5 from.
  • the two line sensors 2a, 2b are arranged so that the individual pixel sensors 3a, 3b detect the same article region 5 of an object 7, which is moved on the conveyor 6 at a predetermined distance from the receiving units 1a, 1b over.
  • the receiving units 1a, 1b are arranged in a plane normal to the conveying direction R of the conveyor 6, wherein the line sensors 2a, 2b are arranged side by side on a common straight line.
  • the line directions of the individual line sensors 2a, in the same plane, particularly in the visual plane 10 lie against each other and at an angle ⁇ to be tilted ( Fig. 6 ).
  • the object 7 can be sharply imaged by tilting the receiving unit 1a, 1b according to the known Scheimpflug rule.
  • the exact assignment of the pixels of a picture line to the points on the different tilted recording units is not possible in this case alone by mechanical adjustment alone, but with the help of electronic interpolation, since the dot pitch changes depending on the tilt over the line.
  • the line sensors 2a, 2b, as in FIG Fig. 3 also be arranged in such a way that they do not cover the same article region 5 but still cover overlapping article regions 5.
  • the color tone determination is possible for the area where the object areas 5 of the line sensors 2a, 2b overlap each other.
  • Each of the pixel sensors 3a, 3b respectively creates a brightness value. All brightness values produced by the pixel sensors 3a, 3b of a line sensor 2a, 2b are combined into a line image according to the arrangement of the pixel sensors 3a, 3b in the respective line sensor 2a, 2b. The differently colored line images of the associated line sensors 2a, 2b are superimposed on each other. This creates a color line image, each of the line images corresponding to a color channel.
  • a color tone is created for each pixel in each case as the ratio of the respective brightness values to one another.
  • the hue becomes the respective pixel assigned.
  • the individual determined color line images or the determined color image are compared with a predetermined reference image or with individual predetermined reference line images.
  • both the individual determined brightness values of the line images and the determined color value can be used for comparison.
  • the relative or absolute deviation of the respectively determined color value from the corresponding color value in the reference image or reference line image can be used for comparison.
  • the comparison value is determined as a measure of the correspondence of the individual line images with a given reference image.
  • the comparison value is compared with a predetermined threshold. In the event that the match is below a predetermined threshold, a signal is emitted. This signal can ensure that the object in question 7, in particular a banknote, is removed from the conveyor 6.
  • the two line sensors 2a, 2b have the same number of pixel sensors 3a, 3b, wherein for each pixel sensor 3a on the line sensor 2a of the first receiving unit 1a a respective pixel sensor 3b is provided on the line sensor 2b of the second receiving unit 1b, the same point 5x the subject area 5 maps.
  • the visual rays 9a, 9b of the two pixel sensors 3a, 3b intersect each other at a point 5x on the object area 5. If the object 7 flutters during its movement, the area to be recorded or the line of object 7 to be picked up approaches the recording units 1a, 1b or moves away from them. In this case, the recorded line images can be corrected by corrective measures such as e.g. Equalization, enlargement, reduction or displacement are made to coincide, so that for individual surface areas of the article 7 each brightness information for different wavelength ranges are available.
  • All visual rays 9; 9a, 9b are in the same elevation 10; 10a, 10b. If the object 7 flutters, a change in brightness caused by the fluttering is registered to the same degree by the pixel sensors 3a, 3b of the recording units 1a, 1b. Two pixel sensors 3a, 3b on different recording units 1a, 1b, which image the same point 5x on the object 7, perceive different brightness values relative to the direction of travel 10, depending on the angle ⁇ of the object 7 in the recording area of the recording units 1a, 1b.
  • the ratio of the brightness values to one another and thus also the color tone which the two pixel sensors 3a, 3b determine is independent of the angle ⁇ of the object 7 relative to the direction of travel 10 in the recording area of the recording units 1a, 1b.
  • the plane of elevation 10, in which the visual beams 9a, 9b of the pixel sensors 3a, 3b of the recording units 1a, 1b are located is normal to the conveying direction.
  • the angle ⁇ between the respective lifting plane and a plane normal to the conveying direction R is not more than 10 °, in particular not more than 5 °. ( Fig. 5 )
  • the visual rays 9a, 9b of the pixel sensors 3a, 3b of a line sensor 2a, 2b should have the smallest possible angle ⁇ to each other.
  • the object area 7 on the object 7 covered by the associated line sensors 2 a, 2 b is normal to the direction of travel R of the object 7.
  • the object area 5 is at an angle of at most 10 °, in particular at most 5 ° , to a plane normal to the direction of travel R, such an embodiment is not shown in the figures.
  • the maximum angle ⁇ of two viewing eyes 9a, 9b which image the same object point 5x is at most 5 °. It can, however be provided that the maximum angle ⁇ up to 20 °, in particular up to 10 °.
  • Fig. 6 shows an alternative arrangement of the receiving units 1, wherein the line sensors 2a, 2b are arranged so that the line sensors 2a, 2b are pivoted to each other or at an angle.
  • Fig. 7 shows an arrangement with three receiving units 1a, 1b, 1c, each receiving unit 1a, 1b, 1c each line sensors 2a, 2b, 2c with pixel sensors with depending on the line sensor of different wavelength sensitivity.
  • the pixel sensors of the line sensor 2a of the first receiving unit 1a have a sensitivity in the red wavelength range
  • the pixel sensors of the line sensor 2b of the second pickup unit 1b have a sensitivity in the green wavelength range
  • the pixel sensors of the line sensor 2c of the third pickup unit 1c have a sensitivity in the blue wavelength range.
  • further recording units 1a, 1b, 1c may be provided, each with an optic 4a, 4b, 4c and with line sensors 2a, 2b, 2c, whose pixel sensors are sensitive in other wavelength ranges, this does not necessarily have a wavelength range of visible light It may also be provided pixel sensor with sensitivity in the ultraviolet or infrared wavelength range.
  • All line sensors 2a, 2b, 2c with pixel sensors, whose visual beams are in the same plane of lift 10, are considered to be associated with each other in the context of the invention. They each record the same subject area 5 or overlapping subject areas 5.
