EP2567092A1

EP2567092A1 - Microfluidic component, in particular a peristaltic micropump, and method for producing same

Info

Publication number: EP2567092A1
Application number: EP11709089A
Authority: EP
Inventors: Christian Dorrer
Original assignee: Robert Bosch GmbH
Current assignee: Robert Bosch GmbH
Priority date: 2010-05-04
Filing date: 2011-03-09
Publication date: 2013-03-13
Anticipated expiration: 2031-03-09
Also published as: DE102010028524A1; WO2011138070A1; EP2567092B1

Abstract

The invention relates to a microfluidic component (1), in particular a peristaltic micropump, at least comprising a layer structure made of a fluidic substrate (2), an actuation substrate (4) and an elastic membrane (3) arranged therebetween, characterised in that on the side adjoining the elastic membrane (3) the fluidic substrate (2) comprises a fluid chamber (5), the actuation substrate (4), at least on the side adjoining the elastic membrane (3), comprises at least two actuation components separated from each other, each of which is arranged at least partially opposite of the fluid chamber (5) and is able to act on the elastic membrane (3), and the actuation components can be actuated independently of each other, optionally by means of one or more actuators. The invention further relates to a method for producing a microfluidic component (1) and to the use thereof in a lab-on-chip system.

Description

Description title

Microfluidic component, in particular peristaltic micropump, and method for its production

The present invention relates to a microfluidic component, in particular a peristaltic micropump, and a method for its production.

State of the art

Macroscopic peristaltic pumps in radial and linear design are known from medical technology and chemical analysis. In these pumps, a flexible hose is compressed from the outside so that it comes to a directed displacement of the liquid contained therein.

Implementations of microtechnical pumps, inter alia with a peristaltic pumping principle, are described, for example, in the publication by N.-T. Nguyen and W. Dötzel "Micropumps - an overview of the state of development", Microtechnology, Jahrg., 109, (2001), 3, Carl Hanser Verlag, Munich. Compared to other types, peristaltic micropumps offer the advantage of a greatly simplified production because there are no check valves On the other hand, Nguyen et al., describe that the peristaltic micropumps require at least three pumping chambers connected by channels, each pumping chamber being bounded on one side by a pumping membrane A wave-like actuation of the pumping chambers can be used to pump a fluid in a desired direction, eg micropumps can be used for the transport of fluids in microfluidic systems. Microfluidic systems are used, for example, in the form of miniaturized analysis systems, so-called μΤΑε (Miniaturized Total Analysis System) or lab-on-chip systems or as microreactors. They find particular applications in molecular diagnostics, biotechnology, analytical, pharmaceutical and clinical chemistry, environmental analysis and food chemistry.

Disclosure of the invention

The subject matter of the present invention is a microfluidic component, in particular a peristaltic micropump, comprising at least one layer structure comprising a fluidic substrate, a drive substrate and an elastic membrane arranged therebetween, wherein the fluidic substrate has a fluid chamber on its side adjacent to the elastic membrane, the drive substrate , At least on its side adjacent to the elastic membrane side, at least two independent Aktuierungskomponenten each having at least partially disposed opposite the fluid chamber and can act on the elastic membrane and the Aktuierungskomponenten, optionally by one or more actuators, are independently actuated.

In other words, according to the invention, in the fluidic substrate, the at least three pumping chambers of the known peristaltic micropumps are replaced by a single main chamber. This advantageously results in a minimal fluidic resistance as well as an increased pumping rate. At the same time, the dead volume otherwise given by the connection channels between the pumping chambers can be eliminated.

According to the invention, the fluidic substrate is essentially plate-shaped, for example designed in the form of a layer. The fluid chamber is formed as a recess in the fluidic substrate, which is closed by the elastic membrane on the side adjacent to this membrane. The fluidic substrate is connected to the elastic membrane. The fluid chamber according to the invention is also referred to as a pumping chamber or reservoir. Opposite the fluidic substrate and separated therefrom, at least in the region of the pumping chamber, by an elastic membrane is the drive substrate, which is likewise connected to the elastic membrane. This results in a sandwich-like structure of the microfluidic component. The drive substrate may also be substantially plate-shaped.

