EP2578360A3 - Grinding apparatus with a slot nozzle - Google Patents

Grinding apparatus with a slot nozzle Download PDF

Info

Publication number
EP2578360A3
EP2578360A3 EP12185898.9A EP12185898A EP2578360A3 EP 2578360 A3 EP2578360 A3 EP 2578360A3 EP 12185898 A EP12185898 A EP 12185898A EP 2578360 A3 EP2578360 A3 EP 2578360A3
Authority
EP
European Patent Office
Prior art keywords
axis
slot nozzle
grinding
grinding apparatus
grinding wheel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12185898.9A
Other languages
German (de)
French (fr)
Other versions
EP2578360B1 (en
EP2578360A2 (en
Inventor
Zdenek Zaruba
Christopher Knotts
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rolls Royce PLC
Original Assignee
Rolls Royce PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rolls Royce PLC filed Critical Rolls Royce PLC
Publication of EP2578360A2 publication Critical patent/EP2578360A2/en
Publication of EP2578360A3 publication Critical patent/EP2578360A3/en
Application granted granted Critical
Publication of EP2578360B1 publication Critical patent/EP2578360B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • B24B55/03—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant designed as a complete equipment for feeding or clarifying coolant
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)

Abstract

Apparatus for high speed grinding comprises a grinding wheel having a circumferential grinding surface, a machine for mounting and rotating the grinding wheel about the axis, a coolant supply system including a slot nozzle arranged to direct coolant fluid secantly to the grinding surface, the slot nozzle having an exit with an elongate axis and a short axis wherein the elongate axis is tilted relative to the axis of the grinding wheel.
Figure imgaf001
EP12185898.9A 2011-10-06 2012-09-25 Grinding apparatus with a slot nozzle Active EP2578360B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB1117243.4A GB201117243D0 (en) 2011-10-06 2011-10-06 Method and apparatus for grinding

Publications (3)

Publication Number Publication Date
EP2578360A2 EP2578360A2 (en) 2013-04-10
EP2578360A3 true EP2578360A3 (en) 2013-07-31
EP2578360B1 EP2578360B1 (en) 2016-02-24

Family

ID=45035244

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12185898.9A Active EP2578360B1 (en) 2011-10-06 2012-09-25 Grinding apparatus with a slot nozzle

Country Status (4)

Country Link
US (1) US20130095734A1 (en)
EP (1) EP2578360B1 (en)
JP (1) JP6087567B2 (en)
GB (1) GB201117243D0 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9393671B2 (en) * 2013-03-14 2016-07-19 Dimensional Control, Inc. Programmable coolant nozzle system for grinding
EP2937174A1 (en) * 2014-04-25 2015-10-28 Aktiebolaget SKF Grinding machine with liquid coolant injection nozzle
JP6280809B2 (en) * 2014-05-14 2018-02-14 株式会社ディスコ Grinding equipment
JP7012454B2 (en) * 2017-04-27 2022-01-28 株式会社岡本工作機械製作所 Manufacturing method of electrostatic suction chuck and manufacturing method of semiconductor device
US20220184771A1 (en) * 2020-12-14 2022-06-16 Applied Materials, Inc. Polishing system apparatus and methods for defect reduction at a substrate edge

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0924028A2 (en) * 1997-12-22 1999-06-23 Rolls-Royce Plc Method and apparatus for grinding
EP1153708A1 (en) * 2000-05-11 2001-11-14 ROLLS-ROYCE plc High speed milling
EP1375067A1 (en) * 2002-06-20 2004-01-02 Toyoda Koki Kabushiki Kaisha Grinding fluid supplying method and grinding machine
JP2005074580A (en) * 2003-09-01 2005-03-24 Toyoda Mach Works Ltd Grinding device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2899781A (en) * 1959-08-18 williams
US2163687A (en) * 1938-01-10 1939-06-27 Bucyrus Monighan Company Cutting
US2434679A (en) * 1945-05-15 1948-01-20 Norton Co Method and apparatus for grinding
US2818696A (en) * 1953-09-16 1958-01-07 Gulf Research Development Co Application of cutting fluids in grinding operations
JPS5141674Y2 (en) * 1972-09-28 1976-10-09
US3984213A (en) * 1974-11-06 1976-10-05 United Technologies Corporation Slow grinding technique
JP2001009720A (en) * 1999-06-22 2001-01-16 Hitachi Seiki Co Ltd Coolant supply method and device for grinding machine
DE102006009547A1 (en) * 2006-02-28 2007-08-30 Reishauer Ag Coolant nozzle correct setting monitoring method for grinding machine, involves comparing power consumption value obtained from two measurements to asses or displace setting of coolant nozzle

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0924028A2 (en) * 1997-12-22 1999-06-23 Rolls-Royce Plc Method and apparatus for grinding
EP1153708A1 (en) * 2000-05-11 2001-11-14 ROLLS-ROYCE plc High speed milling
EP1375067A1 (en) * 2002-06-20 2004-01-02 Toyoda Koki Kabushiki Kaisha Grinding fluid supplying method and grinding machine
JP2005074580A (en) * 2003-09-01 2005-03-24 Toyoda Mach Works Ltd Grinding device

Also Published As

Publication number Publication date
US20130095734A1 (en) 2013-04-18
EP2578360B1 (en) 2016-02-24
EP2578360A2 (en) 2013-04-10
JP2013082061A (en) 2013-05-09
JP6087567B2 (en) 2017-03-01
GB201117243D0 (en) 2011-11-16

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