  • a comparison unit 12 shown in FIG 10 and FIG. 11 to provide the line images of the associated line sensors 2ax, 2bx, 2cx; 2ay, 2by, 2cy are supplied.
  • the comparison unit 12 is supplied with a reference image, which is compared line by line with the individual determined line images.
  • a comparison value for the correspondence of the individual line images with the reference image is determined, wherein the respective reference image is stored in a memory 14, which is connected upstream of the comparison unit.
  • deviations of the hue, ie the saturation and the color considered more as deviations of the brightness.
  • the comparison unit 12 outputs a signal at its output if the comparison value exceeds a predetermined threshold value. By this signal, the conveyor 6 is signaled that the item 7, in particular the bill, is faulty.
  • the conveyor 6 separates the faulty article 7.
  • FIGS. 8 and 9 A second preferred embodiment of the invention is in FIGS. 8 and 9 shown.
  • the second embodiment of the invention corresponds to the first embodiment, the individual differences being illustrated below.
  • the second embodiment of the invention relates to a device with two receiving units 1a, 1b, each comprising a plurality of line sensors 2ax, 2ay, 2az, 2bx, 2by, 2bz.
  • Each row sensor 2ax, 2ay, 2az of the first receiving unit 1a is assigned a respective line sensor 2bx, 2by, 2bz of the second receiving unit 1b, which respectively images the same object area 5.
  • the visual rays of the sensor pixels of associated line sensors 2ax, 2bx; 2ay, 2by; 2az, 2bz lie together in the same elevation 10x, 10y, 10z.
  • the line sensors 2ax, 2ay and 2az of the first receiving unit 1a are sensitive to the same first wavelength range.
  • the line sensors 2bx, 2by and 2bz of the second receiving unit 1b are sensitive to the same second wavelength range deviating from the first wavelength range.
  • the receiving units 1a, 1b are arranged such that the lifting levels 10x, 10y, 10z of the respectively associated line sensors 2ax, 2bx; 2ay, 2by; 2az, 2bz are identical and are at an angle to the conveying direction R of the conveyor 6.
  • multiple images of color line images are taken at different subject areas 5 simultaneously with the line sensors 2ax, 2ay, 2az, 2bx, 2by, 2bz. Recordings of the moving object 7 are carried out, object areas 5 being detected at different recording times of different line sensors 2 in accordance with a TDI method.
  • the line images derived from the same subject area 5 are added or accumulated. For each article region 5 and for each wavelength region, a line image is determined by accumulation of all line images of this article region 5 at the respective wavelength. By superimposing the line images respectively created for a wavelength range, one color line image for each of the object regions 5 is created in each case.
  • the object 7 is imaged onto the associated line sensors 2ax, 2bx at a first recording time.
  • the article 7 is detected at a subsequent recording time of the associated line sensors 2ay, 2by and at a later recording time of the associated line sensors 2az, 2bz.
  • the line images of the line sensors 2ax, 2ay and 2az thus determined are added together to obtain an accumulated line image in the color of the line sensors 2ax, 2ay, 2az. Further, the obtained line images of the line sensors 2bx, 2by and 2bz are added.
  • Fig. 11 is the further processing of three recording units 1a, 1b, 1c, each with three line sensors 2ax, 2ay, 2az, 2bx, 2by, 2bz, 2cx, 2cy, 2cz created signals shown schematically.
  • Each of the three receiving units 1a, 1b, 1c has in each case three line sensors 2ax, 2ay, 2az, 2bx, 2by, 2bz, 2cx, 2cy, 2cz, which are each sensitive to the same color channel.
  • a TDI method is performed each time by an accumulation unit 11a, 11b, 11c.
  • the accumulation units 11a, 11b, 11c are connected downstream of the line sensors 2 of the receiving units 1a, 1b, 1c and are driven according to the conveying speed of the conveyor 6 according to a TDI method.
  • the accumulation units 11a, 11b, 11c accumulate the individual line images recorded by the line sensors 2ax, 2ay, 2az, 2bx, 2by, 2bz, 2cx, 2cy, 2cz at a time offset from one another and make the determined results available at their output.
  • the brightness values determined by the respective line sensors 2ax, 2ay, 2az, 2bx, 2by, 2bz, 2cx, 2cy, 2cc of a recording unit 1a, 1b, 1c are supplied to an accumulation unit 11a, 11b, 11c assigned to the respective recording unit 1a, 1b, 1c.
  • the respective accumulation unit 11a, 11b, 11c supplies in each case the sum of the images of the same article region 5 of the article 7 from all the line sensors 2ax, 2ay, 2az, 2bx, 2by, 2bz, 2cx, 2cy, 2cz.
  • the result for an object region 5 present at the output of the accumulation units 11a, 11b, 11c is in each case made available for the determination of the hue. Since the accumulation units 11a, 11b, 11c respectively provide brightness values for different color channels, color information for each pixel supplied to a comparison unit 12 can be determined by calculating the brightness values.
  • the ratio of the brightness values in the individual color channels to each other can be determined as color information, the ratio of the brightness values in the individual color channels to each other, while the absolute measured brightness has less influence on the comparison result.
  • Two color line images or two color images are compared with each other by determining for each pixel of the color images or the color line images in each case at least one ratio between the brightness values of the individual color channels becomes. Subsequently, for every two corresponding pixels, ie pixels which are in the same position in the respective image, one on the one and the other on the other color image or color line image, a pixel deviation is determined. This can be done, for example, by subtracting the determined ratios and subsequent magnitude formation.
  • the pixel deviations are accumulated, thereby determining a total deviation between the color images or the color line images.
  • An essential advantage of this determination of a total deviation is that different brightnesses, which result from the fluttering of the object to be picked up, are not taken into account.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Controlling Sheets Or Webs (AREA)
  • Length Measuring Devices By Optical Means (AREA)
EP12455010.4A 2011-11-30 2012-11-27 Procédé et un dispositif de réception orthochromatique d'une image numérique Withdrawn EP2600323A3 (fr)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT517868A1 (de) * 2015-11-05 2017-05-15 Ait Austrian Inst Technology Verfahren zur Bestimmung des räumlichen Reflexionsverhaltens einzelner Gegenstandspunkte