The at least two actuation components may comprise in the drive substrate, for example, actuation chambers, which may be formed as recesses, which are closed by the elastic membrane on the side adjacent to this membrane. The Aktuierungskammern may for example be separated by webs. The webs are expediently designed as narrow as possible in relation to the Aktuierungskammern. According to the invention, the drive substrate can also be referred to as cover or cap of the microfluidic component. The Aktuierungskomponenten can according to the invention act directly or indirectly on the elastic membrane.

The elastic membrane according to the invention can be realized in particular as a continuous film-shaped film. In comparison with the use of several divided membranes, according to the invention the simplified elastic membrane results in a simplified production, improved mechanical strength and a lower risk of leaks. In the case of a microfluidic component designed and used as a peristaltic micropump, the elastic membrane is also referred to as a pumping membrane.

Important advantages of the microfluidic component according to the invention, in particular a microfluidic pump, are a higher possible pumping rate relative to the size and a minimized dead volume. The minimized dead volume can in particular also ensure the pumpability of gases and keep the required amounts of possibly expensive samples and reagents low.

The actuation of the actuation components used in the microfluidic component can be based, for example, on electromagnetic, piezoelectric based on electrical, hydraulic or pneumatic action principles. The corresponding actuation components and / or actuators used for this purpose usually have the advantage that they can be easily implemented and offer a strong drive. Other possible actuations according to the invention can also be based, for example, on electrostatic, electromagnetic, thermopneumatic or thermomechanical principles of action.

In one embodiment of the invention, the actuation components can comprise actuation chambers which can be subjected to a pneumatic or hydraulic pressure, for example via supply ducts.

Alternatively, thermopneumatically a pressure can be generated in the Aktuierungskammern, for example by heating a gas contained therein or evaporation of a liquid. If the pressure in the respective actuation chamber exceeds the pressure in the fluidic plane, the elastic membrane is deflected into the volume of the fluid chamber and the respective fluid, for example a liquid reagent, displaced. For example, by a Lauflichtartiges Aktuierungsmuster a directed fluid flow can be achieved. The component according to the invention can, in particular for controlling the actuation, furthermore a control device.

In an alternative embodiment of the invention, instead of the actuation chambers, the drive substrate may comprise integrated electromagnetic, electrostatic, piezoelectric and / or shape memory effect actuation components which may be independently actuated. Such actuators can act directly on the membrane and can optionally be produced simultaneously with the microfluidic component and advantageously allow a simplified miniaturization. In a further alternative embodiment, instead of the actuation chambers, the actuation substrate has an opening through which external electromagnetic, electrostatic, piezoelectric or shape memory effect actuators, if appropriate, can act on the membrane by means of a plunger.

Within the scope of an embodiment of the microfluidic component, the fluidic substrate and / or the drive substrate may be structured Polymer substrate, in particular of polycarbonate, polystyrene, polydimethylsiloxane or a cyclo-olefin copolymer, or designed as a glass or silicon substrate. In the manufacture of the substrates with the corresponding chambers, or recesses to be provided, made of polymers can be advantageously resorted to suitable and established methods such as hot stamping or injection molding. The preparation of polymers is usually also inexpensive. The recesses can also be subsequently formed for example by photolithography and etching or by milling in the substrates.

The fluidic substrate and the drive substrate can independently of one another have a layer thickness of 300 μm to 10 mm and / or a base area of 5 mm × 5 mm to 200 mm × 200 mm, for example of 15 mm × 30 mm. For example, the fluidic substrate and drive substrate may have the same footprint and terminate flush with each other.

The fluid chamber according to the invention, for example, a length L1 of

> 15 mm to <30 mm, for example 20 mm and / or have a width W of> 5 mm to <15 mm, for example 10 mm. According to the invention, the height of the fluid chamber T2 can be, in particular,> 100 μm to <1000 μm, for example 250 μm or 500 μm.

The Aktuierungskammern can, for example, a length L2 of> 3 mm to

<10 mm, for example 4 mm, 6 mm or 9 mm and / or a width W2 of

> 5 mm to <15 mm, for example 10 mm. The height of the Aktuierungskammer T1 according to the invention, in particular> 100 μιη to

<1000 μιη, for example, 250 μιη or 500 μιη amount.

The dimensioning of the fluidic substrate, the drive substrate, the fluid chambers and the actuation chambers, or the design and dimensioning of the actuation components and / or actuators can be adapted according to the invention to specific applications and is not limited to the values given above. In one embodiment of the microfluidic component, the elastic membrane can be designed as a polymer film, in particular with a thickness of> 0.01 μm to 200 μm, for example with a thickness of 100 μm. Depending on the choice of material and, if appropriate, the intended use, the desired and / or required loading capacity and elasticity, however, the elastic membrane may also be made thicker or thinner.

In an embodiment of the microfluidic component according to the invention, the elastic membrane may be formed from a thermoplastic, in particular weldable, polymer, in particular from a thermoplastic elastomer. By using a weldable polymer as an elastic membrane, this can advantageously, in addition to the pumping and displacement function for a fluid, simultaneously serve as connection and sealing of the layer structure according to the invention, for example three-layer structure. The use of a weldable polymer further allows easy connection of the substrates to the elastic membrane, for example by laser welding, ultrasonic welding or thermo-compression welding.

In principle, it is also possible according to the invention that the elastic membrane is formed from a non-thermoplastic elastomer. Examples of suitable elastomers are silicone elastomers, polyurethanes, rubbers such as polyacrylic rubber, styrene rubber, butadiene rubber or mixtures thereof. The connection to the fluidic substrate and the drive substrate in this case can be done, for example, by an adhesive technique, for example, a lamination.

In the context of a further embodiment of the invention, the fluid chamber may have rounded side walls. Advantageously, it has been found that the elastic membrane deflected downwards into the fluid chamber, for example the pumping membrane, can thereby better fit against the fluid chamber and the fluidic resistance in the actuated state is increased. As a result, a reflux of a fluid can advantageously be prevented and the pumping rate can be increased. In addition, the dead volume is reduced by the rounding.

In the context of a further embodiment of the invention, the fluid chamber may have phase conductors (phaseguides) arranged on its bottom. Phase conductors are capillary pressure barriers, for example, edges or other structures that act perpendicular to the direction of movement of a gas, such as air, liquid meniscus. The meniscus then aligns itself with the phase conductor and eventually overcomes the barrier given, for example, by edges. In this way, a controlled, bubble-free filling and emptying with liquids can be achieved. This is particularly advantageous when using the microfluidic component according to the invention as a reservoir for the pre-storage of liquid reagents, for example in a lab-on-chip system. Here, the phase conductors can allow even more accurate dimensioning and pre-storage of a defined amount of liquid, as well as the substantially residue-free controlled emptying of the reservoir.

When using the invention as a reservoir in a lab-on-chip system, the chamber in the fluidic substrate, for example, completely filled with a liquid reagent. Optionally located at the inlet and outlet of the main chamber valves with which the filled main chamber can be closed. The emptying of the reservoir can take place, for example, by first opening the valve at the outlet of the main chamber and then actuating the actuation chambers sequentially.

In a further embodiment of the method according to the invention, the fluidic substrate and / or the drive substrate may have further microfluidic structures and / or microfluidic components, for example chambers, mixers, valves. Hereby, the pumping or reservoir function of the microfluidic component can be further supported and / or the microfluidic component can simultaneously take on additional functions associated with the additional components. Advantageously, these additional structures and / or components can be made at least partially simultaneously with the pumping chamber or the actuation chambers.