Citations (3)

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Publication number Priority date Publication date Assignee Title
GB2159623A (en) * 1981-11-11 1985-12-04 Dainippon Printing Co Ltd Print inspecting method
US20100165095A1 (en) * 2008-06-27 2010-07-01 Nippon Electro-Sensory Devices Corporation Defect inspection device and defect inspection method for silicon wafer
US7839547B2 (en) * 2006-03-08 2010-11-23 Kabushiki Kaisha Toshiba Optical fiber illumination device and inspection apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2159623A (en) * 1981-11-11 1985-12-04 Dainippon Printing Co Ltd Print inspecting method
US7839547B2 (en) * 2006-03-08 2010-11-23 Kabushiki Kaisha Toshiba Optical fiber illumination device and inspection apparatus
US20100165095A1 (en) * 2008-06-27 2010-07-01 Nippon Electro-Sensory Devices Corporation Defect inspection device and defect inspection method for silicon wafer

Non-Patent Citations (1)

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Title
Schwarzbach: "Improved Banknote Quality through a 3rd Generation Inspection System", , 31. Mai 2004 (2004-05-31), XP002716006, Gefunden im Internet: URL:http://www.currencyaffairs.org/templates/files/library/OEBS_Improved_Banknote_Quality.pdf [gefunden am 2013-11-07] *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT517868A1 (de) * 2015-11-05 2017-05-15 Ait Austrian Inst Technology Verfahren zur Bestimmung des räumlichen Reflexionsverhaltens einzelner Gegenstandspunkte

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