The invention further relates to a method for producing a microfluidic component, in particular a microfluidic peristaltic pump. The fluidic substrate and the drive substrate can in particular be produced by microtechnological methods and provided for the further production of the microfluidic component. For example, as a plate-shaped or sheet-shaped fluidic substrate and / or as a driving substrate, a glass substrate, a silicon substrate, a printed circuit board substrate or a

Polymer substrate, in particular a pyrex substrate, a Teflon substrate, a polystyrene substrate, a polycarbonate substrate, a substrate of a cyclo-olefin copolymer, a polyester substrate or a PDMS substrate, or by injection molding or deep etching or embossing, in particular hot stamping, structured substrate, for example a structured glass substrate,

Silicon substrate or polymer substrate, in particular a pyrex substrate, a teflon substrate, a polystyrene substrate, a polycarbonate substrate, a substrate of a cyclo-olefin copolymer, a polyester substrate or a PDMS substrate.

The invention also relates to the use of a microfluidic component in a lab-on-chip system. In particular, the microfluidic component can be used as a peristaltic micropump. Furthermore, a microfluidic component according to the invention can be used in a lab-on-chip system as a reservoir for pre-storage, in particular of liquid reagents. The volume of the fluid chamber then forms the fluid reservoir. Advantageously, the microfluidic component according to the invention can therefore be used for the pre-storage and metering and / or for the transport of fluids, for example liquid reagents.

drawings

Further advantages and advantageous embodiments of the subject invention are illustrated by the drawings and explained in the following description. It should be noted that the figures have only descriptive character and are not intended to limit the invention in any way.

It shows:

1 is a schematic oblique plan view of an inventive microfluidic component, in particular a peristaltic pump, FIG. 2 shows a schematic plan view of the embodiment of the microfluidic component shown in FIG. 1, FIG.

3 shows a schematic cross-section along the line A-A 'through FIG. 1, FIG. 4 shows a simplified schematic plan view of a microfluidic component according to the invention,

5 shows a schematic cross section along the line B-B 'through FIG. 4, FIG. 6 shows a schematic plan view of an embodiment of a microfluidic reservoir according to the invention,

7 shows a schematic cross section along the line C-C through FIG. 6 embodiment of a microfluidic reservoir according to the invention, FIG.

FIG. 8 shows a simplified schematic plan view of a microfluidic component according to the invention with three actuation components, and FIG

Fig. 9 is a schematic cross-section along the line DD ^' through the embodiment shown in Fig. 7.

FIG. 1 shows a microfluidic component 1 according to the invention which has a fluidic substrate 2, a drive substrate 4 and an elastic membrane 3 sandwiched between these substrates. In this case, the fluidic substrate 2 adjoins the elastic membrane 3 and is connected to this area. The elastic membrane 3 is also referred to as pumping membrane according to the invention. The fluidic substrate 2 has on the side adjacent to the elastic membrane 3 side a recess 5, which is also referred to as a pumping chamber. In contrast to previous implementations of microfluidic peristaltic pumps, the at least two pumping chambers are combined to form a single main pumping chamber 5.

Advantageously, this results in a minimal fluidic resistance and an increased pumping rate. In addition, according to the invention, the dead volume can be minimized by the construction according to the invention with only one pumping chamber 5, in particular by the associated elimination of connecting channels between the pumping chambers. The driving substrate 4 also abuts and is connected to the elastic membrane 3. The drive substrate 4 has on its side adjacent to the elastic membrane 3 three recesses 6a, 6b, 6c, which are also referred to as Aktuierungskammern. The actuation chambers 6a, 6b, 6c which are arranged one behind the other in the flow direction are provided by webs

7a, 7b separated from each other and can be actuated independently become. In the embodiment shown, the actuation chambers are connected to supply channels 8a, 8b, 8c and can be acted on and actuated via inlet openings 9a, 9b, 9c in the drive substrate 4, for example with a hydraulic or pneumatic pressure by an external pressure device (not shown). Exceeds the pressure in the respective

Actuating chamber 6a, 6b, 6c, the pressure in the fluidic plane 2, the pumping membrane 3 is deflected into the volume of the pumping chamber 5 into and displaces the respective fluid. For example, by a Lauflichtartiges Aktuierungsmuster a directed fluid flow can be achieved. A fluid can be fed through an inlet 10a via a supply channel 1 1 a in the pumping chamber 5 and led out through an outlet 10b via a feed line 1 1 b from the pumping chamber, in particular be pumped out by the previously described actuation of Aktuierungskammern 6a, 6b, 6c , Further particularly suitable Aktuierungsmuster for a microfluidic peristaltic pump according to the invention with a fluid chamber 5 and three

Actuation chambers 6a, 6b, 6c are reproduced below in Examples 1 to 6.

FIG. 2 shows the microfluidic component 1 according to the invention shown in FIG. 1 in a schematic plan view of the drive substrate 4 with its

Inlet openings 9a, 9b, 9c, through which the three Aktuierungskammern 6a, 6b, 6c can be acted upon via the supply channels 8a, 8b, 8c with a pressure. FIG. 3 shows a schematic cross section along the line AA 'through the microfluidic component 1 according to the invention shown in FIG. 2. The height of the Aktuierungskammern 6 T1 according to the invention in particular> 100 μιη to <1000 μιη, for example, 250 μιη or 500 μιη, amount. Regardless, the fluid chamber 5 according to the invention a height T2 of> 100 μιη to <1000 μιη, for example, 250 μιη or 500 μιη have. FIG. 2 also shows that, in this embodiment, the actuation chamber 6b and the pumping chamber 5 terminate flush with one another in their lateral boundaries. The pumping chamber 5 has in this embodiment rounded side walls, whereby advantageously, deflected into the volume of the fluid chamber, elastic membrane, such as pumping membrane, can create better to the fluid chamber walls. This allows the fluidic Resistance can be increased in the actuated state and advantageously prevents backflow of a fluid and the pumping rate can be increased. In addition, the dead volume is reduced by the rounding of the side walls.

FIG. 4 shows a simplified schematic plan view of a microfluidic component 1, in particular a peristaltic pump. The fluidic substrate 2, the elastic membrane 3 and the drive substrate 4 are not shown in this illustration for the sake of clarity. FIG. 3 shows once again that according to the invention only one pumping chamber 5 is provided. As a result, it is advantageously possible to achieve a minimal fluidic resistance and a pumping rate which is increased in relation to the size. The pumping chamber 5 can be filled and emptied through the supply channels 1 1 a and 1 1 b. A fluid can be fed, for example through the channel 1 1 a in the pumping chamber 5, flow through them and leave through the channel 1 1 b the pumping chamber 5 again. The generation of a directed fluid flow can be effected by the controlled sequential actuation of the actuation chambers 6a, 6b, 6c. The actuation chambers 6a, 6b, 6c can be acted on and actuated via the supply channels 8a, 8b, 8c, for example, with a pneumatic or hydraulic pressure. The Aktuierungskammern 6a, 6b, 6c extend beyond the pumping chamber 5 in this embodiment laterally, perpendicular to the flow direction, and do not close, as shown in Figure 1, with the pumping chamber 5 flush.

Fig. 5 shows a schematic cross section along the line B-B 'of Fig. 3. In this figure, the fluidic substrate 2, the elastic membrane 3 and the driving substrate 4 are shown as a three-layer structure. The figure illustrates that only one pumping chamber 5 is arranged essential to the invention in the fluidic substrate, whereby a minimized dead volume is advantageously provided in comparison with the prior art. Through the supply channels 8a, 8b, 8c, the controlled sequential actuation of the Aktuierungskammern 6a, 6b, 6c, for example, pneumatic or hydraulic pressure.

6 shows a schematic plan view of an embodiment of a microfluidic component 1 according to the invention as a reservoir, as can be used, for example, for the preliminary storage of liquid reagents in a microfluidic lab-on-chip system. The fluid chamber 5 is used as storage volume, ie as a reservoir. The fluid chamber

5 may for example have a length L1 of> 15 mm to <30 mm, for example 20 mm, and / or a width W of> 5 mm to <15 mm, for example 10 mm. The height of the fluid chamber T2 according to the invention can be in particular> 100 μιη to <1000 μιη. The microfluidic component according to the invention

1 also has in this embodiment three Aktuierungskammern 6a, 6b and 6c, which can be acted upon independently via feed channels 8a, 8b and 8c, for example pneumatically or hydraulically, with a pressure. A pneumatic or hydraulic actuation can take place via external or internal pilot valves. The actuation chambers may, for example, have a length L2 of> 3 mm to <10 mm, for example 4 mm or 6 mm, and / or a width W of> 5 mm to <15 mm, for example 10 mm. The microfluidic component 1 according to the invention can furthermore have valves 14, 15 and 16. Through the inlet 10a liquid can be pumped through the reservoir 5 to a vent passage 17 and the reservoir 5 are thereby filled. In this case, the valve 15 is closed and the valves 14 and 16 are opened and the Aktuierungskammern 6a, 6b and 6c not actuated. The valves 14 and 16 can then be closed and the liquid in the reservoir is now "on chip." In order to release the liquid, the valve 15 can be opened while the valves 14 and 16 remain closed After that, the actuation chamber 6b, and finally the actuation chamber 6c, can be evacuated and the reservoir 5 can be basically and not only limited to this embodiment also two or more than three actuation chambers 6 in FIG microfluidic component 1. Advantageously, in such an embodiment according to the invention, an amount of liquid precisely defined in the volume can be measured and stored in advance The quantity of liquid provided can then be controlled, if necessary also in several defined S are discharged from the reservoir 5, without an external pump is needed. According to the invention, moreover, with two or more Aktuierungskammern

6 are prevented that, in particular in the corners of the reservoir 5, remain liquid residues. As a result, a more accurate dosage of

Fluids, for example in a lab-on-chip system, possible. FIG. 7 shows a schematic cross section along the line CC through FIG. 6 through the actuation chamber 6b and its supply channel 8b. The height of the Aktuierungskammern 6 T1 according to the invention in particular> 100 μιη to <1000 μιη, for example, 250 μιη or 500 μιη, amount. Independently of this, according to the invention, the fluid chamber 5 can also have a height T2 of> 100 μm to <1000 μm, for example 250 μm or 500 μm.

FIG. 8 shows a simplified schematic plan view of a microfluidic component 1, in particular a peristaltic pump, in which the

Actuating chambers are replaced by alternative Aktuierungskomponenten 18a, 18b, 18c. The actuation components 18a, 18b, 18c may, for example, comprise actuators which can act on the elastic membrane directly or via plungers. The actuators may be piezoelectric, electromagnetic, electrostatic or shape memory actuators in this embodiment, for example. The fluidic substrate 2, the elastic membrane 3 and the drive substrate 4 are not shown in this illustration for the sake of clarity. According to the invention, only one pumping chamber 5 is advantageously provided, which not only simplifies the production of the fluidic substrate, but also a minimal fluidic resistance and a pumping rate which is increased in relation to the size can be achieved. The pumping chamber 5 can through the channels 1 1 a and 1 1 b, or through the inlet 10 a, filled and emptied through the outlet 10b. A fluid can be fed, for example through the channel 1 1 a in the pumping chamber 5, flow through them and leave through the channel 1 1 b the pumping chamber 5 again. Directed fluid flow may be accomplished by the controlled sequential actuation of the actuation components 18a, 18b, 18c.

Fig. 9 shows a schematic cross section along the line D-D 'through Fig. 8. In this figure, the fluidic substrate 2, the elastic membrane 3 and the

Drive substrate 4 shown as a three-layer structure. By virtue of the main pumping chamber 5 arranged in the fluidic substrate, a minimized dead volume and a more exact and more precisely controllable function of the microfluidic component 1 are advantageously achieved in comparison with the prior art. The Aktuierungskomponenten are designed as a plunger, which in turn act directly on the elastic membrane 3. For example, by external actuators, the controlled sequential actuation of the plunger 18a, 18b, 18c done. The external actuators can be, for example, piezoelectric, electromagnetic, electrostatic or shape memory actuators.

Examples

The following Examples 1 to 6 give in tabular form particularly suitable Aktuierungsmuster a peristaltic pump according to the invention, as shown for example in Figure 1 again. The Aktuierungsmuster are independent of the type of Aktuierung and can for example be applied to an embodiment of the invention, as shown in Figures 8 and 9.

(X = actuation chamber actuated, O = not actuated)

example 1

Step Actuation Actuation chamber 1 chamber 2 chamber 3

1 0 0 0

2 X 0 0

3 X X 0

4 X X X

5 0 X X

6 0 0 X

Example 2

Step Actuation Actuation chamber 1 chamber 2 chamber 3

1 0 0 0

2 X 0 0

3 X X 0

4 0 X X

5 0 X X

6 0 0 X

Example 3

Step Actuation Actuation chamber 1 chamber 2 chamber 3

1 X 0 0

2 X X 0

3 X X X

4 0 X X

5 0 0 X Example 4

In summary, the invention provides a microfluidic component, in particular a peristaltic micropump, with an optimized design. Due to the design according to the invention, a minimum dead volume and, furthermore, a higher pumping rate relative to the size can be achieved. In particular, by virtue of the inventively minimized dead volume, by the provision of only one fluid chamber, in particular pumping chamber, the pumpability of gases can be ensured and the required amounts of sample material and reagents can be kept low.

Claims

claims

Microfluidic component (1), in particular a peristaltic micropump, at least comprising a layer structure comprising a fluidic substrate (2), a drive substrate (4) and an elastic membrane (3) arranged between them, characterized in that

The fluidic substrate (2) has a fluid chamber (5) on its side adjacent to the elastic membrane (3),

• the drive substrate (4), at least on its side adjacent to the elastic membrane (3), has at least two separate actuation components which are at least partially disposed opposite the fluid chamber (5) and can act on the elastic membrane (3) and

• the Aktuierungskomponenten, optionally by one or more actuators, can be independently actuated.

Microfluidic component (1) according to claim 1, characterized in that the Aktuierungskomponenten comprise actuation chambers (6), which in particular hydraulically, pneumatically and / or thermopneumatically be actuated.

Microfluidic component (1) according to one of claims 1 or 2, characterized in that the drive substrate (4) comprises electromagnetic, electrostatic and / or piezoelectric actuation components which can be actuated independently of each other and directly or by means of a plunger (18) on the elastic Membrane (3) can act.

Microfluidic component (1) according to one of claims 1 to 3, characterized in that the fluidic substrate (2) and / or the driving substrate (4) made of polycarbonate, polystyrene, a cyclo-olefin copolymer, polydimethyldisiloxane, glass or silicon are formed , Microfluidic component (1) according to one of claims 1 to 4, characterized in that the elastic membrane (3) is formed from a weldable, thermoplastic elastomer.

Microfluidic component (1) according to one of claims 1 to 5, characterized in that the fluid chamber (2) has rounded side walls.

Microfluidic component (1) according to one of claims 1 to 6, characterized in that the fluid chamber (2) has arranged on its bottom phase conductors.

Microfluidic component (1) according to one of the preceding claims 1 to 7, characterized in that the fluidic substrate (2) and / or the drive substrate (4) further microfluidic structures and / or microfluidic components.

Method for producing a microfluidic component (1), in particular a peristaltic micropump, according to one of Claims 1 to 8, comprising the following steps:

Providing a fluidic substrate (2) with a recess as a fluid chamber (5),

Providing an elastic membrane (3) arranged on the fluidic substrate (2),

Providing a drive substrate (4) arranged on the elastic membrane (3) and possibly on the fluidic substrate (2), comprising at least two actuation components which can be controlled independently of one another,

• Connecting the fluidic substrate (2) and the drive substrate (4) with the elastic membrane (3) to form a composite layer, wherein the Aktuierungskomponenten can act at least partially on the elastic membrane (3).

10. The method according to claim 9, characterized in that the fluidic substrate (2), the drive substrate (4) and the elastic membrane (3) by welding, in particular laser beam, ultrasonic or thermal welding, are interconnected.

1 1. Use of a microfluidic component (1) according to one of Claims 1 to 8 in a lab-on-chip system and / or for the preliminary storage and / or metering of reagents and / or for the transport of a fluid.